CN105510280B - A device and method for measuring reflectivity using laser supercontinuum radiation - Google Patents
A device and method for measuring reflectivity using laser supercontinuum radiation Download PDFInfo
- Publication number
- CN105510280B CN105510280B CN201510827722.9A CN201510827722A CN105510280B CN 105510280 B CN105510280 B CN 105510280B CN 201510827722 A CN201510827722 A CN 201510827722A CN 105510280 B CN105510280 B CN 105510280B
- Authority
- CN
- China
- Prior art keywords
- laser
- continuous radiation
- super continuous
- measurement
- femto
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 46
- 238000002310 reflectometry Methods 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 title abstract description 20
- 238000005259 measurement Methods 0.000 claims abstract description 30
- 238000001514 detection method Methods 0.000 claims abstract description 20
- 230000003287 optical effect Effects 0.000 claims abstract description 18
- 230000003595 spectral effect Effects 0.000 claims abstract description 17
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 6
- 101000694017 Homo sapiens Sodium channel protein type 5 subunit alpha Proteins 0.000 claims description 5
- 230000010355 oscillation Effects 0.000 claims description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000001228 spectrum Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 235000019441 ethanol Nutrition 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 241001062009 Indigofera Species 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 239000010437 gem Substances 0.000 claims 1
- 229910001751 gemstone Inorganic materials 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 15
- 238000000180 cavity ring-down spectroscopy Methods 0.000 abstract description 12
- 238000011161 development Methods 0.000 abstract description 3
- 238000000862 absorption spectrum Methods 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000011017 operating method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention belongs to high reflection rate measurement technical fields, combine folded form cavity ring down spectroscopy technology and the super continuous radiation generation technology of femtosecond laser, it is a kind of device and method of measurement reflectivity for surpassing continuous radiation using laser, its composition includes: femto-second laser, super continuous radiation generation system, detection system and spectral collection system, the reflectance curve in dozens to hundreds of nanometer wavelength range can disposably be obtained, the scanning of wavelength dimension is not needed to do, the pattern match necessary to carrying out traditional CRDS between light source and optical cavity is not needed yet, albedo measurement process is greatly simplified while guaranteeing albedo measurement precision.The configuration of the present invention is simple, can flexible arrangement, tremendous development will be obtained in the albedo measurement field of high reflection mirror.
Description
Technical field
The present invention relates to a kind of device and method of measurement reflectivity for surpassing continuous radiation using laser, belong to high reflectance
Field of measuring technique.
Background technique
With the development of optical coating technology, the reflecting mirror with high reflectivity astronomical observation, superpower laser,
The military and civilians such as laser spectrum tech field has been more and more widely used, and traditional albedo measurement technology is remote
It is far unable to satisfy requirement, cavity ring down spectroscopy technology is considered as currently the only one kind can be with the high reflectivity of precise measurement
Method.Cavity ring down spectroscopy technology (Cavity Ring-Down Spectroscopy, CRDS) is a kind of with high sensitive
The absorption spectrum detection technology of the features such as degree, high-precision, high s/n ratio.Its basic physical thought is: using a pair of by high anti-
The optical cavity that mirror is constituted makes incident laser at light intracavity round trip thousands of to tens of thousands of times, iterates through test substance, increase as much as possible
Light path is absorbed to improve detectivity, records output signal using with time-resolved detector, signal is fitted
Analyze and finally obtain the absorption spectrum of absorbing medium to be measured in optical cavity.The core optical element of the technology, which is one, has high Q
The optical cavity of value is usually made of a pair of focusing mirror with high reflectivity, and light can be thousands of in light intracavity round trip
Rice even several myriametres, so long absorption light path is that other absorption spectrum detection technologies cannot compare.In addition, this technology
