CN105117085B - Embedded touch control panel and its manufacture method - Google Patents
Embedded touch control panel and its manufacture method Download PDFInfo
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- CN105117085B CN105117085B CN201510564176.4A CN201510564176A CN105117085B CN 105117085 B CN105117085 B CN 105117085B CN 201510564176 A CN201510564176 A CN 201510564176A CN 105117085 B CN105117085 B CN 105117085B
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- 238000000034 method Methods 0.000 title claims abstract description 41
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000000725 suspension Substances 0.000 claims abstract description 104
- 238000007667 floating Methods 0.000 claims abstract description 90
- 230000004888 barrier function Effects 0.000 claims abstract description 36
- 238000001259 photo etching Methods 0.000 claims description 17
- 239000010409 thin film Substances 0.000 claims description 8
- 238000003491 array Methods 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 4
- 239000010408 film Substances 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 7
- 239000002184 metal Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 9
- 238000005240 physical vapour deposition Methods 0.000 description 8
- 238000010276 construction Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910004205 SiNX Inorganic materials 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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Abstract
The present invention provides a kind of embedded touch control panel, including common electrode layer, insulating barrier and sensed layer, the common electrode layer includes multiple driving areas, multiple driving areas are arranged side by side and spaced setting, driving electrodes are provided with each driving area, include multiple floating zones being independently arranged in each driving area, suspension electrode is respectively provided with each floating zone, the insulating barrier is formed in common electrode layer, the sensed layer is formed on insulating barrier, the sensed layer includes a plurality of sensing electrode, in the display stage, the driving electrodes, suspension electrode and sensing electrode access common electric voltage, in touch-control sweep phase, the driving electrodes are used to provide drive signal, the sensing electrode receives the drive signal that the driving electrodes provide, the suspension electrode is empty, and provide signal compensation for the sensing electrode.The present invention also provides a kind of manufacture method of embedded touch control panel, and the manufacture method reduces the technology difficulty for manufacturing the embedded touch control panel.
Description
Technical field
The present invention relates to technical field of touch-control display, more particularly to a kind of embedded touch control panel and its manufacture method.
Background technology
With the popularization of smart electronicses product, it is each that capacitance type touch control screen is widely used in smart mobile phone, tablet personal computer etc.
In kind electronic product.Existing capacitance type touch control screen is divided into G+G (Glass+Glass), G+F (Glass-Film), GFF
(Glass-Film-Film), the technology such as OGS (One Glass Solution) is for the external hanging type capacitance plate of representative and with On-
Cell, In-Cell technology are the embedded capacitance screen of representative.In recent years, people increasingly focus on the lightening user's body of product
To test, smart electronicses product market also shows tri- kinds of technologies of OGS, On-Cell and In-Cell and the situation striven, wherein, In-
Cell contact panels in the driving panel processing procedure of touch-control process integration to display panel, will make it have than OGS contact panel and
The characteristics of On-Cell contact panels are more frivolous, translucency is more preferable, so as to preferably meet the needs of user.Therefore, In-
Cell contact panels are increasingly becoming the mainstream applications of following capacitance plate.
Referring to Fig. 1, its laminated construction schematic diagram for embedded touch control panel in the prior art.As shown in figure 1, existing
In the manufacturing process of some In-Cell contact panels, typically using gold-tinted technique (photoetching process) by the public affairs in contact panel
Common electrode layer (Common electrodes) is split, and is defined as driving electrodes Tx and sensing electrode Rx by function, as shown in Figure 2.
Wherein, the driving electrodes Tx is arranged in arrays, and the sensing electrode Rx is arranged between two adjacent row driving electrodes Tx, and
Separate two adjacent driving electrodes Tx in line direction.By being arranged between the two neighboring driving electrodes Tx of same a line by institute
State sensing electrode Rx cut-offs, it is therefore desirable to two adjacent driving electrodes Tx are electrically connected with by way of bridge joint.With driving
Exemplified by electrode Tx1, in existing In-Cell contact panels, need to pass through connection between the driving electrodes Tx1 adjacent with a line
Metal M1 is bridged, and the connection metal M1 and driving electrodes Tx1 is located at different layers, therefore needs to realize by the way of via
Connection, in some instances it may even be possible to the attachment structure of via+via is used, and this complicated via hole type attachment structure causes existing In-
The processing procedure of Cell contact panels is excessively complicated, so as to be unfavorable for the lifting of product yield, can not also meet the requirement of people's production.
