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CN104979742A - Chemical oxygen-iodine laser optical resonant cavity adjusting and monitoring system and method - Google Patents

Chemical oxygen-iodine laser optical resonant cavity adjusting and monitoring system and method Download PDF

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CN104979742A
CN104979742A CN201410143863.4A CN201410143863A CN104979742A CN 104979742 A CN104979742 A CN 104979742A CN 201410143863 A CN201410143863 A CN 201410143863A CN 104979742 A CN104979742 A CN 104979742A
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motor
control module
mirror
cavity
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CN104979742B (en
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马艳华
刘嵚
张增宝
张治国
何鑫
石文波
房本杰
金玉奇
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Dalian Institute of Chemical Physics of CAS
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Abstract

本发明涉及氧碘化学激光器光学谐振腔调节与监控系统及方法,包括:主控模块、算法模块、数据采集模块、电机控制模块、数字I/O模块、电机驱动数字I/O模块、通讯模块、显示单元和电源模块;方法包括主控模块实时采集压力传感器的腔内压力数据并显示,判断采集腔内压力数据是否超出光腔内压力允许范围;算法模块根据光腔内压力数据发送指令给数字IO模块进而控制电磁阀开关实现压力调节;通过显示单元发送控制信号给电机控制模块进而控制腔镜的X方向和Y方向的电机进行调节,并实时监测电机运行状态。本发明具有实时性强、稳定性高、操作简单、开发成本低等优点,特别适用于氧碘化学激光器的光学谐振腔中。

The invention relates to a system and method for adjusting and monitoring an optical resonant cavity of an oxygen-iodine chemical laser, comprising: a main control module, an algorithm module, a data acquisition module, a motor control module, a digital I/O module, a motor-driven digital I/O module, and a communication module , a display unit and a power supply module; the method includes that the main control module collects and displays the intracavity pressure data of the pressure sensor in real time, and judges whether the collected intracavity pressure data exceeds the allowable range of the pressure in the optical cavity; the algorithm module sends instructions to the optical cavity according to the pressure data in the optical cavity The digital IO module further controls the solenoid valve switch to realize pressure adjustment; the display unit sends a control signal to the motor control module to control the X-direction and Y-direction motors of the cavity mirror to adjust, and monitor the motor running status in real time. The invention has the advantages of strong real-time performance, high stability, simple operation and low development cost, and is especially suitable for the optical resonant cavity of the oxygen iodine chemical laser.

Description

氧碘化学激光器光学谐振腔调节与监控系统及方法Oxygen-iodine chemical laser optical cavity adjustment and monitoring system and method

技术领域technical field

本发明涉及一种氧碘化学激光器光学谐振腔调节与监控系统及方法,具体地说,是指一种用于对氧碘化学激光器光学谐振腔中腔镜镜架的调节与光学谐振腔内参数监测控制的控制系统及方法。The invention relates to a system and method for adjusting and monitoring the optical resonant cavity of an oxygen iodine chemical laser, in particular to a system and method for adjusting the cavity mirror frame in the optical resonant cavity of an oxygen iodine chemical laser and the internal parameters of the optical resonant cavity. A control system and method for monitoring and controlling.

背景技术Background technique

光学谐振腔作为氧碘化学激光器的重要组成部分,其腔镜的调节和腔内参数的变化将直接影响激光器出光的光束质量。现有的控制系统将腔镜调节与光腔参数的监测与控制两种功能分开,腔镜调节由电机、电源和手动按钮组成,只能在本地进行调节;光腔参数的监测与控制则由距激光器位置较远的总控制台完成。该系统功能分散,实时性较弱,操作复杂且抗干扰能力差,不利于氧碘化学激光器的集成化系统实现。The optical resonator is an important part of the oxygen iodine chemical laser, the adjustment of the cavity mirror and the change of the cavity parameters will directly affect the beam quality of the laser output light. The existing control system separates the two functions of cavity mirror adjustment and optical cavity parameter monitoring and control. The cavity mirror adjustment is composed of motor, power supply and manual button, which can only be adjusted locally; the optical cavity parameter monitoring and control is controlled by The master console is completed further away from the laser position. The function of the system is scattered, the real-time performance is weak, the operation is complex and the anti-interference ability is poor, which is not conducive to the realization of the integrated system of the oxygen iodine chemical laser.

发明内容Contents of the invention

为克服现有技术的不足,本发明提供一种实时性强、稳定性高、操作简单、开发成本低的应用于氧碘化学激光器光学谐振腔的调节与监控系统及方法。In order to overcome the deficiencies of the prior art, the present invention provides a system and method for adjusting and monitoring the optical resonant cavity of an oxygen-iodine chemical laser with strong real-time performance, high stability, simple operation and low development cost.

