CN105313133A - Lifting and rotating mechanism in semiconductor device - Google Patents
Lifting and rotating mechanism in semiconductor device Download PDFInfo
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- CN105313133A CN105313133A CN201410366270.4A CN201410366270A CN105313133A CN 105313133 A CN105313133 A CN 105313133A CN 201410366270 A CN201410366270 A CN 201410366270A CN 105313133 A CN105313133 A CN 105313133A
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- 230000007246 mechanism Effects 0.000 title claims abstract description 37
- 239000004065 semiconductor Substances 0.000 title claims abstract description 13
- 230000033001 locomotion Effects 0.000 claims abstract description 11
- 230000005540 biological transmission Effects 0.000 claims abstract description 10
- 238000012544 monitoring process Methods 0.000 claims description 2
- 230000009471 action Effects 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
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- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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- 238000005498 polishing Methods 0.000 description 1
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Abstract
本发明涉及一种半导体设备中的升降旋转机构。该升降旋转机构包括升降模组、旋转模组和升降架，所述升降模组包括动力输入装置、带传动装置、螺旋传动装置和滑轨系统，所述滑轨系统包括滑块和导轨；所述升降架固定在所述滑轨系统的滑块上；所述旋转模组，安装在所述升降架上，其中，所述动力输入装置通过所述带传动装置将能量以运动形式传递至所述螺旋传动装置，所述螺旋传动装置带动所述升降架和滑块沿所述导轨滑动。升降模组和旋转模组虽然集合成为一个机构，但彼此之间的运动并不会相互影响，而是能够被独立地监测和调节。在升降旋转机构上安放不同的功能部件，即可实现不同装置的升降和旋转动作，构成活动自如的机械手或喷嘴等部件。
The invention relates to a lifting and rotating mechanism in semiconductor equipment. The lifting and rotating mechanism includes a lifting module, a rotating module and a lifting frame, and the lifting module includes a power input device, a belt transmission device, a screw transmission device and a slide rail system, and the slide rail system includes a slider and a guide rail; The lifting frame is fixed on the slider of the slide rail system; the rotating module is installed on the lifting frame, wherein the power input device transmits energy in the form of motion to the The screw transmission device, the screw transmission device drives the lifting frame and the slider to slide along the guide rail. Although the lifting module and the rotating module are integrated into a mechanism, their movements will not affect each other, but can be monitored and adjusted independently. By placing different functional components on the lifting and rotating mechanism, the lifting and rotating actions of different devices can be realized, and components such as manipulators or nozzles can be formed freely.
Description
Technical field
The present invention relates to mechanical field, particularly relate to the mechanical field in semiconductor equipment, be specially the lifting rotation mechanism used in a kind of semiconductor equipment.
Background technology
High-tech geo-informatization system with the device such as chip, integrated circuit enters the selection visual field of consumers in general successively.In the middle of the equipment of production and processing semiconductor, no matter be gluing, developing process or etching, glossing, often can run into certain situation, need some mechanism in equipment can either oscilaltion simultaneously can by swing arm swing rotary.Such mechanism common are: the liquid nozzle in polishing or coating technique, transmit the process machinery people etc. that wafer process uses.
Artificially routine with process machinery, the process machinery people that present stage is relatively commonly used adopts prosthetic robot usually.If this kind of robot will complete above-mentioned rotation and lifting action, must the interlock of all joints, employing be cascaded structure.The open defect of this design is " injuring all ", and the parts of series connection too much mean that any one parts all may have problems and cause whole robot fault, and junction, joint due to frequent activity, be easy to wearing and tearing, equally also hidden danger is heavy.
