CN105387310B - A kind of maglev type precisely locating platform - Google Patents
A kind of maglev type precisely locating platform Download PDFInfo
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- CN105387310B CN105387310B CN201510994384.8A CN201510994384A CN105387310B CN 105387310 B CN105387310 B CN 105387310B CN 201510994384 A CN201510994384 A CN 201510994384A CN 105387310 B CN105387310 B CN 105387310B
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- electromagnet
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- driving device
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Linear Motors (AREA)
Abstract
本发明公开了一种磁浮式精密定位平台，包括安装板、运动平台、基座、直线电机驱动装置和电磁铁悬浮驱动装置，其中：在垂直方向上将所述安装板、运动平台和基座通过固定装置依次连接；所述电磁铁悬浮驱动装置包括电磁铁和衔铁，所述电磁铁安装在安装板上，在电磁铁下方对应的位置上将衔铁安装在运动平台的上表面；所述直线电机驱动装置包括永磁阵列和空心线圈绕组，所述永磁阵列镶嵌于运动平台下表面，在永磁阵列下方对应的位置上将空心线圈绕组安装在基座上。该磁浮式定位平台具有精度高、行程大，特别是垂直方向上的运动行程和响应速度快的特点，且简化了机械结构，便于产生多自由度的运动。
The invention discloses a magnetic levitation precision positioning platform, comprising a mounting plate, a motion platform, a base, a linear motor drive device and an electromagnet levitation drive device, wherein: the mounting plate, the motion platform and the base are vertically aligned The electromagnet levitation driving device includes an electromagnet and an armature, and the electromagnet is installed on the mounting plate, and the armature is installed on the upper surface of the motion platform at a corresponding position below the electromagnet; the straight line The motor driving device includes a permanent magnet array and an air-core coil winding, the permanent magnet array is inlaid on the lower surface of the motion platform, and the air-core coil winding is installed on the base at a corresponding position below the permanent magnet array. The magnetic levitation positioning platform has the characteristics of high precision, large stroke, especially the motion stroke in the vertical direction and fast response speed, and simplifies the mechanical structure to facilitate the generation of multi-degree-of-freedom motion.
Description
Technical field
The present invention relates to Precision Machining manufacturing field, in particular to a kind of maglev type precisely locating platform.
Background technique
Modern science and technology are more and more deep to the research of microscopic fields, come into high-precision nanometer, atomic weight
The epoch of grade.Micro- location technology is one of the core key technology of microscopic fields research, and state-of-art directly influences
The development level of microscopic fields technology, therefore the multiple degrees of freedom high-precision as the engineering application of micro- location technology
Just there is particularly important real research significance.Particularly, in litho machine field, the process node line width of photoetching is reached
22nm, and brilliant diameter of a circle further increases, it means that and the requirement to locating platform is increased, and motion platform is needed to reach
The positioning accuracy of Nano grade reaches the other movement travel range of hundreds of grades and requires motion platform fast response time.
There are mainly three types of modes for traditional contact high-precision: one, being driven using rotating servo motor, then
It is driven using precise ball screw；Two, linear motor direct drive is utilized；Three, Piezoelectric Ceramic is utilized.Using servo electricity
Machine drives and is current widely used plane motion positioning method using the locating platform of ball leading screw driving, but its
The disadvantage is that: include the middle transitions links such as shaft coupling, screw rod, bearing due to existing between motion platform and driving mechanism, increases
The inertia mass of positioning mechanism has large effect to the response frequency of system, and generated due to middle transition link
The factors such as friction, elastic deformation, reduce the positioning accuracy of system, and due to the shape of screw rod be it is elongated, in external force field
It can be deformed under the action of temperature field, further influence positioning accuracy.It is using the shortcomings that linear motor direct drive: by
Buffering link is not present in the intermediate link of system and there are corresponding end effects, so that the control difficulty of system increases,
And there is serious fever, system thrust offer deficiency, moving parts lightweight etc. as driving mechanism using linear motor to ask
Topic.And piezoelectric ceramic type precisely locating platform is widely used in the positioning system of Nano grade using piezoelectric ceramics as driving mechanism
In system, but the disadvantage is that movement travel is small, it is usually no more than 100 μm.Although being combined by coarse positioning with precision positioning
The movement travel of system can be improved in method, but also due to the introducing of stacked system reduces the positioning accuracy of system, so that positioning
Precision and movement travel range become a pair of intrinsic contradiction.
