CN105403997A - Piezoelectric driving two-dimensional scanning micro-mirror - Google Patents
Piezoelectric driving two-dimensional scanning micro-mirror Download PDFInfo
- Publication number
- CN105403997A CN105403997A CN201510800889.6A CN201510800889A CN105403997A CN 105403997 A CN105403997 A CN 105403997A CN 201510800889 A CN201510800889 A CN 201510800889A CN 105403997 A CN105403997 A CN 105403997A
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- piezoelectric
- dimensional scan
- micro mirror
- mirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Micromachines (AREA)
Abstract
The invention relates to a piezoelectric driving two-dimensional scanning micro-mirror including a two-dimensional scanning micro-mirror main body and a piezoelectric driver adhering to the bottom of two-dimensional scanning micro-mirror main body. The piezoelectric driver includes a substrate and a piezoelectric ceramics block adhering onto the substrate. The two-dimensional scanning micro-mirror main body has a reflecting mirror capable of performing resonance rotation in two perpendicular directions. In comparison with a piezoelectric cantilever beam driver which is arranged in a plane, the piezoelectric driving two-dimensional scanning micro-mirror has greatly-reduced device size and stable and reliable driving structure. In addition, the reflecting mirror two-dimensional scanning is realized through a universal joint structure. In comparison with the other structure, the reflecting mirror scanning is more stable and the deformation is less.
Description
Technical field
The present invention relates to Micro-Opto-Electro-Mechanical Systems technical field, particularly relate to a kind of Piezoelectric Driving two-dimensional scan micro mirror.
Background technology
Micro-Opto-Electro-Mechanical Systems (Micro-optical-electromechanicalsystems, MEMS) refers to and utilizes micro-processing technology for MEMS (Micro-electromechanicalsystems) device of optical system and system.Scanning micro-mirror or micro mirror array are a kind of important MEMS, and under the effect of driving force, the mirror surface of micro mirror deflects thus changes the reflection angle of incident beam, realizes the scanning of folded light beam.The fields such as medical image, spectrometer, barcode reading can be widely used in.
According to the difference of micro mirror type of drive, be mainly divided into: electrostatic driving, Electromagnetic Drive, electrothermal drive and Piezoelectric Driving etc.Electrostatic driving micro mirror is the one of current most study, generally introduce one or more pairs of electrode in the structure, by interelectrode static-electronic driving micromirror movements, this type of drive needs higher operating voltage (>=50V), and operating voltage is high is unfavorable for the integrated of device and circuit; Electromagnetic-drivmicro micro mirror utilizes the magnetic field force of electromagnet or permanent magnet generation as driving force, and the drive current of this type of drive is large; Electrothermal drive micro mirror utilizes drive current to make material expanded by heating produce driving force, and therefore response speed is low, and power consumption is large, and influenced by environmental temperature; And in prior art, MEMS piezoelectricity manufacturing process is also immature, manufacture difficulty is large, unstable properties, makes MEMS piezoelectric driving device also fail commercially to obtain ripe application.
Scanning micro-mirror described in US Patent No. 8553307B2, by the vibration of left and right sides piezoelectric cantilever 6, the catoptron 5 driving semi-girder top middle is around torsion beam 4 and torsion beam 3 twisting motion.When two semi-girder 6 direction of vibration are contrary, as shown in Figure 1a, and vibration frequency reaches catoptron 5 when the resonance frequency of torsion beam 4, and catoptron 5 does the motion of reciprocal torsional resonances around torsion beam 4, and windup-degree reaches maximum.When two semi-girder 6 direction of vibration are identical, as shown in Figure 1 b, and vibration frequency reaches catoptron 5, torsion beam 4 and inner frame 2 when the resonance frequency of torsion beam 3, and catoptron 5 does the motion of reciprocal torsional resonances around torsion beam 3, and windup-degree reaches maximum.Thus make catoptron realize two-dimensional scan.This drives structure is owing to being with semi-girder supporting reflex mirror and make it vibrate, and therefore stress is concentrated on the end of semi-girder, easily produces fatigure failure, thus the problem that reliability when there is long-term driving is lower.
