CN105369214A - Optical-level diamond-like film interval type cylinder coating device and method - Google Patents
Optical-level diamond-like film interval type cylinder coating device and method Download PDFInfo
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- CN105369214A CN105369214A CN201410537786.0A CN201410537786A CN105369214A CN 105369214 A CN105369214 A CN 105369214A CN 201410537786 A CN201410537786 A CN 201410537786A CN 105369214 A CN105369214 A CN 105369214A
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Abstract
The invention discloses an optical-level diamond-like film interval type cylinder coating device and method. The coating device comprises a vacuumizing outer cylinder and a roller arranged in the outer cylinder. The outer cylinder and the roller are coaxially arranged. The roller can evenly rotate around the axis. Coating cavities are formed in the internal space of the outer cylinder and inflated with process gas. The coating cavities are composite coating cavities capable of achieving PVD magnetron sputtering and CVD vapor deposition at the same time. At least two magnetic control targets are annularly and evenly distributed on the inner wall of the outer cylinder and around the center of the outer cylinder. A plurality of base materials to be coated are annularly and evenly distributed on the outer wall of the roller and around the center of the roller. A closed magnetic field surrounding or locally surrounding the roller is formed by the at least two magnetic control targets in the outer cylinder. The optical-level diamond-like film interval type cylinder coating device is simple and flexible in structure, low in cost and suitable for large-scale production.
Description
Technical field
The present invention relates to coating technique field, particularly relate to a kind of optical grade class diamond film intermittent type cylinder film coating apparatus and film coating method.
Background technology
Aisenberg and Chabot of Germany in 1971 adopts carbon ion beam to prepare the amorphous carbon film with diamond feature first, because prepared film has the performance similar to diamond, Aisenberg was referred to as diamond-like diamond film (DLC film) it first in 1973.Diamond-like diamond film has the character about the same with diamond, as high rigidity, wear-resistant, high surface finish, high resistivity, excellent field emission performance, high transmission rate and unreactiveness etc., its product is widely used in the every field such as machinery, electronics, microelectromechanical systems (MEMS), optics and biomedicine.The depositing temperature of diamond-like diamond film is low, surface smoothing, has the cost performance higher than diamond film and can replace Buddha's warrior attendant diamond film in field quite widely, so be the focus of research since the eighties always.The low-friction coefficient of diamond-like diamond film (DLC film) and high-wearing feature make diamond-like diamond film be widely used in fields such as cutting tool, magnetic storage, joint prosthesises.
Diamond-like diamond film (DLC) can be prepared by deposition techniques such as plasma auxiliary chemical vapor deposition (PACVD), plasma enhanced chemical vapor deposition (PECVD), pulse Vacuum arc plasma depositions.In these methods, it is low that plasma enhanced chemical vapor deposition (PECVD) method has depositing temperature, good around plating property, various features such as the film even compact of preparation and become one of the most frequently used method.But when adopting PECVD device to be coated with diamond-like diamond film (DLC), this kind equipment with high costs, volume production ability is low, not easily realizes low cost, scale operation, is only limitted to small serial production or laboratory stage.
Such as, Chinese patent literature CN100337881C open a kind of " being coated with the plastic containers of DLC film and producing apparatus thereof and making method ", wherein, producing apparatus comprises a source air supplying device, it has a vessel side electrode, this vessel side electrode defines one for accommodating a part for the decompression chamber of the plastic containers with neck, the comparative electrode of described vessel side electrode is corresponded to one, this comparative electrode is arranged on inside or the overthe openings of described plastic containers, described vessel side electrode and comparative electrode via an isolator mutually faced by, this isolator also form a part for described decompression chamber, article one, source gas enters conduit, a gas barrier, and a high frequency electric source feedway, described vessel side electrode is made so that when described container is accommodated, the average hole internal diameter being looped around the inwall around container neck is less than the average hole internal diameter of the inwall be looped around around container body portion, and described neck be in one relative to the horizontal transverse section of container vertical direction in mean distance between container outer wall and vessel side electrode inner wall be made into be greater than described body part be in one relative to the horizontal transverse section of container vertical direction in mean distance between container outer wall and vessel side electrode inner wall.This producing apparatus, when being coated with DLC film to product, can only single-piece be coated with, and can not realize producing in enormous quantities, and production efficiency is low, and manufacturing cost is high.
