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CN104977119B - A kind of single-piston damp type optical fiber differential pressure pickup - Google Patents

A kind of single-piston damp type optical fiber differential pressure pickup Download PDF

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CN104977119B
CN104977119B CN201510402343.5A CN201510402343A CN104977119B CN 104977119 B CN104977119 B CN 104977119B CN 201510402343 A CN201510402343 A CN 201510402343A CN 104977119 B CN104977119 B CN 104977119B
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piston
optical fiber
probe
housing
differential pressure
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CN104977119A (en
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胡浩
李海涛
钟丽琼
陈明强
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Dongxing Huahong Optical Technology Co ltd
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Guizhou University
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Abstract

本发明提供一种单活塞阻尼式光纤差压传感器,壳体内滑动设置有活塞,活塞的两端分别设置有弹簧,壳体的两端固定有端盖,弹簧的另一端分别固定于所对应的端盖上,端盖上的相对位置上分别开设有贯通所在端盖的探头插孔,探头插孔内密封设置有透光片,探头插孔内位于透光片的外侧设置有指向活塞的光纤探头,活塞两端与光纤探头相对的位置处分别固定有反光片,壳体两端的侧壁上开设有与壳体内腔连通的流体通孔,两个光纤探头中接收光纤的出射端分别与光敏元件相连,每个光敏元件对应连接有一个信号处理模块。以解决现有差压传感器在很多场合并不适用,实用性不强,测量精度不够,无法满足实际压差测量要求的问题。本发明属于压差检测领域。

The invention provides a single-piston damping optical fiber differential pressure sensor. A piston is slidably arranged in the casing, springs are respectively arranged at both ends of the piston, end caps are fixed at both ends of the casing, and the other ends of the spring are respectively fixed on the corresponding On the end cover, there are probe sockets penetrating through the end cover at the relative positions on the end cover. The probe socket is sealed with a light-transmitting sheet, and the probe socket is located on the outside of the light-transmitting sheet. An optical fiber pointing to the piston is provided. The probe, the two ends of the piston are respectively fixed with reflective sheets at the positions opposite to the optical fiber probe, the side walls at both ends of the housing are provided with fluid through holes communicating with the inner cavity of the housing, and the output ends of the receiving optical fibers in the two optical fiber probes are respectively connected to the photosensitive The components are connected, and each photosensitive component is correspondingly connected with a signal processing module. In order to solve the problems that the existing differential pressure sensor is not suitable for many occasions, has poor practicability, insufficient measurement accuracy, and cannot meet the requirements of actual differential pressure measurement. The invention belongs to the field of differential pressure detection.

Description

一种单活塞阻尼式光纤差压传感器A single-piston damping optical fiber differential pressure sensor

技术领域technical field

本发明涉及一种传感器,属于光纤传感技术领域。The invention relates to a sensor and belongs to the technical field of optical fiber sensing.

背景技术Background technique

差压传感器广泛应用于工业中,主要用于测量设备、部件或流体在不同位置的压力差,其广泛应用于尾气压差、气体流量、液位高低、洁净间监测等检测领域。现今,已出现采用不同原理的差压传感器,例如电阻式、电容式、电感式、节流器式、磁性液体式、MEMS式等,其中电阻式、电容式较为常见,其余类型由于实用性不强、局限性较大或仍处于概念期,并未得到推广,但电阻式、电容式差压传感器也存在自身的缺点,在很多场合不能很好的胜任。Differential pressure sensors are widely used in industry and are mainly used to measure the pressure difference of equipment, components or fluids at different positions. They are widely used in detection fields such as tail pressure difference, gas flow, liquid level, and clean room monitoring. Nowadays, differential pressure sensors using different principles have appeared, such as resistive, capacitive, inductive, throttle, magnetic liquid, MEMS, etc. Among them, resistive and capacitive are more common, and other types are not practical due to Strong, limited or still in the concept stage, and has not been promoted, but resistive and capacitive differential pressure sensors also have their own shortcomings, and cannot be well competent in many occasions.

发明内容Contents of the invention

本发明的目的在于:提供一种单活塞阻尼式光纤差压传感器,以解决现有差压传感器在很多场合并不适用,实用性不强,测量精度不够,无法满足实际压差测量要求的问题。The purpose of the present invention is to provide a single-piston damping optical fiber differential pressure sensor to solve the problems that the existing differential pressure sensor is not suitable for many occasions, its practicability is not strong, the measurement accuracy is not enough, and it cannot meet the actual pressure differential measurement requirements. .

本发明的方案如下:一种单活塞阻尼式光纤差压传感器,包括探头结构、光敏元件和信号处理模块,所述探头结构包括包括壳体,壳体为筒形结构,壳体内滑动设置有活塞,活塞的两端分别设置有一个弹簧,两个弹簧的一端均固定于活塞上,壳体的两端分别密封固定有端盖,两个弹簧的另一端分别固定于所对应的端盖上,两个端盖上的相对位置上分别开设有一个贯通所在端盖的探头插孔,两个探头插孔内分别密封设置有透光片,两个探头插孔内位于透光片的外侧分别设置有指向活塞的光纤探头,光纤探头均与活塞的端面相垂直,活塞两端与光纤探头相对的位置处分别固定有反光片,壳体两端的侧壁上或两个端盖上分别开设有一个与壳体内腔连通的流体通孔,两个光纤探头中接收光纤的出射端分别与一个光敏元件相连,每个光敏元件对应连接有一个信号处理模块。The solution of the present invention is as follows: a single-piston damping optical fiber differential pressure sensor includes a probe structure, a photosensitive element and a signal processing module. , the two ends of the piston are respectively provided with a spring, one end of the two springs is fixed on the piston, the two ends of the housing are respectively sealed and fixed with end caps, and the other ends of the two springs are respectively fixed on the corresponding end caps, The two end caps are respectively provided with a probe jack through the end cap at the opposite position, and the two probe jacks are respectively sealed with a light-transmitting sheet, and the two probe jacks are respectively arranged on the outside of the light-transmitting sheet. There is an optical fiber probe pointing to the piston, the optical fiber probes are perpendicular to the end face of the piston, reflectors are respectively fixed at the positions opposite to the optical fiber probe at both ends of the piston, and a The fluid through hole communicated with the inner cavity of the housing, and the outgoing ends of the receiving optical fibers in the two optical fiber probes are respectively connected to a photosensitive element, and each photosensitive element is correspondingly connected to a signal processing module.

优选地,光纤探头中的光纤束包括入射光纤和出射光纤,入射光纤与接收光纤在光纤探头内相互平行设置,入射光纤共一根,接收光纤是单根尺寸参数为50±3的多模光纤,接收光纤以入射光纤为中心依次紧密排布组成一圆形的光纤束结构,且入射光纤与接收光纤之间的边界距离为130-140Preferably, the optical fiber bundle in the fiber optic probe includes an incident optical fiber and an outgoing optical fiber, the incident optical fiber and the receiving optical fiber are arranged in parallel to each other in the fiber optic probe, there is one incident optical fiber, and the single receiving optical fiber has a size parameter of 50 ± 3 The receiving fiber is closely arranged to form a circular fiber bundle structure with the incident fiber as the center, and the boundary distance between the incident fiber and the receiving fiber is 130-140 ;

优选地,两个弹簧的结构及规格均相同,在流体通孔均与外部大气相连通的状态下,活塞位于壳体的正中央位置,两个弹簧均处于自然状态,即弹簧无拉伸与压缩形变;Preferably, the structures and specifications of the two springs are the same. When the fluid through holes are connected to the outside atmosphere, the piston is located in the center of the housing, and the two springs are in a natural state, that is, the springs have no tension and compression set;

优选地,两个探头插孔均开设在所在端盖的正中心位置,两个探头插孔、活塞三者同轴,自然状态下,其中一个光纤探头到该光纤探头所对应的反光片的距离与另一个光纤探头到另一个反光片的距离相同;Preferably, the two probe sockets are set at the exact center of the end cap, the two probe sockets and the piston are coaxial, and in the natural state, the distance between one of the optical fiber probes and the reflective sheet corresponding to the optical fiber probe is The distance from another fiber optic probe to another reflector is the same;

优选地,透光片为玻璃片,透光片均设置于探头插孔位于端盖内侧的端口处;Preferably, the light-transmitting sheet is a glass sheet, and the light-transmitting sheets are all arranged at the port where the probe socket is located on the inner side of the end cover;

优选地,探头插孔内设置有内螺纹,光纤探头分别旋紧固定于探头插孔内;Preferably, the probe socket is provided with an internal thread, and the fiber optic probes are respectively screwed and fixed in the probe socket;

优选地,端盖的中部设置有伸入壳体内的凸起部,凸起部与壳体内壁之间设置有密封圈,凸起部上沿壳体的长度方向开设有弹簧定位槽,弹簧定位槽为环形槽,且弹簧定位槽的内径小于等于弹簧内径,弹簧定位槽外径大于等于弹簧的外径,弹簧的一端伸在并固定于弹簧定位槽内;Preferably, the middle part of the end cover is provided with a protruding part extending into the housing, a sealing ring is provided between the protruding part and the inner wall of the housing, and a spring positioning groove is opened on the protruding part along the length direction of the housing, and the spring positioning The groove is an annular groove, and the inner diameter of the spring positioning groove is less than or equal to the inner diameter of the spring, the outer diameter of the spring positioning groove is greater than or equal to the outer diameter of the spring, and one end of the spring is extended and fixed in the spring positioning groove;

优选地,凸起部是与壳体内径相匹配的圆柱形结构;Preferably, the protrusion is a cylindrical structure matching the inner diameter of the housing;

优选地,两个流体通孔分别开设于壳体两端的侧壁上,每个流体通孔与位于该端的端盖上的凸起部相对应,凸起部上对应流体通孔的位置处开设有与弹簧定位槽相连通的通孔,流体依次通过流体通孔和通孔流入到壳体内部的腔室内;Preferably, two fluid through holes are respectively opened on the side walls at both ends of the housing, each fluid through hole corresponds to the raised portion on the end cover at the end, and the position of the raised portion corresponding to the fluid through hole is opened There is a through hole connected with the spring positioning groove, and the fluid flows into the chamber inside the housing through the fluid through hole and the through hole in turn;

优选地,活塞与壳体的内壁之间设置有密封圈,端盖与壳体的内壁之间也设置有密封圈;Preferably, a sealing ring is provided between the piston and the inner wall of the housing, and a sealing ring is also provided between the end cover and the inner wall of the housing;

优选地,活塞的材质为硬质合金;Preferably, the piston is made of hard alloy;

传感器的工作原理为:入射光纤另一端与光源对接,用以耦合入射光,接收光纤出射端与光敏元件连接,输出光强度信号,通过两个流体通孔分别通入两种待测流体,当左右两侧检测腔内的流体压力相等时,活塞处于中部平衡位置,活塞上的轴向合力为零,活塞不产生轴向位移;当活塞左右两侧检测腔内的流体存在压力差时,活塞失去平衡,向压力较低的一侧滑动,从而压缩该侧阻尼弹簧,另一侧阻尼弹簧被拉伸,活塞运动到一个新的轴向合力为零的平衡位置。活塞处于中部平衡位置时,传感器两侧相同结构的光纤束与活塞端面反光片之距离相等,从而两光纤束接收光纤的输出光信号强度相等,光敏元件把光信号转化为电信号,该信号经过信号处理模块放大、整流、滤波等处理环节,并配合相应的算法计算,可以得出两检测位置的流体压力差,经光电转换及信号处理计算后输出值为1;活塞向低压一侧滑动后,低压侧光纤束与活塞端面反光片距离减小,接收光纤的输出光信号强度减弱,而高压侧光纤束与活塞端面反光片距离增大,接收光纤的输出光信号强度增强,经光电转换及信号处理计算后输出值将成倍变化,从而提高了检测灵敏度。通过最终输出值大小的变化,即可判断出传感器两检测腔内流体之间的压力差大小,实现对不同位置压力差的检测。The working principle of the sensor is: the other end of the incident optical fiber is connected to the light source to couple the incident light, the output end of the receiving optical fiber is connected to the photosensitive element, and the output light intensity signal is passed into two fluids to be measured through the two fluid through holes respectively. When the fluid pressures in the detection chambers on the left and right sides are equal, the piston is in the middle equilibrium position, the axial resultant force on the piston is zero, and the piston does not produce axial displacement; when there is a pressure difference in the fluid in the detection chambers on the left and right sides of the piston, the piston Loss of balance, sliding to the side with lower pressure, thereby compressing the damping spring on this side, the damping spring on the other side is stretched, and the piston moves to a new equilibrium position where the resultant axial force is zero. When the piston is in the middle balance position, the optical fiber bundles with the same structure on both sides of the sensor and the reflective sheet on the piston end face are at the same distance, so that the output optical signal intensity of the two optical fiber bundles receiving the optical fiber is equal, and the photosensitive element converts the optical signal into an electrical signal. Signal processing module amplification, rectification, filtering and other processing links, and with the corresponding algorithm calculation, can get the fluid pressure difference between the two detection positions, the output value is 1 after photoelectric conversion and signal processing calculation; after the piston slides to the low pressure side , the distance between the optical fiber bundle on the low-voltage side and the reflective sheet on the end face of the piston decreases, and the output optical signal intensity of the receiving optical fiber weakens, while the distance between the optical fiber bundle on the high-voltage side and the reflective sheet on the end face of the piston increases, and the output optical signal intensity of the receiving optical fiber increases. After signal processing and calculation, the output value will change exponentially, thereby improving the detection sensitivity. Through the change of the final output value, the pressure difference between the fluids in the two detection chambers of the sensor can be judged, so as to realize the detection of the pressure difference at different positions.

一、该传感器强度补偿原理1. The sensor intensity compensation principle

参照图3,该方法中光源发出的光经过Y型耦合器等分为两路,一路进入探头侧,经反射后到达光电探测器,另一路进入探头侧,经反射后到达光电探测器。那么两光电探测器的输出信号分别为:Referring to Fig. 3, the light source in this method The emitted light is divided into two equal paths through the Y -type coupler, and one path enters the probe side, reaching the photodetector after reflection , the other way into the probe side, reaching the photodetector after reflection . Then the output signals of the two photodetectors are:

式中:为光源输出的光功率;为入射光纤的透过率;为接收光纤的透过率;为光探测器的灵敏度;为耦合比。In the formula: is the optical power output by the light source; is the transmittance of the incident fiber; is the transmittance of the receiving fiber; , is the sensitivity of the photodetector; is the coupling ratio.

相除可得: right , Divide to get:

根据上式可以得出,经过计算处理的输出信号消除了光源的功率波动与耦合器的误差。同时在设计中采用对称设计,亦可消除光纤损耗带来的误差。选用稳定的光电检测元件,从而避免光电检测元件引入的误差。According to the above formula, it can be concluded that the calculated and processed output signal eliminates the power fluctuation of the light source and the error of the coupler. At the same time, the symmetrical design is adopted in the design, which can also eliminate the error caused by the fiber loss. Select a stable photoelectric detection element to avoid errors introduced by the photoelectric detection element.

二、传感器数学模型2. Sensor Mathematical Model

2.1强度调制数学模型2.1 Mathematical model of intensity modulation

本发明的每一侧检测腔的检测原理均与反射式强度调制光纤传感器相同,如图4所示,光纤束中的出射光纤TF发出的光照射到反射片上,经过反射片反射后,再传送到光纤束中的接收光纤RF端面。只有当反射光锥端面与接收光纤端面存在重合面积时,反射光才能被接收光纤接收。在光纤束与反光片的距离d发生变化时,根据反射定理,随着d不断变大,光锥底端从小变大,从没有进入接收光纤端面,到逐渐进入接收光纤端面,再到完全覆盖,随着d进一步的增大,反射光和其覆盖面积不再变化,但强度仍因远离而不断变小。下面对这一过程进行定量分析:The detection principle of the detection cavity on each side of the present invention is the same as that of the reflective intensity modulation optical fiber sensor. As shown in Figure 4, the light emitted by the outgoing optical fiber TF in the optical fiber bundle is irradiated on the reflective sheet, and after being reflected by the reflective sheet, it is transmitted to the receiving fiber RF endface in the fiber bundle. The reflected light can be received by the receiving optical fiber only when there is an overlapping area between the end face of the reflected light cone and the end face of the receiving optical fiber. When the distance d between the optical fiber bundle and the reflective sheet changes, according to the reflection theorem, as d continues to increase, the bottom of the light cone becomes larger from small to large, from not entering the end face of the receiving fiber, to gradually entering the end face of the receiving fiber, and then to complete coverage , as d further increases, the reflected light and its coverage area will no longer change, but the intensity will continue to decrease due to distance. The quantitative analysis of this process is as follows:

设传感器的光强调制函数为M,是RF接收的光通量与TF发送的光通量之比,它反映出反射式强度调制光纤传感器的强度调制特性。在这里为了数学模型的简化,以及计算的方便,在不影响强度调制特性曲线分布规律的情况下,对光纤出射光场强度分布与反射后的光场强度分布进行忽略,不妨假设出射光强沿径向呈均匀分布,那么在反射光锥端面上的光照度即为:Let the light intensity modulation function of the sensor be M , which is the ratio of the luminous flux received by RF to the luminous flux sent by TF , which reflects the intensity modulation characteristics of the reflective intensity modulation fiber sensor. Here, for the simplification of the mathematical model and the convenience of calculation, without affecting the distribution of the intensity modulation characteristic curve, the intensity distribution of the optical fiber output light field and the intensity distribution of the reflected light field are ignored. It may be assumed that the output light intensity is along the The radial direction is evenly distributed, then the illuminance on the end surface of the reflected light cone is:

(1) (1)

式中为入射光的光功率损耗系数;为光源耦合到发射光纤中的光通量;R为反射光锥端面的半径。In the formula is the optical power loss coefficient of the incident light; is the luminous flux coupled from the light source to the emitting fiber; R is the radius of the end face of the reflected light cone.

又认为反射光锥端面的光照度均匀分布,那么接收光纤的输入光通量即为:It is also considered that the illuminance of the end surface of the reflected light cone is uniformly distributed, then the input luminous flux of the receiving optical fiber is:

(2) (2)

式中为接收光纤的损耗系数,S为反射光锥端面和接收光纤端重合面积。In the formula is the loss coefficient of the receiving fiber, and S is the overlapping area of the end face of the reflected light cone and the end of the receiving fiber.

则光强调制函数M为:Then the light intensity modulation function M is:

(3) (3)

因为光功率损耗系数对于已经确定的传感器系统而言为定值,那么M值的大小主要由SR 2 的比值确定。Because the optical power loss coefficient is a fixed value for the already determined sensor system, the value of M is mainly determined by the ratio of S and R2 .

(3)式中反射光锥端面半径R可由下式计算:(3) In the formula, the radius R of the end surface of the reflected light cone can be calculated by the following formula:

(4) (4)

式中:为发射光纤半径,NA为光纤的数值孔径,d为光纤探头与反光片之间的距离。In the formula: is the radius of the launching fiber, NA is the numerical aperture of the fiber, and d is the distance between the fiber probe and the reflective sheet.

(3)式中反射光锥端面和接收光纤端重合面积S可由下式计算:(3) In the formula, the overlapping area S of the reflected light cone end face and the receiving fiber end can be calculated by the following formula:

; (5) ; (5)

式中:L为发射光纤与接收光纤的中心距,为接收光纤半径,为光锥底端与接收光纤端面相交后形成的圆心角,In the formula: L is the center distance between the transmitting fiber and the receiving fiber, is the receiving fiber radius, , is the central angle formed by the intersection of the bottom end of the light cone and the end face of the receiving fiber, , .

为了使本发明设计的传感器具有良好的线性度与灵敏度,设计中使传感器初始状态工作于上述强调制函数M的前坡曲线段的中间位置附近,此时对应的反射光锥端面和接收光纤端重合面积S为(5)式中的第二式,那么本发明传感器单侧强度调制模型为:In order to make the sensor designed by the present invention have good linearity and sensitivity, the initial state of the sensor is designed to work near the middle position of the front slope curve section of the above-mentioned strong modulation function M. At this time, the corresponding reflected light cone end face and receiving fiber end The overlapping area S is the second formula in formula (5), then the unilateral intensity modulation model of the sensor of the present invention is:

) (6) ( ) (6)

2.2传感器数学模型2.2 Sensor Mathematical Model

下面分析传感器强度调制模型与压差之间的关系,已知两端流体的压强分别为,则传感器活塞两侧所受流体压力分别为:The following analyzes the relationship between the sensor intensity modulation model and the pressure difference. It is known that the pressures of the fluids at both ends are respectively , , then the fluid pressure on both sides of the sensor piston is:

; (7) ; (7)

式中:传感器活塞两侧的截面积相等,即In the formula: the cross-sectional area on both sides of the sensor piston is equal, namely ;

又对活塞两测进行受力分析有:The force analysis on the two measurements of the piston is as follows:

(8) (8)

式中:为弹簧初始形变量,为活塞位移量,为两侧弹簧刚度系数,又两侧弹簧相同,所以In the formula: is the initial deformation of the spring, is the piston displacement, , is the spring stiffness coefficient on both sides, and the springs on both sides are the same, so .

则(8)式可简化为: (9)Then formula (8) can be simplified as: (9)

联立(7)、(9)式有: (10)Simultaneously (7), (9) formula has: (10)

由于传感器尺寸与阻尼弹簧已经在设计阶段确定,所以上式(10)中为常数,那么活塞位移量与传感器两侧压力差成正比。Since the size of the sensor and the damping spring have been determined in the design stage, the above formula (10) and is a constant, then the piston displacement Proportional to the pressure difference across the sensor.

又设为传感器内两侧光纤束与反光片之间的初始距离;为传感器内弹簧发生变形后,两侧光纤束与反光片之间的距离,其中为高压侧、为低压侧。则有:Also set is the initial distance between the optical fiber bundles on both sides of the sensor and the reflector; , After the deformation of the inner spring of the sensor, the distance between the optical fiber bundles on both sides and the reflective sheet, where for the high voltage side, for the low pressure side. Then there are:

(11) ; (11)

联立(10)、(11)式有: (12)Simultaneously (10), (11) formula has: (12)

(13) (13)

把(12)、(13)式分别代入(6)式可得到传感器在两侧检测腔出现压力差时,两侧检测腔的强度调制函数。不难看出为关于的一元函数,因为中的其它参数在传感器设计阶段就已确定,所以均为常数。为了消除光源的强度波动对传感器带来的误差,传感器输出值为的比值,从而对传感器进行强度补偿。因此,传感器数学模型可表示为:Substituting equations (12) and (13) into equation (6), the intensity modulation function of the detection chambers on both sides of the sensor can be obtained when there is a pressure difference between the detection chambers on both sides , . it's easy to see , for about unary function of , because , The other parameters in are determined in the sensor design stage, so they are all constants. In order to eliminate the error caused by the intensity fluctuation of the light source to the sensor, the output value of the sensor is , The ratio of , so as to compensate the intensity of the sensor. Therefore, the sensor mathematical model can be expressed as:

(14) (14)

通过上述数学模型即可得到传感器两侧压力差与输出光信号大小的关系。Through the above mathematical model, the pressure difference on both sides of the sensor can be obtained The relationship with the size of the output optical signal.

三、结果与分析3. Results and Analysis

根据以上理论基础和公式,选取初始值从0mm变化到0.3mm,即是两端传输距离从0.866mm到1.166mm,从0.866mm到0.566mm时,传感器的输出结果。经过仿真实验,对应位移增加一侧(高压侧)光通量变化如图5所示:对应位移减小一侧(低压侧)光通量变化如图6所示;According to the above theoretical basis and formula, select the initial value , , , , Change from 0mm to 0.3mm, which is the transmission distance at both ends From 0.866mm to 1.166mm, From 0.866mm to 0.566mm, the output result of the sensor. After the simulation experiment, the change of luminous flux on the side corresponding to the increased displacement (high voltage side) is shown in Figure 5; the change of luminous flux on the side corresponding to the decreased displacement (low voltage side) is shown in Figure 6;

根据图5不难看出,高压侧的光通量随着活塞的远离而呈递增趋势,且具有较好的线性度。这是因为传感器初始状态工作于强调制函数M的前坡曲线段中间位置附近,即反射光锥端面与接收光纤端面处于相交状态,此时随着距离d的递增,耦合进入到接收光纤的光强度增大,所以高压侧光通量呈递增趋势,同时保持较好的线性度。According to Fig. 5, it is not difficult to see that the luminous flux on the high-voltage side increases with the distance from the piston, and has a good linearity. This is because the initial state of the sensor works near the middle position of the front slope curve section of the strong modulation function M , that is, the end face of the reflected light cone and the end face of the receiving fiber are in the intersecting state. At this time, as the distance d increases, the light coupled into the receiving fiber The intensity increases, so the luminous flux on the high-voltage side shows an increasing trend, while maintaining good linearity.

根据图6不难看出,低压侧的光通量随着活塞的远离而呈递减趋势,同样具有较好的线性度。与高压侧同理,此时随着距离d的减少,会使耦合进入到接收光纤的光强度减少,所以低压侧光通量呈递增趋势,同时保持较好的线性度。According to Figure 6, it is not difficult to see that the luminous flux on the low pressure side shows a decreasing trend as the piston moves away, and it also has a good linearity. The same as the high-voltage side, at this time, as the distance d decreases, the light intensity coupled into the receiving fiber will decrease, so the luminous flux on the low-voltage side shows an increasing trend while maintaining good linearity.

光通量比随位移变化曲线如图7所示,不难看出,通过比值形式的输出结果从恒值1开始逐渐增大。输出值为1时即为传感器无压力差,活塞处于中间平衡位置无滑动,两侧输出光强度相等。而当传感器内存在流体压力差时,平衡被打破,一侧输出光强度升高,另一侧降低,其输出值快速成倍增加。所以,通过比值处理以后,传感器的输出值得到了大幅度的放大,从而有效的提高了传感器的灵敏度;同时,传感器输出值仍然保持着很好的线性度。The change curve of luminous flux ratio with displacement is shown in Figure 7. It is not difficult to see that the output result in the form of ratio increases gradually from a constant value of 1. When the output value is 1, it means that the sensor has no pressure difference, the piston is in the middle balance position without sliding, and the output light intensity on both sides is equal. When there is a fluid pressure difference in the sensor, the balance is broken, the output light intensity on one side increases, and the other side decreases, and its output value rapidly increases exponentially. Therefore, after the ratio processing, the output value of the sensor is greatly amplified, thereby effectively improving the sensitivity of the sensor; at the same time, the output value of the sensor still maintains a good linearity.

本发明与现有技术相比,主要优点如下:经过结构设计、理论研究与实验分析可知,该传感器具有较小的结构、较高的精确度与可靠性、较好的适应性与互换性等优点,实用性极强,输出信号经光电转换及信号处理计算后输出值将成倍变化,从而提高了检测灵敏度,该传感器能适用于多个压差检测场合。Compared with the prior art, the present invention has the following main advantages: through structural design, theoretical research and experimental analysis, it can be seen that the sensor has a smaller structure, higher accuracy and reliability, better adaptability and interchangeability And other advantages, strong practicability, the output signal will be multiplied after the output signal is calculated by photoelectric conversion and signal processing, thereby improving the detection sensitivity, the sensor can be applied to multiple pressure difference detection occasions.

同时,该差压传感器采用活塞式结构作为压力探测器件,在遇到流体压力时,活塞是平移运动,仅需根据活塞的平移量即可计算出流体压力差,对于光纤传感的要求更低,计算和测量更为简单,且活塞结构更加稳定,不易受外界干扰,不易损坏,使用寿命更为长久,使得传感器的可靠性、适应性及互换性都有了较大进步,适宜用作流体差压的测量;传感器的强度补偿原理更为简单,实用性更强。At the same time, the differential pressure sensor adopts a piston structure as a pressure detection device. When encountering fluid pressure, the piston moves in translation, and the fluid pressure difference can be calculated only according to the translation amount of the piston, which has lower requirements for optical fiber sensing. , the calculation and measurement are simpler, and the piston structure is more stable, less susceptible to external interference, less prone to damage, and longer service life, which greatly improves the reliability, adaptability and interchangeability of the sensor, and is suitable for use as The measurement of fluid differential pressure; the sensor's strength compensation principle is simpler and more practical.

附图说明Description of drawings

图1是本发明的结构示意图;Fig. 1 is a structural representation of the present invention;

图2是本发明中探头结构的剖面结构示意图,其中,101表示光源,102表示待测流体;Fig. 2 is the cross-sectional schematic diagram of probe structure in the present invention, and wherein, 101 represents light source, 102 represents to-be-measured fluid;

图3为传感器强度补偿方法原理图;Fig. 3 is a schematic diagram of the sensor intensity compensation method;

图4是反射光锥与接收光纤位置关系图;Fig. 4 is a positional relationship diagram between the reflected light cone and the receiving optical fiber;

其中:103是指反射面,104是指出射光斑,105是指反射光锥端面,106是指接收光纤端面,107是指反射光锥端面与RF相切,108是指反射光锥端面与RF相容,109是指反射光锥端面与RF相交;Among them: 103 refers to the reflective surface, 104 refers to the emission spot, 105 refers to the end face of the reflected light cone, 106 refers to the end face of the receiving fiber, 107 refers to the tangent between the end face of the reflected light cone and RF, 108 refers to the end face of the reflected light cone and RF Compatibility, 109 means that the end face of the reflected light cone intersects with RF;

图5是高压侧光通量变化曲线图;Fig. 5 is a curve diagram of luminous flux change on the high voltage side;

图6是低压侧光通量变化曲线图;Fig. 6 is a curve diagram of luminous flux variation on the low-voltage side;

图7是光通量比随位移变化曲线。Fig. 7 is a curve of luminous flux ratio changing with displacement.

具体实施方式detailed description

为使本发明的目的、技术方案和优点更加清楚,下面将参照附图对本发明作进一步地详细描述,In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below with reference to the accompanying drawings,

实施例:Example:

参照图1和图2,本实施例提供一种单活塞阻尼式光纤差压传感器,包括探头结构1、光敏元件2和信号处理模块3,Referring to Figures 1 and 2, this embodiment provides a single-piston damping optical fiber differential pressure sensor, including a probe structure 1, a photosensitive element 2 and a signal processing module 3,

探头结构1包括壳体11,壳体11为筒形结构,壳体11内滑动设置有活塞12,活塞12的材质为硬质合金,活塞12与壳体11的内壁之间设置有密封圈18,活塞12的两端分别设置有一个弹簧14,两个弹簧14的一端均固定于活塞12上,且活塞12与两个弹簧14同轴,壳体11的两端分别密封固定有端盖13,两个弹簧14的另一端分别固定于所对应的端盖13上,两个弹簧14的结构及规格均相同,在流体通孔17均与外部大气相连通的状态下,活塞12位于壳体11的正中央位置,两个弹簧14均处于自然状态,即弹簧14无拉伸与压缩形变,两个端盖13上的相对位置上分别开设有一个贯通所在端盖13的探头插孔131,两个探头插孔131内位于端盖13内侧的端口处分别密封设置有透光片15,透光片15采用透明的玻璃片,两个探头插孔131内位于透光片15的外侧分别设置有指向活塞12的光纤探头19,光纤探头19均与活塞12的端面相垂直,探头插孔131内设置有内螺纹,光纤探头19分别旋紧固定于探头插孔131内,活塞12两端与光纤探头19相对的位置处分别固定有反光片16,两个探头插孔131均开设在所在端盖13的正中心位置,两个探头插孔131、活塞12三者同轴,其中一个光纤探头19到该光纤探头19所对应的反光片16的距离与另一个光纤探头19到另一个反光片16的距离相同;The probe structure 1 includes a housing 11, the housing 11 is a cylindrical structure, a piston 12 is slidingly arranged in the housing 11, the material of the piston 12 is hard alloy, and a sealing ring 18 is arranged between the piston 12 and the inner wall of the housing 11 , the two ends of the piston 12 are respectively provided with a spring 14, one end of the two springs 14 is fixed on the piston 12, and the piston 12 is coaxial with the two springs 14, and the two ends of the housing 11 are respectively sealed and fixed with end caps 13 , the other ends of the two springs 14 are respectively fixed on the corresponding end caps 13. The structures and specifications of the two springs 14 are the same. When the fluid through holes 17 are connected to the external atmosphere, the piston 12 is located in the housing 11, the two springs 14 are in a natural state, that is, the springs 14 have no stretching and compression deformation, and the opposite positions of the two end caps 13 are respectively provided with a probe jack 131 through the end caps 13 where they are located. The ports inside the two probe jacks 131 located inside the end cap 13 are respectively sealed with light-transmitting sheets 15, the light-transmitting sheets 15 are made of transparent glass sheets, and the two probe jacks 131 are respectively arranged on the outside of the light-transmitting sheets 15 There is an optical fiber probe 19 pointing to the piston 12, the optical fiber probe 19 is perpendicular to the end face of the piston 12, an internal thread is arranged in the probe jack 131, the optical fiber probe 19 is screwed and fixed in the probe jack 131 respectively, and the two ends of the piston 12 are connected to the probe jack 131. Reflectors 16 are respectively fixed at the relative positions of the fiber optic probes 19, and the two probe jacks 131 are set at the very center of the end cap 13 where they are located. The two probe jacks 131 and the piston 12 are coaxial, and one of the fiber optic probes 19 to the distance of the optical fiber probe 19 corresponding to the reflective sheet 16 and another optical fiber probe 19 to the same distance to another reflective sheet 16;

光纤探头19中的光纤束包括入射光纤191和出射光纤192,入射光纤191与接收光纤192在光纤探头19内相互平行设置,入射光纤191共一根,接收光纤192是单根尺寸参数为50±3的多模光纤,接收光纤192以入射光纤191为中心依次紧密排布组成一圆形的光纤束结构,且入射光纤191与接收光纤192之间的边界距离为130-140,两个光纤探头19中接收光纤192的出射端分别与一个光敏元件2相连,每个光敏元件2对应连接有一个信号处理模块3;The fiber optic bundle in the fiber optic probe 19 includes an incident optical fiber 191 and an outgoing optical fiber 192. The incident optical fiber 191 and the receiving optical fiber 192 are arranged parallel to each other in the optical fiber probe 19. There is one incident optical fiber 191, and the receiving optical fiber 192 is a single size parameter of 50 ± 3 The receiving optical fiber 192 is closely arranged to form a circular fiber bundle structure with the incident optical fiber 191 as the center, and the boundary distance between the incident optical fiber 191 and the receiving optical fiber 192 is 130-140 , the outgoing ends of the receiving optical fibers 192 in the two optical fiber probes 19 are respectively connected to a photosensitive element 2, and each photosensitive element 2 is correspondingly connected to a signal processing module 3;

端盖13的中部设置有伸入壳体11内的凸起部,凸起部是与壳体11内径相匹配的圆柱形结构,凸起部与壳体11内壁之间设置有密封圈18,凸起部上沿壳体11的长度方向开设有弹簧定位槽132,弹簧定位槽132为环形槽,且弹簧定位槽132的内径小于等于弹簧14内径,弹簧定位槽132外径大于等于弹簧14的外径,弹簧14的一端伸在并固定于弹簧定位槽132内,壳体11两端的侧壁上分别开设有一个与壳体11内腔连通的流体通孔17,每个流体通孔17与位于该端的端盖13上的凸起部相对应,凸起部上对应流体通孔17的位置处开设有与弹簧定位槽132相连通的通孔133,流体依次通过流体通孔17和通孔133流入到壳体11内部的腔室内。The middle part of the end cover 13 is provided with a protruding part extending into the housing 11, the protruding part is a cylindrical structure matching the inner diameter of the housing 11, and a sealing ring 18 is arranged between the protruding part and the inner wall of the housing 11. The protrusion is provided with a spring positioning groove 132 along the length direction of the housing 11. The spring positioning groove 132 is an annular groove, and the inner diameter of the spring positioning groove 132 is less than or equal to the inner diameter of the spring 14, and the outer diameter of the spring positioning groove 132 is greater than or equal to that of the spring 14. Outer diameter, one end of the spring 14 extends and is fixed in the spring positioning groove 132, and a fluid through hole 17 communicating with the inner cavity of the housing 11 is respectively opened on the side walls at both ends of the housing 11, and each fluid through hole 17 is connected with the inner cavity of the housing 11. The protrusion on the end cover 13 at this end corresponds to the position of the protrusion corresponding to the fluid through hole 17. There is a through hole 133 communicating with the spring positioning groove 132. The fluid passes through the fluid through hole 17 and the through hole in turn. 133 flows into the cavity inside the housing 11.

Claims (10)

1. a kind of single-piston damp type optical fiber differential pressure pickup, it is characterised in that:Including sonde configuration(1), light-sensitive element(2)With Signal processing module(3), the sonde configuration(1)Including housing(11), housing(11)It is tubular construction, housing(11)Interior slip It is provided with piston(12), piston(12)Two ends be respectively arranged with a spring(14), two springs(14)One end fix In piston(12)On, housing(11)Two ends seal be fixed with end cap respectively(13), two springs(14)The other end it is solid respectively Due to corresponding end cap(13)On, two end caps(13)On relative position on offer end cap where insertion respectively (13)Probe insertion(131), two probe insertions(131)Inside sealing is provided with light transmission piece respectively(15), two probe insertions (131)It is interior positioned at light transmission piece(15)Outside be respectively arranged with sensing piston(12)Fibre-optical probe(19), fibre-optical probe(19) And piston(12)End face it is perpendicular, piston(12)Two ends and fibre-optical probe(19)It is respectively fixed with relative position reflective Piece(16), housing(11)On the side wall at two ends or two end caps(13)It is upper to offer one and housing respectively(11)Inner space Fluid through-hole(17), two fibre-optical probes(19)It is middle receive optical fiber exit end respectively with a light-sensitive element(2)It is connected, each Light-sensitive element(2)Correspondence is connected with a signal processing module(3).
2. a kind of single-piston damp type optical fiber differential pressure pickup according to claim 1, it is characterised in that:Fibre-optical probe(19) In fibre bundle include incident optical(191)And the output optical fiber(192), incident optical(191)With reception optical fiber(192)In optical fiber Probe(19)It is interior arranged in parallel, incident optical(191)Totally one, receive optical fiber(192)It is that single dimensional parameters are 50 ± 3Multimode fibre, receive optical fiber(192)With incident optical(191)Centered on successively closely arrangement composition one circle optical fiber Binding structure, and incident optical(191)With reception optical fiber(192)Between frontier distance be 130-140
3. a kind of single-piston damp type optical fiber differential pressure pickup according to claim 1, it is characterised in that:Two springs(14) Structure and specification all same, in fluid through-hole(17)In the state of being connected with outside atmosphere, piston(12)Positioned at housing (11)Centre position, two springs(14)It is in nature.
4. a kind of single-piston damp type optical fiber differential pressure pickup according to claim 1, it is characterised in that:Two probe insertions (131)End cap where being opened in(13)Center position, two probe insertions(131), piston(12)Three is coaxial, natural Under state, one of fibre-optical probe(19)To the fibre-optical probe(19)Corresponding reflecting piece(16)Distance and another light Fibre probe(19)To another reflecting piece(16)Distance it is identical.
5. a kind of single-piston damp type optical fiber differential pressure pickup according to claim 1, it is characterised in that:Light transmission piece(15)For Sheet glass, light transmission piece(15)May be contained within probe insertion(131)Positioned at end cap(13)The port of inner side.
6. a kind of single-piston damp type optical fiber differential pressure pickup according to claim 1, it is characterised in that:Probe insertion (131)Inside it is provided with internal thread, fibre-optical probe(19)It is tightened respectively in probe insertion(131)It is interior.
7. a kind of single-piston damp type optical fiber differential pressure pickup according to claim 1, it is characterised in that:End cap(13)In Portion is provided with and stretches into housing(11)Sealing ring is provided between interior lug boss, lug boss and housing (11) inwall(18), it is raised Along housing in portion(11)Length direction offer spring locating slot(132), spring locating slot(132)It is annular groove, and spring Locating slot(132)Internal diameter be less than or equal to spring(14)Internal diameter, spring locating slot(132)External diameter is more than or equal to spring(14)It is outer Footpath, spring(14)One end stretch and be fixed on spring locating slot(132)It is interior.
8. a kind of single-piston damp type optical fiber differential pressure pickup according to claim 1, it is characterised in that:Lug boss is and shell Body(11)The cylindrical structural that internal diameter matches.
9. a kind of single-piston damp type optical fiber differential pressure pickup according to claim 1, it is characterised in that:Two fluid through-holes (17)Housing is opened in respectively(11)On the side wall at two ends, each fluid through-hole(17)With the end cap positioned at the end(13)On it is convex The portion of rising is corresponding, correspondence fluid through-hole on lug boss(17)Position at offer and spring locating slot(132)What is be connected is logical Hole(133), fluid passes sequentially through fluid through-hole(17)And through hole(133)It is flowed into housing(11)In internal chamber.
10. a kind of single-piston damp type optical fiber differential pressure pickup according to claim 1, it is characterised in that:Piston(12)With Sealing ring is provided between the inwall of housing (11)(18), end cap(13)With housing(11)Inwall between be also equipped with sealing ring (18).
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CN204758200U (en) * 2015-07-10 2015-11-11 贵州大学 Single piston damping formula optic fibre differential pressure sensor

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Inventor after: Hu Hao

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