CN105023869B - Semi-automatic alignment machine - Google Patents
Semi-automatic alignment machine Download PDFInfo
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- CN105023869B CN105023869B CN201410171814.1A CN201410171814A CN105023869B CN 105023869 B CN105023869 B CN 105023869B CN 201410171814 A CN201410171814 A CN 201410171814A CN 105023869 B CN105023869 B CN 105023869B
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Abstract
The invention discloses a kind of semi-automatic alignment machine, including：Framework, work stage, wedge error compensation mechanism, Shang Pian mechanisms, covering mechanism, bonding clamp positioning mechanism, MVS optical facilities and bonding fixture automatic turning mechanism；Wherein, the work stage is installed on framework, and X, Y, Rz three-degree-of-freedom motion are carried out for carrying wedge error compensation mechanism and Shang Pian mechanisms；Coating member is fixed on framework, and positioned at the top of Shang Pian mechanisms, the bonding clamp positioning mechanism is arranged on covering mechanism, for realizing that the positioning of bonding fixture clamps；The MVS optical facilities are installed on framework, and X, Y, Z three-degree-of-freedom motion are realized by three sets of single shaft drivers；The bonding fixture automatic turning mechanism is installed on the framework, for realizing the automatic turning of bonding fixture.The semi-automatic alignment machine of the present invention can improve the stability of equipment, reduce manual operation error, improve precision, reduce labor intensity, improve yield.
Description
Technical Field
The invention relates to the field of integrated circuit manufacturing, in particular to a semi-automatic alignment machine.
Background
In semiconductor processing, an aligner is a substrate bonding kit used to align two substrates prior to substrate bonding.
A typical alignment apparatus includes: a substrate wedge error compensation system, a motion stage system, and a machine vision system. Wherein, the substrate wedge error compensation system makes two substrates to be aligned parallel; the motion platform system carries the substrate to realize X, Y, Rz direction motion, so that the second substrate mark is aligned with the first substrate mark; the machine vision system shoots the substrate mark through the microscope objective, and the substrate mark is converted through light paths such as a spectroscope and a reflector, and the lens barrel are imaged to a CCD camera and finally displayed on the interface of an industrial personal computer.
In the existing alignment equipment, a bonding fixture is usually positioned in two ways, one way is that two shafts are respectively pushed by air cylinders at two sides of the bonding fixture and are in contact with arc surfaces at two sides of the bonding fixture for positioning and clamping, and the positioning precision of the bonding fixture is difficult to improve under the influence of factors such as the installation precision of the air cylinders, the fit clearance of the air cylinder shafts and sleeves, the position precision of the arc surfaces at two sides of the bonding fixture and the like; the other method is to adopt three taper pins to be respectively matched with corresponding taper holes of the bonding fixture, and although the positioning precision can be improved by the structure, the positioning precision is the combined matching precision of three groups of taper pins/taper holes, the processing cost is high, and the positioning operation is time-consuming.
Disclosure of Invention
The invention provides a semi-automatic alignment machine, which aims to improve the stability of equipment, reduce manual operation errors, improve the precision, reduce the labor intensity and improve the yield.
To solve the above technical problem, the present invention provides a semi-automatic alignment machine, comprising: the device comprises a frame, a workpiece table, a wedge error compensation mechanism, a loading mechanism, a covering mechanism, a bonding fixture positioning mechanism, an MVS (Machine View System) optical mechanism and an automatic bonding fixture overturning mechanism; the workpiece table is mounted on the frame and used for bearing the wedge-shaped error compensation mechanism and the loading mechanism to carry out X, Y, Rz three-degree-of-freedom motion; the covering part is fixed on the frame and positioned above the upper piece mechanism, and the bonding fixture positioning mechanism is arranged on the covering mechanism and used for realizing the positioning and clamping of the bonding fixture; the MVS optical mechanism is arranged on the frame, and X, Y, Z three-degree-of-freedom motion is realized by three sets of single-shaft drivers; the automatic bonding fixture overturning mechanism is arranged on the frame and used for realizing automatic overturning of the bonding fixture.
Preferably, the workpiece stage comprises: the stator, set up in the active cell of stator top and set up and be in three group's motor drive assembly and supplementary cross slip table between active cell and the stator.