The content of the invention
In view of the above-mentioned problems in the prior art, the present invention provides a kind of embedded touch control panel, by that will sense
Electrode is individually layered so that driving electrodes can keep overall line structure, without being bridged by metal level and via, with simplification
The overall structure of the embedded touch control panel, lift product yield.
In addition, the present invention also provides a kind of manufacture method of embedded touch control panel.
A kind of embedded touch control panel, including common electrode layer, insulating barrier and sensed layer, the common electrode layer include more
Individual driving area, multiple driving areas are arranged side by side and spaced setting, are provided with driving electrodes in each driving area, often
Include multiple floating zones being independently arranged, suspension electrode being provided with each floating zone in the one driving area, it is described
Insulating barrier is formed in the common electrode layer, and the sensed layer is formed on the insulating barrier, and the sensed layer includes a plurality of
Sensing electrode, the sensing electrode are arranged above the suspension electrode, in the display stage, the driving electrodes, suspension electrode
And sensing electrode accesses common electric voltage, in touch-control sweep phase, the driving electrodes are used to provide drive signal, the sensing
Electrode receives the drive signal that the driving electrodes provide, and the suspension electrode is empty, and provides signal for the sensing electrode
Compensation.
Wherein, the insulating barrier offers multiple first vias and multiple second vias, described in the first via face
Driving electrodes set, described in the second via face suspension electrode set, the sensed layer also include it is a plurality of driving lead and
A plurality of suspension lead, the driving lead is arranged above the driving electrodes, and passes through first via and the driving
Electrode is electrically connected with, and the suspension lead is arranged above the suspension electrode, and passes through second via and the suspension
Electrode is electrically connected with.
Wherein, multiple suspension electrodes are arranged in arrays, and two senses are arranged at intervals above each row suspension electrode
Electrode and a suspension lead are surveyed, two sensing electrodes are set positioned at the suspension electrode both sides respectively in orthographic projection direction, and
Each the sensing electrode is mutually perpendicular on orthographic projection direction with the driving electrodes；The suspension lead is in orthographic projection side
To centrally disposed close to the suspension electrode, and each suspension lead by multiple second vias respectively with
Multiple suspension electrodes positioned at a row are electrically connected with.
Wherein, the embedded touch control panel also includes thin film transistor (TFT) array, first medium layer, second dielectric layer and picture
Plain electrode layer, the first medium layer are formed on the thin film transistor (TFT) array, and the common electrode layer is formed at described
On one dielectric layer, the second dielectric layer is formed in the sensed layer, and is filled in a plurality of sensing electrode, a plurality of driving
Between lead and a plurality of suspension lead, the pixel electrode layer is formed in the second dielectric layer.
Wherein, multiple annular grooves are opened up respectively between each driving area and multiple floating zones being independently arranged
Hole, the annular slotted hole is set through the common electrode layer, and is filled by the insulating barrier, to electrically isolate the driving electricity
Pole and the suspension electrode.
A kind of manufacture method of embedded touch control panel, including：
Thin film transistor (TFT) array, first medium layer and common electrode layer are sequentially formed on array base palte；
The common electrode layer is divided into multiple driving areas and multiple floating zones, to form multiple driving electrodes and multiple
Suspension electrode；
Insulating barrier, and the position corresponding with the driving electrodes on the insulating barrier are formed in the common electrode layer
The first via is formed, and the second via is formed in position corresponding with the suspension electrode；
Sensed layer is formed on the insulating barrier；
The sensed layer is etched, forms a plurality of sensing electrode, a plurality of driving lead and a plurality of suspension lead respectively；
And
Second dielectric layer and pixel electrode layer are sequentially formed in the sensed layer.