本发明的技术解决方案如下:Technical solution of the present invention is as follows:

氧碘化学激光器光学谐振腔调节与监控系统,包括:主控模块、算法模块、数据采集模块、电机控制模块、数字I/O模块、电机驱动数字I/O模块、通讯模块、显示单元和电源模块;Oxygen iodine chemical laser optical resonator adjustment and monitoring system, including: main control module, algorithm module, data acquisition module, motor control module, digital I/O module, motor drive digital I/O module, communication module, display unit and power supply module;

所述主控模块分别与算法模块、数字I/O模块、通讯模块连接,算法模块与数据采集模块、电机控制模块连接、电机驱动数字I/O模块连接,电源模块分别与主控模块、通用I/O模块、数据采集模块、电机控制模块连接;所述通讯模块与显示单元连接;The main control module is connected with the algorithm module, the digital I/O module and the communication module respectively, the algorithm module is connected with the data acquisition module, the motor control module, and the motor-driven digital I/O module, and the power supply module is connected with the main control module and the general purpose module respectively. The I/O module, the data acquisition module and the motor control module are connected; the communication module is connected with the display unit;

主控模块用于将通过显示单元接收的控制命令发送给数字I/O模块,并将数字I/O模块反馈的电磁阀状态、数据采集模块采集的压力传感器信息和电机驱动数字I/O模块反馈的电机运行状态信息通过显示单元进行实时显示;The main control module is used to send the control command received through the display unit to the digital I/O module, and the status of the solenoid valve fed back by the digital I/O module, the pressure sensor information collected by the data acquisition module and the motor drive digital I/O module The feedback motor running status information is displayed in real time through the display unit;

算法模块用于对数据采集模块采集的压力传感器信息和电机驱动数字I/O模块采集的电机运行状态信息进行运算并发出指令至数字IO模块和电机控制模块;The algorithm module is used to calculate the pressure sensor information collected by the data acquisition module and the motor running status information collected by the motor drive digital I/O module, and send instructions to the digital IO module and the motor control module;

数字I/O模块用于与电磁阀连接并根据算法模块经主控模块发来的指令控制电磁阀的开闭;The digital I/O module is used to connect with the solenoid valve and control the opening and closing of the solenoid valve according to the instructions sent by the algorithm module through the main control module;

数据采集模块用于采集腔内压力传感器数据;The data acquisition module is used to collect the data of the intracavity pressure sensor;

电机驱动数字I/O模块与电机控制模块连接,用于通过访问电机控制模块得到电机运行状态信息并反馈至算法模块。The motor drive digital I/O module is connected to the motor control module, and is used to obtain motor running status information by accessing the motor control module and feed it back to the algorithm module.

氧碘化学激光器光学谐振腔调节与监控系统还包括腔镜驱动机构,由镜架和推拉杆构成;所述镜架包括中空结构的边框、环状的X方向调节框及Y方向调节框,腔镜嵌于Y方向调节框内部,X方向调节框通过第一转轴设置于Y方向调节框内,Y方向调节框通过第二转轴设置于边框内;在X方向调节框上垂直镜面方向设有第一推拉杆,在Y方向调节框上垂直镜面方向设有第二推拉杆,第一推拉杆和第二推拉杆分别与第一电机和第二电机传动连接,第一、第二电机分别驱动第一、第二推拉杆在垂直于镜体反射面的方向往复移动。The oxygen-iodine chemical laser optical resonant cavity adjustment and monitoring system also includes a cavity mirror driving mechanism, which is composed of a mirror frame and a push-pull rod; The mirror is embedded in the Y-direction adjusting frame, the X-direction adjusting frame is set in the Y-direction adjusting frame through the first rotating shaft, and the Y-direction adjusting frame is arranged in the frame through the second rotating shaft; on the X-direction adjusting frame, a second A push-pull rod, a second push-pull rod is provided on the Y-direction adjustment frame in the vertical mirror direction, the first push-pull rod and the second push-pull rod are connected to the first motor and the second motor respectively, and the first and second motors drive the first motor respectively 1. The second push-pull rod reciprocates in a direction perpendicular to the reflective surface of the mirror body.

所述第一转轴与第二转轴垂直且位于同一平面。The first rotation axis is perpendicular to the second rotation axis and located on the same plane.

