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CN105445927A - Printing ink motion controllable electrowetting display and preparation method thereof - Google Patents

Printing ink motion controllable electrowetting display and preparation method thereof Download PDF

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Publication number
CN105445927A
CN105445927A CN201510885082.7A CN201510885082A CN105445927A CN 105445927 A CN105445927 A CN 105445927A CN 201510885082 A CN201510885082 A CN 201510885082A CN 105445927 A CN105445927 A CN 105445927A
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insulating layer
hydrophilic
layer
hydrophobic
electrowetting display
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CN105445927B (en
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唐彪
蒋洪伟
周敏
赵青
罗伯特·安德鲁·海耶斯
周国富
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Shenzhen Guohua Optoelectronics Co Ltd
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South China Normal University
Shenzhen Guohua Optoelectronics Co Ltd
Shenzhen Guohua Optoelectronics Research Institute
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G02B26/005Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

Abstract

本发明公开了一种油墨运动可控的电润湿显示器及其制备方法,所述显示器包括导电层、设于导电层的上表面的绝缘层和设于绝缘层的上表面的像素墙,绝缘层为双层绝缘层,双层绝缘层包括亲水绝缘层和疏水绝缘层,亲水绝缘层完全覆盖导电层的上表面,疏水绝缘层覆盖亲水绝缘层的上表面,在像素格内疏水绝缘层露出部分亲水绝缘层的上表面。油墨的厚度自疏水绝缘层一侧至亲水绝缘层一侧的方向递减,施加电压后,油墨在厚度最薄处发生破裂,并且自所述亲水绝缘层一侧向所述疏水绝缘层一侧的方向收缩,实现对电润湿显示像素单元加电情况下油墨破裂位置、油墨运动收缩方向的有效控制。

The invention discloses an electrowetting display with controllable ink movement and a preparation method thereof. The display comprises a conductive layer, an insulating layer arranged on the upper surface of the conductive layer, and a pixel wall arranged on the upper surface of the insulating layer. The layer is a double-layer insulating layer. The double-layer insulating layer includes a hydrophilic insulating layer and a hydrophobic insulating layer. The hydrophilic insulating layer completely covers the upper surface of the conductive layer, and the hydrophobic insulating layer covers the upper surface of the hydrophilic insulating layer. The insulating layer exposes part of the upper surface of the hydrophilic insulating layer. The thickness of the ink decreases gradually from the side of the hydrophobic insulating layer to the side of the hydrophilic insulating layer. After the voltage is applied, the ink ruptures at the thinnest point, and the ink is broken from the side of the hydrophilic insulating layer to the side of the hydrophobic insulating layer. The contraction in the side direction realizes the effective control of the ink rupture position and the contraction direction of the ink movement when the electrowetting display pixel unit is powered on.

Description

一种油墨运动可控的电润湿显示器及其制备方法An electrowetting display with controllable ink movement and its preparation method

技术领域 technical field

本发明涉及电润湿显示器件技术领域,尤其涉及一种油墨运动可控的电润湿显示器及其制备方法。 The invention relates to the technical field of electrowetting display devices, in particular to an electrowetting display with controllable ink movement and a preparation method thereof.

