CN105396855B - Feeding device for silicon wafer cleaner - Google Patents
Feeding device for silicon wafer cleaner Download PDFInfo
- Publication number
- CN105396855B CN105396855B CN201510892710.4A CN201510892710A CN105396855B CN 105396855 B CN105396855 B CN 105396855B CN 201510892710 A CN201510892710 A CN 201510892710A CN 105396855 B CN105396855 B CN 105396855B
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- Prior art keywords
- fixed
- discharging
- single axis
- frame
- turntable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 14
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 14
- 239000010703 silicon Substances 0.000 title claims abstract description 14
- 230000007246 mechanism Effects 0.000 claims abstract description 52
- 238000007599 discharging Methods 0.000 claims abstract description 43
- 239000000463 material Substances 0.000 claims abstract description 25
- 239000000758 substrate Substances 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000012634 fragment Substances 0.000 abstract description 2
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 description 7
- 230000009471 action Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000032258 transport Effects 0.000 description 3
- 230000007306 turnover Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000010010 raising Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02082—Cleaning product to be cleaned
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Specific Conveyance Elements (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to a kind of feeding device for silicon wafer cleaner, include frame, three-level return wire, material fetching mechanism, transfer mechanism, discharging mechanism, touch-screen, electric-control system, three-level return wire, material fetching mechanism takes level to be separately fixed at below frame, transfer mechanism is fixed on central rack and above material fetching mechanism, discharging mechanism is at transfer mechanism rear and is fixed in frame below, touch-screen is fixed on shell outside face, electric-control system is arranged on top in frame, beneficial effect is, improve feeding speed, increase production capacity, reduce fragment rate, reduce pollution, avoid the new pollution artificially added.
Description
Technical field
The present invention relates to a kind of silicon wafer cleaner, more particularly to a kind of feeding device for silicon wafer cleaner.
Background technology
Silicon chip must also result in component failure through strict cleaning, micropollution in semiconductor devices production.The purpose of cleaning
It is to remove surface contamination impurity, including organic matter and inorganic matter.These impurity have with state of atom or ionic condition, have
In the form of a film or particle form is present in silicon chip surface, current cleaning machine automaticity is not high, it is necessary to manually place piece
Basket, it is time-consuming, it would be highly desirable to improve the automatization level in silicon chip inserted sheet cleaning process, reach saving manpower, carry efficient mesh
's.
The content of the invention
In view of the problem of prior art is present, the present invention provides a kind of feeding device for silicon wafer cleaner, by inserting
Piece, feeding, cleaning technique are improved, to improve the automatization level in silicon chip inserted sheet cleaning process, reached saving manpower, are carried
Efficient purpose, concrete technical scheme is, a kind of feeding device for silicon wafer cleaner, comprising frame, three-level return wire,
Material fetching mechanism, transfer mechanism, discharging mechanism, touch-screen, electric-control system, it is characterised in that：Three-level return wire, material fetching mechanism water intaking
Flat to be separately fixed at below frame, transfer mechanism is fixed on central rack and above material fetching mechanism, and discharging mechanism is in shift machine
Structure rear and it is fixed in frame below, touch-screen is fixed on shell outside face, and electric-control system is arranged on top in frame, described
Material fetching mechanism include lifting cylinder, swing rod, upset basket transverse slat, lifting cylinder contiguous block, tumble cylinder, wide type jaw, single shaft
Robot, Rodless cylinder, guide rail, lifting cylinder, swing rod, upset basket transverse slat, lifting cylinder contiguous block, tumble cylinder constitute feeding
Flip portion is fixed on bottom of the frame, and wide type jaw, single axis robot, Rodless cylinder, guide rail constitute feeding and transport partly fixed
Above feeding flip portion, lifting cylinder is fixed on lifting cylinder contiguous block, and tumble cylinder one end is connected on swing rod, pendulum
The bar other end is connected on upset basket transverse slat, and guide rail is fixed in frame, and Rodless cylinder is fixed on above guide rail, single axis robot
