CN105466626B - Diaphragm pressure sensor and its manufacturing method - Google Patents
Diaphragm pressure sensor and its manufacturing method Download PDFInfo
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- CN105466626B CN105466626B CN201510915107.3A CN201510915107A CN105466626B CN 105466626 B CN105466626 B CN 105466626B CN 201510915107 A CN201510915107 A CN 201510915107A CN 105466626 B CN105466626 B CN 105466626B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 238000007789 sealing Methods 0.000 claims abstract description 45
- 239000010409 thin film Substances 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims description 11
- 229910001220 stainless steel Inorganic materials 0.000 claims description 8
- 239000010935 stainless steel Substances 0.000 claims description 8
- 229920002545 silicone oil Polymers 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 claims 1
- 230000035939 shock Effects 0.000 abstract description 3
- 238000012546 transfer Methods 0.000 abstract description 3
- 230000001939 inductive effect Effects 0.000 abstract 1
- 230000003139 buffering effect Effects 0.000 description 38
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 16
- 230000001052 transient effect Effects 0.000 description 11
- 230000008569 process Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000036757 core body temperature Effects 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
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- 230000003321 amplification Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
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- 238000002360 preparation method Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
本发明公开了一种薄膜压力传感器及其制造方法，薄膜压力传感器包括基座和敏感芯体，基座内设有引压孔，基座和敏感芯体之间还设有用于传递介质压力且阻隔介质温度传递的缓冲组件。制造方法包括以下步骤：S1：按从下到上将基座、密封膜片、带通孔的缓冲主体和敏感芯体固定连接，敏感芯体和密封膜片将通孔围成密封腔；S2：将温度缓冲介质通过引质孔注入密封腔内，并用密封件密封引质孔；S3：对敏感芯体进行引线，得到薄膜压力传感器。该薄膜压力传感器具有受介质温度影响小、耐瞬时温度冲击等优点。
The invention discloses a thin-film pressure sensor and a manufacturing method thereof. The thin-film pressure sensor comprises a base and a sensitive core. The base is provided with a pressure-inducing hole, and between the base and the sensitive core, a Buffer components that block the transfer of medium temperature. The manufacturing method includes the following steps: S1: the base, the sealing diaphragm, the buffer body with the through hole and the sensitive core are fixedly connected from bottom to top, and the sensitive core and the sealing diaphragm enclose the through hole to form a sealing cavity; S2 : inject the temperature buffer medium into the sealed cavity through the mass introduction hole, and seal the mass introduction hole with a seal; S3: lead the sensitive core to obtain a thin film pressure sensor. The thin film pressure sensor has the advantages of less influence by medium temperature and resistance to instantaneous temperature shock.
Description
Technical field
The invention belongs to art of pressure sensors more particularly to a kind of diaphragm pressure sensor and its manufacturing methods.
Background technique
The sensitive core body of diaphragm pressure sensor is fabricated using modern age thin film technique, i.e., using magnetic control technology or
Insulating materials, resistance material are deposited on elastic stainless steel diaphragm by ion beam sputtering technology with molecular forms, stainless in elasticity
Steel diaphragm surface forms the insulation film and resistive material film of molecular linkage, and combines together with elastic stainless steel diaphragm.
Using photoetching, resistance trimming, the processes such as temperature-compensating process film, form secured and stable resistance bridge, i.e., complete
At the preparation of sensitive core body.When measured medium pressure acts on pressure sensitive core, resistance bridge can be generated and be pressed
The weak voltage output signal of force signal linear change.It is aided with the Electric signal processing structure for adjusting the amplification of this signal and other knots
Structure is just constituted applied to the diaphragm pressure transducers in every field.
It matches and is integrally formed well due to having between resistance bridge and elastic stainless steel diaphragm, any glue may be not present
Stick, so diaphragm pressure sensor shows high reliability and long-time stability than adhesive type strain-ga(u)ge transducer.Elasticity
The material of stainless steel diaphragm generally selects 17-4PH elastic stainless steel, can directly contact with general corrosive media.Therefore, thin
Membrane pressure sensor can be used for the pressure measurement and control of corrosive media, there is very wide application range.
