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CN104932208B - Exposure jig and work process thereof - Google Patents

Exposure jig and work process thereof Download PDF

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Publication number
CN104932208B
CN104932208B CN201510390641.7A CN201510390641A CN104932208B CN 104932208 B CN104932208 B CN 104932208B CN 201510390641 A CN201510390641 A CN 201510390641A CN 104932208 B CN104932208 B CN 104932208B
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CN
China
Prior art keywords
rectangle
horizontal
film
version mould
placing frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201510390641.7A
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Chinese (zh)
Other versions
CN104932208A (en
Inventor
郭新建
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BRAVE C & H SUPPLY Co Ltd
CANGHE PRECISION INDUSTRY (SUZHOU) Co Ltd
Original Assignee
BRAVE C & H SUPPLY Co Ltd
CANGHE PRECISION INDUSTRY (SUZHOU) Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BRAVE C & H SUPPLY Co Ltd, CANGHE PRECISION INDUSTRY (SUZHOU) Co Ltd filed Critical BRAVE C & H SUPPLY Co Ltd
Priority to CN201510390641.7A priority Critical patent/CN104932208B/en
Publication of CN104932208A publication Critical patent/CN104932208A/en
Application granted granted Critical
Publication of CN104932208B publication Critical patent/CN104932208B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

The invention provides an exposure jig comprising a horizontal base plate, a rectangular containing frame, a horizontal light transmitting plate, an alignment device and a press fit device. The rectangular containing frame is arranged at the center of the base plate and used for containing a horizontal rectangular film, and the shape of the rectangular containing frame is matched with that of the horizontal rectangular film. The horizontal light transmitting plate is fixed into the rectangular containing frame, is in fit with the rectangular containing frame and is used for bearing the horizontal film. The alignment device is used for aligning a horizontal rectangular plate template with the rectangular containing frame. The press fit device is used for enabling the plate template to be in press fit with the film. The invention further provides the work process of the exposure jig. By the adoption of the exposure jig and the work process thereof, alignment between the film and the plate template is convenient, air between the plate template and the film is discharged gradually from the middle to the edge, and finally the air between the plate template and the film is removed completely.

