CN105300300A - Coated film thickness device for simultaneously measuring single-sided coated lens at multiple points and method thereof - Google Patents

Abstract

The invention provides a device and method for simultaneously measuring the coating thickness of a single-sided coated lens at multiple points. The device includes a light source, a spectroscopic device, a lens, a photoelectric displacement sensor, a signal amplifier, an optical signal processor and a computer; The light splitting device, the lens and the center of the light-receiving surface of the photoelectric displacement sensor are on the same optical path and arranged in sequence; the photoelectric displacement sensor, signal amplifier, optical signal processor and computer are electrically connected in sequence. The light source is divided into multiple beams by the spectroscopic device, projected onto the photoelectric displacement sensor through the lens, and the photoelectric displacement sensor amplifies the optical signal through the signal amplification device and then transmits it to the optical signal processor. The signal processor converts the optical signal into an electrical signal and then inputs it to the computer. The computer calculates the thickness of the film, which can realize simultaneous multi-point measurement of the coating thickness of the single-sided coated lens, and analyze the uniformity of the coating by comparing the coating thickness.

Description

Device and method for multi-point simultaneous measurement of coating thickness of single-sided coated lens

technical field

The invention belongs to the field of optical lens production, and is especially aimed at measuring the coating thickness of single-sided coated convex lenses and concave lenses produced in large quantities, and in particular relates to a multi-point simultaneously measuring coating thickness device and method for single-sided coated lenses.

Background technique

Whether it is life or military, optical lenses are essential. However, whether it is a resin lens or a glass lens, its own light transmittance is only about 91%, and some light will be reflected back on the two surfaces. The reflection of the lens can reduce the light transmittance and form interference in the retina to affect the image quality. The coating technology is the use of optical technology, by coating a certain thickness of single-layer or multi-layer optical film on the surface of the lens to obtain some new optical properties that the lens did not have before, so as to improve the ability of the lens to reflect light and enhance or reduce it. The light transmittance increases the light transmittance of the lens to 98%.

After coating, the transmittance of reflected light on the surface of the lens is reduced, which solves the problem that the lens is difficult to image under strong light, and prevents damage to vision caused by ultraviolet rays, infrared rays, and x-rays.

At present, there are mainly two kinds of films for lens coating: one is anti-reflection film. The other is to add dura mater. For lenses, the thickness of the coating is an important parameter, and the uniformity of the coating determines whether the lens can be used. Therefore, the measurement of the thickness of the film coated on the lens has become an indispensable link in the production.

Contents of the invention

The purpose of the present invention is to provide a device and method for simultaneously measuring the coating thickness of a single-sided coated lens at multiple points. The light output by the laser is divided into multiple beams through a spectroscopic device, so that simultaneous multi-point measurement of the coating thickness of a single-sided coated lens can be realized. , and analyze the uniformity of the coating by comparing the coating thickness.

The technical solution of the present invention is: a device for multi-point simultaneous measurement of the coating thickness of a single-sided coated lens, including a light source, a light splitting device, a lens, a photoelectric displacement sensor, a signal amplifier, an optical signal processor and a computer;

The light splitting device includes at least one half mirror and one total mirror; the total mirror is located on the reflected light path of the half mirror, and the incident light path of the half mirror is The included angle of the reflected light path of the half-transparent mirror is 90 degrees, the reflected light path of the half-mirror is the incident light path of the total mirror, the incident light path of the total mirror and the total reflection The included angle of the reflected optical path of the mirror is 90 degrees, and the transmitted optical path of the half mirror is parallel to the reflected optical path of the total mirror;

The center of the light source, the light splitter, the lens and the light receiving surface of the photoelectric displacement sensor are located on the same optical path and arranged in sequence; the photoelectric displacement sensor, signal amplifier, optical signal processor and computer are electrically connected in sequence;

The photoelectric displacement sensor is used to receive the light signal and transmit the light signal to the signal amplifier; the signal amplifier is used to convert the light signal into an electrical signal and input it to the computer; the computer is used to calculate the Coating thickness.

