CN105103265B - System and method for analyzing gas sample using secondary ion mass spectrometer - Google Patents

Abstract

Provided are a system and method for analyzing a gas sample by using a secondary ion mass spectrometer. The system comprises: an extraction electrode, a metal plate and a gas lead-in pipe, wherein the extraction electrode and the metal plate are located in a sample chamber of the secondary ion mass spectrometer; a first through hole through which primary ions pass, a second through hole through which secondary ions pass, and a third through hole through which the gas lead-in pipe penetrates are provided on the extraction electrode; after penetrating through the third through hole, the gas lead-in pipe leads the gas sample to the surface of the metal plate, and the gas sample is bombarded by the primary ions to form the secondary ions; and an electric field is formed between the extraction electrode and the metal plate, so that the secondary ions pass through the second through hole to depart from the metal plate and enter the secondary ion mass spectrometer for mass analysis.

Description

Systems and methods for analyzing gas samples using a secondary ion mass spectrometer

technical field

The invention relates to the technical field of analytical instruments, in particular to a system and method for analyzing gas samples using a secondary ion mass spectrometer.

Background technique

Secondary ion mass spectrometer is usually used for micro-area in-situ analysis, surface analysis and depth analysis of solid samples, and it is widely used in the research of materials science, life science, geological science and other fields. The analysis process of the secondary ion mass spectrometer is to place the solid sample in a vacuum, and use a specific type of primary ion to bombard the solid sample. Under the bombardment of the primary ion with a certain energy, the sample sputters out secondary ions. The secondary ion represents information about the sample composition. According to the quality of the sputtered secondary ions, the electric field or magnetic field is used to separate the secondary ions in time or space, so as to determine the type and quantity of the secondary ions, so that the qualitative and quantitative analysis of solid samples can be realized. .

Generally, the principle of a secondary ion mass spectrometer using a magnetic field as a mass analyzer is shown in FIG. 1 . The primary ion source 1 generates primary ions 2 . The electric field generated by the primary ions 2 passing through the ion optical lenses 3, 5, 6 is focused to the surface of the sample 7 (the sample 7 is located in the sample chamber), and the sample 7 is bombarded. Primary ions 2 and ion optical lenses 3 , 5 , 6 are located in vacuum chamber 4 . The primary ion 2 bombards the sample 7 to ionize part of the sample 7 to generate secondary ions 9 . Secondary ions 9 pass through ion optical lenses 10 , 11 , 12 , electrostatic field analyzer 13 , ion optical lens 15 , magnetic field analyzer 16 , and ion optical lens 18 to reach receiver 19 . The sample 7 and the ion optics lenses 10 , 11 , 12 are located in the vacuum chamber 8 . The ion optical lens 15 is located in the vacuum cavity 14 . The ion optics lens 18 is located inside the vacuum cavity 17 . The electrostatic field analyzer 13 and the magnetic field analyzer 16 form a double focusing structure, which realizes angular focusing and energy focusing while realizing mass separation of secondary ions 9 . The strength of the magnetic field analyzer 16 determines the type of ions received by the receiver 19 . According to the signal strength received by the receiver 19, the sample 7 can be analyzed qualitatively and quantitatively.

Traditionally, secondary ion mass spectrometers only analyze solid samples, not gas samples. Therefore, secondary ion mass spectrometers have certain requirements on the shape of samples (that is, they cannot analyze gas samples), and the scope of use has certain limitations. If the secondary ion mass spectrometer can be used to analyze gas samples, the application field of the secondary ion mass spectrometer will certainly be extended.

Contents of the invention

The main object of the present invention is to provide a system for analyzing gas samples using a secondary ion mass spectrometer.

Another object of the present invention is to provide a method for analyzing a gas sample using a secondary ion mass spectrometer.

