CN105296943A - Manufacturing method of target assembly - Google Patents
Manufacturing method of target assembly Download PDFInfo
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- CN105296943A CN105296943A CN201410370004.9A CN201410370004A CN105296943A CN 105296943 A CN105296943 A CN 105296943A CN 201410370004 A CN201410370004 A CN 201410370004A CN 105296943 A CN105296943 A CN 105296943A
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Abstract
The invention discloses a manufacturing method of a target assembly. The manufacturing method comprises the steps that a target made of molybdenum silicon material is provided; a to-be-welded surface of the target is subjected to sand blasting; the target is subjected to washing treatment after the sand blasting; the to-be-welded surface of the target is subjected to activating treatment after the washing treatment; a metal coating layer is formed on the to-be-welded surface of the target by adopting a chemical plating technology after the activating treatment; and the target is welded to a back plate by utilizing the metal coating layer. With the adoption of the manufacturing method of the target assembly, the target assembly formed by the molybdenum silicon material has sufficient binding rate and bonding strength.
Description
Technical field
The present invention relates to field of semiconductor manufacture, particularly relate to a kind of making method of target material assembly.
Background technology
Generally, target material assembly is by meeting the target of sputtering performance and forming with backboard.Described backboard can be assembled in sputtering base station at described target material assembly and play a supporting role, and can heat conduction.
In sputter procedure, the Working environment of described target material assembly is relatively more severe, and such as, target material assembly working temperature is higher.And it is cold by force that the side of target material assembly applies water coolant, and under opposite side is in the high vacuum environment of 10-9Pa, form huge pressure difference thus in relative two sides of target material assembly; Moreover target material assembly is in high-voltage electric field, magnetic field, can be subject to the bombardment of various particle.Under rugged environment like this, if the bonding strength in target material assembly between target and backboard is not high, target may be out of shape, ftracture under heating condition, may come off mutually with the backboard combined, make sputtering cannot reach the uniform effect of sputtering, also may cause damage to sputtering base station simultaneously.Therefore need a kind of effective welding process, to make target and backboard realize reliable connection, meet the needs produced, use target steady in a long-term.
Different-metal material welding is a procedure very crucial in target material assembly production process, and different targets needs to use different welding process welding.
Molybdenum (Mo) silicon (Si) material is widely used in unicircuit plated film industry, wide market.China is global maximum storage and the producing country of tungsten, but the Application and Development of China to molybdenum silicon materials is still in the primary stage, also fails to form production capacity, and therefore China has very large potentiality in the exploitation in this field.The target material assembly that molybdenum silicon materials are formed need weld with the backboard of other metallic substance before being used for sputter coating equally, and the combination rate of welding and bonding strength directly affect the use properties of molybdenum silicon target component.
But the various solders (In, SnAgCu or Sn etc.) of molybdenum silicon materials and popular all do not have good bonding properties, if directly welded with backboard by molybdenum silicon materials, then the target material assembly of required combination rate and bonding strength cannot be obtained.
Summary of the invention
The problem that the present invention solves is to provide a kind of making method of target material assembly, has enough combination rate and bonding strength with the target material assembly making molybdenum silicon materials be formed.
For solving the problem, the invention provides a kind of making method of target material assembly, comprising:
There is provided target, described target is molybdenum silicon materials;
Sandblasting is carried out to the junction to be welded of described target;
After described sandblasting, flushing process is carried out to described target;
After described target being carried out to described flushing process, activation treatment is carried out to the junction to be welded of described target;
After described activation treatment, chemical plating technology is utilized to form metal plating in the junction to be welded of described target;
Described metal plating is utilized described target and backboard to be welded together.
Optionally, described flushing process adopts water blast gun to rinse, and the described flushing pressure rinsing process employing is 0.3Mpa ~ 1.3Mpa.
Optionally, after carrying out described flushing process, and before carrying out described activation treatment, the step of oil removal treatment is also comprised.