Wherein, it is described that the common electrode layer is divided into multiple driving areas and multiple floating zones, including：
The common electrode layer is divided into by multiple driving areas using photoetching process, wherein, multiple driving areas are parallel
Arrangement, and be mutually arranged at intervals successively；And
Using photoetching process, etching forms multiple annular grooves through the common electrode layer in each driving area
Hole, with one floating zone of shape in the region that each annular slotted hole surrounds.
Wherein, the insulating barrier is made up of silicon nitride through photoetching process, and is filled in the annular slotted hole, with electrically every
From the driving electrodes and the suspension electrode.
Wherein, the sensed layer is made up of physical gas-phase deposition.
Wherein, a plurality of sensing electrode, it is a plurality of driving lead and a plurality of suspension lead by photoetching process to the sensing
Layer is etched to be formed.
The embedded touch control panel by the sensing electrode by being individually layered setting, so that the driving electrodes
Overall line structure can be kept, is used to bridge the bridge joint metal routing with a line driving electrodes without increasing, simplifies
The structure and wiring complexity of the embedded touch control panel, and reduce the technique hardly possible for manufacturing the embedded touch control panel
Degree, be advantageous to lift the yield that touch-control shows product.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the laminated construction schematic diagram of embedded touch control panel in the prior art.
Fig. 2 is the planar structure schematic diagram of embedded touch control panel shown in Fig. 1.
Fig. 3 is the laminated construction schematic diagram for the embedded touch control panel that first embodiment of the invention provides.
Fig. 4 is the first planar structure schematic diagram of embedded touch control panel shown in Fig. 3.
Fig. 5 is the second planar structure schematic diagram of embedded touch control panel shown in Fig. 3.
Fig. 6 is the 3rd planar structure schematic diagram of embedded touch control panel shown in Fig. 3.
Fig. 7 is the flow chart of the manufacture method for the embedded touch control panel that second embodiment of the invention provides.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
For ease of description, may be used herein such as " ... under ", " ... below ", " under ", " ... on ", " on "
An element as illustrated in the drawing or feature and another (a little) element or the relation of feature are described Deng space relative terms.
It is appreciated that when an element or layer be referred to as another element or layer " on ", " being connected to " or " being couple to " another element or
During layer, it can directly on another element or layer, be directly connected to or be couple to another element or layer, or there may be residence
Between element or layer.On the contrary, when an element is referred to as on " directly existing " another element or layer, " being directly connected to " or " direct coupling
Be connected to " another element or layer when, in the absence of intervening elements or layer.
It is appreciated that terminology used here is merely to description specific embodiment, is not intended to limit the present invention.Herein
In use, clearly stating unless the context otherwise, otherwise singulative " one " and "the" are also intended to including plural form.Further
Ground, when in this manual in use, term " comprising " and/or "comprising" show the feature, entirety, step, operation, element
And/or the presence of component, but it is not excluded for one or more other features, entirety, step, operation, element, component and/or its group
The presence or increase of conjunction.
Unless otherwise defined, all terms (including technical term and scientific terminology) used herein all have institute of the present invention
The identical meanings that those of ordinary skill in category field is generally understood that.It will be further understood that, such as defined in universaling dictionary
Term, the implication consistent with their implications in the linguistic context of association area otherwise should be interpreted as having, without should
It is interpreted the meaning for idealizing or excessively formalizing, unless being clearly so defined herein.
