CN105278267B - A kind of reflective more off-axis minute surface vertical measuring sets - Google Patents
A kind of reflective more off-axis minute surface vertical measuring sets Download PDFInfo
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- CN105278267B CN105278267B CN201410329371.4A CN201410329371A CN105278267B CN 105278267 B CN105278267 B CN 105278267B CN 201410329371 A CN201410329371 A CN 201410329371A CN 105278267 B CN105278267 B CN 105278267B
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- aspheric surface
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Abstract
The present invention discloses a kind of vertical measuring set using reflective more off-axis minute surfaces, it is characterised in that including：The light that one light source is sent forms a measuring beam after a lamp optical system, and the measuring beam is made up of by a measurement optical system, the measurement optical system a projection branch road, object under test and detection branch road；The measuring beam forms unit by the projecting figure of the projection branch road successively, and the object under test surface is reached after the off-axis aspheric surface speculum group with refractive power of the projection branch road；The measuring beam the object under test surface the reflected beams successively after the off-axis aspheric surface speculum group with refractive power of the detection branch road and the projecting figure receiving unit of the detection branch road by detector detection, to obtain the vertical information on the object under test surface.
Description
Technical field
The present invention relates to a kind of integrated circuit equipment manufacturing field, more particularly to a kind of vertical survey of reflective more off-axis minute surfaces
Measure device.
Background technology
As projection aligner's operation wavelength constantly reduces, numerical aperture constantly increases, it is to the vertical measurement in silicon chip face
The measurement accuracy of device requires also increasingly harsh.One of an important factor for influenceing silicon chip face vertical measuring set measurement accuracy is to survey
Measure light beam caused interference between layers effect after the complicated figure of silicon chip face multilayer.To solve this problem, generally adopt at present
Illumination is provided for silicon chip face vertical measuring set to near-infrared broad spectrum light source with visible, to homogenize the layer of different wave length illumination light
Between interference effect, this is discussed in detail US2010/0233600.Use it is visible to near-infrared broad spectrum light source for silicon chip face
Vertical measuring set, which provides illumination, can improve the Technological adaptability of silicon chip face vertical measuring set to a certain extent, reduce and survey
Error is measured, improves measurement accuracy.But this following technical scheme is hung down it is possible to being unsatisfactory for projection aligner to silicon chip face
To the measurement accuracy demand of measurement apparatus.Further to improve the Technological adaptability of silicon chip face vertical measuring set, reduce measurement
Error, measurement accuracy is improved, US2010/0233600 gives provides photograph with short wavelength light source for silicon chip face vertical measuring set
Bright scheme.In the case where incidence angle is certain, the reflectivity of silicon chip face photoresist increases as operation wavelength reduces,
But the reflectivity of silicon chip face underlying graphics reduces as operation wavelength reduces, therefore can be significantly using short wavelength's illumination
Interference between layers effect is reduced, so as to reduce measurement error, improves measurement accuracy.According to described in US2010/0233600, silicon
The operation wavelength of unilateral vertical measuring set can be in ultraviolet band, it might even be possible to is mutually handed over the operation wavelength of projection objective
It is folded.This, which is seemed, has run counter to the sacred rule that measuring beam and exposing light beam operation wavelength can not overlap, if but in fact, made
The energy of measuring beam is less than the threshold exposure of photoresist, and measuring beam will not make silicon wafer exposure；Further, even if
The energy of measuring beam is higher than the threshold exposure of photoresist, but as long as knowing influence of the measuring beam to critical size,
And this influence is fed back to the lighting control unit of projection objective, the lighting control unit of projection objective is real according to this influence
When adjust exposure dose, the operation wavelength of silicon chip face vertical measuring set still can be mutual with the operation wavelength of projection objective
It is overlapping.
But the optical system of silicon chip face vertical measuring set uses transmission-type mostly at present, different operating wavelength it is vertical
The optical system structure of measurement apparatus is totally different, and the differences in materials of lens is also very big.If using ultraviolet to short-wavelength visible light
Wide spectrum illuminates, such as 50-500nm, it will brings lot of challenges to the Optical System Design of silicon chip face vertical measuring set, sternly
The aberration of weight is exactly one of them.
The content of the invention
In order to overcome defect present in prior art, the present invention discloses a kind of reflective more off-axis vertical measurement dresses of minute surface
Put, can effectively avoid the problem of aberration is difficult to correction during ultraviolet wide spectrum illumination to short-wavelength visible light.
