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CN105353514B - Reduce method, the method and apparatus of laser microprobe dating of laser beam cross-section product - Google Patents

Reduce method, the method and apparatus of laser microprobe dating of laser beam cross-section product Download PDF

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CN105353514B
CN105353514B CN201510783316.7A CN201510783316A CN105353514B CN 105353514 B CN105353514 B CN 105353514B CN 201510783316 A CN201510783316 A CN 201510783316A CN 105353514 B CN105353514 B CN 105353514B
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易定容
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Maike Aodi Industry Group Co Ltd
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Abstract

本发明提供了一种减小激光束横截面积的方法,在激光发射器与被照物体之间的光路中设置空间光调制器;所述激光发射器发出的入射激光束在空间光调制器上产生主光斑和副光斑;所述主光斑覆盖到空间光调制器的N个相邻的微单元上,只打开以主光斑圆心为中心n个微单元(n=1,2,…,N),其它N‑n个微单元为关闭状态,则出射激光束的横截面积d=D*(n/N),其中D为主光斑的横截面积。本发明还提供了一种激光显微切割的方法和装置。上述的一种减小激光束横截面积的方法,通过人为操作和控制,使激光束的横截面积在一定范围内缩小。上述的一种激光显微切割的方法和装置,能够实现切割线宽度小到微米甚至亚微米的激光切割。

The invention provides a method for reducing the cross-sectional area of the laser beam. A spatial light modulator is arranged in the optical path between the laser emitter and the object to be illuminated; the incident laser beam emitted by the laser emitter The main light spot and the auxiliary light spot are generated; the main light spot covers N adjacent micro-units of the spatial light modulator, and only n micro-units centered on the center of the main light spot are opened (n=1,2,...,N ), and the other N-n micro-units are in the off state, then the cross-sectional area of the outgoing laser beam d=D*(n/N), where D is the cross-sectional area of the main spot. The invention also provides a laser microdissection method and device. The above-mentioned method for reducing the cross-sectional area of the laser beam reduces the cross-sectional area of the laser beam within a certain range through manual operation and control. The above-mentioned laser microdissection method and device can realize laser cutting with a cutting line width as small as micron or even submicron.

Description

减小激光束横截面积的方法、激光显微切割的方法和装置Method for reducing cross-sectional area of laser beam, method and device for laser microdissection

技术领域technical field

本发明涉及激光切割领域,尤其涉及激光显微切割。The invention relates to the field of laser cutting, in particular to laser micro-cutting.

背景技术Background technique

在生命科学研究中,需要对组织中某一特定的细胞(群)进行基因和蛋白质研究。激光显微细胞切割系统就是为满足这样的需要而发展起来的一种高端设备,可以从多样性的组织中分离出来某一特定的或有某一特点的细胞(群),从而避免实验标本被其他细胞、细菌、或其它杂质所污染,使基因和蛋白的分析更加准确,特异性更高。In life science research, it is necessary to conduct gene and protein research on a specific cell (group) in a tissue. The laser micro-cell dissection system is a high-end equipment developed to meet such needs. It can separate a specific or characteristic cell (group) from a variety of tissues, thereby preventing the experimental specimen from being Contamination by other cells, bacteria, or other impurities makes the analysis of genes and proteins more accurate and specific.

在激光显微细胞切割技术中,有时需要对单个细胞进行切割:首先在显微镜下观察判断确定需要挑选出来的细胞;其次根据细胞形状确定细胞切割线之后;之后发射激光束,在发射激光束的同时驱动载物台使其带动带有细胞样品的载玻片运动产生闭合切割线轨迹。这样激光就沿着细胞周边的切割线产生一个闭合切割轨迹,使得该细胞与周围背景的其它细胞分离。之后可以通过收集系统如重力或者静电吸附等方式将该细胞挑选分离出来,从而获得纯种的没有杂质的细胞。In the laser microscopic cell dissection technology, it is sometimes necessary to cut a single cell: first, observe and judge under a microscope to determine the cells that need to be selected; secondly, determine the cell cutting line according to the cell shape; Simultaneously, the stage is driven to move the glass slide with the cell sample to generate a closed cutting line track. In this way, the laser produces a closed cutting trajectory along the cutting line around the cell, so that the cell is separated from other cells in the surrounding background. Afterwards, the cells can be separated by collection systems such as gravity or electrostatic adsorption, so as to obtain pure cells without impurities.