背景技术 Background technique

参照图1-2,传统的电润湿显示器包括第一基板和第二基板,第一基板包括上基板1’、上导电层2’和封装胶框3’,第二基板包括下基板6’、下导电层9’、绝缘层8’、疏水层5’、像素墙4’,在第一基板和第二基板之间填充有油墨10’和电解质溶液7’,其中,油墨10’填充在由像素墙4’围成的像素格11’内。电润湿显示像素单元的开关起始于油墨的破裂,继而形成非极性液体(油墨10’)/极性液体(电解质溶液7’)/固体表面(疏水层5’,通常为含氟聚合物材料,AF1600、AF1600x等)三相接触线,该接触线并在电场力作用下运动发展对应的油墨收缩状态的差异形成光学意义上的像素开启和灰度的效果。尤其,对显示器件加电时要得到良好光学显示效果,需要对油墨破裂的位置以及运动方向进行可靠的控制。目前,比较普遍使用的方法,参照图1,是在像素单元的一角形成驱动电极层(如ITO)的局部空洞12’(通常称作notch);利用外加电场分布的局部不均,实现油墨运动收缩至像素的一角(notch部位)。大量实验和理论模拟结果表明,油墨破裂点选择与油墨厚度最薄的位置优先发生,且油墨破裂所需的阈值电压取决于油墨最薄处的厚度;显然notch的作用在于控制油墨的收缩终点的位置,无法有效控制油墨的破裂位置和降低像素的开启电压。更重要的是,在导电背板(如常用的ITO导电玻璃)对导电背板进行刻蚀制造notch的过程中,容易出现如图1中的放大图所示的不规则的锯齿状边缘,在加电驱动时,在锯齿状边缘会因为电荷分布布局造成的电场不均匀,在电测中电荷会趋向聚集于不规则的导电尖端,形成的局部高电荷密度,非常容易造成绝缘层的击穿,使得显示器被损坏。 Referring to Figures 1-2, a traditional electrowetting display includes a first substrate and a second substrate, the first substrate includes an upper substrate 1', an upper conductive layer 2' and an encapsulant frame 3', and the second substrate includes a lower substrate 6' , lower conductive layer 9', insulating layer 8', hydrophobic layer 5', pixel wall 4', ink 10' and electrolyte solution 7' are filled between the first substrate and the second substrate, wherein the ink 10' is filled in Inside the pixel grid 11' surrounded by the pixel wall 4'. The switching of the electrowetting display pixel unit starts with the rupture of the ink, followed by the formation of non-polar liquid (ink 10') / polar liquid (electrolyte solution 7') / solid surface (hydrophobic layer 5', usually fluoropolymer Object material, AF1600, AF1600x, etc.) three-phase contact line, the contact line moves and develops under the action of electric field force, and the difference in ink contraction state forms the effect of pixel opening and grayscale in the optical sense. In particular, to obtain a good optical display effect when the display device is powered on, it is necessary to reliably control the position and direction of the ink rupture. At present, the more commonly used method, referring to Figure 1, is to form a local cavity 12' (usually called notch) of the driving electrode layer (such as ITO) at a corner of the pixel unit; use the local uneven distribution of the applied electric field to realize ink movement Shrink to the corner of the pixel (notch part). A large number of experiments and theoretical simulation results show that the selection of the ink rupture point and the position of the thinnest ink thickness occur preferentially, and the threshold voltage required for ink rupture depends on the thickness of the thinnest part of the ink; obviously the role of notch is to control the shrinkage end point of the ink position, it is impossible to effectively control the rupture position of the ink and reduce the turn-on voltage of the pixel. More importantly, in the process of etching the conductive backplane (such as the commonly used ITO conductive glass) to manufacture the notch, it is easy to appear irregular jagged edges as shown in the enlarged view in Figure 1. When power is applied to drive, the electric field will be uneven due to the charge distribution layout on the jagged edge. During the electrical measurement, the charges will tend to gather at the irregular conductive tips, forming a local high charge density, which is very easy to cause the breakdown of the insulating layer. , causing the display to be damaged.

发明内容 Contents of the invention

本发明所要解决的技术问题是提供一种油墨运动可控的电润湿显示器及其制备方法。 The technical problem to be solved by the present invention is to provide an electrowetting display with controllable ink movement and a preparation method thereof.

本发明所采取的技术方案是: The technical scheme that the present invention takes is:

一种油墨运动可控的电润湿显示器,包括上基板和下基板,所述下基板包括导电层、设于所述导电层的上表面的绝缘层和设于所述绝缘层的上表面的像素墙,所述像素墙围成多个像素格,所述绝缘层为双层绝缘层,所述双层绝缘层包括亲水绝缘层和疏水绝缘层,所述亲水绝缘层完全覆盖所述导电层的上表面,所述疏水绝缘层设于所述亲水绝缘层的上表面,在所述像素格内所述疏水绝缘层露出部分所述亲水绝缘层的上表面。 An electrowetting display with controllable ink movement, comprising an upper substrate and a lower substrate, the lower substrate includes a conductive layer, an insulating layer arranged on the upper surface of the conductive layer, and an insulating layer arranged on the upper surface of the insulating layer A pixel wall, the pixel wall encloses a plurality of pixel grids, the insulating layer is a double-layer insulating layer, the double-layer insulating layer includes a hydrophilic insulating layer and a hydrophobic insulating layer, and the hydrophilic insulating layer completely covers the The upper surface of the conductive layer, the hydrophobic insulating layer is disposed on the upper surface of the hydrophilic insulating layer, and the hydrophobic insulating layer exposes part of the upper surface of the hydrophilic insulating layer in the pixel grid.

优选地,每个所述像素格内露出的所述亲水绝缘层的一侧边缘与每个所述像素格的同一方向的一边齐平。 Preferably, one side edge of the hydrophilic insulating layer exposed in each pixel grid is flush with one side in the same direction of each pixel grid.

