CN105436704A - Double processing head laser processing device based on radial polarization beams - Google Patents
Double processing head laser processing device based on radial polarization beams Download PDFInfo
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- CN105436704A CN105436704A CN201610017166.3A CN201610017166A CN105436704A CN 105436704 A CN105436704 A CN 105436704A CN 201610017166 A CN201610017166 A CN 201610017166A CN 105436704 A CN105436704 A CN 105436704A
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- 230000010287 polarization Effects 0.000 title claims abstract description 30
- 230000001105 regulatory effect Effects 0.000 claims abstract description 59
- 230000003287 optical effect Effects 0.000 claims abstract description 45
- 238000005086 pumping Methods 0.000 claims abstract description 20
- 239000000463 material Substances 0.000 claims description 16
- 239000002086 nanomaterial Substances 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 6
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 claims description 3
- 238000010276 construction Methods 0.000 claims description 3
- 229920002521 macromolecule Polymers 0.000 claims description 3
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- HIQSCMNRKRMPJT-UHFFFAOYSA-J lithium;yttrium(3+);tetrafluoride Chemical compound [Li+].[F-].[F-].[F-].[F-].[Y+3] HIQSCMNRKRMPJT-UHFFFAOYSA-J 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 14
- 239000007787 solid Substances 0.000 abstract description 7
- 238000005516 engineering process Methods 0.000 description 12
- 238000003754 machining Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 6
- 230000005284 excitation Effects 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 238000003698 laser cutting Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000009415 formwork Methods 0.000 description 2
- 238000005272 metallurgy Methods 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 206010034719 Personality change Diseases 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
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- Laser Beam Processing (AREA)
Abstract
The invention relates to a double processing head laser processing device based on radial polarization beams. A circular optical pumping source is arranged outside a solid gain medium element; pumping light emitted by the circular optical pumping source illuminates the interior of the solid gain medium element; a first reflecting mirror and a high reflecting cavity mirror are sequentially arranged in an inner side optical path of the solid gain medium element; a second reflecting mirror and a circular conical surface optical field regulating element are sequentially arranged in an outer side optical path of the solid gain medium element; a beam convergence component is arranged in a optical path, opposite to the first reflecting mirror, of the high reflecting cavity mirror; the circular conical surface optical field regulating element realizes the effect of generating an intracavity radial polarization vector beam; and a parallel optical-axis optical field is reflected at a top end plane of the circular conical surface optical field regulating element, and a near field laser processing optical field is formed outside the top end plane of the circular conical surface optical field regulating element. The double processing head laser processing device has the characteristics that the double processing head laser processing device can realize the effects of super-diffraction size near field processing and longitudinal polarization laser processing, and is convenient to construct, high in reliability and flexibility, and wide in application range.
Description
Technical field
The present invention relates to a kind of laser processing device, particularly a kind of two processing head laser processing devices based on radial polarized light beam, are mainly used in laser processing device in the fields such as material, automobile, electronics, electrical equipment, aviation, metallurgy, machine-building, light industry.
Background technology
Laser Processing normally utilizes the laser beam irradiation workpiece of high power density, make material molting and gasifying and bore a hole, the special process of cutting and welding etc., in the recent period, Laser Processing concept is expanded, interacted by laser and illuminated material, cause material behavior to change and the processing realizing processing result (such as, material is under laser irradiates, chemical bond ruptures, cause changes in material properties), also referred to as Laser Processing, with this, the Laser Processing of laser thermal effect is utilized to be called laser heat processing, the Laser Processing utilizing light characteristic to change material character change can be called laser cold working.Laser Processing can be divided into laser weld, laser cutting, laser marking, laser boring, LASER HEAT TREATMENT, laser formation, laser 3D to print according to concrete processing action classification.Laser Processing is widely used in fields such as material, automobile, electronics, electrical equipment, aviation, metallurgy, machine-building, light industry, and the range of application of Laser Processing seldom expands, and processing effect improves constantly.