More obvious advantage is that it measured is the time attenuation rate of output optical signal, with incident or output light absolute intensity without
It closes, so measurement result is not also just influenced by light source stability.In addition, this technology belongs to self-reference to the measurement of absorption spectrum
Measurement, does not need to carry out additional calibration.With the development of CRDS technology, people gradually recognize its existing some shortcomings,
Carry out the research for using wideband light source to input light source as it, and the cavity mirrors reflectivity of optical cavity has been measured, but it is existing
Some research only measures the reflectivity of hysteroscope, and the spectral power of the wideband light source used is very low, does not have also so far
Have the reflectivity of high reflective mirror is measured work [G. Schmidl, W. Paa, W. Triebel, S. Schippel,
and H. Heyer, Spectrally resolved cavity ring down measurement of high
reflectivity mirrors using a supercontinuum laser source, App. Opt. 48, 6754-
6759 (2009)]。
Light source of the super continuous radiation of laser as cavity ring down spectroscopy technology is taken in present invention proposition, is carried out using refrative cavity
The measurement of high reflectance, the signal within the scope of broadband can reach detector simultaneously, to disposably obtain dozens to hundreds of
Reflectance curve in nanometer wavelength range.The scanning for not needing to do wavelength dimension does not need to carry out traditional CRDS institute necessary yet
Light source and optical cavity between pattern match, keep albedo measurement process significantly simple while guaranteeing albedo measurement precision
Change.
Summary of the invention
In order to solve the high reflectivity of precise measurement, can disposably obtain the reflection in dozens to hundreds of nanometer wavelength range
The problem of rate curve, the present invention provides a kind of device and method of measurement reflectivity for surpassing continuous radiation using laser.This hair
A kind of device and method of bright measurement reflectivity for surpassing continuous radiation using laser, including femto-second laser 1, super continuous radiation
Generation system 2, detection system 3 and spectral collection system 4；Wherein, femto-second laser 1 is connected with super continuous radiation generation system 2
It connects；Super continuous radiation generation system 2 is connected with detection system 3；Detection system 3 is connected with spectral collection system 4；It is super continuous
Radiating generation system 2 is made of condenser lens 5, optical medium 6, collimation lens 7, and detection system 3 is by filter plate 8, folds
Hysteroscope 9 I, high reflective mirror to be measured 10 fold hysteroscope 9 II, the composition of collecting lens 11；Spectral collection system 4 is by being coupled with ICCD
Spectrometer 12, computer 13 are constituted.
Femto-second laser 1 is using central wavelength 800nm, pulsewidth 50fs, pulse energy 3.6mJ, repetition rate
The titanium-doped sapphire fs-laser system of 1000Hz, the femto-second laser pulse generated are poly- by super continuous radiation generation system 2(
Focus lens 5, optical medium 6, collimation lens 7), generate super continuous radiation；
Generated super continuous radiation passes through detection system 3(filter plate 8, folding hysteroscope 9 I, high reflective mirror to be measured 10, folding
Hysteroscope 9 II, collecting lens 11), oscillation is formed in refrative cavity, the angle of refrative cavity is any, passes through spectral collection system 4(coupling
Closing has spectrometer 12, the computer 13 of ICCD) collection that carries out signal, it obtains declining and swings curve；
Change the hysteroscope that different-waveband is directed in refrative cavity；
Change the high reflective mirror to be measured (speculum, deielectric-coating high reflective mirror etc.) in refrative cavity；
The operating process is as shown in Figure 5.In conjunction with hardware operation process and illustrate that operating procedure of the invention is as follows:
Step 14 is executed, is started, device inspection；Check normal, execution step 15；
Step 15 is executed, femto-second laser 1 is opened, generates femto-second laser pulse；
Step 16 is executed, by adjusting super continuous radiation generation system 2, generates super continuous radiation；
Step 17 is executed, by adjusting detection system 3, adjusts and folds hysteroscope 9 I, high reflective mirror to be measured 10, folds hysteroscope 9 II
Posture, stable oscillation stationary vibration is formed in refrative cavity；
Step 18 is executed, after collecting lens 11, spectral collection system 4 receives signal, is counted using computer 13
According to；
Step 19 is executed, is terminated.