In the above scheme, the light-splitting device includes 6 half-mirrors and 3 total mirrors; the 6 half-mirrors are respectively the first half-mirror, the second half-mirror, the second half-mirror, The third half-mirror, the fourth half-mirror, the fifth half-mirror and the sixth half-mirror; the three total mirrors are respectively the first full-mirror and the second full-mirror Mirror and third full mirror;

The first half mirror, the second half mirror and the third half mirror are sequentially located on the same optical path;

The fifth half-mirror, the sixth half-mirror and the third full-mirror are sequentially located on the reflected light path of the first half-mirror;

The fourth half mirror and the second total mirror are sequentially located on the reflected light path of the second half mirror;

The first total reflection mirror is located on the reflection light path of the third half mirror.

In the above solution, the half mirror and the total mirror are on the same level.

In the above solution, the light source is a high-energy light source provided by a laser.

A detection method of a device for simultaneously measuring the coating thickness of a single-sided coated lens according to the multi-point, comprising the following steps:

The light source is divided into several parallel beams by the beam splitting device. Taking one of the beams as an example, the beam is projected onto the uncoated lens to be tested at a height of h from the optical axis, and the beam is first refracted by the uncoated lens and then passed through the air. Refraction, finally the light beam is projected onto the H position on the photoelectric displacement sensor, and the distance from the lens to the photoelectric displacement sensor is g;

Replace the uncoated lens with a single-sided coated lens, the light is refracted by the single-sided coated lens and then refracted by the air, and finally the beam is projected to the H' position on the photoelectric displacement sensor, and the photoelectric displacement sensor converts the signals of H and H' After being amplified by the signal amplification device, it is sent to the optical signal processor, and the optical signal processor converts the optical signal into an electrical signal and then inputs it to the computer, and the computer calculates the coating thickness; the film thickness The calculation formula is:

$\mathrm{<span\; class="notranslate">\; d</span>}<span\; class="notranslate">\; =</span><span\; class="notranslate">\; -</span>\frac{{\mathrm{<span\; class="notranslate">\; no</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}{\mathrm{<span\; class="notranslate">\; r</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; \&Delta;</span>}\mathrm{<span\; class="notranslate">\; the\; s</span>}}{<span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; g</span>}\mathrm{<span\; class="notranslate">\; h</span>}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; ghn</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; +</span>\mathrm{<span\; class="notranslate">\; r</span>}\mathrm{<span\; class="notranslate">\; \&Delta;</span>}\mathrm{<span\; class="notranslate">\; the\; s</span>}}$

Among them, d is the coating thickness of the lens, Δs is the displacement of the beam Δs=OH-OH', r is the single-sided radius of the lens, h is the height of the beam from the optical axis, and g is the light-receiving surface from the lens to be measured to the photoelectric displacement sensor The distance, n ₀ is the refractive index of the film, and the refractive index of air is 1.

The beneficial effects of the present invention are: the light outputted by the laser in the present invention is divided into multiple beams by the light splitting device, and projected onto the photoelectric displacement sensor through the lens, and the photoelectric displacement sensor amplifies the optical signal through the signal amplification device After that, it is transmitted to the optical signal processor, and the optical signal processor converts the optical signal into an electrical signal and then inputs it to the computer, and the computer calculates the thickness of the film, which can realize simultaneous multi-point measurement of the single-sided coated lens. Coating thickness, the uniformity of the coating is analyzed by comparing the coating thickness. Compared with the traditional test method that needs to use special instruments to cause certain damage to the sample lens, the present invention does not need to directly contact the sample, will not cause damage to the sample, and can be used directly after the measurement; compared with other current non-contact measurement methods, the present invention The invented method is simpler, convenient to operate, saves time and manpower, and has high economic benefits; the present invention is mainly aimed at the detection of mass-produced lenses, and can measure various single-sided coated convex lenses and concave lenses, using the same set of equipment that is Can.

Description of drawings

Fig. 1 is the specific implementation structure schematic diagram of an embodiment of the present invention;

Fig. 2 is a detailed schematic diagram of a spectroscopic device according to an embodiment of the present invention;

Fig. 3 is a schematic diagram of deviation of refracted light rays after the coating of the convex lens according to an embodiment of the invention;

Fig. 4 is a schematic diagram of the divergence of refracted light rays after the coating of the concave lens according to an embodiment of the invention.