It is fixed on Rodless cylinder, wide type jaw is fixed on below single axis robot；Described transfer mechanism includes turntable, earring seats
Cushion block, A tie rod cylinders, A swing rods, transfer basket, turntable substrate, fixing axle, B tie rod cylinders, B swing rods, turntable are fixed on
On dead axle, the axle of turntable is inserted in turntable substrate through-hole rotatably, and earring seats cushion block is fixed on a spinstand, A pull bar gas
Cylinder one end is fixed with earring seats cushion block, the other end and A swing rods are fixed, and A swing rods are fixed with transfer basket, and transfer basket is supported on turntable
Upper surface of base plate, turntable base lower surface fixes B tie rod cylinders, and B tie rod cylinders are connected with B swing rods one end, the B swing rod other ends
Fixed with the axle outer surface of turntable；Described discharging mechanism includes, the wide type jaw that discharges, discharge guide, discharging translation electric cylinders,
Discharge A single axis robots, stepper motor single axis robot, discharging B single axis robots, and the wide type jaw of discharging is fixed on stepper motor
On single axis robot, stepper motor single axis robot is fixed in discharging translation electric cylinders, and discharging translation electric cylinders can be in discharge guide
Upper translation, discharging A single axis robots, discharging B single axis robots are parallel be fixed in frame behind, it is mono- that discharge guide is placed in material A
In axle robot, discharging B single axis robots, can freely it move forward and backward；Described electric-control system is connected as touch-screen with may be programmed
Controller is bi-directionally connected, and startup/stopping/reset switch, sensor and programmable controller is unidirectionally connected, programmable controller with
Transmission translator, magnetic valve, three color alarm lamps are unidirectionally connected, and magnetic valve is unidirectionally connected with cylinder, and five driver output ends are simultaneously
Unidirectionally it is connected with programmable controller after connecing, programmable controller and output end are simultaneously connected after connecing, each driver and an electricity
Machine is connected, and touch-screen is bi-directionally connected with driver output end.
Present invention has the advantages that, feeding speed is improved, increases production capacity, reduces fragment rate, reduce pollution, it is to avoid
The new pollution artificially added.
Brief description of the drawings
Fig. 1 is the structural front view of the present invention.
Fig. 2 is the structural side view of the present invention.
Fig. 3 is the material fetching mechanism structure feeding flip portion front view of the present invention.
The material fetching mechanism structure feeding that Fig. 4 is the present invention transports fragmentary front view.
Fig. 5 is the material fetching mechanism structure feeding flip portion A-A views of the present invention.
Fig. 6 is the material fetching mechanism feeding flip portion B-B structure top views of the present invention.
Fig. 7 is the transfer mechanism structural front view of the present invention.
Fig. 8 is the transfer mechanism structural side view of the present invention.
Fig. 9 is the transfer mechanism structure top view of the present invention.
Figure 10 is the discharging mechanism structural front view of the present invention.
Figure 11 is the discharging mechanism structural side view of the present invention.
Figure 12 is the discharging mechanism structure top view of the present invention.
Figure 13 is the circuit connection block diagram of the present invention.
Embodiment
As shown in Figure 1, 2, a kind of feeding device for silicon wafer cleaner, includes frame 1, three-level return wire 2, reclaimer
Structure 3, transfer mechanism 4, discharging mechanism 5, touch-screen 6, electric-control system 7, it is characterised in that：Three-level return wire 2, material fetching mechanism 3 take
Level is separately fixed at the lower section of frame 1, and transfer mechanism 4 is fixed on the middle part of frame 1 and in the top of material fetching mechanism 3, discharging mechanism 5
Transferring the rear of mechanism 4 and be fixed in frame 1 below, touch-screen 6 is fixed on the lateral surface of frame 1, and electric-control system 7 is arranged on machine
Top in frame 1.Its action step is：A. tumble cylinder motion drives upset basket substrate to turn over and turn 90 degrees, and b. lifting cylinders are transported upwards
Dynamic to improve upset basket substrate, c. single axis robots are moved downwardly to specified location, the wide type jaw grippale tabs baskets of d., e. single shafts
Robot is moved upwards, and piece basket is moved to specified location by f. Rodless cylinders, and piece basket is placed on by the wide type jaw of g. releases to be waited to expect
Position.