The utility model has the advantages that present invention incorporates folded form cavity ring down spectroscopy technologies and the super continuous radiation of femtosecond laser to generate skill
Art surpasses measurement of the continuous radiation as the light source progress high reflectance of folded form cavity ring down spectroscopy technology using laser.This hair
A kind of device and method of bright measurement reflectivity for surpassing continuous radiation using laser are easy to operate, can disposably obtain tens and arrive
Reflectance curve in nanometer wavelength ranges up to a hundred, does not need the scanning for doing wavelength dimension, does not need to carry out traditional CRDS institute yet
Pattern match between necessary light source and optical cavity makes albedo measurement process significantly while guaranteeing albedo measurement precision
Simplify.It can be applied to the high reflection mirror in the military and civilians fields such as superpower laser, laser spectrum tech, plated film processing
Albedo measurement.
Detailed description of the invention
Fig. 1 is a kind of schematic block diagram of the device and method for the measurement reflectivity for surpassing continuous radiation using laser of the present invention；
Fig. 2 is the super continuous radiation generation system structure chart of the present invention；
Fig. 3 is detection system structure chart of the present invention；
Fig. 4 is spectral collection system construction drawing of the present invention；
Fig. 5 is a kind of flow chart of the device and method for the measurement reflectivity for surpassing continuous radiation using laser of the present invention；
Fig. 6 is the reflectance curve of the silver mirror drawn under apparatus of the present invention and method in 400-450nm wave band.
Specific embodiment
Embodiment 1
A kind of device and method of measurement reflectivity for surpassing continuous radiation using laser of the present invention comprising femtosecond laser
Device 1, Supercontinuum source generation system 2, detection system 3 and spectral collection system 4；Wherein, femto-second laser 1 and super continuous radiation
Generation system 2 is connected；Super continuous radiation generation system 2 is connected with detection system 3；Detection system 3 and spectral collection system
It is connected；Super continuous radiation generation system 2 is made of condenser lens 5, optical medium 6, collimation lens 7, detection system 3 be by
Filter plate 8 folds hysteroscope 9 I, high reflective mirror to be measured 10, folds hysteroscope 9 II, the composition of collecting lens 11；Spectral collection system 4 be by
It is coupled with the spectrometer 12 of ICCD, computer 13 is constituted；
Femto-second laser 1 is using central wavelength 800nm, pulsewidth 50fs, pulse energy 3.6mJ, repetition rate
The titanium-doped sapphire fs-laser system of 1000Hz, the femto-second laser pulse generated are poly- by super continuous radiation generation system 2(
Focus lens 5, optical medium 6, collimation lens 7), wherein optical medium 6 is quartz, generates super continuous radiation；
Generated super continuous radiation passes through detection system 3(filter plate 8, folding hysteroscope 9 I, high reflective mirror to be measured 10, folding
Hysteroscope 9 II, collecting lens 11), oscillation is formed in refrative cavity, refrative cavity angle is 90 degree, wherein using the chamber of 750-790nm
Mirror, high reflective mirror 10 to be measured are aluminium mirror, and spectrometer 12, the computer 13 of ICCD are coupled with by spectral collection system 4() it carries out thoroughly
The collection for penetrating spectrum obtains declining and swings curve；
The operating process is as shown in Figure 5.In conjunction with hardware operation process and illustrate that operating procedure of the invention is as follows:
Step 14 is executed, is started, self-check of device；Self-test is normal, executes step 15；
Step 15 is executed, femto-second laser 1, the femto-second laser pulse of generation are opened；
Step 16 is executed, by adjusting super continuous radiation generation system 2, generates super continuous radiation；
Step 17 is executed, by adjusting detection system 3, adjusts and folds hysteroscope 9 I, high reflective mirror to be measured 10, folds hysteroscope 9 II
Posture, stable oscillation stationary vibration is formed in refrative cavity；
Step 18 is executed, after collecting lens 11, spectral collection system 4 receives signal, is counted using computer 13
According to；
Step 19 is executed, is terminated.
