CN105313113A - Industrial robot - Google Patents
Industrial robot Download PDFInfo
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- CN105313113A CN105313113A CN201510390910.XA CN201510390910A CN105313113A CN 105313113 A CN105313113 A CN 105313113A CN 201510390910 A CN201510390910 A CN 201510390910A CN 105313113 A CN105313113 A CN 105313113A
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Abstract
An industrial robot includes a common arm allowing base end sides of two arms to be rotatably connected, and, even after the industrial robot is assembled, is capable of independently adjusting inclination of one arm relative to the horizontal direction and inclination of the other arm relative to the horizontal direction. The industrial robot includes: hands (4, 5); an arm (6) allowing the hand (4) to be connected to the tail end side; an arm (7) allowing the hand (5) to be connected to the tail end side; a common arm allowing the base end sides of the arms (6, 7) to be rotatably connected; and a body allowing the common arm to be rotatably connected. The common arm includes: a base portion connected to the body; a first arm connecting portion allowing connection of the base end side of the arm (6); and a second arm connecting portion allowing connection of the base end side of the arm (7), the first arm connecting portion and the second arm connecting portion which are split from the base portion being detachably fastened to the base portion.
Description
Technical field
The present invention relates to a kind of industrial robot, this industrial robot has the shared arm of the base end side rotatably connecting two arms.
Background technology
Known a kind of industrial robot (such as with reference to patent document 1) carrying semiconductor crystal wafer in the past.Industrial robot described in patent document 1 has: the first hand and the second hand, and described first hand and the second hand load semiconductor crystal wafer; First arm, the first hand is rotatably connected with the end side of described first arm; Second arm, the second hand is rotatably connected with the end side of described second arm; Share arm, described shared arm rotatably connects for the base end side of the first arm and the base end side of the second arm; And body, described body rotatably connects for sharing arm.Further, this industrial robot has: the first rotating mechanism, and described first rotating mechanism makes the first hand rotate relative to the first arm, and the first arm is rotated relative to shared arm; And second rotating mechanism, described second rotating mechanism makes the second hand rotate relative to the second arm, and the second arm is rotated relative to shared arm.
First rotating mechanism has: solid rotating shaft, and described solid rotating shaft forms a part for body; Motor, described motor makes solid rotating shaft rotate; First belt wheel, described first belt wheel is configured in the inside of shared arm and is fixed on the upper end side of solid rotating shaft; First fixed axis, described first fixed axis is fixed on shared arm; Second belt wheel, described second belt wheel is remained by the first fixed axis and can rotate and be configured at the inside of shared arm, be fixed on the base end side of the first arm; Band, described band is set up by the first belt wheel and the second belt wheel; 3rd belt wheel, described 3rd belt wheel is fixed on the upper end side of the first fixed axis and is configured in the inside of the first arm; Second fixed axis, described second fixed axis is fixed on the end side of the first arm; 4th belt wheel, described 4th belt wheel by the second fixed axis remain can rotate and be configured at the first arm inside, be fixed on the first hand; And band, described band is set up by the 3rd belt wheel and the 4th belt wheel.
Equally, the second rotating mechanism has: hollow rotating shaft, and described hollow rotating shaft forms a part for body; Motor, described motor makes hollow rotating shaft rotate; 5th belt wheel, described 5th belt wheel is configured in the inside of shared arm and is fixed on the upper end side of hollow rotating shaft; 3rd fixed axis, described 3rd fixed axis is fixed on shared arm; 6th belt wheel, described 6th belt wheel is remained by the 3rd fixed axis and can rotate and be configured at the inside of shared arm, be fixed on the base end side of the second arm; Band, described band is set up by the 5th belt wheel and the 6th belt wheel; 7th belt wheel, described 7th belt wheel is fixed on the upper end side of the second fixed axis and is configured at the inside of the second arm; 4th fixed axis, described 4th fixed axis is fixed on the end side of the second arm; 8th belt wheel, described 8th belt wheel by the 4th fixed axis remain can rotate and be configured at the second arm inside, be fixed on the second hand; And band, described band is set up by the 7th belt wheel and the 8th belt wheel.
Patent document 1: No. 2009/028178th, International Publication
In the industrial robot described in patent document 1, the first fixed axis being fixed in shared arm due to the second belt wheel being fixed on the base end side of the first arm remains and can rotate, therefore after having assembled industrial robot, arm can be shared relative to the gradient of horizontal direction by adjustment, adjust the gradient of the first arm relative to horizontal direction.And, in this industrial robot, the 3rd fixed axis being fixed in shared arm due to the 6th belt wheel being fixed on the base end side of the second arm remains and can rotate, therefore after having assembled industrial robot, arm can be shared relative to the gradient of horizontal direction by adjustment, adjust the gradient of the second arm relative to horizontal direction.
But, in this industrial robot, because the first fixed axis and the 3rd fixed axis are fixed on shared arm, if therefore adjust the gradient of the first arm relative to horizontal direction, then the second arm changes relative to the gradient of horizontal direction, if adjustment the second arm is relative to the gradient of horizontal direction, then the first arm changes relative to the gradient of horizontal direction.That is, in this industrial robot, be difficult to after having assembled industrial robot, the first arm is adjusted separately relative to the gradient of horizontal direction relative to the gradient of horizontal direction and the second arm.