细胞的尺度在几个微米到10多个微米之间,非常微小,有时候需要切割分离用户所挑选的(包含在细胞里面的)一段基因,基因的尺寸更小了。因此需要切割细胞的“刀子”:激光束的光斑横截面积非常小,在亚微米或者微米量级,尤其是需要分离切割用户所挑选的细胞所含有的基因片段的时候。一般的激光束光斑横截面近似为园或者椭圆,沿着一个方向的尺度为100微米甚至毫米量级。因此如何实现横截面的长度为微米甚至亚微米的激光束是一个难题。The size of the cell is between a few microns to more than 10 microns, which is very small. Sometimes it is necessary to cut and separate a segment of gene selected by the user (included in the cell), and the size of the gene is even smaller. Therefore, a "knife" for cutting cells is needed: the cross-sectional area of the laser beam is very small, on the order of submicron or micron, especially when it is necessary to separate and cut the gene fragments contained in the cells selected by the user. The cross-section of a general laser beam spot is approximately a circle or an ellipse, and the scale along one direction is on the order of 100 microns or even millimeters. Therefore, how to realize the laser beam whose cross-section length is micron or even submicron is a difficult problem.

发明内容Contents of the invention

本发明所要解决的主要技术问题是提供一种减小激光束横截面积的方法,通过人为操作和控制,使激光束的横截面积在一定范围内缩小。The main technical problem to be solved by the present invention is to provide a method for reducing the cross-sectional area of the laser beam. Through manual operation and control, the cross-sectional area of the laser beam can be reduced within a certain range.

本发明所要解决的另一主要技术问题是提供一种激光显微切割的方法和装置,能够实现微米甚至亚微米直径的激光切割。Another main technical problem to be solved by the present invention is to provide a method and device for laser microdissection, which can realize laser cutting with micron or even submicron diameter.

为了解决上述的技术问题,本发明提供了一种减小激光束横截面积的方法,在激光发射器与被照物体之间的光路中设置空间光调制器;所述激光发射器发出的入射激光束在空间光调制器上产生主光斑和副光斑;In order to solve the above-mentioned technical problems, the present invention provides a method for reducing the cross-sectional area of the laser beam. A spatial light modulator is arranged in the optical path between the laser emitter and the object to be illuminated; the incident light emitted by the laser emitter The laser beam produces a main spot and a side spot on the spatial light modulator;

所述主光斑覆盖到空间光调制器的N个相邻微单元上,只打开以主光斑圆心为中心n个微单元(n=1,2,…,N),其它N-n个微单元为关闭状态,则出射激光束的横截面积d=D*(n/N),其中D为主光斑的横截面积。The main light spot covers N adjacent micro-units of the spatial light modulator, only n micro-units (n=1, 2,...,N) centered on the center of the main light spot are turned on, and the other N-n micro-units are turned off State, then the cross-sectional area of the outgoing laser beam d=D*(n/N), where D is the cross-sectional area of the main spot.

在一较佳实施例中:所述副光斑覆盖到的空间光调制器的微单元为关闭状态。In a preferred embodiment: the micro-unit of the spatial light modulator covered by the auxiliary light spot is in an off state.

本发明还提供了一种激光显微切割的方法,在激光发射器与物镜的光路中设置空间光调制器;所述激光发射器发出的入射激光束在空间光调制器上产生主光斑和副光斑;The present invention also provides a method for laser microdissection, in which a spatial light modulator is arranged in the optical path between the laser emitter and the objective lens; the incident laser beam emitted by the laser emitter produces a main light spot and a secondary spot;

所述主光斑覆盖到空间光调制器的N个相邻微单元上,只打开以主光斑圆心为中心n个微单元(n=1,2,…,N),其它N-n个微单元为关闭状态,则经过物镜后的出射激光束的横截面积d=D*n/(N*M),其中D为主光斑的横截面积、M为物镜的放大倍数。The main light spot covers N adjacent micro-units of the spatial light modulator, only n micro-units (n=1, 2,...,N) centered on the center of the main light spot are turned on, and the other N-n micro-units are turned off State, then the cross-sectional area of the outgoing laser beam after passing through the objective lens d=D*n/(N*M), where D is the cross-sectional area of the main spot, and M is the magnification of the objective lens.