Summary of the invention
The object of the present invention is to provide a kind of optical grade class diamond film intermittent type cylinder film coating apparatus and film coating method, to solve the problems of the technologies described above.
For reaching this object, the present invention by the following technical solutions:
A kind of optical grade class diamond film intermittent type cylinder film coating apparatus is provided, the urceolus comprising vacuum-pumping and the roller be arranged in described urceolus, coaxial and the interval of described urceolus and described roller is arranged, described roller can around the even rotation of axis, space between described urceolus and described roller forms plated film chamber, passed into process gas in described plated film chamber, described plated film chamber is the composite film coating chamber that simultaneously can realize PVD magnetron sputtering and CVD vapour deposition;
At least two magnetic controlling targets are evenly equipped with on the inwall of described urceolus and around the center annular of described urceolus, on the outer wall of described roller and around the center annular of described roller, be evenly equipped with some base materials to be coated, at least three described magnetic controlling targets formed in described urceolus one around or local around the closed magnetic field of described roller.
By PVD and CVD plated film mode connected applications is coated with in DLC film, base material to be coated is arranged on the outer wall of rotation roller simultaneously, magnetic controlling target is arranged on the inwall of urceolus, and the magnetic controlling target formation closed magnetic field that annular is uniform, large-arealy can treat coating material surface and be coated with DLC film, compared with PECVD monomer filming equipment, laser and ion beam deposition equipment, its cost performance is given prominence to and low production cost, volume production ability is far away higher than the volume production ability of the equipment such as PECVD, improve production efficiency, reduce production cost.
Preferably, the inwall of described urceolus is evenly equipped with four described magnetic controlling targets around its center annular.
Further, described magnetic controlling target is detachably arranged on the inwall of described urceolus.
Preferably, the outer wall of described roller is evenly equipped with 18 described base materials to be coated around its center annular.
Further, described base material to be coated is detachably arranged on described roller.
Further, the outer wall of described roller is arranged with the storing groove for holding described base material to be coated towards its center, described storing groove is provided with the locking piece preventing base material to be coated from departing from it.
The film coating apparatus of this programme is mainly used in the plated film on the surfaces such as optics, flat-panel monitor, protective glass and touch-screen product; by its plated film chamber is set to the composite film coating chamber that can realize PVD magnetron sputtering and CVD vapour deposition simultaneously; and coordinate the roller of constant revolution, large-area plated film can be realized and produce.
As a kind of preferred version of optical grade class diamond film intermittent type cylinder film coating apparatus, described magnetic controlling target is silicon target or graphite sputtering target, and described process gas is Ar and C-H hydrocarbon gas.
By magnetic controlling target is selected silicon target, treat coating material surface to adopt HIGH-PURITY SILICON target magnetic control sputtering+CVD technique in DLC coating chamber and be coated with the hydrogeneous diamond-like diamond film (DLC film) of silicon doping.
By sputtering target is selected graphite sputtering target, treat coating material surface to adopt high purity graphite target magnetic control sputtering+CVD technique in DLC coating chamber and be coated with hydrogeneous diamond-like diamond film (DLC film).
As a kind of preferred version of optical grade class diamond film intermittent type cylinder film coating apparatus, described magnetic controlling target is unbalanced magnetic field magnetic controlling target.
Preferably, described magnetic controlling target is planar target.
Be more preferably, described magnetic controlling target is arc target, and the radian of the inwall of the radian of described magnetic controlling target and described urceolus matches.
Be more preferably, described magnetic controlling target is cylinder rotary target.
