CN105021273A - Accelerating gauge - Google Patents

Abstract

The name of the invention is an accelerator gauge. An accelerometer used to measure acceleration in one axis. And the accelerometer may include a base, a mass block, at least three elastic component groups, a piezoelectric component and a first damping component. The first damping component is disposed on at least one side of the piezoelectric component. The base is provided with a pressing portion in the axial direction. The mass has a first side and a second side opposite the first side. The at least three elastic component groups each include a first elastic component, a second elastic component and a preload adjustment component. The first elastic component is disposed on the first side of the mass block, and the second elastic component is disposed on the second side of the mass block. The preload adjustment component penetrates the first elastic component, the mass block and the second elastic component. The accelerometer of the present invention has the advantages of streamlined structure, low cost and high sensitivity.

Description

Acceleration gauge

technical field

The present invention relates to a measuring device, and in particular to an accelerometer.

Background technique

Existing technology accelerometers can be used in different industries and for different purposes, such as the monitoring of semiconductor processes, airbags in the automotive industry, blood pressure monitors and pedometers in the medical industry, interactive electronic entertainment products and smart phones etc. Among them, in recent years, it is especially important to be applied to the monitoring of semiconductor processes.

In addition to general process control, the suppression of semiconductor process equipment, floor structure, and vibration response in the working environment is also one of the factors that affect product yield and reliability. In view of the fact that product specifications tend to be thinner, lighter and shorter, the tolerance of semiconductor processes for environmental vibrations is also becoming more stringent.

Generally, prior art accelerometers can transmit the measured vibration signals to an active vibration isolation system, and perform calculations through the controller in the active vibration isolation system, and output control signals to the driver to suppress the active vibration isolation system. The force of vibration is used to achieve the purpose of reducing the amount of environmental vibration and improving the process yield. However, since the detection equipment in the semiconductor process and optoelectronic industry is very sensitive to the micro-vibration of the surrounding environment, it is better to use an accelerometer with high sensitivity and low noise at low frequency vibration.

Generally, accelerometers that can be used for low-frequency measurement have a complex structure (mostly a piezoelectric material combined with a beam structure), are expensive, and have a high noise floor. Therefore, how to provide an accelerometer that is suitable for low-frequency measurement, has a simplified structure, low cost, wide frequency response, and high sensitivity is a subject that requires great effort in the industry.

Contents of the invention

In view of the above problems, the object of the present invention is to provide an accelerometer with a simplified structure, low cost and high sensitivity.

To achieve the above purpose, according to the present invention, an accelerometer can be provided for measuring the acceleration of an axial direction. And the accelerometer may include a base, a mass block, at least three elastic component groups, a piezoelectric component and a first damping component. The first damping component is disposed on at least one side of the piezoelectric component.

The base is provided with a pressing portion in the axial direction. The mass has a first side and a second side opposite the first side. The at least three elastic component groups each include a first elastic component, a second elastic component and a preload adjustment component. The first elastic component is disposed on the first side of the mass block, and the second elastic component is disposed on the second side of the mass block, and the preload adjusting component passes through the first elastic component, the mass block and the second elastic component.

The piezoelectric component is arranged between the mass block and the base. The piezoelectric component has a first side facing the pressing part and a second side opposite to the first side.

Wherein, when the mass block is displaced in the axial direction, the pressing portion of the base will cause a deformation of the piezoelectric component.

In one embodiment, the pressing portion is a thimble.

In one embodiment, a rigid component is further included, and the rigid component is disposed on the second side of the piezoelectric component.

In one embodiment, the first damping element is attached to the first side of the piezoelectric element.

In one embodiment, an insulator is further included, and the insulator is disposed between the pressing portion and the piezoelectric component.

In one embodiment, the first damping element is attached to the first side of the piezoelectric element. The accelerometer also includes a second damping component disposed on a side of the rigid component opposite to the piezoelectric component.

In one embodiment, the first damping component is disposed on the second side of the piezoelectric component, and the accelerometer further includes a rigid component, and the rigid component is disposed between the first damping component and the piezoelectric component.

In one embodiment, a plurality of second damping components are also included, and these second damping components are arranged between the mass block and the base.

In one embodiment, both ends of the at least three elastic component groups are cut flat.

In one embodiment, at least three fixing parts, at least three first fixing seats and at least three second fixing seats are included. The first end of each second elastic component is sleeved on each fixing piece. At least three first fixing seats are arranged on the second side of the mass block. At least three second fixing seats are arranged on the first side of the mass block. At least three third fixing seats are arranged on the side of the base facing the mass block.

Moreover, each of the first elastic components is sandwiched between each of the second fixing seats and each of the third fixing seats, and each of the second elastic members is sandwiched between each of the fixing parts and each of the first fixing seats. between a fixed seat. Each preload adjusting assembly passes through each fixing piece, each first fixing seat, each second fixing seat and each third fixing seat.

To sum up, the present invention secures the setting of the piezoelectric component through the configuration including the base, the mass block, at least three elastic component groups, the piezoelectric component, and the first damping component, and setting the pressing portion on the base. So that when the mass block has a displacement in the axial direction, the pressing part of the base will cause a deformation of the piezoelectric component, and then the electrical signal converted by the deformation is used to complete the purpose of measurement. Therefore, through the above configuration, the present invention can provide an accelerometer with simplified structure, low cost and high sensitivity.

Description of drawings

FIG. 1A is a schematic perspective view of the first embodiment of the present invention.

FIG. 1B is an exploded schematic diagram of FIG. 1A .

FIG. 1C is a schematic cross-sectional view of FIG. 1A .

FIG. 2A is a schematic perspective view of a second embodiment of the present invention.

FIG. 2B is an exploded schematic diagram of FIG. 2A .

FIG. 2C is a schematic cross-sectional view of FIG. 2A .

FIG. 3A is an exploded schematic diagram of a third embodiment of the present invention.

FIG. 3B is a schematic cross-sectional view of FIG. 3A .

FIG. 4A is an exploded schematic diagram of a fourth embodiment of the present invention.

FIG. 4B is a schematic cross-sectional view of FIG. 4A .

FIG. 5A is an exploded schematic diagram of a fifth embodiment of the present invention.

FIG. 5B is a schematic cross-sectional view of FIG. 5A .

FIG. 6 is a schematic cross-sectional view of a sixth embodiment of the present invention.

Detailed ways

An accelerometer according to a preferred embodiment of the present invention will be described below with reference to related drawings, wherein the same components will be described with the same reference symbols.

The accelerometer provided by the present invention can be matched with a vibration isolation system, which can convert the measured acceleration into a digital signal and provide it to the vibration isolation system. Isolation items make it less vibrate (providing a damped oscillation effect). The accelerometer provided by the invention can also be applied to industrial production line monitoring, earthquake monitoring, semiconductor and photoelectric power plant floor micro-vibration measurement, and the like.

In addition, the accelerometer of this embodiment is designed to measure vibrations at a frequency below 1/3 of the natural frequency of the accelerometer itself, and the measurable range is preferably between 1 Hz and 40 Hz when the rigid component uses a copper sheet between. The collocation of rigid components will be described later.

The design of the accelerometer of the present invention will be illustrated with respect to different embodiments.

Please refer to FIGS. 1A to 1C , which are respectively a three-dimensional schematic view, an exploded schematic view and a cross-sectional schematic view of the first embodiment of the present invention.

An accelerometer 1 of this embodiment is used to measure acceleration in an axial direction. In other words, the accelerometer of this embodiment is a single-axis accelerometer 1 , and the accelerometer disposed on the X-Y plane can particularly measure the acceleration movement in the Z direction.

The accelerometer 1 may include a base 10 , a mass 11 , at least three elastic component groups 12 , a piezoelectric component 13 and a first damping component 14 .

The base 10 of this embodiment is disposed on the surface of the object to be tested or the object to be vibration-isolated, and the base 10 of this embodiment may be provided with a pressing portion 102 in the axial direction (Z direction). Therefore, the direction in which the pressing portion 102 is disposed must be the same as the acceleration direction to be measured by the accelerometer 1 . And although the pressing part 102 of this embodiment is locked on the base 10 (the pressing part 102 can be a thimble or a screw), there is also an embodiment where the pressing part 102 and the base 10 can be integrated into a single component Form, and the shape of the pressing part 102 only needs to protrude from the surface of the base 10 and be able to generate pressure on the part of the piezoelectric component 13, so the pressing part 102 can be cylindrical, rectangular, hexapod, etc. The shapes and the like are not limited to the shapes and arrangements shown in the drawings of this embodiment.