进一步优选地,所述像素格内露出的所述亲水绝缘层为狭长形,露出的所述狭长形亲水绝缘层的一侧边缘与所述像素格的一边齐平。 Further preferably, the exposed hydrophilic insulating layer in the pixel grid is elongated, and one side edge of the exposed elongated hydrophilic insulating layer is flush with one side of the pixel grid.

优选地,所述像素格内露出的所述亲水绝缘层面积占所述像素格面积的比例小于等于5%。 Preferably, the proportion of the area of the hydrophilic insulating layer exposed in the pixel grid to the area of the pixel grid is less than or equal to 5%.

优选地,所述亲水绝缘材料的水滴的接触角小于等于40°。 Preferably, the contact angle of water droplets of the hydrophilic insulating material is less than or equal to 40°.

优选地,所述疏水绝缘层材料为含氟聚合物材料或聚酰亚胺材料。 Preferably, the material of the hydrophobic insulating layer is a fluorine-containing polymer material or a polyimide material.

本发明还提供了一种油墨运动可控的电润湿显示器的制备方法,包括制备双层绝缘层的步骤,所述双层绝缘层包括亲水绝缘层和疏水绝缘层,所述亲水绝缘层完全覆盖下基板的导电层的上表面,所述疏水绝缘层覆盖所述亲水绝缘层的上表面,在所述像素格内所述疏水绝缘层露出部分所述亲水绝缘层的上表面。 The present invention also provides a method for preparing an electrowetting display with controllable ink movement, comprising the step of preparing a double-layer insulating layer, the double-layer insulating layer comprising a hydrophilic insulating layer and a hydrophobic insulating layer, the hydrophilic insulating layer The layer completely covers the upper surface of the conductive layer of the lower substrate, the hydrophobic insulating layer covers the upper surface of the hydrophilic insulating layer, and the hydrophobic insulating layer exposes part of the upper surface of the hydrophilic insulating layer in the pixel grid .

优选地,所述制备双层绝缘层的步骤具体包括: Preferably, the step of preparing a double insulating layer specifically includes:

在下基板的导电层上表面涂覆一层亲水绝缘材料,固化,制备得到亲水绝缘层; Coating a layer of hydrophilic insulating material on the upper surface of the conductive layer of the lower substrate, curing, and preparing a hydrophilic insulating layer;

在所述亲水绝缘层的上表面涂覆一层疏水绝缘材料,固化,制备得到疏水绝缘层; Coating a layer of hydrophobic insulating material on the upper surface of the hydrophilic insulating layer and curing it to prepare a hydrophobic insulating layer;

通过图形化干法刻蚀工艺刻蚀部分所述疏水绝缘层,露出部分所述亲水绝缘层。 Part of the hydrophobic insulating layer is etched by a patterned dry etching process to expose part of the hydrophilic insulating layer.

优选地,所述亲水绝缘材料的水滴的接触角小于等于40°。 Preferably, the contact angle of water droplets of the hydrophilic insulating material is less than or equal to 40°.

优选地,所述疏水绝缘层材料为含氟聚合物材料或聚酰亚胺材料。 Preferably, the material of the hydrophobic insulating layer is a fluorine-containing polymer material or a polyimide material.

本发明的有益效果是: The beneficial effects of the present invention are:

本发明提供了一种油墨运动可控的电润湿显示器及其制备方法,所述电润湿显示器包括上基板和下基板,所述下基板包括导电层、设于所述导电层的上表面的绝缘层和设于所述绝缘层的上表面的像素墙,所述像素墙围成多个像素格,所述绝缘层为双层绝缘层,所述双层绝缘层包括亲水绝缘层和疏水绝缘层,所述亲水绝缘层完全覆盖所述导电层的上表面,所述疏水绝缘层覆盖所述亲水绝缘层的上表面,在所述像素格内所述疏水绝缘层露出部分所述亲水绝缘层的上表面。由于所述亲水绝缘层材料为亲水性材料,由于油墨材料与所述亲水绝缘层和所述疏水绝缘层的润湿性能的差异,油墨的厚度自所述疏水绝缘层一侧至所述亲水绝缘层一侧的方向递减,甚至在露出所述亲水绝缘层的边缘处会预先形成(油墨、电解质溶液和绝缘层)三相接触线,而且施加电压后,油墨在厚度最薄的位置发生破裂,并且自所述亲水绝缘层一侧向所述疏水绝缘层一侧的方向收缩,本发明可在基本不改变电场分布的情况下,实现对电润湿显示像素单元加电情况下油墨破裂位置、油墨运动收缩方向的有效控制,由于油墨破裂所需的阈值电压取决于油墨最薄处的厚度,本发明所述显示器能够有效降低像素开启的阈值电压,还可以有效避免notch设计方法由于局部高电荷密度造成的绝缘层击穿风险。 The invention provides an electrowetting display with controllable ink movement and a preparation method thereof. The electrowetting display includes an upper substrate and a lower substrate, and the lower substrate includes a conductive layer disposed on the upper surface of the conductive layer. An insulating layer and a pixel wall arranged on the upper surface of the insulating layer, the pixel walls enclose a plurality of pixel grids, the insulating layer is a double-layer insulating layer, and the double-layer insulating layer includes a hydrophilic insulating layer and a A hydrophobic insulating layer, the hydrophilic insulating layer completely covers the upper surface of the conductive layer, the hydrophobic insulating layer covers the upper surface of the hydrophilic insulating layer, and the exposed part of the hydrophobic insulating layer in the pixel grid The upper surface of the hydrophilic insulating layer. Since the material of the hydrophilic insulating layer is a hydrophilic material, due to the difference in wettability between the ink material and the hydrophilic insulating layer and the hydrophobic insulating layer, the thickness of the ink is from the side of the hydrophobic insulating layer to the The direction of the side of the hydrophilic insulating layer decreases gradually, even at the edge of the exposed hydrophilic insulating layer, a three-phase contact line (ink, electrolyte solution and insulating layer) will be pre-formed, and after the voltage is applied, the ink is at the thinnest thickness Crack occurs at the position of the insulating layer and shrinks from the side of the hydrophilic insulating layer to the side of the hydrophobic insulating layer. The present invention can realize the power supply of the electrowetting display pixel unit without changing the electric field distribution substantially. In this case, the effective control of the ink rupture position and the ink movement contraction direction, because the threshold voltage required for ink rupture depends on the thickness of the thinnest part of the ink, the display of the present invention can effectively reduce the threshold voltage for pixel opening, and can also effectively avoid notch Design approach Risk of insulation breakdown due to localized high charge density.

附图说明 Description of drawings

图1为常规电润湿显示器的截面图; 1 is a cross-sectional view of a conventional electrowetting display;

图2为常规电润湿显示器的像素墙结构图; FIG. 2 is a structural diagram of a pixel wall of a conventional electrowetting display;

图3为未施加电压时油墨运动可控的电润湿显示器截面图; Figure 3 is a cross-sectional view of an electrowetting display with controllable ink movement when no voltage is applied;

图4为施加电压时油墨运动可控的电润湿显示器截面图。 Figure 4 is a cross-sectional view of an electrowetting display with controllable ink movement upon application of a voltage.

具体实施方式 detailed description

以下将结合实施例和附图对本发明的构思、具体结构及产生的技术效果进行清楚、完整地描述,以充分地理解本发明的目的、特征和效果。显然,所描述的实施例只是本发明的一部分实施例,而不是全部实施例,基于本发明的实施例,本领域的技术人员在不付出创造性劳动的前提下所获得的其他实施例,均属于本发明保护的范围。另外,专利中涉及到的所有联接/连接关系,并非单指构件直接相接,而是指可根据具体实施情况,通过添加或减少联接辅件,来组成更优的联接结构。本发明创造中的各个技术特征,在不互相矛盾冲突的前提下可以交互组合。 The idea, specific structure and technical effects of the present invention will be clearly and completely described below in conjunction with the embodiments and accompanying drawings, so as to fully understand the purpose, features and effects of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, rather than all of them. Based on the embodiments of the present invention, other embodiments obtained by those skilled in the art without creative efforts belong to The protection scope of the present invention. In addition, all the connection/connection relationships involved in the patent do not simply refer to the direct connection of components, but mean that a better connection structure can be formed by adding or reducing connection accessories according to specific implementation conditions. The various technical features in the invention can be combined interactively on the premise of not conflicting with each other.