As a kind of preferred version of optical grade class diamond film intermittent type cylinder film coating apparatus, the time of described roller rotation is 1 ~ 100 rev/min.
Preferably, the time of described roller rotation is 30 revs/min.
By being 30 revs/min by the set of time of roller rotation, the ratio that the coating film thickness of the base material to be coated on roller outer wall and time reach optimum can being made, namely within the shortest time, be reasonably coated with rete.
As a kind of preferred version of optical grade class diamond film intermittent type cylinder film coating apparatus, the working temperature of described plated film chamber is 20 DEG C ~ 150 DEG C.
Preferably, the working temperature of described plated film chamber is 25 DEG C.
Plated film chamber can be coated with rete under the environment of 20 DEG C ~ 150 DEG C, the material of base material to be coated is selected more extensive, is applicable to glass, PMMA acrylic, PC composition board, PET etc.
As a kind of preferred version of optical grade class diamond film intermittent type cylinder film coating apparatus, be positioned on described axis turning axle is set in described roller, described roller is connected with described turning axle by coupling device, and the outside that one end of described turning axle extends to described roller is connected with power set.
Preferably, described power set is motor.
As a kind of preferred version of optical grade class diamond film intermittent type cylinder film coating apparatus, described magnetic controlling target is fixed on the inwall of described urceolus by isolator, described roller is connected with bias voltage, described isolator one end is connected with described magnetic controlling target, the other end passes described urceolus and extends to outside described plated film chamber, the inwall of described urceolus is arranged the anode cap of magnetic controlling target described in cover cap and described isolator, on described anode cap, corresponding described magnetic controlling target offers wad cutter, in described isolator and the side being positioned at described magnetic controlling target arranges magnet, described magnet arranges negative electrode away from the side of described magnetic controlling target, described cathodic electricity is connected with electrode.
As a kind of preferred version of optical grade class diamond film intermittent type cylinder film coating apparatus, outside described urceolus, water-cooled tube is set, the water side of described water-cooled tube to extend in described isolator and is positioned at the side of described magnetic controlling target, for cooling described magnetic controlling target.
As a kind of preferred version of optical grade class diamond film intermittent type cylinder film coating apparatus, arrange vacuum extractor outside described urceolus, described vacuum extractor extends in described plated film chamber, for vacuumizing process to described plated film chamber through described urceolus.
Preferably, described vacuum means is set to vacuum pump.
Further, described urceolus is arranged for the vacuum hole of extracting vacuum and the process gas body opening for passing into described process gas.
Further, described vacuum pump is arranged on described vacuum hole place.
Further, described urceolus arranges viewing window.
Preferably, the power supply that described plated film chamber uses is RF power supply, any one in high-frequency pulse direct supply, magnetron sputtering power supply.Certainly, those skilled in the art can know that other operable power supply is applicable to the present invention too.
One kind diamond film film coating method, adopts optical grade class diamond film intermittent type cylinder film coating apparatus as above, it is characterized in that, comprise the following steps:
Step S100, some base materials to be coated are evenly fixed on the outer wall of roller;
Step S200, some magnetic controlling targets are evenly fixed on the inwall of urceolus;
Step S300, process is vacuumized to the plated film chamber arranged between described urceolus and described roller;
Step S400, pass into corresponding process gas to described plated film chamber;
Step S500, be energized to described magnetic controlling target, high frequency, radio frequency or pulsed dc magnetron shielding power supply, rotating said rolls cylinder, carries out plated film to the base material to be coated on described roller simultaneously.
Beneficial effect of the present invention: the present invention has the following advantages relative to prior art:
1, the present invention in scale volume production and low manufacturing cost with existing magnetron sputtering single devices, PECVD monomer filming equipment, laser and ion beam deposition equipment are compared cost performance and are given prominence to and low production cost, volume production ability can reach many times of the equipment amount production capacity power such as PECVD or more, and production capacity can reach monthly output 200K (5 cun of screens) or more;
2, the effective plated film district of big area, can reach more than 1000mm;
3, use cheap graphite target, silicon target and hydro carbons process gas, make lower cost for material, wide material sources;
4, film coating apparatus of the present invention can carry out plated film at normal temperature, makes film coating apparatus be applicable to the base material to be coated of more material types.
