CN105548616B - Multifunctional composite support film for transmission electron microscopy - Google Patents
Multifunctional composite support film for transmission electron microscopy Download PDFInfo
- Publication number
- CN105548616B CN105548616B CN201511018326.8A CN201511018326A CN105548616B CN 105548616 B CN105548616 B CN 105548616B CN 201511018326 A CN201511018326 A CN 201511018326A CN 105548616 B CN105548616 B CN 105548616B
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- CN
- China
- Prior art keywords
- film
- support film
- deposited
- grid
- transmission electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004627 transmission electron microscopy Methods 0.000 title claims description 6
- 239000002131 composite material Substances 0.000 title claims 12
- 239000000463 material Substances 0.000 claims abstract description 40
- 230000005540 biological transmission Effects 0.000 claims abstract description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 25
- 229910052751 metal Inorganic materials 0.000 claims description 25
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 22
- 229910052799 carbon Inorganic materials 0.000 claims description 22
- 229910052759 nickel Inorganic materials 0.000 claims description 13
- 238000009415 formwork Methods 0.000 claims 4
- 150000001875 compounds Chemical class 0.000 abstract description 33
- 230000011218 segmentation Effects 0.000 abstract description 17
- 239000004615 ingredient Substances 0.000 abstract description 5
- 239000012528 membrane Substances 0.000 abstract description 5
- 238000000151 deposition Methods 0.000 description 10
- 239000000523 sample Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- CVOFKRWYWCSDMA-UHFFFAOYSA-N 2-chloro-n-(2,6-diethylphenyl)-n-(methoxymethyl)acetamide;2,6-dinitro-n,n-dipropyl-4-(trifluoromethyl)aniline Chemical compound CCC1=CC=CC(CC)=C1N(COC)C(=O)CCl.CCCN(CCC)C1=C([N+]([O-])=O)C=C(C(F)(F)F)C=C1[N+]([O-])=O CVOFKRWYWCSDMA-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229920001897 terpolymer Polymers 0.000 description 1
- 235000021419 vinegar Nutrition 0.000 description 1
- 239000000052 vinegar Substances 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/20—Sample handling devices or methods
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The multi-functional compound support film of transmission electron microscope belongs to microscope and supports technical field of membrane.The present invention is made of to solve existing transmission electron microscope and support film using a kind of material, when being detected in material containing ingredient identical with support film, it can not then detect whether really containing this kind of element in the material, it is even more impossible to determine the relative amount of the element.Its compound support film is dense non-porous type and with pass, which is spliced to form by the first half sections with the second half sections, or is segmented successively to splice by the first segmentation, the second segmentation and third and be formed；Described the first half sections and the second half sections of material is not identical, and the material of the first segmentation, the second segmentation and third segmentation is different, and the compound support film is deposited on the upper surface of grid to be deposited.The present invention supports film as a kind of microscope.
Description
Technical field
The present invention relates to the multi-functional compound support films of transmission electron microscope, belong to microscope and support technical field of membrane.
Background technique
What can be bought currently on the market is suitable for the support film of tem study micron, nano material, entirely
Portion is single type, that is, supports that film is made of a kind of material.Usually in metal such as copper, gold, nickel etc. or other materials
Grid on deposit one layer of carbon or metal object such as nickel film.The film is divided into dense non-porous and two types with holes.Some lifes
Production person is also between support film and metal grill or one layer of Formvar film is plated at the back side of metal grill.It is existing to support lacking for film
Point is can not then to detect in the material whether really contain this kind of member when in material containing ingredient identical with support film
Element, it is even more impossible to determine the relative amount of the element.
The support film grid of used in transmission electron microscope mostly diametrically 3 millimeters of flake, common are the hole of 200 mesh, 400 mesh.
Dense non-porous or porose carbon film, the nickel film etc. of single material can be deposited thereon.Fig. 5 is metal grill and deposits thereon porous
Carbon supports film front schematic view；Fig. 6 is its stereoscopic schematic diagram in kind.Due to supporting film more fragile, usually can redeposited one layer not
Nurse watt support membrane.Formvar support membrane can also divide with film is supported in the two sides of metal grill between film and metal grill.
Fig. 7 is metal grill and depositing carbon film cross-sectional view, Fig. 8 are to be sequentially depositing Fu Mu in order on metal grill single side thereon
The cross-sectional view of watt film and carbon film, Fig. 9 are the two-sided cross section signals for depositing Formvar film and carbon film respectively of metal grill
Figure.
The Formvar, English are Formvar, refer to the one of polyvinyl formal and chlorine vinegar polyvinyl alcohol terpolymer
Series of products.