Preferably, the wedge error compensation mechanism includes: the device comprises a movable piece, a fixed piece, a finger cylinder fixed on the fixed piece, a V-shaped block and a fixed flat shaft; the movable piece is connected with the fixed piece through a joint bearing, the V-shaped block is fixed on the finger cylinder and used for clamping a fixed flat shaft, and the fixed flat shaft is connected with the movable piece through a spherical bearing.
Preferably, the two sides of the wedge-shaped error compensation mechanism are respectively provided with a vertical plate with a plunger screw.
Preferably, the upper plate mechanism is driven by a double-acting air cylinder to move in the vertical direction and the horizontal direction respectively.
Preferably, the upper plate mechanism is guided by linear guide rails in the vertical direction and the horizontal direction respectively.
Preferably, the covering mechanism comprises: the device comprises a vertical lifting mechanism driving the covering mechanism to vertically move, a first combined cylinder operating a clamping (clamp) mechanism of the bonding fixture and a second combined cylinder operating a spacing piece (flag) mechanism of the bonding fixture.
Preferably, the vertical lift mechanism includes: the motor drives the covering mechanism to vertically lift through the synchronous belt wheel and the ball screw.
Preferably, the two sides of the motor are guided by high-rigidity needle roller guide assemblies.
Preferably, the bonding jig positioning mechanism includes: the bonding fixture is centered by the positioning piece, the double-acting cylinder and the positioning block.
Preferably, the MVS optical mechanism comprises: the CCD, the optical component, the guide rod cylinder and the objective lens are sequentially and correspondingly arranged from top to bottom, a light source is arranged on the guide rod cylinder, and the three groups of single-axis drivers are arranged on one side of the optical component.
Preferably, the automatic bonding jig overturning mechanism comprises: the manipulator is driven by a double-acting cylinder to move up and down, and the manipulator is driven by a rotating cylinder to swing forwards and backwards for 180 degrees.
Preferably, one end of the manipulator is provided with two swing cylinders for clamping the bonding fixture.
Preferably, the bracket is provided with a guide rail for the double-acting air cylinder to move up and down.
Preferably, the frame is a stainless steel welded frame.
Preferably, the top and bottom of the frame are provided with shock absorbing dampers, respectively.
Compared with the prior art, the invention has the following advantages: the semi-automatic alignment machine is characterized in that the mechanism is arranged on the base, the mechanism comprises a linkage clamp positioning mechanism, a linkage clamp positioning mechanism and a linkage clamp automatic turnover mechanism, the linkage clamp positioning mechanism is arranged on the linkage clamp automatic turnover mechanism, and the linkage clamp automatic turnover mechanism is arranged on the linkage clamp positioning mechanism. The invention has simple structure and convenient operation, and effectively reduces the production cost.
Drawings
FIG. 1 is a schematic diagram of a semi-automatic aligner according to an embodiment of the present invention
FIG. 2 is a front view of a workpiece table according to one embodiment of the present invention;
FIG. 3 is a top view of a workpiece table according to one embodiment of the present invention;
FIG. 4 is a front view of a wedge error compensation mechanism in accordance with an embodiment of the present invention;
FIG. 5 is a front view of a loading mechanism in accordance with one embodiment of the present invention;
FIG. 6 is a top view of a sheet loading mechanism in accordance with one embodiment of the present invention;
FIG. 7 is a front view of a cover mechanism according to an embodiment of the present invention;
FIG. 8 is a top view of a cover mechanism according to an embodiment of the present invention;
FIG. 9 is a top view of a bonding fixture positioning mechanism in accordance with one embodiment of the present invention;
FIG. 10 is a schematic view of an MVS optical mechanism according to an embodiment of the present invention;
fig. 11 is a schematic structural view of an automatic turnover mechanism of a bonding fixture according to an embodiment of the present invention.
