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CN105390929A - All-solid-state laser capable of obtaining single-frequency output at wavelength of 558nm - Google Patents

All-solid-state laser capable of obtaining single-frequency output at wavelength of 558nm Download PDF

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CN105390929A
CN105390929A CN201510971550.2A CN201510971550A CN105390929A CN 105390929 A CN105390929 A CN 105390929A CN 201510971550 A CN201510971550 A CN 201510971550A CN 105390929 A CN105390929 A CN 105390929A
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mirror
frequency
wave plate
frequency output
laser
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李智
周军
肖湖福
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Nanjing Institute of Advanced Laser Technology
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
    • H01S3/109Frequency multiplication, e.g. harmonic generation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/1601Solid materials characterised by an active (lasing) ion
    • H01S3/1603Solid materials characterised by an active (lasing) ion rare earth
    • H01S3/1611Solid materials characterised by an active (lasing) ion rare earth neodymium

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  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Lasers (AREA)

Abstract

本发明公开了一种558nm波长单频输出的全固体激光器,包括一泵浦源系统,所述泵浦源系统包括在光路上依次安置的激光二极管LD、光纤以及聚焦耦合透镜系统;一Z型谐振腔装置,所述Z型谐振腔装置包括在Z型腔内依次安置的尾镜、凹面折叠镜、黄光输出镜以及全反镜,所述尾镜和凹面折叠之间放置有波片和激光增益介质,所述凹面折叠镜与黄光输出镜之间放置有双折射滤波片,所述黄光输出镜和全反镜之间放置有倍频晶体。本发明充分利用了腔内基频光的高功率密度,并采用Z型腔提高了倍频效率,实现了单纵模、低噪声、高功率和高能量的黄光激光输出,成功的解决了现有技术中激光器的缺点。

The invention discloses an all-solid-state laser with a single-frequency output of 558nm wavelength, which includes a pumping source system, and the pumping source system includes a laser diode LD, an optical fiber, and a focusing coupling lens system sequentially arranged on the optical path; a Z-shaped The resonant cavity device, the Z-shaped resonant cavity device includes a tail mirror, a concave folding mirror, a yellow light output mirror and a total reflection mirror arranged in sequence in the Z-shaped cavity, and a wave plate and a wave plate are placed between the tail mirror and the concave folding A laser gain medium, a birefringence filter is placed between the concave folding mirror and the yellow light output mirror, and a frequency doubling crystal is placed between the yellow light output mirror and the total reflection mirror. The invention makes full use of the high power density of the fundamental frequency light in the cavity, and adopts the Z-shaped cavity to improve the frequency doubling efficiency, realizes the yellow laser output with single longitudinal mode, low noise, high power and high energy, and successfully solves the problem of Disadvantages of lasers in the prior art.

Description

一种558nm波长单频输出的全固体激光器A 558nm wavelength single-frequency output all-solid-state laser

技术领域technical field

本发明属于激光技术领域中,涉及的一种通过腔内倍频方法获得558nm波长输出的全固体单频黄光激光器。The invention belongs to the technical field of lasers, and relates to an all-solid-state single-frequency yellow light laser that obtains a 558nm wavelength output through an intracavity frequency doubling method.

背景技术Background technique

现有激光具有单色性、准直性和高亮度等特点,有着广泛的应用领域。特别的,黄光波段的激光在医疗领域有着重要应用,在诊断方面,黄激光是内全反射荧光成像系统或流式细胞仪或共聚焦显微扫描系统的理想选择;在医疗方面,黄激光可以对癣红斑痣或毛细血管或眼底黄斑病变等疾病进行有效治疗。The existing laser has the characteristics of monochromaticity, collimation and high brightness, and has a wide range of applications. In particular, lasers in the yellow band have important applications in the medical field. In terms of diagnosis, yellow lasers are ideal for internal total reflection fluorescence imaging systems or flow cytometers or confocal microscopy scanning systems; It can effectively treat diseases such as tinea erythema or capillary or fundus macular degeneration.