本发明提供了一种油墨运动可控的电润湿显示器及其制备方法,电润湿显示器也称为电湿润显示器,本发明也同样适用于电湿润显示器。所述油墨运动可控的电润湿显示器截面图如图3,所述显示器包括上基板和下基板,所述下基板包括基板10、导电层6、设于所述导电层6的上表面的绝缘层和设于所述绝缘层的上表面的像素墙4,所述像素墙4围成多个像素格,所述绝缘层为双层绝缘层,所述双层绝缘层包括亲水绝缘层9和疏水绝缘层5,所述亲水绝缘层9完全覆盖所述导电层6的上表面,所述疏水绝缘层5设于所述亲水绝缘层9的上表面,在所述像素格内所述疏水绝缘层5露出部分所述亲水绝缘层9的上表面。由于露出的亲水绝缘层9的亲水性大于疏水绝缘层5的亲水性,这样露出的亲水绝缘层9表面就会覆盖一层电解质溶液,疏水绝缘层5表面覆盖一层油墨8,露出的亲水绝缘层9一侧的油墨8的厚度会小于疏水绝缘层5一侧的油墨8的厚度,降低油墨8一侧厚度,能够实现降低驱动阈值电压的效果。所述第二基板包括上基板1、导电层2和封装胶框3,所述第一基板和第二基板中间填充有电解质溶液7和油墨8,所述油墨8填充在所述像素格内。所述上基板和下基板通过所述封装胶框3将所述电解质溶液7和油墨8密封在上基板和下基板之间。在优选的实施方案中,所述亲水绝缘材料的水滴的接触角小于等于40°,在进一步优选的实施方案中,所述亲水绝缘层9材料为二氧化硅或二氧化钛,所述疏水绝缘层5材料为含氟聚合物材料或聚酰亚胺材料。所述亲水绝缘层9的材料为亲水性材料,由于油墨8材料与所述亲水绝缘层9和所述疏水绝缘层5的润湿性能的差异,油墨8的厚度自所述疏水绝缘层5一侧至所述亲水绝缘层9一侧的方向递减,在露出所述亲水绝缘层9的边缘处预先形成(油墨8、电解质溶液7和绝缘层)三相接触线,油墨8在厚度最薄的位置发生破裂,并且自所述亲水绝缘层9一侧向所述疏水绝缘层5一侧的方向收缩,本发明可在基本不改变电场分布的情况下,实现对电润湿显示像素单元加电情况下油墨8破裂位置、油墨8运动收缩方向的有效控制。由于油墨8破裂所需的阈值电压取决于油墨8最薄处的厚度,所以本发明所述显示器能够有效降低像素开启的阈值电压,传统电润湿显示器的阈值电压为24V~26V,开口率达到60%的驱动电压为35V左右,采用本发明所述电润湿显示器的阈值电压为5V,开口率达到60%的驱动电压为24V,较传统电润湿显示器,其阈值电压显著降低,而且本发明所述电润湿显示器还可以有效避免notch设计方法由于局部高电荷密度造成的绝缘层击穿风险。 The invention provides an electrowetting display with controllable ink movement and a preparation method thereof. The electrowetting display is also called an electrowetting display, and the invention is also applicable to the electrowetting display. The cross-sectional view of the electrowetting display with controllable ink movement is shown in Figure 3, the display includes an upper substrate and a lower substrate, and the lower substrate includes a substrate 10, a conductive layer 6, and The insulating layer and the pixel wall 4 arranged on the upper surface of the insulating layer, the pixel wall 4 encloses a plurality of pixel grids, the insulating layer is a double-layer insulating layer, and the double-layer insulating layer includes a hydrophilic insulating layer 9 and a hydrophobic insulating layer 5, the hydrophilic insulating layer 9 completely covers the upper surface of the conductive layer 6, the hydrophobic insulating layer 5 is arranged on the upper surface of the hydrophilic insulating layer 9, in the pixel grid The hydrophobic insulating layer 5 exposes part of the upper surface of the hydrophilic insulating layer 9 . Since the hydrophilicity of the exposed hydrophilic insulating layer 9 is greater than that of the hydrophobic insulating layer 5, the surface of the exposed hydrophilic insulating layer 9 will be covered with a layer of electrolyte solution, and the surface of the hydrophobic insulating layer 5 will be covered with a layer of ink 8. The thickness of the exposed ink 8 on the side of the hydrophilic insulating layer 9 will be smaller than the thickness of the ink 8 on the side of the hydrophobic insulating layer 5, reducing the thickness of the side of the ink 8 can achieve the effect of reducing the driving threshold voltage. The second substrate includes an upper substrate 1 , a conductive layer 2 and an encapsulant frame 3 , an electrolyte solution 7 and ink 8 are filled between the first substrate and the second substrate, and the ink 8 is filled in the pixel cells. The upper substrate and the lower substrate seal the electrolyte solution 7 and the ink 8 between the upper substrate and the lower substrate through the encapsulant frame 3 . In a preferred embodiment, the contact angle of water droplets of the hydrophilic insulating material is less than or equal to 40°. In a further preferred embodiment, the material of the hydrophilic insulating layer 9 is silicon dioxide or titanium dioxide, and the hydrophobic insulating layer The material of layer 5 is fluoropolymer material or polyimide material. The material of the hydrophilic insulating layer 9 is a hydrophilic material. Due to the difference in wettability between the ink 8 material and the hydrophilic insulating layer 9 and the hydrophobic insulating layer 5, the thickness of the ink 8 is from the hydrophobic insulating layer The direction from the side of the layer 5 to the side of the hydrophilic insulating layer 9 is decreasing, and the three-phase contact line (ink 8, electrolyte solution 7 and insulating layer) is pre-formed at the edge where the hydrophilic insulating layer 9 is exposed, and the ink 8 Cracks occur at the thinnest position, and shrink from the hydrophilic insulating layer 9 side to the hydrophobic insulating layer 5 side. Effective control of ink 8 rupture position and ink 8 movement contraction direction when power is applied to wet display pixel unit. Since the threshold voltage required for the rupture of the ink 8 depends on the thickness of the thinnest part of the ink 8, the display of the present invention can effectively reduce the threshold voltage for turning on the pixel. The threshold voltage of the traditional electrowetting display is 24V~26V, and the aperture ratio reaches The driving voltage of 60% is about 35V, the threshold voltage of the electrowetting display of the present invention is 5V, and the driving voltage of 60% aperture ratio is 24V, which is significantly lower than the traditional electrowetting display, and the The inventive electrowetting display can also effectively avoid the risk of insulation layer breakdown caused by the notch design method due to local high charge density.