Shown in the figure: 100-a frame;
200-a workpiece table, 201-a rotor, 202a, 202b and 202 c-a motor driving assembly, 203-a stator and 204-an auxiliary cross sliding table;
300-wedge error compensation mechanism, 301-movable part, 302-fixed part, 303-joint bearing, 304-finger cylinder, 305-V-shaped block, 306-fixed flat shaft, 307-spherical bearing and 308-vertical plate;
400-a sheet feeding mechanism, 401-a first double-acting cylinder, 402-a first linear guide rail, 403-a second double-acting cylinder, 404-a second linear guide rail and 405-a sheet carrying plate;
500-a covering mechanism, 501-a motor, 502-a synchronous pulley, 503-a ball screw, 504-a linear swing combined cylinder, 505-a swing cylinder, 506-a clamping mechanism, 507-a second combined cylinder, 508-a spacing piece mechanism, 509-a needle roller guide assembly, 510-a covering plate and 511-a V-shaped positioning surface;
600-a bonding fixture positioning mechanism, 601-a bonding fixture, 602-a positioning block, 603-a positioning piece, 604-a third double-acting cylinder and 605-a roller;
700-MVS optical mechanism, 701, 702, 703-single axis drive, 704-CCD, 705-optical component, 706-light source, 707-guide rod cylinder, 708-objective;
800-automatic turnover mechanism of bonding fixture, 801-support, 802-manipulator, 803-fourth double-acting cylinder, 804-rotating cylinder, 805-swinging cylinder and 806-guide rail;
900-damping and damping.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. It is to be noted that the drawings are in simplified form and are not to precise scale, which is provided for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
As shown in fig. 1, the semi-automatic alignment machine of the present invention includes a frame 100, a work stage 200, a wedge error compensation mechanism 300, a loading mechanism 400, a covering mechanism 500, a bonding fixture positioning mechanism 600, an MVS optical mechanism 700, and an automatic bonding fixture flipping mechanism 800.
Specifically, the workpiece stage 200 is mounted on the frame 100, and is configured to carry the wedge-shaped error compensation mechanism 300 and the loading mechanism 400 to perform X, Y, Rz three-degree-of-freedom motion;
the covering mechanism 500 is also installed on the frame 100, and the bonding fixture positioning mechanism 600 is installed on the covering mechanism 500 and used for realizing the positioning and clamping functions of the bonding fixture;
the MVS optical mechanism 700 is mounted on the frame 100, and X, Y, Z three-degree-of-freedom motion is realized by two sets of three single-shaft drivers;
the bonding fixture automatic turnover mechanism 800 is mounted on the frame 100, and is used for realizing the automatic turnover function of the bonding fixture.
Preferably, the connection between the frame 100 and other mechanisms and the connection between the frame 100 and the ground support mechanism are respectively provided with a damping 900, so that the external seismic source interference can be effectively reduced. Furthermore, the frame 100 is a stainless steel welded frame, which has good rigidity and stability, and can effectively reduce external seismic source interference by matching with the damping 900.
Referring to fig. 2 to 3, the workpiece stage 200 includes: a mover 201 (upper plate), a stator 203 (lower plate), and three sets of motor drive assemblies 202a, 202b, 202c and an auxiliary cross slide 204 mounted between the stator 203 and the mover 201. Specifically, the three sets of driving motor assemblies 202a, 202b, and 202c are coupled to move, so that the mover 201 realizes X, Y, Rz three-degree-of-freedom motion. Because the workpiece table 200 adopts a modular structure, is self-organized, is integrally arranged on the frame 100, has high repetition precision and is convenient to integrate.
Referring to fig. 4, the wedge error compensation mechanism 300 includes: a mover 301 (upper plate), and a stator 302 (lower plate) connected to the mover 301 through a joint bearing 303. The fixing piece 302 is further provided with a finger cylinder 304, a V-shaped block 305 is arranged on the finger cylinder 304, and the V-shaped block 305 is centered and clamped by a fixing flat shaft 306 for locking; the fixed flat shaft 306 is connected to the movable member 301 through a spherical bearing 307. The joint bearing 303 and the spherical bearing 307 are used as connecting pieces, so that the service life of the mechanism can be prolonged, and pollution is avoided. Preferably, the two sides of the wedge-shaped error compensation mechanism 300 are respectively provided with a vertical plate 308 with a plunger screw, so that the Rz-direction freedom degree is restricted, and the alignment mark searching time can be reduced.
