CN105039925A - Independent vertical multilayer-ITO-flexible-base-material automatic-control winding system capable of walking integrally - Google Patents
Independent vertical multilayer-ITO-flexible-base-material automatic-control winding system capable of walking integrally Download PDFInfo
- Publication number
- CN105039925A CN105039925A CN201510431622.4A CN201510431622A CN105039925A CN 105039925 A CN105039925 A CN 105039925A CN 201510431622 A CN201510431622 A CN 201510431622A CN 105039925 A CN105039925 A CN 105039925A
- Authority
- CN
- China
- Prior art keywords
- automatic control
- mechanisms
- parent metal
- ito
- drum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses an independent vertical multilayer-ITO-flexible-base-material automatic-control winding system capable of walking integrally. The system comprises a winding machine base. Multiple layers of discharging mechanisms, automatic control tensioning mechanisms, synchronous winding mechanisms, vertical single-drum mechanisms and receiving mechanisms are arranged on the winding machine base in a separated mode and connected with an automatic control mechanism. The discharging mechanisms comprise discharging rollers and discharging and separating systems. The receiving mechanisms are receiving compound mechanisms and receiving rollers. The discharging and separating systems, the vertical single-drum mechanisms, the synchronous winding mechanisms and the receiving compound mechanisms are each provided with an independent synchronous drive system. The independent vertical multilayer-ITO-flexible-base-material automatic-control winding system is simple in structure, convenient to use, reasonable in design, good in work stability and capable of working at a normal temperature.
Description
Technical field
The present invention relates to information and Information application field, be specifically related to a kind of independent vertical multi-layer ITO flexible parent metal automatic control reel system of can overallly walking.
Background technology
ITO transparent conductive film is a class not only transparent but also specific functionality film conducted electricity, have that forbidden band is wide, common optics and the electrical property such as the high and resistivity of the transmissivity of light is low in visible range, be widely used in the various fields such as antifog defrosting and sun power on indicating meter, various Photon-Electron electrons device, touch-screen, radioprotective, the energy-saving heat preserving of building, the vehicles at present.The suitability for industrialized production of ITO transparent conductive film adopts physical vaporous deposition usually.It is under vacuum many that current physical vaporous deposition prepares ITO transparent conductive film, is warmed to 200 DEG C about-350 DEG C.Make ITO transparent conductive film at present many glass etc. of can only being deposited on the matrix of resistance to certain temperature, and can not be deposited on the transparent plastic film of non-refractory.Too much heating not only consumes a large amount of energy, increases cost, production unit is also proposed to the requirement of many harshnesses.Simultaneously, due to be in high temperature all the time when film preparation situation under, also just significantly limit the Application Range that ITO transparent conductive film deposits matrix used material, the high transparency material of a lot of reasonable price can not be applied as the matrix of ITO transparent conductive film, also just improve the cost and price of ITO transparent conductive film product accordingly, and more limit the range of application of ITO transparent conductive film product.
Summary of the invention
The independence that the object of this invention is to provide a kind of good operating stability can overall walking vertical multi-layer compound ITO flexible parent metal automatic control reel system.
In order to realize above-mentioned technical problem, technical scheme provided by the invention is: the invention provides a kind of independent vertical multi-layer compound ITO flexible parent metal automatic control reel system of can overallly walking, described independence can comprise up-coiler base by overall walking vertical multi-layer compound ITO flexible parent metal automatic control reel system, described up-coiler base is provided with discharge mechanism that multilayer separates, automatic control strainer, synchronous winding mechanism, vertical single-drum mechanism and receiving mechanism;
Described discharge mechanism, automatic control strainer, synchronous winding mechanism, vertical single-drum mechanism, receiving mechanism are all connected with automatic controls;
Described discharge mechanism is emptying roller and blowing and separation system, and described receiving mechanism is rewinding composite structure and material receiving roller;
Described blowing and separation system, vertical single-drum mechanism, synchronous winding mechanism, rewinding composite structure are provided with separately independently synchronous driving system.
Described automatic control reel system inside is provided with surface disposal facility.
Described automatic control reel system inside is provided with the automatic deviation rectifying mechanism winding process of separating rear each layer ITO flexible parent metal being had to real-time synchronization.
The temperature control device that drum when being also provided with thin film deposition in described vertical single-drum is surperficial.
Beneficial effect: structure of the present invention is simple, and easy to use, reasonable in design, good operating stability, can work at normal temperatures.Thin film vacuum deposition system is not fixedly connected with automatic control reel system, is separated completely, considerably reduces perforate and the structural complexity of vacuum cavity, winding mechanism is retrained few; Each integral part is harmonious, synchronous operation, good operating stability, can accomplish independent clamping system and independent deviation-rectifying system synchronization control.Achieve the automatization of MULTILAYER COMPOSITE ITO flexible parent metal installation and removal, decrease the damage to rete, improve production efficiency.