Summary of the invention
Therefore, problem of the present invention provides following this industrial robot: this industrial robot has the shared arm of the base end side of base end side and the second arm rotatably connecting the first arm, even if after having assembled industrial robot, also can easily adjust separately relative to the gradient of horizontal direction relative to the gradient of horizontal direction and the second arm the first arm.
In order to solve above-mentioned problem, the feature of industrial robot of the present invention is, this industrial robot has: the first hand and the second hand, and described first hand and described second hand load conveying object; First arm, the first hand is rotatably connected with the end side of described first arm; Second arm, the second hand is rotatably connected with the end side of described second arm; Share arm, described shared arm rotatably connects for the base end side of the first arm and the base end side of the second arm; And body, described body rotatably connects for sharing arm, and shared arm has: basal part, and described basal part is connected with described body; First arm connecting portion, described first arm connecting portion connects for the base end side of described first arm; And the second arm connecting portion, described second arm connecting portion connects for the base end side of described second arm, basal part, the first arm connecting portion and the second arm coupling part body are formed, and the first arm connecting portion and the second arm connecting portion are the mode of dismounting can be fixed on basal part.
In industrial robot of the present invention, the second arm coupling part body that the base end side of the basal part be connected with body, the first arm connecting portion connected for the base end side of the first arm and confession the second arm connects is formed, and the first arm connecting portion and the second arm connecting portion are the mode of dismounting can be fixed on basal part.Therefore, in the present invention, after having assembled industrial robot, even if by adjusting relative to the fixed position of basal part and gradient the first arm connecting portion, adjust the gradient of the first arm relative to horizontal direction, also can not change the gradient of the second arm relative to horizontal direction.And, after having assembled industrial robot, even if by adjusting relative to the fixed position of basal part and gradient the second arm connecting portion, adjusting the gradient of the second arm relative to horizontal direction, also can not change the gradient of the first arm relative to horizontal direction.Therefore, in the present invention, even if after having assembled industrial robot, also can easily adjust separately relative to the gradient of horizontal direction relative to the gradient of horizontal direction and the second arm the first arm.
In the present invention, such as, the basal part shape be formed as when observing from above-below direction is elongated rectangular rectangular-shaped, first arm connecting portion and the second arm connecting portion shape be formed as when observing from above-below direction is the bulk of roughly L shape, when observing from above-below direction, first arm connecting portion is fixed on one end of the length direction of basal part, and the second arm connecting portion is fixed on the other end of the length direction of basal part.If the shape of the first arm connecting portion when observing from above-below direction and the second arm connecting portion is in roughly L shape, then when utilizing the integrally manufactured shared arm of machining, the size likely existed for the manufacture of the material needed for shared arm becomes large problem, but in the present invention, because basal part, the first arm connecting portion and the second arm coupling part body are formed, therefore, when utilizing machining manufacture to share arm, can reduce for the manufacture of the material needed for shared arm.Therefore, it is possible to share arm with low cost manufacture.
In the present invention, industrial robot such as has: the first motor, and described first motor makes the first hand rotate relative to the first arm, and the first arm is rotated relative to shared arm; And second motor, described second motor makes the second hand rotate relative to the second arm, and the second arm is rotated relative to shared arm, and the first motor is fixed on the first arm connecting portion, and the second motor is fixed on the second arm connecting portion.In this case, with the first motor and the second motor configurations compared with the situation in the inside of body, the structure of the structure of the Poewr transmission mechanism of the first motor and the Poewr transmission mechanism of the second motor can be simplified.
Further, in this case, preferred industrial robot has: the first reductor, and described first reductor forms the first joint portion as the coupling part between the first arm with shared arm and is connected with the first motor; And second reductor, described second reductor forms the second joint portion as the coupling part between the second arm with shared arm and is connected with the second motor, when observing from above-below direction, the axle center of the first motor and the axis deviation of the first reductor, the axle center of the second motor and the axis deviation of the second reductor.If formed like this, then compare with the situation of the first motor with the first reductor arranged coaxial, the configuration free degree of the first motor can be improved.Further, as compared to the situation of the second motor with the second reductor arranged coaxial, the configuration free degree of the second motor can be improved.Further, if formed like this, then the first reductor and the second reductor are if be formed with the hollow reducer of through hole at the center of their radial direction, then air hose or distribution cable can be passed through in through hole.
In the present invention, when observing from above-below direction, if using parallel with the minor face being formed as elongated rectangular basal part and via shared arm relative to the straight line of the center of rotation of body as imaginary line, then when observing from above-below direction, such as the first arm connecting portion and the second arm connecting portion are formed as symmetrical relative to imaginary line line.
In the present invention, preferred industrial robot has: the first motor, and described first motor makes the first hand rotate relative to the first arm, and the first arm is rotated relative to shared arm; And second motor, described second motor makes the second hand rotate relative to the second arm, and the second arm is rotated relative to shared arm, first motor is fixed on the first arm connecting portion, second motor is fixed on the second arm connecting portion, first motor at least partially and the second motor outstanding from the lower surface of shared arm towards downside at least partially, and when observing from above-below direction, the first motor and the second motor configurations are in the position of outer circumferential side leaning on body than body.