Referring to fig. 5, the vertical direction of the loading mechanism 400 adopts a first double-acting cylinder 401 to drive a slide plate 405 to vertically lift, and two sides of the slide plate 405 are vertically guided by a first linear guide 402. As shown in fig. 6, the upper plate mechanism 400 is a linear push-pull mechanism in the horizontal direction, and both sides are driven by a second double-acting cylinder 403, and horizontal motion guidance is provided by a second linear guide rail 404. The first linear guide rail 402 and the second linear guide rail 404 are adopted for guiding in the vertical direction and the horizontal direction respectively, the support and cantilever rigidity is good, and the deflection deformation is small.
Referring to fig. 7 and 8, the covering mechanism 500 includes: a vertical lifting mechanism driving the covering mechanism 500 to move vertically, a first combined cylinder operating a clamping mechanism 506 of the bonding fixture, and a second combined cylinder 507 operating a spacer mechanism 508 of the bonding fixture.
Specifically, the vertical lifting mechanism includes a motor 501, a synchronous pulley 502 and a ball screw 503, and the motor 501 is used as a driving device to drive the cover plate 510 of the cover mechanism 500 to vertically lift through the synchronous pulley 502 and the ball screw 503. Further, the first combined cylinder comprises a linear swing combined cylinder 504 and a swing cylinder 505, and the linear swing combined cylinder 504 and the swing cylinder 505 are combined to operate clamping mechanisms 506 on the left side and the right side of the bonding fixture; the second combined cylinder 507 has a plurality of groups, and the spacer mechanisms 508 of the bonding fixtures at different positions are respectively operated. In the alignment process, the clamping mechanism 506 of the bonding fixture and the spacer mechanism 508 of the bonding fixture are respectively driven by different cylinders, and can be automatically and respectively operated, so that the labor intensity is reduced, and the yield is improved.
Preferably, the two sides of the motor 501 are guided by the high-rigidity roller pin guide assemblies 509, so that the transmission is smooth and the repeatability precision is high.
Referring to fig. 9, the bonding jig positioning mechanism 600 includes: the key clamp 601 comprises a positioning member 603, a third double-acting cylinder 604 and a positioning block 602, wherein the third double-acting cylinder 604 and the positioning block 602 are arranged on the positioning member 603, and the key clamp is centered by the positioning member 603, the third double-acting cylinder 604 and the positioning block 602. Further, the third double acting cylinder 604 pushes the bonding jig 601 through two rollers 605. In other words, the key clamp 601 is centered on the positioning block 602 by the combined action of the mechanism composed of the two positioning blocks 602, the finish machining plane of the positioning block 603, the plane composed of the third double-acting cylinder 604 and the roller 605, and the mechanism is low in cost and simple to operate.
Referring to fig. 10, the MVS optical mechanism 700 has the same devices on the left and right sides, and is symmetrically disposed. Specifically, the left and right sides thereof include: the CCD704, the optical component 705, the guide rod cylinder 707 and the objective lens 708 are correspondingly arranged from top to bottom, a light source 706 is arranged on the guide rod cylinder 707, and three groups of single-shaft drivers 701, 702 and 703 for transmission are arranged on one side of the optical component 705. The MVS optical mechanism 700 drives the CCD704, the optical member 705, the light source 706, the guide rod cylinder 707 and the objective lens 708 to move together through the combined transmission of three sets of single-axis drivers 701, 702 and 703.
Preferably, the MVS optical mechanism 700 is driven by three single-axis drivers 701, 702 and 703, so that the motion precision is high; the CCD704 moves together with the objective lens 708, the light transmission length is unchanged, and the measurement accuracy is stable. Further, the cantilever portion of the optical member 705 is connected to the components by 4 optical rods, which is light in weight and has small deflection deformation. Different light sources 706 can be automatically switched through the guide rod air cylinder 707, and the operation is simple and convenient.
Referring to fig. 11, the automatic bonding fixture flipping mechanism 800 includes: the manipulator 802 moves up and down under the driving of a fourth double-acting air cylinder 803, and the manipulator 802 swings forwards and backwards 180 degrees under the driving of a rotating air cylinder 804. The fourth double-acting cylinder 803 is guided by a guide rail 806, and one end of the manipulator 802 clamps the bonding clamp 601 by two swing cylinders 805, so that the labor intensity is reduced, the yield is improved, and the precision loss after alignment is reduced.