在一较佳实施例中:所述副光斑覆盖到的空间光调制器的微单元为关闭状态。In a preferred embodiment: the micro-unit of the spatial light modulator covered by the auxiliary light spot is in an off state.

本发明还提供了一种激光显微切割的装置,包括显微镜、显微镜照明系统、数字成像系统和激光发射器;还包括激光束光路整形系统,其包括一设置于激光发射器与显微镜物镜光路中的空间光调制器;所述激光发射器发出的入射激光束在空间光调制器上产生主光斑和副光斑;The present invention also provides a laser microdissection device, including a microscope, a microscope illumination system, a digital imaging system, and a laser emitter; A spatial light modulator; the incident laser beam emitted by the laser emitter produces a main spot and a secondary spot on the spatial light modulator;

所述主光斑覆盖到空间光调制器的N个相邻微单元上,只打开以主光斑圆心为中心n个微单元(n=1,2,…,N),其它N-n个微单元为关闭状态,则经过物镜后的出射激光束的横截面积d=D*n/(N*M),其中D为主光斑的横截面积、M为物镜的放大倍数。The main light spot covers N adjacent micro-units of the spatial light modulator, only n micro-units (n=1, 2,...,N) centered on the center of the main light spot are turned on, and the other N-n micro-units are turned off State, then the cross-sectional area of the outgoing laser beam after passing through the objective lens d=D*n/(N*M), where D is the cross-sectional area of the main spot, and M is the magnification of the objective lens.

在一较佳实施例中:所述副光斑覆盖到的空间光调制器的微单元为关闭状态。In a preferred embodiment: the micro-unit of the spatial light modulator covered by the auxiliary light spot is in an off state.

在一较佳实施例中:所述激光束光路整形系统还包括一二向色镜,将切割激光反射至物镜、将成像物镜透射至数字成像系统。In a preferred embodiment: the laser beam optical path shaping system further includes a dichroic mirror, which reflects the cutting laser to the objective lens, and transmits the imaging objective lens to the digital imaging system.

在一较佳实施例中:所述显微镜为正置显微镜或倒置显微镜In a preferred embodiment: the microscope is an upright microscope or an inverted microscope

附图说明Description of drawings

图1为本发明优选实施例1的光路图;。Fig. 1 is the optical path diagram of preferred embodiment 1 of the present invention;

图2为本发明优选实施例2的光路示意图;Fig. 2 is the optical path schematic diagram of preferred embodiment 2 of the present invention;

图3为本发明优选实施例3的光路示意图;Fig. 3 is the optical path schematic diagram of preferred embodiment 3 of the present invention;

图4为本发明优选实施例4的光路示意图。Fig. 4 is a schematic diagram of the optical path of the preferred embodiment 4 of the present invention.

具体实施方式Detailed ways

本发明实现横截面积的长度为亚微米或者微米大小激光束的方法是使用空间光调制器。空间光调制器主要有透射式及反射式两类,其主要特点是具有带有空间分布的“光开关”。主要功能是能够有选择地让照射在空间光调制器部分位置的光信号反射(或者透射)过去,而其它部分位置的光信号不能反射(或者透射过去)。The method of the present invention to realize the laser beam whose cross-sectional area is submicron or micron in length is to use a spatial light modulator. There are mainly two types of spatial light modulators: transmissive and reflective, and their main feature is the "optical switch" with spatial distribution. The main function is to selectively reflect (or transmit) the optical signals irradiated at some positions of the spatial light modulator, while the optical signals at other positions cannot be reflected (or transmitted).