In first technology, there is laser processing device, see Italian PRIMA company laser cutting machine, Shenzhen company of big nation laser-beam welding machine and laser cutting machine, the laser carving puncher of Wuhan Jin Yun company, Wuhan sky above Hubei and Hunan company, Wuhan unity, the laser processing device of the companies such as Chinese workers' science and technology, all there is fine use multi-field, these have suitable advantage at first laser processing technology, but, still there are some essence not enough: the laser beam that 1) laser processing device adopts is linearly polarized light, the light field polarization modes such as circularly polarized light, do not play laser coherence light field vectorial optical focus characteristics, the laser focal spot of Laser Processing is distributed as and surmounts ordinary optical focusing system diffraction limit size, therefore, processing focal spot lateral dimension is larger, focal spot depth of focus is short, remarkable impact and real Laser Processing effect and range of application, 2) in system of processing, there is a laser Machining head, the characteristics such as this sampling device flexibility, working (machining) efficiency, scope of application are subject to remarkable restriction, 3) after cannot realizing the strong-focusing of radial polarisation vector beam in essence, ultra-precise laser near field processes, and cannot realize the processing of super diffraction size near field, 4) longitudinal polarization laser processing light field cannot be realized in essence, limit the processed and applied of longitudinal polarization laser, polarization sensitive Laser Processing can not be realized, 5) first technique device flexibility, function expandability, reliability, simple for structure in limited, affect in first technology range of application.
Summary of the invention
The object of the invention is to the deficiency for above-mentioned technology, a kind of two processing head laser processing devices based on radial polarized light beam are provided, this device have radial polarisation vectorial field, beam quality is high, focal spot lateral dimension is little, depth of focus is long, processing effect is good, double excitation processing head, the processing of super diffraction size near field can be realized, the processing of longitudinal polarization laser can be realized, be convenient to build, the feature such as reliability is high, flexibility is strong, applied range.
Technical scheme of the present invention is: a kind of two processing head laser processing devices based on radial polarized light beam, comprise light beam and assemble parts, high reflective cavity mirror, the first speculum, solid-state gain medium element, circular type optical pumping source, the second speculum, the return element of taper seat light field, described solid-state gain medium element is slab construction, described solid-state gain medium member outboard is provided with circular type optical pumping source, and the pump light of circular type optical pumping source outgoing is radiated in solid-state gain medium element; The inner optical path of described solid-state gain medium element is provided with the first speculum and high reflective cavity mirror successively, solid-state gain medium member outboard light path is provided with successively the second speculum and taper seat light field regulating element; Described high reflective cavity mirror and taper seat light field regulating element form laserresonator, and described first speculum and the second speculum, for changing light propagation direction in laserresonator, make high reflective cavity mirror and taper seat light field regulating element towards machined article; High reflective cavity mirror assemble parts relative to the opposite side light path of the first speculum being provided with light beam, make radial polarized light beam assemble parts focus areas at light beam and form high-quality far-field laser processing light field; Described taper seat light field regulating element is axial symmetry prism structure, one end is top conical surface, one end is the top plan perpendicular to symmetry axis, is annular conical surface between conical surface and top plan, and cuing open object plane along the axial tangent plane of symmetry is axial symmetry pentagon; The top conical surface of taper seat light field regulating element is towards the second speculum, the top conical surface of taper seat light field regulating element and the angle of symmetry axis are the Brewster angle of laser work wavelength, realize radial polarization vector light beam in chamber to produce, parallel optical axis light field reflects at the top plan of taper seat light field regulating element, forms Laser Processing light field near field outside the top plan of taper seat light field regulating element.
Described high reflective cavity mirror is provided with the micro-nano structure regulating Beam Wave-Front phase place on working face in the first speculum side, and the outer working face of high reflective cavity mirror opposite side is provided with highly reflecting films, and in laser frequency, place has high reflectance.The material of described solid-state gain medium element is any one in neodymium-doped yttrium-aluminum garnet, lithium yttrium fluoride, self-activated laser crystal or tunable laser crystal.The described transmitance of optics working face to pump wavelength light because of state gain media element is greater than 95%.Described taper seat light field regulating element is any one in glass axial symmetry prism structure, crystal axis symmetric prisms structure or macromolecule light transmissive material axial symmetry prism structure.Described circular type optical pumping source is any one in incoherent light source, semiconductor laser, gas laser, solid-state laser or laser diode.
