CN105459283A - Knife pouch device - Google Patents

Abstract

The present invention provides a knife holder device capable of preventing position deviation of a nozzle. The tool set device has: a base part (50) fixed on the spindle housing (48); a movable base part (52), which is fixed with a nozzle (56) for supplying cutting water to the cutting tool (40), and can moving relative to the base portion; and a moving unit (54) that is connected to the moving base portion and places the nozzle between an action position where cutting water is supplied to the cutting blade and a retreat position farther from the cutting blade than the action position The positioning and fitting parts (66, 72, 78) for specifying the action position are provided at the part where the mobile base part and the base part contact each other.

Description

Knife set

technical field

The present invention relates to a holder device covering a cutting blade of a cutting device.

Background technique

A cutting device used for processing a plate-shaped object such as a wafer has an annular cutting blade and a holder device covering the cutting blade. A pair of nozzles clamping the front and back of the cutting knife are fixed on the knife holder device. While the cutting water is supplied through the nozzle, the cutting blade is rotated and cut into the plate, thereby enabling processing of the plate.

In the above-mentioned cutting device, when the cutting blade is attached or detached, the nozzle fixed to the holder device hinders the operation. Therefore, the tool holder device is provided with a movement mechanism that moves the nozzle between an active position where cutting water is supplied to the cutting blade and a retracted position where the cutting blade is not hindered from being attached or detached (for example, refer to Patent Document 1).

In recent years, in order to efficiently process a plate-like object, a cutting device provided with two cutting blades has been put into practical use (for example, refer to Patent Document 2). If such a cutting device is used, for example, two plate-shaped objects can be processed simultaneously with two cutting blades. In addition, a pair of nozzles sandwiching the front and back of the cutting blades are fixed to the holder device covering the cutting blades.

Patent Document 1 Japanese Patent Application Laid-Open No. 7-276183

Patent Document 2 Japanese Patent Application Laid-Open No. 2013-222834

In addition, in the cutting device described above, for example, two cutting blades can face each other at an extremely short distance of 30 mm or less. Therefore, if the positions of the nozzles moved by the moving mechanism are slightly misaligned, the nozzles may interfere with each other and be damaged.

Contents of the invention

The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a tool holder device capable of preventing positional deviation of a nozzle.

The present invention provides a tool holder device, which is arranged at the end of a main shaft housing that supports the main shaft in a freely rotatable manner, and covers a cutting tool mounted on the main shaft, and is characterized in that it has: a base unit; a movable base unit fixed with a nozzle for supplying cutting water to the cutting blade and capable of moving relative to the base unit; Moves between an active position where the cutting water is supplied to the cutting blade, and a retracted position that is farther from the cutting blade than the active position, between the moving base portion and the base A positioning fitting portion defining the action position is formed at a portion where the stage portions contact each other.

In the present invention, it is preferable to form two or more sets of the positioning fitting parts.

The effect of the invention

In the tool holder device according to the present invention, a positioning fitting portion defining an action position of the nozzle is formed at a portion where the base portion fixed to the spindle housing and the movable base portion on which the nozzle is fixed contact each other. Therefore, when the movable base part is moved and comes into contact with the base part, the positioning fitting part fits and the positional deviation of the nozzle can be prevented.

Description of drawings

FIG. 1 is a perspective view schematically showing a configuration example of a cutting device.

2(A) is a perspective view schematically showing the first state of the cutting unit, and FIG. 2(B) is a perspective view schematically showing the second state of the cutting unit.

(A) of FIG. 3 is a diagram schematically showing the tool holder device in the state shown in (A) of FIG. 2 , and (B) of FIG. Diagram of the knife set.

Label description

2: Cutting device, 4: Abutment, 4a, 4b, 4c: Opening, 6: Material box placement table, 8: Material box, 10: X-axis moving table, 12: Dust-proof and drip-proof cover, 14: Holding table, 14a: holding surface, 16: clamp, 18: cutting assembly (cutting unit), 20: support structure, 22: cutting assembly moving mechanism (index feeding unit, lifting unit), 24: Y-axis guide rail, 26: Y Axis moving plate, 28: Y-axis ball screw, 30: Y-axis pulse motor, 32: Z-axis guide rail, 34: Z-axis moving plate, 36: Z-axis ball screw, 38: Z-axis pulse motor, 40: cutting Knife, 42: knife holder device, 44: camera (imaging unit), 46: cleaning mechanism (cleaning unit), 48: spindle housing, 50: fixed cover (abutment), 52: sliding cover (movable abutment) , 54: Air cylinder (moving unit), 56: Nozzle, 58: Connector, 60: Connector, 62: 1st fitting convex part, 64: 1st fitting concave part (notch part), 66: 1st regulation part (positioning fitting part), 68: second fitting convex part, 70: second fitting recessed part (notch part), 72: second predetermined part (positioning fitting part), 74: third fitting convex part, 76: 3rd fitting recessed part, 78: 3rd predetermined part (positioning fitting part), 11: wafer, 13: device, 15: dicing tape, 17: frame.

