CN105082091B - High-precision macro and micro combined drive rotary table - Google Patents

Abstract

A high-precision macro-micro combination drive turntable belongs to the micro-motion turntable technology; the base of the macro-motion turntable, the forward-rotation pulley of the macro-motion turntable, the forward-rotation macro-motion turntable, the reverse pulley of the macro-motion turntable, and the reverse macro-motion turntable are sequentially arranged on the base , the micro-motion turntable base, the reverse micro-motion turntable and the stage, adopt the combined structure of forward and reverse piezoelectric micro-drivers and shape memory polymer forward and reverse macro-drivers, and use the shape memory characteristics of shape memory polymers for Drive the object to move, replace the traditional mechanical drive with shape memory effect drive, which greatly simplifies the structure of the drive system and reduces the complexity of the control process. This station has the characteristics of simple and compact structure, easy control, high positioning accuracy and reliable use. .

Description

A high-precision macro-micro combined drive turntable

technical field

The invention belongs to the micro-motion turntable technology, and mainly relates to a high-precision macro-micro combined drive turntable.

Background technique

High-precision turntables occupy an extremely important position in modern cutting-edge industrial production and scientific research fields, and are widely used in fields requiring fine operations such as micro-feeding, optical fiber docking, and precision and ultra-precision machining. At present, the micro-motion drives of high-precision turntables mostly use piezoelectric actuators. Piezoelectric actuators are new micro-displacement devices developed in recent years. They are characterized by small size, large driving force, high resolution, easy control and small output displacement Advantages As a driving element, it has been widely used in precision machinery. However, at present, the macro-motion drive of the high-precision turntable mostly adopts the traditional mechanical transmission device, which has a cumbersome structure, complicated control process, and low positioning accuracy.

Contents of the invention

The purpose of the present invention is to solve the problems existing in the above-mentioned prior art, and to design and provide a high-precision macro-micro combination drive turntable with a new structure, by using a piezoelectric driver as a micro-motion driver, and using a shape-memory polymer driver as a macro-motion The combined structure of the drive achieves the macro drive for coarse positioning, the micro drive for precise positioning, and the two-way rotation of the turntable.

The purpose of the invention is achieved in this way: the base of the macro-moving turntable, the forward-rotating pulley of the macro-moving turntable, the forward-rotating macro-moving turntable, the reverse pulley of the macro-moving turntable, the reverse macro-moving turntable, and the micro-moving turntable are sequentially arranged on the base from bottom to top. The base of the moving turntable, the reverse micro-motion turntable and the stage, the stage is fixed on the upper end surface of the reverse micro-motion turntable through the mounting bolts of the stage, and the base of the micro-motion turntable is fixed on the On the upper end surface of the reverse macro-motion turntable, the reverse macro-motion turntable is fixed on the upper end surface of the reverse pulley of the macro-motion turntable through the mounting bolts of the reverse macro-motion turntable, and the reverse pulley of the macro-motion turntable is fixed on the macro-motion turntable through the mounting bolts The rotating shaft in the base is mounted on the central part of the forward-rotating macro-moving turntable through the rotation fit. The clockwise rotation belt pulley of the turntable is installed in the base of the macro-motion turntable by rotating with the rotating shaft, and the base of the macro-motion turntable is fixed on the base through the mounting bolts of the macro-motion turntable base; The forward-rotating micro-motion turntable is installed on the dynamic flexible mechanism, and the reverse-rotating micro-motion turntable is installed inside the forward-rotating micro-motion turntable through four reverse-rotating micro-motion flexible mechanisms, and the reverse piezoelectric micro-motion drivers are respectively arranged on the forward-rotating micro-motion turntable. In the set notch, the two ends of the reverse piezoelectric micro-driver are respectively in contact with the forward-rotation micro-motion turntable and the reverse-rotation micro-motion turntable, and the forward-rotation piezoelectric micro-driver is respectively arranged in the corresponding groove on the base of the micro-motion turntable. In the mouth, the two ends of the forward-rotating piezoelectric micro-motion driver are respectively in contact with the base of the micro-motion turntable and the forward-rotation micro-motion turntable; the macro-motion turntable reverse belt is set on the macro-motion turntable reverse pulley, and the macro-motion turntable reverse belt The two ends of the two first fasteners are respectively connected to one end of the shape-memory polymer reversal macro-motion driver configured on the left and right sides, and the other ends of the shape-memory polymer reversal macro-motion driver on the left and right sides It is connected with the forward-rotating macro-motion turntable through the second fastener, wherein the shape-memory polymer reverse macro-motion actuator on the left is in the pre-deformed state of unfolding and elongation, and the shape-memory polymer reverse macro-motion actuator on the right is in the collapsed and shortened state. In the original state: the forward rotation belt of the macro-motion turntable is fitted on the forward-rotation pulley of the macro-motion turntable, and the two ends of the forward rotation belt of the macro-motion turntable are respectively connected to the left and right sides by two third fasteners. One end of the memory polymer forward-rotating macro-motion actuator is connected, and the other end of the left and right shape-memory polymer forward-rotating macro-motion actuators is connected to the base of the macro-motion turntable through a fourth fastener, wherein the shape memory polymer on the left is The polymer forward-rotating macro-motion actuator is in the original state of being folded and shortened, and the shape-memory polymer forward-rotating macro-motion actuator on the right is in the pre-deformed state of unfolding and elongating, thus forming a high-precision macro-micro combination drive turntable.