Compared with prior art, advantage of the present invention:
1) laser beam adopted at first technology laser processing device is the light field such as linearly polarized light, circularly polarized light polarization mode, do not play laser coherence light field vectorial optical focus characteristics, the laser focal spot of Laser Processing is distributed as and surmounts ordinary optical focusing system diffraction limit size, therefore, processing focal spot lateral dimension is larger, focal spot depth of focus is short, significantly impact and real Laser Processing effect and range of application.The present invention is based on opticaly-pumpedsolidlaser operation principle, adopt in chamber and become light path and intra-cavity phase regulation technology, use the polarization selectivity characteristic of taper seat optical effect and Brewster angle to realize vectorial field to select, realize radial polarisation vector beam eigen mode to produce, radial polarisation vector beam is carried out focus on and form the Laser Processing focal spot that focal spot lateral dimension is little and focal spot depth of focus is long, produce and given full play to radial polarisation vector beam eigen mode and focus on behavior, there is radial polarisation vectorial field, beam quality is high, focal spot lateral dimension is little, depth of focus is long, the features such as the good and range of application of processing effect,
2) in first technology system of processing, there is a laser Machining head, the characteristics such as this sampling device flexibility, working (machining) efficiency, scope of application are subject to remarkable restriction.The present invention assembles parts by high reverse--bias chamber outgoing radial polarized light beam and light beam and forms work laser Machining head; Longitudinal polarization Near-field optical field that taper seat light field regulating element end face outgoing strong-focusing radial polarisation vector beam is formed, as super diffraction size near field processing laser Machining head, build the two processing head laser processing devices based on radial polarized light beam, realize double excitation processing head pattern;
3) cannot realize the strong-focusing of radial polarisation vector beam on first technological essence after, ultra-precise laser near field processes, and cannot realize the processing of super diffraction size near field.Outgoing radial polarized light beam in high reverse--bias chamber of the present invention, assemble parts with light beam and form work laser Machining head, in high reverse--bias chamber, a side plane is provided with micro-nano structure, change the distribution of radial polarisation vector beam Wave-front phase, regulate radial polarisation vector beam intrinsic light field pattern, radial polarized light beam, through wave-front phase modulation, realizes ultra-precise laser processing.Taper seat light field regulating element end face, as super diffraction size near field processing laser Machining head, can realize the processing of ultra-precise laser near field and surpass the processing of diffraction size near field;
4) longitudinal polarization laser processing light field cannot be realized on first technological essence, limit the processed and applied of longitudinal polarization laser, polarization sensitive Laser Processing can not be realized.Longitudinal polarization Near-field optical field that taper seat light field regulating element end face outgoing strong-focusing radial polarisation vector beam of the present invention is formed, can realize the processed and applied of longitudinal polarization laser, realize polarization sensitive Laser Processing;
5) first technique device flexibility, function expandability, reliability, simple for structure in limited, affect in first technology range of application.The present invention is based on vectorial field eigen mode and produce far field and near-field vector light beam for Laser Processing, have be convenient to build, the feature such as reliability is high, flexibility is strong, applied range.
Accompanying drawing explanation
Fig. 1 is the two processing head laser processing device structural representations based on radial polarized light beam of the present invention.
Detailed description of the invention
Below in conjunction with drawings and Examples, the invention will be further described.
As shown in Figure 1, based on two processing head laser processing devices for radial polarized light beam, comprising: light beam assembles parts 3, high reflective cavity mirror 4, first speculum 5, solid-state gain medium element 6, circular type optical pumping source 7, second speculum 8, the return element 9 of taper seat light field; Be slab construction at solid-state gain medium element 6, the optics working face of state gain media element 6 has high permeability to pump wavelength light, solid-state gain medium element 6 arranged outside has circular type optical pumping source 7, and the pump light of circular type optical pumping source 7 outgoing is radiated in solid-state gain medium element 6; The side light path of solid-state gain medium element 6 is provided with successively the first speculum 5 and high reflective cavity mirror 4, high reflective cavity mirror 4 is provided with the micro-nano structure regulating Beam Wave-Front phase place on working face 401 in the first speculum 5 side, the outer working face 402 of high reflective cavity mirror 4 opposite side is provided with highly reflecting films, and in laser frequency, place has high reflectance; The opposite side light path of solid-state gain medium element 6 is provided with the second speculum 8 and taper seat light field regulating element 9 successively; High reflective cavity mirror 4 and taper seat light field regulating element 9 form laserresonator, and the first speculum 5 and the second speculum 8 change light propagation direction in laserresonator, make high reflective cavity mirror 4 and taper seat light field regulating element 9 towards machined article; The opposite side light path relative to the first speculum 5 of high reflective cavity mirror 4 is provided with light beam and assembles parts 3, radial polarized light beam is assembled parts 3 focus area at light beam and is formed high-quality far-field laser processing light field 2; Taper seat light field regulating element 9 is axial symmetry prism structure, one end is top conical surface 901, one end is the top plan 903 perpendicular to symmetry axis, be annular conical surface 902 between conical surface 901 and top plan 903, cuing open object plane along the axial tangent plane of symmetry is axial symmetry pentagon; The top conical surface 901 of taper seat light field regulating element 9 is towards the second speculum 8, top conical surface 901 and the angle of symmetry axis of taper seat light field regulating element 9 are the Brewster angle of laser work wavelength, realize radial polarization vector light beam in chamber to produce, parallel optical axis light field reflects at the top plan 903 of taper seat light field regulating element 9, forms near field Laser Processing light field 10 outside the top plan 903 of taper seat light field regulating element 9.
In the present embodiment, the material of described state gain media element 6 is neodymium-doped yttrium-aluminum garnet, and the optics working face of state gain media element 6 is 97% to the transmitance of pump wavelength light; Taper seat light field regulating element 9 is macromolecule light transmissive material axial symmetry prism structure; Circular type optical pumping source 7 is the laser diode of 808 nano wave lengths; The outer working face 402 of high reflective cavity mirror 4 opposite side is provided with highly reflecting films, and the reflectivity being directed to 1064 nanometers is 97%.
The course of work of the present embodiment: circular type optical pumping source 7 launches pump beam, is irradiated to solid-state gain medium element 6, and solid-state gain medium element 6, under optical pumping effect, stimulated radiation occurs; Stimulated radiation light field is respectively through the first speculum 5 and high reflective cavity mirror 4, and the second speculum 8 and taper seat light field regulating element 9, at the laserresonator generation resonance that high reflective cavity mirror 4 and taper seat light field regulating element 9 are formed.When gain is greater than loss, produce laser and realize laser from the top plan 903 of high reflective cavity mirror 4 and taper seat light field regulating element 9, conical surface light field regulating element 9 top conical surface 901 and the angle of symmetry axis be the Brewster angle of laser work wavelength, realize radial polarization vector light field in chamber to select, realize radial polarisation vector beam.High reflective cavity mirror 4 is provided with the micro-nano structure regulating Beam Wave-Front phase place on working face 401 in the first speculum 5 side, for regulating light field phase place, high-quality radial polarisation vectorial field is achieved in high reflective cavity mirror 4 Laser output side, assemble parts 3 through light beam again to focus on, form high-quality far-field laser processing light field 2, far field processed sample 1 can be processed.Taper seat light field regulating element 9 is axial symmetry prism structure, one end is top conical surface 901, one end is the top plan 903 perpendicular to symmetry axis, it is annular conical surface 902 between conical surface 901 and top plan 903, cuing open object plane along the axial tangent plane of symmetry is axial symmetry pentagon, achieve near field Laser Processing light field 10 at the top plan 903 of taper seat light field regulating element 9, the Laser Processing of high-quality near-field vector can be implemented near field processed sample 11.