Description

Exposure tool and its course of work
Technical field
The present invention relates to exposure tool and its course of work.
Background technology
Existing exposure sources belong to semiautomatic equipment, need manually to go the film aligning essence by version mould with figure Standard, manually by film aligning in the middle of the version mould needing exposure, the method for use is to go to measure with chi and align, so The fatigue strength increasing personnel is simultaneously again inefficent, and error rate is high, allows the film to be centered in the artificial movement of measurement repeatedly simultaneously The bad of product can be caused during version mould.Also need to after contraposition precisely, by under the air-breathing cover plate lid of equipment, then use the side vacuumizing Formula allows air-breathing skin to go to extrude version mould, thus by the gas exclusion between version mould and the film, making the film closely sealed with version mould, being finally exposed Build bridge.Using the mode vacuumizing, so there is no specific aim, using the carrying out extruding exhaust in the whole face of air-breathing skin, such area is got over Greatly, it is vented not exclusively, incomplete phenomenon of fitting can be increased, simultaneously as the time that leaving area change so vacuumizes greatly Can be elongated, thus can increase man-hour reduction efficiency.Finally during vacuumizing, air-breathing skin can be pullled change repeatedly Shape, such air-breathing skin can fall broken cutting and lead to pollution environment increase bad.
Content of the invention
It is an object of the invention to provide a kind of exposure tool and its course of work, it facilitates the contraposition of the film and version mould, And to version mould and the film by the way of being progressively vented to edge from middle part, the final air removing between version mould and the film.
For achieving the above object, the present invention provides a kind of exposure tool, comprising:
Horizontal base plate,
It is opened in base plate center, shape is fitted with the horizontal rectangle film, the rectangle placing frame for placing the horizontal film,
It is fixed on rectangle placement inframe to fit with rectangle placing frame, be used for carrying the horizontal light-passing board of the horizontal film,
For the alignment device aligning horizontal rectangle version mould with rectangle placing frame,
And the press fit device for pressing version mould with the film;
The top surface of described horizontal light-passing board is less than plate top surface, and printing opacity plate top surface and plate top surface be smaller than horizontal The thickness of the film;
Described alignment device includes: one-to-one four pushing mechanisms with four sidelines of rectangle placing frame, and drives The drive mechanism of pushing mechanism work;
Single pushing mechanism is located at the corresponding outside placing frame edges;And each pushing mechanism is designed with: two mutually flat Row, with external screw thread, for promoting the horizontal catch bar of horizontal version mould, and one is used for supporting catch bar and catch bar screw thread The bearing connecting;Placement frame edges corresponding to all perpendicular to this single pushing mechanism for two catch bars of single pushing mechanism; It is divided into each catch bar on four pushing mechanisms, they are identical with the spacing of corresponding placement frame edges;And be divided into four and push away Each catch bar on motivation structure, their external screw thread is identical;
Described drive mechanism includes: with rectangle placing frame center as the center of circle, is used for driving catch bar along own axes direction Flexible horizontal annular fluted disc, and the first driving means that driving annular fluted disc rotates around the above-mentioned center of circle;Described circle Annular fluted disc, its upper surface is provided with the sliding tooth for driving catch bar to rotate around own axes;And this sliding tooth and catch bar External screw thread ratcheting;
Described press fit device includes: directly over placing frame, for depressing version mould some horizontal pressures being parallel to each other Bar, be fixed on depression bar bottom, along depression bar length direction uniform, length identical is some is vertically arranged pressure head, flat for a pressure-bearing rod Put lower press box, and for driving the second driving means of lower press box vertical lifting;
Described depression bar is perpendicular to a sideline of placing frame, and each depression bar is uniform along the sideline direction of this placing frame;Single pressure Bar, its two ends is fixed with lower press box bottom surface respectively, wherein subordinate convex in two ends.
Preferably, described bearing is fixed on the top surface of horizontal base plate.
Preferably, described horizontal base plate is provided with the toroidal cavity for placing annular fluted disc, described annular tooth Disk is placed in described toroidal cavity.