以DMD作为空间光调制器的介绍:DMD为TI公司的Larry Hornbeck博士于1987年所发明的,采用MEMS(微机电系统)的工艺将微反射镜阵列和CMOS SRAM集成在同一块芯片上,是一种新型、全数字化的空间光调制器。DMD是由几百万个微单元单元组成,一个含1024X768个微单元DMD对角线长度仅0.7英寸,厚度约5毫米(如图1所示)。每个微单元单元主要由微单元、铰链和CMOS基底构成,其中每个微单元通过一个轭板和一个扭转铰链连接,可以以铰链为轴在-12°和+12°这两个角度间转动,其转动方向由轭板两边的可控电极电压决定,每个微单元的电极都有一个存储单元SRAM,位于可控电极的平台之下,当SRAM存储“1”时,微单元偏转+12°,当存储“0”时,偏转-12°。在设计DMD的光学系统时,一般使微单元的某个反射方向的光线进入光学系统,表示“开”(假设为+12°方向,以下类同),另一个反射方向的光线不会进入光学系统,表示“关”。因而可以简单的把DMD看作是一个光开关阵列,根据需要在相应的SRAM单元中存入“1”或“0”,就可以控制相应微单元的开关,以产生任意的图案。Introduction to using DMD as a spatial light modulator: DMD was invented by Dr. Larry Hornbeck of TI in 1987. It uses MEMS (micro-electromechanical systems) technology to integrate micromirror arrays and CMOS SRAM on the same chip. A new, all-digital spatial light modulator. DMD is composed of millions of micro-units. A DMD with 1024X768 micro-units has a diagonal length of only 0.7 inches and a thickness of about 5 mm (as shown in Figure 1). Each microunit unit is mainly composed of microunits, hinges and CMOS substrates, in which each microunit is connected by a yoke plate and a torsional hinge, which can rotate between two angles of -12° and +12° with the hinge as the axis , and its rotation direction is determined by the voltage of the controllable electrodes on both sides of the yoke plate. The electrode of each microcell has a storage unit SRAM, which is located under the platform of the controllable electrode. When the SRAM stores "1", the microcell deflects +12 °, when "0" is stored, the deflection is -12°. When designing the optical system of DMD, generally the light of a certain reflection direction of the micro-unit enters the optical system, which means "open" (assuming it is +12° direction, the following is similar), and the light of another reflection direction will not enter the optical system System, means "off". Therefore, DMD can be simply regarded as an optical switch array, and "1" or "0" is stored in the corresponding SRAM unit according to the need, and the switch of the corresponding micro unit can be controlled to generate any pattern.

需要指明的是,虽然上文以DMD举例,但是,本发明的方案并不局限于DMD这一种空间光调制器中。下文结合附图和具体实施例对本发明做进一步说明。It should be noted that although the DMD is used as an example above, the solution of the present invention is not limited to the DMD as a spatial light modulator. The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

实施例1Example 1

一种减小激光束横截面积的方法,在激光发射器与被照物体之间的光路中设置空间光调制器;所述激光发射器发出的入射激光束在空间光调制器上产生主光斑和副光斑;A method for reducing the cross-sectional area of a laser beam. A spatial light modulator is arranged in the optical path between a laser emitter and an object to be illuminated; the incident laser beam emitted by the laser emitter generates a main spot on the spatial light modulator and secondary facula;

参考图1,所述主光斑覆盖到空间光调制器的N个相邻的微单元上,只打开以主光斑圆心为中心n个微单元(n=1,2,…,N),其它N-n个微单元为关闭状态,则出射激光束的横截面积d=D*(n/N),其中D为主光斑的横截面积。从而达到了减小出射激光束的横截面积,并且,改变关闭微单元的数量,可以使出射激光束的横截面积在一定范围内变化。从而实现了简单改变激光束横截面积的目的。Referring to Fig. 1, the main light spot covers N adjacent micro-units of the spatial light modulator, and only n micro-units (n=1, 2, ..., N) centered on the center of the main light spot are opened, and the other N-n If a micro unit is in the off state, then the cross-sectional area of the outgoing laser beam d=D*(n/N), where D is the cross-sectional area of the main spot. Therefore, the cross-sectional area of the outgoing laser beam can be reduced, and the cross-sectional area of the outgoing laser beam can be changed within a certain range by changing the number of closed micro-units. Therefore, the purpose of simply changing the cross-sectional area of the laser beam is achieved.