If formed like this, then because the first motor is fixed on the first arm connecting portion, the second motor is fixed on the second arm connecting portion, therefore compared with the situation in the inside of body, can reduce the height of body with the first motor and the second motor configurations.And, if formed like this, then due to the first motor at least partially and the second motor outstanding from the lower surface of shared arm towards downside at least partially, therefore and second motor overall with the first motor is integrally provided in compared with the situation of the inside of shared arm, can reduce the height of shared arm.And, if formed like this, then due to when observing from above-below direction, first motor and the second motor configurations are than the position of body by the outer circumferential side of body, therefore with the first motor and the second motor in the vertical direction compared with the situation of body overlap, distance in the vertical direction between body and shared arm can be reduced.Therefore, it is possible to reduce the first hand and the second hand by minimum altitude (passing through line).
In the present invention, preferably when observing from above-below direction, by the first arm relative to shared arm center of rotation, share that arm connects relative to the center of rotation of shared arm successively relative to the center of rotation of body, the second arm linearly become V word.If formed like this, then can by the first hand and the second hand overlapping in the vertical direction.Therefore, when the direction being moved into the action taking out of conveying object by the first hand is equidirectional with the direction being moved into the action taking out of conveying object by the second hand, such as, after the release being taken out of conveying object by the first hand, even if make shared arm not rotate relative to body, the action of being moved into conveying object by the second hand also can be started.Consequently can shorten the productive temp time of industrial robot.
Invention effect
As mentioned above, in the present invention, industrial robot has the shared arm rotatably connected for the base end side of the first arm and the base end side of the second arm, even if after having assembled industrial robot, also can easily adjust separately relative to the gradient of horizontal direction relative to the gradient of horizontal direction and the second arm the first arm.
Accompanying drawing explanation
The stereogram of the industrial robot of Fig. 1 involved by embodiments of the present invention.
Fig. 2 is the top view of the industrial robot shown in Fig. 1.
Fig. 3 is the front view of the industrial robot shown in Fig. 1.
Fig. 4 is the sectional view of the structure for illustration of the shared arm shown in Fig. 1 and driving mechanism.
Fig. 5 is the top view of the shared arm shown in Fig. 1.
(symbol description)
1 robot (industrial robot)
4 hands (the first hand)
5 hands (the second hand)
6 arms (the first arm)
7 arms (the second arm)
8 share arm
9 bodies
14 joint portions (the first joint portion)
15 joint portions (second joint portion)
20 basal parts
21 first arm connecting portions
22 second arm connecting portions
27 motors (the first motor)
28 reductors (the first reductor)
29 motors (the second motor)
30 reductors (the second reductor)
C1 shares the center of rotation of arm
The center of rotation of C2 first arm
The center of rotation of C3 second arm
L1 imaginary line
The length direction of X basal part
Detailed description of the invention
Below, with reference to accompanying drawing, embodiments of the present invention are described.
(schematic configuration of industrial robot)
The stereogram of the industrial robot 1 of Fig. 1 involved by embodiments of the present invention.Fig. 2 is the top view of the industrial robot 1 shown in Fig. 1.Fig. 3 is the front view of the industrial robot 1 shown in Fig. 1.
The industrial robot 1 (hereinafter referred to as " robot 1 ") of present embodiment is the robot for carrying the semiconductor crystal wafer (omitting diagram) as conveying object, and described robot 1 is assembled in the manufacturing system omitting illustrated semiconductor and uses.This robot 1 has: two hands 4,5, and two described hands 4,5 load semiconductor crystal wafer; Arm 6, hand 4 is rotatably connected with the end side of described arm 6; Arm 7, hand 5 is rotatably connected with the end side of described arm 7; Share arm 8, described shared arm 8 rotatably connects for the base end side of arm 6,7; And body 9, described body 9 rotatably connects for sharing arm 8.
Hand 4 is configured in than hand 5 position on the lower.Arm 6 is configured in than hand 4 position on the lower.Arm 7 is configured in the position of side more top than hand 5.Share arm 8 to be configured in than arm 6 position on the lower.Further, the position that arm 8 is configured in side more top than body 9 is shared.The hand 4 of present embodiment is the first hand, and hand 5 is the second hand, and arm 6 is the first arm, and arm 7 is the second arm.
Body 9 is formed as roughly cylindric.This body 9 has: upper bodies portion 12; And lower body portion 13, upper bodies portion 12 remains and can move up and down by described lower body portion 13.The rotating mechanism (omitting diagram) that shared arm 8 is rotated and the elevating mechanism (omit and illustrate) making shared arm 8 and the lifting of described rotating mechanism one is configured with in the inside in upper bodies portion 12.The elevating mechanism (omitting diagram) that upper bodies portion 12 is elevated is configured with in the inside in lower body portion 13.