In the figure: 1, light source; 2, spectroscopic device; 3, lens; 4, photoelectric displacement sensor; 5, signal amplifier; 6, optical signal processor; 7, and computer; 8, optical axis.

detailed description

The present invention will be described in further detail below in conjunction with the specific embodiments of the accompanying drawings, but the protection scope of the present invention is not limited thereto.

Fig. 1 is shown as a kind of embodiment of the coating thickness device of multi-point simultaneously measuring single-sided coated lens of the present invention, described multi-point simultaneously measuring the coating thickness device of single-sided coated lens comprises light source 1, spectroscopic device 2, lens 3. Photoelectric displacement sensor 4, signal amplifier 5, optical signal processor 6 and computer 7.

The center of the light receiving surface of the light source 1, the spectroscopic device 2, the lens 3 and the photoelectric displacement sensor 4 is located on the same optical path and arranged in sequence; the photoelectric displacement sensor 4, signal amplifier 5, optical signal processor 6 and The computer 7 is electrically connected in turn;

Described photoelectric displacement sensor 4 is used for receiving light signal, and light signal is sent to described signal amplifier 5; Said signal amplifier 5 is used for inputting into described computer 7 after light signal is converted into electric signal; Said computer 7 Used to calculate the coating thickness of the lens.

The lens 3 includes a single-sided coated lens and an uncoated lens, and the specifications of the single-sided coated lens and the uncoated lens are the same.

Described spectroscopic device 2 comprises at least a half-mirror and a total reflection mirror, and the half-mirror and a total reflection mirror are at the same level, and the total reflection mirror is positioned at the reflected light of the half-mirror. On the road, the angle between the incident light path of the half mirror and the reflected light path of the half mirror is 90 degrees, and the reflected light path of the half mirror is the incident light path of the total mirror , the angle between the incident light path of the total reflection mirror and the reflection light path of the total reflection mirror is 90 degrees, and the transmission light path of the half mirror is parallel to the reflection light path of the total reflection mirror. Preferably, the light splitting device 2 includes 6 half mirrors and 3 total mirrors, as shown in Figure 2, the 6 half mirrors are respectively the first half mirror 201, the second half mirror Two half mirrors 202, the third half mirror 203, the fourth half mirror 204, the fifth half mirror 205 and the sixth half mirror 206; 3 said total reflections The mirrors are respectively a first total reflection mirror 207, a second total reflection mirror 208 and a third total reflection mirror 209. The first half mirror 201, the second half mirror 202 and the third half mirror 203 are located on the same optical path in turn; the fifth half mirror 205, the sixth half mirror Anti-mirror 206 and the 3rd total reflection mirror 209 are positioned at the reflected optical path of described first half-mirror 201 successively; Described 4th half-mirror 204 and the second total reflection mirror 208 are positioned at described second The reflection optical path of the half mirror 202 ; the first total reflection mirror 207 is located on the reflection optical path of the third half mirror 203 .

Preferably, the light source 1 is a high-energy light source provided by a laser.

The transmitted light of the light source 1 through the first half mirror 201 is projected to the second half mirror 202, and the reflected light of the first half mirror 201 is projected to the fifth half mirror. mirror 205; the transmitted light of the second half mirror 202 is projected to the third half mirror 203, and the reflected light of the second half mirror 202 is projected to the fourth half mirror Half mirror 204; the transmitted light through the third half mirror 203 forms the first incident light beam, and the reflected light through the third half mirror 203 is projected onto the first total mirror 207 , the reflected light of the first total mirror 207 forms a second incident beam; the reflected light of the fourth half mirror 204 forms a third incident beam, and passes through the fourth half mirror The transmitted light of the mirror 204 is projected onto the second total reflection mirror 208, and the reflected light of the second total reflection mirror 208 forms the fourth road incident light beam; the transmitted light through the fifth half mirror 205 is projected into The reflected light of the sixth half mirror 206 and the fifth half mirror 205 forms a fifth incident light beam; the transmitted light through the sixth half mirror 206 is projected onto the first half mirror 206 Three total mirrors 209, the reflected light of the sixth half-mirror 206 forms the sixth incident beam; the reflected light of the third total mirror 209 forms the seventh incident beam, and the seven incident beams mutually Parallel, and the half mirror and the first full mirror are on the same horizontal plane, so that the seven incident light beams are projected onto the uncoated lens to be measured at the same height h from the optical axis 8, on the photoelectric displacement sensor 4 The H positions are on the same straight line.