As shown in Fig. 3,4,5,6, described material fetching mechanism 3 include lifting cylinder 3-1, swing rod 3-2, upset basket transverse slat 3-3,
Lifting cylinder contiguous block 3-4, tumble cylinder 3-5, wide type jaw 3-6, single axis robot 3-7, Rodless cylinder 3-8, guide rail 3-9,
Lifting cylinder 3-1, swing rod 3-2, upset basket transverse slat 3-3, lifting cylinder contiguous block 3-4, tumble cylinder 3-5 constitute feeding turning part
Divide and be fixed on the bottom of frame 1, wide type jaw 3-6, single axis robot 3-7, Rodless cylinder 3-8, guide rail 3-9 constitute feeding transport portion
Divide and be fixed on above feeding flip portion, lifting cylinder 3-1 is fixed on lifting cylinder contiguous block 3-4, tumble cylinder 3-5 one end
It is connected on swing rod 3-2, the swing rod 3-2 other ends are connected on upset basket transverse slat 3-3, and guide rail 3-9 is fixed in frame 1, no bar
Cylinder 3-8 is fixed on above guide rail 3-9, and single axis robot 3-9 is fixed on Rodless cylinder 3-8, and wide type jaw 3-6 is fixed on list
Below axle robot 3-7；Its action step is：A. tumble cylinder 3-5 motions drive upset basket transverse slat 3-3 to turn over and turn 90 degrees, and b. is carried
Rise cylinder 3-1 to move upset basket transverse slat 3-3 raisings upwards, c. single axis robots 3-7 is moved downwardly to specified location, and d. is wide
Type jaw 3-6 grippale tabs baskets, e. single axis robots 3-7 is moved upwards, and piece basket is moved to specific bit by f. Rodless cylinders 3-8
Put, piece basket is placed on by g. releases width type jaw 3-6 treats material position（That is translation mechanism initial position）, when empty piece basket is on material position is treated
When, plug-in sheet machine places silicon chip into empty piece basket.When reaching that the blue maximum of piece can accommodate quantity, plug-in sheet machine is stopped, shift machine
Structure is started working.
As shown in Fig. 7,8,9, described transfer mechanism 4 includes turntable 4-1, earring seats cushion block 4-2, A tie rod cylinders 4-
3rd, A swing rods 4-4, transfer basket 4-5, turntable substrate 4-6, fixing axle 4-7, B tie rod cylinders 4-8, B swing rod 4-9, turntable 4-1
It is fixed on fixing axle 4-7, turntable 4-1 axle is inserted in turntable substrate 4-6 through holes rotatably, and earring seats cushion block 4-2 consolidates
It is scheduled on turntable 4-1, A tie rod cylinders 4-3 one end is fixed with earring seats cushion block 4-2, the other end and A swing rods 4-4 are fixed, A pendulum
Bar 4-4 is fixed with transfer basket 4-5, and transfer basket 4-5 is supported on turntable substrate 4-6 upper surfaces, and turntable substrate 4-6 lower surfaces are consolidated
Determine B tie rod cylinders 4-8, B tie rod cylinders 4-8 to be connected with B swing rod 4-9 one end, outside the B swing rod 4-9 other ends and turntable 4-1 axle
Surface is fixed；Its action step is：1. Rodless cylinder 3-8 drives single axis robot 3-7 to move to the rightmost side, 2. single axis robots
3-7 drops to specified location, and 3. rise to specified location using wide type jaw grippale tabs basket, 4. single axis robots, and 5. without bar gas
Cylinder drives single axis robot to move to high order end, and 6. single axis robots drop to specified location, and 7., which unclamp wide type jaw, places piece
Basket, 8. single axis robots rise, and 9. tie rod cylinders 1 pull transfer basket, turn over transfer basket and turn 90 degrees, 10. bottom tie rod cylinders 2 are transported
Dynamic band moving plate basket is rotated by 90 °.
As shown in Figure 10,11,12, described discharging mechanism 5 includes, discharge wide type jaw 5-2, discharge guide 5-3, discharging
Translate electric cylinders 5-4, discharging A single axis robots 5-5, stepper motor single axis robot 5-6, discharging B single axis robot 5-7, discharging
Wide type jaw 5-2 is fixed on stepper motor single axis robot 5-6, and stepper motor single axis robot 5-6 is fixed on discharging translation
On electric cylinders 5-4, discharging translation electric cylinders 5-4 can be translated on discharge guide 5-3, discharging A single axis robots 5-5, discharging B single shaft machines
Device people 5-7 is parallel be fixed in frame 1 behind, discharge guide 5-3 is placed in material A single axis robots 5-5, discharging B single axis robots
On 5-7, can freely it move forward and backward；It is the mechanism that piece basket is delivered to material position on cleaning machine by going out material position.Discharging mechanism utilizes two
Single axis robot 5-5 and discharging translation electric cylinders 5-4, enables the wide type jaw 5-2 of discharging in working space free shift.