Sharing arm 8 shape be formed as when observing from above-below direction is elongated roughly rectangular bulk.And share arm 8 and be formed as hollow form.The length of the shared arm 8 when observing from above-below direction is than the outer path length of body 9.Arm 6,7 shape be formed as when observing from above-below direction is elongated oblong shape and the thin bulk of the thickness of above-below direction.In the present embodiment, the length of arm 6 is equal with the length of arm 7.Further, arm 6,7 is formed as hollow form.The arm 6,7 of present embodiment and shared arm 8 are formed by machining.
The base end side of arm 6 is rotatably connected to the end side of shared arm 8, the shape of described shared arm 8 when observing from above-below direction is elongated roughly rectangle, and the base end side of arm 7 is rotatably connected to another side of shared arm 8.Coupling part between arm 6 and shared arm 8 becomes joint portion 14.Coupling part between arm 7 and shared arm 8 becomes joint portion 15.The joint portion 14 of present embodiment is the first joint portion, and joint portion 15 is second joint portion.
Further, robot 1 has: driving mechanism 16 (with reference to Fig. 4), and described driving mechanism 16 makes hand 4 rotate relative to arm 6 and arm 6 is rotated relative to shared arm 8; And driving mechanism 17 (with reference to Fig. 4), described driving mechanism 17 makes hand 5 rotate relative to arm 7 and arm 7 is rotated relative to shared arm 8.Below, the concrete structure of shared arm 8 and the structure of driving mechanism 16,17 are described.
(sharing the structure of arm and driving mechanism)
Fig. 4 is the sectional view of the structure for illustration of the shared arm 8 shown in Fig. 1 and driving mechanism 16,17.Fig. 5 is the top view of the shared arm 8 shown in Fig. 1.
Share arm 8 to have: basal part 20, described basal part 20 is connected with body 9; First arm connecting portion 21, described first arm connecting portion 21 connects for the base end side of arm 6; And the second arm connecting portion 22, described second arm connecting portion 22 connects for the base end side of arm 7.Basal part 20, first arm connecting portion 21 and the second arm connecting portion 22 split are formed, and by basal part 20, first arm connecting portion 21 and the second arm connecting portion 22 are fixed and be integrated, thus form shared arm 8.In the present embodiment, the first arm connecting portion 21 and the second arm connecting portion 22 are the mode of dismounting can be fixed on basal part 20.Further, as mentioned above, share arm 8 and formed by machining, basal part 20, the first arm connecting portion 21 and the second arm connecting portion 22 that form shared arm 8 are formed by machining.
Basal part 20 shape be formed as when observing from above-below direction is elongated rectangle and the thin bulk of the thickness of above-below direction.Be fixed with the output shaft of hollow reducer at the center of basal part 20, described hollow reducer forms the rotating mechanism being configured in the inside in upper bodies portion 12.As shown in Figure 5, if shape during to observe from above-below direction is the length direction (direction parallel with the long limit of basal part 20 of elongated rectangular basal part 20, the X-direction of Fig. 5) be left and right directions, with the short side direction (direction parallel with the minor face of basal part 20 of the basal part 20 orthogonal with left and right directions, the Y-direction of Fig. 5) be fore-and-aft direction, then the two ends of basal part 20 are in the lateral direction formed with the fixed part 20a for fixing the first arm connecting portion 21 and the second arm connecting portion 22 respectively.The upper surface of fixed part 20a is lower than the upper surface of the part except fixed part 20a of basal part 20.In addition, in the following description, being " front " side with the side, Y1 direction of Fig. 5, is " afterwards " side with side, Y2 direction.
As shown in Figure 5, the first arm connecting portion 21 and the second arm connecting portion 22 are formed as the bulk that the shape when observing from above-below direction is roughly L shape.First arm connecting portion 21 is fixed on the one end on the left and right directions of basal part 20, and the second arm connecting portion 22 is fixed on the other end on the left and right directions of basal part 20.And, as shown in Figure 5, when observing from above-below direction, if using parallel with fore-and-aft direction and through sharing the straight line of arm 8 relative to the center of rotation C1 of body 9 as imaginary line L1, then when observing from above-below direction, the first arm connecting portion 21 and the second arm connecting portion 22 are formed as symmetrical relative to imaginary line L1 line.
As shown in Figure 4, be formed with roughly cylindric cylinder portion 21a at the first arm connecting portion 21, be formed with roughly cylindric cylinder portion 22a at the second arm connecting portion 22.A part of cylinder portion 21a is more outstanding towards downside than basal part 20.Cylinder portion 22a than basal part 20 towards upwardly projecting.Further, a part of cylinder portion 21a, 22a is given prominence to towards rear side than the rear end face of basal part 20, and as mentioned above, the shape be formed as when observing from above-below direction is the bulk of roughly L shape for the first arm connecting portion 21 and the second arm connecting portion 22.Further, because a part of cylinder portion 21a is given prominence to towards rear side, cylinder portion 22a is towards upwardly projecting, and therefore the shape when observing from fore-and-aft direction of the first arm connecting portion 21 and the second arm connecting portion 22 is also roughly L shape.