Accompanying drawing explanation
According to drawings and embodiments the present invention is described in further detail below.
Fig. 1 is the structural representation sketch of the optical grade class diamond film intermittent type cylinder film coating apparatus described in embodiments of the invention;
Fig. 2 is the Principle of plating figure (not shown roller) of the optical grade class diamond film intermittent type cylinder film coating apparatus described in embodiments of the invention.
In Fig. 1 and 2:
1, urceolus; 2, roller; 3, plated film chamber; 4, magnetic controlling target; 5, base material to be coated; 6, magnetic field; 7, isolator; 8, bias voltage; 9, anode cap; 10, wad cutter; 11, magnet; 12, negative electrode; 13, electrode; 14, water-cooled tube; 15, vacuum hole; 16, process gas body opening; 17, viewing window.
Embodiment
Technical scheme of the present invention is further illustrated by embodiment below in conjunction with accompanying drawing.
As illustrated in fig. 1 and 2, the optical grade class diamond film intermittent type cylinder film coating apparatus of the embodiment of the present invention, the roller 2 comprising urceolus 1 and be arranged in urceolus 1, coaxial and the interval of urceolus 1 and roller 2 is arranged, space between urceolus 1 and roller 2 forms the plated film chamber 3 of vacuum-pumping, roller 2 can around its axis rotation in urceolus 1, the speed of rotation is at 1 ~ 100 rev/min, plated film chamber 3 is the composite film coating chamber that simultaneously can realize PVD magnetron sputtering and CVD vapour deposition, has passed into process gas in plated film chamber 3.
Four magnetic controlling targets 4 are evenly equipped with on the inwall of urceolus 1 and around the center annular of urceolus 1, on the outer wall of roller 2 and around the center annular of roller 2, be evenly equipped with 18 base materials to be coated, 5, four magnetic controlling targets 4 in urceolus 1, form the closed magnetic field 6 around roller 2.
Wherein, base material 5 to be coated is detachably arranged on the outer wall of roller 2, in the present embodiment, the outer wall of roller 2 being arranged with the storing groove for holding base material 5 to be coated towards its center, storing groove being provided with and preventing base material 5 to be coated from departing from its locking piece.
Magnetic controlling target 4 is detachably arranged on the inwall of urceolus 1, and in the present embodiment, magnetic controlling target 4 is bolted on the inwall of urceolus 1.
Magnetic controlling target 4 is silicon target or graphite sputtering target, and in the present embodiment, magnetic controlling target 4 is graphite sputtering target, and the process gas passed into is Ar and C-H hydrocarbon gas.
Magnetic controlling target 4 is planar target, and magnetic controlling target 4 is not limited to planar target, can also be arc target, and when magnetic controlling target 4 is arc target, the radian of the radian of magnetic controlling target 4 and the inwall of urceolus 1 matches, or cylinder rotary target.
Be positioned on axis and arrange turning axle in roller 2, roller 2 is connected with turning axle by coupling device, and the outside that one end of turning axle extends to roller 2 is connected with power set, and in the present embodiment, power set is motor.
As shown in Figure 2, magnetic controlling target 4 is fixed on the inwall of urceolus 1 by isolator 7, roller 2 is connected with bias voltage 8, isolator 7 one end is connected with magnetic controlling target 4, the other end passes urceolus 1 and extends to outside plated film chamber 3, the inwall of urceolus 1 is arranged the anode cap 9 of cover cap magnetic controlling target 4 and isolator 7, on anode cap 9, corresponding magnetic controlling target 4 offers wad cutter 10, in isolator 7 and the side being positioned at magnetic controlling target 4 arranges magnet 11, magnet 11 arranges negative electrode 12 away from the side of magnetic controlling target 4, and negative electrode 12 is electrically connected with electrode 13.