In order to realize foregoing invention purpose, the present invention discloses a kind of vertical measurement using reflective more off-axis minute surfaces and filled
Put, it is characterised in that including：The light that one light source is sent forms a measuring beam, the survey after a lamp optical system
Light beam is measured to be made up of a projection branch road, object under test and detection branch road by a measurement optical system, the measurement optical system；
The measuring beam forms unit by the projecting figure of the projection branch road successively, and the projection branch road has refractive power
The object under test surface is reached after off-axis aspheric surface speculum group；Reflection of the measuring beam on the object under test surface
The light beam off-axis aspheric surface speculum group with refractive power by the detection branch road and the projection for detecting branch road successively
Detected after figure receiving unit by a detector, to obtain the vertical information on the object under test surface.
Further, the projection branch road and detection branch road also include some speculum groups, for making the measurement light
The light path of beam meets space structure constraint and/or for signal modulation.
Further, the off-axis aspheric surface speculum group of the projection branch road includes successively：First off-axis aspheric surface is anti-
Penetrate microscope group, the second off-axis aspheric surface speculum group, the 3rd off-axis aspheric surface speculum group and the 4th off-axis aspheric surface speculum
Group.
Further, the off-axis aspheric surface speculum group of the detection branch road includes successively：5th off-axis aspheric surface is anti-
Penetrate microscope group, the 6th off-axis aspheric surface speculum group, the 7th off-axis aspheric surface speculum group and the 8th off-axis aspheric surface speculum
Group.
Further, the focus of the first off-axis aspheric surface speculum and the second off-axis aspheric surface speculum connects each other
Near or coincidence, the focus of the 3rd off-axis aspheric surface speculum and the 4th off-axis aspheric surface speculum is closer to each other or overlaps,
The focus of the 5th off-axis aspheric surface speculum and the 6th off-axis aspheric surface speculum it is closer to each other or overlap, the described 7th from
The focus of axle non-spherical reflector and the 8th off-axis aspheric surface speculum is closer to each other or overlaps.
Further, the projection branch road and detection branch road are the doubly telecentric branch road for meeting SC conditions.
Further, a relay optical unit is also included between the projecting figure receiving unit and the photodetector.
Further, one is also included between the 8th off-axis aspheric surface speculum group and the projecting figure receiving unit
Mirror.
Further, the projecting figure formed unit and the projecting figure receiving unit be transmission-type grating, it is reflective
The figure of grating or slit composition, or the combination of above-mentioned figure.
Further, the detector is photodetector, and light intensity signal is converted into telecommunications by the photodetector
A computer number is transported to, the computer calculates the vertical information of the object under test according to the electric signal, described to hang down
Include vertical position and rotation information to information.
Compared with prior art, the aberration when present invention can both avoid ultraviolet wide spectrum illumination to short-wavelength visible light
The problem of being difficult to correction, while the complexity of silicon chip face vertical measuring set optical system can also be reduced.
Brief description of the drawings
It can be obtained further by following detailed description of the invention and institute's accompanying drawings on the advantages and spirit of the present invention
Solution.
Fig. 1 is the schematic diagram of reflective more off-axis minute surface vertical measuring sets involved in the present invention；
Fig. 2 is the measuring system figure of reflective more off-axis minute surface vertical measuring sets involved in the present invention.
Embodiment
The specific embodiment that the invention will now be described in detail with reference to the accompanying drawings.
The present invention devises a kind of reflective more off-axis minute surface vertical measuring sets, including lighting source, measurement optical system
System and photodetector and computer；Optical system is measured by projection branch road, object under test (being usually silicon chip) and detection branch road
Composition；Off-axis aspheric surface speculum group of the projection branch route with refractive power, projecting figure form unit and to meet light path
Space structure is constrained and/or formed for the plane reflection microscope group of signal modulation；It is off-axis non-with refractive power to detect branch route
Spheric reflection microscope group, projecting figure form unit and to make light path meet space structure constraint and/or for the flat of signal modulation
Face speculum group composition.
Wherein, the purposes one of plane mirror is light path is met that space structure constrains, need to be with such because space is limited
Speculum turnover light path make it that vertical measuring set is compact-sized, to adapt to limited space；Purposes two is to be used for signal modulation,
Vertical measuring set includes aperture diaphragm, can cause positioned at the periodic vibration of aperture diaphragm face and its neighbouring speculum
The periodic wobble of image planes hot spot, the light intensity cyclically-varying through projecting figure receiving unit can be made, so as to play signal
The effect of modulation.