Also referring to Fig. 3 and Fig. 4, Fig. 3 is the lamination knot for the embedded touch control panel that first embodiment of the invention provides
Structure schematic diagram, Fig. 4 are the first planar structure schematic diagrams of embedded touch control panel shown in Fig. 3.First embodiment of the invention provides
Embedded touch control panel 100 include common electrode layer 30, insulating barrier 40 and sensed layer 50.The common electrode layer 30 includes more
Individual driving area 31 and multiple floating zones 33, each described drive in area 31 offer multiple annular slotted hole S, the annular slotted hole S
Set through the common electrode layer 30, a floating zone 33 be set in the region that each annular slotted hole S is surrounded,
Include multiple floating zones 33 being independently arranged, each driving area 31 and multiple independences in i.e. each driving area 31
Multiple annular slotted hole S are opened up between the floating zone 33 of setting respectively, i.e., by institute between described driving area 31 and the floating zone 33
State annular slotted hole S separations.
Multiple driving parallel arrangeds of area 31, and spaced setting successively, each described drive in area 31 are respectively provided with
There is driving electrodes Tx.Driving electrodes Tx in each driving area 31 is overall line structure, in multiple driving areas 31
Driving electrodes Tx collectively form row driving array.Multiple floating zones 33 are arranged in arrays, and each floating zone 33
It is arranged in arrays to be inside provided with suspension electrode Floating, multiple suspension electrode Floating.In the present embodiment, lead to
Cross and the common electrode layer 30 is split using photoetching process (gold-tinted technique), you can obtain the driving electrodes Tx and hang
Floating electrode Floating.
Also referring to Fig. 3 and Fig. 5, the insulating barrier 40 is formed on the common electrode layer 30, and described in filling
Annular slotted hole S, to electrically isolate the driving electrodes Tx and the suspension electrode Floating.The insulating barrier 40 offers more
Individual first via H1 and multiple second via H2.Driving electrodes Tx described in the first via H1 faces is set, and through described
Insulating barrier 40；Suspension electrode Floating described in the second via H2 faces is set, and runs through the insulating barrier 40.In this reality
Apply in example, the insulating barrier 40 can be made up of photoetching process, and material is preferably silicon nitride SiNx.It is appreciated that the insulation
Layer 40 can also be made up of other insulating materials.
Also referring to Fig. 3 and Fig. 6, the sensed layer 50 is formed on the insulating barrier 40, including a plurality of sensing electricity
Pole Rx, a plurality of driving lead Tx Trace and a plurality of suspension lead Floating Trace.Wherein, the sensing electrode Rx is set
Above the suspension electrode Floating, and each sensing electrode on orthographic projection direction with the driving electrodes Tx
It is mutually perpendicular to.The driving lead Tx Trace are arranged above the driving electrodes Tx, and by the first via H1 with it is described
Driving electrodes Tx is electrically connected with.The suspension lead Floating Trace are arranged above the suspension electrode Floating,
And it is electrically connected with by the second via H2 and suspension electrode Floating.In the present embodiment, each row are described outstanding
It is arranged at intervals two sensing electrode Rx and suspension lead Floating Trace above floating electrode Floating, described two
Sensing electrode Rx is set positioned at the suspension electrode Floating both sides respectively on orthographic projection direction；The suspension lead
Floating Trace are centrally disposed close to the suspension electrode Floating on orthographic projection direction, and each described outstanding
Floating lead Floating Trace by multiple second via H2 respectively with multiple suspension electrodes positioned at a row
Floating is electrically connected with.It is appreciated that sensing electricity corresponding to above multiple suspension electrode Floating of a row
Pole Rx bar number may be arranged as being more than two.
In the present embodiment, the sensed layer 50 is using PVD (Physical Vapor Deposition, physical vapor
Deposition) metal level made of technique.It is appreciated that due to be provided with advance on the insulating barrier 40 the first via H1 and
Second via H2, thus using PVD form the metal level when, the metal level can by the first via H1 with
The driving electrodes Tx connections, and be connected by the second via H2 with the suspension electrode Floating.The a plurality of sense
It is to be etched using photoetching process to survey electrode Rx, a plurality of driving lead Tx Trace and a plurality of suspension lead Floating Trace
The metal level and manufactured metal routing.Wherein, a plurality of sensing electrode Rx, a plurality of driving lead Tx Trace and a plurality of
Suspension lead Floating Trace are respectively positioned on the lower section of black matrix (not shown).
Referring to Fig. 3, the embedded touch control panel 100 also includes thin film transistor (TFT) array 10, first medium layer
20th, second dielectric layer 60 and pixel electrode layer 70, the thin film transistor (TFT) array 10 are formed in array basal plate (not shown),
The first medium layer 20 is formed on the thin film transistor (TFT) array 10, and the common electrode layer 30 is formed at described first and is situated between
On matter layer 20, the second dielectric layer 60 is formed in the sensed layer 50, and is filled in a plurality of sensing electrode Rx, a plurality of
The gap formed between driving lead Tx Trace and a plurality of suspension lead Floating Trace.The shape of pixel electrode layer 70
Described in Cheng Yu in second dielectric layer 60.
The operation principle of embedded touch control panel 100 described in the present embodiment is further illustrated below：
In touch-control sweep phase, a plurality of driving lead Tx Trace provide drive signal for the driving electrodes Tx,
The a plurality of driving electrodes Tx provides drive signal as emission electrode；The a plurality of sensing electrode Rx as receiving electrode,
Receive the drive signal that the driving electrodes Rx is provided；The a plurality of suspension lead Floating Trace, which are empty, (not to be accessed
The vacant state of any signal), multiple suspension electrode Floating are empty.In the display stage, a plurality of driving lead
Tx Trace provide common electric voltage for the driving electrodes Tx；The a plurality of sensing electrode Rx access common electric voltages are empty；It is more
Suspension lead Floating Trace described in bar provide common electric voltage for the suspension electrode Floating.In the present embodiment,
The a plurality of sensing electrode Rx is preferably to access common electric voltage in the display stage.
The a plurality of sensing electrode Rx forms wire netting grating texture, and the suspension electrode Floating is arranged at a plurality of institute
Sensing electrode Rx underface is stated, the suspension electrode Floating is used to enter the sensing electrode Rx in touch-control sweep phase
Row signal compensation, to solve the problems, such as the sensing electrode Rx of wire netting trellis signal deficiencies that may be present.Specifically, institute
State the common electric voltage output end that suspension lead Floating Trace one end is connected to drive circuit (not shown).Scanned in touch-control
Stage, the drive circuit disconnect the company between the common electric voltage output end and the suspension lead Floating Trace
Connect, so that the suspension electrode Floating is to be empty state.The suspension electrode Floating and the sensing electrode Rx it
Between form the first inductance capacitance, because the sensing electrode Rx is wire netting trellis, sense caused by first inductance capacitance
Potential is smaller, causes the induced potential of the sensing electrode Rx relatively low, induced signal deficiency.When the embedded touch control panel
100 when receiving touch, the suspension electrode Floating and the touch executive agent (such as stylus, hand
Refer to etc.) between form the second inductance capacitance, second inductance capacitance causes the induced potential of the suspension electrode Floating
Get a promotion, and then make it that the induced potential of the sensing electrode Rx is strengthened, so as to realize in touch-control sweep phase to institute
State sensing electrode Rx signal compensation.In the display stage, the drive circuit turns on the common electric voltage output end and hanged with described
Connection between floating lead Floating Trace, using by the suspension lead Floating Trace as the suspension electrode
Floating provides common electric voltage.
Referring to Fig. 6, second embodiment of the invention provides a kind of manufacture method of the embedded touch control panel 100, institute
State method and comprise at least following steps：
Step S201：Thin film transistor (TFT) array 10, first medium layer 20 and public electrode are sequentially formed on array base palte
Layer 30；
Step S202：The common electrode layer 30 is divided into by multiple driving areas 31 and multiple floating zones using photoetching process
33, to form multiple driving electrodes Tx and multiple suspension electrode Floating；
Specifically, the common electrode layer 30 is divided into by multiple driving areas 31 using photoetching process first, it is multiple described
Drive the parallel arranged of area 31, and spaced setting successively；Then etched using photoetching process in each driving area 31
Multiple annular slotted hole S through the common electrode layer 30 are formed, the shape one in the region that each annular slotted hole S is surrounded
Floating zone 33, multiple annular slotted holes are opened up respectively between each driving area 31 and multiple floating zones 33 being independently arranged
S, i.e., separated between described driving area 31 and the floating zone 33 by the annular slotted hole S.
It is overall line structure to be provided with driving electrodes Tx, the driving electrodes Tx in each driving area 31, more
Driving electrodes Tx in the individual driving area 31 collectively forms row driving array.Multiple floating zones 33 are arranged in arrays, and
Suspension electrode Floating is provided with each floating zone 33.
Step S203：Insulating barrier 40 is formed in the common electrode layer 30 using photoetching process, and in the insulating barrier
Position corresponding with the driving electrodes Tx forms the first via H1 on 40, and corresponding with the suspension electrode Floating
Position formed the second via H2；
Wherein, the insulating barrier 40 can be made up of silicon nitride SiNx.Driving electrodes Tx described in the first via H1 faces
Set, and run through the insulating barrier 40；Suspension electrode Floating described in the second via H2 faces is set, and through described
Insulating barrier 40；Meanwhile the insulating barrier 40 is additionally operable to fill the annular slotted hole S, with electrically isolate the driving electrodes Tx with
The suspension electrode Floating.In the present embodiment, the first via H1 is set close to the driving electrodes Tx sides, institute
The second via H2 is stated close to the centrally disposed of the suspension electrode Floating.
Step S204：Using PVD (Physical Vapor Deposition, physical vapour deposition (PVD)) techniques described exhausted
Sensed layer 50 is formed in edge layer 40；
Wherein, during the sensed layer 50 is formed, the metal of sensed layer 50 by the first via H1 with
The driving electrodes Tx connections, and be connected by the second via H2 with the suspension electrode Floating.
Step S205：The sensed layer 50 is etched using photoetching process, forms a plurality of sensing electrode Rx, more respectively
Bar drives lead Tx Trace and a plurality of suspension lead Floating Trace；
Wherein, the sensing electrode Rx is arranged above the suspension electrode Floating, and on orthographic projection direction with
The driving electrodes Tx is mutually perpendicular to.The driving lead Tx Trace are arranged above the driving electrodes Tx, and pass through the
The one via H1 and driving electrodes Tx is electrically connected with.The suspension lead Floating Trace are arranged at the suspension electrode
Above Floating, and it is electrically connected with by the second via H2 and suspension electrode Floating.In the present embodiment, it is each
Arrange and a two sensing electrode Rx and suspension lead Floating Trace be arranged at intervals above the suspension electrode Floating,
Two sensing electrode Rx are set on orthographic projection direction respectively close to the suspension electrode Floating both sides；The suspension
Lead Floating Trace are centrally disposed close to the suspension electrode Floating on orthographic projection direction, and each institute
Suspension lead Floating Trace are stated by multiple second via H2 and multiple suspension electrodes positioned at a row
Floating is electrically connected with.It is appreciated that sensed corresponding to above multiple row suspension electrode Floating of a row
Electrode Rx bar number may be arranged as being more than two.
Step S206：Second dielectric layer 60 and pixel electrode layer 70 are sequentially formed in the sensed layer 50；
Wherein, the second dielectric layer 60 fills a plurality of sensing electrode Rx, a plurality of driving lead Tx Trace and more
The gap formed between bar suspension lead Floating Trace.
The embedded touch control panel 100 by the sensing electrode Rx by being individually layered setting, so that the drive
Moving electrode Tx can keep overall line structure, be walked without increasing for the bridge joint metal bridged with a line driving electrodes Tx
Line, simplifies the structure and wiring complexity of the embedded touch control panel 100, and reduces the manufacture embedded touch
The technology difficulty of panel 100, be advantageous to lift the yield that touch-control shows product.Meanwhile save the bridge joint metal routing so that
The embedded touch control panel 100 is applied to the design of the touch-control display product of more high-res and aperture opening ratio, is advantageous to be lifted
Touch-control shows the display quality of product.
The above disclosed right for being only presently preferred embodiments of the present invention, the present invention can not being limited with this certainly
Scope, one of ordinary skill in the art will appreciate that all or part of flow of above-described embodiment is realized, and according to right of the present invention
It is required that the equivalent variations made, still fall within and invent covered scope.
Claims (10)
- A kind of 1. embedded touch control panel, it is characterised in that the embedded touch control panel include common electrode layer, insulating barrier and Sensed layer, the common electrode layer include multiple driving areas, and multiple driving areas are arranged side by side and spaced setting, each described Driving electrodes are provided with driving area, multiple floating zones being independently arranged are included in each driving area, it is each described outstanding Suspension electrode is provided with floating region, the insulating barrier is formed in the common electrode layer, and the sensed layer is formed at described On insulating barrier, the sensed layer includes a plurality of sensing electrode, and the sensing electrode is arranged above the suspension electrode, shown Stage, the driving electrodes, suspension electrode and sensing electrode access common electric voltage, in touch-control sweep phase, the driving electricity Pole is used to provide drive signal, and the sensing electrode receives the drive signal that the driving electrodes provide, and the suspension electrode is put Sky, and signal compensation is provided for the sensing electrode, wherein, the insulating barrier offers multiple second vias, second mistake Suspension electrode described in the face of hole is set, and the sensed layer also includes a plurality of suspension lead, and the suspension lead is arranged at described outstanding Above floating electrode, and it is electrically connected with by second via and the suspension electrode.
- 2. embedded touch control panel as claimed in claim 1, it is characterised in that the insulating barrier offers multiple first mistakes Hole, driving electrodes described in the first via face are set, and the sensed layer also includes a plurality of driving lead, the driving lead It is arranged above the driving electrodes, and is electrically connected with by first via and the driving electrodes.
- 3. embedded touch control panel as claimed in claim 2, it is characterised in that multiple suspension electrodes are arranged in arrays, Two sensing electrodes and a suspension lead are arranged at intervals above each row suspension electrode, two sensing electrodes are in orthographic projection Direction respectively positioned at the suspension electrode both sides set, and each sensing electrode on orthographic projection direction with the driving Electrode is mutually perpendicular to；The suspension lead in orthographic projection direction close to the centrally disposed of the suspension electrode, and described in each Suspension lead is electrically connected with multiple suspension electrodes positioned at a row respectively by multiple second vias.
- 4. embedded touch control panel as claimed in claim 2, it is characterised in that the embedded touch control panel also includes film Transistor array, first medium layer, second dielectric layer and pixel electrode layer, the first medium layer are formed at the film crystal On pipe array, the common electrode layer is formed on the first medium layer, and the second dielectric layer is formed at the sensed layer On, and be filled between a plurality of sensing electrode, a plurality of driving lead and a plurality of suspension lead, the pixel electrode layer is formed In in the second dielectric layer.
- 5. embedded touch control panel as claimed in claim 1, it is characterised in that each driving area and multiple independences Multiple annular slotted holes are opened up between the floating zone of setting respectively, the annular slotted hole is set through the common electrode layer, and by The insulating barrier filling, to electrically isolate the driving electrodes and the suspension electrode.
- 6. a kind of manufacture method of embedded touch control panel, it is characterised in that methods described includes：Thin film transistor (TFT) array, first medium layer and common electrode layer are sequentially formed on array base palte；The common electrode layer is divided into multiple driving areas and multiple floating zones, to form multiple driving electrodes and multiple suspensions Electrode；Insulating barrier is formed in the common electrode layer, and position corresponding with the driving electrodes is formed on the insulating barrier First via, and form the second via in position corresponding with the suspension electrode；Sensed layer is formed on the insulating barrier；The sensed layer is etched, forms a plurality of sensing electrode, a plurality of driving lead and a plurality of suspension lead respectively；AndSecond dielectric layer and pixel electrode layer are sequentially formed in the sensed layer.