However applicant has found in the use process to existing diaphragm pressure sensor, when tested pressure medium temperature is inclined
When from room temperature, pressure measuring value is often and actual value is there are deviation, and tested pressure medium temperature more deviates room temperature, which gets over
Greatly.And the ability of the existing resistance to transient temperature impact of diaphragm pressure sensor is limited, and TRANSIENT HIGH TEMPERATURE or instantaneous low temperature may
Damage sensitive core body.
Summary of the invention
The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art, provide it is a kind of by medium temperature influenced it is small,
The diaphragm pressure sensor and its manufacturing method of resistance to transient temperature impact.
In order to solve the above technical problems, the invention adopts the following technical scheme:
A kind of diaphragm pressure sensor, including pedestal and sensitive core body, are equipped with tracting pressuring hole in the pedestal, the pedestal and
The Buffer Unit of medium temperature transmitting is additionally provided with for transfer medium pressure and obstructed between sensitive core body.
As a further improvement of the above technical scheme:
The Buffer Unit includes buffering main body and sealing diaphragm, and the buffering main body offers through-hole, the sensitivity core
Body is fixed on the buffering main body along the one end in through-hole direction, and the sealing diaphragm is fixed on the buffering main body along through-hole direction
The other end, the through-hole surrounds seal chamber by the sensitive core body and sealing diaphragm, and the seal chamber is situated between filled with temperature buffer
Matter.
The side of the buffering main body offer be connected to the seal chamber draw matter hole, it is described to draw equipped with sealing in matter the hole in
Part.
The temperature buffer medium is silicone oil.
The sealing diaphragm includes flat diaphragm or convoluted diaphragm.
The diaphragm pressure sensor further includes buffering stand, and the buffering stand is equipped with cavity, the buffering main body, close
Sealer piece and sensitive core body are respectively positioned in the cavity, and the buffering stand is fixed close to one end of sealing diaphragm with the pedestal
Connection.
The diaphragm pressure sensor further includes lead plate, and the lead plate and the buffering stand are close to sensitive core body
One end is fixedly connected, and the surface of the sensitive core body is equipped with resistance bridge, and the resistance bridge is electrically connected with the lead plate
It connects.
The diaphragm pressure sensor further includes circuit board support and circuit board, and the circuit board support and the buffering are propped up
Frame is fixedly connected close to one end of sensitive core body, and the circuit board rack is set on the circuit board support, the circuit board and institute
State lead plate electrical connection.
The diaphragm pressure sensor further includes shell, and one end of the shell and the buffering stand are close to sensitive core body
One end be fixedly connected, the lead plate, circuit board support and circuit board are respectively positioned in the shell.
The diaphragm pressure sensor further includes electric connector, and the electric connector is fixed on the other end of the shell,
The electric connector and the circuit board electrical connection.
The manufacturing method of above-mentioned diaphragm pressure sensor, comprising the following steps:
S1: sensitive by being from top to bottom fixedly connected with pedestal, sealing diaphragm, the buffering main body with through-hole with sensitive core body
The through-hole is surrounded seal chamber by core and sealing diaphragm；
S2: temperature buffer medium is injected in the seal chamber by drawing matter hole, and with sealing element seal described in draw matter hole；
S3: lead is carried out to the sensitive core body, obtains diaphragm pressure sensor.