Especially, projecting branch route only includes 4 off-axis aspheric surface speculums with refractive power, and respectively first is off-axis
Non-spherical reflector, the second off-axis aspheric surface speculum, the 3rd off-axis aspheric surface speculum and the 4th off-axis aspheric surface speculum
And projecting figure forms unit and to make light path meet space structure constraint and/or the plane mirror for signal modulation；
Detecting branch road only includes 4 off-axis aspheric surface speculums with refractive power, respectively the 5th off-axis aspheric surface speculum, the 6th
Off-axis aspheric surface speculum, the 7th off-axis aspheric surface speculum and the 8th off-axis aspheric surface speculum and projecting figure receive single
Member and for make light path meet space structure constraint and/or the plane mirror for signal modulation.
Alternatively, reflective more off-axis minute surface vertical measuring sets can also include lamp optical system, relay optical system
System, lamp optical system can include the aspherical reflector and some even optical elements of auxiliary that focus is located at light source, especially
The reflector is parabola.
Especially, it is the doubly telecentric branch road for meeting SC conditions to project branch road and detection branch road, and wherein SC conditions are
Scheimpflug conditions, it is discussed in detail referring to Warren J. Smith《Modern Optical Engineering》Fourth
Edition, chapter 4.5。
Especially, the asphericity coefficient and their mutual off-axis of each off-axis aspheric surface speculum of optical system are measured
Angle have passed through meticulous calculating, to cause the point source image confusion telecentricity angle, the image space deviation IPD (Image that measure optical system
Postion Difference), focal plane deviate FPD (Focus Position Difference) meet or surmount measurement essence
Degree demand.
It can be various transmission-type gratings, various reflective gratings that projecting figure, which forms unit and projecting figure probe unit,
Or the graphics set being made up of various slits,
The ultraviolet projection that measurement optical system projection branch road can be directly illuminated to short-wavelength visible light sent from light source
Figure forms unit, or the projecting figure of measurement optical system projection branch road is illuminated after optical fiber and/or the even light of illuminator
Unit is formed, so as to obtain measuring beam；Measuring beam is successively by the first off-axis aspheric surface speculum, the second off-axis aspheric surface
Speculum, the 3rd off-axis aspheric surface speculum and the 4th off-axis aspheric surface speculum reach object under test, and projecting figure is formed
On object under test, after object under test reflects, successively reflected by the 5th off-axis aspheric surface speculum, the 6th off-axis aspheric surface
Projecting figure receiving unit is reached after mirror, the 7th off-axis aspheric surface speculum and the 8th off-axis aspheric surface speculum, it is last direct
Reach photodetector or photodetector is reached after relay optical system, light intensity signal is converted into electricity by photodetector
Signal is transported to computer, and computer calculates rotation Rx, Ry of the vertical position Z of object, rotating object according to the electric signal
Etc. vertical information.
Especially, although it is total-reflection type that the present invention, which highlights foregoing vertical measuring set, art technology people
Member can be according to being actually needed, and appropriate position, which adds, in the optical path has high transmittance, the material (example of low dispersion to wide spectrum
Such as vitreous silica) made of optical element, this is actual still consistent with the present invention in processing method, and this vertical measuring set is
Refraction-reflection type.
Illustrate the present invention below with reference to attached Fig. 1 and 2.
Fig. 1 is the reflective schematic diagram of minute surface vertical measuring sets, including lighting source off axis more involved in the present invention
101st, lamp optical system 103, measurement optical system 104, relay optical system 105, photodetector 106 and computer 107.
Wherein connected between lighting source 101 and lamp optical system 103 by optical fiber 102.
As shown in Fig. 2 measurement optical system 104 is by projection branch road, object under test (being usually silicon chip) 210 and detection branch road
Composition.Projecting branch route only includes 4 off-axis aspheric surface speculums with refractive power, the reflection of respectively the first off-axis aspheric surface
Mirror 201, the second off-axis aspheric surface speculum 202, the 3rd off-axis aspheric surface speculum 203 and the 4th off-axis aspheric surface speculum
204 and projecting figure formed unit 10 and for make light path meet space structure constraint and the plane mirror for signal modulation
211.Detecting branch road only includes 4 off-axis aspheric surface speculums with refractive power, respectively the 5th off-axis aspheric surface speculum
205th, the 6th off-axis aspheric surface speculum 206, the 7th off-axis aspheric surface speculum 207 and the 8th off-axis aspheric surface speculum 208
And projecting figure receiving unit 20 and for make light path meet space structure constraint plane mirror 211.Preferably, first from
Axle non-spherical reflector, the focus of the second off-axis aspheric surface speculum are closer to each other or overlap, the 3rd off-axis aspheric surface speculum,
The focus of 4th off-axis aspheric surface speculum is closer to each other or overlaps, the 5th off-axis aspheric surface speculum, the 6th off-axis aspheric surface
The focus of speculum it is closer to each other or overlap, the 7th off-axis aspheric surface speculum, the 8th off-axis aspheric surface speculum focus that
This is close or overlaps.