所述腔镜为凸镜或凹镜。The cavity mirror is a convex mirror or a concave mirror.

一种氧碘化学激光器光学谐振腔调节与监控方法,包括以下步骤:A method for adjusting and monitoring an oxygen-iodine chemical laser optical resonator, comprising the following steps:

1)主控模块接收数据采集模块实时采集的压力传感器感应的腔内压力数据,经低通滤波后通过通讯模块送至显示单元实时显示;1) The main control module receives the intracavity pressure data sensed by the pressure sensor collected by the data acquisition module in real time, and sends it to the display unit for real-time display through the communication module after low-pass filtering;

2)主控模块判断腔内压力数据是否超出光腔内压力允许范围;若未超出,执行步骤3);若超出,则通过显示单元报警,根据显示的腔内压力值通过显示单元选择电磁阀的开关,再执行步骤3);2) The main control module judges whether the pressure data in the cavity exceeds the allowable range of the pressure in the optical cavity; if it does not exceed, perform step 3); if it exceeds, it will alarm through the display unit, and select the solenoid valve through the display unit according to the displayed pressure value in the cavity switch, and then perform step 3);

3)算法模块实时监测电机运行状态;根据光学谐振腔输出的光斑形状和亮度均匀度,通过显示单元输入指令给电机控制模块控制腔镜的X方向和Y方向的电机进行调节,直至光斑形状和亮度均匀度达到设定要求。3) The algorithm module monitors the running state of the motor in real time; according to the light spot shape and brightness uniformity output by the optical resonant cavity, input instructions to the motor control module to control the motors in the X direction and Y direction of the cavity mirror through the display unit to adjust until the light spot shape and brightness uniformity Brightness uniformity meets the set requirements.

所述实时监测电机运行状态包括以下步骤:The real-time monitoring of motor running state includes the following steps:

电机驱动数字I/O模块的行程限制单元通过访问电机控制模块内电机控制卡的计数器得到电机输出端连接的推拉杆运动距离,并判断该距离是否达到设定阈值;The stroke limiting unit of the motor-driven digital I/O module obtains the movement distance of the push-pull rod connected to the output end of the motor by accessing the counter of the motor control card in the motor control module, and judges whether the distance reaches the set threshold;

如达到则向主控模块发送信号,主控模块发出指令使电机停止运行,并通过显示单元报警;若未达到,则监测电机控制模块内电机驱动器输出信号;若电机驱动器工作异常,则向主控模块发送信号,主控模块发出指令控制电机停止运行;否则执行步骤3)。If it is reached, it will send a signal to the main control module, and the main control module will issue an instruction to stop the motor and give an alarm through the display unit; if it is not reached, it will monitor the output signal of the motor driver in the motor control module; The control module sends a signal, and the main control module sends an instruction to control the motor to stop running; otherwise, go to step 3).

所述所述腔镜为凸镜或凹镜;凸镜用于控制光斑形状,凹镜用于控制亮度均匀度。The cavity mirror is a convex mirror or a concave mirror; the convex mirror is used to control the shape of the light spot, and the concave mirror is used to control the brightness uniformity.

本发明与现有技术相比的优点:Advantage of the present invention compared with prior art:

1.本发明将现有的控制系统将氧碘化学激光器光学谐振腔的腔镜调节与光腔参数的监测控制两种功能集成化,并可以实现对光学谐振腔的本地及远距离实时操作。1. The present invention integrates the two functions of cavity mirror adjustment and optical cavity parameter monitoring and control of the optical cavity of the oxygen-iodine chemical laser optical cavity in the existing control system, and can realize local and long-distance real-time operation of the optical cavity.

2.本发明通过安装于触屏式上位机的操作软件简化了操作过程。2. The present invention simplifies the operation process through the operation software installed on the touch screen upper computer.

3.系统稳定性高、开发成本低。通过试验验证了该套系统的有效性。3. High system stability and low development cost. The effectiveness of the system is verified by experiments.

