CN105428272A - Method and device for treating semiconductor device alarm - Google Patents
Method and device for treating semiconductor device alarm Download PDFInfo
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- CN105428272A CN105428272A CN201410373642.6A CN201410373642A CN105428272A CN 105428272 A CN105428272 A CN 105428272A CN 201410373642 A CN201410373642 A CN 201410373642A CN 105428272 A CN105428272 A CN 105428272A
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Abstract
The invention discloses a method and a device for treating a semiconductor device alarm, wherein the method comprises the following steps of receiving a feedback signal of a machine board device; determining whether the feedback signal is a device abnormity signal; and if yes, transmitting an alarm sequence number which comprises an alarm component number and an alarm type number. According to the method and the device for treating the semiconductor device alarm, when the semiconductor device generates a fault alarm, the specific alarm sequence number which contains a meaning is generated. Technological processing personnel can direct position a mechanical component of the device with the fault according to the alarm sequence number and quickly eliminate the fault, thereby improving efficiency of technological processing production.
Description
Technical field
The present invention relates to technical field of semiconductors, particularly relate to a kind of method and device of semiconductor equipment alert process.
Background technology
In field of semiconductor processing, when board equipment there occurs some unusual condition and needs user intervention or notify user, an alarm of can dishing out is to user.This alarm is called Alarm.When an alarm is dished out, user can see the sequence number (number) of Alarm, and generally, this number does not have actual meaning, is exactly a random numeral, just requires each Alarm and number one_to_one corresponding.If it is that user distinguishes with will be clear that for what abnormal conditions, the description (message, discription) of alarm need be checked.Sometimes user still cannot orientation problem place, will seek help to developer, and because user's level is uneven, can not clearly describe when user exchanges with developer is which is reported to the police and dishes out actually, brings certain difficulty for developer's orientation problem.
In sum, it is problem demanding prompt solutions that abnormal conditions are distinguished in the warning how sent by semiconductor equipment fast and accurately.
Summary of the invention
Based on this, be necessary method and the device of the semiconductor equipment alert process that a kind of abnormal conditions that processes personnel can be made to be occurred by the accurate judgment device of warning that board equipment is dished out are provided.
For realizing the method for the semiconductor equipment alert process that the object of the invention provides, comprise the following steps:
The feedback signal of receiver station equipment;
Judge whether described feedback signal is unit exception signal;
If so, warning sequence number is then sent;
Described warning sequence number comprises warning piece number and type of alarm number.
As a kind of embodiment of method of semiconductor equipment alert process, described in send the warning sequence number be made up of warning piece number and type of alarm number, comprise the following steps:
Read the preset alarm sequence number that described unit exception signal is corresponding;
Described preset alarm sequence number is formed together with other alarm parameters a complete warning, and send;
Other parameters described comprise alarm name, simple describe and describe in detail in one or two or more.
As a kind of embodiment of method of semiconductor equipment alert process, described method is further comprising the steps of:
By the warning piece in described semiconductor equipment and described warning piece one_to_one corresponding, and be stored in database;
By the implication one_to_one corresponding of described type of alarm number and type of alarm number, and be stored in database.
As a kind of embodiment of method of semiconductor equipment alert process, described warning piece number is the numeral of more than three or three;
Described type of alarm number is the numeral of more than three or three.
As a kind of embodiment of method of semiconductor equipment alert process, described by the warning piece in described semiconductor equipment and described warning piece one_to_one corresponding, and be stored in database, comprise the following steps:
Warning piece in described semiconductor equipment is divided into multiple module according to practical function, the warning piece section that different modules is corresponding different;
Warning piece section corresponding to the module belonging to described warning piece determines warning piece number;
Described warning piece number and corresponding warning piece number are stored in database.
As a kind of embodiment of method of semiconductor equipment alert process, further comprising the steps of:
Warning piece corresponding to warning sequence number that described semiconductor equipment sends and type of alarm is searched from described database.