Compared with the prior art, the advantages of the present invention are as follows:
Applicant is not suitable for existing diaphragm pressure sensor to measure the original of the pressure medium of temperature deviation or temperature fluctuation
Because being studied, the study found that in the design of existing diaphragm pressure sensor, usually by the pedestal with tracting pressuring hole and sensitive core
Body directly welds, and pressure medium directly acts on sensitive core body by tracting pressuring hole.In sensitive core body, resistance bridge is directly sputtered
In elastic stainless steel diaphragm, due to the particularity of stress, the usual very little of the diameter of elastic stainless steel diaphragm, thickness is also relatively thin.No
The Steel material that becomes rusty is thermally conductive fast, and thickness is usually very thin and small at the pressure-bearing of sensitive core body in addition, and heat dissipation area is limited, so, sensitive core
Influence of the body vulnerable to measuring medium temperature, it is easy to tested medium heating or refrigeration.Company's debugging and calibration product are usually located
In ecotopia, such as 25 DEG C of room temperature, debugging, medium temperature fluctuation is very small, and the process of debugging and calibration is ideal.And
In actual use, the pressure medium temperature and pressure medium temperature when scheduling and planning or calibration of actual measurement are past for product
Toward differing greatly, pressure sensitive core is heated quickly or freezes, and the measurement accuracy of resistance bridge be affected by temperature it is larger,
So as to cause pressure measuring value, there are relatively large deviations with actual value.In addition, since pressure sensitive core is small and thin, resistance to transient temperature
The ability of impact is limited, and TRANSIENT HIGH TEMPERATURE or instantaneous low temperature may damage pressure sensitive core.Thus, existing film pressure
Force snesor should not be used in the measurement of high temperature, low temperature or the biggish pressure medium of temperature fluctuation.
Diaphragm pressure sensor of the invention is equipped with quick for passing to external pressure between pedestal and sensitive core body
Feel core and alleviate the Buffer Unit that sensitive core body temperature becomes, due to the presence of this Buffer Unit, increases tracting pressuring hole and sensitivity
The distance between core, pressure is first passed to the Buffer Unit by measuring medium, then passes to sensitive core body by the Buffer Unit.
During pressure is passed to Buffer Unit by measuring medium, since Buffer Unit specific heat capacity is larger, measuring medium is passed over
Transient state heat absorbed by Buffer Unit, the temperature of Buffer Unit is slowly varying, the temperature of sensitive core body be able to maintain substantially it is constant,
I.e. the Buffer Unit can provide certain resisting temperature damping of shocks ability, and not influence the actual pressure measurement of product, make to measure
Pressure is more steady true.Diaphragm pressure sensor i.e. of the invention can reduce the error of measurement and calibration, improve product
Resistance to transient temperature impact capacity.
Diaphragm pressure sensor of the invention, further, Buffer Unit include buffering main body and sealing diaphragm, buffering master
Body offers through-hole, and sensitive core body is fixed on buffering main body along the one end in through-hole direction, seals diaphragm and be fixed on buffering main body edge
Through-hole is surrounded seal chamber by the other end in through-hole direction, sensitive core body and sealing diaphragm, and seal chamber is interior filled with temperature buffer medium.
Measuring medium first passes through the tracting pressuring hole on pedestal and pressure is passed to sealing diaphragm, generates deformation after sealing diaphragm pressure-sensitive, the shape
Pressure changeable passes to sensitive core body by the temperature buffer medium in seal chamber, finally causes the pressure-sensitive deformation of sensitive core body, should
Process does not influence the transmitting of pressure medium.Temperature buffer medium mostly uses greatly the higher chemical substance of specific heat, the transmitting of front end diaphragm
The transient state heat to come over, by temperature buffer Absorption of Medium, since temperature buffer medium specific heat is high, temperature change is unobvious, thus
The transmitting of temperature is blocked, the temperature of sensitive core body be able to maintain substantially it is constant, thus guarantee measure temperature caused by error it is smaller.
Detailed description of the invention
Fig. 1 is the diagrammatic cross-section of the diaphragm pressure sensor of the embodiment of the present invention 1.
Fig. 2 is the manufacturing method flow chart of the diaphragm pressure sensor of the embodiment of the present invention 1.
Marginal data: 1, pedestal；2, sensitive core body；3, tracting pressuring hole；4, main body is buffered；5, diaphragm is sealed；6, seal chamber；7,
Draw matter hole；8, sealing element；9, buffering stand；10, lead plate；11, circuit board support；12, circuit board；13, shell；14, it is electrically connected
Connect device.
Specific embodiment
Below in conjunction with Figure of description and specific preferred embodiment, the invention will be further described, but not therefore and
It limits the scope of the invention.