常用黄激光器有Kr离子激光(568nm),染料激光(577nm),铜蒸气激光(578nm)等激光器,但这些激光器都存在固有的缺点。Kr离子激光和铜蒸气激光都属于气体激光器,其体积都很大,耗电量也很大;染料激光器是液体激光器,其染料的毒性对人体有害,不足以满足仪器使用要求。随着半导体激光器的研究进展和产品化逐渐成熟,光泵半导体激光器和半导体泵浦的固体激光其得到了迅速发展,具有光束质量好,体积小和寿命长等优点。但目前光泵半导体黄激光器波长比较局限,而半导体泵浦的固体激光器结合非线性频率变换技术则使得黄广播段比较宽广。Commonly used yellow lasers include Kr ion laser (568nm), dye laser (577nm), copper vapor laser (578nm) and other lasers, but these lasers have inherent shortcomings. Both Kr ion laser and copper vapor laser are gas lasers, which are large in size and consume a lot of power; dye lasers are liquid lasers, and the toxicity of the dye is harmful to the human body, which is not enough to meet the requirements of the instrument. As the research progress and productization of semiconductor lasers gradually mature, optically pumped semiconductor lasers and semiconductor-pumped solid-state lasers have been developed rapidly, with the advantages of good beam quality, small size and long life. But at present, the wavelength of the optically pumped semiconductor yellow laser is relatively limited, and the semiconductor pumped solid-state laser combined with the nonlinear frequency conversion technology makes the yellow broadcasting segment relatively broad.

目前,国内外已经有关于半导体泵浦固体黄激光器的报道。他们主要采取以下四种方式:一是基于双基频谱线振荡通过非线性和频获得(Intracavitysum-frequencydiodeside-pumpedall-solid-stategenerationyellowlaserat589nmwithanoutputpowerof20.5W,《AppliedOptics》,Vol.52,2013,1876-1880),这种方法具有结构复杂,体积大,效率低,噪声大等缺点。二是基于受激拉曼散射获得1.1~1.2μm波段左右的斯托克斯光,再通过倍频技术获得(Self-frequency-doubledBaTeMo2O9Ramanlaseremittingat589nm,《OpticsExpress》,Vol.21,2013,7821-7827);三是基于受激拉曼散射的斯托克斯光与基频光通过和频变换技术获得(HighpowerQ-switchedintracavitysum-frequencygenerationandself-Ramanlaserat559nm,《Optics&LaserTechnology》,2013,Vol.47,2013,43-46),但拉曼激光器阈值高,光光效率低。四是基于1.1~1.2μm波段的基频谱线通过倍频技术直接获得(Afrequency-doubledNd:YAG/KTPlaserat561nmwithdiodeside-pumping,《LaserPhys》,Vol.23,2013,5402-5405),这种方法结构简单,但是单脉冲能量及平均功率较低,也不能获得单频输出。558nm的黄光波长更接非常接近人眼敏感波长555,而且比其他波长更适合视网膜凝固手术,治疗眼科黄斑变性手术。但是558nm的波长非常难得到,本发明提供一种腔内倍频的技术获得558nm波长激光。At present, there have been reports on semiconductor-pumped solid-state yellow lasers at home and abroad. They mainly adopt the following four methods: one is based on the dual-base spectral line oscillation through nonlinear sum frequency (Intracavitysum-frequencydiodeside-pumpedall-solid-stategenerationyellowlaserat589nmwithanoutputpowerof20.5W, "Applied Optics", Vol.52, 2013, 1876-1880), This method has the disadvantages of complex structure, large volume, low efficiency, and large noise. The second is to obtain Stokes light in the 1.1-1.2 μm band based on stimulated Raman scattering, and then obtain it through frequency doubling technology (Self-frequency-doubled BaTeMo2O9Ramanlaser emitting at 589nm, "Optics Express", Vol.21, 2013, 7821-7827); The third is to obtain Stokes light and fundamental frequency light based on stimulated Raman scattering through sum-frequency conversion technology (HighpowerQ-switchedintracavitysum-frequencygenerationandself-Ramanlaserat559nm, "Optics & Laser Technology", 2013, Vol.47, 2013, 43-46), However, Raman lasers have a high threshold and low light-to-light efficiency. Fourth, the base spectrum line based on the 1.1-1.2μm band is directly obtained by frequency doubling technology (Afrequency-doubledNd:YAG/KTPlaserat561nmwithdiodeside-pumping, "LaserPhys", Vol.23, 2013, 5402-5405), this method has a simple structure, However, the single pulse energy and average power are low, and single frequency output cannot be obtained. The yellow light wavelength of 558nm is closer to the sensitive wavelength 555 of the human eye, and is more suitable for retinal coagulation surgery and macular degeneration surgery than other wavelengths. However, the wavelength of 558nm is very difficult to obtain, and the present invention provides an intracavity frequency doubling technique to obtain laser with a wavelength of 558nm.