In prior art, there is the parallel institution for this reason designing collection lifting and spinfunction one, as the good try that Beijing University of Technology makes in this field, see Chinese patent CN203622444U, but some practical problems that have ignored in production reality: mechanical field, especially the plant equipment of semiconductor is related to, people often require that the adjustable height of process machinery people and the anglec of rotation are accurately adjustable, lifting and rotation are necessary to make a distinction independent control, be independent of each other, precisely, efficiently could complete production task.If spinning movement can cause the change of robot, huge challenge can be brought to the difficulty of the accuracy controlled and operation undoubtedly; Vice versa.
Summary of the invention
The present invention is for industrial object, and provide a kind of lifting rotation mechanism, elevating mechanism and rotating module are integrated into same module, but separate when manipulating and regulate, and does not interfere with each other, is particularly useful among high-new semiconductor equipment.
In order to reach goal of the invention, need following technical scheme:
A lifting rotation mechanism in semiconductor equipment, comprising:
Lifting module, described lifting module comprises power input device, belt driver, helicoidal gear and slide type rail system, and described slide type rail system comprises slide block and guide rail;
Crane, described crane is fixed on the slide block of described slide type rail system;
Rotating module, is arranged on described crane;
Wherein, energy is passed to described helicoidal gear with forms of motion by described belt driver by described power input device, and described helicoidal gear drives described crane and slide block along described slide.
Alternatively, described belt driver is Friction Type Belt Drive device or engagement type belt driver.
Further, described power input device is servomotor or stepper motor.
Preferably, described helicoidal gear comprises nut and leading screw, and described nut is screwed onto on described leading screw, and described nut and described crane are fixed, described screw turns and then drive described nut to move along leading screw.
Preferably, described belt driver comprises a driving-belt and two belt wheels, and described driving-belt is used for the transmission between two belt wheels, and described two belt wheels are arranged on the end of described power input device and the end of described leading screw respectively.
Preferably, described rotating module is electric rotating machine.
Preferably, described electric rotating machine is arranged in described crane, and described crane is fixed on described slide block, and described crane is pressed on described nut.
Preferably, described lifting rotation mechanism is provided with position sensor, for the angle position of the height and position and/or described rotating module of monitoring described crane.
Alternatively, varying in size of described two belt wheels, the radius of described large belt wheel and the radius ratio of small pulley are 1.5:1.
Further, described lifting rotation mechanism comprises platform, support column and swing arm, and wherein, described platform is fixed on described lifting module, described support column to be arranged on described rotating module and to rotate with described rotating module, and described swing arm is connected on described support column.
Lifting rotation mechanism in the present invention, degree of regulation is high, and lifting and spinning movement complete accurately, and independent of one another control is independent of each other, and has high practical value, is especially suitable for promoting in field of semiconductor devices.
Accompanying drawing explanation
Fig. 1 is the perspective view of lifting rotation mechanism of the present invention specific embodiment;
Fig. 2 is the another perspective view of lifting rotation mechanism of the present invention specific embodiment;
Fig. 3 is the upward view of lifting rotation mechanism of the present invention specific embodiment;
Fig. 4 is the side view of lifting rotation mechanism of the present invention specific embodiment;
Fig. 5 is the front view of lifting rotation mechanism of the present invention specific embodiment;
Fig. 6 is the perspective view of the electric rotating machine of lifting rotation mechanism of the present invention specific embodiment;
Fig. 7 is the top view of the electric rotating machine of lifting rotation mechanism of the present invention specific embodiment.
Detailed description of the invention
By reference to the accompanying drawings and consult following embodiment will know content main idea of the present invention comprehensively and reach repeat realize object:
Fig. 1-2 gives the perspective view of two different angles of the specific embodiment of the invention.This lifting rotation mechanism mainly comprises three parts, is respectively lifting module 11, rotating module 12 and crane 13.In addition, this embodiment is also provided with a platform 101, upright barrel 102 and a swing arm 103.Platform 101 is fixed on lifting module 11, will prop up platform, cannot continue upwards to rise when rotating module 12 rises to certain position with crane 13.Leave circular cavity in the middle position of platform 101, embed when rising for rotating module 12.Upright barrel 102 is arranged on rotating module 12 as the support column of swing arm 103, rotating module 12 can be followed rotate together, its other end connects swing arm 103, can drive the lifting of swing arm like this when being elevated module 11 and rising or decline, and the rotary motion of rotating module 12 also can drive upright barrel 102 rotate and then realize the swing of swing arm 103.Different functional parts being installed in swing arm 103, can realize lifting and the rotary motion of various device, such as, can be manipulator, constitutes a process machinery people that can be elevated and rotate; Can be also such as nozzle, constitute an overall spreader nozzle that can be elevated and rotate.This lifting rotation mechanism that can freely be elevated and rotate is suitable for being arranged in the middle of semiconductor equipment very much, forms various functional part.
Lifting module 11 in this embodiment employs servomotor 201 as the device providing power, can certainly be stepper motor.Because semiconductor equipment needs automation usually, so generally do not adopt manpower to provide power.Servomotor 201 is positioned at the outermost of whole lifting module 11, is all fixed by metallic plate up and down.The bottom of servomotor 201 is connected on one group of belt driver, and energy and forms of motion are passed to the helicoidal gear of lifting module 11 by the servomotor 201 of High Rotation Speed by this belt driver, and then complete lifting action.The belt driver that this embodiment adopts comprises small one and large one two belt wheels and the driving-belt 202 of a slat gum material.Wherein large belt wheel 203 is 1.5:1 with the ratio of small pulley 204 radius, can certainly be other suitable ratios, because proportionate relationship can be determined, add that the power of servomotor 201, rotating speed are all standards, so degree very accurately can be reached when the height regulating lifting module 11 to rise or decline, meet the requirement of semicon industry to precision.This belt driver both can be friction-type also can be engagement type, and driving-belt 202 and two belt wheels also can be replaced chain and gear.
By the transmission of belt driver, can by the energy of servomotor 201 and forms of motion transmission and transform give lifting module 11 helicoidal gear.Helicoidal gear in the present embodiment in particular, is the fixing ball-screw 205 in a position, and to be screwed onto on ball-screw 205 and the nut 206 moved up and down on ball-screw 205.Ball-screw 205 is also arranged on penetrating crane 13 part being elevated module 11 simultaneously, directes reach platform 101.In order to improve precision, the present embodiment is preferred ball-screw 205, if required precision is not high, also can select lead screw to do alternate design.The large belt wheel 203 of belt driver is arranged on the end of ball-screw 205, and small pulley 204 is arranged on the end of servomotor 201, by the transmission of driving-belt 202, achieves the transmission of energy and motion mode.Owing to having installed rotating module 12 in crane 13, so can be heavier, and the lower end of crane 13 will compress and be fixed on nut 206, nut 206 needs to hold up crane 13 and drives lifting, pressure-bearing is larger, so selecting nut 206 appropriate to the occasion wide and thick, and steel plate that preferably working strength is higher.
Lifting module 11 also comprises slide type rail system, and slide type rail system comprises two slide blocks 207 and two guide rails 208 further.Two slide blocks 207 occupy two guide rails 208 respectively, can slide up and down on corresponding track.
3-5 by reference to the accompanying drawings, from looking up, side-looking and face three angle views and can see, the rotating module 12 of the present embodiment is an electric rotating machine 301, and crane 13 is then the metal framework structure including two side plates, 401, base plate 302 and a backboard 501.Electric rotating machine 301 by being just fit into crane 13 to the direction of backboard 501, then is fixed by structural member, thus combines as a whole by crane 13 and electric rotating machine 301.