附图说明Description of drawings

图1为本发明的系统组成框图;Fig. 1 is a system composition block diagram of the present invention;

图2为本发明的核心算法模块流程图;Fig. 2 is the core algorithm module flowchart of the present invention;

图3为本发明的数据采集模块原理图;Fig. 3 is a schematic diagram of the data acquisition module of the present invention;

图4为腔镜驱动机构正视示意图;Fig. 4 is a schematic diagram of the front view of the driving mechanism of the cavity mirror;

图5为腔镜驱动机构侧视示意图;Fig. 5 is a schematic side view of the drive mechanism of the cavity mirror;

图6为本发明的电机控制模块原理图;Fig. 6 is a schematic diagram of the motor control module of the present invention;

具体实施方式Detailed ways

下面结合附图及实施例对本发明做进一步的详细说明。The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

本发明利用Motorola PowerPC750GX处理器构成主控模块,通过主控模块控制其它功能模块,设计制作氧碘化学激光器光学谐振腔调节与监控系统,系统设有触屏式上位机,内置操作软件,便于使用者操作。The invention utilizes the Motorola PowerPC750GX processor to form the main control module, controls other functional modules through the main control module, and designs and manufactures an oxygen-iodine chemical laser optical resonator adjustment and monitoring system. The system is equipped with a touch-screen upper computer and built-in operating software, which is easy to use or operate.

如图1所示,本发明主要包括:主控模块、算法模块、数据采集模块、电机控制模块、数字I/O模块、电机驱动数字I/O模块、显示单元、通讯模块与电源模块。As shown in Figure 1, the present invention mainly includes: a main control module, an algorithm module, a data acquisition module, a motor control module, a digital I/O module, a motor-driven digital I/O module, a display unit, a communication module and a power supply module.

主控模块分别与算法模块、数字I/O模块、通讯模块连接。算法模块与数据采集模块、电机控制模块连接、电机驱动数字I/O模块连接。电源模块分别与主控模块、通用I/O模块、数据采集模块、电机控制模块连接。数字I/O模块通过I/O接口与电磁阀连接,实现对光学谐振腔抽真空与放大气的控制。数据采集模块通过模拟信号接口与监测光学谐振腔参数的压力传感器连接。电机控制模块与步进电机连接,通过传动机构实现对光学谐振腔腔镜镜架的调节。电机驱动数字I/O模块通过I/O接口与电机控制模块连接,实现对步进电机运行状态的监控。The main control module is respectively connected with the algorithm module, the digital I/O module and the communication module. The algorithm module is connected with the data acquisition module, the motor control module, and the motor drive digital I/O module. The power supply module is respectively connected with the main control module, the general I/O module, the data acquisition module and the motor control module. The digital I/O module is connected to the solenoid valve through the I/O interface to realize the control of vacuuming and amplifying the optical resonant cavity. The data acquisition module is connected with the pressure sensor monitoring the parameters of the optical resonant cavity through an analog signal interface. The motor control module is connected with the stepping motor, and realizes the adjustment of the optical resonant cavity mirror frame through the transmission mechanism. The motor drive digital I/O module is connected with the motor control module through the I/O interface to monitor the running status of the stepper motor.

主控模块由Motorola PowerPC750GX处理器、同步动态随机存储器SDRAM、快擦写存储器Flash ROM及时钟电路组成,同步动态随机存储器用作存储数据,快擦写存储器用作存储启动程序,主控模块用于完成综合控制、逻辑控制、通讯功能。The main control module is composed of Motorola PowerPC750GX processor, synchronous dynamic random access memory SDRAM, flash memory Flash ROM and clock circuit. The synchronous dynamic random access memory is used to store data, and the flash memory is used to store startup programs. The main control module is used Complete integrated control, logic control, communication functions.

如图3所示,数据采集模块由A/D转换器、可编程计时器、高速光电隔离芯片及差分电路构成,可编程计时器用于A/D转换器的逻辑时序控制,压力传感器输出的模拟信号经高速光电隔离芯片隔离后,通过差分电路对模拟信号进行差分,经A/D转换器采集后送入主控模块。As shown in Figure 3, the data acquisition module is composed of an A/D converter, a programmable timer, a high-speed photoelectric isolation chip and a differential circuit. The programmable timer is used for the logic timing control of the A/D converter and the analog output of the pressure sensor After the signal is isolated by the high-speed photoelectric isolation chip, the analog signal is differentiated through the differential circuit, and then sent to the main control module after being collected by the A/D converter.

A/D转换器为分辨率16位、四通道同时转换、并行数据输出。The A/D converter has a resolution of 16 bits, simultaneous conversion of four channels, and parallel data output.