Summary of the invention
The invention aims to solve existing transmission electron microscope film is supported to be made of a kind of material, when detected
When in material containing ingredient identical with support film, then can not detect in the material whether really contain this kind of element, it is even more impossible to
The problem of determining the relative amount of the element provides a kind of multi-functional compound support film of transmission electron microscope.
The multi-functional compound support film of transmission electron microscope of the present invention, it includes grid to be deposited, it further includes
Compound support film, the compound support film are dense non-porous type and with pass, and the compound support film is by the first half sections and the second half sections
It is spliced to form, or successively splicing forms by the first segmentation, the second segmentation and third segmentation；Described the first half sections and the second half sections
Material it is not identical, first segmentation, second segmentation and third segmentation material it is different；
The compound support film is deposited on the upper surface of grid to be deposited.
It further includes Formvar film, and the Formvar film is between compound support film and grid to be deposited.
It further includes Formvar film, and Formvar film is deposited on the lower surface of grid to be deposited.
Compound support film is spliced to form by the first half sections with the second half sections, and the first half sections are carbon film, and the second half sections are nickel film.
The grid to be deposited is metal grill.
Advantages of the present invention: the present invention deposits the compound of upper two kinds, three kinds or a variety of unlike materials on a piece of grid
Film is supported, so that can detect to the sample material of different analyses to be detected, when the sample material of analysis to be detected and multiple
It closes when supporting that a certain ingredient is identical in film, then the splicing fragment position that other ingredients can be used is detected, and user need not be prior
The single support film of a large amount of unlike material is purchased, especially in the case where not knowing the material composition of material to be detected, no
It must replace and film is supported to prepare transmission electron microscope sample again.Both it was convenient to use, and improved Efficiency, and reduce taking for user
With.
Detailed description of the invention
Fig. 1 is the multi-functional compound schematic perspective view for supporting film of transmission electron microscope of the present invention；In figure
Compound support film is combined by half diaphragm of two kinds of materials；
Fig. 2 is grid to be deposited and the compound schematic cross-section for supporting film；Half section of the compound left side for supporting film and right half in figure
Section is made of two different materials respectively；
Fig. 3 is grid to be deposited, the compound schematic cross-section for supporting film and Formvar film, Formvar film and compound support film
Positioned at the same surface of grid to be deposited；Half section of half section of the compound left side for supporting film and the right side are respectively by two different material systems in figure
At；
Fig. 4 is grid to be deposited, the compound schematic cross-section for supporting film and Formvar film, Formvar film and compound support
Film is located at the both side surface of grid to be deposited；Half section of half section of the compound left side for supporting film and the right side are respectively by two different materials in figure
It is made；
Fig. 5 is that metal grill and the porous carbon deposited thereon support film front schematic view；
Fig. 6 is that metal grill and the porous carbon deposited thereon support film material object perspective view；
Fig. 7 is metal grill and depositing carbon film cross-sectional view thereon；
Fig. 8 is the cross-sectional view for being sequentially depositing Formvar film and carbon film on metal grill single side in order；
Fig. 9 is the two-sided cross-sectional view for depositing Formvar film and carbon film respectively of metal grill.
Specific embodiment
Specific embodiment 1: illustrating present embodiment, transmitted electron described in present embodiment below with reference to Fig. 1 to Fig. 2
The multi-functional compound support film of microscope, it includes grid 1 to be deposited, it further includes compound support film 2, the compound support film 2
For dense non-porous type and with pass, which is spliced to form by the first half sections with the second half sections, or by first point
Successively splicing forms for section, the second segmentation and third segmentation；Described the first half sections and the second half sections of material is not identical, and first point
The material of section, the second segmentation and third segmentation is different；
The compound support film 2 is deposited on the upper surface of grid 1 to be deposited.
Material is uniform in above-mentioned each segmentation；Each segmentation can be the equal part on area, also can non-equal part.
Specific embodiment 2: illustrating that present embodiment, present embodiment make into one embodiment one below with reference to Fig. 3
Step explanation, it further includes Formvar film 3, and the Formvar film 3 is between compound support film 2 and grid to be deposited 1.
Specific embodiment 3: illustrating that present embodiment, present embodiment make into one embodiment one below with reference to Fig. 4
Step explanation, it further includes Formvar film 3, and Formvar film 3 is deposited on the lower surface of grid 1 to be deposited.
Specific embodiment 4: present embodiment is described further embodiment one, two or three, compound support film 2
It is spliced to form by the first half sections with the second half sections, the first half sections are carbon film, and the second half sections are nickel film.