Embodiment 2
Optical medium is changed to water, methanol, ethyl alcohol respectively, remaining is the same as embodiment 1.
Embodiment 3
Hysteroscope is changed to 600-700nm wave band, remaining is the same as embodiment 1.
Embodiment 4
Incident laser is changed to 400nm after entering bbo crystal frequency multiplication, and hysteroscope is changed to 350-450nm wave band, remaining is the same as implementation
Example 1.
Embodiment 5
High reflective mirror to be measured is changed to silver mirror, and each wave band total reflection mirror, remaining is the same as embodiment 1.
Embodiment 6
By refrative cavity angle consecutive variations, remaining is the same as embodiment 1.
Claims (4)
1. a kind of device for the measurement reflectivity for being surpassed continuous radiation using laser, including femto-second laser (1), super continuous radiation are produced
Raw system (2), detection system (3) and spectral collection system (4)；Wherein, femto-second laser (1) and super continuous radiation generation system
(2) it is connected；Super continuous radiation generation system (2) is connected with detection system (3)；Detection system (3) and spectral collection system
(4) it is connected；Super continuous radiation generation system (2) is made of condenser lens (5), optical medium (6), collimation lens (7), is visited
Examining system (3) is to fold hysteroscope (9 I) by filter plate (8), first, high reflective mirror to be measured (10), the second folding hysteroscope (9 II), collect
Lens (11) are constituted；The high reflective mirror to be measured (10) is located in refrative cavity；Spectral collection system (4) is the light by being coupled with ICCD
Spectrometer (12), computer (13) are constituted；
Femto-second laser (1) is using central wavelength 800nm, pulsewidth 50fs, pulse energy 3.6mJ, repetition rate 1000Hz
Titanium-doped sapphire fs-laser system；
Femto-second laser pulse generates super continuous radiation by super continuous radiation generation system (2)；
Generated super continuous radiation adjusts the posture for folding hysteroscope and high reflective mirror to be measured, in refrative cavity by detection system (3)
In form oscillation, the angle of refrative cavity is any；
The collection that transmitted spectrum is carried out by spectral collection system (4), obtains declining and swings curve；Nanometer waves up to a hundred can disposably be obtained
Reflectivity in long range.
2. the device of the measurement reflectivity according to claim 1 for surpassing continuous radiation using laser, it is characterised in that: femtosecond
Laser (1) using central wavelength 800nm, pulsewidth 50fs, pulse energy 3.6mJ, repetition rate 1000Hz mix titanium indigo plant
Jewel fs-laser system generates the super continuous radiation in broadband by adjusting super continuous radiation generation system (2).
3. the device of the measurement reflectivity according to claim 1 for surpassing continuous radiation using laser, it is characterised in that use
Optical medium (6) include vitreous silica, crystal, water, methanol, ethyl alcohol or optical fiber, for generating super continuous radiation.