A detection method of a device for simultaneously measuring the coating thickness of a single-sided coated lens according to the multi-point, comprising the following steps:

Under the condition that the single-sided radius r of the lens 3 is known, that is, the front radius or the rear radius, and the refractive index _n0 of the film material, the light source 1 is divided into seven parallel incident light beams through the light splitting device 2, Taking the first incident light beam as an example, the light beam is projected onto the uncoated lens to be tested at a height of 8h from the optical axis, the light beam is firstly refracted by the uncoated lens and then refracted by air, and finally the light beam is projected onto the photoelectric displacement sensor 4 H position, the distance from the lens to the photoelectric displacement sensor 4 is g, and g can be set by itself according to the situation;

Replace the uncoated lens with a single-sided coated lens, the light is refracted by the single-sided coated lens and then refracted by the air, and finally the light beam is projected to the H' position on the photoelectric displacement sensor 4, and the seven incident beams are on the photoelectric displacement sensor 4 The projection point above is on the same horizontal line, and the photoelectric displacement sensor 4 amplifies the signals of H and H' through the signal amplifying device 5 and then transmits them to the optical signal processor 6, and the optical signal processor 6 converts the light After the signal is converted into an electrical signal, it is input to the computer 7, and the computer 7 calculates the coating thickness.

The computer 7 simultaneously calculates the coating thicknesses of the seven incident light beams at the projection points on the lens 3 according to the above method, and analyzes the uniformity of the coatings by comparing the coating thicknesses.

The calculation formula of described film thickness is:

$\mathrm{<span\; class="notranslate">\; d</span>}<span\; class="notranslate">\; =</span><span\; class="notranslate">\; -</span>\frac{{\mathrm{<span\; class="notranslate">\; no</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}{\mathrm{<span\; class="notranslate">\; r</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; \&Delta;</span>}\mathrm{<span\; class="notranslate">\; the\; s</span>}}{<span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; g</span>}\mathrm{<span\; class="notranslate">\; h</span>}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; ghn</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; +</span>\mathrm{<span\; class="notranslate">\; r</span>}\mathrm{<span\; class="notranslate">\; \&Delta;</span>}\mathrm{<span\; class="notranslate">\; the\; s</span>}}$

Among them, d is the coating thickness of the lens, Δs is the displacement of the beam Δs=OH-OH', r is the single-sided radius of the lens, h is the height of the beam from the optical axis, and g is the light-receiving surface from the lens to be measured to the photoelectric displacement sensor The distance, n ₀ is the refractive index of the film, the refractive index of air is 1, and O is the center of the light-receiving surface of the photoelectric displacement sensor.

Convex lens and concave lens are the most common in production and processing at present. Utilize the present invention to measure convex lens and concave lens respectively, as shown in Fig. 3 and Fig. 4 respectively, the principle and method of measurement are the same.

Compared with the prior art, the light output by the laser in the present invention is divided into multiple beams through the spectroscopic device, and projected onto the photoelectric displacement sensor through the lens, and the photoelectric displacement sensor amplifies the optical signal through the signal amplification device It is transmitted to the optical signal processor, and the optical signal processor converts the optical signal into an electrical signal and then inputs it to the computer, and the computer calculates the thickness of the film, which can realize simultaneous multi-point measurement of the coating of a single-sided coated lens Thickness, the uniformity of the coating is analyzed by comparing the thickness of the coating.

The described embodiment is a preferred implementation of the present invention, but the present invention is not limited to the above-mentioned implementation, without departing from the essence of the present invention, any obvious improvement, replacement or modification that those skilled in the art can make Modifications all belong to the protection scope of the present invention.