The invention utilizes the shape memory property of the shape memory polymer, and when the shape memory polymer in a pre-deformed state is heated to its transition temperature, it will exhibit a shape memory effect and undergo shape recovery. If the two ends of the shape memory polymer are constrained, it will generate a large restoring force under temperature excitation, which can be used to drive the motion of the object. The shape memory polymer is applied to the design of the macro drive of the turntable, and the traditional mechanical drive is replaced by the shape memory effect drive, which can simplify the structure of the drive system and reduce the complexity of the control process. It has the advantages of simple and compact structure, easy control and high positioning accuracy. , The use of reliable features, has a wider application prospect in engineering.

Description of drawings

Figure 1 is a schematic diagram of the overall configuration structure of a high-precision macro-micro combined drive turntable;

Fig. 2 is a schematic diagram of the assembly structure of the micro-motion turntable base;

Figure 3 is a schematic diagram of the assembly structure of the base of the macro-motion turntable;

Fig. 4 is a sectional view along line A-A in Fig. 3 .

Description of part number in the figure:

1. Base, 2. Macro-motion turntable base, 3. Macro-motion turntable base mounting bolts, 4. Macro-motion turntable forward rotation pulley, 5. Rotary shaft, 6. Macro-motion turntable forward rotation belt, 7. First fastener , 8, shape memory polymer clockwise macro motion driver, 9, second fastener, 10, clockwise macro motion turntable, 11, clockwise macro motion turntable mounting bolts, 12, macro motion turntable reverse pulley, 13, Macro-motion turntable reverse belt, 14, shape memory polymer reverse macro-motion driver, 15, reverse macro-motion turntable, 16, reverse macro-motion turntable mounting bolts, 17, micro-motion turntable mounting bolts, 18, micro-motion turntable base, 19, Clockwise micro-motion flexible mechanism, 20, clockwise micro-motion turntable, 21, clockwise piezoelectric micro-motion actuator, 22, reverse micro-motion flexible mechanism, 23, reverse micro-motion turntable, 24, reverse piezoelectric micro-driver, 25 , stage mounting bolts, 26, stage, 27, the third fastener, 28, the fourth fastener.