- 7. the manufacture method of embedded touch control panel as claimed in claim 6, it is characterised in that described by the public electrode Floor is divided into multiple driving areas and multiple floating zones, including：The common electrode layer is divided into by multiple driving areas using photoetching process, wherein, multiple driving area's parallel arrangeds, And mutually it is arranged at intervals successively；AndUsing photoetching process, etching forms multiple annular slotted holes through the common electrode layer in each driving area, with One floating zone of shape in the region that each annular slotted hole surrounds.
- 8. the manufacture method of embedded touch control panel as claimed in claim 7, it is characterised in that the insulating barrier is by silicon nitride It is made, and is filled in the annular slotted hole through photoetching process, electrically isolates the driving electrodes and the suspension electrode.
- 9. the manufacture method of embedded touch control panel as claimed in claim 6, it is characterised in that the sensed layer is by physics gas Phase depositing operation is made.
- 10. the manufacture method of embedded touch control panel as claimed in claim 6, it is characterised in that a plurality of sensing electrode, A plurality of driving lead and a plurality of suspension lead are etched to the sensed layer by photoetching process and formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510564176.4A CN105117085B (en) | 2015-09-07 | 2015-09-07 | Embedded touch control panel and its manufacture method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510564176.4A CN105117085B (en) | 2015-09-07 | 2015-09-07 | Embedded touch control panel and its manufacture method |
Publications (2)
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| CN105677086B (en) | 2015-12-31 | 2018-11-23 | 武汉华星光电技术有限公司 | The inline type touch screen of mutual capacitance type |
| CN106933398B (en) * | 2015-12-31 | 2020-03-20 | 瀚宇彩晶股份有限公司 | Touch panel and electronic device |
| WO2017124104A1 (en) * | 2016-01-15 | 2017-07-20 | Case Western Reserve University | Dielectric sensing for sample characterization |
| CN108089748A (en) * | 2017-12-14 | 2018-05-29 | 武汉华星光电半导体显示技术有限公司 | Flexible touch panel and flexible OLED display panel |
| CN111459344B (en) * | 2020-03-05 | 2021-08-10 | 深圳市鸿合创新信息技术有限责任公司 | Touch control equipment and manufacturing process thereof |
| CN112799549A (en) * | 2021-02-05 | 2021-05-14 | 南昌欧菲显示科技有限公司 | Touch screen and electronic equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103293785A (en) * | 2012-12-24 | 2013-09-11 | 上海天马微电子有限公司 | TN (twisted nematic) type liquid crystal display device and touch control method thereof |
| CN104460139A (en) * | 2014-12-31 | 2015-03-25 | 深圳市华星光电技术有限公司 | Touch display device and electronic device |
| CN104536629A (en) * | 2015-01-16 | 2015-04-22 | 京东方科技集团股份有限公司 | Embedded type touch screen and display device |
| CN204302937U (en) * | 2014-11-24 | 2015-04-29 | 上海天马微电子有限公司 | Touch display device and electronic equipment |
| CN104699351A (en) * | 2015-04-01 | 2015-06-10 | 上海天马微电子有限公司 | Array substrate, touch display panel and touch display device |
-
2015
- 2015-09-07 CN CN201510564176.4A patent/CN105117085B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103293785A (en) * | 2012-12-24 | 2013-09-11 | 上海天马微电子有限公司 | TN (twisted nematic) type liquid crystal display device and touch control method thereof |
| CN204302937U (en) * | 2014-11-24 | 2015-04-29 | 上海天马微电子有限公司 | Touch display device and electronic equipment |
| CN104460139A (en) * | 2014-12-31 | 2015-03-25 | 深圳市华星光电技术有限公司 | Touch display device and electronic device |
| CN104536629A (en) * | 2015-01-16 | 2015-04-22 | 京东方科技集团股份有限公司 | Embedded type touch screen and display device |
| CN104699351A (en) * | 2015-04-01 | 2015-06-10 | 上海天马微电子有限公司 | Array substrate, touch display panel and touch display device |
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