The backboard 501 of crane 13 is a flat rectangle metal straight plate, and nut 206 is close in the bottom of backboard 501, and the two is fixed together.Meanwhile, the through nut 206 of ball-screw 205 and backboard 501, and backboard 501 is fixed on two slide blocks 207 of slide type rail system by screw.Like this, whole crane 13 just by the impact of servomotor 201, the guide rail 208 of slide type rail system can be followed slide block 207 and has moved up and down neatly.And how electric rotating machine 301 can independently control the need of rotation and rotating speed, thus enable this lifting rotation module complete rotation and the lifting action of corresponding function parts, two actions are independent of each other and all can fine adjustments, with the obvious advantage.
In order to the moving situation enabling user grasp this lifting rotation mechanism in real time, accurately, many position sensors 303 are also provided with around lifting module 11 in this embodiment and rotating module 12, monitor the height and position of crane 13 and the angle position of rotating module 12 by laser signal, and control the scope of activities of corresponding module.
Fig. 6-7 reflects the architectural feature of electric rotating machine 301 in the present embodiment.This electric rotating machine 301 has one foursquare dull and stereotyped 601, being mounted with a protruding circular base 602, circular base 602 offering the hole 603 for installing upright barrel 102 on dull and stereotyped 601.Upright barrel 102 is inserted corresponding hole 603 and fixes with the circular base 602 of electric rotating machine 301, upright barrel 102 can be followed electric rotating machine 301 and be rotated.
Above-mentioned disclosed theme and scheme are considered to exemplary and nonrestrictive, and additional claim intention contains all this type of distortion fallen in true spirit scope of the present invention and scope, strengthens and other embodiments.Like this, with to greatest extent allowed by law, scope of the present invention is determined by the admissible maximum extensive interpretation of claim below and their equivalent, and the restriction that should not describe by foregoing details or restriction.
Claims (10)
1. the lifting rotation mechanism in semiconductor equipment, is characterized in that, comprising:
Lifting module, described lifting module comprises power input device, belt driver, helicoidal gear and slide type rail system, and described slide type rail system comprises slide block and guide rail;
Crane, described crane is fixed on the slide block of described slide type rail system;
Rotating module, is arranged on described crane;
Wherein, energy and forms of motion are passed to described helicoidal gear by described belt driver by described power input device, and described helicoidal gear drives described crane and slide block along described slide.
2. lifting rotation mechanism according to claim 1, is characterized in that, described belt driver is Friction Type Belt Drive device or engagement type belt driver.
3. lifting rotation mechanism according to claim 1, is characterized in that, described power input device is servomotor or stepper motor.
4. lifting rotation mechanism according to claim 1, it is characterized in that, described helicoidal gear comprises nut and leading screw, and described nut is screwed onto on described leading screw, described nut and described crane are fixed, described screw turns and then drive described nut to move along leading screw.
5. lifting rotation mechanism according to claim 4, it is characterized in that, described belt driver comprises a driving-belt and two belt wheels, and described driving-belt is used for the transmission between two belt wheels, and described two belt wheels are arranged on the end of described power input device and the end of described leading screw respectively.
6. lifting rotation mechanism according to claim 1, is characterized in that, described rotating module is electric rotating machine.
7. lifting rotation mechanism according to claim 6, is characterized in that, described electric rotating machine is arranged in described crane, and described crane is fixed on described slide block, and described crane is pressed on described nut.
8. lifting rotation mechanism according to claim 1, is characterized in that, described lifting rotation mechanism is provided with position sensor, for the angle position of the height and position and/or described rotating module of monitoring described crane.
9. lifting rotation mechanism according to claim 5, is characterized in that, varying in size of described two belt wheels, and the radius of described large belt wheel and the radius ratio of small pulley are 1.5:1.