Further, the fixed part 20a that is placed in the basal part 20 fixing portion that is fixed 21b, 22b is formed with at the first arm connecting portion 21 and the second arm connecting portion 22 place.Be fixed portion 21b, 22b under the state being placed in fixed part 20a, utilize multiple screw 24 so that the mode of dismounting fixed part 20a can be fixed on.Further, be fixed between portion 21b, 22b and fixed part 20a and positioned (with reference to Fig. 4) by alignment pin 25.
Under the state that the portion 21b of being fixed is fixed in fixed part 20a (that is, under the state that the first arm connecting portion 21 is fixed on basal part 20), in the vertical direction, the upper surface of the first arm connecting portion 21 and the upper surface of basal part 20 roughly consistent.Further, under the state that the portion 21b of being fixed is fixed in fixed part 20a, in the longitudinal direction, the front end face of the first arm connecting portion 21 is roughly consistent with the front end face of basal part 20, and the rear end face of the portion 21b that is fixed is roughly consistent with the rear end face of basal part 20.
Equally, under the state that the portion 22b of being fixed is fixed in fixed part 20a (that is, under the state that the second arm connecting portion 22 is fixed on basal part 20), in the vertical direction, the lower surface of the second arm connecting portion 22 is roughly consistent with the lower surface of basal part 20.Further, under the state that the portion 22b of being fixed is fixed in fixed part 20a, in the longitudinal direction, the front end face of the second arm connecting portion 22 is roughly consistent with the front end face of basal part 20, and the rear end face of the portion 22b that is fixed is roughly consistent with the rear end face of basal part 20.
Driving mechanism 16 has: motor 27, and described motor 27 makes hand 4 rotate relative to arm 6 and arm 6 is rotated relative to shared arm 8; And reductor 28, described reductor 28 is connected with motor 27.Driving mechanism 17 has: motor 29, and described motor 29 makes hand 5 rotate relative to arm 7 and arm 7 is rotated relative to shared arm 8; And reductor 30, described reductor 30 is connected with motor 29.Motor 29 is with motor 27 similar shape and the motor of same specification.Reductor 30 is with reductor 28 similar shape and the reductor of same specification.The motor 27 of present embodiment is the first motor, and motor 29 is the second motor.Further, reductor 28 is the first reductor, and reductor 30 is the second reductor.
Reductor 28 is the hollow reducer being formed with through hole at the center of its radial direction.This reductor 28 configures in the mode that its axle center is consistent with the axle center of the cylinder portion 21a of the first arm connecting portion 21.The axle center of reductor 28 is consistent relative to the center of rotation C2 of shared arm 8 with arm 6, and reductor 28 forms joint portion 14.Motor 27 is fixed on the first arm connecting portion 21.Further, motor 27 is configured in the position of side more forward than reductor 28.That is, when observing from above-below direction, the axle center of motor 27 and the axis deviation of reductor 28.Further, the majority of motor 27 is more outstanding towards downside than the lower end of the first arm connecting portion 21.That is, the majority of motor 27 is outstanding towards downside from the lower surface of shared arm 8.Further, when observing from above-below direction, motor 27 is configured in than the position of body 9 by the outer circumferential side of body 9, and as shown in Figure 3, the majority of motor 27 is overlapping with body 9 in the horizontal direction.
The output shaft of motor 27, towards upwardly projecting, is fixed with belt wheel (omitting diagram) at this output shaft.As shown in Figure 4, belt wheel 33 is fixed with in the lower end side of the power shaft of reductor 28.Belt wheel 33 is configured in the inside of the cylinder portion 21a of the first arm connecting portion 21.Band (omit diagram) is fixed in the belt wheel of the output shaft of motor 27 and belt wheel 33 sets up.Be fixed with the base end side of arm 6 at the output shaft of reductor 28, the housing of reductor 28 is fixed on an inner circumferential side of portion 21a.Belt wheel 34 is fixed with in the upper end side of the power shaft of reductor 28.Belt wheel 34 is configured in the inside of the base end side of arm 6.The belt wheel (omitting diagram) of the inside of the end side being configured in arm 6 is fixed with at hand 4 place.Band 35 is set up by this belt wheel and belt wheel 34.In addition, the belt wheel being fixed on hand 4 is rotatably fixed in the fixed axis maintenance of the end side of arm 6.
Reductor 30 is the hollow reducer being formed with through hole at the center of its radial direction.This reductor 30 configures in the mode that its axle center is consistent with the axle center of the cylinder portion 22a of the second arm connecting portion 22.The axle center of reductor 30 is consistent relative to the center of rotation C3 of shared arm 8 with arm 7, and reductor 30 forms joint portion 15.Motor 29 is fixed on the second arm connecting portion 22.Further, motor 29 is configured in the position of side more forward than reductor 30.That is, when observing from above-below direction, the axle center of motor 29 and the axis deviation of reductor 30.Further, a part for the lower end side of motor 29 is more outstanding towards downside than the lower end of the second arm connecting portion 22.That is, a part for the lower end side of motor 29 is outstanding towards downside from the lower surface of shared arm 8.Further, when observing from above-below direction, motor 29 is configured in than the position of body 9 by the outer circumferential side of body 9, and as shown in Figure 3, a part for the lower end side of motor 29 is overlapping with body 9 in the horizontal direction.