Arrange water-cooled tube 14 outside urceolus 1, the water side of water-cooled tube 14 to extend in isolator 7 and is positioned at the side of magnetic controlling target 4, for cooling magnetic controlling target 4.
Urceolus 1 is arranged the vacuum hole 15 for vacuumizing and the process gas body opening 16 for passing into process gas, at vacuum hole 15, place arranges vacuum extractor, vacuum extractor extends in plated film chamber 3 by process gas body opening 16, for vacuumizing process to plated film chamber 3, in the present embodiment, vacuum means is set to vacuum pump.
For the ease of observing the plated film state in plated film chamber 3, urceolus 1 arranges viewing window 17.
The power supply that plated film chamber 3 uses is RF power supply, any one in high-frequency pulse direct supply, magnetron sputtering power supply.In the present embodiment, the power supply that plated film chamber 3 uses is high-frequency pulse direct supply.
Concrete coating process is as follows:
1,18 pieces of base material 5 annulars to be coated are fixed on the outer wall of roller 2 uniformly, then four pieces of graphite sputtering target annulars are fixed on the inwall of urceolus 1 uniformly;
2, process is vacuumized to plated film chamber 3;
3, Ar, hydrocarbon alkane is passed into, the fluorinated gas such as doping process gas-C2F6, CF4, CHF3, and the silicon-containing gas such as SiH4, TMS;
4, starter motor, make roller 2 around the even rotation in its center, rotational velocity is 30 revs/min;
5, graphite sputtering target and roller 2 are energized, and the base material to be coated on pair roller barrel 2 carries out plated film.
This film coating apparatus is by changing target magnetic controlling target and process gas, also can sputter and be coated with low temperature ito thin film, Si3N4, SiO2, SiON, double-layer reflection reducing coating system, anti-fingerprint film, decorating films etc., its closed magnetic field magnetron sputtering plating production capacity and film quality evaporate optical coating system far above the cylinder intermittent type of a large amount of use at present.
This film coating apparatus can realize low cost, scale of mass production water white transparency optics Buddha's warrior attendant diamond optical protection layer product, adopt the magnetron sputtering technique equipment of PVD+CVD mixing, online intermittent type large-area coating film is produced.
It is to be understood that; above-mentioned embodiment is only preferred embodiment of the present invention and institute's application technology principle; in technical scope disclosed in this invention, the change that any those skilled in the art of being familiar with easily expect or replacement, all should be encompassed in protection scope of the present invention.
Claims (10)
1. an optical grade class diamond film intermittent type cylinder film coating apparatus, it is characterized in that, the urceolus comprising vacuum-pumping and the roller be arranged in described urceolus, described urceolus and described roller are coaxially arranged, described roller can around the even rotation of axis, the internal space of described urceolus forms plated film chamber, and passed into process gas in described plated film chamber, described plated film chamber is the composite film coating chamber that simultaneously can realize PVD magnetron sputtering and CVD vapour deposition;
At least two magnetic controlling targets are evenly equipped with on the inwall of described urceolus and around the center annular of described urceolus, on the outer wall of described roller and around the center annular of described roller, be evenly equipped with some base materials to be coated, at least two described magnetic controlling targets formed in described urceolus one around or local around the closed magnetic field of described roller.
2. optical grade class diamond film intermittent type cylinder film coating apparatus according to claim 1, it is characterized in that, described magnetic controlling target is silicon target or graphite sputtering target, and described process gas is Ar and C-H hydrocarbon gas.
3. optical grade class diamond film intermittent type cylinder film coating apparatus according to claim 2, it is characterized in that, described magnetic controlling target is unbalanced magnetic field magnetic controlling target.
4. optical grade class diamond film intermittent type cylinder film coating apparatus according to claim 1, it is characterized in that, the time of described roller rotation is 1 ~ 100 rev/min.