When the application field of high-precision is to its positioning accuracy, response speed, stroke range is proposed increasingly
When high requirement, the locating platform of conventional contact structure is difficult to meet the requirements, therefore uses contactless locating platform.Mesh
Preceding contactless locating platform mainly uses gas suspension platform, in gas suspension locating platform, due to not having object between element
Contact in reason, in the case where ignoring air damping, it is believed that do not have frictional force, and need not be used between platform and motor element
Lubricant is suitable for ultra-clean processing environment.But gas suspension platform inertia is larger and suspension support rigidity is lower, so that platform
Bearing capacity and impact resistance are lower, reduce the sensitivity and positioning accuracy of entire platform, and air-suspending positioning is flat
Platform can not be applied in vacuum environment.
Therefore, positioning accuracy height how is obtained, movement travel is big, and fast response time and mechanical structure are simple non-to be connect
Touch locating platform becomes the problem of those skilled in the art's urgent need to resolve.
Summary of the invention
Based on above-mentioned technical problem, the present invention provides a kind of maglev type precisely locating platform, can be by simple mechanical
Structure realizes that the positioning accuracy of locating platform is high, and movement travel is big, fast response time, to meet the requirement of Precision Machining manufacture.
Maglev type precisely locating platform provided by the invention, including the driving of mounting plate, motion platform, pedestal, linear motor
Device and electromagnet suspension driving device, in which:
The mounting plate, motion platform and pedestal are sequentially connected by fixed device in vertical direction；The installation
Plate, motion platform and pedestal are equilateral triangle, and the linear motor driver and electromagnet suspension driving device are all provided with
It sets on the position at three angles of equilateral triangle；
The electromagnet suspension driving device includes electromagnet and armature, and the electromagnet is installed on a mounting board, in electricity
Armature is mounted on on corresponding position the upper surface of motion platform below magnet；The electromagnet suspension driving device is three
Group, three groups of electromagnet suspension driving devices are in the horizontal direction at triangular arranged；
The linear motor driver includes permanent magnet array and air core coil winding, and the permanent magnet array is embedded in movement
Platform lower surface, below the permanent magnet array on corresponding position by the installation of air core coil winding on the base；The linear motor
Driving device is three groups, and three groups of linear motor drivers are in the horizontal direction at triangular arranged；Triangle base
The sum of area of two groups of permanent magnet arrays and the permanent magnet array area equation on vertex position；
The mounting plate edge is equipped with current vortex sensor.
Preferably, two groups of permanent magnet arrays of triangle base are arranged according to identical arrangement mode, on vertex position forever
Magnetic array arrangement mode and two groups of permanent magnet arrays on bottom edge are mutually perpendicular to.
Preferably, the current vortex sensor is three, is separately positioned on three angles of mounting plate.
Preferably, the electromagnet uses the U-shaped electromagnet of soft magnetic materials, the U-shaped electromagnet installation that Open Side Down
In the rectangular channel of mounting plate.
Preferably, a round hole is reserved at the mounting plate center.
The present invention in the horizontal direction, using the linear motor driver with air core coil, passes through control permanent magnet array
Magnetic field generator rotor angle between air core coil winding, makes motor only generate the driving force in horizontal direction, does not generate in vertical direction
Suspending power make platform to not generate interference effect to electromagnet suspension in the horizontal direction and can obtain hundred grades and is other
The positioning accuracy of movement travel and Nano grade.On suspension direction, millimeter is realized using three groups of electromagnet suspension driving devices
The movement travel of magnitude.Above-mentioned maglev type locating platform has precision height, stroke big, especially to the movement row in vertical direction
Journey is greatly improved and the characteristics of fast response time, and simplifies mechanical structure, convenient for generating multivariant movement.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of maglev type precisely locating platform provided by the invention；
Fig. 2 is the front view of the maglev type precisely locating platform of Fig. 1；
Fig. 3 is a kind of mounting plate critical size figure of maglev type precisely locating platform provided by the invention；
Fig. 4 is a kind of structural schematic diagram of electromagnet suspension driving device provided by the invention；
Fig. 5 is the structural schematic diagram of permanent magnet array in a kind of linear motor driver provided by the invention；
Fig. 6 is a kind of movement mechanism schematic diagram of maglev type precisely locating platform provided by the invention.
Specific embodiment
In order that those skilled in the art will better understand the technical solution of the present invention, with reference to the accompanying drawing to the present invention
It is described in further detail.
Referring to Fig. 1-2, Fig. 1 is a kind of structural schematic diagram of maglev type precisely locating platform provided by the invention, and Fig. 2 is figure
The front view of 1 maglev type precisely locating platform.
It includes mounting plate 1, motion platform 2, pedestal 3, linear motor that the present invention, which provides a kind of maglev type precisely locating platform,
Driving device 4 and electromagnet suspension driving device 5, in which: in vertical direction by the mounting plate 1, motion platform 2 and pedestal
3 are sequentially connected by fixed device；The electromagnet suspension driving device 4 includes electromagnet 41 and armature 42, the electromagnet
Armature 42 is mounted on the upper surface of motion platform 2 below the electromagnet 41 by 41 installations on a mounting board 1 on corresponding position；
The linear motor driver 5 includes permanent magnet array 51 and air core coil winding 52, and the permanent magnet array 51 is embedded in movement
52 winding of air core coil is mounted on pedestal 3 below the permanent magnet array 51 by 2 lower surface of platform on corresponding position.
The mounting plate 1, motion platform 2 and pedestal 3 are passed through fixed device in vertical direction and successively connected by the platform
It connects.Preferably, bolt hole is set at the edge of mounting plate, is connect by bolt with pedestal, realize that position is fixed.
In vertical direction, the installation of electromagnet 41 on a mounting board 1, by armature on corresponding position below the electromagnet 41
42 are mounted on the upper surface of motion platform 2, by generating magnetic field, which exists to the electromagnet coil power in electromagnet 41
Closed circuit is formed between electromagnet 41, the air gap and armature, so that electromagnetic attraction is generated, under the suction, fortune
Moving platform is lifted in vertical direction, so that platform can obtain the other movement travel of grade in vertical direction.
Permanent magnet array 51 is embedded in 2 lower surface of motion platform in the horizontal direction, the corresponding position below permanent magnet array 51
It sets and 52 winding of air core coil is mounted on pedestal 3, pass through the magnetic field function between control permanent magnet array and air core coil winding
Angle makes linear motor driver provide horizontal actuator force in the horizontal direction, and hundred millis can be obtained by making platform in the horizontal direction
The positioning accuracy of meter level other movement travel and Nano grade.Since linear motor driver 5 uses 52 structure of air core coil,
So that magnetic attraction force is not present under quiescent conditions in motion platform between permanent magnet array 51 and pedestal 3, therefore not to electromagnet 41
There are interference effects, i.e., will not impact to normal stable suspersion.
Above-mentioned maglev type locating platform has that precision is high, stroke is big, especially to the movement travel in vertical direction have compared with
The characteristics of big raising and fast response time, and mechanical structure is simplified, convenient for generating multivariant movement.
In further embodiment, the mounting plate edge is equipped with current vortex sensor, for surveying on suspension direction
Levitation gap is measured, the real time position of motion platform in space can be calculated.
The preferred electromagnet suspension driving device 4 is three groups, and three groups of electromagnet suspension driving devices 4 are in the horizontal direction
On at triangular arranged.
Preferably, the linear motor driver 5 is three groups, and three groups of linear motor drivers 5 are in the horizontal direction
At triangular arranged.
Referring to Fig. 1 and Fig. 3, Fig. 1 is a kind of structural schematic diagram of maglev type precisely locating platform provided by the invention, Fig. 3
For a kind of mounting plate critical size figure of maglev type precisely locating platform provided by the invention.
The mounting plate, motion platform and pedestal are equilateral triangle, the linear motor driver and electromagnet
Suspension driving device is arranged on the position at three angles of equilateral triangle.
The mounting plate is the equilateral triangle that size dimension is 370mm, since mounting plate needs to carry electromagnet etc., in order to
It prevents its static(al) deformation larger, influences the measurement accuracy of sensor etc., thickness is set as 6mm, and three groups of electromagnet, which suspend, to be driven
Three electromagnet in device are distributed in using triangle center as on the position at three angles in axle center, three electromagnet central points
Horizontal spacing is 200mm, and armature 42 is mounted on to below the electromagnet 41 upper surface of motion platform 2 on corresponding position.
Motion platform 2 is the equilateral triangle that side length is 330mm, with a thickness of 60mm.Three groups of linear motor driver platforms are by three groups
Permanent magnet array be arranged in motion platform bottom using triangle center as on the angle of three, axle center, it is corresponding below permanent magnet array 51
52 winding of air core coil is mounted on pedestal 3 on position.Pedestal aluminium sheet is also the equilateral triangle of 370mm.
Preferably, motion platform 2 is aluminium alloy, and pedestal 3 is aluminium sheet.
In further embodiment, the current vortex sensor 6 is three, is separately positioned on three angles of mounting plate 1.
Three holes are reserved at three angles of mounting plate 1, for installing current vortex sensor, the spacing of three current vortex sensors is
300mm, at triangular arranged.