The present embodiment achieves the generation of radial polarisation vectorial field in high reflective cavity mirror 4 Laser output side, high-quality far-field laser processing light field 2 is formed through assembling parts 3 focus area at light beam, high-quality Laser Processing has been carried out to far field processed sample 1, far field processed sample 1 is macromolecular material plate, and the crack of laser cutting is of a size of 200 nanometers; Near field Laser Processing light field 10 is achieved at the top plan 903 of taper seat light field regulating element 9, high-quality is achieved near field processed sample 11 and surpasses diffraction limit dimensioned, near field processed sample 11 is photaesthesia film material, and the characteristic size of Laser Processing line is 90 nanometers.The present invention has radial polarisation vectorial field, beam quality is high, focal spot lateral dimension is little, depth of focus is long, processing effect is good, double excitation processing head, the processing of super diffraction size near field can be realized, the processing of longitudinal polarization laser can be realized, be convenient to build, the feature such as reliability is high, flexibility is strong, applied range.
Basic conception of the present invention is: based on opticaly-pumpedsolidlaser operation principle, adopts in chamber and becomes light path and phase adjustment techniques, uses the polarization selectivity characteristic of taper seat optical effect and Brewster angle to realize vectorial field and selects.Stimulated radiation is there is in solid state laser gain medium under the effect of annular pump beam, high reflective cavity mirror and taper seat light field regulating element form resonator, taper seat light field regulating element is axial symmetry prism structure, one end is top conical surface, one end is the top plan perpendicular to symmetry axis, be annular conical surface between conical surface and top plan, cuing open object plane along the axial periphery of symmetry along the tangent plane of its symmetry axis is axial symmetry pentagon.Solid state laser gain medium both sides in resonator are respectively arranged with speculum, change high reverse--bias chamber and taper seat light field regulating element laser emitting end face towards, in high reverse--bias chamber, a side plane is provided with micro-nano structure, change the distribution of radial polarisation vector beam Wave-front phase, regulate radial polarisation vector beam intrinsic light field pattern.High reverse--bias chamber outgoing radial polarized light beam, assembles parts with light beam and forms work laser Machining head; Longitudinal polarization Near-field optical field that taper seat light field regulating element end face outgoing strong-focusing radial polarisation vector beam is formed, as super diffraction size near field processing laser Machining head.This laser processing device has radial polarisation vectorial field, beam quality is high, focal spot lateral dimension is little, depth of focus is long, processing effect is good, double excitation processing head, the processing of super diffraction size near field can be realized, the processing of longitudinal polarization laser can be realized, be convenient to build, the feature such as reliability is high, flexibility is strong, applied range.
In the present invention, solid state laser operation principle, Brewster angle action principle, taper seat optics working face process technology, optical pumping, vectorial field focussing property, micro-nano structure processing are mature technology.Inventive point of the present invention is based on opticaly-pumpedsolidlaser operation principle, adopt in chamber and become light path and phase adjustment techniques, use the polarization selectivity characteristic of taper seat optical effect and Brewster angle to realize vectorial field to select, in chamber, the regulatable radial polarisation vectorial field of eigen mode produces.Assemble parts by high reverse--bias chamber outgoing radial polarized light beam and light beam and form work laser Machining head; Longitudinal polarization Near-field optical field that taper seat light field regulating element end face outgoing strong-focusing radial polarisation vector beam is formed, as super diffraction size near field processing laser Machining head, builds the two processing head laser processing devices based on radial polarized light beam.The present invention provides a kind of radial polarisation vectorial field, beam quality is high, focal spot lateral dimension is little, depth of focus is long, processing effect is good, double excitation processing head, the processing of super diffraction size near field can be realized, the processing of longitudinal polarization laser can be realized, be convenient to build, the laser processing device of the feature such as reliability is high, flexibility is strong, applied range.