Preferably, described first driving means include the cylinder connecing with annular fluted disc axle;Described annular fluted disc, outside it Edge is extended with the connecting portion for connecing with cylinder piston rod axle.
Preferably, above-mentioned exposure tool, also includes the exposure light source below light-passing board.
The present invention also provides the course of work of above-mentioned exposure tool, comprises the steps:
The rectangle film is laid in the upper surface that rectangle places inframe horizontal light-passing board, the sideline of the rectangle film and rectangle are put Put the sideline laminating of frame, the center of the rectangle film and rectangle placing frame are centrally located in same vertical curve, complete determining of the film Position is placed;
Version mould is flat on the plate top surface between four pushing mechanisms;
First driving means drive the rotation of horizontal annular fluted disc, and then drive the catch bar of four pushing mechanisms to stretch out, The catch bar of four pushing mechanisms contacts and promotes horizontal version mould, gradually aligns horizontal rectangle version mould with rectangle placing frame, square The four of shape version mould while respectively with rectangle placing frame four while corresponding parallel, the center of rectangle version mould and the centre bit of rectangle placing frame In same vertical curve, namely complete the contraposition of horizontal rectangle version mould and the horizontal rectangle film, four sides of rectangle version mould respectively with Four side correspondences of the rectangle film are parallel, and the center of rectangle version mould and the rectangle film are centrally located in same vertical curve;
Second driving means drive lower press box to be vertically lowered, and drive depression bar to decline;Due to the middle subordinate of single depression bar convex in Two ends, therefore the pressure head that is vertically arranged being located in the middle part of single depression bar first contacts and pushes horizontal version mould, positioned at being vertically arranged of single depression bar two ends Contact and push horizontal version mould after pressure head;So that edition mould and the film is progressively pressed to edge from middle part, finally make edition mould and the film tight Closely connected lean on, namely complete edition to be progressively vented to edge from middle part between mould and the film, the final air removing between version mould and the film.
Advantages of the present invention and having the beneficial effects that: a kind of exposure tool and its course of work are provided, its facilitate the film with The contraposition of version mould, and to version mould and the film by the way of being progressively vented to edge from middle part, between final removal version mould and the film Air.
Brief description
Fig. 1 is the schematic diagram of the present invention;
Fig. 2 is the schematic top plan view of alignment device;
Fig. 3 is the elevational schematic view of press fit device.
Specific embodiment
With reference to the accompanying drawings and examples, the specific embodiment of the present invention is further described.Following examples are only For clearly technical scheme being described, and can not be limited the scope of the invention with this.
The technical scheme that the present invention is embodied as is:
As shown in Figure 1, Figure 2 and Figure 3, a kind of exposure tool, comprising:
Horizontal base plate 1,
It is opened in base plate 1 center, shape is fitted with the horizontal rectangle film 7, the rectangle placing frame for placing the horizontal film 7 2,
It is fixed in rectangle placing frame 2 and fit with rectangle placing frame 2, be used for carrying the horizontal light-passing board 3 of the horizontal film 7,
For the alignment device aligning horizontal rectangle version mould 8 with rectangle placing frame 2,
And the press fit device for pressing version mould 8 with the film 7;
The top surface of described horizontal light-passing board 3 is less than base plate 1 top surface, and being smaller than of light-passing board 3 top surface and base plate 1 top surface The thickness of the horizontal film 7;
Described alignment device includes: one-to-one four pushing mechanisms 4 with 2 four sidelines of rectangle placing frame, and drives The drive mechanism of dynamic pushing mechanism 4 work;
Single pushing mechanism 4 is located at the outside in corresponding placing frame 2 sideline;And each pushing mechanism 4 is designed with: two mutually Parallel, with external screw thread, for promoting the horizontal catch bar 41 of horizontal version mould 8, and one is used for supporting catch bar 41 and promotes The threaded bearing of bar 41 42;Two catch bars 41 of single pushing mechanism 4 are all perpendicular to corresponding to this single pushing mechanism 4 Placing frame 2 sideline;It is divided into each catch bar 41 on four pushing mechanisms 4, their spacing phases with corresponding placing frame 2 sideline With;And it is divided into each catch bar 41 on four pushing mechanisms 4, their external screw thread is identical;