Relative to prior art, tool of the present invention has the following advantages:
(1) non-equilibrium negative electrode arrangement form and from the monoblock type lock shield cover of trapping and independently gas supply mechanism separately, mainly by the non-homogeneous electric discharge form of subatmospheric plasma body, the mechanism by many electronic heating such as ohmic heating, Stochastic Heating and secondary electron emission heating between electromagnetic field and plasma body, indirectly the transient temperature of matrix surface is temporarily improved in local in small scope, reach matrix is not acutely heated and ensure to be formed the material of conductive film can the surface being deposited on matrix on request of maximum possible.
(2) plasma physical efficiency is under the condition not to matrix heating, by improving the processing parameter of physical vapor deposition and adopting more rational device structure and through multiple technologies such as the magnetic field arrangement form optimized and theoretical comprehensive, impel the material forming conductive film can the surface being deposited on matrix on request of maximum possible.For film provides necessary and enough activation energy in the growth of matrix surface.Achieve the suitability for industrialized production of warm overlarge area MULTILAYER COMPOSITE winding ITO flexible parent metal full resistance series Combined roll around ITO flexible parent metal full resistance series ito film.
(3) adopt physical gas phase deposition technology to be deposited on the flexible transparent plastic matrix of the MULTILAYER COMPOSITE such as PET, PEN, PC under the condition of room temperature by transparent conductive oxide conductive glass film, and be widely used in the fields such as flexible display, various flexible optoelectronic electron device, flexible conformal touch-screen as flexible optoelectronic base mateiral.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
1 emptying roller; 2 automatic control clamping systems; 3 surface disposal facility; 4 vertical single-drum mechanism and temperature control systems; 5 automatic deviation rectifying mechanisms; 6 rewinding composite structures; 7 material receiving rollers; 8 up-coiler bases; 9 up-coiler dividing plates; 10 blowings and separation system.
Embodiment
Further illustrate the present invention by the following examples.It should be understood that these embodiments are explaination of the present invention and citing, do not limit the scope of the invention in any form.
Embodiment 1
The invention provides a kind of independent vertical multi-layer ITO flexible parent metal automatic control reel system of can overallly walking, described independence can comprise up-coiler base by overall walking vertical multi-layer ITO flexible parent metal automatic control reel system, described up-coiler base is provided with discharge mechanism that multilayer separates, automatic control strainer, synchronous winding mechanism, vertical single-drum mechanism and receiving mechanism;
Described discharge mechanism, automatic control strainer, synchronous winding mechanism, vertical single-drum mechanism, receiving mechanism are all connected with automatic controls;
Described discharge mechanism is emptying roller and blowing and separation system, and described receiving mechanism is rewinding composite structure and material receiving roller;
Described blowing and separation system, vertical single-drum mechanism, synchronous winding mechanism, rewinding composite structure are provided with separately independently synchronous driving system.
Described automatic control reel system inside is provided with the surface disposal facility to depositing the ITO flexible parent metal front and rear surfaces of Combined roll around ITO flexible parent metal full resistance series ito film and carry out plasma treatment.
Described automatic control reel system inside is provided with the automatic deviation rectifying mechanism winding process of separating rear each layer ITO flexible parent metal being had to real-time synchronization.
The temperature control device that drum when being also provided with thin film deposition in described vertical single-drum is surperficial.
Structure of the present invention is simple, easy to use, reasonable in design, can work at normal temperatures.Thin film vacuum deposition system is not fixedly connected with automatic control reel system, is separated completely, considerably reduces perforate and the structural complexity of vacuum cavity, winding mechanism is retrained few; Each integral part is harmonious, synchronous operation, good operating stability, can accomplish independent clamping system and independent deviation-rectifying system synchronization control.Achieve the automatization of MULTILAYER COMPOSITE ITO flexible parent metal installation and removal, decrease the damage to rete, improve production efficiency.
Relative to prior art, tool of the present invention has the following advantages:
(1) non-equilibrium negative electrode arrangement form and from the monoblock type lock shield cover of trapping and independently gas supply mechanism separately, mainly by the non-homogeneous electric discharge form of subatmospheric plasma body, the mechanism by many electronic heating such as ohmic heating, Stochastic Heating and secondary electron emission heating between electromagnetic field and plasma body, indirectly the transient temperature of matrix surface is temporarily improved in local in small scope, reach matrix is not acutely heated and ensure to be formed the material of conductive film can the surface being deposited on matrix on request of maximum possible.
