CN105296933B - A kind of optical plastic substrate film coating device - Google Patents
A kind of optical plastic substrate film coating device Download PDFInfo
- Publication number
- CN105296933B CN105296933B CN201510741326.4A CN201510741326A CN105296933B CN 105296933 B CN105296933 B CN 105296933B CN 201510741326 A CN201510741326 A CN 201510741326A CN 105296933 B CN105296933 B CN 105296933B
- Authority
- CN
- China
- Prior art keywords
- contact rod
- substrate
- coating device
- side plate
- plated film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 42
- 239000004033 plastic Substances 0.000 title claims abstract description 29
- 229920003023 plastic Polymers 0.000 title claims abstract description 29
- 230000003287 optical effect Effects 0.000 title claims abstract description 17
- 239000007888 film coating Substances 0.000 title claims abstract description 11
- 238000009501 film coating Methods 0.000 title claims abstract description 11
- 238000001704 evaporation Methods 0.000 claims abstract description 20
- 230000008020 evaporation Effects 0.000 claims abstract description 20
- 238000001291 vacuum drying Methods 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 5
- 239000011248 coating agent Substances 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000005611 electricity Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010943 off-gassing Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000012769 display material Substances 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of optical plastic substrate film coating device, including plated film parachute kit, evaporation source and the contact rod being placed in vacuum drying oven, the plated film parachute kit is provided with side plate and umbrella cover, the side plate and umbrella cover are used to place ilm substrate to be plated, the evaporation source is arranged in plated film parachute kit, and the contact rod is arranged between substrate and evaporation source, and the contact rod and substrate surface angle are 0~5 °, the contact rod and 20~40cm of substrate distance, the contact rod connect 1.2~1.5kV power supplys.The coating apparatus allows plastic base plated film to obtain good firmness without using IAD techniques.
Description
Technical field
The present invention relates to a kind of coating apparatus, more particularly to a kind of coating apparatus for being used to optical plastic substrate is deposited.
Background technology
Optical plastic refers to the plastics as optical medium material.It is used primarily in optical instrument, for manufacturing optics base
Plate, lens, contact lenses, organic light-guide fiber etc..Having obtained the optical plastic of application mainly has PMMA, PET, PC, PS etc..Not
Carry out plastic base and may replace glass substrate to turn into time generation display material because plastic base possess it is compared with glass substrate it is light,
The advantage such as thin, impact resistance, rollable, can be applied to many portable and Wearable display device, to improve service life and increase
Plus use scope.Current plastic base plated film can be applied to touch panel in opto-electronics as the transparent material of excellent performance
Screen, liquid crystal display panel (LCD panel), Organic Light Emitting Diode (OLED), e-book (e-book), Polarizer, light storage
Deposit, the field such as various light fixtures, illuminating equipment, optical fiber.
Under atmospheric environment, plastic basis material absorption aqueous vapor easier than glass substrate, therefore can be because of vacuum in coating process
Environment and heated relation and the phenomenon for having outgassing.Film forming is unstable when outgassing can cause plated film so that film-plating process parameter is not
It is easy to control, and the firmness of film forming can be influenceed.At present, generally conventional use vacuum vapour deposition, which carries out film forming, can all use
IAD assisted cryogenics vacuum evaporation process improves the Percentage bound between film layer and substrate, and such technique productions equipment cost is higher,
Production efficiency is nor very high.
The content of the invention
It is an object of the invention to provide a kind of optical plastic substrate film coating device, film layer after plastic base evaporation is solved firm
Degree is poor, the problem of stripping easy to foaming.
The technical scheme is that such：A kind of optical plastic substrate film coating device, including be placed in vacuum drying oven
Plated film parachute kit, evaporation source and contact rod, the plated film parachute kit are provided with side plate and umbrella cover, and the side plate and umbrella cover are used to place to be plated
Ilm substrate, the evaporation source is arranged in plated film parachute kit, and the contact rod is arranged between substrate and evaporation source, the contact rod
It it is 0~5 ° with substrate surface angle, the contact rod and 20~40cm of substrate distance, the contact rod connect 1.2~1.5kV electricity
Source.
It is preferred that, the side plate is 70~85 ° with horizontal plane angle, and the substrate is arranged on side plate, the contact rod
With 25~40cm of substrate distance.