The output shaft of motor 29, towards upwardly projecting, is fixed with belt wheel (omitting diagram) at this output shaft.As shown in Figure 4, belt wheel 36 is fixed with in the lower end side of the power shaft of reductor 30.Belt wheel 36 is configured in the inside of the cylinder portion 22a of the second arm connecting portion 22.Band (omit diagram) is fixed in the belt wheel of the output shaft of motor 29 and belt wheel 36 sets up.Be fixed with the base end side of arm 7 at the output shaft of reductor 30, the housing of reductor 30 is fixed on an inner circumferential side of portion 22a.Belt wheel 37 is fixed with in the upper end side of the power shaft of reductor 30.Belt wheel 37 is configured in the inside of the base end side of arm 7.The belt wheel (omitting diagram) of the inside of the end side being configured in arm 7 is fixed with at hand 5.Band 38 is set up by this belt wheel and belt wheel 37.In addition, the belt wheel being fixed on hand 5 is rotatably fixed in the fixed axis maintenance of the end side of arm 7.
In the present embodiment, as shown in Figure 5, when observing from above-below direction, center of rotation C1, center of rotation C2 and center of rotation C3 do not configure on the same line.That is, when observing from above-below direction, what center of rotation C2, center of rotation C1 and center of rotation C3 are connected successively linearly becomes V word.That is, the robot 1 of present embodiment is so-called boomerang humanoid robot.Further, in the present embodiment, under the state that the end side of arm 6,7 is configured in rear side (state shown in Fig. 1, Fig. 2), hand 4 and hand 5 are complete overlapping in the vertical direction.
In addition, as mentioned above, motor 29 is with motor 27 similar shape and the motor of same specification, and reductor 30 is with reductor 28 similar shape and the reductor of same specification.Further, each parts forming belt wheel 33 grade of driving mechanism 16 are similar shape and same specification with each parts of belt wheel 36 grade forming driving mechanism 17.That is, in the present embodiment, driving mechanism 16 and driving mechanism 17 are made up of general parts.Further, in the present embodiment, the driving mechanism 16 and the driving mechanism 17 that are made up of general parts configure with the state staggered in the vertical direction.That is, in the present embodiment, driving mechanism 16 and driving mechanism 17 each other by change they configuration height and by generalization.
(main efficacy results of present embodiment)
As described above, in the present embodiment, form and share basal part 20, the first arm connecting portion 21 of arm 8 and the second arm connecting portion 22 split is formed, the first arm connecting portion 21 and the second arm connecting portion 22 are the mode of dismounting can be fixed on basal part 20.Therefore, in the present embodiment, after having assembled robot 1, even if adjust the gradient of arm 6 relative to horizontal direction by adjusting the first arm connecting portion 21 relative to the fixed position of basal part 20 and gradient, also can not change the gradient of arm 7 relative to horizontal direction.Further, after having assembled robot 1, even if adjust the gradient of arm 7 relative to horizontal direction by adjusting the second arm connecting portion 22 relative to the fixed position of basal part 20 and gradient, the gradient of arm 6 relative to horizontal direction can not also have been changed.Therefore, in the present embodiment, even if after having assembled robot 1, also can easily adjust separately relative to the gradient of horizontal direction relative to the gradient of horizontal direction and arm 7 arm 6.
And, in the present embodiment, because the split of basal part 20, first arm connecting portion 21, second arm connecting portion 22 is formed, even if therefore form shared arm 8, as long as but left and right directions elongated basal part 20 is formed as rectangular-shaped than the rear end face of basal part 20 towards the mode that rear side is outstanding with a part of cylinder portion 21a, 22a.Therefore, in the present embodiment, compared with situation about being integrally formed with the shared arm 8 manufactured by machining, the size for the manufacture of the material needed for shared arm 8 can be reduced, consequently can reduce the manufacturing cost of shared arm 8.
In the present embodiment, motor 27 is fixed on the first arm connecting portion 21, and motor 29 is fixed on the second arm connecting portion 22.Therefore, in the present embodiment, compared with being configured in the situation of the inside of body 9 with motor 27,29, the structure of driving mechanism 16,17 can be simplified.That is, when motor 27,29 is configured in the inside of body 9, need to arrange the structure being used for the power of motor 27,29 being delivered to after transmitting from body 9 outside in the lateral direction rear side further in the inside of shared arm 8, but in the present embodiment, as long as arrange the belt wheel 33,36 of the power transmitting motor 27,29.Therefore, in the present embodiment, compared with being configured in the situation of the inside of body 9 with motor 27,29, the structure of driving mechanism 16,17 can be simplified.