(2) plasma physical efficiency is under the condition not to matrix heating, by improving the processing parameter of physical vapor deposition and adopting more rational device structure and through multiple technologies such as the magnetic field arrangement form optimized and theoretical comprehensive, impel the material forming conductive film can the surface being deposited on matrix on request of maximum possible.For film provides necessary and enough activation energy in the growth of matrix surface.Achieve the suitability for industrialized production of warm overlarge area MULTILAYER COMPOSITE winding ITOITO flexible parent metal full resistance series Combined roll around ITO flexible parent metal full resistance series ito film.
(3) adopt physical gas phase deposition technology to be deposited on the flexible transparent plastic matrix of the MULTILAYER COMPOSITE such as PET, PEN, PC under the condition of room temperature by transparent conductive oxide conductive glass film, and be widely used in the fields such as flexible display, various flexible optoelectronic electron device, flexible conformal touch-screen as flexible optoelectronic base mateiral.
Test 1
Flexible winding base material is fixed on emptying roller, and is connected to material receiving roller by each axle.Regulate the tension synchronous of each tunic material harmonious, set the synchronous consistence of correction, select the design temperature of thin film deposition drum, the travelling speed of setting base material is 3 ms/min.By the MULTILAYER COMPOSITE ITO flexible parent metal automatic control reel system integral level shift-in that sets in the vacuum cavity of low vacuum, be evacuated down to rated value, pass into process gas, carry out vapour deposition, its result is: Combined roll is 100 Ω/ around ITO flexible parent metal full resistance series ito film surface resistivity, transmittance is 91%, and homogeneity is ± 5%.
Test 2
Flexible winding base material is fixed on emptying roller, and is connected to material receiving roller by each axle.Regulate the tension synchronous of each tunic material harmonious, set the synchronous consistence of correction, select the design temperature of thin film deposition drum, the travelling speed of setting base material is 1 m/min.By the MULTILAYER COMPOSITE ITO flexible parent metal automatic control reel system integral level shift-in that sets in the vacuum cavity of low vacuum, be evacuated down to rated value, pass into process gas, carry out vapour deposition, its result is: Combined roll is 40 Ω/ around ITO flexible parent metal full resistance series ito film surface resistivity, transmittance is 88%, and homogeneity is ± 3%.
As can be seen from test 1 and test 2, the Combined roll that the present invention produces is high around the transmittance of ITO flexible parent metal full resistance series ito film, and homogeneity is better, and Combined roll is uniform and stable around ITO flexible parent metal full resistance series ito film surface resistivity, consistent performance is good, and deviation is little.
Although more employ emptying roller 1 herein, automatic control clamping system 2, surface disposal facility 3, vertical single-drum mechanism and temperature control system 4, automatic deviation rectifying mechanism 5, rewinding composite structure 6, material receiving roller 7, up-coiler base 8, up-coiler dividing plate 9, the terms such as blowing and separation system 10, but do not get rid of the possibility using other term.These terms are used to be only used to describe and explain essence of the present invention more easily; The restriction that they are construed to any one additional is all contrary with spirit of the present invention.
More than show and describe ultimate principle of the present invention, principal character and advantage of the present invention.The technician of the industry should understand; the present invention is not restricted to the described embodiments; what describe in above-described embodiment and specification sheets just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and application claims protection domain is defined by appending claims, specification sheets and equivalent thereof.
Claims (4)
1. an independence can overall walking vertical multi-layer ITO flexible parent metal automatic control reel system, it is characterized in that: described independence can comprise up-coiler base by overall walking vertical multi-layer ITO flexible parent metal automatic control reel system, described up-coiler base is provided with discharge mechanism that multilayer separates, automatic control strainer, synchronous winding mechanism, vertical single-drum mechanism and receiving mechanism;
Described discharge mechanism, automatic control strainer, synchronous winding mechanism, vertical single-drum mechanism, receiving mechanism are all connected with automatic controls;
Described discharge mechanism is emptying roller and blowing and separation system, and described receiving mechanism is rewinding composite structure and material receiving roller;
Described blowing and separation system, vertical single-drum mechanism, synchronous winding mechanism, rewinding composite structure are provided with separately independently synchronous driving system.
2. independence according to claim 1 can overall walking vertical multi-layer ITO flexible parent metal automatic control reel system, it is characterized in that: described automatic control reel system inside is provided with surface disposal facility.
3. independence according to claim 1 can overall walking vertical multi-layer ITO flexible parent metal automatic control reel system, it is characterized in that: described automatic control reel system inside is provided with has the automatic deviation rectifying mechanism of real-time synchronization to the winding process of each layer ITOITO flexible parent metal after separately.