In order to achieve the above object, the present invention provides a system for analyzing gas samples using a secondary ion mass spectrometer, which is characterized in that it includes: an extraction pole, a metal plate and a gas introduction conduit; the extraction pole and the metal plate are located at the In the sample chamber of the secondary ion mass spectrometer, the extraction electrode is provided with a first through hole for passing primary ions, a second through hole for passing secondary ions, and a hole for passing through the gas introduction conduit. The third through hole; the gas introduction conduit guides the gas sample to the surface of the metal plate after passing through the third through hole, and the gas sample forms the secondary gas sample under the bombardment of the primary ion ions; an electric field is formed between the extraction electrode and the metal plate, so that the secondary ions fly away from the metal plate through the second through hole and enter the secondary ion mass spectrometer for mass analysis.

In any of the above schemes, it is preferred that the extraction electrode is at ground potential, the secondary ions are negative ions, and the metal plate is connected to a negative voltage so that the secondary ions are repelled into the secondary ion mass spectrometer for further processing. quality analysis.

In any of the above schemes, preferably, the gas sample is guided to a certain area on the surface of the metal plate, and the primary ion bombards this area so that the gas sample near this area is ionized to generate the secondary ionization ion. ion.

In any of the above schemes, preferably, a certain distance is maintained between the extraction electrode and the metal plate, the sample chamber is in a vacuum state, and the electric field is a uniform electric field.

In any of the above solutions, preferably, the distance is 5 millimeters (ie mm), the surface of the metal plate is smooth and flat; the metal plate does not contain elements contained in the gas sample.

In any of the above schemes, preferably, the second through hole on the extraction pole is located at the center of the extraction pole to form a central hole, and the first through hole and the third through hole are symmetrically distributed in the second through hole. both sides of the hole.

Preferably in any of the above schemes, the thickness of the extraction pole is 2 millimeters (that is, mm), and the material is a metal material including non-magnetic stainless steel; the first through hole, the second through hole, and the third through hole The diameter is 2 millimeters (that is, mm); the material of the metal plate includes pure gold or indium or tungsten metal material.

In any of the above schemes, it is preferred that the gas introduction conduit further includes a valve for adjusting the flow rate of the gas sample into the sample chamber; the gas introduction conduit is a thin tube made of a metal material, and the metal Materials include non-magnetic stainless steel.

In any of the above schemes, preferably, the gas introduction conduit is grounded, the gas introduction conduit introduces the gas sample from the sample chamber into the sample chamber, and the end of the gas introduction conduit is connected to the outlet Extremely flush, the inner diameter of the gas introduction conduit is 0.5 millimeters (that is, mm), and the outer diameter is 1 millimeter (that is, mm).

Preferably in any of the above schemes, the primary ions include cesium ions or gallium ions; the gas sample is a non-strongly corrosive gas, including oxygen (that is O ), nitrogen (that is N ) or carbon dioxide ( That is CO2); the secondary ion mass spectrometer includes a magnetic mass spectrometer, a time-of-flight mass spectrometer or a quadrupole mass spectrometer; the secondary ion enters the electric field and/or magnetic field of the secondary ion mass spectrometer for mass analyze.

The present invention also provides a method for analyzing a gas sample using a secondary ion mass spectrometer, comprising using an extraction pole, a metal plate and a gas introduction conduit; the extraction pole and the metal plate are located on the sample of the secondary ion mass spectrometer In the chamber, the extraction electrode is provided with a first through hole for passing primary ions, a second through hole for passing secondary ions, and a third through hole for passing through the gas introduction conduit, which is characterized in that , including the following steps:

Step 1, passing the gas introduction conduit through the third through hole, and using the gas introduction conduit to guide the gas sample to the surface of the metal plate;

Step 2, using the primary ions to bombard the gas sample guided to the surface of the metal plate to form the secondary ions;

Step 3, forming an electric field between the extraction electrode and the metal plate, so that the secondary ions fly away from the metal plate through the second through hole and enter the secondary ion mass spectrometer for mass analysis.

In any of the above schemes, it is preferred that step 3 specifically includes: connecting the extraction electrode to the ground potential, and connecting the metal plate to a negative voltage so that the secondary ions are repelled into the secondary ion mass spectrometer for mass Analysis, wherein the secondary ions are negative ions.

In any of the above schemes, it is preferred that step 1 specifically includes: guiding the gas sample to a certain area on the surface of the metal plate; step 2 specifically includes: bombarding the area with the primary ions so that The gas sample is ionized to generate the secondary ions.