It is preferred that, the umbrella cover is 10~25 ° with horizontal plane angle, and the substrate is arranged on umbrella cover, the contact rod
With 20~30cm of substrate distance.
It is preferred that, the contact rod length is 0.6~1.0m, diameter 10cm.
It is preferred that, the contact rod is oxygenless copper material.
The advantage of technical scheme provided by the present invention is, the heating-up temperature less than 80 DEG C can be used to carry out plated film,
Production efficiency high energy consumption is low；Before evaporation, contact rod connects high-tension electricity, produces discharge effect, passes through the high energy particle discharged
Bombardment processing is carried out to plastic base surface, the firmness of film layer and substrate can be controlled by adjusting discharge time；Either
It is deposited or can be obtained using the rectilinear evaporation for being positioned over umbrella cover without using IAD techniques using the tilting for being positioned over side plate
To good firmness.
Brief description of the drawings
Fig. 1 is structural representation when plastic base is placed in side plate plated film.
Fig. 2 is structural representation when plastic base is placed in umbrella cover plated film.
Embodiment
With reference to embodiment, the invention will be further described, but not as a limitation of the invention.
Refer to Fig. 1, the tilted optical mode plastic base coating apparatus of present embodiment, including the plating being placed in vacuum drying oven
Film parachute kit, evaporation source and contact rod, plated film parachute kit are provided with side plate and umbrella cover, and ilm substrate to be plated is placed on side plate.Side plate and water
Flat angle is 70~85 °, and evaporation source is arranged on the bottom in plated film parachute kit.Contact rod is diameter 10cm, and length is 1.0m nothing
Oxygen copper bar material.Contact rod is divided into left and right two and is fixedly installed between plastic base and evaporation source.Contact rod and plastic base table
Face angle is 0~5 ° and is processed as parallel, contact rod and 25~40cm of substrate distance as far as possible, and it is electric that contact rod connects 1.2~1.5kV
Source.
Fig. 2, the rectilinear optical plastic substrate film coating device of another embodiment of the invention are referred to, including is placed in
Plated film parachute kit, evaporation source and contact rod in vacuum drying oven, plated film parachute kit are provided with side plate and umbrella cover, and ilm substrate to be plated is placed on umbrella cover
On.Umbrella cover and the bottom that horizontal sextant angle is that 10~25 ° of evaporation sources are arranged in plated film parachute kit, contact rod is diameter 10cm, length
For 1.0m oxygen-free copper bar.Contact rod is divided into left and right two and is fixedly installed between plastic base and evaporation source.Contact rod with
Plastic base surface angle is 0~5 ° and is processed as parallel, contact rod and 20~30cm of substrate distance, contact rod connection 1.2 as far as possible
~1.5kV power supplys.
Above-mentioned two embodiment is used to carry out plated film with different parameters, specifically, before evaporation, first connecting contact rod
High-tension electricity, produces discharge effect, bombardment processing is carried out to evaporation substrate surface by the high energy particle discharged, during adjustment electric discharge
Between.The plated film fruit that different embodiments different parameters are obtained is as shown in the table
Claims (5)
1. a kind of optical plastic substrate film coating device, including the plated film parachute kit (1) and evaporation source (2) being placed in vacuum drying oven, described
Plated film parachute kit (1) is provided with side plate (1b) and umbrella cover (1a), and the side plate (1b) and umbrella cover (1a) are used to place ilm substrate to be plated
(3), the evaporation source (2) is arranged in plated film parachute kit (1), it is characterised in that including contact rod (4), the contact rod (4) sets
Put between substrate (3) and evaporation source (2), the contact rod (4) and substrate (3) surface angle are 0~5 °, the contact rod
(4) with substrate (3) 20~40cm of distance, contact rod (4) connection 1.2~1.5kV power supplys (5).
2. optical plastic substrate film coating device according to claim 1, it is characterised in that：The side plate (1b) and horizontal plane
Angle is 70~85 °, and the substrate (3) is arranged on side plate (1b), the contact rod (4) and substrate (3) 25~40cm of distance.
3. optical plastic substrate film coating device according to claim 1, it is characterised in that：The umbrella cover and horizontal plane angle
For 10~25 °, the substrate is arranged on umbrella cover, the contact rod and 20~30cm of substrate distance.
4. optical plastic substrate film coating device according to claim 1, it is characterised in that：The contact rod length is 0.6
~1.0m, diameter 10cm.