Vibrating mirror element described in patent CN101630063B, as shown in Figure 2, micro-reflector 21, by being placed on the torsion beam 24a of micro-reflector central shaft, is connected to the top of four piezoelectric cantilever 30a/30b/30c/30d, and the bottom of semi-girder is fastened on structural framing 10.The piezoelectric cantilever of torsion beam both sides, is applied in contrary voltage signal, makes both sides semi-girder that contrary deformation occur, thus makes torsion beam produce torsion, and the band catoptron be automatically connected in torsion beam produces and reverses.When voltage signal frequency reaches the resonance frequency that micro-reflector reverses around torsion beam, micro-reflector does the motion of reciprocal torsional resonances around torsion beam, and this to be windup-degree maximum.Equally also be with semi-girder supporting reflex mirror and make it vibrate, therefore stress is concentrated on semi-girder, easily produces fatigure failure, thus the problem that reliability when there is long-term driving is lower.
Because above-mentioned defect, the design people, actively in addition research and innovation, to founding a kind of Piezoelectric Driving two-dimensional scan micro mirror of new structure, make it have more value in industry.
Summary of the invention
For solving the problems of the technologies described above, the object of this invention is to provide the Piezoelectric Driving two-dimensional scan micro mirror that a kind of volume is little, drives structure is reliable and stable.
Piezoelectric Driving two-dimensional scan micro mirror of the present invention, comprise two-dimensional scan micro mirror main body and be close to the below the piezoelectric actuator in face, described piezoelectric actuator comprises substrate and is close to the piezoelectric ceramics block of described thereon; Described two-dimensional scan micro mirror main body has the catoptron that can do resonance respectively and rotate on two perpendicular directions.
Further, described two-dimensional scan micro mirror main body comprises the outside framework with back of the body chamber, described outside framework is connected with the inner frame be placed in described back of the body chamber by the first torsion shaft, described inner frame is by connecting described catoptron perpendicular to the second torsion shaft of described first torsion shaft.
Further, described first torsion shaft is two, connects the both sides that described inner frame is relative respectively.
Further, described second torsion shaft is two, lays respectively at the two ends of described mirror center axle.
Further, described substrate is the one in pcb board, sheet metal.
Further, described piezoelectric ceramics block is close to below described outside framework by a kind of connected mode in epoxy bond, brazing metal bonding.
By such scheme, the present invention at least has the following advantages:
1, use conventional piezoelectric stupalith as the driving of MEMS two-dimensional scan micro mirror main body, cost be lower, manufacturing technology is ripe, easy acquisition and drives structure is reliable and stable;
2, use MEMS process technology can produce the less catoptron of structure, and processing cost is lower, is easy to batch micro operations;
3, the electrostatic compared in existing Driving technique drives, and the Piezoelectric Driving required voltage that the present invention adopts is lower, and compare Electromagnetic Drive, required electric current is less, compares electrothermal drive response speed faster;
4, the present invention uses gimbal structure to realize the two-dimensional scan of catoptron, and compare other structure, scanning mirror is more stable, is out of shape less.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to better understand technological means of the present invention, and can be implemented according to the content of instructions, coordinates accompanying drawing to be described in detail as follows below with preferred embodiment of the present invention.
Accompanying drawing explanation
Fig. 1 a be US Patent No. 8553307B2 semi-girder direction of vibration contrary time structural representation;
Fig. 1 b be US Patent No. 8553307B2 semi-girder direction of vibration identical time structural representation;
The structural representation of Fig. 2 patent CN101630063B;
Fig. 3 is one-piece construction schematic diagram of the present invention;
Fig. 4 is Split type structure schematic diagram of the present invention;
Fig. 5 is the structural representation of two-dimensional scan micro mirror main body in the present invention;
Fig. 6 is the structural representation of piezoelectric actuator in the present invention.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
See Fig. 3 to Fig. 6, a kind of Piezoelectric Driving two-dimensional scan micro mirror described in a preferred embodiment of the present invention, comprise two-dimensional scan micro mirror main body 10 and piezoelectric actuator 20, piezoelectric actuator 20 is close to the below being placed on two-dimensional scan micro mirror main body 10, Scan mirror main body 10 by catoptron 16, the second torsion shaft 15, inner frame 14, first torsion shaft 13 and outside framework 12 form, and inner frame 14 is placed in the back of the body chamber 11 of outside framework 12.Catoptron 16 and inner frame 14 are linked together by the second torsion shaft 15, and the second torsion shaft 15 is positioned at the two ends of catoptron 16 central shaft, are connected to the diagonal position of square inner frame 14.Inner frame 14 and outside framework 12 are linked together by the first torsion shaft 13.First torsion shaft 13 is positioned at square inner frame 14 diagonal line two ends perpendicular to the second torsion shaft 15, is connected to square frame frame 12 diagonal position.Outside framework 12 arranges back of the body chamber 11, make the first torsion shaft 13 and the second torsion shaft 15 unsettled, thus make catoptron 16 have the space of torsion.