In any of the above-mentioned schemes, it is preferable that before step 1, the sample chamber is evacuated; in step 3, a certain distance is maintained between the extraction electrode and the metal plate, and the electric field is a uniform electric field.

In any of the above solutions, preferably, the distance is 5 millimeters (ie mm), the surface of the metal plate is smooth and flat; the metal plate does not contain elements contained in the gas sample.

In any of the above schemes, preferably, the second through hole on the extraction pole is located at the center of the extraction pole to form a central hole, and the first through hole and the third through hole are symmetrically distributed in the second through hole. both sides of the hole.

Preferably in any of the above schemes, the thickness of the extraction pole is 2 millimeters (that is, mm), and the material is a metal material including non-magnetic stainless steel; the first through hole, the second through hole, and the third through hole The diameter is 2 millimeters (that is, mm); the material of the metal plate includes pure gold or indium or tungsten metal material.

Preferably in any of the above schemes, step 1 also includes using the valve included in the gas introduction conduit to adjust the flow rate of the gas sample into the sample chamber; the gas introduction conduit is a fine metal material Tube, the metal material includes non-magnetic stainless steel.

In any of the above schemes, preferably, the gas introduction conduit in step 1 is grounded, the gas introduction conduit introduces the gas sample from the sample chamber into the sample chamber, and the end of the gas introduction conduit is connected to the The extraction poles are flush, the inner diameter of the gas introduction conduit is 0.5 millimeters (that is, mm), and the outer diameter is 1 millimeter (that is, mm).

Preferably in any of the above schemes, the primary ions include cesium ions or gallium ions; the gas sample is a non-strongly corrosive gas, including oxygen (that is O ), nitrogen (that is N ) or carbon dioxide ( That is CO2); The secondary ion mass spectrometer includes a magnetic mass spectrometer, a time-of-flight mass spectrometer or a quadrupole mass spectrometer; the electric field and/or that the secondary ion enters the secondary ion mass spectrometer in step 3 Magnetic field for mass analysis.

After adopting the technical scheme of the present invention, compared with the prior art, the present invention has the following advantages: the gas sample is guided to the surface of the metal plate by the gas introduction conduit for ionization, and the secondary Ions are guided into the secondary ion mass spectrometer for mass analysis, so the purpose of using the secondary ion mass spectrometer to analyze gas samples can be achieved, expanding the application field of traditional secondary ion mass spectrometers; in addition, the present invention can use large-mass primary ions Bombarding the gas sample, because the ionization efficiency of the gas sample is very high for the primary ion with a large mass (such as cesium ion, etc.), so the sensitivity of the gas sample analysis can be improved, and the analysis effect is better.

Description of drawings

In order to illustrate the technical solution of the present invention more clearly, the accompanying drawings that need to be used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. Ordinary technicians can also obtain other drawings based on these drawings on the premise of not paying creative work.

Fig. 1 is the structural representation of existing secondary ion mass spectrometer;

Fig. 2 is a schematic structural diagram of a system for analyzing gas samples using a secondary ion mass spectrometer according to the present invention.

detailed description

The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on this The embodiments in the invention, and all other embodiments obtained by persons of ordinary skill in the art without creative effort, all belong to the scope of protection of the present invention.

Example 1

As shown in Figure 2, Embodiment 1 of the present invention provides a system for analyzing gas samples using a secondary ion mass spectrometer, including: an extraction pole 22, a metal plate 23 and a gas introduction conduit 28; the extraction pole 22 and the The metal plate 23 is located in the sample chamber 32 of the secondary ion mass spectrometer, and the extraction pole is provided with a first through hole 34 for passing through the primary ion 24 (the primary ion 24 is along the path 21 of the primary ion), for Through the second through hole 35 of the secondary ion 27 (the secondary ion 27 is along the path 29 of the secondary ion), and the third through hole 36 for passing through the gas introduction conduit; the gas introduction conduit 28 passes through After passing through the third through hole, the gas sample is guided to the surface of the metal plate, and the gas sample forms the secondary ion under the bombardment of the primary ion; the extraction pole and the metal plate An electric field is formed between them, so that the secondary ions fly away from the metal plate through the second through hole and enter the secondary ion mass spectrometer for mass analysis.