The working process of the semi-automatic alignment machine is as follows:
1. the covering mechanism 500 acts: the left and right sets of lifting motors 501 act simultaneously to drive the covering plate 510 to rise to a set position, so that the bonding fixture 601 is pre-placed: the bottom surface of the bonding fixture 601 is brought into contact with the finished surface of the cover plate and the outer circular surface is brought into contact with the V-shaped locating surface 511 of the cover plate 510.
2. The bonding jig positioning mechanism 600 acts: the third double acting cylinder 604 is inflated to push the locating surfaces of the bonding fixture 601 into positive contact with the bottom surface of the cover plate 510 and the V-shaped locating surface 511, respectively;
3. the sheet feeding mechanism 400 operates: the first double-acting cylinder 401 is inflated to enable the slide plate 405 of the loading mechanism 400 to be away from the wedge-shaped error compensation mechanism 300 to be lifted, the second double-acting cylinder 403 is inflated to enable the slide plate 405 to extend out to load the first substrate, the second double-acting cylinder 403 acts in the reverse direction to enable the slide plate 405 to retract, and the first double-acting cylinder 401 acts in the reverse direction to enable the slide plate 405 to return to the original position;
4. the covering mechanism 500 acts: the left and right sets of lifting motors 501 act simultaneously to drive the covering plate 510 to descend until the bonding fixture 601 contacts the first substrate, and the pressing is continued until the set force stops;
5. wedge error compensation mechanism 300 acts: the movable part 301 of the wedge-shaped error compensation mechanism 300 performs 6-degree-of-freedom passive motion under the pressure of the bonding clamp 601, so that the contact surface of the first substrate is parallel to the bonding clamp 601, the three fixed flat shafts 306 at the lower part of the wedge-shaped error compensation mechanism 300 naturally droop under the action of gravity, the corresponding three finger cylinders 304 act to clamp the three fixed flat shafts 306, and the state of the movable part 301 of the wedge-shaped error compensation mechanism 300 is locked;
6. MVS optical mechanism 700 operation: the left and right side mechanisms are simultaneously driven by three single-shaft drivers 701, 702 and 703 to drive the CCD704, the optical component 705, the guide rod cylinder 707, the objective lens 708 and the light source 706 to move together, and two different alignment marks of the first substrate are searched; the computer records the search results and the MVS optical mechanism 700 is locked;
7. the covering mechanism 500 acts: the bonding clamp 601 vacuum-adsorbs a first substrate, and the left and right sets of lifting motors 501 simultaneously act to drive the covering plate 510 to rise to a set position;
8. the sheet feeding mechanism 400 operates: the first double-acting cylinder 401 is inflated to enable the slide plate 405 of the loading mechanism 400 to be away from the wedge-shaped error compensation mechanism 300 to be lifted, the second double-acting cylinder 403 is inflated to enable the slide plate 405 to extend out to load a second substrate, the second double-acting cylinder 403 acts in the reverse direction to enable the slide plate 405 to retract, and the first double-acting cylinder 401 acts in the reverse direction to enable the slide plate 405 to return to the original position;
9. the workpiece stage 200 acts: the workpiece stage 200 drives the second substrate X, Y, Rz to move through the wedge error compensation mechanism 300, so that the alignment mark of the second substrate is aligned with the first substrate alignment mark stored in the computer;
10. the covering mechanism 500 acts: the spacer mechanism 508 of the bonding fixture 601 acts to extend three spacers in the spacer mechanism 508 to contact with the lower surface of the first substrate, the left and right sets of lifting motors 501 act simultaneously to drive the cover plate 510 to descend to contact with the second substrate, the clamping mechanism 506 of the bonding fixture 601 acts to clamp the two substrates, and the left and right sets of lifting motors 501 act simultaneously to drive the bonding fixture 601 to ascend to a set position;
11. the automatic turnover mechanism 800 of the bonding fixture acts: a fourth double-acting cylinder 803 of the bonding fixture automatic turnover mechanism 800 is inflated to drive the manipulator 802 to descend to a set position, and a swing cylinder 805 acts to clamp the bonding fixture 601;
12. the bonding jig positioning mechanism 600 acts: the third double-acting air cylinder 604 acts reversely to loosen the positioning and clamping of the bonding clamp 601;
13. the automatic turnover mechanism 800 of the bonding fixture acts: the fourth double-acting cylinder 803 of the automatic bonding fixture overturning mechanism 800 reversely acts to drive the manipulator 802 to ascend to a set position and overturn for 180 degrees, the fourth double-acting cylinder 803 of the automatic bonding fixture overturning mechanism 800 drives the manipulator 802 to descend to the set position, the swing cylinder 805 reversely acts to loosen the clamping of the bonding fixture 601 and take away the bonding fixture 601, and the fourth double-acting cylinder 803 of the automatic bonding fixture overturning mechanism 800 reversely acts to drive the manipulator 802 to ascend to the set position and overturn for 180 degrees; returning to the initial position;
14. the covering mechanism 500 acts: in the step 13, the left and right sets of lifting motors 501 act simultaneously to drive the covering plate 510 to descend to a set position;
15. the workpiece stage 200 acts: the workpiece table 200 drives the wedge error compensation mechanism 300 to move along X, Y, Rz and return to the initial position;
16. wedge error compensation mechanism 300 acts: the three finger cylinders 304 at the lower part of the wedge error compensation mechanism 300 act in reverse directions to release the clamping of the flat fixing shaft 306, so that the movable piece 301 of the wedge error compensation mechanism 300 is restored to a free state.