And in order to define the positions of each component in more detail, the proof mass 11 disposed above the base 10 may have at least a first side 11 a and a second side 11 b. And the first side 11 a is opposite to the second side 11 b, and the first side 11 a of the proof mass 11 is adjacent to the base 10 .

Please refer to FIG. 1B and FIG. 1C in particular. In this embodiment, at least three elastic component groups 12 each include a first elastic component 121 , a second elastic component 122 and a preload adjustment component 123 . The first elastic component 121 has a first end 121a and a second end 121b, and the first end 121a is opposite to the second end 121b, the second elastic component 122 has a first end 122a, a second end 122b, and the first end 122a is connected to The second ends 122b are oppositely disposed. The first elastic component 121 is disposed on the first side 11a of the mass block 11, and the second elastic component 122 is disposed on the second side 11b of the mass block 11, and the preload adjustment component 123 passes through the first elastic component 121, the mass block 11 and The second elastic component 122 . Through the configuration of the first elastic component 121 and the second elastic component 122 , the base 10 and the mass 11 can move coaxially and simultaneously, and provide precise vibration signals. Each preload adjustment assembly 123 is correspondingly arranged with each of these elastic assemblies 121 , 122 , and passes through the mass block 11 , each of these elastic assemblies 121 , 122 and the base 10 in sequence.

The user can indirectly make the mass 11 compress the elastic components 121 and 122 by adjusting the distance between the preload adjustment unit 123 and the base 10, so that the first elastic component 121 and the second elastic component 122 of the elastic component group 12 are compressed. The preloading is used to fine-tune the distance between the mass block 11 and the base 10 , and push the pressing portion 102 to a preset position.

In addition, the preload adjustment unit 123 can also make the pressing portion 102 of the base 10 preload the piezoelectric component 13 . When the piezoelectric component 13 applies a certain preload, it can be ensured that the piezoelectric component 13 is always under force during the measurement process (there will be no situation where the piezoelectric component 13 is separated from the pressing part 102 and the vibration cannot be measured), so Measurement errors can be reduced. It should be noted that the adjustment of this preload may be adjusted according to different materials and structures. If the preload depth is too shallow, it may make the pressure part 102 unable to contact the piezoelectric component 13 during the measurement process, resulting in a measurement data Incorrect; and if the preload is too deep, the piezoelectric component 13 will show plastic deformation (Plastic deformation) or rupture. However, in this embodiment, the piezoelectric component 13 is preloaded by 0.75mm.

It should be added that the three elastic assembly groups 12 in this embodiment have the same height and are spaced apart and evenly arranged, so that the elastic assembly groups 12 can provide a force in the Z direction of the mass block 11 (conversely, these The loads of the mass blocks 11 received by the elastic component groups 12 are also the same), and the mass blocks 11 are arranged parallel to the base 10 . Therefore, if the quantity of the elastic component group 12 in other implementation aspects is adjusted, the configuration should also be such that the mass block 11 can be evenly stressed and the mass block 11 can be parallel to the base 10 .

Except for the configuration arrangement, both ends of the at least three elastic component groups 12 in this embodiment are cut flat. In short, the two ends of the first elastic component 121 and the second elastic component 122 that are in contact with the mass block 11 and the base 10 are cut flat so that the mass block 11 can be arranged parallel to the base 10, and the overall measurement can also be increased. the accuracy. Specifically, the flattening here means that the elastic components 121 and 122 are cut flat according to the surfaces of the mass block 11 and the base 10 so that the elastic components 121 and 122 are perpendicular to the flattened places.

In an unstressed state, the first elastic component 121 will make the mass block 11 assume a state of zero resultant force (mass block 11 can be suspended). In addition, the first elastic component 121 and the second elastic component 122 in this embodiment are each a spring with the same length, but in other embodiments, they can also be shrapnel or other equivalent elastic components. This example is limited.

In addition, in order to match the above-mentioned elastic component group 12, this embodiment further includes at least three fixing pieces 151, at least three first fixing seats 152, at least three second fixing seats 153 and at least three third fixing seats 154 for These elastic component groups 12 are provided. At least three first fixing seats 152 are disposed on the second side 11 b of the proof mass 11 . At least three second fixing seats 153 are disposed on the first side 11 a of the proof mass 11 . At least three third fixing seats 154 are disposed on a side of the base 10 facing the proof mass 11 . And although the at least three first fixing seats 152, at least three second fixing seats 153 and at least three third fixing seats 154 of this embodiment can be integrated into a single component with the mass block 11 or the base 10, there can also be an implementation Aspects are in a form independent of the mass block 11 or the base 10, so it will not be limited by the accompanying drawings of this case.

In detail, the first end 122 a of each second elastic component 122 is sleeved on each fixing member 151 . Each of the first elastic components 121 is sandwiched between each of the second fixing seats 153 and the third fixing seats 154, and each of the second elastic components 122 is sandwiched between each of the fixing pieces 151 and each of the fixing parts 151. between the first fixing seats 152 .

And each preload adjusting assembly 123 passes through each fixing member 151 , each first fixing seat 152 , each second fixing seat 153 and each third fixing seat 154 .

The number of at least three fixing pieces 151 , at least three first fixing seats 152 , at least three second fixing seats 153 and at least three third fixing seats 154 is at least greater than or equal to the number of elastic assembly groups 12 . These at least three fixing pieces 151, at least three first fixing seats 152, at least three second fixing seats 153 and at least three third fixing seats 154 are provided for the purpose of making the installation position of the elastic component group 12 not biased. Movement, and the elastic component set 12 will not produce additional displacement or skew during the process of measuring the acceleration, and reduce the swing effect of the elastic component set 12 during the measurement process, so as to ensure that the measured data is more accurate.

The piezoelectric component 13 of this embodiment can be disposed between the proof mass 11 and the base 10 . In detail, the piezoelectric component 13 has a first side 13 a and a second side 13 b opposite to the first side 13 a, and the first side 13 a of the piezoelectric component 13 is disposed opposite to the pressing portion 102 .

The following table lists the piezoelectric components 13 that may be selected in this embodiment and their material parameters, but is not limited by the types of these piezoelectric components.

In addition, the accelerometer 1 of this embodiment further includes a rigid component 16 , and the rigid component 16 can be disposed on the second side 13 b of the piezoelectric component 13 . The purpose of setting this rigid component 16 is to increase the rigidity of the piezoelectric component 13. For example, the rigid component 16 (such as a metal sheet) can be attached to the other side of the piezoelectric component 13 that is pressed against (can be passed through an epoxy resin Attach the rigid component 16 to the negative end of the piezoelectric component 13) to avoid damage to the piezoelectric component 13.

Another purpose of the rigid component 16 here is to increase the rigidity supported by the mass block 11 . Therefore, when the supporting rigidity of the mass block 11 is increased, the overall natural frequency of the accelerometer 1 will be increased, so the measurable bandwidth of the accelerometer 1 in this embodiment will also increase. In addition, the accelerometer 1 of this embodiment can also adjust the overall natural frequency of the accelerometer 1 by increasing or decreasing the thickness or quantity of the rigid component 16 .

Please continue to refer to FIGS. 1B and 1C , the first damping component 14 of this embodiment is attached to the first side 13 a of the piezoelectric component 13 . In other words, the first damping component 14 of this embodiment will be disposed between the mass 11 and the base 10 , and disposed on the first side 13 a of the piezoelectric component 13 . In detail, the first damping component 14 of this embodiment can also be disposed between the piezoelectric component 13 and the pressing portion 102 of the base 10 . The material of the first damping component 14 in this embodiment can be made of rubber, silicone, elastic polymer or a combination thereof, but is not limited to these materials. The actual material selection of the first damping component 14 will be adjusted according to different demands.

It should be added that the first damping component 14 here can not only adjust the overall damping coefficient of the accelerometer 1 , but increasing the overall damping coefficient will make the response frequency smoother, so the measurable range will be enlarged. In addition, the first damping component 14 can also be used to isolate the pressing portion 102 of the base 10 from directly contacting the piezoelectric component 13 , so as to avoid a short circuit or damage to the piezoelectric component 13 .

When the accelerometer 1 of this embodiment is actually operated, when the mass 11 has a displacement in the axial direction, the pressing portion 102 of the base 10 will cause a deformation of the piezoelectric component 13 . Then, the accelerometer 1 can convert the deformation into an electrical signal (or charge signal) and transmit it to the vibration isolation system that it is matched with.

Because the component is vibrated by a force, the piezoelectric material is stressed, and the accumulated electricity is proportional to its acceleration. The electrodes on the component receive the electricity and send it to the signal receiver to obtain the acceleration signal.

In short, through the configuration of this embodiment, a simplified structure (fewer components are used) and easy assembly can be provided, thus making the cost of the accelerometer 1 of this embodiment low.

Next, please refer to FIG. 2A to FIG. 2C , which are respectively a perspective view, an exploded view and a cross-sectional view of a second embodiment of the present invention.

Similar to the first embodiment, the accelerometer 2 of this embodiment may include a base 20 , a mass 21 , at least three elastic component groups 22 , a piezoelectric component 23 and a first damping component 24 . The accelerometer 2 of this embodiment further includes a rigid component 26 , and at least three elastic component groups 22 each include a first elastic component 221 , a second elastic component 222 and a preload adjustment component 223 . This embodiment also includes at least three fixing pieces 251 , at least three first fixing seats 252 , at least three second fixing seats 253 and at least three third fixing seats 254 for the elastic component groups 22 to be disposed on.

However, the difference from the first embodiment is that the first damping component 24 and the rigid component 26 of this embodiment are both disposed on the second side 23 b of the piezoelectric component 23 . Further, as shown in FIG. 2B , the first damping component 24 is disposed on the rigid component 26 (equivalent to the rigid component 26 being disposed between the first damping component 24 and the piezoelectric component 23), which can suppress the stiffness of the rigid component 26. resonance phenomenon. And if the first damping component 24 is disposed on the other side 23a of the piezoelectric component 23 (for example, the first embodiment), the resonance phenomenon of the rigid component 26 can also be suppressed. Although the above two setting methods will affect the overall sensitivity of the accelerometer, they can both increase the measurement bandwidth. Therefore, preferably, proper damping parameters (that is, selection of the first damping component 24 with appropriate thickness or hardness) need to be selected to achieve the required sensitivity and bandwidth.

In addition, this embodiment may further include an insulator 202 a disposed between the pressing portion 202 and the piezoelectric component 23 . Moreover, the insulator 202 a of this embodiment can be sleeved on the pressing portion 202 to achieve the purpose of isolating the pressing portion 202 of the base 20 from directly contacting the piezoelectric component 23 , causing a short circuit or damage to the piezoelectric component 23 . In addition to this effect, the insulator 202 a of this embodiment can also be regarded as one of the damping components of the accelerometer 2 , in other words, the insulator 202 a also assists the first damping component 24 to adjust the overall damping coefficient of the accelerometer 2 .

The rest of the components and the relationship among the components are similar to those of the first embodiment, so the details will not be repeated.

Next, please refer to FIGS. 3A and 3B , which are respectively an exploded view and a schematic cross-sectional view of a third embodiment of the present invention.

Similar to the first and second embodiments, the accelerometer 3 of this embodiment may include a base 30 , a mass 31 , at least three elastic component groups 32 , a piezoelectric component 33 and a first damping component 34 . The accelerometer 3 of this embodiment further includes a rigid component 36 , and at least three elastic component groups 32 each include a first elastic component 321 , a second elastic component 322 and a preload adjustment component 323 .

Similar to the second embodiment, in addition, this embodiment may further include an insulator 302 a disposed between the pressing portion 302 and the piezoelectric component 33 . In addition, the insulator 302 a of this embodiment can be sleeved on the pressing portion 302 so as to isolate the pressing portion 302 of the base 30 from directly contacting the piezoelectric component 33 , causing a short circuit or damage to the piezoelectric component 33 .

However, the difference between this embodiment and the previous embodiments is that, in addition to the first damping assembly 34, this embodiment may also include a plurality of second damping assemblies 34a, and these second damping assemblies 34a are arranged between the mass block 31 and the mass block 31. Between the base 30. And preferably, the second damping components 34 a are a plurality of damping cylinders and the base 30 can also be provided with a plurality of receiving grooves 306 to fix the positions of the damping cylinders on the base 30 . In addition, the first damping component 34 here can provide similar effects to the first damping component 14 , 24 of the first embodiment or the second embodiment.

The rest of the components and the relationship among the components are similar to those of the first embodiment, so the details will not be repeated.

Next, please refer to FIG. 4A and FIG. 4B , which are respectively an exploded view and a schematic cross-sectional view of a fourth embodiment of the present invention.

Similar to the first embodiment, the accelerometer 4 of this embodiment may include a base 40 , a mass 41 , at least three elastic component groups 42 , a piezoelectric component 43 and a first damping component 44 . The accelerometer 4 of this embodiment further includes a rigid component 46 , and at least three elastic component groups 42 each include a first elastic component 421 , a second elastic component 422 and a preload adjustment component 423 .

However, the difference between this embodiment and the first embodiment is that this embodiment further includes a second damping component 44 a disposed on a side of the rigid component 46 opposite to the piezoelectric component 43 . The first damping component 44 can be disposed between the piezoelectric component 43 and the pressing portion 402 , and the second damping component 44 a is disposed on the second side 46 b of the rigid component 46 . In other words, a damping component is provided on both sides of the rigid component 46 in this embodiment.

In addition, although this embodiment takes one piezoelectric component 43 and one rigid component 46 as an example, one piezoelectric component 43 and different numbers of rigid components 46 can also be stacked according to different requirements to achieve different measurement purposes. The following table is a possible experimental example of this embodiment, and the “thickness” in the table is the thickness after the rigid component 46 and the piezoelectric component 43 are stacked. And the rigid component 46 in the table is a thin copper sheet.

The rest of the components and the relationship among the components are similar to those of the first embodiment, so the details will not be repeated. In addition, in all the embodiments, various aspects of various components, components or units can be used interchangeably in each embodiment, and are not limited to the aspects listed in the above embodiments.

Please refer to next, FIG. 5B is a schematic cross-sectional view of FIG. 5A . FIG. 5A is an exploded schematic view of a fifth embodiment of the present invention.

Similar to the foregoing, the accelerometer 5 of this embodiment may include a base 50 , a mass 51 , at least three elastic component groups 52 , a piezoelectric component 53 and a first damping component 54 . The accelerometer 5 of this embodiment further includes a rigid component 56 , and at least three elastic component groups 52 each include a first elastic component 521 , a second elastic component 522 and a preload adjustment component 523 .

Similar to the third embodiment, in addition to the first damping assembly 54, this embodiment may also include a plurality of second damping assemblies 54a, and these second damping assemblies 54a are arranged between the mass block 51 and the base 50 . And preferably, the second damping components 54 are a plurality of damping cylinders, and the base 50 can also be provided with a plurality of receiving grooves 506 to fix the positions of the damping cylinders on the base 50 .

The difference from the third embodiment lies in the position of the first damping component 54 , the first damping component 54 of this embodiment is attached to the first side 53 a of the piezoelectric component 53 . In other words, the first damping component 54 of this embodiment will be disposed between the mass block 51 and the base 50 .

The rest of the components and the relationship among the components are similar to those of the first embodiment, so the details will not be repeated.

Finally, please refer to FIG. 6 , which is a schematic cross-sectional view of a sixth embodiment of the present invention.

Similar to the fourth embodiment, the accelerometer 6 of this embodiment may include a base 60 , a mass 61 , at least three elastic component groups 62 , a piezoelectric component 63 and a first damping component 64 . The accelerometer 6 of this embodiment further includes a rigid component 66 , and at least three elastic component groups 62 each include a first elastic component 621 , a second elastic component 622 and a preload adjustment component 623 . Moreover, a damping component is provided on both sides of the rigid component 66 in this embodiment.

The difference from the above-mentioned embodiments is that the accelerometer 1 of this embodiment can also be equipped with a packaging case C, and the packaging case C can be made of stainless steel to isolate environmental electromagnetic wave noise interference, so as to achieve the purpose of low noise .

The rest of the components and the relationship among the components are similar to those of the fourth embodiment, so they will not be repeated here. In addition, in all the embodiments, various aspects of various components, components or units can be used interchangeably in each embodiment, and are not limited to the aspects listed in the above embodiments.