发明内容Contents of the invention

发明目的:为了获得558nm波长的单频输出,本发明提供了一种结构简单,体积小,效率高,低噪声的全固体黄激光器,该激光器可获得558nm单频激光输出。Purpose of the invention: In order to obtain the single-frequency output of 558nm wavelength, the present invention provides a simple in structure, small in size, high in efficiency, and low-noise all-solid-state yellow laser, which can obtain 558nm single-frequency laser output.

技术方案:本发明提供的一种558nm波长单频输出的全固体激光器,包括:Technical solution: The present invention provides an all-solid-state laser with 558nm wavelength single-frequency output, including:

一泵浦源系统,所述泵浦源系统包括在光路上依次安置的激光二极管LD、光纤以及聚焦耦合透镜系统;A pumping source system, the pumping source system includes a laser diode LD, an optical fiber and a focusing coupling lens system arranged in sequence on the optical path;

一Z型谐振腔装置,所述Z型谐振腔装置包括在Z型腔内依次安置的尾镜、凹面折叠镜、黄光输出镜以及全反镜,所述尾镜和凹面折叠之间放置有波片和激光增益介质,所述凹面折叠镜与黄光输出镜之间放置有双折射滤波片,所述黄光输出镜和全反镜之间放置有倍频晶体。A Z-shaped resonant cavity device, the Z-shaped resonant cavity device includes a tail mirror, a concave folding mirror, a yellow light output mirror and a total reflection mirror arranged in sequence in the Z-shaped cavity, and a A wave plate and a laser gain medium, a birefringence filter is placed between the concave folding mirror and the yellow light output mirror, and a frequency doubling crystal is placed between the yellow light output mirror and the total reflection mirror.

所述波片包括依次放置在激光增益介质前后的第一拨片和第二拨片,所述第一拨片和第二拨片均为四分之一波片。The wave plate includes a first plectrum and a second plectrum sequentially placed before and after the laser gain medium, and both the first plectrum and the second plectrum are quarter-wave plates.

所述尾镜、第一波片、激光增益介质、第二波片、双折射滤波片、凹面折叠镜组成Z型腔第一臂;所述凹面折叠镜、黄光输出镜组成Z型腔第二臂;所述黄光输出镜、倍频晶体、全反镜组成Z型腔第三臂。The tail mirror, the first wave plate, the laser gain medium, the second wave plate, the birefringence filter, and the concave folding mirror form the first arm of the Z-shaped cavity; the concave folding mirror and the yellow light output mirror form the second arm of the Z-shaped cavity. Two arms; the yellow light output mirror, the frequency doubling crystal, and the total reflection mirror form the third arm of the Z-shaped cavity.

所述Z型腔第一臂的长度为135~145mm,Z型腔第二臂的长度为123~133mm,Z型腔第三臂的长度为91~101mm。The length of the first arm of the Z-shaped cavity is 135-145 mm, the length of the second arm of the Z-shaped cavity is 123-133 mm, and the length of the third arm of the Z-shaped cavity is 91-101 mm.

所述第一波片和第二波片均双面镀有增透膜,其快轴相互垂直,并且均与双折射滤波片的起偏方向30°—60°角。Both sides of the first wave plate and the second wave plate are coated with anti-reflection coatings, their fast axes are perpendicular to each other, and both have an angle of 30°-60° to the polarization direction of the birefringence filter.