Further, in the present embodiment, because motor 27 is fixed on the first arm connecting portion 21, motor 29 is fixed on the second arm connecting portion 22, compared with being therefore configured in the situation of the inside of body 9 with motor 27,29, can reduce the height of body 9.And, in the present embodiment, because a part for the majority of motor 27 and the lower end side of motor 29 is given prominence to from the lower surface of shared arm 8 towards downside, compared with the situation being therefore integrally provided in the inside of shared arm 8 with motor 27,29, the height of shared arm 8 can be reduced.And, in the present embodiment, due to when observing from above-below direction, motor 27,29 is configured in than the position of body 9 by the outer circumferential side of body 9, and in the horizontal direction, a part for the majority of motor 27 and the lower end side of motor 29 is overlapping with body 9, therefore with motor 27,29 in the vertical direction compared with the situation of body 9 overlap, can in the vertical direction by the Distance Shortened between body 9 and shared arm 8.Therefore, in the present embodiment, can reduce hand 4,5 by minimum altitude (passing through line).
In the present embodiment, the axle center of reductor 28 and the axis deviation of motor 27 of joint portion 14 is formed.Therefore, in the present embodiment, as compared to the situation of motor 27 with reductor 28 arranged coaxial, the configuration free degree of motor 27 can be improved.Equally, in the present embodiment, owing to forming the axle center of reductor 30 in shutdown portion 15 and the axis deviation of motor 29, therefore with motor 29 with reductor 30 arranged coaxial situation compared with, the configuration free degree of motor 29 can be improved.Further, in the present embodiment, due to the axle center of reductor 28 and the axis deviation of motor 27, therefore, it is possible to air hose and distribution cable are passed in the through hole of the reductor 28 as hollow reducer.Equally, in the present embodiment, due to the axle center of reductor 30 and the axis deviation of motor 29, therefore, it is possible to the air hose of cooling and distribution cable are passed in the through hole of the reductor 30 as hollow reducer.
In the present embodiment, hand 4 is configured in the upside of arm 6, and hand 5 is configured in the downside of arm 7.Therefore, in the present embodiment, can prevent arm 6 and arm 7 from interfering, and can interval in the vertical direction between constriction hand 4 and hand 5.Further, in the present embodiment, due to can interval in the vertical direction between constriction hand 4 and hand 5, therefore, it is possible to reduce the hand 5 that is configured in the upside of hand 4 by minimum altitude (passing through line).
In the present embodiment, when observing from above-below direction, by arm 6 relative to shared arm 8 center of rotation C2, share that arm 8 connects relative to the center of rotation C3 of shared arm 8 successively relative to the center of rotation C1 of body 9, arm 7 linearly become V word.Therefore, in the present embodiment, as mentioned above, under the state that the end side of arm 6,7 is configured in rear side, hand 4 and hand 5 are complete overlapping in the vertical direction.Therefore, in the present embodiment, when the direction being moved into the action taking out of semiconductor crystal wafer by hand 4 is equidirectional with the direction being moved into the action taking out of semiconductor crystal wafer by hand 5, such as after the release being taken out of semiconductor crystal wafer by hand 4, even if make shared arm 8 not rotate relative to body 9, the action of being moved into semiconductor crystal wafer by hand 5 also can be started.Consequently, in the present embodiment, the productive temp time of robot 1 can be shortened.
(other embodiments)
Above-mentioned embodiment is an example of the preferred embodiment of the present invention, but is not limited thereto, and can implement various distortion in the scope not changing purport of the present invention.
In the above-described embodiment, the first arm connecting portion 21 and the second arm connecting portion 22 are formed as the bulk that the shape when observing from above-below direction is roughly L shape.Also the first arm connecting portion 21 and the second arm connecting portion 22 shape be formed as when observing from above-below direction is the bulk of roughly rectangle etc.In this case, sharing arm 8 shape be such as formed as when observing from above-below direction is elongated roughly rectangular bulk.Further, in this case, when observing from above-below direction, center of rotation C1, center of rotation C2, center of rotation C3 are also on the same line configurable.Further, sharing arm 8, also can be formed as shape when observing from above-below direction be roughly V-arrangement shape.
In the above-described embodiment, motor 27 is fixed on the first arm connecting portion 21, and motor 29 is fixed on the second arm connecting portion 22.May also be the inside that motor 27,29 is configured in body 9.Further, in the above-described embodiment, a part for motor 27,29 is given prominence to from the lower surface of shared arm 8 towards downside, but may also be the inside that motor 27,29 is integrally provided in shared arm 8.And in the above-described embodiment, when observing from above-below direction, motor 27,29 is configured in than body 9 position by the outer circumferential side of body 9, but may also be motor 27,29 and configure in mode overlapping with body 9 in the vertical direction.
In the above-described embodiment, arm 6,7 also can be made up of two arms that can mutually rotate.Further, in the above-described embodiment, the first arm connecting portion 21 and the second arm connecting portion 22 are formed as symmetrical relative to imaginary line L1 line, but the first arm connecting portion 21 and the second arm connecting portion 22 also can be formed as not symmetrical relative to imaginary line L1 line.Further, in the above-described embodiment, when observing from above-below direction, the axle center of motor 27 and the axis deviation of reductor 28, but motor 27 and reductor 28 also can arranged coaxial.Equally in the above-described embodiment, when observing from above-below direction, the axle center of motor 29 and the axis deviation of reductor 30, but motor 29 and reductor 30 also can arranged coaxial.Further, in the above-described embodiment, the conveying object of being carried by robot 1 is semiconductor crystal wafer, but other conveying object such as the glass substrate of liquid crystal display also can be carried by robot 1.