5. optical grade class diamond film intermittent type cylinder film coating apparatus according to claim 1, it is characterized in that, the working temperature of described plated film chamber is 20 DEG C ~ 150 DEG C.
6. optical grade class diamond film intermittent type cylinder film coating apparatus according to claim 1, it is characterized in that, be positioned on described axis turning axle is set in described roller, described roller is connected with described turning axle by coupling device, and the outside that one end of described turning axle extends to described roller is connected with power set.
7. optical grade class diamond film intermittent type cylinder film coating apparatus according to claim 1, it is characterized in that, described magnetic controlling target is fixed on the inwall of described urceolus by isolator, described roller is connected with bias voltage, described isolator one end is connected with described magnetic controlling target, the other end passes described urceolus and extends to outside described urceolus, the inwall of described urceolus is arranged the anode cap of magnetic controlling target described in cover cap and described isolator, on described anode cap, corresponding described magnetic controlling target offers wad cutter, in described isolator and the side being positioned at described magnetic controlling target arranges magnet, described magnet arranges negative electrode away from the side of described magnetic controlling target, described cathodic electricity is connected with electrode.
8. optical grade class diamond film intermittent type cylinder film coating apparatus according to claim 7, it is characterized in that, arrange water-cooled tube outside described urceolus, the water side of described water-cooled tube to extend in described isolator and is positioned at the side of described magnetic controlling target, for cooling described magnetic controlling target.
9. optical grade class diamond film intermittent type cylinder film coating apparatus according to claim 1, it is characterized in that, arrange vacuum extractor outside described urceolus, described vacuum extractor extends in described plated film chamber, for vacuumizing process to described plated film chamber through described urceolus.
10. a kind diamond film film coating method, adopts the optical grade class diamond film intermittent type cylinder film coating apparatus described in any one of claim 1 to 9, it is characterized in that, comprise the following steps:
Step S100, some base materials to be coated are evenly fixed on the outer wall of roller;
Step S200, some magnetic controlling targets are evenly fixed on the inwall of urceolus;
Step S300, process is vacuumized to the plated film chamber arranged between described urceolus and described roller;
Step S400, pass into corresponding process gas to described plated film chamber;
Step S500, be energized to described magnetic controlling target, high frequency, radio frequency or pulsed dc magnetron shielding power supply, rotating said rolls cylinder, carries out plated film to the base material to be coated on described roller simultaneously.
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| CN201410537786.0A CN105369214A (en) | 2014-10-13 | 2014-10-13 | Optical-level diamond-like film interval type cylinder coating device and method |
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| CN201410537786.0A CN105369214A (en) | 2014-10-13 | 2014-10-13 | Optical-level diamond-like film interval type cylinder coating device and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110697465A (en) * | 2018-09-28 | 2020-01-17 | 苏州灵亿易电子科技有限公司 | Film coarsening film roll integrated machine with carbon filtering treatment function |
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| CN102108488A (en) * | 2009-12-29 | 2011-06-29 | 鸿富锦精密工业（深圳）有限公司 | Film coating device |
| CN103498128A (en) * | 2012-04-29 | 2014-01-08 | 江苏中能硅业科技发展有限公司 | Magnetron sputtering coating device and coating method |
| CN203222616U (en) * | 2013-04-12 | 2013-10-02 | 昆山艾诺美航天材料有限公司 | High-curvature arced cathode magnetron sputtering target |
| CN103981496A (en) * | 2014-02-10 | 2014-08-13 | 常州大学 | Apparatus and method for preparing TiAlCrN multi-element coating |
| CN203834012U (en) * | 2014-04-03 | 2014-09-17 | 蒋绍洪 | Continuous type diamond like carbon film coating device |
| CN204097560U (en) * | 2014-10-13 | 2015-01-14 | 蒋绍洪 | Optical grade class diamond film intermittent type cylinder film coating apparatus |
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