detailed description

Embodiments of the present invention will be described with reference to the drawings. First, a cutting device including the holder device of the present embodiment will be described. FIG. 1 is a perspective view schematically showing a configuration example of a cutting device. As shown in FIG. 1 , the cutting device 2 has a base 4 that supports each structure.

A rectangular opening 4 a is formed at a front corner of the base 4 , and a cartridge placement table 6 is provided in a manner capable of ascending and descending within the opening 4 a. A rectangular parallelepiped magazine 8 for storing a plurality of wafers 11 is placed on the upper surface of the magazine placement table 6 . In addition, in FIG. 1 , only the outline of the magazine 8 is shown for convenience of description.

The wafer 11 is a substantially circular plate-shaped object made of a material such as silicon, and its front side is divided into a device region in the center and a remaining peripheral region surrounding the device region. The device region is further divided into a plurality of regions by dicing lines (planned division lines) arranged in a grid pattern, and devices 13 such as ICs are formed in each region.

A dicing tape 15 having a larger diameter than the wafer 11 is attached to the back side of the wafer 11 . The outer peripheral portion of the dicing tape 15 is fixed to the ring frame 17 . That is, wafer 11 is supported by frame 17 via dicing tape 15 . Wherein, the structure of the wafer 11 is not limited thereto.

A rectangular opening 4b long in the X-axis direction (front-rear direction, machining feed direction) is formed on the side of the magazine placement table 6 . Inside the opening 4b are provided an X-axis moving table 10, an X-axis moving mechanism (processing feed unit, not shown) for moving the X-axis moving table 10 in the X-axis direction, and a dustproof cover for covering the X-axis moving mechanism. Anti-drip cover 12.

The X-axis moving mechanism has a pair of X-axis guide rails (not shown) parallel to the X-axis direction, and the X-axis moving table 10 is slidably provided on the X-axis guide rails. A nut portion (not shown) is provided on the lower surface side of the X-axis moving table 10, and an X-axis ball screw (not shown) parallel to the X-axis guide rail is screwed to the nut portion.

An X-axis pulse motor (not shown) is connected to one end of the X-axis ball screw. When the X-axis ball screw is rotated by the X-axis pulse motor, the X-axis moving table 10 moves in the X-axis direction along the X-axis guide rail.

Above the X-axis moving table 10, a holding table 14 for sucking and holding the wafer 11 is provided. Around the holding table 14 are provided four grippers 16 clamping and fixing an annular frame 17 for supporting the wafer 11 from four directions.

The holding table 14 is connected to a rotational drive source (not shown) such as a motor, and rotates around a rotational axis parallel to the Z-axis direction (vertical direction). In addition, the holding table 14 is machine-feeded in the X-axis direction by the X-axis moving mechanism described above.

The front (upper surface) of the holding table 14 serves as a holding surface 14 a for sucking and holding the wafer 11 . This holding surface 14 a is connected to a suction source (not shown) through a flow path (not shown) formed inside the holding table 14 .

A transfer mechanism (transfer unit, not shown) for transferring the wafer 11 to the holding table 14 is provided at a position close to the opening 4 b in the cutting device 2 . The wafer 11 transported by the transport mechanism is placed on the holding table 14 with the front side exposed upward, for example.

A gate-shaped support structure 20 that supports two sets of cutting units (cutting units) 18 is disposed on the upper surface of the base 4 so as to straddle the opening 4b. On the upper front surface of the support structure 20, two sets of cutting unit moving mechanisms (index feeding unit, lifting unit) 22 are provided to move each cutting unit 18 in the Y-axis direction (index feeding direction) and Z-axis direction. .

Each cutting unit moving mechanism 22 has a pair of Y-axis guide rails 24 disposed on the front surface of the supporting structure 20 and parallel to the Y-axis direction. A Y-axis moving plate 26 constituting each cutting unit moving mechanism 22 is slidably provided on the Y-axis guide rail 24 .

A nut portion (not shown) is provided on the back side (rear side) of each Y-axis moving plate 26 , and a Y-axis ball screw 28 parallel to the Y-axis guide rail 24 is screwed to the nut portion. A Y-axis pulse motor 30 is connected to one end of each Y-axis ball screw 28 . When the Y-axis ball screw 28 is rotated by the Y-axis pulse motor 30 , the Y-axis moving plate 26 moves in the Y-axis direction along the Y-axis guide rail 24 .