Claims (5)

1. A coating thickness device for measuring single-sided coating lens at multiple points simultaneously, is characterized in that, comprises light source (1), spectroscopic device (2), lens (3), photoelectric displacement sensor (4), signal amplifier (5) , an optical signal processor (6) and a computer (7); Described splitting device (2) comprises at least 1 half-mirror and 1 total reflection mirror; The angle between the light path and the reflected light path of the half-mirror is 90 degrees, the reflected light path of the half-mirror is the incident light path of the total mirror, the incident light path of the total mirror and the The reflected light path angle of the total mirror is 90 degrees, and the transmitted light path of the half mirror is parallel to the reflected light path of the total mirror; The center of the light receiving surface of the light source (1), the spectroscopic device (2), the lens (3) and the photoelectric displacement sensor (4) is located on the same optical path and arranged in sequence; the photoelectric displacement sensor (4), The signal amplifier (5), the optical signal processor (6) and the computer (7) are electrically connected in sequence; The photoelectric displacement sensor (4) is used to receive the light signal and transmit the light signal to the signal amplifier (5); the signal amplifier (5) is used to convert the light signal into an electrical signal and then input it to the computer (7); the computer (7) is used to calculate the coating thickness of the lens. 2. multi-point according to claim 1 simultaneously measures the coating thickness device of single-sided coating lens, is characterized in that, described spectroscopic device (2) comprises 6 half mirrors and 3 total mirrors; 6 Described half-mirror is respectively the first half-mirror (201), the second half-mirror (202), the third half-mirror (203), the fourth half-mirror ( 204), the fifth half-mirror (205) and the sixth half-mirror (206); 3 described total mirrors are respectively the first total mirror (207), the second total mirror (208 ) and the third total mirror (209); The first half mirror (201), the second half mirror (202) and the third half mirror (203) are sequentially located on the same optical path; The fifth half mirror (205), the sixth half mirror (206) and the third total mirror (209) are sequentially located on the reflected light path of the first half mirror (201) ; The fourth half mirror (204) and the second total mirror (208) are sequentially located on the reflected light path of the second half mirror (202); The first total reflection mirror (207) is located on the reflected light path of the third half mirror (203). 3. The device for simultaneously measuring the coating thickness of a single-sided coated lens at multiple points according to claim 1 or 2, wherein the half mirror and the total mirror are on the same horizontal plane. 4. The device for simultaneously measuring the coating thickness of a single-sided coated lens at multiple points according to claim 1, wherein the light source (1) is a high-energy light source provided by a laser. 5. a kind of detection method of the coating thickness device of multi-point simultaneously measuring single-sided coating lens according to claim 1, it is characterized in that, comprises the following steps: The light source (1) is divided into several beams parallel to each other through the beam splitting device (2). Taking one of the beams as an example, the beam is projected onto the uncoated lens to be tested at a height of h from the optical axis (8). First refracted by the uncoated lens and then refracted by air, and finally the light beam is projected onto the H position on the photoelectric displacement sensor (4), and the distance from the lens to the photoelectric displacement sensor (4) is g; Replace the uncoated lens with a single-sided coated lens, the light is refracted by the single-sided coated lens and then refracted by air, and finally the light beam is projected onto the H' position on the photoelectric displacement sensor (4), and the photoelectric displacement sensor (4) will The signals of H and H' are amplified by the signal amplifying device (5) and sent to the optical signal processor (6), and the optical signal processor (6) converts the optical signal into an electrical signal and then inputs it to the Computer (7), the computer (7) carries out the calculation of coating film thickness; The calculation formula of described film thickness is: $\mathrm{<span\; class="notranslate">\; d</span>}<span\; class="notranslate">\; =</span><span\; class="notranslate">\; -</span>\frac{{\mathrm{<span\; class="notranslate">\; no</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}{\mathrm{<span\; class="notranslate">\; r</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; \&Delta;</span>}\mathrm{<span\; class="notranslate">\; the\; s</span>}}{<span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; g</span>}\mathrm{<span\; class="notranslate">\; h</span>}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; ghn</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; +</span>\mathrm{<span\; class="notranslate">\; r</span>}\mathrm{<span\; class="notranslate">\; \&Delta;</span>}\mathrm{<span\; class="notranslate">\; the\; s</span>}}$ Among them, d is the coating thickness of the lens, Δs is the displacement of the beam Δs=OH-OH', r is the single-sided radius of the lens, h is the height of the beam from the optical axis, and g is the light-receiving surface from the lens to be measured to the photoelectric displacement sensor The distance, n ₀ is the refractive index of the film, and the refractive index of air is 1.