Embodiment 1:
As shown in Figure 1, the diaphragm pressure sensor of the present embodiment, including pedestal 1 and sensitive core body 2, interior be equipped with of pedestal 1 are drawn
Hole 3 is pressed, the Buffer Unit of medium temperature transmitting is additionally provided with for transfer medium pressure and obstructed between pedestal 1 and sensitive core body 2.
Due to the presence of this Buffer Unit, the distance between tracting pressuring hole and sensitive core body are increased, measuring medium first transmits pressure
The Buffer Unit is given, then sensitive core body is passed to by the Buffer Unit.Pressure is passed to the process of Buffer Unit by measuring medium
In, the transient state heat that measuring medium passes over is absorbed by Buffer Unit, and the temperature of Buffer Unit is slowly varying, sensitive core body
Temperature is able to maintain constant substantially, i.e., the Buffer Unit can provide certain resisting temperature damping of shocks ability, and not influence product
Actual pressure measurement keeps measurement pressure more steady true.
In the present embodiment, Buffer Unit includes buffering main body 4 and sealing diaphragm 5, and buffering main body 4 offers through-hole, sensitive
Core 2 is fixed on buffering main body 4 along the one end in through-hole direction, seals diaphragm 5 and is fixed on buffering main body 4 along the another of through-hole direction
Through-hole is surrounded seal chamber 6 by end, sensitive core body 2 and sealing diaphragm 5, and seal chamber 6 is filled with temperature buffer medium.Measuring medium first leads to
Pressure is passed to sealing diaphragm by the tracting pressuring hole crossed on pedestal, generates deformation after sealing diaphragm pressure-sensitive, which passes through close
It seals intracavitary temperature buffer medium and passes to sensitive core body, finally cause the pressure-sensitive deformation of sensitive core body, which does not influence to be situated between
The transmitting of matter pressure.Temperature buffer medium mostly uses greatly the higher chemical substance of specific heat, the thermal transient that front end diaphragm passes over
Amount, by temperature buffer Absorption of Medium, since temperature buffer medium specific heat is high, temperature change is unobvious, thus the transmitting quilt of temperature
Barrier, the temperature of sensitive core body be able to maintain substantially it is constant, thus guarantee measure temperature caused by error it is smaller.
Buffering main body 4 and its size of through-hole can be designed according to actual needs with position.The shape of through-hole does not have
Limitation, preferably facilitates the cylindrical hole of processing.
In the present embodiment, buffering main body 4 side offer be connected to seal chamber 6 draw matter hole 7, draw in matter hole 7 and be equipped with
Sealing element 8.After temperature buffer medium draws the injection of matter hole 7 seal chamber 6 by this, it is sealed with sealing element 8.Sealing element 8
It is preferred that pin.
In the present embodiment, the preferred silicone oil of temperature buffer medium.
In the present embodiment, sealing diaphragm 5 includes flat diaphragm or convoluted diaphragm.The preferred heat-resisting material of diaphragm 5 is sealed, in this way
The ability of the resistance to TRANSIENT HIGH TEMPERATURE impact of diaphragm pressure sensor can be improved.The diameter of diaphragm can be corresponding according to measurement pressure to thickness
Adjustment.
In the present embodiment, diaphragm pressure sensor further includes buffering stand 9, and buffering stand 9 is equipped with cavity, buffering main body 4,
Sealing diaphragm 5 and sensitive core body 2 are respectively positioned in cavity, and buffering stand 9 is fixedly connected close to one end of sealing diaphragm 5 with pedestal 1.
Buffering main body 4 and buffering stand 9 are separated into design, form split type structure, the outer diameter of buffering main body 4 does not need to be equal to sensing
The outer diameter of device is more convenient for adjusting the diameter of sealing diaphragm 5 and seal chamber 6 according to the size of sensitive core body 2, increases its design freely
Degree.