Since the gas sample is guided to the surface of the metal plate by the gas introduction conduit for ionization, and the electric field between the extraction electrode and the metal plate is used to guide the secondary ions into the secondary ion mass spectrometer for mass analysis, it is possible to use the secondary ion The purpose of mass spectrometer analysis gas sample has expanded the application field of traditional secondary ion mass spectrometer; In addition, the present invention can use the primary ion of large mass to bombard gas sample, because the primary ion of larger mass (such as cesium ion etc.) The ionization efficiency of gas samples is very high, so the sensitivity of gas sample analysis can be improved, and the analysis effect is better.

The extraction electrode 22 is grounded at potential 30, the secondary ions 27 are negative ions, and the metal plate is connected to a negative voltage 31 so that the secondary ions are repelled into the secondary ion mass spectrometer for mass analysis.

The gas sample 26 is guided to a certain area 25 on the surface of the metal plate, and the primary ions 24 bombard this area to ionize the gas sample 26 near this area to generate the secondary ions 27 .

A certain distance is maintained between the extraction electrode 22 and the metal plate 23, the sample chamber is in a vacuum state; the electric field is a uniform electric field.

The distance is about 5 mm, and the surface of the metal plate is smooth and flat; the metal plate does not contain elements contained in the gas sample.

The second through hole on the extraction pole 22 is located at the center of the extraction pole to form a central hole, and the first through hole and the third through hole are symmetrically distributed on both sides of the second through hole.

The thickness of the extraction pole 22 is about 2 millimeters, and the material is a metal material including non-magnetic stainless steel; the diameter of the first through hole, the second through hole, and the third through hole is about 2 millimeters; the material of the metal plate includes pure gold or indium or tungsten metal materials.

The gas introduction conduit 28 also includes a valve 33 for adjusting the flow rate of the gas sample into the sample chamber; the gas introduction conduit is a narrow tube made of metal material including non-magnetic stainless steel.

Optimally, the gas introduction conduit 28 is at ground potential (here the gas introduction conduit is at ground potential, so that the gas introduction conduit and the extraction electrode are connected to the same ground potential to ensure that a uniform electric field is formed between the metal plate and the extraction electrode), and the gas introduction A conduit introduces the gas sample from the sample chamber into the sample chamber, and optimally, the end of the gas introduction conduit is flush with the extraction electrode (for example, the distance between the end of the gas introduction conduit and the metal plate 23 can be made Consistent with the distance between the extraction pole 22 and the metal plate 23, so that the end of the gas introduction conduit is flush with the extraction pole. At this time, the distance between the end of the gas introduction conduit and the metal plate is about 5 mm. Such a distance can prevent Because the distance is too far, the gas diffuses randomly into the vacuum and is not easily bombarded into ions, and it can also prevent the uniform electric field formed between the metal plate and the extraction electrode due to the short distance), so that the gas can be introduced into the conduit The end is kept level with the metal plate, so that the gas can easily reach the metal plate, and ensure that a uniform electric field is formed between the extraction electrode 22 and the metal plate 23; the inner diameter of the gas introduction conduit is about 0.5 mm, and the outer diameter is about 1 mm.

The primary ion 24 includes cesium ion or gallium ion; the gas sample 26 is a non-strongly corrosive gas, including oxygen, nitrogen or carbon dioxide; the secondary ion mass spectrometer includes a magnetic mass spectrometer, a time-of-flight mass spectrometer or A quadrupole mass spectrometer; the secondary ions 27 enter the electric field and/or magnetic field of the secondary ion mass spectrometer for mass analysis.

Example 2

Similar to Example 1, the present invention places a flat pure metal plate in the sample chamber, introduces the gas sample to the surface of the sample through the gas introduction conduit, uses primary ions to bombard the metal plate, ionizes the gas molecules near the metal plate, and forms Negative ions, because the metal plate is negatively charged, negative ions are repelled into the secondary ion mass spectrometer for mass analysis.

As shown in FIG. 2 , the system of the present invention mainly includes: an extraction electrode 22 , a metal plate 23 , a gas introduction conduit 28 , a sample chamber 32 , and a valve 33 . The extraction pole 22 and the metal plate 23 are located in the sample chamber 32 . The lead-out pole 22 is made of metal, which can be non-magnetic stainless steel with a thickness of about 2 mm. There are three holes with a diameter of about 2 mm on it. The path 21 of the primary ion 24, the path 29 of the secondary ion 27 and the gas introduction conduit 28 pass through respectively. these three holes. The distance between the extraction pole 22 and the metal plate 23 is about 5 millimeters. The extraction pole 22 is connected to the ground potential 30, and the metal plate 23 is connected to a negative voltage. An electric field is formed between the extraction pole 22 and the metal plate 23, so that secondary ions 27 fly away from the surface of the metal plate 23 through the center hole of the extraction pole 22.

The metal plate 23 can be made of pure gold or metal materials such as indium or tungsten. Preferably, the metal plate 23 cannot contain the elements contained in the gas sample 26 to be analyzed, so as to prevent the primary ions 24 from ionizing the elements in the metal plate 23 and affecting the analysis results. Preferably, the surface of the metal plate 23 should be smooth and flat, so as to ensure a uniform electric field between the extraction electrode 22 and the metal plate 23 .

The gas introduction conduit 28 is a thin tube made of metal material, which can be non-magnetic stainless steel. The gas introduction conduit 28 is at ground potential. The gas introduction conduit 28 introduces the gas sample 26 from outside the sample chamber 32 to the surface of the metal plate 23 inside the sample chamber 32 . Preferably, the end of the gas introduction conduit 28 is flush with the extraction pole 22 , the inner diameter of the gas introduction conduit 28 is about 0.5 mm, and the outer diameter is about 1 mm, so as not to affect the uniformity of the electric field between the extraction electrode 22 and the metal plate 23 . Preferably, the sample chamber 32 is under vacuum. Valve 33 can regulate the flow of gas sample 26 into sample chamber 32 .

The working process of the system of the present invention is as follows: the primary ions 24 reach the surface of the metal plate 23 along the path 21, and bombard the metal plate 23 with a certain energy. Since the gas sample 26 is generally composed of non-metal elements, the primary ions 24 can be cesium ions or gallium ions, etc., which are easy to ionize non-metal elements. The gas sample 26 to be analyzed is transported to a certain area 25 on the surface of the metal plate 23 (ie, the bombardment area 25 ) through the gas introduction conduit 28 . The flow rate of the gas sample 26 entering the sample chamber 32 can be controlled by adjusting the valve 33 outside the sample chamber 32 . Preferably, the gas sample 26 can be any non-corrosive gas (oxygen, nitrogen or carbon dioxide, etc.). At the bombardment region 25 , the primary ions 24 bombard the gas sample 26 and ionize it, thereby converting into secondary ions 27 . Due to the electric field between the extraction pole 22 and the metal plate 23, the secondary ions 27 fly away from the bombardment area 25 along the path 29 under the action of the electric field, and enter the electric field or magnetic field to realize mass separation.

The secondary ion mass spectrometer may be a magnetic mass spectrometer, or a time-of-flight mass spectrometer or a quadrupole mass spectrometer. The system of the invention can use the secondary ion mass spectrometer to carry out qualitative and quantitative analysis on gas samples, expanding its application field.

Example 3

Embodiment 2 of the present invention provides a method for analyzing gas samples using a secondary ion mass spectrometer, including using an extraction pole, a metal plate, and a gas introduction conduit; the extraction pole and the metal plate are located in the secondary ion mass spectrometer In the sample chamber, the extraction electrode is provided with a first through hole for passing primary ions, a second through hole for passing secondary ions, and a third through hole for passing through the gas introduction conduit, including The following steps:

Step 1, passing the gas introduction conduit through the third through hole, and using the gas introduction conduit to guide the gas sample to the surface of the metal plate;

Step 2, using the primary ions to bombard the gas sample guided to the surface of the metal plate to form the secondary ions;

Step 3, forming an electric field between the extraction electrode and the metal plate, so that the secondary ions fly away from the metal plate through the second through hole and enter the secondary ion mass spectrometer for mass analysis.