5. optical plastic substrate film coating device according to claim 1, it is characterised in that：The contact rod is oxygen-free copper material
Material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510741326.4A CN105296933B (en) | 2015-11-04 | 2015-11-04 | A kind of optical plastic substrate film coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510741326.4A CN105296933B (en) | 2015-11-04 | 2015-11-04 | A kind of optical plastic substrate film coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105296933A CN105296933A (en) | 2016-02-03 |
| CN105296933B true CN105296933B (en) | 2017-09-19 |
Family
ID=55194732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510741326.4A Active CN105296933B (en) | 2015-11-04 | 2015-11-04 | A kind of optical plastic substrate film coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105296933B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100366788C (en) * | 2004-09-09 | 2008-02-06 | 复旦大学 | A vacuum thermal evaporation film forming method using strong electric field |
| CN101041889B (en) * | 2006-03-21 | 2010-05-12 | 鸿富锦精密工业（深圳）有限公司 | Film plating method |
| CN102031485B (en) * | 2009-09-25 | 2013-09-25 | 深圳富泰宏精密工业有限公司 | Evaporation source and evaporation device using same |
| CN104004996B (en) * | 2014-04-15 | 2016-01-13 | 京浜光学制品（常熟）有限公司 | A kind of low temperature AF plated film evaporation unit |
| CN205115590U (en) * | 2015-11-04 | 2016-03-30 | 京浜光学制品（常熟）有限公司 | Optical plastics base plate coating film device |
-
2015
- 2015-11-04 CN CN201510741326.4A patent/CN105296933B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN105296933A (en) | 2016-02-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20080013002A1 (en) | Lenticular lens and method of fabricating thereof | |
| JP2008197296A (en) | Electrowetting device and its manufacturing method | |
| US9150952B2 (en) | Deposition source and deposition apparatus including the same | |
| US10038159B2 (en) | Organic electroluminescent device structure and manufacturing for the same | |
| EA201491350A1 (en) | TRANSPARENT GLASS WITH ELECTRO CONDUCTING COATING | |
| US10725358B2 (en) | Transparent display device | |
| CN204007044U (en) | Air knife adjustment device and air knife flat plate cleaning equipment | |
| CN205115590U (en) | Optical plastics base plate coating film device | |
| CN103717780B (en) | Vacuum evaporation heating combined body and possess the vacuum deposition apparatus of this heating combined body | |
| CN105296933B (en) | A kind of optical plastic substrate film coating device | |
| CN109407359A (en) | Manipulator | |
| CN203941708U (en) | A kind of flexible transparent conductive film based on nano-silver thread | |
| KR101297432B1 (en) | A transparent flexible board having layer for high flexible layer and transparency conductive layer and Manufacturing method of the same | |
| JP2010020951A (en) | Method for manufacturing transparent conductive film | |
| CN103823263A (en) | Composite prismatic lens | |
| CN103741097B (en) | Vacuum deposition apparatus | |
| CN105118930A (en) | Manufacturing method of organic electroluminescence device and the organic electroluminescence device | |
| KR101512063B1 (en) | Method for producing transparent conductive film where multi-layer thin film is coated, multi-layer thin film type transparent conductive film produce by the same, and multi-layer thin film type transparent conductive film producing device | |
| CN109811308A (en) | A kind of ITO process for making conducting membrane | |
| Kim | Influence of the Cs partial pressure on the optical and electrical properties of ITO films prepared by dc sputter type negative metal ion beam deposition | |
| CN115394711A (en) | Laser stripping equipment and preparation method of flexible display device | |
| KR20180035478A (en) | The conductive transparent substrate and fabricating method of the same | |
| GB2575591A (en) | Liquid crystal device | |
| Li et al. | Simultaneous deposition of diamondlike carbon films on both surfaces of aluminum substrate by electrochemical technique | |
| Banerjee et al. | Fabrication of highly transparent diamond-like carbon anti-reflecting coating for Si solar cell application |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 215500 No. 7, Liuzhou Road, hi tech Industrial Park, Suzhou, Jiangsu, Changshou City Applicant after: Suzhou Jing Bang photoelectric Polytron Technologies Inc Address before: 215500 No. 7, Liuzhou Road, hi tech Industrial Park, Suzhou, Jiangsu, Changshou City Applicant before: Jing Bang optical products (Changshu) Co., Ltd. |
|
| COR | Change of bibliographic data | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |