CN104950598B - Up-and-down distributed double-workpiece-stage device - Google Patents
Up-and-down distributed double-workpiece-stage device Download PDFInfo
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- CN104950598B CN104950598B CN201510398828.1A CN201510398828A CN104950598B CN 104950598 B CN104950598 B CN 104950598B CN 201510398828 A CN201510398828 A CN 201510398828A CN 104950598 B CN104950598 B CN 104950598B
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- workbench
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- slide
- guide rail
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Abstract
An up-and-down distributed double-workpiece-stage device comprises a base provided with a boss, the boss is provided with a first horizontal guide rail and a support frame which is provided with a second horizontal guide rail, and the second horizontal guide rail is parallel to and located at the upper end of the first horizontal guide rail; the two horizontal guide rails are connected with a first horizontal sliding seat and a second horizontal sliding seat respectively, and the first horizontal sliding seat and the second horizontal sliding seat have the same horizontal sliding stroke along the two horizontal guide rails respectively; the first horizontal sliding seat and the second horizontal sliding seat are fixedly connected with a first L-shaped support and a second L-shaped support respectively, the two L-shaped supports are each provided with a vertical sliding seat, and the vertical sliding seats are each provided with a workbench through support tables. According to the up-and-down distributed double-workpiece-stage device, the two workbenches switch the positions with each other through the horizontal guide rails and vertical guide rails, different processes are completed at different positions, switching of the processes is completed by switching the positions, exposure and assembly and disassembly of a PCB can be conducted simultaneously, and the exposure efficiency is increased.
Description
Technical field
The present invention relates to a kind of workpiece table device, particularly a kind of device of the work stage for having two to work independently from each other.
Background technology
Locating platform is the parts that PCB direct imagings equipment must be configured, for adsorbing fixed pcb board, Primary Location
The position of pcb board, it is ensured that PCB can move to reach correct position and with correct road with work stage in LDI photoetching processes
Line and speed are moved.Because the surface of pcb board needs to coat light-sensitive surface, so the multiplex absorption type of positioning fixed form of pcb board.
In modern industry production, the pursuit to efficiency is endless.Double workpiece platform device can effectively lift LDI exposure machines
Efficiency, is completed to receive plate and puts plate in upper table, and the work being aligned, and the work of exposure is completed in lower table.Equivalent to
One equipment completes two workloads of equipment.Because upper and lower two workbench are non-interference, so work can be parallel
Carry out.In addition on the exposure sources of pcb board, the YAW values for scanning shaft platform are especially big on the quality influence for exposing.Scan axis
Center is with exposure point closer to the influence for scanning the yaw values of shaft platform can be preferably minimized.The dual-workpiece of up-down structure arrangement, just
It is the optimization structure carried out to drop to the influence of out-of-alignment YAW values.The workpiece stylobate that current PCB direct imaging equipment is used
On this based on single work stage, also there is double-workpiece-table.But, current double-workpiece-table is exactly two superpositions of work stage, two
Individual work stage is placed in parallel.Man-machine interaction is exactly two stations, does not have upper and lower exchange.Although also there is certain carrying to efficiency
Rise, but can not be real at last double-workpiece-table.
The content of the invention
In order to solve the above technical problems, the invention provides a kind of upper and lower distributed double workpiece platform device, it includes pedestal,
The pedestal is provided with a boss, and the boss is provided with a first level guide rail and a support frame, and support frame as described above is provided with
Second horizontal guide rail, second horizontal guide rail is parallel and positioned at the first level guide rail upper end；
The first level guide rail, the second horizontal guide rail are connected to first level slide, the second horizontal slide, described
First level slide, the second horizontal slide have the horizontal sliding stroke of an identical respectively along two horizontal guide rail respectively；
The first level slide, the second horizontal slide have been respectively fixedly connected with one first L bracket, the second L bracket,
Two L bracket has a horizon bar and vertical bar respectively, and two horizon bar is parallel with pedestal and is connected to two water
On smooth seat, two vertical bar is located at both sides and sets up；First L bracket, the vertical bar of the second L bracket point
Vertical guide not being connected with, vertical slide being respectively equipped with two vertical guide, the two vertical slide is connected to branch
Support platform, workbench is respectively equipped with two supporting table；
What is be connected with first level slide is the first workbench, and what is be connected with the second horizontal slide is the second workbench, institute
State two workbench parallel with the pedestal respectively, there is a parallel spacing between two workbench, two workbench can divide
The plane to where other side is not moved in parallel.
It is preferred that being respectively equipped with work sucker on two workbench.
It is preferred that second horizontal guide rail is located at the surface of the first level guide rail.