detailed description

Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. A high-precision macro-micro combination drive turntable, on the base 1, the base 2 of the macro-motion turntable, the forward rotation pulley 4 of the macro-motion turntable, the forward-rotation macro-motion turntable 10, the reverse pulley 12 of the macro-motion turntable, and the reverse rotation The macro motion turntable 15, the micro motion turntable base 18, the reverse micro motion turntable 23 and the stage 26, the object stage 26 is fixed on the upper end surface of the reverse micro motion turntable 23 through the stage mounting bolts 25, the micro motion The base 18 of the moving turntable is fixed on the upper end surface of the reverse macro-moving turntable 15 through the mounting bolts 17 of the micro-moving turntable, and the said reverse macro-moving turntable 15 is fixed on the upper end surface of the reverse pulley 12 of the macro-moving turntable through the mounting bolts 16 of the reverse macro-moving turntable Above, the reverse rotation pulley 12 of the macro-motion turntable is installed on the central part of the clockwise rotation macro-motion turntable 10 by rotating and cooperating with the rotating shaft 5 fixed in the base 2 of the macro-motion turntable. The mounting bolts 11 of the macro-motion turntable are fixed on the upper end surface of the macro-motion turntable clockwise rotation pulley 4, and the macro-motion turntable clockwise rotation pulley 4 is installed in the macro-motion turntable base 2 by rotating and cooperating with the rotating shaft 5. The turntable base 2 is fixedly fitted on the base 1 through the mounting bolts 3 of the macro-motion turntable base; the forward-rotation micro-motion turntable 20 is installed on the inside of the micro-motion turntable base 18 through four forward-rotation micro-motion flexible mechanisms 19, and the reverse micro-motion turntable 23 is installed inside the forward-rotating micro-motion turntable 20 through four reverse-rotation micro-motion flexible mechanisms 22, and the reverse-rotation piezoelectric micro-motion actuators 24 are respectively arranged in oppositely arranged slots on the forward-rotation micro-motion turntable 20. The two ends of the moving driver 24 are in contact with the forward-rotating micro-moving turntable 20 and the reverse-rotating micro-moving turntable 23 respectively. The two ends of the piezoelectric micro-motion driver 21 are in contact with the micro-motion turntable base 18 and the forward-rotation micro-motion turntable 20 respectively; The two ends of the two first fasteners 7 are respectively connected to one end of the shape-memory polymer reverse macro-motion driver 14 arranged on the left and right sides, and the shape-memory polymer reverse macro-motion driver 14 on the left and right sides The other end is connected with the clockwise macro motion turntable 10 through the second fastener 9, wherein the shape memory polymer reverse macro motion driver 14 on the left is in a stretched pre-deformed state, and the shape memory polymer reverse macro motion driver 14 on the right The moving driver 14 is in the original state of being folded and shortened; the forward rotation belt 6 of the macro movement turntable is fitted on the rotation pulley 4 of the macro movement turntable, and the two ends of the forward rotation belt 6 of the macro movement turntable are respectively fastened by two third The part 27 is connected with one end of the shape memory polymer clockwise macromotion driver 8 arranged on the left and right sides, and the other end of the shape memory polymer clockwise macromotion driver 8 of the left side and the right side passes through the fourth fastener 28 is connected to the base 2 of the macro-motion turntable, wherein the shape-memory polymer forward-rotating macro-motion actuator 8 on the left is in the original state of being folded and shortened, and the shape-memory polymer forward-rotating macro-motion actuator 8 on the right is in the pre-deformation of unfolding and elongating state. The forward-rotating micro-motion flexible mechanism 19 and the reverse micro-motion flexible mechanism 22 both adopt straight beam type flexible hinges, or chamfered type flexible hinges, or arc type flexible hinges, or ellipse type flexible hinges.

The process of realizing the forward-rotation micro-motion drive of the turntable: the forward-rotation piezoelectric micro-motion actuator 21 is energized to generate an elongation motion, which drives the forward-rotation micro-motion flexible mechanism 19 to bend and deform, and drives the clockwise rotation micro-motion turntable 20 and the reverse rotation embedded in it. The micro-motion turntable 23 generates clockwise micro-motion, realizes the clockwise micro-motion drive of the turntable, keeps the clockwise piezoelectric micro-motion driver 21 energized, and the clockwise micro-motion turntable 20 remains stationary relative to the micro-motion turntable base 18. The forward-rotating piezoelectric micro-motion driver 21 retracts after power-off, and the forward-rotating micro-motion flexible mechanism 19 bounces back to the initial position due to elastic recovery, driving the forward-rotating micro-motion turntable 20 and the reverse-rotation micro-motion turntable 23 embedded in it back to the original position. initial position. By controlling the driving voltage of the clockwise piezoelectric micro-motion driver 21 , its elongation motion can be controlled, thereby controlling the clockwise rotation angle of the clockwise micro-motion turntable 20 .