在优选的实施例中,每个所述像素格内露出的所述亲水绝缘层9的一侧边缘与每个所述像素格的同一方向的一边齐平。在进一步优选的实施例中,所述像素格内露出的所述亲水绝缘层9为狭长形,露出的所述狭长形亲水绝缘层9的一侧边缘与所述像素格的一边齐平。所述像素格内露出的所述亲水绝缘层9面积占所述像素格面积的比例小于等于5%。需要露出的所述亲水绝缘层9的面积大小与所述亲水绝缘层9的材料的亲水性能有关,材料的亲水性越强,需要露出的所述亲水绝缘层9的面积就越小。相同材料的亲水绝缘层9露出的面积越大,驱动电压越低,但同时要考虑到露出的亲水绝缘层9因为亲水的原因在未加电压的情况下也会有开口的现象,为了保证显示器的性能,所以露出面积也不宜太大。 In a preferred embodiment, one side edge of the hydrophilic insulating layer 9 exposed in each pixel grid is flush with one side in the same direction of each pixel grid. In a further preferred embodiment, the hydrophilic insulating layer 9 exposed in the pixel grid is elongated, and one side edge of the exposed elongated hydrophilic insulating layer 9 is flush with one side of the pixel grid . The proportion of the area of the hydrophilic insulating layer 9 exposed in the pixel grid to the area of the pixel grid is less than or equal to 5%. The size of the area of the hydrophilic insulating layer 9 that needs to be exposed is related to the hydrophilic performance of the material of the hydrophilic insulating layer 9. The stronger the hydrophilicity of the material, the larger the area of the hydrophilic insulating layer 9 that needs to be exposed. smaller. The larger the exposed area of the hydrophilic insulating layer 9 of the same material, the lower the driving voltage, but at the same time, it should be considered that the exposed hydrophilic insulating layer 9 will also have openings when no voltage is applied because of its hydrophilicity. In order to ensure the performance of the display, the exposed area should not be too large.