Optionally, described oil removal treatment adopts electrochemical deoiling technique.
Optionally, described electrochemical deoiling technique comprises electrochemical deoiling liquid wash phase, hot water wash phase and cold water wash phase.
Optionally, described electrochemical deoiling liquid is alkali electroless degreasing fluid.
Optionally, described plating process comprises and stirring described chemical plating fluid, and churning time is 2min ~ 3min.
Optionally, adopt in described plating process pH value be 4.6 ~ 4.8 chemical plating fluid, and adjusted the pH value of described chemical plating fluid by ammoniacal liquor.
Optionally, the plating time of described chemical plating technology is 25min ~ 35min.
Optionally, the sand grains that described sandblasting adopts is No. 46 white fused aluminas, and the air pressure range that described sandblasting adopts is 0.20Mpa ~ 0.30Mpa.
Optionally, in described sandblasting process, the nozzle of sand-blasting gun is 10cm ~ 15cm to the distance range of described target junction to be welded, and the direction of No. 46 white fused aluminas and the angle of described target junction to be welded of described nozzle ejection are less than 90 °.
Optionally, the activator that described activation treatment adopts is the mixing solutions of nitric acid, hydrofluoric acid and water, and the soak time of described activation treatment is 50s ~ 70s.
Compared with prior art, technical scheme of the present invention has the following advantages:
In technical scheme of the present invention, molybdenum silicon materials target is first provided, then sandblasting is carried out to the junction to be welded of described target, after described sandblasting, flushing process is carried out to described target, after described target being carried out to described flushing process, activation treatment is carried out to the junction to be welded of described target, after described activation treatment, utilize chemical plating technology to form metal plating in the junction to be welded of described target, utilize described metal plating described target and backboard to be welded together.Metal plating is obtained in the junction to be welded of molybdenum silicon materials target owing to adopting the method for electroless plating, thus greatly improve the welding property of molybdenum silicon materials target and other material, reliable connection is realized to make molybdenum silicon materials target and backboard, namely the target material assembly making molybdenum silicon materials be formed has enough combination rate and bonding strength, meets the needs that target material assembly long-term stability uses.
Meanwhile, described flushing processes surface attachments such as can removing target sand grains residual in sandblasting, mechanical workout or storage process.These surface attachments sticking power is on the target surface little, if do not removed before formation metal plating, can affect the bonding strength of metal plating and target, and then affect welding quality.And these surface attachments can be made to be removed by rinsing process, prevent them from having a negative impact to the formation of subsequent metal coating, improve welding quality.
Further, the described flushing pressure rinsing process employing is 0.3Mpa ~ 1.3Mpa.Remove totally if the surface attachments such as flushing pressure is lower than 0.3Mpa, sand grains are difficult to be rinsed, cause the follow-up metal plating formed in junction to be welded to engage insecure with (welding) of junction to be welded; And if flushing pressure is higher than 1.3Mpa, the rough layer that above-mentioned sandblasting produces can be affected, and then affect the thickness evenness of metal plating.And the junction to be welded of target is after the hydraulic pressure that pressure is 0.3Mpa ~ 1.3Mpa rinses, the metal layer thickness of follow-up formation is evenly consistent, and appearance luster is better, better quality, thus the welding strength improving final target material assembly.
Further, after described flushing process, oil removal treatment is carried out.The cutting fluid that target remains in sandblasting, mechanical workout or storage process, lubrication wet goods greasy dirt can affect the formation of subsequent metal coating equally.If do not carry out described oil removal treatment, these greasy dirts can affect the quality of subsequent metal coating, make metal plating thinner, even do not plate metal plating.And after oil removal treatment, just can remove these greasy dirts, thus ensure the formation of subsequent metal coating, improve welding quality.
Accompanying drawing explanation
Fig. 1 to Fig. 8 is structural representation corresponding to each step of making method of the target material assembly that the embodiment of the present invention provides.