To sum up, the present invention secures the setting of the piezoelectric component through the configuration including the base, the mass block, at least three elastic component groups, the piezoelectric component, and the first damping component, and setting the pressing portion on the base. So that when the mass block has a displacement in the axial direction, the pressing part of the base will cause a deformation of the piezoelectric component, and then the electrical signal converted by the deformation is used to complete the purpose of measurement. Through the mass block, the piezoelectric component and the pressing part, the deformation of the piezoelectric sheet can be increased, thereby improving the sensitivity. Therefore, through the above configuration, the present invention can provide an accelerometer with simplified structure, low cost, high sensitivity and low noise.

The above description is for illustration only, not for limitation. Any equivalent modification or change without departing from the spirit and scope of the present invention shall be included in the appended claims.

Symbol Description

1, 2, 3, 4, 5, 6: Acceleration gauge

10, 20, 30, 40, 50, 60: base

102, 202, 302, 402, 502: pressure part

11, 21, 31, 41, 51, 61: masses

11a: First side

11b: Second side

12, 22, 32, 42, 52, 62: elastic component group

121, 221, 321, 421, 521, 621: the first elastic component

122, 222, 322, 422, 522, 622: second elastic component

123, 223, 323, 423, 523, 623: Preload adjustment components

13, 23, 33, 43, 53, 63: piezoelectric components

13a, 23a, 33a: first side

13b, 23b, 46b: second side

14, 24, 34, 44, 54, 64: the first damping assembly

151, 251, 451: Fixing parts

152, 252, 352, 452: the first fixed seat

153, 253, 353, 453: the second fixed seat

154, 254, 354, 454: the third fixed seat

16, 26, 36, 46, 56, 66: rigid components

202a, 302a: insulating parts

121a, 122a: first end

121b, 122b: second end

306: storage tank

34a, 44a, 54a: Second damper assembly

C: Encapsulation shell

Claims (10)

1. An accelerometer, used to measure an axial acceleration, said accelerometer comprising: a base, a pressing portion is arranged on the axial direction; a mass having a first side and a second side opposite the first side; At least three elastic component groups, each of which includes a first elastic component, a second elastic component and a preload adjustment component, the first elastic component is arranged on the first side of the mass block, and the The second elastic component is disposed on the second side of the mass block, and the preload adjustment component passes through the first elastic component, the mass block and the second elastic component; a piezoelectric component disposed between the mass and the base, the piezoelectric component has a first side facing the pressing portion and a second side opposite to the first side; and a first damping component disposed on at least one side of the piezoelectric component; Wherein when the mass block is displaced in the axial direction, the pressing portion of the base will cause the piezoelectric component to deform. 2. The accelerometer of claim 1, wherein the pressing portion is a thimble. 3. The accelerometer of claim 1, further comprising a rigid member disposed on the second side of the piezoelectric member. 4. The accelerometer of claim 3, wherein the first damping assembly is attached to the first side of the piezoelectric assembly. 5. The accelerometer of claim 4, further comprising a second damping element disposed on a side of the rigid element opposite to the piezoelectric element. 6. The accelerometer of claim 1, wherein the first damping element is disposed on the second side of the piezoelectric element, and the accelerometer further comprises a rigid element, and the rigid element is disposed on the Between the first damping component and the piezoelectric component. 7. The accelerometer according to claim 6, further comprising an insulator disposed between the pressing portion and the piezoelectric assembly. 8. The accelerometer according to claim 4 or 7, further comprising a plurality of second damping assemblies disposed between the mass and the base. 9. The accelerometer of claim 1, wherein both ends of the at least three groups of elastic components are cut flat. 10. The accelerometer of claim 1, further comprising: At least three fixing parts, a first end of each second elastic component is sleeved on each fixing part; At least three first fixing seats are arranged on the second side of the mass block; at least three second fixing seats arranged on the first side of the proof mass; and At least three third fixing seats are arranged on the side of the base facing the mass block; Wherein, each of the first elastic components is sandwiched between each of the second fixing seats and each of the third fixing seats, and each of the second elastic parts is sandwiched between each of the fixing parts and each of the first fixing seats. Between one fixing seat, and each preload adjusting assembly passes through each fixing piece, each first fixing seat, each second fixing seat and each third fixing seat.