如图4所示,腔镜驱动机构的结构如下:镜架由边框、X方向调节框及Y方向调节框组成,腔镜(凹镜或凸镜)嵌于Y方向调节框内部。在X方向调节框下部垂直镜面(即X、Y方向调节框构成的平面)方向设有第一推拉杆,在Y方向调节框上部垂直镜面方向设有第二推拉杆,第一推拉杆和第二推拉杆分别与第一步进电机和第二步进电机传动连接,步进电机驱动推拉杆在垂直于镜体反射面的方向往复移动。As shown in Figure 4, the structure of the cavity mirror drive mechanism is as follows: the frame is composed of a frame, an X-direction adjustment frame and a Y-direction adjustment frame, and the cavity mirror (concave mirror or convex mirror) is embedded in the Y-direction adjustment frame. There is a first push-pull rod in the direction vertical to the mirror surface (that is, the plane formed by the X and Y direction adjustment frames) on the lower part of the X-direction adjustment frame, and a second push-pull rod in the direction vertical to the mirror surface on the upper part of the Y-direction adjustment frame. The first push-pull rod and the second push-pull rod The two push-pull rods are connected to the first stepping motor and the second stepping motor respectively, and the stepping motors drive the push-pull rods to reciprocate in a direction perpendicular to the reflective surface of the mirror body.

如图5所示,电机控制模块由4轴步进电机控制卡、步进电机驱动器和接口电路构成,4轴步进电机控制卡接收核心算法模块的指令,送给步进电机驱动器一定频率和个数的脉冲,步进电机驱动器接收脉冲信息和方向信号并作用到步进电机,步进电机通过传动机构实现腔镜镜架的调节。As shown in Figure 5, the motor control module is composed of a 4-axis stepping motor control card, a stepping motor driver and an interface circuit. The 4-axis stepping motor control card receives instructions from the core algorithm module and sends them to the stepping motor driver with a certain frequency and The stepper motor driver receives the pulse information and direction signal and acts on the stepper motor, and the stepper motor realizes the adjustment of the cavity mirror frame through the transmission mechanism.

如图6所示,4轴电机控制卡选取PCI-1240U型,步进电机驱动器选取NDC-06型。As shown in Figure 6, the 4-axis motor control card is selected as PCI-1240U type, and the stepper motor driver is selected as NDC-06 type.

数字I/O模块由I/O扩展单元、继电器单元及接口电路构成,I/O扩展单元由74HC595和TLP521-4芯片组成,实现控制系统的I/O扩展,继电器单元与扩展电路连接,通过接口电路实现对电磁阀的开关控制,从而实现对光腔放大气及抽真空的控制。The digital I/O module is composed of I/O expansion unit, relay unit and interface circuit. The I/O expansion unit is composed of 74HC595 and TLP521-4 chips to realize the I/O expansion of the control system. The relay unit is connected with the expansion circuit. The interface circuit realizes the on-off control of the solenoid valve, thereby realizing the control of amplifying gas and vacuuming the optical cavity.

继电器单元选取PCLD-785型。The relay unit selects PCLD-785 type.

电机驱动数字I/O模块,由行程限制单元和驱动监测单元构成,I/O优先级最高,行程限制单元通过访问步进电机控制卡的计数器,判断步进电机运动距离,当达到设定阈值时,向系统发送信号,主控模块发出指令使步进电机停止运行,驱动监测单元用于监测步进电机驱动器输出信号,当步进电机驱动器工作异常时,向系统发送信号,主控模块发出指令使步进电机停止运行。The motor-driven digital I/O module is composed of a stroke limiting unit and a drive monitoring unit. The I/O priority is the highest. The stroke limiting unit judges the moving distance of the stepping motor by accessing the counter of the stepping motor control card. When it reaches the set threshold When the stepper motor driver is working abnormally, it sends a signal to the system, and the main control module sends a signal to the system, and the main control module sends command to stop the stepper motor.

通讯模块包括RS232单元和CAN单元,使用者可以采用这二种中任何一种通讯方式使上位机与控制系统建立联系,通讯模块使主控模块与上位机进行数据交换。根据交换的信息可在触屏式上位机的人机界面上进行参数设置,图像显示,可以显示压力传感器感应到的压力值曲线以及光斑形状。光斑形状通过与显示单元连接的摄像头拍摄,摄像头位于光学谐振腔内部,对出光位置进行拍摄,拍出的光斑用于光学谐振腔腔镜的调节。The communication module includes RS232 unit and CAN unit. Users can use any of these two communication methods to establish contact between the upper computer and the control system. The communication module enables the main control module to exchange data with the upper computer. According to the exchanged information, the parameters can be set on the man-machine interface of the touch-screen upper computer, and the image display can display the pressure value curve and the shape of the light spot sensed by the pressure sensor. The shape of the light spot is photographed by a camera connected to the display unit. The camera is located inside the optical resonant cavity to photograph the light emitting position, and the captured light spot is used to adjust the mirror of the optical resonant cavity.