A pair of Z-axis guide rails 32 parallel to the Z-axis direction is provided on the front surface (front surface) of each Y-axis moving plate 26 . A Z-axis moving plate 34 is slidably provided on the Z-axis guide rail 32 .

A nut portion (not shown) is provided on the back side (rear side) of each Z-axis moving plate 34 , and a Z-axis ball screw 36 parallel to the Z-axis guide rail 32 is screwed to the nut portion. A Z-axis pulse motor 38 is connected to one end of each Z-axis ball screw 36 . When the Z-axis ball screw 36 is rotated by the Z-axis pulse motor 38 , the Z-axis moving plate 34 moves in the Z-axis direction along the Z-axis guide rail 32 .

A cutting unit 18 for cutting the wafer 11 is provided on the lower portion of each Z-axis moving plate 34 . The cutting assembly 18 includes a pocket arrangement 42 covering a cutting knife 40 . Further, at a position adjacent to the cutting unit 18 , a camera (imaging unit) 44 for imaging the wafer 11 is provided.

If the Y-axis moving plate 26 is moved in the Y-axis direction by each cutting assembly moving mechanism 22, the cutting assembly 18 and the camera 44 are indexed, and if the Z-axis moving plate 34 is moved in the Z-axis direction, The cutting assembly 18 and camera 44 are raised and lowered.

A circular opening 4c is formed at a position opposite to the opening 4a with respect to the opening 4b. A cleaning mechanism (cleaning unit) 46 for cleaning the cut wafer 11 is provided in the opening 4c.

Next, the cutting unit 18 including the holder device 42 of this embodiment will be described. (A) of FIG. 2 is a perspective view schematically showing the first state of the cutting unit 18 , and (B) of FIG. 2 is a perspective view schematically showing the second state of the cutting unit 18 .

As shown in FIG. 2(A) and FIG. 2(B), the cutting unit 18 has a spindle housing 48 fixed to the lower portion of the Z-axis moving plate 34 . Inside the spindle housing 48 , a spindle (not shown) extending in the Y-axis direction is rotatably supported. A cutting blade 40 is attached to the tip of the main shaft.

A tool holder device 42 for accommodating the cutting blade 40 attached to the main shaft is provided at the distal end of the main shaft housing 48 . The tool holder device 42 includes a fixed cover (base portion) 50 fixed to the end of the spindle housing 48 , and a slide cover (movable base portion) 52 movable relative to the fixed cover 50 .

The sliding cover 52 is coupled to the fixed cover 50 via an air cylinder (moving means) 54 ( FIG. 2(B) ), and slides in the X-axis direction by air supplied through a coupling (not shown).

A pair of substantially L-shaped nozzles 56 sandwiching the front and back of the cutting blade 40 are fixed to the slide cover 52 . The nozzle 56 is supplied with cutting water through a coupling 58 provided on the slide cover 52 . A plurality of slits (not shown) are formed on the distal end side of the nozzle 56 so as to face the cutting blade 40 . The cutting blade 40 is cooled by the cutting water sprayed through a plurality of slits, and the upper surface of the wafer 11 to be cut is cleaned.

When the slide cover 52 is slid by the air cylinder 54 , the nozzle 56 moves between an action position where cutting water is supplied to the cutting blade 40 and a retreat position away from the action position in the X-axis direction. FIG. 2(A) shows a state where the nozzle 56 is positioned at the active position, and FIG. 2(B) shows a state where the nozzle 56 is positioned at the retracted position.

If the nozzle 56 is positioned at a retracted position away from the cutting blade 40 , as shown in FIG. 2(B) , the front side of the cutting blade 40 is opened. Thereby, the cutting blade 40 can be easily attached and detached. On the other hand, if the nozzle 56 is positioned close to the action position of the cutting blade 40 , as shown in FIG. 2(A) , the front and back surfaces of the cutting blade 40 are sandwiched by the nozzle 56 . Thus, cutting water can be supplied to the cutting blade 40 .

On the other hand, a supply hole (not shown) for supplying cutting water to the cutting blade 40 is formed in the fixed cover 50 . The supply hole is supplied with cutting water through the coupling 60 provided on the fixed cover 50 . The cutting blade 40 is cooled and cleaned by the cutting water sprayed from the supply hole.