Embodiment
As described in background, adopt existing welding process, by molybdenum silicon materials and backboard direct solder bond intensity not high, do not reach the requirement of semi-conductor target, namely cannot obtain the target material assembly of the molybdenum silicon materials of required combination rate and bonding strength.
For this reason, the invention provides a kind of formation method of new target material assembly, described method first provides molybdenum silicon materials target, then sandblasting is carried out to the junction to be welded of described target, after described sandblasting, flushing process is carried out to described target, after described target being carried out to described flushing process, activation treatment is carried out to the junction to be welded of described target, after described activation treatment, utilize chemical plating technology to form metal plating in the junction to be welded of described target, utilize described metal plating described target and backboard to be welded together.Metal plating is obtained in the junction to be welded of molybdenum silicon materials target owing to adopting the method for electroless plating, thus greatly improve the welding property of molybdenum silicon materials target and other material, reliable connection is realized to make molybdenum silicon materials target and backboard, namely the target material assembly making molybdenum silicon materials be formed has enough combination rate and bonding strength, meets the needs that target material assembly long-term stability uses.
For enabling above-mentioned purpose of the present invention, feature and advantage more become apparent, and are described in detail specific embodiments of the invention below in conjunction with accompanying drawing.
The embodiment of the present invention provides a kind of making method of target material assembly, incorporated by reference to referring to figs. 1 to Fig. 8.
Please refer to Fig. 1, provide target 100, the material of target 100 is molybdenum silicon materials.
In the present embodiment, the material of target 100 can be by purity be 99.9% or more molybdenum and the alloy that formed of silicon.Concrete, the purity of molybdenum and silicon can be 3N5 (99.95%), 4N5 (99.995%) or 5N (99.999%).In addition, the shape of target 100 can design according to the actual requirement of applied environment, sputtering equipment, such as, be specifically as follows any one in circle, rectangle, annular, taper shape or other analogous shapes (comprise regular shape and irregularly shaped).Be the circular target of 310mm with diameter in the present embodiment be example.Target 100 thickness can be 12mm, and thickness can add the process redundancy of 1 millimeter to 3 millimeters in size.The object increasing process redundancy provides well-to-do processing space to the procedure of processing formed after target material assembly.
Please continue to refer to Fig. 1, polished finish is carried out to the junction 100a to be welded of target 100.Polished finish object is removed the oxide skin of target 100, makes the junction 100a smooth to be welded of target 100.
Polished finish is carried out to the junction 100a to be welded of target 100 and can adopt the machining process such as polishing, lathe or turning.It is polish with water-based sand paper from coarse to fine that the present embodiment carries out polished finish.Specifically, first use the surface of flint paper (the present embodiment is No. 160 water-based sand paper) target 100 of polishing (by target 100 all surfaces or only the junction 100a to be welded of target 100 is carried out polished finish), the polishing time can be generally about 10min; Then fine sandpaper (the present embodiment is No. 400 water-based sand paper) is used to continue the surface (by target 100 all surfaces or only the junction 100a to be welded of target 100 is carried out polished finish) of polishing target 100, the polishing time can be generally 5min ~ 10min, so just can obtain the flour milling of smooth.When polishing, water-based sand paper is attached on the rotating disk of sharpening machine, pins target 100 (needing the surface of polishing towards sand paper) and grinds on sand paper.Sharpening machine rotating speed can be 400 ~ 500 turns/min (r/min).
Please refer to Fig. 2, sandblasting is carried out to the junction 100a to be welded of described target 100, thus junction 100a to be welded is become have the junction 100b to be welded (namely forming coarse junction 100b to be welded) of rough layer (do not mark, represent rough layer with stain in Fig. 2).
The metal plating that the effect of sandblasting mainly makes target 100 be formed when carrying out electroless plating is shaggy coating, thus reduce the surface tension of this coating, improve the bonding force of this coating and target 100 body, be not easy to make this coating to come off from target 100 body.