Claims (7)
1. an industrial robot, is characterized in that, described industrial robot comprises:
First hand and the second hand, described first hand and described second hand load conveying object;
First arm, described first hand is rotatably connected to the end side of described first arm;
Second arm, described second hand is rotatably connected to the end side of described second arm;
Share arm, described shared arm rotatably connects for the base end side of described first arm and the base end side of described second arm; And
Body, described body rotatably connects for described shared arm,
Described shared arm has:
Basal part, described basal part is connected with described body;
First arm connecting portion, described first arm connecting portion connects for the base end side of described first arm; And
Second arm connecting portion, described second arm connecting portion connects for the base end side of described second arm,
Described basal part, described first arm connecting portion and described second arm coupling part body are formed,
Described first arm connecting portion and described second arm connecting portion are the mode of dismounting can be fixed on described basal part.
2. industrial robot according to claim 1, is characterized in that,
The described basal part shape be formed as when observing from above-below direction is elongated rectangular rectangular-shaped,
Described first arm connecting portion and the described second arm connecting portion shape be formed as when observing from above-below direction is the bulk of roughly L shape,
When observing from above-below direction, described first arm connecting portion is fixed on one end of the length direction of described basal part, and described second arm connecting portion is fixed on the other end of the length direction of described basal part.
3. industrial robot according to claim 2, is characterized in that,
Described industrial robot has:
First motor, described first motor makes described first hand rotate relative to described first arm, and described first arm is rotated relative to described shared arm; And
Second motor, described second motor makes described second hand rotate relative to described second arm, and described second arm is rotated relative to described shared arm,
Described first motor is fixed on described first arm connecting portion, and described second motor is fixed on described second arm connecting portion.
4. industrial robot according to claim 3, is characterized in that,
Described industrial robot has:
First reductor, described first reductor forms the first joint portion as the coupling part between described first arm and described shared arm, and is connected with described first motor; And
Second reductor, described second reductor forms the second joint portion as the coupling part between described second arm and described shared arm, and is connected with described second motor,
When observing from above-below direction, the axle center of described first motor and the axis deviation of described first reductor, the axle center of described second motor and the axis deviation of described second reductor.
5. the industrial robot according to any one in claim 2 to 4, is characterized in that,
When observing from above-below direction, if using parallel with the minor face being formed as elongated rectangular described basal part and via described shared arm relative to the straight line of the center of rotation of described body as imaginary line,
Then when observing from above-below direction, described first arm connecting portion and described second arm connecting portion are formed as symmetrical relative to described imaginary line line.
6. the industrial robot according to any one in claim 1 to 5, is characterized in that,
Described industrial robot has:
First motor, described first motor makes described first hand rotate relative to described first arm, and described first arm is rotated relative to described shared arm; And
Second motor, described second motor makes described second hand rotate relative to described second arm, and described second arm is rotated relative to described shared arm,
Described first motor is fixed on described first arm connecting portion, and described second motor is fixed on described second arm connecting portion,
Described first motor at least partially and described second motor outstanding from the lower surface of described shared arm towards downside at least partially, and when observing from above-below direction, described first motor and described second motor configurations are than the position of described body by the outer circumferential side of described body.
7. the industrial robot according to any one in claim 1 to 6, is characterized in that,
When observing from above-below direction, what connected successively relative to the center of rotation of described shared arm relative to the center of rotation of described body, described second arm relative to the center of rotation of described shared arm, described shared arm by described first arm linearly becomes V word.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-142529 | 2014-07-10 | ||
| JP2014142529A JP6606319B2 (en) | 2014-07-10 | 2014-07-10 | Industrial robot |
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| CN105313113A true CN105313113A (en) | 2016-02-10 |
| CN105313113B CN105313113B (en) | 2017-09-01 |
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| CN201510390910.XA Active CN105313113B (en) | 2014-07-10 | 2015-07-06 | Industrial robot |
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| JP (1) | JP6606319B2 (en) |
| KR (1) | KR102339973B1 (en) |
| CN (1) | CN105313113B (en) |
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| JP7561568B2 (en) * | 2020-10-19 | 2024-10-04 | ニデックインスツルメンツ株式会社 | Industrial Robots |
| JP7564692B2 (en) * | 2020-11-24 | 2024-10-09 | ニデックインスツルメンツ株式会社 | Industrial Robots |
| KR102705682B1 (en) * | 2021-10-04 | 2024-09-12 | 니덱 인스트루먼츠 가부시키가이샤 | Industrial robot |
| JP2024106800A (en) * | 2023-01-27 | 2024-08-08 | ニデックインスツルメンツ株式会社 | ROBOT SYSTEM AND METHOD FOR CONTROLLING INDUSTRIAL ROBOT |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20160007420A (en) | 2016-01-20 |
| TW201607709A (en) | 2016-03-01 |
| JP6606319B2 (en) | 2019-11-13 |
| CN105313113B (en) | 2017-09-01 |
| JP2016016498A (en) | 2016-02-01 |
| TWI641459B (en) | 2018-11-21 |
| KR102339973B1 (en) | 2021-12-16 |
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