The present invention is based on the course of work of two processing head laser processing devices of radial polarized light beam: circular type optical pumping source launches pump beam, and be irradiated to solid-state gain medium element, solid-state gain medium element, under optical pumping effect, stimulated radiation occurs; Stimulated radiation light field is respectively through the first speculum and high reflective cavity mirror, and the second speculum and taper seat light field regulating element, at the laserresonator generation resonance that high reflective cavity mirror and taper seat light field regulating element are formed.When gain is greater than loss, produce laser and realize laser from the top plan of high reflective cavity mirror and taper seat light field regulating element, conical surface light field regulating element top conical surface and the angle of symmetry axis be the Brewster angle of laser work wavelength, realize radial polarization vector light field in chamber to select, realize radial polarisation vector beam.High reflective cavity mirror is provided with the micro-nano structure regulating Beam Wave-Front phase place on working face in the first speculum side, for regulating light field phase place, high-quality radial polarisation vectorial field is achieved in high reflective cavity mirror Laser output side, assemble parts through light beam again to focus on, form high-quality far-field laser processing light field, far field processed sample can be processed.Taper seat light field regulating element is axial symmetry prism structure, one end is top conical surface, one end is the top plan perpendicular to symmetry axis, it is annular conical surface between conical surface and top plan, cuing open object plane along the axial tangent plane of symmetry is axial symmetry pentagon, achieve near field Laser Processing light field at the top plan of taper seat light field regulating element, the Laser Processing of high-quality near-field vector can be implemented near field processed sample.
Claims (6)
1. the two processing head laser processing devices based on radial polarized light beam, comprise light beam and assemble parts (3), high reflective cavity mirror (4), first speculum (5), solid-state gain medium element (6), circular type optical pumping source (7), second speculum (8), the return element of taper seat light field (9), it is characterized in that: described solid-state gain medium element is slab construction, described solid-state gain medium element (6) arranged outside has circular type optical pumping source (7), the pump light of circular type optical pumping source (7) outgoing is radiated in solid-state gain medium element (6), the inner optical path of described solid-state gain medium element (6) is provided with successively the first speculum (5) and high reflective cavity mirror (4), solid-state gain medium element (6) outer optical path is provided with successively the second speculum (8) and taper seat light field regulating element (9), described high reflective cavity mirror (4) and taper seat light field regulating element (9) form laserresonator, described first speculum (4) and the second speculum (8), for changing light propagation direction in laserresonator, make high reflective cavity mirror (4) and taper seat light field regulating element (9) towards machined article, the opposite side light path relative to the first speculum (5) of high reflective cavity mirror (4) is provided with light beam and assembles parts (3), make radial polarized light beam assemble parts (3) focus area at light beam and form high-quality far-field laser processing light field (2), described taper seat light field regulating element (9) is axial symmetry prism structure, one end is top conical surface (901), one end is the top plan (903) perpendicular to symmetry axis, be annular conical surface (902) between conical surface (901) and top plan (903), cuing open object plane along the axial tangent plane of symmetry is axial symmetry pentagon, the top conical surface (901) of taper seat light field regulating element (9) is towards the second speculum (8), the top conical surface (901) of taper seat light field regulating element (9) and the angle of symmetry axis are the Brewster angle of laser work wavelength, realize radial polarization vector light beam in chamber to produce, parallel optical axis light field reflects at the top plan (903) of taper seat light field regulating element (9), forms near field Laser Processing light field (10) in top plan (903) outside of taper seat light field regulating element (9).
2. the two processing head laser processing devices based on radial polarized light beam according to claim 1, it is characterized in that: described high reflective cavity mirror (4) is provided with the micro-nano structure regulating Beam Wave-Front phase place on the interior working face (401) of the first speculum (5) side, the outer working face (402) of high reflective cavity mirror (4) opposite side is provided with highly reflecting films, and in laser frequency, place has high reflectance.