Concrete, adopt and pour No. 46 white fused aluminas into sandblast machine, by air pressure, sand grains is injected into junction 100a to be welded.Surface quality is made to reach setting requirement by control sand grains size and air pressure.
In the present embodiment, why use No. 46 white fused aluminas, more relevant with the hardness of molybdenum silicon materials.Therefore the hardness of molybdenum silicon materials is comparatively large adopts No. 46 white fused aluminas that hardness is larger equally, to form the uneven surface with enough roughness.
In the present embodiment, air-pressure controlling is at about 0.20Mpa ~ 0.30Mpa.Air pressure can not be too high, this is because molybdenum silicon materials matter is crisp, if be greater than 0.30MPa, then the power of sandblasting is too large, makes the crest line place of molybdenum silicon materials target 100 occur collapsing angle phenomenon, affects product appearance and integrity.If air pressure is less than 0.20MPa, being then short of power of sandblasting, makes the mean depth in the junction hole to be welded of target 100 too little, affects the bonding force of the junction to be welded of follow-up metal plating and target 100.
In the present embodiment, the nozzle of sand-blasting gun is 10cm ~ 15cm to the distance range of the junction 100a to be welded of target 100 shown in Fig. 1.The angle that nozzle sprays the direction of No. 46 white fused aluminas and the junction to be welded of target 100 is that non-perpendicular angled relationships is (namely except 90 °, other angle being less than 180 °), preferred angle scope is 30 ° ~ 60 °, and homogeneity and the coverage of such sandblasting are more guaranteed.Near sprayed molybdenum silicon materials target 100 crest line, preferably make its distance apart from nozzle be about 15cm in addition during position, angle preferably 30 ° ~ 60 ° can effectively prevent from collapsing angle phenomenon.
Blasting craft finally forms at the junction 100b to be welded of molybdenum silicon materials target 100 rough layer that mean depth is 6 μm ~ 10 μm.
Please refer to Fig. 3, after described sandblasting, flushing process is carried out to target 100.In the present embodiment, the water 201 that described flushing process adopts water blast gun 200 to spray is to rinse.Wherein water 201 can be tap water, and flush time can be 2min.
Described flushing processes surface attachments such as can removing target 100 sand grains residual in sandblasting, mechanical workout or storage process.The sticking power of these surface attachments on target 100 surface is little, if do not removed before formation metal plating, can affect the bonding strength of metal plating and target 100, and then affect welding quality.And these surface attachments can be made to be removed by rinsing process, prevent them from having a negative impact to the formation of subsequent metal coating, improve welding quality.
In existing method, after blasting craft, usually also target is cleaned.But existing methodical cleaning is normally cleaned under condition of normal pressure, even adopts clean cloth to clean.But, even if adopt existing method repeatedly repeatedly to clean, still above-mentioned dirt settling cannot be removed well.
And in the present embodiment, adopt purging method, utilize the shock action of the current of high pressure, above-mentioned dirt settling and target are departed from, thus reach good dirt settling removal effect.
In the present embodiment, the described flushing pressure rinsing process employing is 0.3Mpa ~ 1.3Mpa.If the surface attachments such as flushing pressure is lower than 0.3Mpa, sand grains are difficult to be rinsed removal, the follow-up metal plating formed in junction to be welded is caused to engage insecure with (welding) of junction to be welded; And if flushing pressure is higher than 1.3Mpa, the rough layer that above-mentioned sandblasting produces can be affected, and then affect the thickness evenness of metal plating.And the junction 100b to be welded of target 100 is 0.3Mpa ~ 1.3Mpa and after rinsing through excess pressure, the metal layer thickness of follow-up formation is evenly consistent, and appearance luster is better, better quality, thus the welding strength improving final target material assembly.