Based on the device of a kind of semiconductor equipment alert process of same inventive concept, comprise signal receiving module, abnormal judge module, and alarm module, wherein:
Described signal receiving module, for the feedback signal of receiver station equipment;
Described abnormal judge module, for judging whether described feedback signal is unit exception signal;
Described alarm module, for sending warning sequence number according to described unit exception signal;
Described warning sequence number comprises warning piece number and type of alarm number.
As a kind of embodiment of device of semiconductor equipment alert process, described alarm module comprises sequence number reading submodule and group alarm submodule, wherein:
Described sequence number reading submodule, for reading preset alarm sequence number corresponding to described unit exception signal;
Described group alarm submodule, for described preset alarm sequence number being formed together with other alarm parameters a complete warning, and sends;
Other parameters described comprise alarm name, simple describe and describe in detail in one or two or more.
As a kind of embodiment of device of semiconductor equipment alert process, described device also comprises warning piece memory module and type of alarm memory module, wherein:
Described warning piece memory module, for by the warning piece in described semiconductor equipment and described warning piece one_to_one corresponding, and is stored in database;
Described type of alarm memory module, for the implication one_to_one corresponding by described type of alarm number and type of alarm number, and is stored in database.
As a kind of embodiment of device of semiconductor equipment alert process, described warning piece memory module comprises Module Division submodule, warning piece number determines submodule and sub module stored, wherein:
Described Module Division submodule, for warning piece in described semiconductor equipment is divided into multiple module according to practical function, the warning piece section that different modules is corresponding different;
Described warning piece number determines submodule, and the warning piece section corresponding for the module belonging to described warning piece determines warning piece number;
Described sub module stored, for being stored into described warning piece number and corresponding warning piece number in database.
As a kind of embodiment of device of semiconductor equipment alert process, also comprise and search module, for searching warning piece corresponding to warning sequence number that described semiconductor equipment sends and type of alarm from described database.
Beneficial effect of the present invention comprises:
The method of a kind of semiconductor equipment alert process provided by the invention and device, by defining the numbering of each corresponding parts of reporting to the police, and the type of alarm numbering of dissimilar warning correspondence, make equipment when dishing out fault alarm, the significant warning sequence number of specific band of dishing out.Processes personnel can be directly targeted to the mechanical part of the equipment broken down according to warning sequence number, cooler in this way, and problem has appearred in thermostat or dry pump.Eliminate in conventional art the step of the detailed description of checking warning.More avoid due to the communication problem between processes personnel and control software design developer.Make processes personnel can quick position solve unit exception situation, improve the efficiency that processes is produced.
Accompanying drawing explanation
Fig. 1 is the flow chart of a specific embodiment of the method for a kind of semiconductor equipment alert process of the present invention;
Fig. 2 is the system configuration schematic diagram of a specific embodiment of the device of a kind of semiconductor equipment alert process of the present invention;
Fig. 3 is that the warning piece memory module of a specific embodiment of the device of a kind of semiconductor equipment alert process of the present invention forms schematic diagram.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, be described below in conjunction with the embodiment of accompanying drawing to the method for semiconductor equipment alert process of the present invention.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
The method of the semiconductor equipment alert process of the embodiment of the present invention, as shown in Figure 1, comprises the following steps:
S100, the feedback signal of receiver station equipment.
S200, judges whether feedback signal is unit exception signal.As do not reacted to cooler during cooler communication, then can conclude that fault has appearred in process equipment.Now, the unresponsive empty feedback signal of cooler, or the feedback signal of disconnecting is then unit exception signal.Control program should send fault alarm.
S300, when receiving unit exception signal, then sends the warning sequence number comprising warning piece number and type of alarm number.
Certainly, when semiconductor equipment processes process is without equipment fault, equipment, without the need to warning of dishing out, performs processes, until processes completes according to blas.
The embodiment of the present invention adopts the mode of warning piece number+type of alarm number to carry out group alarm.A few bit digital can be chosen according to the situation of reality and represent warning piece number, choose a few bit digital according to actual conditions and represent type of alarm number.
Wherein, warning piece number, adopts the part number of unique ID (Identification, authentication) number corresponding unique software.The part number of software is different from the Machinery Ministry piece number of equipment, and by software definition and maintenance, a record can be dished out warning piece.As a dry pump, in time breaking down, software can be dished out alarm, and this dry pump is identified as the parts of a software; As a screw, although there are this parts, software can not be dished out about the warning of this screw, so nonrecognition is the parts of a software.