The matching relation among the components is as follows:
the frame 100 is supported on the ground through vibration reduction support legs, an upper mounting surface is provided with a workpiece table 200, an automatic bonding fixture overturning mechanism component 800 and an MVS optical mechanism component 700, vibration reduction damping is arranged in the middle of each connection, an upper piece mechanism 400 is mounted on a stator of the workpiece table 200, a wedge-shaped error compensation mechanism 300 is mounted on a rotor 201 of the workpiece table 200, and a covering mechanism 500 is mounted on the automatic bonding fixture overturning mechanism 800.
In summary, the semi-automatic alignment machine of the present invention includes a frame 100, a work stage 200, a wedge error compensation mechanism 300, a loading mechanism 400, a covering mechanism 500, a bonding fixture positioning mechanism 600, an MVS optical mechanism 700, and an automatic bonding fixture flipping mechanism 800. The workpiece table 200 is mounted on the frame 100 and is used for carrying the wedge-shaped error compensation mechanism 300 and the loading mechanism 400 to carry out X, Y, Rz three-degree-of-freedom motion; the covering mechanism 500 is also installed on the frame 100, and the bonding fixture positioning mechanism 600 is installed on the covering mechanism 500 and used for realizing the positioning and clamping functions of the bonding fixture; the MVS optical mechanism 700 is mounted on the frame 100, and X, Y, Z three-degree-of-freedom motion is realized by two sets of three single-shaft drivers; the bonding fixture automatic turnover mechanism 800 is mounted on the frame 100, and is used for realizing the automatic turnover function of the bonding fixture. The mechanisms of the semi-automatic alignment machine are independently arranged, and the bonding clamp 601 is positioned through the bonding clamp positioning mechanism 700, so that compared with manual equipment, the positioning precision is improved; the automatic turnover mechanism 800 for the bonding fixture is adopted to turn over the bonding fixture 601, and compared with manual operation in the prior art, the turnover mechanism has the advantages that the alignment precision is improved, the labor intensity is reduced, and the yield is improved. The invention has simple structure and convenient operation, and effectively reduces the production cost.
It will be apparent to those skilled in the art that various changes and modifications may be made in the invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (15)
1. A semi-automatic alignment machine, comprising: the device comprises a frame, a workpiece table, a wedge-shaped error compensation mechanism, a loading mechanism, a covering mechanism, a bonding fixture positioning mechanism, an MVS optical mechanism and an automatic bonding fixture overturning mechanism; wherein,
the workpiece table is arranged on the frame and used for bearing the wedge-shaped error compensation mechanism and the loading mechanism to carry out X, Y, Rz three-degree-of-freedom motion;
the covering mechanism is fixed on the frame and positioned above the upper piece mechanism, and the bonding clamp positioning mechanism is arranged on the covering mechanism and used for realizing the positioning and clamping of the bonding clamp;
the MVS optical mechanism is arranged on the frame, X, Y, Z three-degree-of-freedom motion is realized by three sets of single-axis drivers, and the MVS optical mechanism comprises: the CCD, the optical component, the guide rod cylinder and the objective lens are sequentially and correspondingly arranged from top to bottom, a light source is arranged on the guide rod cylinder, and the three sets of single-shaft drivers are arranged on one side of the optical component;
the automatic bonding fixture overturning mechanism is arranged on the frame and used for realizing automatic overturning of the bonding fixture.