Described drive mechanism includes: with rectangle placing frame 2 center as the center of circle, is used for driving catch bar 41 along own axes side To flexible horizontal annular fluted disc 51, and the first driving means that driving annular fluted disc 51 rotates around the above-mentioned center of circle; Described annular fluted disc 51, its upper surface is provided with the sliding tooth for driving catch bar 41 to rotate around own axes;And this driving Tooth is ratcheting with the external screw thread of catch bar 41;
Described press fit device includes: positioned at placing frame 2 surface, some horizontal being parallel to each other for depressing version mould 8 Depression bar 61, be fixed on depression bar 61 bottom, along depression bar 61 length direction uniform, length identical is some is vertically arranged pressure head 62, for Press box 63 under the horizontal of pressure-bearing rod 61, and for driving the second driving means of lower press box 63 vertical lifting;
Described depression bar 61 is perpendicular to a sideline of placing frame 2, and each depression bar 61 is uniform along the sideline direction of this placing frame 2; Single depression bar 61, its two ends is fixed with lower press box 63 bottom surface respectively, wherein subordinate convex in two ends.
Described bearing 42 is fixed on the top surface of horizontal base plate 1.
Described horizontal base plate 1 is provided with the toroidal cavity for placing annular fluted disc 51, described annular fluted disc 51 It is placed in described toroidal cavity.
Described first driving means include the cylinder 53 connecing with annular fluted disc 51 axle;Described annular fluted disc 51, outside it Edge is extended with the connecting portion 52 for connecing with cylinder 53 piston rod 54 axle.
Above-mentioned exposure tool, can also include the exposure light source located at light-passing board 3 lower section.
The present invention also provides the course of work of above-mentioned exposure tool, comprises the steps:
The rectangle film 7 is laid in the upper surface of horizontal light-passing board 3 in rectangle placing frame 2, the sideline of the rectangle film 7 and square The sideline laminating of shape placing frame 2, the center of the rectangle film 7 and rectangle placing frame 2 are centrally located in same vertical curve, complete phenanthrene The positioning of woods 7 is placed;
Version mould 8 is flat on base plate 1 top surface between four pushing mechanisms 4;
First driving means drive horizontal annular fluted disc 51 to rotate, and then drive the catch bar 41 of four pushing mechanisms 4 Stretch out, the catch bar 41 of four pushing mechanisms 4 contacts and promotes horizontal version mould 8, gradually horizontal rectangle version mould 8 is placed with rectangle Frame 2 aligns, rectangle version mould 8 four while respectively with rectangle placing frame 2 four while corresponding parallel, the center of rectangle version mould 8 and rectangle Placing frame 2 is centrally located in same vertical curve, namely completes the contraposition of horizontal rectangle version mould 8 and the horizontal rectangle film 7, rectangle Version mould 8 four while respectively with the rectangle film 7 four while corresponding parallel, the center of rectangle version mould 8 and the rectangle film 7 are centrally located at In same vertical curve;
Second driving means drive lower press box 63 to be vertically lowered, and drive depression bar 61 to decline;Middle part due to single depression bar 61 Under convex in two ends, therefore the pressure head 62 that is vertically arranged being located at single depression bar 61 middle part first contacts and pushes horizontal version mould 8, positioned at single depression bar 61 two ends be vertically arranged pressure head 62 after contact and push horizontal version mould 8;Edition mould 8 is made progressively to press to edge from middle part with the film 7, Make edition mould 8 and the film 7 eventually closely against namely completing progressively to be vented to edge from middle part between edition mould 8 and the film 7, final remove Air between version mould 8 and the film 7.
The present invention facilitates the contraposition of the film 7 and version mould 8, and version mould 8 is progressively vented to edge using from middle part with the film 7 Mode, the final air removing between version mould 8 and the film 7.
The above is only the preferred embodiment of the present invention it is noted that ordinary skill people for the art For member, on the premise of without departing from the technology of the present invention principle, some improvements and modifications can also be made, these improvements and modifications Also should be regarded as protection scope of the present invention.