Due to being to calculate rotation angle indirectly using the gap width of three groups of electric vortex sensor measurings, therefore will pacify in the program
Loading board, motion platform and pedestal are equilateral triangle, convenient for calculating, improve the response speed of locating platform.
In further scheme, a round hole is reserved at the center of mounting plate 1 for observing motion platform fortune
It is dynamic.
Referring to fig. 4, Fig. 4 is a kind of structural schematic diagram of electromagnet suspension driving device provided by the invention；
The electromagnet uses the U-shaped electromagnet of soft magnetic materials.Electromagnet generally uses soft magnetic material, and coil is using paint
Take all of conducting wire, stranded conductor winding method.On a mounting board using equilateral triangle center to be opened on the position at three angles in axle center
Rectangular channel, Open Side Down is installed in the rectangular channel of mounting plate for the U-shaped electromagnet.
Referring to Fig. 5, Fig. 5 is the structural schematic diagram of permanent magnet array in a kind of linear motor driver provided by the invention；
Permanent magnet array 51 is embedded in 2 lower surface of motion platform in the horizontal direction, the corresponding position below permanent magnet array 51
It sets and 52 winding of air core coil is mounted on pedestal 3, linear motor driver makes motion platform under static state, forever
The suspension of electromagnet is influenced between magnetic array and pedestal there is no suction.And when motion platform is there are when horizontal movement, pass through
The generator rotor angle relationship between the magnetic field that permanent magnet array generates and the magnetic field of air core coil winding generation is controlled, so that the method for planar motor
It is zero to power, to eliminate the influence that horizontal driver generates levitating electromagnet under motion conditions.
Preferred air core coil is three-phase air core coil, and permanent magnet array is Halbach structure.Two groups of triangle base are forever
The sum of area of magnetic array and the permanent magnet array area equation on vertex position, guarantee in linear motor driver horizontal direction
On displacement can generate identical horizontal actuator force.Secondly, being arranged to the relationship of area, control strategy is facilitated to transplant.
Three groups of Halbach type linear motor drivers that Halbach structure permanent magnet array and air core coil are constituted, pass through coordinated control
The electromagnetic force of three groups of actuators controls the movement of planar motor, which intends reaching on X/Y plane hundred millimeters of movement row
Journey.
In further embodiment, two groups of permanent magnet arrays of triangle base are arranged according to identical arrangement mode, vertex
Two groups of permanent magnet arrays of permanent magnet array arrangement mode and bottom edge on position are mutually perpendicular to.
Referring to Fig. 6, Fig. 6 is a kind of movement mechanism schematic diagram of maglev type precisely locating platform provided by the invention.
Three rectangle frames are denoted as I, II, III linear motor driver according to clockwise respectively in figure.Triangle bottom
Two groups of permanent magnet arrays on side arrange according to identical arrangement mode, two of permanent magnet array arrangement mode and bottom edge on vertex position
Group permanent magnet array is mutually perpendicular to.I.e. II, the permanent magnet array of III linear motor driver is arranged according to aligned identical mode, and I is straight
The permanent magnet array arrangement mode of line motor driver is mutually perpendicular to II, III motor.By the function for controlling permanent-magnet planar motor
Angular dependence, i.e.,Or, so that the horizontal actuator force of each motor reaches maximum value, (direction can just may be used
It is negative), it is denoted as、、, corresponding、、It is zero.The suspending power that three groups of electromagnet modules generate is denoted as respectively、、。
Movement mechanism is analyzed as follows: when controlling I permanent-magnet planar motor generation electromagnetic force, i.e.,Be positive (or by changing
Becoming generator rotor angle makes it be negative) when, it can getAxis forward direction (orAxis negative direction) movement；It is electric when controlling II, III permanent-magnet planar
When machine generates electromagnetic force, i.e.,、Be positive (or being negative) when, can getAxis forward direction (orAxis negative direction) fortune
It is dynamic.When three groups of electromagnet generate active force, i.e.,、、When generating active force, locating platform can be made to obtainAxis is just
To (orAxis negative direction) movement.WhenBe positive (or being negative),、Be negative (or being positive) when, andPlace
In the process of increase (or reduce),、When being in the process of reduction (or increase), it can be achieved that motion platform aroundAxis
Rotation；WhenBe positive (or being negative),Be negative (or being positive) when, andIt is in the process of increase (or reduction),When being in the process of reduction (or increase), it can be achieved that motion platform aroundAxis rotation；When、WithMovement
When contrary, it can be achieved that motion platform aroundAxis rotation.