本发明还提供了一种如上所述的油墨运动可控的电润湿显示器的制备方法,包括制备双层绝缘层的步骤,所述双层绝缘层包括亲水绝缘层9和疏水绝缘层5,所述亲水绝缘层9完全覆盖所述下基板的导电层6的上表面,所述疏水绝缘层5覆盖所述亲水绝缘层9的上表面,在所述像素格内所述疏水绝缘层5露出部分所述亲水绝缘层9的上表面。所述制备双层绝缘层的步骤具体包括:在所述下基板的导电层6的上表面涂覆一层亲水绝缘材料,固化,制备得到亲水绝缘层9;在所述亲水绝缘层9的上表面涂覆一层疏水绝缘材料,固化,制备得到疏水绝缘层5;通过图形化干法刻蚀工艺刻蚀部分所述疏水绝缘层5,露出部分所述亲水绝缘层9。刻蚀的图形可以为任意的图形,在优选的实施例中,刻蚀的每个像素格内的所述疏水绝缘层5的图形的一侧边缘与每个所述像素格的同一方向的一边齐平。在进一步优选的实施例中,刻蚀的每个像素格内的所述疏水绝缘层5的图形为狭长形,所述狭长形图形的一侧边缘与所述像素格的一边齐平。所述干法刻蚀工艺包括溅射刻蚀、反应离子刻蚀和高密度等离子体刻蚀工艺。所述亲水绝缘材料的水滴的接触角小于等于40°,在优选的实施例中,所述亲水绝缘层材料为二氧化硅或二氧化钛。所述疏水绝缘层材料为含氟聚合物材料或聚酰亚胺材料。 The present invention also provides a method for preparing an electrowetting display with controllable ink movement as described above, including the step of preparing a double-layer insulating layer, the double-layer insulating layer comprising a hydrophilic insulating layer 9 and a hydrophobic insulating layer 5 , the hydrophilic insulating layer 9 completely covers the upper surface of the conductive layer 6 of the lower substrate, the hydrophobic insulating layer 5 covers the upper surface of the hydrophilic insulating layer 9, and the hydrophobic insulating layer 5 in the pixel grid Layer 5 exposes part of the upper surface of the hydrophilic insulating layer 9 . The step of preparing a double-layer insulating layer specifically includes: coating a layer of hydrophilic insulating material on the upper surface of the conductive layer 6 of the lower substrate, curing, and preparing a hydrophilic insulating layer 9; The upper surface of 9 is coated with a layer of hydrophobic insulating material and cured to prepare a hydrophobic insulating layer 5; a part of the hydrophobic insulating layer 5 is etched by a patterned dry etching process to expose a part of the hydrophilic insulating layer 9. The etched pattern can be any pattern. In a preferred embodiment, one side edge of the pattern of the hydrophobic insulating layer 5 in each etched pixel grid is the same as one side of each pixel grid in the same direction. flush. In a further preferred embodiment, the etched pattern of the hydrophobic insulating layer 5 in each pixel grid is long and narrow, and one side edge of the long and narrow pattern is flush with one side of the pixel grid. The dry etching process includes sputtering etching, reactive ion etching and high density plasma etching. The contact angle of water droplets of the hydrophilic insulating material is less than or equal to 40°. In a preferred embodiment, the material of the hydrophilic insulating layer is silicon dioxide or titanium dioxide. The material of the hydrophobic insulating layer is a fluorine-containing polymer material or a polyimide material.

Claims (10)