Please refer to Fig. 4, after described flushing process, carry out oil removal treatment.In the present embodiment, described oil removal treatment adopts electrochemical deoiling technique.Target 100 is immersed in electrochemical deoiling liquid 300 by described electrochemical deoiling technique, to remove target 100 cutting fluid residual in sandblasting, mechanical workout or storage process, lubrication wet goods greasy dirt.Described oil removal treatment mainly removes the greasy dirt on junction 100b to be welded, but the greasy dirt on other surface of target 100 also can have influence on face of weld 100b sometimes, therefore removes in the lump.
The cutting fluid that target 100 remains in sandblasting, mechanical workout or storage process, lubrication wet goods greasy dirt can affect the formation of subsequent metal coating equally.And above-mentioned flushing process is difficult to remove these greasy dirts.If do not carry out described oil removal treatment, these greasy dirts can affect the quality of subsequent metal coating, make metal plating thinner, even do not plate metal plating.And after oil removal treatment, just can remove these greasy dirts, thus ensure the formation of subsequent metal coating, improve welding quality.
In the present embodiment, described electrochemical deoiling technique can comprise electrochemical deoiling liquid wash phase, hot water wash phase and cold water wash phase.
Please continue to refer to Fig. 4, at electrochemical deoiling liquid wash phase, the electrochemical deoiling of employing can be the alkali electroless degreasing fluid 300 of heat.Utilize saponification and the emulsifying effect of alkali electroless degreasing fluid 300 pairs of greases of heat, target 100 surface and oil contaminant is removed.Alkali electroless degreasing fluid 300 generally includes two portions: a part is alkaline matter, as sodium hydroxide, sodium carbonate etc.; Another part is the surfactant such as water glass, emulsifying agent.The saponification of alkaline matter removes saponifiable oil, and the emulsifying effect of tensio-active agent removes not saponifiable oil.Technique is simple, processing ease, with low cost, degreasing fluid is nontoxic, the feature such as nonflammable to use alkali electroless degreasing fluid 300 to have.The component of concrete alkali electroless degreasing fluid 300 can be: sodium hydroxide 30g/L ~ 50g/L, sodium carbonate 40g/L ~ 60g/L, tertiary sodium phosphate 15g/L ~ 30g/L, emulsifying agent 3g/L ~ 5g/L.Treatment temp can be 60 DEG C ~ 80 DEG C, and the treatment time can be 5min ~ 10min, thus reaches good deoiling effect.
At hot water wash phase (not shown), adopt the hot water of 60 DEG C ~ 80 DEG C to clean, the scavenging period of hot water wash phase can be 2min.
At cold water wash phase (not shown), adopt clear water second adverse current rinsing or spray, can carry out at ambient temperature, the scavenging period of cold water wash phase can be 2min.
By the oil removal treatment of above-mentioned three phases, the present embodiment obtains the target 100 of each clean surface, thus ensures that the follow-up upper metal layer thickness being formed in target 100 junction 100b to be welded is even, and quality is good, strong with target 100 bonding force.
Please refer to Fig. 5, after described oil removal treatment, carry out activation treatment to the junction 100b to be welded of target 100, target 100 is immersed in activator 400 by described activation treatment to carry out.
The activation energy that activation treatment is the junction 100b to be welded in order to increase target 100 is carried out to the junction 100b to be welded of target 100, the reactive behavior of the junction 100b to be welded of target 100 is strengthened, increase the speed of the electroless metal layer of the junction 100b to be welded of target 100, avoid metal plating to be combined serious problems loosely with the junction 100b to be welded of target 100.
The selection of activator 400 is relevant with target 100 material, if the activation energy that can increase the junction 100b to be welded of target 100, the reactive behavior of the junction 100b to be welded of target 100 is strengthened activator can.In the present embodiment, the activator 400 that activation treatment adopts can be the mixing solutions of hydrofluoric acid (massfraction 40% of solute) and water, and both volume ratios can be 1:4 to 1:8, and the time of activation treatment can be 50s ~ 70s.