The process of realizing the reverse micro-motion drive of the turntable: the reverse piezoelectric micro-motion driver 24 is energized to generate elongation motion, and the reverse micro-motion flexible mechanism 22 is driven to bend and deform, and the reverse micro-motion turntable 23 is driven to generate reverse micro-motion, realizing the reverse micro-motion drive of the turntable , keeping the reverse piezoelectric micro-motion driver 24 energized, the reverse micro-motion turntable 23 is stationary relative to the micro-motion turntable base 18 . The reverse piezoelectric micro-motion driver 24 is powered off and retracts, and the reverse micro-motion flexible mechanism 22 rebounds to the initial position due to elastic recovery, driving the reverse micro-motion turntable 23 to return to the initial position. By controlling the driving voltage of the reversing piezoelectric micro-motion actuator 24 , its elongation motion can be controlled, thereby controlling the reversing angle of the reversing micro-motion turntable 23 .

The process of realizing the macro-rotation drive of the turntable: power on and heat the resistance wire mesh built in the shape-memory polymer counter-rotation macro-motion driver 8, so that the temperature reaches the transition temperature of the shape memory polymer, and the shape memory effect drive of the shape memory polymer is in the unfolding state. The shape-memory polymer on the right side of the pre-deformed state returns to its shape and folds, thereby driving the clockwise rotation belt 6 of the macro-motion turntable to move a certain displacement, and the macro-motion turntable drives the macro-motion turntable along the rotation belt 6 The clockwise rotation of the belt pulley 4 and the clockwise macro-motion turntable 10 by a corresponding angle, and at the same time, the left shape memory polymer clockwise macro-motion driver 8 in the folded state is pre-deformed and unfolded, realizing the clockwise macro-motion of the turntable drive. Stop energizing and heating the resistance wire mesh built in the shape memory polymer clockwise macromotion driver 8 , and the clockwise macromotion turntable 10 stays still relative to the macromotion turntable base 2 . Once again, heat the resistance wire mesh built in the shape memory polymer forward-rotating macro-motion actuator 8, so that the temperature reaches the transition temperature of the shape-memory polymer. At this time, the left-side shape-memory polymer forward-rotating macro-motion actuator 8 is in the unfolded pre-deformation state. The shape is restored and folded, thereby driving the macro-motion turntable to move counterclockwise to a certain displacement, and the macro-motion turntable clockwise belt 6 drives the macro-motion turntable clockwise belt pulley 4 and the clockwise macro-motion turntable 10 to rotate counterclockwise correspondingly At the same time, the right shape memory polymer in the folded state undergoes pre-deformation and unfolds the clockwise macromotion driver 8, driving the clockwise macromotion turntable 10 back to the initial position. The amount of deformation can be controlled by controlling the excitation temperature of the shape memory polymer clockwise macro-motion actuator 8, so that the clockwise movement of the macro-motion turntable 6 is correspondingly displaced, thereby controlling the clockwise rotation angle of the clockwise macro-motion turntable 10.

The process of realizing the reverse macro-motion drive of the turntable: power on and heat the resistance screen built in the shape memory polymer reverse macro-motion driver 14, so that the temperature reaches the transformation temperature of the shape memory polymer, and the shape memory effect of the shape memory polymer drives the The shape-memory polymer reverse macro drive 14 on the left side is folded due to shape recovery, thereby driving the macro-motion turntable reverse belt 13 to move counterclockwise to a certain displacement, and the macro-motion turntable reverse belt 13 drives the macro-motion turntable reverse pulley 12 and the reverse macro The rotating turntable 15 is rotated counterclockwise by a corresponding angle, and at the same time, the right shape memory polymer reverse macro-motion driver 14 in the folded state is pre-deformed and unfolded, realizing the reverse macro-motion drive of the turntable. Stop energizing and heating the resistance wire mesh built in the shape memory polymer reverse macro motion driver 14 , and the reverse macro motion turntable 15 is stationary relative to the macro motion turntable base 2 . Once again, the resistance wire mesh built in the shape memory polymer reversal macro-motion actuator 14 is energized and heated to make the temperature reach the transition temperature of the shape memory polymer. Revert and fold, thereby driving the macro-motion turntable reverse belt 13 to move clockwise to a certain displacement, the macro-motion turntable reverse belt 13 drives the macro-motion turntable reverse pulley 12 and the reverse macro-motion turntable 15 to rotate a corresponding angle clockwise, and at the same time The reverse macro motion driver 14 of the left shape memory polymer in the folded state is pre-deformed and unfolded, driving the reverse macro motion turntable 15 to return to the initial position. The amount of deformation can be controlled by controlling the excitation temperature of the shape memory polymer reversing macro-movement driver 14, so that the macro-moving turntable reversing belt 13 moves counterclockwise to a corresponding displacement, thereby controlling the reversing angle of the reversing macro-moving turntable 15.