1.一种油墨运动可控的电润湿显示器,包括上基板和下基板,所述下基板包括导电层、设于所述导电层的上表面的绝缘层和设于所述绝缘层的上表面的像素墙,所述像素墙围成多个像素格,其特征在于,所述绝缘层为双层绝缘层,所述双层绝缘层包括亲水绝缘层和疏水绝缘层,所述亲水绝缘层完全覆盖所述导电层的上表面,所述疏水绝缘层设于所述亲水绝缘层的上表面,在所述像素格内所述疏水绝缘层露出部分所述亲水绝缘层的上表面。 1. An electrowetting display with controllable ink movement, comprising an upper substrate and a lower substrate, the lower substrate comprising a conductive layer, an insulating layer arranged on the upper surface of the conductive layer and an upper surface of the insulating layer The pixel wall on the surface, the pixel wall encloses a plurality of pixel grids, it is characterized in that the insulating layer is a double-layer insulating layer, and the double-layer insulating layer includes a hydrophilic insulating layer and a hydrophobic insulating layer, and the hydrophilic insulating layer The insulating layer completely covers the upper surface of the conductive layer, the hydrophobic insulating layer is arranged on the upper surface of the hydrophilic insulating layer, and the hydrophobic insulating layer exposes part of the hydrophilic insulating layer in the pixel grid. surface. 2.根据权利要求1所述的油墨运动可控的电润湿显示器,其特征在于,每个所述像素格内露出的所述亲水绝缘层的一侧边缘与每个所述像素格的同一方向的一边齐平。 2. The electrowetting display with controllable ink movement according to claim 1, characterized in that, one side edge of the hydrophilic insulating layer exposed in each pixel grid is in contact with each pixel grid. One side in the same direction is flush. 3.根据权利要求2所述的油墨运动可控的电润湿显示器,其特征在于,所述像素格内露出的所述亲水绝缘层为狭长形,露出的所述狭长形亲水绝缘层的一侧边缘与所述像素格的一边齐平。 3. The electrowetting display with controllable ink movement according to claim 2, wherein the hydrophilic insulating layer exposed in the pixel grid is elongated, and the elongated hydrophilic insulating layer exposed The edge of one side of the is flush with one side of the pixel grid. 4.根据权利要求1所述的油墨运动可控的电润湿显示器,其特征在于,所述像素格内露出的所述亲水绝缘层面积占所述像素格面积的比例小于等于5%。 4. The electrowetting display with controllable ink movement according to claim 1, wherein the proportion of the area of the hydrophilic insulating layer exposed in the pixel grid to the area of the pixel grid is less than or equal to 5%. 5.根据权利要求1所述的油墨运动可控的电润湿显示器,其特征在于,所述亲水绝缘材料的水滴的接触角小于等于40°。 5 . The electrowetting display with controllable ink movement according to claim 1 , wherein the contact angle of the water droplets of the hydrophilic insulating material is less than or equal to 40°. 6.根据权利要求1所述的油墨运动可控的电润湿显示器,其特征在于,所述疏水绝缘层材料为含氟聚合物材料或聚酰亚胺材料。 6 . The electrowetting display with controllable ink movement according to claim 1 , wherein the material of the hydrophobic insulating layer is a fluorine-containing polymer material or a polyimide material. 7.一种油墨运动可控的电润湿显示器的制备方法,其特征在于,包括制备双层绝缘层的步骤,所述双层绝缘层包括亲水绝缘层和疏水绝缘层,所述亲水绝缘层完全覆盖下基板的导电层的上表面,所述疏水绝缘层覆盖所述亲水绝缘层的上表面,在所述像素格内所述疏水绝缘层露出部分所述亲水绝缘层的上表面。 7. A method for preparing an electrowetting display with controllable ink movement, characterized in that it comprises the step of preparing a double-layer insulating layer, the double-layer insulating layer comprising a hydrophilic insulating layer and a hydrophobic insulating layer, the hydrophilic The insulating layer completely covers the upper surface of the conductive layer of the lower substrate, the hydrophobic insulating layer covers the upper surface of the hydrophilic insulating layer, and the hydrophobic insulating layer exposes part of the hydrophilic insulating layer in the pixel grid surface. 8.根据权利要求7所述的制备方法,其特征在于,所述制备双层绝缘层的步骤具体包括: 8. The preparation method according to claim 7, wherein the step of preparing a double insulating layer specifically comprises: 在下基板的导电层上表面涂覆一层亲水绝缘材料,固化,制备得到亲水绝缘层; Coating a layer of hydrophilic insulating material on the upper surface of the conductive layer of the lower substrate, curing, and preparing a hydrophilic insulating layer; 在所述亲水绝缘层的上表面涂覆一层疏水绝缘材料,固化,制备得到疏水绝缘层; Coating a layer of hydrophobic insulating material on the upper surface of the hydrophilic insulating layer and curing it to prepare a hydrophobic insulating layer; 通过图形化干法刻蚀工艺刻蚀部分所述疏水绝缘层,露出部分所述亲水绝缘层。 Part of the hydrophobic insulating layer is etched by a patterned dry etching process to expose part of the hydrophilic insulating layer. 9.根据权利要求7所述的制备方法,其特征在于,所述亲水绝缘材料的水滴的接触角小于等于40°。 9. The preparation method according to claim 7, characterized in that, the contact angle of the water droplet of the hydrophilic insulating material is less than or equal to 40°. 10.根据权利要求7-9任一项所述的制备方法,其特征在于,所述疏水绝缘层材料为含氟聚合物材料或聚酰亚胺材料。 10. The preparation method according to any one of claims 7-9, characterized in that, the material of the hydrophobic insulating layer is a fluorine-containing polymer material or a polyimide material.
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CN110609384A (en) * 2019-08-30 2019-12-24 华南师范大学 Device and method for controlling ink movement based on electrowetting technology
CN110609384B (en) * 2019-08-30 2024-01-16 华南师范大学 Device capable of controlling ink movement based on electrowetting technology and preparation method thereof
CN111258054A (en) * 2020-03-30 2020-06-09 深圳市华星光电半导体显示技术有限公司 Quantum dot display device and manufacturing method thereof
CN113009682A (en) * 2021-04-20 2021-06-22 京东方科技集团股份有限公司 Dimming glass, dimming device, dimming panel and vehicle

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