After described activation treatment, clean can be carried out to the junction 100b to be welded of target 100.
Incorporated by reference to reference to figure 6 and Fig. 7, in described activation treatment and after cleaning, utilize chemical plating technology to form metal plating on the junction 100b to be welded of target 100, target 100 is immersed in chemical plating fluid 500 shown in Fig. 6 and carries out by described chemical plating technology.In the present embodiment, concrete nickel is example, and the junction 100b to be welded of target 100 carries out Nickel Plating Treatment, forms metal nickel dam 110 shown in Fig. 7.
When carrying out Nickel Plating Treatment nickel plating, control chemical plating fluid 500 temperature at 86 DEG C ~ 90 DEG C, chemical plating fluid 500 temperature affects the sedimentation velocity of coating, the stability of chemical plating fluid 500 and the quality of coating.The speed of electroless plating raises with temperature and speeds, but chemical plating fluid 500 temperature is too high, chemical plating fluid 500 can be made again unstable, self-decomposition easily occurs, therefore should selective temperature at 86 DEG C ~ 90 DEG C, and keep this temperature as far as possible.General alkali electroless bath temperature is lower, and it is faster than acid chemical plating liquid in the sedimentation velocity of lesser temps, but temperature increases, and plating speed improves fast not as acid chemical plating liquid.Temperature, except impact plating speed, also can affect quality of coating.Temperature raises, plating speed is fast, and in coating, phosphorus content declines, and the stress of coating and porosity increase, and corrosion resisting property reduces, and therefore, in nickel process, temperature controls evenly very important.Preferably maintain the temperature change of solution in ± 2 DEG C, if temperature fluctuation is excessive in plating process, sheet coating can occur, quality of coating is bad and affect binding force of cladding material.
The impact of pH value on chemical plating fluid 500 and coating is very large, and it is must the strict important factor controlled in processing parameter.In acid chemical plating nickel process, pH value has great impact to sedimentation velocity and deposit in acidic electroless Ni electrolyte.Rise with pH value, the sedimentation velocity of nickel is accelerated, and the phosphorus content of coating declines simultaneously.PH value change also can affect stress distribution in coating, and the coating that the chemical plating fluid that pH value is high obtains is phosphorous low, shows as tensile stress, otherwise the phosphorous height of the coating that the chemical plating fluid that pH value is low obtains, shows as stress.The chemical nickel-plating solution concrete to each, has an optimal pH value range, and in Ni-Speed, is applicable to the pH value of employing 4.6 ~ 4.8.
In chemical nickel plating plating process, along with the deposition of nickel-phosphorus, H+ constantly generates, and the pH value of chemical plating fluid 500 constantly declines, and therefore, must adjust in time, maintain the pH value of chemical plating fluid 500, its fluctuation range is controlled within native 0.2 scope in production process.The pH value of adjustment chemical plating fluid 500, uses diluted ammoniacal liquor, carefully to carry out when stirring.When adopting different alkali lye to adjust the pH value of chemical plating fluid 500, also different on the impact of chemical plating fluid 500.
When adjusting the pH value of chemical plating fluid 500 with ammoniacal liquor in the present embodiment, except in and chemical plating fluid 500 in H+ except, Ni2+ in amino molecule in chemical plating fluid 500 and chemical plating fluid 500 and complexing agent also can generate Compound complex, reduce Ni2+ concentration free in chemical plating fluid 500, effectively inhibit the precipitation of phosphorous acid nickel, improve the stability of chemical plating fluid 500.