Claims (6)

1. exposure tool is it is characterised in that include:
The base plate of horizontal,
It is opened in base plate center, shape is fitted with the horizontal rectangle film, the rectangle placing frame for placing the horizontal rectangle film,
It is fixed on rectangle placement inframe to fit with rectangle placing frame, be used for carrying the horizontal light-passing board of the horizontal rectangle film,
For the alignment device aligning horizontal rectangle version mould with rectangle placing frame,
And the press fit device for pressing horizontal rectangle version mould with the horizontal rectangle film;
The top surface of described light-passing board is less than plate top surface, and printing opacity plate top surface and plate top surface be smaller than the horizontal rectangle film Thickness;
Described alignment device includes: one-to-one four pushing mechanisms with four sidelines of rectangle placing frame, and drives promotion The drive mechanism of mechanism's work;
Single pushing mechanism is located at the outside that corresponding rectangle places frame edges;And each pushing mechanism is designed with: two mutually flat Row, with external screw thread, for promoting the horizontal catch bar of horizontal rectangle version mould, and one is used for supporting catch bar and catch bar Threaded bearing;Rectangle corresponding to all perpendicular to this single pushing mechanism for two catch bars of single pushing mechanism is placed Frame edges;It is divided into each catch bar on four pushing mechanisms, the spacing that they place frame edges with corresponding rectangle is identical;And point Each catch bar on four pushing mechanisms, their external screw thread is identical;
Described drive mechanism includes: with rectangle placing frame center as the center of circle, is used for driving catch bar to stretch along own axes direction Horizontal annular fluted disc, and drive the first driving means that rotate around the above-mentioned center of circle of annular fluted disc;Described annular Fluted disc, its upper surface is provided with the sliding tooth for driving catch bar to rotate around own axes;And this sliding tooth and catch bar is outer Screw thread is ratcheting;
Described press fit device includes: directly over rectangle placing frame, for depressing horizontal rectangle version mould some being parallel to each other Horizontal depression bar, be fixed on depression bar bottom, along depression bar length direction uniform, length identical is some is vertically arranged pressure head, for supporting Press box under the horizontal of depression bar, and for driving the second driving means of lower press box vertical lifting;
Described depression bar is perpendicular to a sideline of rectangle placing frame, and each depression bar is uniform along the sideline direction of this rectangle placing frame;Single Individual depression bar, its two ends is fixed with lower press box bottom surface respectively, wherein subordinate convex in two ends.
2. exposure tool according to claim 1 is it is characterised in that described bearing is fixed on the top surface of base plate.
3. exposure tool according to claim 2 is it is characterised in that described base plate is provided with for placing annular fluted disc Toroidal cavity, described annular fluted disc is placed in described toroidal cavity.
4. exposure tool according to claim 3 is it is characterised in that described first driving means include and annular fluted disc The cylinder that axle connects;Described annular fluted disc, its outer edge is extended with the connecting portion for connecing with cylinder piston rod axle.
5. exposure tool according to claim 4 is it is characterised in that also include the exposure light source below light-passing board.
6. expose the course of work of tool any one of claim 1-5 it is characterised in that comprising the steps:
The horizontal rectangle film is laid in the upper surface of rectangle placing frame iuuminting plate, the sideline of the horizontal rectangle film is put with rectangle Put the sideline laminating of frame, the center of the horizontal rectangle film and rectangle placing frame are centrally located in same vertical curve, complete horizontal The positioning of the rectangle film is placed;
Horizontal rectangle version mould is flat on the plate top surface between four pushing mechanisms;
First driving means drive the rotation of annular fluted disc, and then drive the catch bar of four pushing mechanisms to stretch out, four promotions The catch bar of mechanism contacts and promotes horizontal rectangle version mould, gradually aligns horizontal rectangle version mould with rectangle placing frame, horizontal square The four of shape version mould while respectively with rectangle placing frame four while corresponding parallel, in the center of horizontal rectangle version mould and rectangle placing frame The heart is located in same vertical curve, namely completes the contraposition of horizontal rectangle version mould and the horizontal rectangle film, and the four of horizontal rectangle version mould While respectively with the horizontal rectangle film four while corresponding parallel, the center of horizontal rectangle version mould and the horizontal rectangle film are centrally located at In same vertical curve;
Second driving means drive lower press box to be vertically lowered, and drive depression bar to decline;Due to the middle subordinate of single depression bar convex in two ends, Therefore the pressure head that is vertically arranged being located in the middle part of single depression bar first contacts and pushes horizontal rectangle version mould, is vertically arranged pressure positioned at single depression bar two ends Contact after head and push horizontal rectangle version mould;Horizontal rectangle version mould and the horizontal rectangle film is made progressively to press to edge from middle part, Finally make horizontal rectangle version mould and the horizontal rectangle film closely against namely completing between horizontal rectangle version mould and the horizontal rectangle film Progressively it is vented to edge from middle part, the final air removing between horizontal rectangle version mould and the horizontal rectangle film.
CN201510390641.7A 2015-07-07 2015-07-07 Exposure jig and work process thereof Expired - Fee Related CN104932208B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510390641.7A CN104932208B (en) 2015-07-07 2015-07-07 Exposure jig and work process thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510390641.7A CN104932208B (en) 2015-07-07 2015-07-07 Exposure jig and work process thereof

Publications (2)

Publication Number Publication Date
CN104932208A CN104932208A (en) 2015-09-23
CN104932208B true CN104932208B (en) 2017-01-18

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Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007171621A (en) * 2005-12-22 2007-07-05 Adtec Engineeng Co Ltd Contact exposure device
JP5974264B2 (en) * 2011-10-07 2016-08-23 パナソニックIpマネジメント株式会社 Screen printer and mask cleaning method in screen printer
CN103309178B (en) * 2013-07-04 2015-08-26 扬州杰利半导体有限公司 A kind of double-face alignment exposure device for semiconductor wafer
CN104216236B (en) * 2014-08-22 2016-08-17 深圳市大川光电设备有限公司 It is suitable for the film and the workpiece adherence method of image transfer exposure machine

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Granted publication date: 20170118