It is the doubly telecentric branch road for meeting SC conditions to project branch road and detection branch road.
Projecting figure formed unit 10 and projecting figure probe unit 20 can be various transmission-type gratings, it is various reflective
Grating or the graphics set being made up of various slits.
Ultraviolet after 103 even light of optical fiber 102 and illuminator survey is illuminated from what light source 101 was sent to short-wavelength visible light
The projecting figure for measuring optical system projection branch road forms unit 10, so as to obtain measuring beam.Measuring beam successively passes through first
Off-axis aspheric surface speculum 201, the second off-axis aspheric surface speculum 202, the 3rd off-axis aspheric surface speculum 203 and the 4th are off-axis
Non-spherical reflector 204 reaches object under test 210, is formed projecting figure on object under test 210 in a manner of glancing incidence.Through treating
After surveying object reflection 210, successively by the 5th off-axis aspheric surface speculum 205, the 6th off-axis aspheric surface speculum the 206, the 7th
Projecting figure receiving unit 20 is reached after the off-axis aspheric surface speculum 208 of off-axis aspheric surface speculum 207 and the 8th, it is last direct
Reach photodetector 106 or by relay optical system 105 (some photodetectors do not allow excessive angle of incidence of light,
Therefore need relay optical system and incide the angle of photodetector to reduce) photodetector 106 is reached afterwards.Photoelectricity is visited
Light intensity signal is converted into electric signal and is transported to computer 107 by survey device 106, and computer 107 calculates object according to the electric signal
Vertical position Z, the vertical information such as rotation Rx, Ry of rotating object.
Although above-described embodiment gives total-reflection type vertical measuring set, skilled artisan can basis
It is actually needed, appropriate position, which adds, in the optical path has high transmittance, material (such as the tekite of low dispersion to wide spectrum
English) made of optical element, this is actual still consistent with the present invention in processing method.For example, for the correction curvature of field, can be above-mentioned
After the 8th off-axis aspheric surface speculum 208 in embodiment, fused silica material is added before projecting figure receiving unit 20
Manufactured field lens, to partially compensate for point source aberration and/or field aberration.
The preferred embodiment of the simply present invention described in this specification, above example is only illustrating the present invention
Technical scheme rather than limitation of the present invention.All those skilled in the art pass through logic analysis, reasoning under this invention's idea
Or the limited available technical scheme of experiment, all should be within the scope of the present invention.
Claims (7)
- A kind of 1. vertical measuring set using reflective more off-axis minute surfaces, it is characterised in that including：The light that one light source is sent A measuring beam is formed after a lamp optical system, the measuring beam is by a measurement optical system, the measurement light System is made up of a projection branch road, object under test and detection branch road；The measuring beam is successively by the projection branch road Projecting figure forms unit, and the determinand is reached after the off-axis aspheric surface speculum group with refractive power of the projection branch road Body surface face；The reflected beams of the measuring beam on the object under test surface have dioptric by the detection branch road successively Detected after the projecting figure receiving unit of the off-axis aspheric surface speculum group of power and the detection branch road by a detector, to obtain The vertical information on the object under test surface；The projection branch road and detection branch road also include some speculum groups, for making the light path of the measuring beam meet space Structural constraint and/or for signal modulation；The off-axis aspheric surface speculum group of the projection branch road includes successively：It is first off-axis aspheric surface speculum group, second off-axis Non-spherical reflector group, the 3rd off-axis aspheric surface speculum group and the 4th off-axis aspheric surface speculum group；The off-axis aspheric surface speculum group of the detection branch road includes successively：It is 5th off-axis aspheric surface speculum group, the 6th off-axis Non-spherical reflector group, the 7th off-axis aspheric surface speculum group and the 8th off-axis aspheric surface speculum group；Some speculum groups include the first speculum and the second speculum, and first speculum is off-axis positioned at described second Between non-spherical reflector group, the 3rd off-axis aspheric surface speculum group, it is anti-that second speculum is located at the 6th off-axis aspheric surface Penetrate between microscope group, the 7th off-axis aspheric surface speculum group.