Claims (2)

1. A high-precision macro-micro combination drive turntable, characterized in that: the macro-motion turntable base (2), the macro-motion turntable clockwise rotation pulley (4), and the forward-rotation macromotion are sequentially arranged on the base (1) from bottom to top Turntable (10), macro-motion turntable reverse belt pulley (12), reverse macro-motion turntable (15), micro-motion turntable base (18), reverse micro-motion turntable (23) and object stage (26), the loading The table (26) is fixed on the upper end surface of the reverse micro-motion turntable (23) through the mounting bolts (25) of the stage, and the base (18) of the micro-motion turntable is fixed on the reverse macro through the mounting bolts (17) of the micro-motion turntable. On the upper end surface of the moving turntable (15), the reverse macro-moving turntable (15) is fixed on the upper end surface of the macro-moving turntable reverse pulley (12) through the reverse macro-moving turntable mounting bolts (16), and the macro-moving turntable reverses The pulley (12) is installed on the central part of the forward-rotating macro-moving turntable (10) through rotational cooperation with the rotating shaft (5) fixed in the macro-moving turntable base (2), and the clockwise-rotating macro-moving turntable (10) passes through The mounting bolts (11) of the forward-rotating macro-motion turntable are fixed on the upper end surface of the forward-rotation pulley (4) of the macro-motion turntable. In the base of the moving turntable (2), the base of the macro-moving turntable (2) is fixed on the base (1) through the mounting bolts (3) of the base of the macro-moving turntable; The forward-rotation micro-motion turntable (20) is installed on the rotating micro-motion flexible mechanism (19), and the reverse rotation micro-motion turntable (23) is installed inside the forward-rotation micro-motion turntable (20) through four reverse micro-motion flexible mechanisms (22) , the reverse piezoelectric micro-drivers (24) are respectively arranged in the slots oppositely arranged on the forward-rotation micro-motion turntable (20), and the two ends of the reverse-rotation piezoelectric micro-driver (24) are respectively connected with the forward-rotation micro-motion turntable ( 20) contact and cooperate with the reverse micro-motion turntable (23), and the forward-rotation piezoelectric micro-drivers (21) are respectively arranged in the slots oppositely arranged on the base of the micro-motion turntable (18), and the forward-rotation piezoelectric micro-drivers ( 21), the two ends of the micro-motion turntable base (18) and the clockwise rotation micro-motion turntable (20) are in contact with each other; the macro-motion turntable reverse belt (13) is set on the macro-motion turntable reverse pulley (12), The two ends of the turntable reversing belt (13) are respectively connected to one end of the shape memory polymer reversing macro-motion driver (14) arranged on the left and right sides through two first fasteners (7), and the left and right sides The other end of the shape-memory polymer reverse macro-motion driver (14) is connected with the forward-rotation macro-motion turntable (10) through the second fastener (9), wherein the shape-memory polymer reverse macro-motion driver (14) on the left In the pre-deformed state of unfolding and elongation, the shape-memory polymer reverse macro-motion driver (14) on the right is in the original state of folding and shortening; 4), the two ends of the forward rotation belt (6) of the macro-movement turntable respectively pass two third fasteners (27) and the shape-memory polymer forward-rotation macro-motion drivers (8) arranged on the left and right sides One end of the connection, the left, The other end of the shape-memory polymer forward-rotating macro-motion driver (8) on the right is connected to the macro-motion turntable base (2) through the fourth fastener (28), wherein the left-hand shape-memory polymer forward-rotating macro-motion driver (8) is in the original state of being folded and shortened, and the shape-memory polymer on the right side is in the pre-deformed state of unfolding and stretching. 2. A high-precision macro-micro combination drive turntable according to claim 1, characterized in that: the forward rotation micro-motion flexible mechanism (19) and the reverse rotation micro-motion flexible mechanism (22) both adopt straight beam type flexible hinges , or chamfered flexible hinges, or arc-shaped flexible hinges, or elliptical flexible hinges.