电源模块为主控模块、通用I/O模块、数据采集模块和电机控制模块提供+12V,+24V系统电源。The power module provides +12V, +24V system power for the main control module, general I/O module, data acquisition module and motor control module.

显示单元为触屏式上位机,其上装有人机界面,用于实现光学谐振腔内压力显示与调节(选择电磁阀的开闭),以及光学谐振腔腔镜调节(输入凹镜和凸镜的角度调节)。The display unit is a touch-screen upper computer, which is equipped with a man-machine interface, which is used to realize the display and adjustment of the pressure in the optical resonant cavity (select the opening and closing of the solenoid valve), and the adjustment of the optical resonant cavity mirror (input the concave mirror and the convex mirror. angle adjustment).

如图2所示,算法模块由一块Motorola PowerPC750GX处理器构成,主要用于对数据采集模块和电机驱动数字I/O模块传送的数据进行采集和运算。其功能主要由压力监控算法和腔镜调节算法构成。As shown in Figure 2, the algorithm module is composed of a Motorola PowerPC750GX processor, which is mainly used to collect and calculate the data transmitted by the data acquisition module and the motor-driven digital I/O module. Its functions are mainly composed of pressure monitoring algorithm and cavity mirror adjustment algorithm.

压力监控算法:实时采集压力传感器的腔内压力变送信号,由低通滤波算法进行数字滤波以滤除市电干扰后送至显示单元实时显示。随后判断采集数据是否超出光腔内压力允许范围。若在允许范围内,继续进行下一算法循环;若超出范围,则报警并进入压力控制算法。按下程序开始按钮启动压力控制算法。由显示的腔内压力值选择电磁阀的开关,进而控制腔内压力变化,再继续进入下一个算法循环。Pressure monitoring algorithm: real-time acquisition of the intracavity pressure transmission signal of the pressure sensor, digital filtering is performed by a low-pass filtering algorithm to filter out mains interference, and then sent to the display unit for real-time display. Then it is judged whether the collected data exceeds the allowable range of the pressure in the optical cavity. If it is within the allowable range, continue to the next algorithm cycle; if it exceeds the range, it will alarm and enter the pressure control algorithm. Press the program start button to start the pressure control algorithm. Select the switch of the electromagnetic valve according to the displayed pressure value in the cavity, and then control the change of the pressure in the cavity, and then continue to enter the next algorithm cycle.

腔镜调节算法:按下程序开始按钮启动腔镜调节算法,进入电机初始化步骤。判断电机运行按钮是否按下,若是,则发送相应的方向和脉冲信号。行程限制单元通过访问步进电机控制卡的计数器,判断步进电机运动距离,当达到设定阈值时,向系统发送信号,主控模块发出指令使步进电机停止运行,并报警指示;若未达到设定阈值,则进入驱动监测单元监测步进电机驱动器输出信号。若步进电机驱动器工作异常时,向系统发送信号,主控模块发出指令使步进电机停止运行;否则进入电机控制算法。Mirror adjustment algorithm: Press the program start button to start the mirror adjustment algorithm and enter the motor initialization step. Determine whether the motor running button is pressed, and if so, send the corresponding direction and pulse signal. The stroke limiting unit judges the moving distance of the stepping motor by accessing the counter of the stepping motor control card. When it reaches the set threshold, it sends a signal to the system, and the main control module issues an instruction to stop the stepping motor and give an alarm indication; When the set threshold is reached, it enters the drive monitoring unit to monitor the output signal of the stepper motor driver. If the stepper motor driver works abnormally, it will send a signal to the system, and the main control module will issue an instruction to stop the stepper motor; otherwise, it will enter the motor control algorithm.

电机控制算法根据光学谐振腔输出光斑形状和亮度均匀性,分别控制凸镜与凹镜后X方向和Y方向的步进电机进行调节:通过摄像头采集图像并显示在显示单元上,再根据显示的光斑形状和亮度均匀性在显示单元上输入腔镜X方向和Y方向的转动角度,算法模块根据该命令通过电机控制模块控制相应电机运动。凸镜控制光斑形状、凹镜控制亮度均匀性。每个腔镜后的两个步进电机分别控制腔镜X方向和Y方向的转动,直至光斑形状正常、亮度均匀,即光斑形状完整,边缘清晰(边缘线闭合且完整),亮度无梯度变化。The motor control algorithm controls the stepping motors in the X direction and Y direction behind the convex mirror and the concave mirror respectively according to the output spot shape and brightness uniformity of the optical resonator to adjust: the image is collected by the camera and displayed on the display unit, and then according to the displayed The shape of the light spot and the uniformity of brightness are input on the display unit to rotate the X-direction and Y-direction of the cavity mirror, and the algorithm module controls the corresponding motor movement through the motor control module according to the order. The convex mirror controls the spot shape, and the concave mirror controls the brightness uniformity. Two stepping motors behind each cavity mirror control the rotation of the cavity mirror in the X direction and Y direction respectively until the spot shape is normal and the brightness is uniform, that is, the spot shape is complete, the edge is clear (the edge line is closed and complete), and the brightness has no gradient change .