Be programmed in program code by the warning piece determined number and type of alarm number, in processes process, when board equipment (processes hardware device) feedback signal is abnormal, control program is dished out when dishing out and reporting to the police sequence number of specifically reporting to the police.
The method of the semiconductor equipment alert process of the embodiment of the present invention, by defining the numbering of each corresponding parts of reporting to the police, and the type of alarm numbering of dissimilar warning correspondence, make equipment when dishing out fault alarm, the significant warning sequence number of specific band of dishing out.Processes personnel can be directly targeted to the mechanical part of the equipment broken down according to warning sequence number, cooler in this way, and problem has appearred in thermostat or dry pump.Eliminate in conventional art the step of the detailed description of checking warning.More avoid due to the communication problem between processes personnel and control software design developer.Make processes personnel can quick position removing barriers, improve the efficiency that processes is produced.
In the embodiment of the method for a semiconductor equipment alert process wherein, warning sequence number be the warning piece of current alerts number front, type of alarm number is in the combination of numbers of rear formation.As, when warning piece number adopts three bit digital to represent, then can determine the parts broken down according to the front three in warning sequence number, latter several of warning sequence number then represent type of alarm.
In the embodiment of the method for a semiconductor equipment alert process wherein, step S300, when receiving unit exception signal, then sends the warning sequence number comprising warning piece number and type of alarm number, comprises the following steps:
Steps A, the preset alarm sequence number that fetch equipment abnormal signal is corresponding.As previously mentioned, the warning sequence number be made up of warning piece number and type of alarm number is programmed in program code in advance, the warning sequence number that warning correspondence when program performs relevant position is fixing.Read fixing warning sequence number, i.e. preset alarm sequence number, to use when sending warning.It should be noted that herein, also can adopt the mode of preset configuration file that warning and sequence number of reporting to the police accordingly thereof are set one to one.After receiving unit exception signal, from configuration file, read sequence number of reporting to the police accordingly.
Step B, by preset alarm sequence number and other alarm parameters, as alarm name, simply describes, and describes in detail, severity level etc., the warning that composition one is complete together, and sends.
Similar with conventional art, in the embodiment of the present invention when semiconductor equipment breaks down, send and comprise alarm name, numeral (warning sequence number), the simple warning describing (message) and describe information such as (description) in detail.Simple description is the explanation to a summary of reporting to the police, as communication failure etc.; And detailed description is to reporting to the police comparatively detailed description, e.g., host computer sends signal, and slave computer does not respond, or slave computer temperature value is not at setting range etc.Relative to the meaningless numeral of conventional art, the sequence number in the warning that the embodiment of the present invention sends is well-determined, the type that can navigate to concrete out of order parts according to it and break down.Again in conjunction with warning other parameters together, determine equipment fault reason more accurately, thus determine solution, the equipment fault of quick solution board, resumes production.Reduce equipment fault loss.
In the embodiment of the method for a semiconductor equipment alert process wherein, further comprising the steps of:
S010, by the warning piece in semiconductor equipment and warning piece one_to_one corresponding, and is stored in database.
S020, by the implication one_to_one corresponding of type of alarm number and type of alarm number, and is stored in database.
Preferably, as a kind of embodiment, the implication type of alarm table of comparisons one to one of type of alarm number and type of alarm number can be set up, and the type of alarm table of comparisons is stored in database.
In the embodiment of the present invention, warning piece number and type of alarm number are stored in database, so that processes personnel are when equipment dishes out warning, according to the sequence number of reporting to the police to the corresponding implication of database lookup, determine the parts of fault and the concrete meaning of fault, and by specifically seeking advice from developer, waste of time need not be reduced, improve the whole efficiency of producing.Even if when needs consulting developer, developer also judges alarm condition rapidly by warning sequence number, accelerates alarm failure processing speed.