As shown in figure 13, described electric-control system 7 is connected as touch-screen and is bi-directionally connected with programmable controller, starts/stops
Only/reset switch, sensor and programmable controller are unidirectionally connected, and signal is transmitted to programmable controller.Programmable controller
Unidirectionally it is connected with transmission translator, magnetic valve, three color alarm lamps, transmission translator, magnetic valve, three color alarm lamps can be controlled.
Magnetic valve is unidirectionally connected with cylinder, and cylinder moving is controlled by electromagnetic valve switch.Programmable controller is connected with five drivers
Connect, order control driver can be sent to driver, programmable controller can also read Driver Information.Each driver
Be connected with a motor, touch-screen display driver can be exported in real time, can also artificial operational control driver, to realize control
The purpose of motor processed.
Claims (1)
1. a kind of feeding device for silicon wafer cleaner, includes frame（1）, three-level return wire（2）, material fetching mechanism（3）, transfer
Mechanism（4）, discharging mechanism（5）, touch-screen（6）, electric-control system（7）, it is characterised in that：Three-level return wire（2）, material fetching mechanism
（3）Level is taken to be separately fixed at frame（1）Lower section, transfers mechanism（4）It is fixed on frame（1）Middle part and in material fetching mechanism（3）On
Side, discharging mechanism（5）In transfer mechanism（4）Rear and it is fixed on frame below（1）On, touch-screen（6）It is fixed on frame（1）Outside
Sideways, electric-control system（7）Installed in frame（1）Interior top, described material fetching mechanism（3）Including lifting cylinder（3-1）, swing rod
（3-2）, upset basket transverse slat（3-3）, lifting cylinder contiguous block（3-4）, tumble cylinder（3-5）, wide type jaw（3-6）, single shaft machine
Device people（3-7）, Rodless cylinder（3-8）, guide rail（3-9）, lifting cylinder（3-1）, swing rod（3-2）, upset basket transverse slat（3-3）, carry
Rise cylinder contiguous block（3-4）, tumble cylinder（3-5）Constitute feeding flip portion and be fixed on frame（1）Bottom, wide type jaw（3-
6）, single axis robot（3-7）, Rodless cylinder（3-8）, guide rail（3-9）Constitute feeding and transport and be partly fixed on feeding flip portion
Top, lifting cylinder（3-1）It is fixed on lifting cylinder contiguous block（3-4）On, tumble cylinder（3-5）One end is connected to swing rod（3-
2）On, swing rod（3-2）The other end is connected to upset basket transverse slat（3-3）On, guide rail（3-9）It is fixed on frame（1）On, Rodless cylinder
（3-8）It is fixed on guide rail（3-9）Top, single axis robot（3-7）It is fixed on Rodless cylinder（3-8）On, wide type jaw（3-6）Gu
It is scheduled on single axis robot（3-7）Lower section；
Described transfer mechanism（4）Including turntable（4-1）, earring seats cushion block（4-2）, A tie rod cylinders（4-3）, A swing rods（4-
4）, transfer basket（4-5）, turntable substrate（4-6）, fixing axle（4-7）, B tie rod cylinders（4-8）, B swing rods（4-9）, turntable
（4-1）It is fixed on fixing axle（4-7）On, turntable（4-1）Axle insert in turntable substrate（4-6）It is rotatable in through hole, earrings
Seat cushion block（4-2）It is fixed on turntable（4-1）On, A tie rod cylinders（4-3）One end and earring seats cushion block（4-2）The fixed, other end
With A swing rods（4-4）It is fixed, A swing rods（4-4）With transfer basket（4-5）It is fixed, shift basket（4-5）It is supported on turntable substrate（4-6）
Upper surface, turntable substrate（4-6）Lower surface fixes B tie rod cylinders（4-8）, B tie rod cylinders（4-8）With B swing rods（4-9）One end
Connection, B swing rods（4-9）The other end and turntable（4-1）Axle outer surface fix；Described discharging mechanism（5）It is wide including, discharging
Type jaw（5-2）, discharge guide（5-3）, discharging translation electric cylinders（5-4）, discharging A single axis robots（5-5）, stepper motor single shaft
Robot（5-6）, discharging B single axis robots（5-7）, the wide type jaw of discharging（5-2）It is fixed on stepper motor single axis robot（5-