Piezoelectric actuator 20 comprises piezoelectric ceramics block 22 and substrate 21, and piezoelectric ceramics block 22 is close to above substrate 21.
The principle of Piezoelectric Driving two-dimensional scan micro mirror of the present invention is, by applying the voltage signal of certain frequency to piezoelectric actuator 20, due to inverse piezoelectric effect, the vibration of piezoelectric actuator 20 generation and voltage signal same frequency, vibration passing is to two-dimensional scan micro mirror main body 10 part be close on piezoelectric actuator 20.When vibration frequency reaches the resonance frequency that inner frame 14, second torsion shaft 15 and catoptron 16 rotate around the first torsion shaft 13, catoptron 16 back and forth reverses around the first torsion shaft 13, and is issued to maximum twist angle at certain driving voltage; When vibration frequency reaches the resonance frequency that catoptron 16 rotates around the second torsion shaft 15, catoptron 16 back and forth reverses around the second torsion shaft 15, and is issued to maximum twist angle at certain driving voltage.Like this, catoptron 16, by the reciprocal torsion around the first torsion shaft 13 and the second torsion shaft 15, completes the two-dimensional scan of folded light beam.
Preferably, in the present invention, piezoelectric actuator 20 uses conventional piezoelectric ceramic block 22 to manufacture, and is not limited to the piezoelectric ceramics block 22 of which kind of material, and place on the base plate (21, substrate 21 can be the materials such as pcb board, sheet metal; The catoptron 16 of two-dimensional scan in the present invention is gimbal structure, and catoptron 16 is not limited to circle, square or other is special-shaped etc., and two orthogonal first torsion shaft 13, second torsion shafts 15 are connected on the diagonal line of inner frame and outside framework; In addition, in the present invention, piezoelectric actuator 20 is close to the mode below two-dimensional scan micro mirror main body 10, is not limited to use epoxy resin glue bond, brazing metal bonding or other connected mode.
Piezoelectric Driving two-dimensional scan micro mirror of the present invention is compared with US Patent No. 8553307B2, and the advantage of structure of the present invention is as follows:
1, two-dimensional scan micro mirror main body of the present invention adopts MEMS fabrication technique, and it is less that structure can be done, and batch machining cost is low;
2, the present invention uses one piece of piezoelectric ceramics block as drives structure, is placed on below two-dimensional scan micro mirror main body, compares the piezoelectric cantilever driver that plane is placed, can effectively reduce device area;
Compared with inventing with described in patent CN101630063B, the advantage of structure of the present invention is as follows:
1, the present invention avoids using piezoelectric membrane manufacturing technology, and use the conventional piezoelectric ceramic block of industry comparative maturity, manufacturing process is simple, is easy to processing;
2, the present invention uses gimbal structure to realize two-dimensional scan, sound construction.
The above is only the preferred embodiment of the present invention; be not limited to the present invention; should be understood that; for those skilled in the art; under the prerequisite not departing from the technology of the present invention principle; can also make some improvement and modification, these improve and modification also should be considered as protection scope of the present invention.
Claims (6)
1. a Piezoelectric Driving two-dimensional scan micro mirror, is characterized in that: comprise two-dimensional scan micro mirror main body and be close to the below the piezoelectric actuator in face, described piezoelectric actuator comprises substrate and is close to the piezoelectric ceramics block of described thereon; Described two-dimensional scan micro mirror main body has the catoptron that can do resonance respectively and rotate on two perpendicular directions.
2. Piezoelectric Driving two-dimensional scan micro mirror according to claim 1, it is characterized in that: described two-dimensional scan micro mirror main body comprises the outside framework with back of the body chamber, described outside framework is connected with the inner frame be placed in described back of the body chamber by the first torsion shaft, described inner frame is by connecting described catoptron perpendicular to the second torsion shaft of described first torsion shaft.
3. Piezoelectric Driving two-dimensional scan micro mirror according to claim 2, is characterized in that: described first torsion shaft is two, connects the both sides that described inner frame is relative respectively.