更进一步的,所述副光斑覆盖到的空间光调制器的微单元为关闭状态。这样副光斑部分的出射激光就全部与主光斑的出射激光分离开来,从而使得副光斑被消去。Furthermore, the micro-units of the spatial light modulator covered by the secondary light spots are in the off state. In this way, the emitted laser light of the sub-spot is completely separated from the emitted laser light of the main spot, so that the sub-spot is eliminated.

实施例2Example 2

参考图2,一种激光显微切割的装置,包括正置显微镜、显微镜照明系统、数字成像系统和激光发射器1;还包括激光束光路整形系统,其包括一设置于激光发射器1与显微镜物镜2光路中的空间光调制器3;所述激光发射器1发出的入射激光束在空间光调制器3上产生主光斑和副光斑;With reference to Fig. 2, a kind of device of laser microdissection comprises upright microscope, microscope illumination system, digital imaging system and laser emitter 1; The spatial light modulator 3 in the optical path of the objective lens 2; the incident laser beam emitted by the laser emitter 1 produces a main spot and a secondary spot on the spatial light modulator 3;

所述主光斑覆盖到空间光调制器的N个相邻的微单元上,只打开以主光斑圆心为中心n个微单元(n=1,2,…,N),其它N-n个微单元为关闭状态,则经过物镜后的出射激光束的横截面积d=D*n/(N*M),其中D为主光斑的横截面积、M为物镜的放大倍数。The main light spot covers N adjacent micro-units of the spatial light modulator, and only n micro-units (n=1, 2, ..., N) centered on the center of the main light spot are opened, and the other N-n micro-units are In the closed state, the cross-sectional area of the outgoing laser beam passing through the objective lens d=D*n/(N*M), where D is the cross-sectional area of the main spot, and M is the magnification of the objective lens.

假设激光发射器1产生的激光束横截面积的主光斑横截面积D=100um*100um,物镜2的放大倍数M=100倍。而微单元的边长在10微米左右。因此本主光斑覆盖的微单元个数N=10*10个。那么上述的激光显微切割的装置实现的最小出射激光束的横截面积d=0.1微米*0.1微米,即只打开主光斑圆心处得一个微单元,使n=1。即切割线的宽度达到0.1微米。考虑到衍射效应,打在细胞样本上的光斑大小也在亚微米水平,可以满足单细胞甚至亚细胞切割的需要。Assume that the cross-sectional area of the main spot of the laser beam generated by the laser emitter 1 is D=100um*100um, and the magnification of the objective lens 2 is M=100 times. The side length of the micro-unit is about 10 microns. Therefore, the number of micro-units covered by the main light spot is N=10*10. Then the above-mentioned laser microdissection device realizes the cross-sectional area of the minimum outgoing laser beam d=0.1 micron*0.1 micron, that is, only one micro-unit at the center of the main spot is opened, so that n=1. That is, the width of the cutting line reaches 0.1 micron. Considering the diffraction effect, the size of the light spot on the cell sample is also at the sub-micron level, which can meet the needs of single-cell or even sub-cellular cutting.

更进一步的,所述副光斑覆盖到的空间光调制器3的微单元为关闭状态。这样副光斑部分的出射激光就全部与主光斑的出射激光分离开来,从而使得副光斑被消去。Furthermore, the micro-units of the spatial light modulator 3 covered by the auxiliary light spot are in the off state. In this way, the emitted laser light of the sub-spot is completely separated from the emitted laser light of the main spot, so that the sub-spot is eliminated.

更进一步的,所述激光束光路整形系统还包括一二向色镜5,将切割激光反射至物镜、将成像物镜透射至数字成像系统。Furthermore, the laser beam optical path shaping system also includes a dichroic mirror 5, which reflects the cutting laser to the objective lens and transmits the imaging objective lens to the digital imaging system.