Suitable stirring is carried out to chemical plating fluid 500 and can improve chemical plating fluid 500 stability and quality of coating.First stir and can prevent chemical plating fluid 500 local superheating, when preventing supplementary chemical plating fluid 500, local concentration of component is too high, local ph acute variation, is conducive to the stability improving chemical plating fluid 500.In addition, stir and accelerate the speed that reaction product leaves workpiece surface, be conducive to improving sedimentation velocity, ensureing quality of coating, not easily there is the defects such as pore in coating surface.But excessive agitation is also worthless, because excessive agitation easily causes workpiece local plating leakage, and makes nickel on wall of container and bottom deposit, time serious, even cause chemical plating fluid 500 to decompose.In addition, alr mode and intensity also can affect the phosphorus content of coating.Plastics tubing is adopted evenly slowly to stir 2min ~ 3min in the present embodiment.
Chemical plating fluid loading capacity refers to workpiece plating area and the ratio using chemical plating fluid volume.During chemical nickel plating plating, loading capacity is very large to chemical plating fluid stability influence, allows the size of loading capacity to form relevant with plating conditions and chemical plating fluid.Often kind of chemical plating fluid has all specified best loading capacity in triturating, should throw in workpiece by regulation and add concentrated solution in time, so just can receive best plating effect during plating.
In the present embodiment, the loading capacity of chemical plating fluid 500 is at 0.5dm
2/ L ~ 1.5dm
2/ L.Loading capacity is excessive, and namely catalytic surface is excessive, then deposition reaction is violent, and easily generation phosphorous acid nickel precipitates and affects stability and the coating performance of chemical plating fluid 500; Loading capacity is too small, and impurity particle small in chemical plating fluid 500 just can become catalytic active center and cause deposition, easily causes chemical plating fluid 500 to decompose.Therefore, for ensureing the best effect of plating, loading capacity should be controlled at optimum range.
Plating time length plating time length of chemical plating technology affects the metallic nickel layer thickness on molybdenum silicon materials target 100 surface, time is longer, thickness can suitably increase, plating time in the present embodiment is 25min ~ 35min, finally form on each surface of target 100 the metal nickel dam 110 that thickness is about 8 μm ~ 10 μm, the metal nickel dam 110 of this thickness is conducive to realizing follow-up welding.
The metal nickel dam 110 of outward appearance, excellent performance is obtained by controlling each processing parameter.
Please refer to Fig. 8, utilize the nickel dam of metal shown in Fig. 7 110 target 100 and backboard 600 to be welded together, in Fig. 8, omit the metal nickel dam 110 in display Fig. 7.
In the present embodiment, the material of backboard 600 material can be the alloy etc. of copper, aluminium or copper aluminium.
In concrete welding process, soldering (such as welding with pure indium solder) can be carried out to target 100 and backboard 600, form target material assembly.If directly molybdenum silicon materials target 100 is welded with backboard 600, molybdenum silicon materials target 100 and backboard 600 can not well and solder carry out boundary moisture and seam, namely now welding strength is about 0MPa (substantially not having bonding force).And the present embodiment passes through above steps, the to be welded junction 100b of molybdenum silicon materials target 100 after electroless plating process can be made to be formed with metal nickel dam 110, thus make after electroless plating welding operation, molybdenum silicon materials target 100 and backboard 600 have very high bonding strength, and namely now welding strength is about 5MPa (its bonding strength is upper limit (UL) bonding strength).Therefore can produce high-quality target material assembly by above-mentioned steps, finally be produced the sputtering target material subassembly product of size qualification again by roughing and precision work.
In summary, the embodiment of the present invention adopts the method for electroless plating to obtain metal nickel dam in the junction to be welded of molybdenum silicon materials target, thus greatly improve the welding property of molybdenum silicon materials and other material, reliable connection is realized to make molybdenum silicon materials target and backboard, namely the target material assembly making molybdenum silicon materials be formed has enough combination rate and bonding strength, meets the needs that target material assembly long-term stability uses.
Although the present invention discloses as above, the present invention is not defined in this.Any those skilled in the art, without departing from the spirit and scope of the present invention, all can make various changes or modifications, and therefore protection scope of the present invention should be as the criterion with claim limited range.