Described the first half sections may be selected to be carbon film or other material films, and the second half sections may be selected to be nickel film or other materials
Film.
Specific embodiment 5: present embodiment is described further embodiment one, two, three or four, it is described to heavy
Product grid 1 is metal grill.
The grid to be deposited 1 can be used conductive and heat-conductive material and be made.
The present invention is going up two or more not with deposition on a piece of metal grill or the grid of other conductive and heat-conductive materials
The compound support film of same material.Support membrane material is carbon, nickel or other materials；Film thickness and the number of plies is supported not to limit；Support film
To have hole or non-porous form: the size and shape in hole does not limit.The supporter for supporting film is mostly Formvar, can in film and
Between metal grill, also the two sides of metal grill can be respectively in film is supported；Grid uses metal or other conductive and heat-conductive materials,
Thickness is indefinite；Grid hole is 100 mesh, 200 mesh, 400 mesh or other suitable sizes.
In Fig. 1, carbon and nickel respectively account for half on the compound area for supporting film；In Fig. 2 it is compound support film area on carbon and nickel
Respectively account for half；It is sequentially depositing Formvar film in order on metal grill single side in Fig. 3 and respectively accounts for the carbon film and nickel film of a semi-area；
Metal grill is two-sided in Fig. 4 deposits Formvar film respectively and respectively accounts for the carbon film and nickel film of a semi-area.
The present invention can cover the half of grid, and the first material is deposited in unlapped half in production in advance
The support film of matter, such as carbon film；Then the half for being deposited with carbon film is covered, exposes undeposited other half, and deposit
The support film of second of material, such as nickel film.When mass production, 3.1 millimeters of diameter can be processed on a bulk of plate in advance,
Thick 0.5 millimeter of round pool, these round pools are convenient for regularly covering protection and depositing operation at the two-dimensional arrangements of rule.It thereafter, will be outer
Purchase or homemade about 3 millimeters of outer diameter of grid is individually filled in these shallow holes, and the grid is metal or other conductions
Heat Conduction Material.Special cover board is designed, the half of all grids is once covered, deposits the support film of the first material；Then it moves
Dynamic cover board, protects deposited part, leaks out new Partial Mesh, deposits the support film of second of material.
The depositing operation of the support film of three kinds or various material can refer to above scheme formulation.
The present invention is suitable for micrology, and electron micrology, especially transmission electron microscopy and its periphery sample prepare skill
Art.
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511018326.8A CN105548616B (en) | 2015-12-29 | 2015-12-29 | Multifunctional composite support film for transmission electron microscopy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511018326.8A CN105548616B (en) | 2015-12-29 | 2015-12-29 | Multifunctional composite support film for transmission electron microscopy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105548616A CN105548616A (en) | 2016-05-04 |
| CN105548616B true CN105548616B (en) | 2019-02-19 |
Family
ID=55827940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511018326.8A Expired - Fee Related CN105548616B (en) | 2015-12-29 | 2015-12-29 | Multifunctional composite support film for transmission electron microscopy |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105548616B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106990265A (en) * | 2017-04-02 | 2017-07-28 | 浙江大学 | A kind of carbon-based transmission electron microscope sample contained network and preparation method thereof |
| CN110739196B (en) * | 2019-09-17 | 2021-11-12 | 东南大学 | Transmission electron microscope grid capable of being produced in batches and preparation method thereof |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10211977A1 (en) * | 2002-03-18 | 2003-10-02 | Leo Elektronenmikroskopie Gmbh | scanning Electron Microscope |
| CN100587458C (en) * | 2008-01-25 | 2010-02-03 | 北京工业大学 | Nanomaterial Stress Test Grid for Transmission Electron Microscopy |
| CN102148124B (en) * | 2010-02-08 | 2013-04-24 | 北京富纳特创新科技有限公司 | Micro-grid of transmission electron microscope |
| CN102269772A (en) * | 2010-06-04 | 2011-12-07 | 中芯国际集成电路制造(上海)有限公司 | Preparation method of nano-particles floating gate transmission electron microscope observation sample |
| CN102661882A (en) * | 2012-04-17 | 2012-09-12 | 刘遵峰 | Affinity-based separation transmission electron microscope supporting film based on one-dimensional carbon nanomaterial |
| US8884247B2 (en) * | 2012-09-25 | 2014-11-11 | Fei Company | System and method for ex situ analysis of a substrate |
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2015
- 2015-12-29 CN CN201511018326.8A patent/CN105548616B/en not_active Expired - Fee Related
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| CN105548616A (en) | 2016-05-04 |
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Granted publication date: 20190219 Termination date: 20201229 |
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