It is preferred that first level slide, the second horizontal slide are respectively positioned at first end point/the second end of horizontal sliding stroke
Point, the second end points/first end point；When the first level slide is located at first end point, second horizontal slide is located at second
End points, first workbench is located at the second workbench upper end, and the first workbench region is PCB loading places
Domain, the second workbench region is PCB exposure areas；First workbench and the second workbench can be by horizontal positions
Move and complete location swap with vertical displacement.
It is preferred that two horizontal slide is respectively equipped with horizontal drive apparatus, the horizontal drive apparatus are used to drive water
Smooth seat is moved on horizontal guide rail, and the two vertical slide is respectively equipped with vertical drive, and the vertical drive is used
In the vertical slide in the vertical direction displacement of driving.
Present invention also offers a kind of method of work of upper and lower distributed double workpiece platform device, comprise the following steps：
S1：First level slide, the second horizontal slide are moved to first end point and the on respective horizontal guide rail respectively
Two end points；By first movable workbench to upper surface, by the second movable workbench to lower surface；
S2：One pcb board to be exposed is placed on first workbench, by first workbench and the second workbench
Place plan-position is exchanged, and the first level slide is slid into second end points, and second horizontal slide is slided
Move to the first end point；
S3：Open exposure device to be exposed the pcb board on first workbench, while in second workbench
Upper placement pcb board；
S4：After end exposure, plane where first workbench and the second workbench is exchanged, while respectively by the first water
Smooth seat, the second horizontal slide are moved to first end point, the second end points on respective horizontal guide rail；
S5：Pcb board on first workbench is removed and another unexposed pcb board is placed, while opening exposure
Device exposes to the pcb board on the second workbench；
S6：After end exposure, plane where first workbench and the second workbench is exchanged, while respectively by the first water
Smooth seat, the second horizontal slide are moved to the second end points, first end point on respective horizontal guide rail；
S7：Pcb board on second workbench is removed and another unexposed pcb board is placed, while opening exposure
Device exposes to the pcb board on the first workbench；
S8：Step S4 to S7 is continued executing with until completing the exposure-processed of all pcb boards.
The invention has the advantages that：
Two workbench of the invention exchange respective position by horizontal guide rail, upright guide rail, are completed not in diverse location
Same operation, and the exchange of operation is completed by exchange position, and do not influenceed mutually between two operations of workbench, realize
Pcb board is carried out while exposure with handling, increased exposure efficiency.
Certainly, implement any product of the invention to it is not absolutely required to while reaching all the above advantage.
Brief description of the drawings
Technical scheme in order to illustrate more clearly the embodiments of the present invention, uses required for being described to embodiment below
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for ability
For the those of ordinary skill of domain, on the premise of not paying creative work, can also obtain other attached according to these accompanying drawings
Figure.
Fig. 1 is upper and lower distributed double workpiece platform device front view provided in an embodiment of the present invention；
Fig. 2 is upper and lower distributed double workpiece platform device stereogram provided in an embodiment of the present invention；
Fig. 3 is upper and lower distributed double workpiece platform device side sectional view provided in an embodiment of the present invention.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is all other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
A kind of upper and lower distributed double workpiece platform device is the embodiment of the invention provides, as shown in Figure 1 and Figure 2, it includes pedestal
1, pedestal is provided with boss 2, and boss 2 is provided with first level guide rail 3 and support frame 4, and support frame 4 is provided with the second horizontal guide rail
5, the second horizontal guide rail 5 is parallel and positioned at the upper end of first level guide rail 3；
First level guide rail 3, the second horizontal guide rail 5 are connected to first level slide 6, the second horizontal slide 7, first
Horizontal slide 6, the second horizontal slide 7 along first level guide rail 3, the second horizontal rail 5 there is an identical level to slide row respectively
Journey；
First level slide 6, the second horizontal slide 7 have been respectively fixedly connected with the first L bracket 81, the second L bracket
82,；
Two workbench is parallel with the pedestal respectively, has a parallel spacing, described two between two workbench
Workbench can respectively move in parallel the plane to where other side.As shown in figure 3, two workbench are located at work respectively in the present embodiment
Table top A and work top B.
In the present embodiment, work sucker is respectively equipped with two workbench.Work sucker is used to adsorb workpiece, makes workpiece
Fix on the table.
The workpiece that the present embodiment is used to process is pcb board, and treatment is mainly exposed to pcb board.
In the present embodiment, the second horizontal guide rail 5 is located at the surface of first level guide rail 3.
Wherein first level slide 6, the second horizontal slide 7 are respectively positioned at first end point/the second end of horizontal sliding stroke
Point, the second end points/first end point；When first level slide 6 is located at first end point, the second horizontal slide 7 is located at the second end points, the
One workbench 121 is located at the upper end of the second workbench 122, and the region of the first workbench 121 is PCB loading and unloading areas, the second work
The region of platform 122 is PCB exposure areas；First workbench 121 and the second workbench 122 can be by horizontal displacement and vertical positions
Move and complete location swap.PCB loading and unloading areas be used for lay pcb board to be exposed on the table, and unload completed exposure
Pcb board, loading and unloading can have manipulator to complete, it is also possible to by being accomplished manually, and need certain space due to performing charge and discharge operations, institute
Upper surface is located at PCB loading and unloading areas；PCB exposure areas are under the exposure environment of exposure device, and the pcb board in this region is complete
Into exposure process.
Two horizontal slide that the present embodiment is provided is respectively equipped with horizontal drive apparatus, and the horizontal drive apparatus are used for
Horizontal slide is driven to be moved on horizontal guide rail, the two vertical slide is respectively equipped with vertical drive, the vertical driving
Device is used to drive vertical slide in the vertical direction displacement.
The embodiment of the present invention additionally provides a kind of method of work of upper and lower distributed double workpiece platform device, and it includes following step
Suddenly：
S1：Respectively by first level slide 6, the second horizontal slide 7 be moved on respective horizontal guide rail first end point with
Second end points；First workbench 121 is moved to upper surface, the second workbench 122 is moved to lower surface；
S2：One pcb board to be exposed is placed on the first workbench 121, by the first workbench 121 and the second workbench
122 places plan-position are exchanged, and first level slide 6 is slid into second end points, and the second horizontal slide 7 is slid into
The first end point；
S3：Open exposure device to be exposed the pcb board on the first workbench 121, while on the second workbench 122
Place pcb board；
S4：After end exposure, the first workbench 121 and the place plane of the second workbench 122 are exchanged, while respectively by first
Horizontal slide 6, the second horizontal slide 7 are moved to first end point, the second end points on respective horizontal guide rail；
S5：Pcb board on first workbench 121 is removed and another unexposed pcb board is placed, while opening exposure dress
Put to the pcb board exposure on the second workbench 122；
S6：After end exposure, the first workbench 121 and the place plane of the second workbench 122 are exchanged, while respectively by first
Horizontal slide 6, the second horizontal slide 7 are moved to the second end points, first end point on respective horizontal guide rail；
S7：Pcb board on second workbench 122 is removed and another unexposed pcb board is placed, while opening exposure dress
Put to the pcb board exposure on the first workbench 121；
S8：Step S4 to S7 is continued executing with until completing the exposure-processed of all pcb boards.
Two workbench of the invention exchange respective position by horizontal guide rail, upright guide rail, are completed not in diverse location
Same operation, and the exchange of operation is completed by exchange position, and do not influenceed mutually between two operations of workbench, realize
Pcb board is carried out while exposure with handling, increased exposure efficiency.
Present invention disclosed above preferred embodiment is only intended to help and illustrates the present invention.Preferred embodiment is not detailed
All of details is described, it is only described specific embodiment that the invention is not limited yet.Obviously, according to the content of this specification,
Can make many modifications and variations.This specification is chosen and specifically describes these embodiments, is to preferably explain the present invention
Principle and practical application so that skilled artisan can be best understood by and utilize the present invention.The present invention is only
Limited by claims and its four corner and equivalent.
Claims (6)
1. a kind of upper and lower distributed double workpiece platform device, it is characterised in that including pedestal, the pedestal is provided with a boss, institute
State boss and be provided with a first level guide rail and a support frame, support frame as described above is provided with the second horizontal guide rail, second water
Level gauge is parallel and positioned at the first level guide rail upper end；
The first level guide rail, the second horizontal guide rail are connected to first level slide, the second horizontal slide, described first
Horizontal slide, the second horizontal slide have the horizontal sliding stroke of an identical respectively along two horizontal guide rail respectively；
The first level slide, the second horizontal slide have been respectively fixedly connected with one first L bracket, the second L bracket, described
Two L brackets have a horizon bar and vertical bar respectively, and two horizon bar is parallel with pedestal and is connected to two levels cunning
On seat, two vertical bar is located at both sides and sets up；First L bracket, the vertical bar of the second L bracket connect respectively
Vertical guide is connected to, vertical slide is respectively equipped with two vertical guide, the two vertical slide is connected to supporting table,
Workbench is respectively equipped with two supporting table；
What is be connected with first level slide is the first workbench, and what is be connected with the second horizontal slide is the second workbench, described two
Workbench is parallel with the pedestal respectively, has a parallel spacing between two workbench, and two workbench can put down respectively
The plane gone where being moved to other side.
2. distribution double workpiece platform device up and down as claimed in claim 1, it is characterised in that set respectively on two workbench
There is work sucker.
3. distribution double workpiece platform device up and down as claimed in claim 2, it is characterised in that second horizontal guide rail is located at
The surface of the first level guide rail.
4. distribution double workpiece platform device up and down as claimed in claim 3, it is characterised in that first level slide, the second water
Smooth seat is respectively positioned at first end point/the second end points, second end points/first end point of horizontal sliding stroke；The first level
When slide is located at first end point, second horizontal slide is located at the second end points, and first workbench is located at second work
Make platform upper end, the first workbench region is PCB loading and unloading areas, and the second workbench region exposes for PCB
Region；First workbench and the second workbench can complete location swap by horizontal displacement and vertical displacement.
5. distribution double workpiece platform device up and down as claimed in claim 4, it is characterised in that two horizontal slide sets respectively
There are horizontal drive apparatus, the horizontal drive apparatus are used to drive horizontal slide to be moved on horizontal guide rail, described two is vertical sliding
Seat is respectively equipped with vertical drive, and the vertical drive is used to drive vertical slide in the vertical direction displacement.
6. the method for work of the double workpiece platform device of distribution up and down as claimed in claim 4, it is characterised in that including following step
Suddenly：
S1：First level slide, the second horizontal slide are moved to first end point and the second end on respective horizontal guide rail respectively
Point；By first movable workbench to upper surface, by the second movable workbench to lower surface；
S2：One pcb board to be exposed is placed on first workbench, by where first workbench and the second workbench
Plan-position is exchanged, and the first level slide is slid into second end points, and second horizontal slide is slid into
The first end point；
S3：Open exposure device to be exposed the pcb board on first workbench, while being put on second workbench
Put pcb board；
S4：After end exposure, plane where first workbench and the second workbench is exchanged, while respectively sliding first level
Seat, the second horizontal slide are moved to first end point, the second end points on respective horizontal guide rail；
S5：Pcb board on first workbench is removed and another unexposed pcb board is placed, while opening exposure device
To the pcb board exposure on the second workbench；
S6：After end exposure, plane where first workbench and the second workbench is exchanged, while respectively sliding first level
Seat, the second horizontal slide are moved to the second end points, first end point on respective horizontal guide rail；
S7：Pcb board on second workbench is removed and another unexposed pcb board is placed, while opening exposure device
To the pcb board exposure on the first workbench；
S8：Step S4 to S7 is continued executing with until completing the exposure-processed of all pcb boards.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510398828.1A CN104950598B (en) | 2015-07-07 | 2015-07-07 | Up-and-down distributed double-workpiece-stage device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510398828.1A CN104950598B (en) | 2015-07-07 | 2015-07-07 | Up-and-down distributed double-workpiece-stage device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104950598A CN104950598A (en) | 2015-09-30 |
| CN104950598B true CN104950598B (en) | 2017-05-24 |
Family
ID=54165359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510398828.1A Expired - Fee Related CN104950598B (en) | 2015-07-07 | 2015-07-07 | Up-and-down distributed double-workpiece-stage device |
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| CN (1) | CN104950598B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109856862A (en) * | 2017-11-30 | 2019-06-07 | 上海微电子装备（集团）股份有限公司 | Dual stage light alignment apparatus and alignment method |
| CN108873621B (en) * | 2018-07-26 | 2020-06-05 | 中山新诺科技股份有限公司 | Cantilever type double-table-board double-side exposure machine and double-side exposure method |
| CN111347159A (en) * | 2020-04-07 | 2020-06-30 | 湖南汽车工程职业学院 | Multifunctional laser welding machine |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6128069A (en) * | 1997-03-13 | 2000-10-03 | Canon Kabushiki Kaisha | Stage mechanism for exposure apparatus |
| JP2000216082A (en) * | 1999-01-27 | 2000-08-04 | Nikon Corp | Stage device and aligner |
| JP2001118773A (en) * | 1999-10-18 | 2001-04-27 | Nikon Corp | Stage device and exposure system |
| CN1200321C (en) * | 2003-08-29 | 2005-05-04 | 清华大学 | Step-by-step projection photo-etching machine double set shifting exposure ultra-sophisticated positioning silicon chip bench system |
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| Publication number | Publication date |
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| CN104950598A (en) | 2015-09-30 |
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Effective date of registration: 20190916 Address after: Room B30, 3rd floor, 151 Keyuan Road, China (Shanghai) Free Trade Pilot Area, Pudong New Area, Shanghai Patentee after: Zhongxia Xinji (Shanghai) Technology Co.,Ltd. Address before: 230000 Anhui city of Hefei Province Economic and Technological Development Zone North Fairview Avenue, Xiyou Road East Patentee before: HEFEI ADVANTOOLS SEMICONDUCTOR Co.,Ltd. |
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Granted publication date: 20170524 |
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