In the present embodiment, diaphragm pressure sensor further includes lead plate 10, lead plate 10 and buffering stand 9 close to sensitive core
One end of body 2 is fixedly connected, and the surface of sensitive core body 2 is equipped with resistance bridge, and resistance bridge is electrically connected with lead plate 10.It is situated between
Matter pressure is transmitted to the pressure-sensitive deformation for causing sensitive core body after sensitive core body, and resistance bridge generates one and is proportional to the pressure
Electrical output signal.The electrical output signal is introduced in lead plate and carries out temperature-compensating, to eliminate variation of ambient temperature bring shadow
It rings.
In the present embodiment, diaphragm pressure sensor further includes circuit board support 11 and circuit board 12, circuit board support 11 with
Buffering stand 9 is fixedly connected close to one end of sensitive core body 2, and circuit board 12 is set up on circuit board support 11, circuit board 12 with
Lead plate 10 is electrically connected.Since the electrical output signal that resistance bridge generates is smaller, need to be introduced in electricity after temperature-compensating
It amplifies and deviates in the plate of road, to generate the industrial voltage signal of standard pressure transmitter.
In the present embodiment, diaphragm pressure sensor further includes shell 13, and one end of shell 13 and buffering stand 9 are close to sensitive
One end of core 2 is fixedly connected, and lead plate 10, circuit board support 11 and circuit board 12 are respectively positioned in shell 13.
In the present embodiment, diaphragm pressure sensor further includes electric connector 14, and electric connector 14 is fixed on the another of shell 13
One end, electric connector 14 are electrically connected with circuit board 12.It is exported by electric connector to user through the amplified electric signal of circuit board.
A kind of manufacturing method of the diaphragm pressure sensor of the present embodiment, as shown in Figure 2, comprising the following steps:
S1: by pedestal 1, sealing diaphragm 5, the buffering main body 4 with through-hole are fixedly connected with sensitive core body 2 from top to bottom,
Through-hole is surrounded seal chamber 6 by sensitive core body 2 and sealing diaphragm 5；
S2: temperature buffer medium is injected in seal chamber 6 by drawing matter hole 7, and draws matter hole 7 with the sealing of sealing element 8；
S3: lead is carried out to sensitive core body 2, wiring harness plate 12 welds buffering stand 9 and shell 13, installation electrical connection
Device 14, obtains diaphragm pressure sensor.
The manufacturing method of traditional diaphragm pressure sensor is as follows: first on the base by sensitive core body welding, then from quick
Core lead is felt to circuit board, assembles circuit board, then be can be carried out shell welding and is installed with electric connector, that is, completes whole
The assembling process of a product.The manufacturing method of the diaphragm pressure sensor of the present embodiment is essentially consisted in conventional method difference:
The assembling process of Buffer Unit is increased, first by pedestal, sealing diaphragm and the sequence welding for buffering main body, then by sensitive core
Body is welded in buffering main body, and the sealing of then oil-filled, pin can be carried out elastomer lead later, i.e., with traditional handicraft one
It causes.
The above is only a preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-mentioned implementation
Example.All technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It is noted that for the art
Those of ordinary skill for, improvements and modifications without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (9)
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| CN201510915107.3A CN105466626B (en) | 2015-12-11 | 2015-12-11 | Diaphragm pressure sensor and its manufacturing method |
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| CN201510915107.3A CN105466626B (en) | 2015-12-11 | 2015-12-11 | Diaphragm pressure sensor and its manufacturing method |
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Cited By (1)
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| US10578504B1 (en) | 2019-09-04 | 2020-03-03 | Custom Control Sensors, LLC. | Systems and methods for high voltage rating thin film sensors |
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|---|---|---|---|---|
| US10578504B1 (en) | 2019-09-04 | 2020-03-03 | Custom Control Sensors, LLC. | Systems and methods for high voltage rating thin film sensors |
| US10876915B1 (en) | 2019-09-04 | 2020-12-29 | Custom Control Sensors, LLC. | Systems and methods for high voltage rating thin film sensors |
| US11579032B2 (en) | 2019-09-04 | 2023-02-14 | Custom Control Sensors, LLC | Systems and methods for high voltage rating thin film sensors |
| US12152952B2 (en) | 2019-09-04 | 2024-11-26 | Custom Control Sensors, LLC | Systems and methods for high voltage rating thin film sensors |
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