Claims (10)
1. a making method for target material assembly, is characterized in that, comprising:
There is provided target, described target is molybdenum silicon materials;
Sandblasting is carried out to the junction to be welded of described target;
After described sandblasting, flushing process is carried out to described target;
After described target being carried out to described flushing process, activation treatment is carried out to the junction to be welded of described target;
After described activation treatment, chemical plating technology is utilized to form metal plating in the junction to be welded of described target;
Described metal plating is utilized described target and backboard to be welded together.
2. the making method of target material assembly as claimed in claim 1, is characterized in that, described flushing process adopts water blast gun to rinse, and the flushing pressure that described flushing process adopts is 0.3Mpa ~ 1.3Mpa.
3. the making method of target material assembly as claimed in claim 1, is characterized in that, after carrying out described flushing process, and before carrying out described activation treatment, also comprises the step of oil removal treatment.
4. the making method of target material assembly as claimed in claim 3, is characterized in that, described oil removal treatment adopts electrochemical deoiling technique.
5. the making method of target material assembly as claimed in claim 4, it is characterized in that, described electrochemical deoiling technique comprises electrochemical deoiling liquid wash phase, hot water wash phase and cold water wash phase.
6. the making method of target material assembly as claimed in claim 5, it is characterized in that, described electrochemical deoiling liquid is alkali electroless degreasing fluid.
7. the making method of target material assembly as claimed in claim 1, is characterized in that, described plating process comprises and stirring described chemical plating fluid, and churning time is 2min ~ 3min.
8. the making method of target material assembly as claimed in claim 1, is characterized in that, adopt in described plating process pH value be 4.6 ~ 4.8 chemical plating fluid, and adjusted the pH value of described chemical plating fluid by ammoniacal liquor.
9. the making method of target material assembly as claimed in claim 1, is characterized in that, the sand grains that described sandblasting adopts is No. 46 white fused aluminas, and the air pressure range that described sandblasting adopts is 0.20Mpa ~ 0.30Mpa.
10. the making method of target material assembly as claimed in claim 1, is characterized in that, the activator that described activation treatment adopts is the mixing solutions of nitric acid, hydrofluoric acid and water, and the soak time of described activation treatment is 50s ~ 70s.
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| CN107322466A (en) * | 2017-09-05 | 2017-11-07 | 成都凯赛尔电子有限公司 | Tungsten target target surface Ginding process |
| CN107620048A (en) * | 2016-07-14 | 2018-01-23 | 宁波江丰电子材料股份有限公司 | The manufacture method of silicon target structure and its manufacture method and silicon target component |
| CN108202292A (en) * | 2016-12-20 | 2018-06-26 | 宁波江丰电子材料股份有限公司 | Aluminium target production method |
| CN111451190A (en) * | 2019-01-21 | 2020-07-28 | 宁波江丰电子材料股份有限公司 | Target cleaning method |
| CN112276271A (en) * | 2020-10-14 | 2021-01-29 | 宁波江丰电子材料股份有限公司 | Welding method of titanium-aluminum alloy target |
| CN117001542A (en) * | 2023-09-06 | 2023-11-07 | 一道新能源科技股份有限公司 | Cleaning method of ALD aluminum boat |
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| CN108202292B (en) * | 2016-12-20 | 2020-04-07 | 宁波江丰电子材料股份有限公司 | Method for manufacturing aluminum target |
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| CN111451190A (en) * | 2019-01-21 | 2020-07-28 | 宁波江丰电子材料股份有限公司 | Target cleaning method |
| CN112276271A (en) * | 2020-10-14 | 2021-01-29 | 宁波江丰电子材料股份有限公司 | Welding method of titanium-aluminum alloy target |
| CN117001542A (en) * | 2023-09-06 | 2023-11-07 | 一道新能源科技股份有限公司 | Cleaning method of ALD aluminum boat |
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