4. the independence according to any one of claims 1 to 3 can overall walking vertical multi-layer ITO flexible parent metal automatic control reel system, it is characterized in that: the temperature control device on drum surface when being also provided with thin film deposition in described vertical single-drum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510431622.4A CN105039925A (en) | 2015-07-21 | 2015-07-21 | Independent vertical multilayer-ITO-flexible-base-material automatic-control winding system capable of walking integrally |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510431622.4A CN105039925A (en) | 2015-07-21 | 2015-07-21 | Independent vertical multilayer-ITO-flexible-base-material automatic-control winding system capable of walking integrally |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105039925A true CN105039925A (en) | 2015-11-11 |
Family
ID=54446890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510431622.4A Pending CN105039925A (en) | 2015-07-21 | 2015-07-21 | Independent vertical multilayer-ITO-flexible-base-material automatic-control winding system capable of walking integrally |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105039925A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5895723A (en) * | 1993-08-26 | 1999-04-20 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Composite films |
| CN102758190A (en) * | 2011-04-28 | 2012-10-31 | 日东电工株式会社 | Vacuum film formation method and laminate obtained by the method |
| CN103436844A (en) * | 2013-08-19 | 2013-12-11 | 肇庆市腾胜真空技术工程有限公司 | Coating device and method for depositing flexible substrate ITO film at low temperature |
| CN104685094A (en) * | 2012-09-19 | 2015-06-03 | 弗雷森纽斯医疗护理德国有限责任公司 | Device for producing an adhesive-free gas barrier film with a ceramic barrier layer |
-
2015
- 2015-07-21 CN CN201510431622.4A patent/CN105039925A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5895723A (en) * | 1993-08-26 | 1999-04-20 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Composite films |
| CN102758190A (en) * | 2011-04-28 | 2012-10-31 | 日东电工株式会社 | Vacuum film formation method and laminate obtained by the method |
| CN104685094A (en) * | 2012-09-19 | 2015-06-03 | 弗雷森纽斯医疗护理德国有限责任公司 | Device for producing an adhesive-free gas barrier film with a ceramic barrier layer |
| CN103436844A (en) * | 2013-08-19 | 2013-12-11 | 肇庆市腾胜真空技术工程有限公司 | Coating device and method for depositing flexible substrate ITO film at low temperature |
Non-Patent Citations (2)
| Title |
|---|
| 中国石油化工集团公司人事部等: "《涤纶短纤维纺丝工》", 31 August 2008 * |
| 杨国华等: "《炭素材料（下册）》", 31 October 1999 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI480898B (en) | Production method of conductive laminated film | |
| TWI553662B (en) | Preparation of Carbon Nanotube Transparent Composite Electrode | |
| CN205803586U (en) | A kind of multifunctional single Double-face continuous winding magnetic-controlled sputtering coating equipment | |
| CN105821378B (en) | A kind of niobium-doped tin dioxide transparent conductive film and preparation method thereof | |
| CN104674176B (en) | A kind of two-sided reciprocal continuous coating magnetic-control sputtering coiling film coating machine of high efficiency | |
| CN104611682A (en) | Magnetron sputtering winding plating equipment capable of double-sided reciprocating continuous high-efficient plating | |
| CN103924199B (en) | A kind of organic materials housing and film coating method thereof with metal-like | |
| CN108139643A (en) | Electrochromic element and manufacturing method thereof | |
| CN103436844A (en) | Coating device and method for depositing flexible substrate ITO film at low temperature | |
| CN104674175B (en) | High-efficiency single-side reciprocating continuous-coating magnetron sputtering winding coating machine | |
| CN203530419U (en) | Evaporation device for evaporating ITO (indium tin oxide) film by electronic beam | |
| CN105039925A (en) | Independent vertical multilayer-ITO-flexible-base-material automatic-control winding system capable of walking integrally | |
| CN205011827U (en) | Vertical continuous vapour deposition equipment system of normal atmospheric temperature multilayer ITO flexible parent metal list drum | |
| CN101661810B (en) | Dark purple external amorphous transparent conductive film and preparation method thereof | |
| CN102194918B (en) | Manufacturing method of colored solar batteries | |
| US11721812B2 (en) | Film and manufacturing process thereof | |
| CN204589290U (en) | A kind of arc ions vacuum plating unit bias voltage supplementary unit | |
| CN103439839B (en) | A kind of method and substrate forming rete | |
| CN112941476B (en) | Tin dioxide/copper/tin dioxide multilayer transparent conductive film and preparation method and application thereof | |
| CN103042766B (en) | High saturating high heat-insulating and energy-saving rupture pressure disc and preparation technology thereof | |
| CN102290128A (en) | Transparent conductive oxide film and production method thereof | |
| CN204918748U (en) | Vertical continuous magnetron sputtering vacuum apparatus of compound coiling ITO flexible parent metal list drum | |
| CN103484825A (en) | Device for sputtering molding of electro-conductive film | |
| CN205347568U (en) | Vertical multilayer ITO flexible parent metal automatic control winding system independently can wholly walk | |
| CN108825074A (en) | A kind of hollow glass system of interior outstanding electrochromic intelligent film |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20151111 |