所述激光增益介质采用单端复合生长型Nd:YAG晶体或双端复合生长型Nd:YAG晶体。The laser gain medium adopts single-end compound growth type Nd:YAG crystal or double-end compound growth type Nd:YAG crystal.

所述激光增益介质和倍频晶体都由制冷装置进行温度控制。Both the laser gain medium and the frequency doubling crystal are temperature-controlled by a refrigeration device.

所述制冷装置是循环水制冷装置,将激光增益介质和倍频晶体放置于通过有冷却循环水的散热器中,热量通过散热器传导至循环水中,再通过循环水将热量携带走。The refrigerating device is a circulating water refrigerating device. The laser gain medium and the frequency doubling crystal are placed in a radiator with cooling circulating water, and the heat is conducted to the circulating water through the radiator, and then the heat is carried away by the circulating water.

所述尾镜为平面镜,其表面镀有增透膜。The rear mirror is a flat mirror, and its surface is coated with an anti-reflection film.

所述双折射滤波片采用石英玻璃,以布儒斯特角56°放置,其表面镀有增透膜。The birefringence filter is made of quartz glass, placed at a Brewster angle of 56°, and its surface is coated with an anti-reflection film.

所述倍频晶体采用三硼酸锂或磷酸钛氧钾。The frequency doubling crystal adopts lithium triborate or potassium titanyl phosphate.

工作原理:本发明的558nm波长单频输出的全固体激光器工作流程如下:激光二极管LD发出的泵浦光经过光纤传输,并通过聚焦耦合透镜系统整形聚焦,进入到激光增益介质中,激光增益介质通过受激发射,产生中心波长为1116nm的光子,产生的光子通过所述激光增益介质和Z型谐振腔装置的反馈放大,产生高功率密度的1116nm基频光驻波,同时通过四分之一波片和双折射滤波片消除基频光驻波在腔内的空间烧孔效应,获得单频运转,然后单频基频光子通过倍频晶体的双程倍频,形成558nm黄光激光并由所述黄光输出镜输出。Working principle: The working process of the 558nm wavelength single-frequency output all-solid-state laser of the present invention is as follows: the pump light emitted by the laser diode LD is transmitted through the optical fiber, and is reshaped and focused by the focusing coupling lens system, and then enters the laser gain medium, and the laser gain medium Through stimulated emission, photons with a central wavelength of 1116nm are generated, and the generated photons are amplified by the feedback of the laser gain medium and the Z-shaped resonant cavity device to generate a standing wave of 1116nm fundamental frequency light with high power density, and at the same time pass through a quarter The wave plate and the birefringence filter eliminate the spatial hole-burning effect of the standing wave of the fundamental frequency light in the cavity, and obtain a single-frequency operation, and then the single-frequency fundamental frequency photons pass through the double-pass frequency doubling of the frequency-doubling crystal to form a 558nm yellow laser and generate it. The yellow light output mirror output.

有益效果:本发明采用了双端复合生长型Nd:YAG晶体作为增益介质,并设计了满足热透镜效应不灵敏的基模动态稳定的Z型扭摆腔,采用了腔内双程倍频的方式,获得了558nm波长黄光激光单频输出。本发明充分利用了腔内基频光的高功率密度,并采用Z型腔提高了倍频效率,实现了单纵模、低噪声、高功率和高能量的黄光激光输出,成功的解决了现有技术中激光器的缺点。与现有技术相比,本发明的558nm波长输出的全固体单频激光器所采用的Z型腔的每个臂的长度和各腔镜的曲率半径可以根据不同设计进行优化选取,一方面可以实现在很大范围内的激光增益介质和倍频晶体中的模式变化很小,从而大大减小热透镜效应对于激光性能的影响;另一方面可以实现倍频晶体中较小的基频光光斑,从而实现较高的倍频效率。本发明的558nm波长输出的全固体单频激光器具有更高的输出功率/能量,并且体积小、稳定性好、成本低、噪声低。Beneficial effects: the present invention adopts double-terminal compound growth type Nd:YAG crystal as the gain medium, and designs a Z-shaped torsion cavity that satisfies the dynamic stability of the fundamental mode that is not sensitive to thermal lens effect, and adopts the method of double-pass frequency doubling in the cavity , obtained a single frequency output of 558nm wavelength yellow laser. The invention makes full use of the high power density of the fundamental frequency light in the cavity, and adopts the Z-shaped cavity to improve the frequency doubling efficiency, realizes the yellow laser output with single longitudinal mode, low noise, high power and high energy, and successfully solves the problem of Disadvantages of lasers in the prior art. Compared with the prior art, the length of each arm of the Z-shaped cavity and the radius of curvature of each cavity mirror used in the all-solid-state single-frequency laser with 558nm wavelength output of the present invention can be optimized and selected according to different designs. On the one hand, it can realize The mode change in the laser gain medium and frequency doubling crystal is very small in a wide range, thus greatly reducing the influence of thermal lens effect on laser performance; on the other hand, it can realize a smaller fundamental frequency light spot in the frequency doubling crystal, Thereby achieving higher frequency doubling efficiency. The all-solid-state single-frequency laser with 558nm wavelength output of the present invention has higher output power/energy, and is small in size, good in stability, low in cost and low in noise.