Preferably, warning piece and part number contrast relationship and type of alarm number and corresponding implication are stored in database, also rear typing warning sequence number of reporting to the police can sent to computer, search warning piece corresponding to warning sequence number and type of alarm number corresponding implication in a database by computer, and inform processes personnel in the mode playing frame or printing.
Wherein step S010 and step S020 does not have strict tandem, and the enforcement of this two step can complete before coding code, also can after completing technique executive program, according to the corresponding part number table of comparisons of the code construction in the technique executive program write and the type of alarm table of comparisons.
In the embodiment of the method for a semiconductor equipment alert process wherein, warning piece number is the numeral of more than three or three; Type of alarm number is the numeral of more than three or three.
In order to make number explicitly neatly unification, warning piece number being set, needing to follow a rule.As warning piece number adopts three bit digital to represent, digital scope needs from 100 to 999, and does not adopt the numeral of 0 to 99, and type of alarm number also adopts the representation of three bit digital, just can unify to represent by six bit digital for No. number of such warning, and there will not be four figures, five-digit number etc.
Preferably, as a kind of embodiment, warning piece and the warning piece number one to one warning piece table of comparisons can be set up in semiconductor equipment, and the warning piece table of comparisons is stored in database.
In the embodiment of the method for a semiconductor equipment alert process wherein, the warning piece number that the order determining means of adding in the warning piece table of comparisons according to parts is corresponding, warning piece number adds up gradually.As shown in table 1.
The parts warning table of comparisons of addition sequence numbering pressed by table 1
| Component names | Warning piece number |
| Cooler | 100 |
| Thermostat | 101 |
| Dry pump | 102 |
| …… | …… |
| …… | …… |
| Molecular pump | 233 |
| …… | …… |
In the embodiment of the method for a semiconductor equipment alert process wherein, the warning piece likely sending warning in semiconductor equipment is divided into multiple module according to practical function, the warning piece section that different modules is corresponding different.Such as the parts of vacuum air-channel module terminate to 199 from 100, and temperature control module terminates to 299 from 200, and radio-frequency module terminates to 399 from 300.As shown in table 2.
Table 2 is according to the parts warning table of comparisons dividing module numbering
| Component names | Warning piece number |
| Dry pump | 100 |
| Molecular pump | 101 |
| …… | …… |
| Thermostat | 200 |
| …… | …… |
| Upper radio-frequency power supply | 300 |
| Lower radio-frequency power supply | 301 |
| …… | …… |
It should be noted that herein, include a large amount of equipments unit in semiconductor technology process equipment, all warning pieces that may send warning are numbered; And in board equipment, also include a lot of and that equipment alarm is irrelevant parts, this section components is not numbered, reduces the follow-up workload according to numbering query facility, also reduce the size of the warning piece table of comparisons.Save human and material resources resource.
Equally, according to the difference of type of alarm, can by corresponding for the type of alarm of large for difference class different type of alarm segment, as shown in table 3.
Table 3 type of alarm section divides
It should be noted that the type of alarm of the interlocking alarm of value type number of establishing in table is arranged between 0-99 herein, but adopt the form that three bit digital represent when writing warning sequence number, ensure that the warning sequence number generated is 6 unified bit digital.
As shown in table 4 according to number type of alarm table of comparisons that the scope divided builds of type of alarm above.The implication that each type of alarm correspondence one is concrete.
The table 4 type of alarm table of comparisons
In aforesaid multiple embodiment, each warning piece number unique correspondence parts, make processes personnel free from errorly in the least can determine warning piece by warning piece number.
In the embodiment of the method for a semiconductor equipment alert process wherein, further comprising the steps of:
S400, searches warning piece corresponding to warning sequence number that semiconductor equipment sends and type of alarm from database.
As for cooler, if its part number is 100, then the implication of this device-dependent warning sequence number is as shown in table 5.
Table 5 cooler warning sequence number and corresponding meaning
Processes personnel can process manufacturing and processing equipment fault by the concrete meaning corresponding according to warning sequence number, to recover normal processes as early as possible, enhance productivity.