- 2. vertical measuring set as claimed in claim 1, it is characterised in that the first off-axis aspheric surface speculum and second The focus of off-axis aspheric surface speculum is closer to each other or overlaps, the 3rd off-axis aspheric surface speculum and the 4th off-axis aspheric surface The focus of speculum is closer to each other or overlaps, Jiao of the 5th off-axis aspheric surface speculum and the 6th off-axis aspheric surface speculum Point is closer to each other or overlaps, and the focus of the 7th off-axis aspheric surface speculum and the 8th off-axis aspheric surface speculum is closer to each other Or overlap.
- 3. vertical measuring set as claimed in claim 1, it is characterised in that the projection branch road is to meet SC with detection branch road The doubly telecentric branch road of condition.
- 4. vertical measuring set as claimed in claim 1, it is characterised in that the projecting figure receiving unit and the detection Also include a relay optical unit between device.
- 5. vertical measuring set as claimed in claim 1, it is characterised in that the 8th off-axis aspheric surface speculum group and institute Stating also includes a field lens between projecting figure receiving unit.
- 6. vertical measuring set as claimed in claim 1, it is characterised in that the projecting figure forms unit and the projection The figure that figure receiving unit is transmission-type grating, reflective gratings or slit form, or the combination of above-mentioned figure.
- 7. vertical measuring set as claimed in claim 1, it is characterised in that the detector is photodetector, the light Light intensity signal is converted into electric signal and is transported to a computer by electric explorer, and the computer calculates institute according to the electric signal The vertical information of object under test is stated, the vertical information includes vertical position and rotation information.
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| CN201410329371.4A CN105278267B (en) | 2014-07-11 | 2014-07-11 | A kind of reflective more off-axis minute surface vertical measuring sets |
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| CN201410329371.4A CN105278267B (en) | 2014-07-11 | 2014-07-11 | A kind of reflective more off-axis minute surface vertical measuring sets |
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| CN105278267B true CN105278267B (en) | 2018-03-02 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4804258A (en) * | 1986-05-05 | 1989-02-14 | Hughes Aircraft Company | Four mirror afocal wide field of view optical system |
| US5569930A (en) * | 1993-11-08 | 1996-10-29 | Nikon Corporation | Substrate height position detecting apparatus wherein a stop plate transmits a pattern of oblique light beams which are reflected by the substrate |
| US6016220A (en) * | 1995-11-01 | 2000-01-18 | Raytheon Company | Off-axis three-mirror anastigmat having corrector mirror |
| US6381004B1 (en) * | 1999-09-29 | 2002-04-30 | Nikon Corporation | Exposure apparatus and device manufacturing method |
| CN101221280A (en) * | 2008-01-24 | 2008-07-16 | 上海微电子装备有限公司 | Full reflection projection optical system |
| CN102981254A (en) * | 2012-12-27 | 2013-03-20 | 中国科学院长春光学精密机械与物理研究所 | Coaxial aspheric surface four-reflecting mirror optical system with long focal length short structure |
-
2014
- 2014-07-11 CN CN201410329371.4A patent/CN105278267B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4804258A (en) * | 1986-05-05 | 1989-02-14 | Hughes Aircraft Company | Four mirror afocal wide field of view optical system |
| US5569930A (en) * | 1993-11-08 | 1996-10-29 | Nikon Corporation | Substrate height position detecting apparatus wherein a stop plate transmits a pattern of oblique light beams which are reflected by the substrate |
| US6016220A (en) * | 1995-11-01 | 2000-01-18 | Raytheon Company | Off-axis three-mirror anastigmat having corrector mirror |
| US6381004B1 (en) * | 1999-09-29 | 2002-04-30 | Nikon Corporation | Exposure apparatus and device manufacturing method |
| CN101221280A (en) * | 2008-01-24 | 2008-07-16 | 上海微电子装备有限公司 | Full reflection projection optical system |
| CN102981254A (en) * | 2012-12-27 | 2013-03-20 | 中国科学院长春光学精密机械与物理研究所 | Coaxial aspheric surface four-reflecting mirror optical system with long focal length short structure |
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