附图说明Description of drawings

图1是本发明的结构示意图。Fig. 1 is a structural schematic diagram of the present invention.

其中:1—激光二极管LD,2—光纤,3—聚焦耦合透镜系统,4—尾镜,5—第一波片,6—激光增益介质,7—第二波片,8—双折射滤波片,9—凹面折叠镜,10—黄光输出镜,11—倍频晶体,12—全反镜,13—制冷装置,14—泵浦源系统,15—Z型腔第一臂,16—Z型腔第二臂,17—Z型腔第三臂。Among them: 1—laser diode LD, 2—optical fiber, 3—focus coupling lens system, 4—tail mirror, 5—first wave plate, 6—laser gain medium, 7—second wave plate, 8—birefringence filter . Cavity second arm, 17—Z cavity third arm.

具体实施方式detailed description

实施例1:Example 1:

如图1所示,一种获得558nm波长单频输出的全固体激光器,其包括一泵浦源系统14,所述泵浦源系统14主要包括在一光路上依次安置的激光二极管LD1、光纤2以及一聚焦耦合透镜系统3,所述泵浦源系统14的工作模式为连续工作模式,最大连续泵浦功率为50W,输出中心波长为808nm。As shown in Figure 1, an all-solid-state laser that obtains a single-frequency output with a wavelength of 558nm includes a pump source system 14, and the pump source system 14 mainly includes a laser diode LD1 and an optical fiber 2 arranged in sequence on an optical path. And a focusing coupling lens system 3, the working mode of the pumping source system 14 is continuous working mode, the maximum continuous pumping power is 50W, and the output center wavelength is 808nm.

本发明还包括一z型谐振腔装置,所述z型谐振腔装置包括在z型腔第一臂15,Z型腔第二臂16,Z型腔第三臂17。所述z型腔第一臂15内依次安置的尾镜4,第一波片5,激光增益介质6,第二波片7,双折射滤波片8,凹面折叠镜9。所述z型腔第二臂16内依次安置凹面折叠镜9,黄光输出镜10。所述的Z型腔第三臂17内依次安置黄光输出镜10,倍频晶体11,全反镜12。The present invention also includes a z-shaped resonant cavity device, which includes a first arm 15 of the z-shaped cavity, a second arm 16 of the z-shaped cavity, and a third arm 17 of the z-shaped cavity. The rear mirror 4 , the first wave plate 5 , the laser gain medium 6 , the second wave plate 7 , the birefringence filter 8 and the concave folding mirror 9 are sequentially arranged in the first arm 15 of the z-shaped cavity. The concave folding mirror 9 and the yellow light output mirror 10 are sequentially arranged in the second arm 16 of the z-shaped cavity. A yellow light output mirror 10 , a frequency doubling crystal 11 and a total reflection mirror 12 are sequentially arranged in the third arm 17 of the Z-shaped cavity.