Based on same inventive concept, the embodiment of the present invention provides a kind of device of semiconductor equipment alert process, the principle of dealing with problems due to this device is similar to the method for aforementioned a kind of semiconductor equipment alert process, therefore, the enforcement of this device can realize according to the concrete steps of preceding method, repeats part and repeats no more.
The device of a kind of semiconductor equipment alert process of the embodiment of the present invention, as shown in Figure 2, comprises signal receiving module 100, abnormal judge module 200, and alarm module 300.Wherein: described signal receiving module 100, for the feedback signal of receiver station equipment; Described abnormal judge module 200, for judging whether described feedback signal is unit exception signal; Described alarm module 300, for sending the warning sequence number comprising warning piece number and type of alarm number according to described unit exception signal.
The device of the semiconductor equipment alert process of the embodiment of the present invention, by defining the numbering of each corresponding parts of reporting to the police, and the type of alarm numbering of dissimilar warning correspondence, make equipment when dishing out fault alarm, the significant warning sequence number of specific band of dishing out.Processes personnel can be directly targeted to the mechanical part of the equipment broken down according to warning sequence number, cooler in this way, and problem has appearred in thermostat or dry pump.Eliminate in conventional art the step of the detailed description of checking warning.More avoid due to the communication problem between processes personnel and control software design developer.Make processes personnel can quick position removing barriers, improve the efficiency that processes is produced.
In the embodiment of the device of a semiconductor equipment alert process wherein, alarm module 300 comprises sequence number reading submodule 310 and group alarm submodule 320.Wherein: sequence number reading submodule 310, for preset alarm sequence number that fetch equipment abnormal signal is corresponding; Group alarm submodule 320, for preset alarm sequence number being formed together with other alarm parameters a complete warning, and sends.Other parameters comprise alarm name, simple describe and describe in detail in one or two or more.
Relative to the meaningless numeral of conventional art, the sequence number in the warning that the device of the semiconductor equipment alert process of the embodiment of the present invention sends is well-determined, the type that can navigate to concrete out of order parts according to it and break down.Again in conjunction with warning other parameters together, determine equipment fault reason more accurately, thus determine solution, the equipment fault of quick solution board, resumes production.Reduce equipment fault loss.
In the embodiment of the device of a semiconductor equipment alert process wherein, go out to comprise outside aforesaid multiple processing module, also comprise warning piece memory module 010 and type of alarm memory module 020.Wherein: warning piece memory module 010, for by the warning piece in semiconductor equipment and warning piece one_to_one corresponding, and be stored in database; Type of alarm memory module 020, for the implication one_to_one corresponding by type of alarm number and type of alarm number, and is stored in database.
In the embodiment of the present invention, the warning piece of foundation number and type of alarm number are stored in database, so that processes personnel are when equipment dishes out warning, according to the sequence number of reporting to the police to the corresponding implication of database lookup, determine the parts of fault and the concrete meaning of fault, and by specifically seeking advice from developer, waste of time need not be reduced, improve the whole efficiency of producing.
In the embodiment of the device of a semiconductor equipment alert process wherein, as shown in Figure 3, warning piece memory module 010 comprises Module Division submodule 011, warning piece number determines submodule 012 and sub module stored 013. wherein: Module Division submodule 011, for warning piece in semiconductor equipment is divided into multiple module according to practical function, the warning piece section that different modules is corresponding different; Warning piece number determines submodule 012, and the warning piece section corresponding for the module belonging to warning piece determines warning piece number; Sub module stored 013, for being stored into warning piece number and corresponding warning piece number in database.
Be different modules by warning piece according to practical function different demarcation, and according to Module Division part number section, can make that warning sequence number is more regular to be followed, be convenient to data management and be also convenient to the identification of unit exception situation.
In the embodiment of the device of a semiconductor equipment alert process wherein, also comprise and search module 400, for searching warning piece corresponding to warning sequence number that semiconductor equipment sends and type of alarm from database.
Processes personnel can process manufacturing and processing equipment fault by the concrete meaning corresponding according to warning sequence number, to recover normal processes as early as possible, enhance productivity.
The above embodiment only have expressed several execution mode of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection range of patent of the present invention should be as the criterion with claims.
Claims (11)
1. a method for semiconductor equipment alert process, is characterized in that, comprises the following steps:
The feedback signal of receiver station equipment;
Judge whether described feedback signal is unit exception signal;
If so, warning sequence number is then sent;
Described warning sequence number comprises warning piece number and type of alarm number.
2. the method for semiconductor equipment alert process according to claim 1, is characterized in that, described in send warning sequence number, comprise the following steps:
Read the preset alarm sequence number that described unit exception signal is corresponding;
Described preset alarm sequence number is formed together with other alarm parameters a complete warning, and send;
Other parameters described comprise alarm name, simple describe and describe in detail in one or two or more.
3. the method for semiconductor equipment alert process according to claim 1, is characterized in that, described method is further comprising the steps of:
By the warning piece in described semiconductor equipment and described warning piece one_to_one corresponding, and be stored in database;
By the implication one_to_one corresponding of described type of alarm number and type of alarm number, and be stored in database.
4. the method for the semiconductor equipment alert process according to any one of claims 1 to 3, is characterized in that:
Described warning piece number is the numeral of more than three or three;
Described type of alarm number is the numeral of more than three or three.
5. the method for semiconductor equipment alert process according to claim 3, is characterized in that, described by the warning piece in described semiconductor equipment and described warning piece one_to_one corresponding, and is stored in database, comprises the following steps:
Warning piece in described semiconductor equipment is divided into multiple module according to practical function, the warning piece section that different modules is corresponding different;
The warning piece section configuration warning piece number that module belonging to described warning piece is corresponding;
Described warning piece number and corresponding warning piece number are stored in database.
6. the method for semiconductor equipment alert process according to claim 3, is characterized in that, further comprising the steps of:
Warning piece corresponding to warning sequence number that described semiconductor equipment sends and type of alarm is searched from described database.
7. a device for semiconductor equipment alert process, is characterized in that, comprises signal receiving module, abnormal judge module, and alarm module, wherein:
Described signal receiving module, for the feedback signal of receiver station equipment;
Described abnormal judge module, for judging whether described feedback signal is unit exception signal;
Described alarm module, for sending warning sequence number according to described unit exception signal;
Described warning sequence number comprises warning piece number and type of alarm number.
8. the device of semiconductor equipment alert process according to claim 7, is characterized in that, described alarm module comprises sequence number reading submodule and group alarm submodule, wherein:
Described sequence number reading submodule, for reading preset alarm sequence number corresponding to described unit exception signal;
Described group alarm submodule, for described preset alarm sequence number being formed together with other alarm parameters a complete warning, and sends;
Other parameters described comprise alarm name, simple describe and describe in detail in one or two or more.
9. the device of the semiconductor equipment alert process according to claim 7 or 8, is characterized in that, described device also comprises warning piece memory module and type of alarm memory module, wherein:
Described warning piece memory module, for by the warning piece in described semiconductor equipment and described warning piece one_to_one corresponding, and is stored in database;
Described type of alarm memory module, for the implication one_to_one corresponding by described type of alarm number and type of alarm number, and is stored in database.
10. the device of semiconductor equipment alert process according to claim 9, is characterized in that, described warning piece memory module comprises Module Division submodule, warning piece number determines submodule and sub module stored, wherein:
Described Module Division submodule, for warning piece in described semiconductor equipment is divided into multiple module according to practical function, the warning piece section that different modules is corresponding different;
Described warning piece number determines submodule, and the warning piece section corresponding for the module belonging to described warning piece determines warning piece number;
Described sub module stored, for being stored into described warning piece number and corresponding warning piece number in database.
The device of 11. semiconductor equipment alert process according to claim 9, is characterized in that, also comprise and search module, for searching warning piece corresponding to warning sequence number that described semiconductor equipment sends and type of alarm from described database.
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| CN110795414A (en) * | 2019-11-01 | 2020-02-14 | 北京北方华创微电子装备有限公司 | Alarm analysis method and device for semiconductor equipment |
| CN113689639A (en) * | 2020-05-18 | 2021-11-23 | 上海众鸿电子科技有限公司 | Wafer machine table alarm method and alarm system |
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