In addition, in the cutting device 2 configured as above, if the nozzle 56 deviates even slightly from the operating position (inclined), the nozzles 56 interfere with each other when the two sets of cutting units 18 face each other at a very close distance. Then, in the portion where the fixed cover 50 and the sliding cover 52 are in contact with each other in the knife holder device 42 of the present embodiment, a predetermined portion (positioning fitting portion) that defines an action position is provided.

(A) of FIG. 3 is a diagram schematically showing the tool holder device 42 in the state shown in (A) of FIG. 2 , and (B) of FIG. 3 is a schematic representation of the state shown in (B) of FIG. 2 The figure of the tool pocket device 42 of.

As shown in FIG. 3(A) and FIG. 3(B), a first fitting protrusion 62 is formed on the upper end portion of the fixed cover 50 that contacts the sliding cover 52 when the nozzle 56 is positioned at the active position.

On the other hand, at the upper end portion of the sliding cover 52 that contacts the fixed cover 50 when the nozzle 56 is positioned at the action position, a first fitting concave portion (notch portion) 64 having a shape corresponding to the first fitting convex portion 62 is formed. . A first predetermined portion (positioning fitting portion) 66 is formed by the first fitting convex portion 62 and the first fitting concave portion 64 .

Similarly, a second fitting convex portion 68 is formed at the lower end portion of the fixed cover 50 in contact with the sliding cover 52 . In addition, a second fitting recessed portion (notch portion) 70 having a shape corresponding to the second fitting convex portion 68 is formed at the lower end portion of the sliding cover 52 in contact with the fixed cover 50 . A second predetermined portion (positioning fitting portion) 72 is formed by the second fitting convex portion 68 and the second fitting concave portion 70 .

Furthermore, a third fitting convex portion 74 is formed at the central portion of the fixed cover 50 that is in contact with the sliding cover 52 . In addition, a third fitting concave portion 76 having a shape corresponding to the third fitting convex portion 74 is formed at a central portion of the sliding cover 52 that is in contact with the fixed cover 50 . A third predetermined portion (positioning fitting portion) 78 is formed by the third fitting convex portion 74 and the third fitting concave portion 76 .

Therefore, as shown in (A) of FIG. 2 and (A) of FIG. , the second fitting convex portion 68 is fitted to the second fitting concave portion 70 , and the third fitting convex portion 74 is fitted to the third fitting concave portion 76 . Accordingly, it is possible to appropriately position the nozzle 56 at the action position by preventing positional deviation (tilting, rotation) of the sliding cover 52 with respect to the fixed cover 50 .

As described above, in the tool holder device 42 of the present embodiment, at the portion where the fixed cover (base portion) 50 fixed to the spindle housing 48 and the sliding cover (movable base portion) 52 fixed to the nozzle 56 contact each other, A first predetermined portion (positioning fitting portion) 66 , a second predetermined portion (positioning fitting portion) 72 , and a third predetermined portion (positioning fitting portion) 78 that define the operating position of the nozzle 56 are formed.

Therefore, when the sliding cover 52 is slid and brought into contact with the fixed cover 50, the first fitting convex portion 62 of the first predetermined portion 66 is fitted into the first fitting concave portion 64, and the second fitting portion of the second predetermined portion 72 is The protrusion 68 fits into the second fitting recess 70 , and the third fitting protrusion 74 of the third predetermined portion 78 fits into the third fitting recess 76 , thereby preventing the position of the nozzle 56 from shifting.

In addition, this invention is not limited to the content of the said embodiment, Various changes can be made and implemented. For example, in the above-described embodiment, the action position of the nozzle is defined by three sets of predetermined portions (positioning fitting portions), but the number of predetermined portions is not particularly limited. In addition, the shape of the predetermined part, etc., can be changed arbitrarily within the range where the action position of the nozzle can be appropriately defined.

In addition, the structure, method, etc. of the said embodiment can be suitably changed and implemented in the range which does not deviate from the object of this invention.

Claims (2)

1. a broach shell device, it is disposed in the end of the main shaft shell of the mode supports main shaft rotated freely, and covers the bite be installed on this main shaft,

The feature of this broach shell device is to have:

Be fixed on the abutment portion in this main shaft shell;

Mobile abutment portion, it is fixed with the nozzle supply of this bite being cut to water, and can move relative to this abutment portion; And

Mobile unit, itself and this move abutment portion and link, and this nozzle is moved between active position and retreating position, at this active position place, supply this cutting water to this bite, this retreating position is farther from this bite compared to this active position,

Move at this part place that abutment portion and this abutment portion contact with each other, be formed with the location fitting portion specifying this active position.

2. broach shell device according to claim 1, is characterized in that,

This broach shell device is formed with this location fitting portion of more than 2 groups.