6）On, stepper motor single axis robot（5-6）It is fixed on discharging translation electric cylinders（5-4）On, discharging translation electric cylinders（5-4）It can go out
Expect guide rail（5-3）Upper translation, discharge A single axis robots（5-5）, discharging B single axis robots（5-7）It is parallel to be fixed on frame（1）
Behind interior, discharge guide（5-3）It is placed in material A single axis robots（5-5）, discharging B single axis robots（5-7）On, can be freely front and rear
It is mobile；Described electric-control system（7）It is connected as touch-screen（6）It is bi-directionally connected with programmable controller, startup/stopping/reset is opened
Close, sensor and programmable controller are unidirectionally connected, programmable controller and transmission translator, magnetic valve, three color alarm lamp lists
To connection, magnetic valve is unidirectionally connected with cylinder, and five driver output ends are simultaneously unidirectionally connected after connecing with programmable controller, can be compiled
Range controller and output end are simultaneously connected after connecing, and each driver is connected with a motor, and touch-screen is two-way with driver output end
Connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510892710.4A CN105396855B (en) | 2015-12-08 | 2015-12-08 | Feeding device for silicon wafer cleaner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510892710.4A CN105396855B (en) | 2015-12-08 | 2015-12-08 | Feeding device for silicon wafer cleaner |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105396855A CN105396855A (en) | 2016-03-16 |
| CN105396855B true CN105396855B (en) | 2017-08-25 |
Family
ID=55462798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510892710.4A Active CN105396855B (en) | 2015-12-08 | 2015-12-08 | Feeding device for silicon wafer cleaner |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105396855B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109278323A (en) * | 2018-11-13 | 2019-01-29 | 南京珀斯佩特电子科技有限公司 | A car sealing strip integrated machine and its use method |
| CN114472426A (en) * | 2022-01-26 | 2022-05-13 | 伟创力电子技术(苏州)有限公司 | Automatic product feeding and identifying mechanism for washing machine |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5950643A (en) * | 1995-09-06 | 1999-09-14 | Miyazaki; Takeshiro | Wafer processing system |
| CN2580600Y (en) * | 2002-10-15 | 2003-10-15 | 吴永清 | Wafer cleaning machine with automatic feeding |
| CN102671883A (en) * | 2012-05-18 | 2012-09-19 | 上海思恩电子技术（东台）有限公司 | Cleaning machine with supporting and thrusting mechanism |
| CN103311167A (en) * | 2013-05-13 | 2013-09-18 | 中国电子科技集团公司第四十八研究所 | Automatic silicon wafer feeding system |
| CN205253700U (en) * | 2015-12-08 | 2016-05-25 | 天津中环半导体股份有限公司 | A loading attachment for silicon chip cleaning machine |
-
2015
- 2015-12-08 CN CN201510892710.4A patent/CN105396855B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5950643A (en) * | 1995-09-06 | 1999-09-14 | Miyazaki; Takeshiro | Wafer processing system |
| CN2580600Y (en) * | 2002-10-15 | 2003-10-15 | 吴永清 | Wafer cleaning machine with automatic feeding |
| CN102671883A (en) * | 2012-05-18 | 2012-09-19 | 上海思恩电子技术（东台）有限公司 | Cleaning machine with supporting and thrusting mechanism |
| CN103311167A (en) * | 2013-05-13 | 2013-09-18 | 中国电子科技集团公司第四十八研究所 | Automatic silicon wafer feeding system |
| CN205253700U (en) * | 2015-12-08 | 2016-05-25 | 天津中环半导体股份有限公司 | A loading attachment for silicon chip cleaning machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105396855A (en) | 2016-03-16 |
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Address after: 300384 No.12 Haitai East Road, Huayuan Industrial Zone, New Technology Industrial Park, Binhai New Area, Tianjin Patentee after: TCL Zhonghuan New Energy Technology Co.,Ltd. Address before: No. 12, Haitai East Road, Xiqing District, Tianjin, 300384 Patentee before: TIANJIN ZHONGHUAN SEMICONDUCTOR CO.,LTD. |
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