4. the device of the measurement reflectivity according to claim 1 for surpassing continuous radiation using laser, it is characterised in that the dress
Setting measurable high reflective mirror includes speculum, deielectric-coating reflecting mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510827722.9A CN105510280B (en) | 2015-11-25 | 2015-11-25 | A device and method for measuring reflectivity using laser supercontinuum radiation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510827722.9A CN105510280B (en) | 2015-11-25 | 2015-11-25 | A device and method for measuring reflectivity using laser supercontinuum radiation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105510280A CN105510280A (en) | 2016-04-20 |
| CN105510280B true CN105510280B (en) | 2019-04-23 |
Family
ID=55718417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510827722.9A Expired - Fee Related CN105510280B (en) | 2015-11-25 | 2015-11-25 | A device and method for measuring reflectivity using laser supercontinuum radiation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105510280B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112290358B (en) * | 2020-09-21 | 2022-06-24 | 山东师范大学 | Device and method for generating supercontinuum radiation with adjustable spectral peak |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1242516A (en) * | 1998-07-16 | 2000-01-26 | 中国科学院大连化学物理研究所 | Method of measuring high specular reflectivity of reflector |
| GB0302174D0 (en) * | 2003-01-30 | 2003-03-05 | Shaw Andrew M | Sensing apparatus and methods |
| CN101261182B (en) * | 2008-03-26 | 2010-06-23 | 中国科学院光电技术研究所 | High Reflectivity Measurement Method Based on Frequency Selective Optical Feedback Optical Cavity Ring-Down Technology |
| CN102053007B (en) * | 2009-10-29 | 2012-09-05 | 龙兴武 | Absolute measuring method for intramembranous loss parameter of high-reflectivity membrane |
-
2015
- 2015-11-25 CN CN201510827722.9A patent/CN105510280B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN105510280A (en) | 2016-04-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101551273B (en) | A system for automatically measuring the spectral characteristics of samples in the terahertz band | |
| CN104501954B (en) | The spectral characteristic tester of technology is measured based on impulsive synchronization | |
| CN100438237C (en) | Broad band TH2 light generator | |
| CN105699317A (en) | Terahertz time-domain spectrograph capable of entering at fixed angle and simultaneously detecting transmission and reflection | |
| CN105891144A (en) | Terahertz scanning system and method | |
| CN107063456B (en) | Time resolution diffraction efficiency of grating spectral measurement device in situ and method | |
| CN201518048U (en) | T-Hz frequency spectrograph based on T-hertzian wave parameter process | |
| CN108680255A (en) | Window transient state absorption spectrometer when a kind of ultrahigh time resolution overlength | |
| CN106872402A (en) | Gas-detecting device and method based on super continuous spectrums laser | |
| CN106872415A (en) | With reference to the measurement apparatus and measuring method of the multi-wavelength sample optical limiting properties of micro-imaging | |
| CN109406453A (en) | A kind of improved Z scanning survey method | |
| CN111220572A (en) | Nonlinear optical pumping detection device | |
| CN108489931A (en) | A kind of device and method for improving Terahertz parametric oscillation source and measuring stability | |
| CN105203222A (en) | Device for measuring temperature of flame through one-dimensional scanning on basis of Fresnel lens and CARS | |
| CN118111561A (en) | Mid-infrared single-photon time domain stretching spectrum method and device | |
| CN107655832B (en) | Femtosecond two-dimensional infrared spectrum acquisition method and system based on chirp upconversion | |
| CN111220573A (en) | Nonlinear optical absorption cross section measuring method | |
| CN105510280B (en) | A device and method for measuring reflectivity using laser supercontinuum radiation | |
| CN105181155A (en) | Terahertz pulse single-time detection system and detection method based on single-mode fiber | |
| CN104237164B (en) | Measurement apparatus and method of the nonlinear optical crystal in terahertz wave band refractive index | |
| CN114199813B (en) | A terahertz on-chip integrated chip and its control method, and on-chip integrated system | |
| CN106840391A (en) | Broadband, large range laser power meter calibrating installation | |
| CN115356279A (en) | Intermediate infrared single photon spectrum detection method based on time stretching time-frequency correlation | |
| CN106404695B (en) | Spectrophotometer | |
| CN211927689U (en) | A spectral detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Hao Zuoqiang Inventor after: Zhang Lanzhi Inventor after: Song He Inventor after: Li Dongwei Inventor after: Lin Jingquan Inventor before: Song He Inventor before: Zhang Lanzhi Inventor before: Hao Zuoqiang Inventor before: Li Dongwei Inventor before: Lin Jingquan |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190423 Termination date: 20191125 |