Step 3 specifically includes: connecting the extraction electrode to the ground potential 30, and connecting the metal plate to a negative voltage so that the secondary ions are repelled into the secondary ion mass spectrometer for mass analysis, wherein the secondary ions are negative ions.

Step 1 specifically includes: guiding the gas sample to a certain area on the surface of the metal plate; Step 2 specifically includes: bombarding the area with the primary ions to ionize the gas sample near the area to generate the secondary ions.

Before step 1, it also includes vacuumizing the sample chamber; in step 3, a certain distance is maintained between the extraction electrode and the metal plate, and the electric field is a uniform electric field. The distance is about 5 mm, and the surface of the metal plate is smooth and flat; the metal plate does not contain elements contained in the gas sample.

In this method, the second through hole on the extraction pole is located at the center of the extraction pole to form a central hole, and the first through hole and the third through hole are symmetrically distributed on both sides of the second through hole. The thickness of the extraction pole is about 2 millimeters, and the material is a metal material including non-magnetic stainless steel; the diameter of the first through hole, the second through hole, and the third through hole is about 2 millimeters; the material of the metal plate includes pure Gold or indium or tungsten metal material.

Step 1 also includes using the valve included in the gas introduction conduit to adjust the flow rate of the gas sample into the sample chamber; the gas introduction conduit is a narrow tube made of metal material, and the metal material includes non-magnetic stainless steel.

In step 1, the gas introduction conduit is connected to a potential, the gas introduction conduit introduces the gas sample from the sample chamber into the sample chamber, the end of the gas introduction conduit is flush with the extraction electrode, and the gas The inner diameter of the introduction catheter is about 0.5 mm, and the outer diameter is about 1 mm.

In this method, the primary ions include cesium ions or gallium ions; the gas sample is a non-strongly corrosive gas, including oxygen, nitrogen or carbon dioxide; the secondary ion mass spectrometer includes a magnetic mass spectrometer, a time-of-flight mass spectrometer Or a quadrupole mass spectrometer; the secondary ions in step 3 enter the electric field and/or magnetic field of the secondary ion mass spectrometer for mass analysis.

Example 4

Similar to Example 3, the method adopted in Example 4 of the present invention comprises the following steps:

Step 1. Place the metal plate in the sample chamber of the secondary ion mass spectrometer for general analysis of solid samples, evacuate the sample chamber, and apply a negative voltage 31 to the metal plate;

Step 2, introduce the gas sample into the sample chamber through the gas introduction conduit; the gas introduction conduit can be made of metal stainless steel, with an inner diameter of about 0.5 mm and an outer diameter of about 1 mm; the outlet of the gas introduction conduit is about 5 mm away from the surface of the metal plate; the gas Introduce the ground potential of the conduit;

Step 3, bombard the metal plate with primary ions to ionize the gas sample (such as gas molecules) near the metal plate to make it into negative ions (ie secondary ions);

Step 4. Negative ions (that is, secondary ions) are sent into the secondary ion mass spectrometer, and the electric field and magnetic field of the secondary ion mass spectrometer are used to perform qualitative and quantitative analysis according to the mass.

Through the description of the above embodiments, those skilled in the art can clearly understand that the present invention can also be implemented through other structures, and the features of the present invention are not limited to the above preferred embodiments. Any change or modification that can be easily conceived by any person familiar with the technology within the technical field of the present invention shall be covered by the patent protection scope of the present invention.