本实施例中,照明光源的光学系统包含有聚光镜6和照明光源7;照明光源7发出的光线经过聚光镜6后照射至电动载物台8,电动载物台8远离照明光源的一侧放置有切割目标物9。而经过物镜2发出的出射激光束直接照射在切割目标物9上。In this embodiment, the optical system of the illumination source includes a condenser 6 and an illumination source 7; the light emitted by the illumination source 7 passes through the condenser 6 and then irradiates to the motorized stage 8, and the side of the motorized stage 8 away from the illumination source is placed with Cut target 9. The outgoing laser beam emitted by the objective lens 2 is directly irradiated on the cutting target 9 .

实施例3Example 3

本实施例与实施例2的区别在于,将正置显微镜更换为倒置显微镜。参考图3,只需要将切割目标物9放置在电动载物台8朝向落射照明光源7的一侧即可。而经过物镜2发出的出射激光束穿过电动载物台8照射在切割目标物9上。The difference between this embodiment and embodiment 2 is that the upright microscope is replaced with an inverted microscope. Referring to FIG. 3 , it is only necessary to place the cutting target 9 on the side of the motorized stage 8 facing the epi-illumination light source 7 . The outgoing laser beam emitted by the objective lens 2 passes through the motorized stage 8 and irradiates on the cutting target 9 .

实施例4Example 4

本实施例与实施例3的区别在于,将落射照明光源替换为透射照明光源7,参考图4,透射照明光源7发出的光线经过6后照射至电动载物台8,电动载物台8远离透射照明光源7的一侧放置有切割目标物9。而经过物镜2发出的出射激光束穿过电动载物台8照射在切割目标物9上。The difference between this embodiment and Embodiment 3 is that the epi-illumination light source is replaced by the transmission illumination light source 7. Referring to FIG. A cutting target 9 is placed on one side of the transmission illumination light source 7 . The outgoing laser beam emitted by the objective lens 2 passes through the motorized stage 8 and irradiates on the cutting target 9 .

以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到的变化或替换,都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应该以权利要求的保护范围为准。The above is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed in the present invention can easily think of changes or Replacement should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be determined by the protection scope of the claims.

Claims (5)

1. a kind of method reducing laser beam cross-section product, it is characterised in that:Light between laser emitter and illuminated object Installation space optical modulator in road;The incoming laser beam that the laser emitter is sent out generates main spot in spatial light modulator With secondary hot spot;
The main spot covers on N number of adjacent micro unit of spatial light modulator, only opens the n centered on the main spot center of circle Micro unit, n=1,2 ..., N, other N-n micro units are in off state, and the micro unit covered by secondary hot spot is to close shape State, then the cross-sectional area d=D* (n/N) of shoot laser beam, wherein D are the cross-sectional area of main spot.
2. a kind of method of laser microprobe dating, it is characterised in that:The installation space light in the light path of laser emitter and object lens Modulator;The incoming laser beam that the laser emitter is sent out generates main spot and secondary hot spot in spatial light modulator;
The main spot covers on N number of adjacent micro unit of spatial light modulator, only opens the n centered on the main spot center of circle Micro unit, n=1,2 ..., N, other N-n micro units are in off state, and the micro unit covered by secondary hot spot is to close shape State.
3. a kind of device of laser microprobe dating, including microscope, microscope illumination system, digital imaging system and Laser emission Device, it is characterised in that further include laser beam optical path orthopedic systems comprising one is set to laser emitter and micro objective light Spatial light modulator in road;The incoming laser beam that the laser emitter is sent out generated in spatial light modulator main spot and Secondary hot spot;
The main spot covers on N number of adjacent micro unit of spatial light modulator, only opens the n centered on the main spot center of circle Micro unit, n=1,2 ..., N, other N-n micro units are in off state, and the micro unit covered by secondary hot spot is to close shape State.
4. a kind of device of laser microprobe dating according to claim 3, it is characterised in that:The laser beam optical path shaping System further includes a dichroscope, will cutting laser reflection to object lens, number will be transmitted through by the image optics signal of object lens Imaging system.
5. a kind of device of laser microprobe dating according to any one of claim 3-4, it is characterised in that:It is described micro- Mirror is just to set microscope or inverted microscope.
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