2. The semi-automatic alignment machine of claim 1, wherein the workpiece stage comprises: the stator, set up in the active cell of stator top and set up and be in three group's motor drive assembly and supplementary cross slip table between active cell and the stator.
3. The semi-automatic alignment machine of claim 1, wherein the wedge error compensation mechanism comprises: the device comprises a movable piece, a fixed piece, a finger cylinder fixed on the fixed piece, a V-shaped block and a fixed flat shaft; the movable piece is connected with the fixed piece through a joint bearing, the V-shaped block is fixed on the finger cylinder and used for clamping a fixed flat shaft, and the fixed flat shaft is connected with the movable piece through a spherical bearing.
4. A semi-automatic alignment machine according to claim 3 wherein the wedge error compensation mechanism is further provided with risers with plunger screws on each side.
5. A semi-automatic alignment machine according to claim 1 wherein said upper plate mechanism is driven by a double acting pneumatic cylinder for movement in a vertical direction and a horizontal direction respectively.
6. A semi-automatic alignment machine according to claim 5 wherein said upper plate means is guided in vertical and horizontal directions by linear guides respectively.
7. The semi-automatic alignment machine of claim 1, wherein the covering mechanism comprises: the device comprises a vertical lifting mechanism driving the covering mechanism to vertically move, a first combined cylinder operating a clamping mechanism of the bonding fixture and a second combined cylinder operating a spacer mechanism of the bonding fixture.
8. The semi-automatic alignment machine of claim 7, wherein the vertical lift mechanism comprises: the motor drives the covering mechanism to vertically lift through the synchronous belt wheel and the ball screw.
9. The semi-automatic alignment machine of claim 8, wherein the motor is guided on both sides using needle guide assemblies.
10. The semi-automatic alignment machine of claim 1, wherein the bonding fixture positioning mechanism comprises: the linkage fixture comprises a positioning part, a double-acting cylinder and a positioning block, wherein the double-acting cylinder and the positioning block are arranged on the positioning part, and the linkage fixture is centered by the positioning part, the double-acting cylinder and the positioning block.
11. The semi-automatic alignment machine of claim 1, wherein the automatic bonding jig flipping mechanism comprises: the manipulator is driven by a double-acting cylinder to move up and down, and the manipulator is driven by a rotating cylinder to swing forwards and backwards for 180 degrees.
12. A semi-automatic alignment machine according to claim 11 wherein the robot is provided with two oscillating cylinders at one end for gripping the bonding jig.
13. A semi-automatic alignment machine according to claim 11 wherein said carriage is provided with a guide rail for the up and down movement of said double acting cylinder.
14. The semi-automatic alignment machine of claim 1 wherein said frame is a stainless steel welded frame.
15. The semi-automatic alignment machine of claim 1, wherein the top and bottom of the frame are provided with shock absorbing dampers, respectively.
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| CN105929202A (en) * | 2016-04-25 | 2016-09-07 | 昆山瑞鸿诚自动化设备科技有限公司 | HOME key and front screen two-in-one test tool |
| CN111403324B (en) * | 2018-10-23 | 2021-03-12 | 长江存储科技有限责任公司 | Semiconductor device turning device |
| CN109807534B (en) * | 2019-02-11 | 2021-04-02 | 重庆联贵灯具有限公司 | Automobile lamp machining and welding clamp |
| CN114833852B (en) * | 2022-05-11 | 2023-10-27 | 浙江大学 | A hydraulic mechanical claw with end deflection error and position error compensation capabilities |
| CN114895539B (en) * | 2022-05-20 | 2023-06-30 | 珠海市科迪电子科技有限公司 | Chip lithography apparatus |
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| CN102598206A (en) * | 2009-09-22 | 2012-07-18 | Ev集团E·索尔纳有限责任公司 | Device for aligning two substrates |
| CN102576189A (en) * | 2010-02-15 | 2012-07-11 | 聚斯微技术平版印刷有限公司 | Method and device for active wedge error compensation between two objects that can be positioned substantially parallel to each other |
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