进一步的,激光增益介质6和倍频晶体11由制冷装置13进行底面散热。制冷装置13是循环水制冷装置,激光增益介质6和倍频晶体11的侧面分别被包裹在紫铜散热器中,底部安装热沉与水冷板连接,通过冷水循环将热量携带走。Further, the bottom surface of the laser gain medium 6 and the frequency doubling crystal 11 are dissipated by the cooling device 13 . The cooling device 13 is a circulating water cooling device. The sides of the laser gain medium 6 and the frequency doubling crystal 11 are respectively wrapped in a copper radiator, and a heat sink is installed at the bottom to connect with the water cooling plate, and the heat is carried away by the cold water circulation.

优选的,激光增益介质6为双端复合生长型Nd:YAG晶体,掺杂浓度为1.0at.%,尺寸为3×3×10mm3,前后两端各2mm长的非掺杂YAG晶体,参杂区长度为6mm,前后端面都镀有对波长为808nm,1064nm,1116nm和1319nm的光束的增透膜,对808nm和1116nm光束的透射率大于99.8%,808nm和1319nm光束的透射率大于98%。Preferably, the laser gain medium 6 is a double-terminal compound growth type Nd:YAG crystal with a doping concentration of 1.0at.%, a size of 3×3×10mm 3 , and a non-doped YAG crystal with a length of 2mm at both ends, see The length of the miscellaneous area is 6mm, and the front and rear end faces are coated with anti-reflection coatings for beams with wavelengths of 808nm, 1064nm, 1116nm and 1319nm. The transmittance of 808nm and 1116nm beams is greater than 99.8%, and the transmittance of 808nm and 1319nm beams is greater than 98%. .

优选的,第一波片5和第二波片7的双面均镀有对808nm大于95%的增透膜,并且该膜对1116nm谱线的反射率大于99.8%,对1064nm谱线透射率大于70%,其快轴相互垂直,并且与双折射滤波片8的起偏方向成45°角。Preferably, both sides of the first wave plate 5 and the second wave plate 7 are coated with an anti-reflection coating greater than 95% to 808nm, and the reflectivity of the film to the 1116nm spectral line is greater than 99.8%, and the transmittance to the 1064nm spectral line Greater than 70%, their fast axes are perpendicular to each other and form an angle of 45° with the polarization direction of the birefringence filter 8 .

优选的,倍频晶体11选用三硼酸锂(LBO),尺寸为3×3×10mm3,晶体两端镀有1116nm和558nm的增透膜,透射率大于99.8%;匹配方式采用一类临界匹配,切割角度(θ,φ)为(90°,8°)。Preferably, the frequency-doubling crystal 11 is made of lithium triborate (LBO), with a size of 3×3×10mm 3 . Both ends of the crystal are coated with 1116nm and 558nm anti-reflection coatings, and the transmittance is greater than 99.8%. The matching method adopts a type of critical matching , the cutting angle (θ, φ) is (90°, 8°).

优选的,双折射滤波片8选用石英玻璃,以布儒斯特角(56°)放置于腔内,表面镀有对1116nm基频光的增透膜,透射率大于99.8%。Preferably, the birefringent filter 8 is made of quartz glass, placed in the cavity at Brewster's angle (56°), and coated with an anti-reflection film for 1116nm fundamental frequency light, with a transmittance greater than 99.8%.

优选的,尾镜4为平面镜,输入面镀有对808nm透射率大于95%,对1064nm谱线透射率大于70%的膜系;输出面也镀有对泵浦光大于95%的增透膜,并且该膜对1116nm谱线的反射率大于99.8%,对1064nm谱线透射率大于70%。Preferably, the tail mirror 4 is a plane mirror, and the input surface is coated with a film system with a transmittance greater than 95% to 808nm and a transmittance greater than 70% to the 1064nm spectral line; the output surface is also coated with an anti-reflection coating greater than 95% to the pump light , and the reflectance of the film to the 1116nm spectral line is greater than 99.8%, and the transmittance to the 1064nm spectral line is greater than 70%.

本发明的所采用的Z型腔的每个臂的长度和各腔镜的曲率半径可以根据不同设计进行优化选取。The length of each arm of the Z-shaped cavity adopted in the present invention and the radius of curvature of each cavity mirror can be optimally selected according to different designs.

优选的,凹面折叠镜9的曲率半径为100mm,镀有对1116nm谱线反射率大于99.8%的反射膜,并且对1064nm谱线和1320nm谱线透射率大于70%。Preferably, the concave folding mirror 9 has a radius of curvature of 100mm, is coated with a reflective film with a reflectivity greater than 99.8% for the 1116nm spectral line, and greater than 70% for the 1064nm spectral line and 1320nm spectral line.

优选的,黄光输出镜10的曲率半径为50mm,镀有对558nm谱线透射率大于95%的增透膜,并且对1116nm谱线反射率大于99.8%,对1064nm谱线的透射率大于50%。Preferably, the radius of curvature of the yellow light output mirror 10 is 50 mm, coated with an anti-reflection coating with a transmittance greater than 95% for the 558nm spectral line, and greater than 99.8% for the 1116nm spectral line, and greater than 50% for the 1064nm spectral line. %.

优选的,全反镜12的曲率半径为50mm,镀有对1116nm谱线和558nm谱线反射率大于99.8%的反射膜,并且对1064nm谱线的透射率大于50%。Preferably, the total reflection mirror 12 has a radius of curvature of 50mm, is coated with a reflective film with a reflectivity greater than 99.8% for the 1116nm spectral line and 558nm spectral line, and has a transmittance greater than 50% for the 1064nm spectral line.

优选的,Z型腔第一臂15的长度为l40mm、Z型腔第二臂16的长度为128mm,Z型腔第三臂17的长度为96mm,共长364mm。Preferably, the length of the first arm 15 of the Z cavity is 140 mm, the length of the second arm 16 of the Z cavity is 128 mm, and the length of the third arm 17 of the Z cavity is 96 mm, with a total length of 364 mm.

优选的,光纤2的芯径200μm,数值孔径0.22。Preferably, the core diameter of the optical fiber 2 is 200 μm, and the numerical aperture is 0.22.

实施例2:Example 2:

与实施例1大体相同,不同之处如下:Identical substantially with embodiment 1, difference is as follows:

(1)激光增益介质为单端复合生长型Nd:YAG晶体,尺寸为3×3×9mm3,其中前端为4mm长的非掺杂YAG晶体,掺杂区长度为5mm,浓度为1.lat.%,前后端面都镀有对波长为808nm,1064nm,1116nm和1319nm的光束的增透膜,其中对1116nm和1064nm的光束的透射率大于99.8%,808nm和1319nm光束的透射率大于98%。(1) The laser gain medium is a single-ended compound growth type Nd:YAG crystal with a size of 3×3×9mm 3 , in which the front end is a 4mm long non-doped YAG crystal, the length of the doped region is 5mm, and the concentration is 1.lat .%, the front and rear end faces are coated with anti-reflection coatings for beams with wavelengths of 808nm, 1064nm, 1116nm and 1319nm, wherein the transmittance for 1116nm and 1064nm beams is greater than 99.8%, and the transmittance for 808nm and 1319nm beams is greater than 98%.

(2)倍频晶体11选用磷酸钛氧钾(KTP),尺寸为3×3×8mm3,晶体两端镀有1116nm和558nm的增透膜,透射率大于99.8%;匹配方式采用二类临界匹配,切割角度切割角度(θ,φ)为(62.8°,90°)。(2) Frequency doubling crystal 11 is made of potassium titanyl phosphate (KTP), with a size of 3×3×8mm 3 , both ends of the crystal are coated with 1116nm and 558nm anti-reflection coatings, and the transmittance is greater than 99.8%; the matching method adopts a second critical Matching, cutting angle The cutting angle (θ, φ) is (62.8°, 90°).

Claims (11)

1. an all solid laser for 558nm wavelength single-frequency output, is characterized in that, comprising:
One pumping source system (14), described pumping source system (14) be included in light path is settled successively laser diode LD (1), optical fiber (2) and focus on coupled lens system (3);
One Z-type resonator device, described Z-type resonator device is included in tail mirror (4), concave surface refrative mirror (9), gold-tinted outgoing mirror (10) and the total reflective mirror (12) settled successively in Z-type chamber, wave plate and gain medium (6) is placed with between described tail mirror (4) and concave surface refrative mirror (9), be placed with birefringent filter (8) between described concave surface refrative mirror (9) and gold-tinted outgoing mirror (10), between described gold-tinted outgoing mirror (10) and total reflective mirror (12), be placed with frequency-doubling crystal (11).
2. all solid laser of 558nm wavelength single-frequency output according to claim 1, it is characterized in that, described wave plate comprises the first wave plate (5) and the second wave plate (7) that are placed on gain medium (6) front and back successively, and described first wave plate (5) and the second wave plate (7) are quarter-wave plate.
3. all solid laser of 558nm wavelength single-frequency output according to claim 1, it is characterized in that, described tail mirror (4), the first wave plate (5), gain medium (6), the second wave plate (7), birefringent filter (8), concave surface refrative mirror (9) composition Z-type chamber first arm (15); Described concave surface refrative mirror (9), gold-tinted outgoing mirror (10) composition Z-type chamber second arm (16); Described gold-tinted outgoing mirror (10), frequency-doubling crystal (11), total reflective mirror (12) composition Z-type chamber the 3rd arm (17).
4. all solid laser of 558nm wavelength single-frequency output according to claim 3, it is characterized in that, the length of described Z-type chamber first arm (15) is 135 ~ 145mm, the length in Z-type chamber second arm (16) is 123 ~ 133mm, and the length in Z-type chamber the 3rd arm (17) is 91 ~ 101mm.
5. all solid laser of 558nm wavelength single-frequency output according to claim 2, it is characterized in that, described first wave plate (5) and the second wave plate (7) is all two-sided is coated with anti-reflection film, its fast axle is mutually vertical, and all with a folk prescription of birefringent filter (8) to 30 ° of-60 ° of angles.
6. all solid laser of 558nm wavelength single-frequency output according to claim 1, it is characterized in that, described gain medium (6) adopts single-ended composite growth type Nd:YAG crystal or both-end composite growth type Nd:YAG crystal.
7. all solid laser of 558nm wavelength single-frequency output according to claim 1, it is characterized in that, described gain medium (6) and frequency-doubling crystal (11) all carry out temperature control by refrigerating plant (13).
8. all solid laser of 558nm wavelength single-frequency output according to claim 7, it is characterized in that, described refrigerating plant (13) is circulating water refrigerating plant, gain medium (6) and frequency-doubling crystal (11) are positioned over by having in the radiator of cooling circulating water, heat is conducted in recirculated water by radiator, then is carried away by heat by recirculated water.
9. all solid laser of 558nm wavelength single-frequency output according to claim 1, it is characterized in that, described tail mirror (4) is level crossing, and its surface is coated with anti-reflection film.
10. all solid laser of 558nm wavelength single-frequency output according to claim 1, it is characterized in that, described birefringent filter (8) adopts quartz glass, and with Brewster's angle 56 ° placement, its surface is coated with anti-reflection film.
The all solid laser that 11. 558nm wavelength single-frequency according to claim 1 export, it is characterized in that, described frequency-doubling crystal (11) adopts three lithium borates or potassium titanium oxide phosphate.
CN201510971550.2A 2015-12-22 2015-12-22 All-solid-state laser capable of obtaining single-frequency output at wavelength of 558nm Pending CN105390929A (en)

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CN109449736A (en) * 2018-11-06 2019-03-08 河南大学 A kind of compact-sized watt grade CW intracavity doubled single-frequency laser
CN112366506A (en) * 2020-11-26 2021-02-12 山西大学 Miniaturized low-noise all-solid-state single-frequency continuous wave laser

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US20080259969A1 (en) * 2004-09-23 2008-10-23 James Austin Piper Slectable Multiwavelength Laser for Outputting Visible Light
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CN109449736A (en) * 2018-11-06 2019-03-08 河南大学 A kind of compact-sized watt grade CW intracavity doubled single-frequency laser
CN112366506A (en) * 2020-11-26 2021-02-12 山西大学 Miniaturized low-noise all-solid-state single-frequency continuous wave laser
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