Claims (7)

1.氧碘化学激光器光学谐振腔调节与监控系统,包括:主控模块、算法模块、数据采集模块、电机控制模块、数字I/O模块、电机驱动数字I/O模块、通讯模块、显示单元和电源模块;1. Oxygen iodine chemical laser optical resonator adjustment and monitoring system, including: main control module, algorithm module, data acquisition module, motor control module, digital I/O module, motor drive digital I/O module, communication module, display unit and power modules; 所述主控模块分别与算法模块、数字I/O模块、通讯模块连接,算法模块与数据采集模块、电机控制模块连接、电机驱动数字I/O模块连接,电源模块分别与主控模块、通用I/O模块、数据采集模块、电机控制模块连接;所述通讯模块与显示单元连接;The main control module is connected with the algorithm module, the digital I/O module and the communication module respectively, the algorithm module is connected with the data acquisition module, the motor control module, and the motor-driven digital I/O module, and the power supply module is connected with the main control module and the general purpose module respectively. The I/O module, the data acquisition module and the motor control module are connected; the communication module is connected with the display unit; 主控模块用于将通过显示单元接收的控制命令发送给数字I/O模块,并将数字I/O模块反馈的电磁阀状态、数据采集模块采集的压力传感器信息和电机驱动数字I/O模块反馈的电机运行状态信息通过显示单元进行实时显示;The main control module is used to send the control command received through the display unit to the digital I/O module, and the status of the solenoid valve fed back by the digital I/O module, the pressure sensor information collected by the data acquisition module and the motor drive digital I/O module The feedback motor running status information is displayed in real time through the display unit; 算法模块用于对数据采集模块采集的压力传感器信息和电机驱动数字I/O模块采集的电机运行状态信息进行运算并发出指令至数字IO模块和电机控制模块;The algorithm module is used to calculate the pressure sensor information collected by the data acquisition module and the motor running status information collected by the motor drive digital I/O module, and send instructions to the digital IO module and the motor control module; 数字I/O模块用于与电磁阀连接并根据算法模块经主控模块发来的指令控制电磁阀的开闭;The digital I/O module is used to connect with the solenoid valve and control the opening and closing of the solenoid valve according to the instructions sent by the algorithm module through the main control module; 数据采集模块用于采集腔内压力传感器数据;The data acquisition module is used to collect the data of the intracavity pressure sensor; 电机驱动数字I/O模块与电机控制模块连接,用于通过访问电机控制模块得到电机运行状态信息并反馈至算法模块。The motor drive digital I/O module is connected to the motor control module, and is used to obtain motor running status information by accessing the motor control module and feed it back to the algorithm module. 2.根据权利要求1所述的氧碘化学激光器光学谐振腔调节与监控系统,其特征在于还包括腔镜驱动机构,由镜架和推拉杆构成;所述镜架包括中空结构的边框、环状的X方向调节框及Y方向调节框,腔镜嵌于Y方向调节框内部,X方向调节框通过第一转轴设置于Y方向调节框内,Y方向调节框通过第二转轴设置于边框内;在X方向调节框上垂直镜面方向设有第一推拉杆,在Y方向调节框上垂直镜面方向设有第二推拉杆,第一推拉杆和第二推拉杆分别与第一电机和第二电机传动连接,第一、第二电机分别驱动第一、第二推拉杆在垂直于镜体反射面的方向往复移动。2. The oxygen-iodine chemical laser optical resonator adjustment and monitoring system according to claim 1 is characterized in that it also includes a cavity mirror drive mechanism, which is made of a mirror frame and a push-pull rod; the mirror frame includes a hollow frame, a ring Shaped X-direction adjustment frame and Y-direction adjustment frame, the cavity mirror is embedded inside the Y-direction adjustment frame, the X-direction adjustment frame is set in the Y-direction adjustment frame through the first rotation axis, and the Y-direction adjustment frame is set in the frame through the second rotation axis ; A first push-pull rod is provided on the X-direction adjustment frame in the vertical mirror direction, and a second push-pull rod is provided on the Y-direction adjustment frame in the vertical mirror direction, and the first push-pull rod and the second push-pull rod are respectively connected with the first motor and the second The motors are connected by transmission, and the first and second motors respectively drive the first and second push-pull rods to reciprocate in a direction perpendicular to the reflecting surface of the mirror body. 3.