4. Piezoelectric Driving two-dimensional scan micro mirror according to claim 2, is characterized in that: described second torsion shaft is two, lays respectively at the two ends of described mirror center axle.
5. Piezoelectric Driving two-dimensional scan micro mirror according to claim 1, is characterized in that: described substrate is the one in pcb board, sheet metal.
6. Piezoelectric Driving two-dimensional scan micro mirror according to claim 2, is characterized in that: described piezoelectric ceramics block is close to below described outside framework by a kind of connected mode in epoxy bond, brazing metal bonding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510800889.6A CN105403997A (en) | 2015-11-19 | 2015-11-19 | Piezoelectric driving two-dimensional scanning micro-mirror |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510800889.6A CN105403997A (en) | 2015-11-19 | 2015-11-19 | Piezoelectric driving two-dimensional scanning micro-mirror |
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| CN105403997A true CN105403997A (en) | 2016-03-16 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106842555A (en) * | 2017-01-18 | 2017-06-13 | 南京理工大学 | A kind of three-dimensional piezoelectric drives micro mirror adjusting means |
| CN107664836A (en) * | 2016-07-28 | 2018-02-06 | 意法半导体股份有限公司 | Utilize piezoelectric actuated oscillating structure, system and manufacture method |
| CN107797274A (en) * | 2016-09-07 | 2018-03-13 | 罗伯特·博世有限公司 | Micro-mechanical device and method for the two-dimensional deflection of light |
| CN109477961A (en) * | 2016-07-19 | 2019-03-15 | 麦克赛尔株式会社 | Projection type video display apparatus |
| CN110892306A (en) * | 2017-06-13 | 2020-03-17 | 三菱电机株式会社 | Optical scanning device and method for adjusting optical scanning device |
| CN111830701A (en) * | 2019-04-19 | 2020-10-27 | 华为技术有限公司 | Electromagnetic micromirror and laser device |
| CN112904657A (en) * | 2021-01-14 | 2021-06-04 | 众瑞速联（武汉）科技有限公司 | Subminiature laser image projection equipment |
| CN114114672A (en) * | 2020-08-31 | 2022-03-01 | 华为技术有限公司 | Microelectronic scanning galvanometer, scanning imaging system, wearable device and laser radar |
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| JP2008040240A (en) * | 2006-08-08 | 2008-02-21 | Stanley Electric Co Ltd | Optical deflector and manufacturing method thereof |
| JP2011186124A (en) * | 2010-03-08 | 2011-09-22 | Stanley Electric Co Ltd | Light deflector package |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109477961A (en) * | 2016-07-19 | 2019-03-15 | 麦克赛尔株式会社 | Projection type video display apparatus |
| CN107664836A (en) * | 2016-07-28 | 2018-02-06 | 意法半导体股份有限公司 | Utilize piezoelectric actuated oscillating structure, system and manufacture method |
| CN107664836B (en) * | 2016-07-28 | 2020-12-25 | 意法半导体股份有限公司 | Oscillating structure, system and manufacturing method using piezoelectric actuation |
| CN107797274A (en) * | 2016-09-07 | 2018-03-13 | 罗伯特·博世有限公司 | Micro-mechanical device and method for the two-dimensional deflection of light |
| CN107797274B (en) * | 2016-09-07 | 2021-12-07 | 罗伯特·博世有限公司 | Micromechanical device and method for two-dimensional deflection of light |
| CN106842555A (en) * | 2017-01-18 | 2017-06-13 | 南京理工大学 | A kind of three-dimensional piezoelectric drives micro mirror adjusting means |
| CN106842555B (en) * | 2017-01-18 | 2019-06-25 | 南京理工大学 | A kind of three-dimensional piezoelectric driving micro mirror regulating device |
| CN110892306A (en) * | 2017-06-13 | 2020-03-17 | 三菱电机株式会社 | Optical scanning device and method for adjusting optical scanning device |
| CN111830701A (en) * | 2019-04-19 | 2020-10-27 | 华为技术有限公司 | Electromagnetic micromirror and laser device |
| CN114114672A (en) * | 2020-08-31 | 2022-03-01 | 华为技术有限公司 | Microelectronic scanning galvanometer, scanning imaging system, wearable device and laser radar |
| CN112904657A (en) * | 2021-01-14 | 2021-06-04 | 众瑞速联（武汉）科技有限公司 | Subminiature laser image projection equipment |
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Application publication date: 20160316 |