Claims (7)

1. the system that a kind of use ion microprobe analyzes gaseous sample, it is characterised in that include：Extraction pole, metallic plate Conduit is introduced with gas；The extraction pole and the metallic plate are located in the sample room of the ion microprobe, described to draw Go out extremely be provided with for by the first through hole of primary ions, for by the second through hole of secondary ion and for through The gas introduces the third through-hole of conduit；The gas introduces conduit and draws the gaseous sample through after the third through-hole The surface of the metallic plate is directed at, the gaseous sample forms the secondary ion under the bombardment of the primary ions；It is described Electric field is formed between extraction pole and the metallic plate, so that the secondary ion flies away from the metallic plate by second through hole Quality analysis is carried out into the ion microprobe；

Wherein, the extraction pole earthing potential, the secondary ion is anion, and the metallic plate connects negative voltage so that described two Secondary ion carries out quality analysis by repulsion into the ion microprobe；

Wherein, the gaseous sample is directed to the certain area of the metal sheet surface, and the primary ions bombard the region So that the gaseous sample of the areas adjacent is ionized and generates the secondary ion.

2. the system as claimed in claim 1 a, it is characterised in that spacing is kept between the extraction pole and the metallic plate From the sample room is in vacuum state；The electric field is uniform electric field；The distance is 5 millimeters, the surface of the metallic plate It is smooth；The element included without the gaseous sample in the metallic plate.

3. system as claimed in claim 1 or 2, it is characterised in that the second through hole on the extraction pole is located at the extraction The central authorities of pole form centre bore, and the first through hole and third through-hole are symmetrically distributed in the both sides of second through hole；It is described to draw Go out 2 millimeters of the thickness of pole, material is the metal material for including magnetism-free stainless steel；The first through hole, the second through hole, third through-hole 2 millimeters of diameter；The material of the metallic plate includes pure gold or indium or tungsten metal material.

4. system as claimed in claim 1 or 2, it is characterised in that the gas introduces conduit also includes valve, for adjusting The gaseous sample enters the flow of the sample room；The gas introduces conduit and selects tubule made by metal material, the gold Category material includes magnetism-free stainless steel；The gas introduces pipe earth current potential, and the gas introduces conduit by the gaseous sample Introduce from outside the sample room in the sample room, the gas introduces the end of conduit and flushes with the extraction pole, the gas Body introduces 0.5 millimeter of catheter diameter, 1 millimeter of external diameter.

5. system as claimed in claim 1 or 2, it is characterised in that the primary ions include cesium ion or gallium ion；It is described Gaseous sample is the gas without aggressive, including oxygen, nitrogen or carbon dioxide；The ion microprobe includes magnetic Formula mass spectrograph, time of-flight mass spectrometer or quadrupole mass spectrometer；The secondary ion enters the electricity of the ion microprobe Field and/or magnetic field carry out quality analysis.

6. a kind of method that use ion microprobe analyzes gaseous sample, including being drawn using extraction pole, metallic plate and gas Enter conduit；The extraction pole and the metallic plate are located in the sample room of the ion microprobe, are set on the extraction pole Have for by the first through hole of primary ions, for by the second through hole of secondary ion and for through the gas Introduce the third through-hole of conduit, it is characterised in that comprise the following steps：

Step 1, introduces the gas conduit and passes through the third through-hole, and conduit is introduced by the gas sample using the gas Product are guided to the surface of the metallic plate；

Step 2, is bombarded the gaseous sample of guiding to the metal sheet surface using the primary ions, forms institute State secondary ion；

Step 3, between the extraction pole and the metallic plate electric field is formed, and makes the secondary ion pass through second through hole Fly away from the metallic plate carries out quality analysis into the ion microprobe；

Wherein, step 3 is specifically included：By the extraction pole earthing potential, the metallic plate is connect into negative voltage so that described secondary Ion carries out quality analysis by repulsion into the ion microprobe, wherein the secondary ion is anion；Step 1 has Body includes：The gaseous sample is directed to into the certain area of the metal sheet surface；Step 2 is specifically included：Using described Primary ions bombard the region so that the gaseous sample of the areas adjacent is ionized and generates the secondary ion.

7. method as claimed in claim 6, it is characterised in that also include vacuumizing the sample room before step 1；Step Certain distance is kept between extraction pole described in 3 and the metallic plate, the electric field is uniform electric field；The distance is 5 millimeters, The surface of the metallic plate is smooth；The element included without the gaseous sample in the metallic plate.