10. lifting rotation mechanism according to claim 1, it is characterized in that, described lifting rotation mechanism comprises platform, support column and swing arm further, wherein, described platform is fixed on described lifting module, described support column to be arranged on described rotating module and to rotate with described rotating module, and described swing arm is connected on described support column.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410366270.4A CN105313133A (en) | 2014-07-29 | 2014-07-29 | Lifting and rotating mechanism in semiconductor device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410366270.4A CN105313133A (en) | 2014-07-29 | 2014-07-29 | Lifting and rotating mechanism in semiconductor device |
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| CN105313133A true CN105313133A (en) | 2016-02-10 |
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| CN201410366270.4A Pending CN105313133A (en) | 2014-07-29 | 2014-07-29 | Lifting and rotating mechanism in semiconductor device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107991595A (en) * | 2017-11-06 | 2018-05-04 | 汕头大学 | A kind of high speed and super precision rotation and lifting linkage mechanism |
| CN109334533A (en) * | 2018-09-30 | 2019-02-15 | 临泉县赛莱斯农用车有限公司 | A kind of electric tricycle carriage rotating lifting gear |
| CN111283693A (en) * | 2020-03-05 | 2020-06-16 | 广东智源机器人科技有限公司 | Actuating mechanism and catering robot |
| CN113443407A (en) * | 2021-06-30 | 2021-09-28 | 安徽机电职业技术学院 | Height-adjustable's product transportation robot |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040228719A1 (en) * | 1996-07-15 | 2004-11-18 | Woodruff Daniel J. | Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces |
| CN202591033U (en) * | 2012-01-10 | 2012-12-12 | 江苏长虹汽车装备集团有限公司 | Walking-drive device for spraying robot |
| CN103009382A (en) * | 2011-09-26 | 2013-04-03 | 株式会社安川电机 | Transfer robot and substrate processing apparatus |
| CN103640028A (en) * | 2013-11-28 | 2014-03-19 | 华南理工大学 | Novel plane articulated robot structure |
-
2014
- 2014-07-29 CN CN201410366270.4A patent/CN105313133A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040228719A1 (en) * | 1996-07-15 | 2004-11-18 | Woodruff Daniel J. | Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces |
| CN103009382A (en) * | 2011-09-26 | 2013-04-03 | 株式会社安川电机 | Transfer robot and substrate processing apparatus |
| JP5364769B2 (en) * | 2011-09-26 | 2013-12-11 | 株式会社安川電機 | Transfer robot and substrate processing apparatus |
| CN202591033U (en) * | 2012-01-10 | 2012-12-12 | 江苏长虹汽车装备集团有限公司 | Walking-drive device for spraying robot |
| CN103640028A (en) * | 2013-11-28 | 2014-03-19 | 华南理工大学 | Novel plane articulated robot structure |
Non-Patent Citations (1)
| Title |
|---|
| 何雪明等: "《数控技术（第三版）》", 31 January 2014 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107991595A (en) * | 2017-11-06 | 2018-05-04 | 汕头大学 | A kind of high speed and super precision rotation and lifting linkage mechanism |
| CN107991595B (en) * | 2017-11-06 | 2020-12-04 | 广州高谱技术有限公司 | High-speed high-precision rotating lifting linkage mechanism |
| CN109334533A (en) * | 2018-09-30 | 2019-02-15 | 临泉县赛莱斯农用车有限公司 | A kind of electric tricycle carriage rotating lifting gear |
| CN111283693A (en) * | 2020-03-05 | 2020-06-16 | 广东智源机器人科技有限公司 | Actuating mechanism and catering robot |
| CN113443407A (en) * | 2021-06-30 | 2021-09-28 | 安徽机电职业技术学院 | Height-adjustable's product transportation robot |
| CN113443407B (en) * | 2021-06-30 | 2022-01-11 | 安徽机电职业技术学院 | Height-adjustable's product transportation robot |
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Address after: 201203 building 4, No. 1690, Cailun Road, free trade zone, Pudong New Area, Shanghai Applicant after: Shengmei semiconductor equipment (Shanghai) Co., Ltd Address before: 201203 Shanghai City, Pudong New Area China Zhangjiang High Tech Park of Shanghai Cailun Road No. 1690 building fourth Applicant before: ACM (SHANGHAI) Inc. |
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Application publication date: 20160210 |
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