3. the two processing head laser processing devices based on radial polarized light beam according to claim 1, is characterized in that: the material of described solid-state gain medium element (6) is any one in neodymium-doped yttrium-aluminum garnet, lithium yttrium fluoride, self-activated laser crystal or tunable laser crystal.
4. the two processing head laser processing devices based on radial polarized light beam according to claim 1, is characterized in that: the transmitance of optics working face to pump wavelength light of described solid-state gain medium element (6) is greater than 95%.
5. the two processing head laser processing devices based on radial polarized light beam according to claim 1, is characterized in that: described taper seat light field regulating element (9) is glass axial symmetry prism structure, any one in crystal axis symmetric prisms structure or macromolecule light transmissive material axial symmetry prism structure.
6. the two processing head laser processing devices based on radial polarized light beam according to claim 1, is characterized in that: described circular type optical pumping source (7) is incoherent light source, any one in semiconductor laser, gas laser, solid-state laser or laser diode.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113231741A (en) * | 2021-04-26 | 2021-08-10 | 南京航空航天大学 | Laser welding device and method based on annular facula coaxial wire feeding |
| WO2021226733A1 (en) * | 2020-05-12 | 2021-11-18 | 济南森峰科技有限公司 | Laser apparatus with frustum-shaped rotating mirror |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2146989C1 (en) * | 1998-04-06 | 2000-03-27 | Институт проблем лазерных и информационных технологий РАН | Method of laser treatment of metals |
| EP2327503A1 (en) * | 2009-11-25 | 2011-06-01 | Boegli-Gravures S.A. | Method and device for structuring a solid body surface with a hard coating with a first laser with pulses in the nanosecond field and a second laser with pulses in the pico- or femtosecond field |
| CN102642092A (en) * | 2012-04-13 | 2012-08-22 | 北京信息科技大学 | Laser beam based micropore machining device and method |
| WO2013058072A1 (en) * | 2011-10-20 | 2013-04-25 | 新日鐵住金株式会社 | Laser processing device and laser processing method |
| CN104102015A (en) * | 2013-04-09 | 2014-10-15 | 深圳市大族激光科技股份有限公司 | Radial-polarization-light generation device and laser processing system |
| CN204867828U (en) * | 2015-04-15 | 2015-12-16 | 黑龙江大学 | Femto second laser processingequipment based on radial polarized light |
-
2016
- 2016-01-12 CN CN201610017166.3A patent/CN105436704B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2146989C1 (en) * | 1998-04-06 | 2000-03-27 | Институт проблем лазерных и информационных технологий РАН | Method of laser treatment of metals |
| EP2327503A1 (en) * | 2009-11-25 | 2011-06-01 | Boegli-Gravures S.A. | Method and device for structuring a solid body surface with a hard coating with a first laser with pulses in the nanosecond field and a second laser with pulses in the pico- or femtosecond field |
| WO2013058072A1 (en) * | 2011-10-20 | 2013-04-25 | 新日鐵住金株式会社 | Laser processing device and laser processing method |
| CN102642092A (en) * | 2012-04-13 | 2012-08-22 | 北京信息科技大学 | Laser beam based micropore machining device and method |
| CN104102015A (en) * | 2013-04-09 | 2014-10-15 | 深圳市大族激光科技股份有限公司 | Radial-polarization-light generation device and laser processing system |
| CN204867828U (en) * | 2015-04-15 | 2015-12-16 | 黑龙江大学 | Femto second laser processingequipment based on radial polarized light |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021226733A1 (en) * | 2020-05-12 | 2021-11-18 | 济南森峰科技有限公司 | Laser apparatus with frustum-shaped rotating mirror |
| CN113231741A (en) * | 2021-04-26 | 2021-08-10 | 南京航空航天大学 | Laser welding device and method based on annular facula coaxial wire feeding |
| CN113231741B (en) * | 2021-04-26 | 2022-04-19 | 南京航空航天大学 | A laser welding device and method based on annular spot coaxial wire feeding |
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