Maglev type locating platform may be implemented by linear motor driver and electromagnet suspension driving device and generate six
Freedom degree movement, i.e. edge、、The translational motion of axis direction and around、、The rotary motion of axis.
A kind of maglev type precisely locating platform provided by the present invention is described in detail above.It is used herein
A specific example illustrates the principle and implementation of the invention, and the above embodiments are only used to help understand originally
The core concept of invention.It should be pointed out that for those skilled in the art, not departing from the principle of the invention
Under the premise of, it can be with several improvements and modifications are made to the present invention, these improvement and modification also fall into the claims in the present invention
In protection scope.
Claims (5)
1. a kind of maglev type precisely locating platform, which is characterized in that including mounting plate, motion platform, pedestal, linear motor driving
Device and electromagnet suspension driving device, in which:
The mounting plate, motion platform and pedestal are sequentially connected by fixed device in vertical direction；The mounting plate, fortune
Moving platform and pedestal are equilateral triangle, and the linear motor driver and electromagnet suspension driving device are arranged at
On the position at three angles of side triangle；
The electromagnet suspension driving device includes electromagnet and armature, and the electromagnet is installed on a mounting board, in electromagnet
Armature is mounted on to the upper surface of motion platform on the corresponding position in lower section；The electromagnet suspension driving device be three groups, three
Group electromagnet suspension driving device is in the horizontal direction at triangular arranged；
The linear motor driver includes permanent magnet array and air core coil winding, and the permanent magnet array is embedded in motion platform
Lower surface, below the permanent magnet array on corresponding position by the installation of air core coil winding on the base；The linear motor driving
Device is three groups, and three groups of linear motor drivers are in the horizontal direction at triangular arranged；Two groups of triangle base
The sum of area of permanent magnet array and the permanent magnet array area equation on vertex position；
The mounting plate edge is equipped with current vortex sensor.
2. maglev type precisely locating platform according to claim 1, which is characterized in that two groups of permanent magnetism battle arrays of triangle base
Column arrange that two groups of permanent magnet arrays of permanent magnet array arrangement mode and bottom edge on vertex position are mutual according to identical arrangement mode
Vertically.
3. maglev type precisely locating platform according to claim 1, which is characterized in that the current vortex sensor is three
It is a, it is separately positioned on three angles of mounting plate.
4. maglev type precisely locating platform according to claim 1, which is characterized in that the electromagnet uses soft magnetic materials
U-shaped electromagnet, Open Side Down is installed in the rectangular channel of mounting plate for the U-shaped electromagnet.
5. maglev type precisely locating platform according to claim 1, which is characterized in that the mounting plate center is one reserved
Round hole.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510994384.8A CN105387310B (en) | 2015-12-28 | 2015-12-28 | A kind of maglev type precisely locating platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510994384.8A CN105387310B (en) | 2015-12-28 | 2015-12-28 | A kind of maglev type precisely locating platform |
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| CN105387310A CN105387310A (en) | 2016-03-09 |
| CN105387310B true CN105387310B (en) | 2018-12-28 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106564566B (en) * | 2016-11-09 | 2019-02-05 | 沪东中华造船(集团)有限公司 | A kind of auxiliary mould of precision measure |
| CN106683710B (en) * | 2017-03-20 | 2023-01-10 | 歌尔股份有限公司 | Three-degree-of-freedom motion platform |
| CN107332477B (en) * | 2017-07-24 | 2018-11-23 | 中国科学院空间应用工程与技术中心 | Six degree of freedom electromagnetic actuator device and electromagnetic suspension control method |
| DE102020123634A1 (en) | 2020-09-10 | 2022-03-10 | Physik Instrumente (PI) GmbH & Co KG | Magnetic storage device and positioning system |
| CN113175871B (en) * | 2021-04-29 | 2022-10-04 | 南京理工大学 | A positioning platform device |
| CN117253844B (en) * | 2023-11-20 | 2024-03-08 | 季华实验室 | Six-degree-of-freedom arc-shaped magnetic levitation micro-motion stage and device transfer device |
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| US6750625B2 (en) * | 2001-08-15 | 2004-06-15 | Nikon Corporation | Wafer stage with magnetic bearings |
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| CN1760760A (en) * | 2004-10-14 | 2006-04-19 | 中国科学院电工研究所 | Extreme ultraviolet lithography precision magnetic levitation workpiece table |
| CN101087114A (en) * | 2007-04-24 | 2007-12-12 | 何培祥 | Permanent magnet suspending plane electromotor |
| CN101834550A (en) * | 2010-04-27 | 2010-09-15 | 西安交通大学 | Positioning device based on magnetic levitation planar motor |
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