根据权利要求2所述的氧碘化学激光器光学谐振腔调节与监控系统,其特征在于所述第一转轴与第二转轴垂直且位于同一平面。3. The optical cavity adjustment and monitoring system for oxygen-iodine chemical laser according to claim 2, characterized in that the first rotation axis and the second rotation axis are vertical and located on the same plane. 4.根据权利要求2所述的氧碘化学激光器光学谐振腔调节与监控系统,其特征在于所述腔镜为凸镜或凹镜。4. The oxygen-iodine chemical laser optical cavity adjustment and monitoring system according to claim 2, characterized in that the cavity mirror is a convex mirror or a concave mirror. 5.根据权利要求1所述的一种氧碘化学激光器光学谐振腔调节与监控方法,其特征在于包括以下步骤:5. a kind of oxygen-iodine chemical laser optical cavity adjustment and monitoring method according to claim 1, is characterized in that comprising the following steps: 1)主控模块接收数据采集模块实时采集的压力传感器感应的腔内压力数据,经低通滤波后通过通讯模块送至显示单元实时显示;1) The main control module receives the intracavity pressure data sensed by the pressure sensor collected by the data acquisition module in real time, and sends it to the display unit for real-time display through the communication module after low-pass filtering; 2)主控模块判断腔内压力数据是否超出光腔内压力允许范围;若未超出,执行步骤3);若超出,则通过显示单元报警,根据显示的腔内压力值通过显示单元选择电磁阀的开关,再执行步骤3);2) The main control module judges whether the pressure data in the cavity exceeds the allowable range of the pressure in the optical cavity; if it does not exceed, perform step 3); if it exceeds, it will alarm through the display unit, and select the solenoid valve through the display unit according to the displayed pressure value in the cavity switch, and then perform step 3); 3)算法模块实时监测电机运行状态;根据光学谐振腔输出的光斑形状和亮度均匀度,通过显示单元输入指令给电机控制模块控制腔镜的X方向和Y方向的电机进行调节,直至光斑形状和亮度均匀度达到设定要求。3) The algorithm module monitors the running state of the motor in real time; according to the light spot shape and brightness uniformity output by the optical resonant cavity, input instructions to the motor control module to control the motors in the X direction and Y direction of the cavity mirror through the display unit to adjust until the light spot shape and brightness uniformity Brightness uniformity meets the set requirements. 6.根据权利要求5所述的氧碘化学激光器光学谐振腔调节与监控方法,其特征在于所述实时监测电机运行状态包括以下步骤:6. Oxygen iodine chemical laser optical resonator adjustment and monitoring method according to claim 5, is characterized in that described real-time monitoring motor running state comprises the following steps: 电机驱动数字I/O模块的行程限制单元通过访问电机控制模块内电机控制卡的计数器得到电机输出端连接的推拉杆运动距离,并判断该距离是否达到设定阈值;The stroke limiting unit of the motor-driven digital I/O module obtains the movement distance of the push-pull rod connected to the output end of the motor by accessing the counter of the motor control card in the motor control module, and judges whether the distance reaches the set threshold; 如达到则向主控模块发送信号,主控模块发出指令使电机停止运行,并通过显示单元报警;若未达到,则监测电机控制模块内电机驱动器输出信号;若电机驱动器工作异常,则向主控模块发送信号,主控模块发出指令控制电机停止运行;否则执行步骤3)。If it is reached, it will send a signal to the main control module, and the main control module will issue an instruction to stop the motor and give an alarm through the display unit; if it is not reached, it will monitor the output signal of the motor driver in the motor control module; The control module sends a signal, and the main control module sends an instruction to control the motor to stop running; otherwise, go to step 3). 7.根据权利要求5所述的氧碘化学激光器光学谐振腔调节与监控方法,其特征在于所述所述腔镜为凸镜或凹镜;凸镜用于控制光斑形状,凹镜用于控制亮度均匀度。7. The oxygen-iodine chemical laser optical cavity adjustment and monitoring method according to claim 5, characterized in that the cavity mirror is a convex mirror or a concave mirror; the convex mirror is used to control the spot shape, and the concave mirror is used to control Brightness uniformity.
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