CN104900406B - Bonding multilayer ceramic capacitor and preparation method thereof - Google Patents
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Abstract
本发明提供一种高可靠性、高电容量的可键合多层陶瓷电容器及其制备方法,该可键合多层陶瓷电容器包括:多个陶瓷介电层;分别交替地形成在所述多个陶瓷介电层上的多个第一和第二内部电极;以及垂直穿过所述多个陶瓷介电层的第一类和第二类垂直过孔,所述第一类垂直过孔与所述第一内部电极的主电极相连接,并且所述第二类垂直过孔与所述第二内部电极的主电极相连接;所述第一类垂直过孔通向所述电容器的底部,与底部的外部电极相连接,并且所述第二类垂直过孔通向所述电容器的顶部,与顶部的外部电极相连接。
The present invention provides a bondable multilayer ceramic capacitor with high reliability and high capacitance and a preparation method thereof. The bondable multilayer ceramic capacitor includes: a plurality of ceramic dielectric layers; A plurality of first and second internal electrodes on a ceramic dielectric layer; and a first type and a second type of vertical vias vertically passing through the plurality of ceramic dielectric layers, the first type of vertical vias and the first type of vertical vias The main electrodes of the first internal electrodes are connected, and the second type of vertical vias are connected to the main electrodes of the second internal electrodes; the first type of vertical vias leads to the bottom of the capacitor, connected to the bottom external electrode, and the second type of vertical via leads to the top of the capacitor to be connected to the top external electrode.
Description
技术领域technical field
本发明涉及一种多层陶瓷电容器。更具体地,本发明涉及一种高可靠性、高容量密度的可键合多层陶瓷电容器以及该可键合多层陶瓷电容器的制备方法。The present invention relates to a multilayer ceramic capacitor. More specifically, the present invention relates to a bondable multilayer ceramic capacitor with high reliability and high capacity density and a method for preparing the bondable multilayer ceramic capacitor.
背景技术Background technique
传统的三维分立式无源元件是通过插入、焊接、表面贴装等方式制备,随着电子工业向微型化发展,微组装工艺逐渐取代插入、焊接、表面贴装等工艺。微组装工艺的关键在于元器件的可键合。可键合无源元件技术能够满足减少元件数量、压缩电路板尺寸、增加电路板功能、降低产品总体成本的需求。在电子设备中,电容器是三大主要无源元件之一,可键合多层陶瓷电容器在电子领域占有重要的地位。Traditional three-dimensional discrete passive components are prepared by insertion, welding, surface mount, etc. As the electronics industry develops towards miniaturization, micro-assembly processes gradually replace insertion, welding, surface mount, and other processes. The key to the micro-assembly process is the bonding of components. Bondable passive component technology can meet the needs of reducing the number of components, compressing the size of the circuit board, increasing the function of the circuit board, and reducing the overall cost of the product. In electronic equipment, capacitors are one of the three main passive components, and bondable multilayer ceramic capacitors occupy an important position in the electronic field.
国内外已经公开多项可键合式电容器的专利,基本都是单层结构的所谓的单层陶瓷电容器(Single Layer Capacitor, SLC),这种电容器由单层陶瓷介质以及附着于陶瓷介质上下表面的金属电极构成。单层陶瓷电容器虽然可以满足微组装的金丝键合要求,但容量密度小,大容量的电容器(如容量大于0.01µF)仍不可能制备。如美国专利US2003016485、中国专利CN1396606A、200410075380.1等均为公开了单层陶瓷电容器的制备的专利。A number of patents on bondable capacitors have been published at home and abroad, basically the so-called single-layer ceramic capacitors (Single Layer Capacitor, SLC) with a single-layer structure. metal electrodes. Although single-layer ceramic capacitors can meet the gold wire bonding requirements of micro-assembly, the capacity density is small, and large-capacity capacitors (such as capacity greater than 0.01µF) are still impossible to prepare. For example, US Patent US2003016485, Chinese Patent CN1396606A, and 200410075380.1 are all patents disclosing the preparation of single-layer ceramic capacitors.
为了克服单层陶瓷电容器容量密度偏低的问题,一种解决办法是将多层陶瓷电容器加工成可键合的结构。国内外已经研制了多种可键合多层陶瓷电容器。与传统的多层陶瓷电容器相比,可键合多层陶瓷电容器主要将其外部电极置于电容器的上下两面,以便于一个电极贴装于电板另一个电极实现键合装配。这种结构主要通过以下几种方法实现。In order to overcome the problem of low capacity density of single-layer ceramic capacitors, one solution is to process multi-layer ceramic capacitors into a bondable structure. A variety of bondable multilayer ceramic capacitors have been developed at home and abroad. Compared with traditional multilayer ceramic capacitors, bondable multilayer ceramic capacitors mainly place their external electrodes on the upper and lower sides of the capacitor, so that one electrode can be mounted on the electric board and the other electrode can be bonded and assembled. This structure is mainly realized through the following methods.
一是在传统两端多层陶瓷电容器上进行改进,例如将电容器侧倒,使原来含有电极的两个侧面变成上下两面,或者将位于电容器两侧的外部电极分别继续延伸到上下两面,美国专利申请公开第US7791896B1号公开了这两种结构的多层陶瓷电容器。前者内部电极面积较少,有可能导致其电容量不高;后者需制成薄片,在制造过程及其后容易碎裂,从而出现故障。One is to improve on the traditional two-terminal multilayer ceramic capacitor, such as turning the capacitor sideways, so that the two sides that originally contained the electrodes become the upper and lower sides, or the external electrodes on both sides of the capacitor continue to extend to the upper and lower sides respectively, the United States Patent Application Publication No. US7791896B1 discloses multilayer ceramic capacitors of these two structures. The former has a small internal electrode area, which may lead to low capacitance; the latter needs to be made into thin sheets, which are prone to cracking during the manufacturing process and thereafter, resulting in failure.
二是对内部电极结构进行改进,通过各种方法改变内部电极结构,将其直接与上下两面的外部电极相连接。例如:美国专利申请公开第US7230815B1号公开了这种结构的可键合多层陶瓷电容器,该电容器中的第一和第二内电极分别都含有两个引出电极,并分别通过这些引出电极将其连接至上下外部电极。这种结构的电容器在层压或压缩过程中可能导致块体变形,从而引起切割缺陷,同时安装在电路板内部也容易碎化或裂化。三星电机株式会社申请的中国专利申请公开第CN 1832070号示出了一种高可靠性的可键合多层片形电容器,该电容器利用过孔将内部电极连接至外部电极,其碎裂比较少,但是,叠片过程中,过孔比较难以充分对准,因此,容易形成电极接触不良,不易做成小尺寸的电容器。The second is to improve the internal electrode structure, change the internal electrode structure by various methods, and directly connect it with the external electrodes on the upper and lower sides. For example: U.S. Patent Application Publication No. US7230815B1 discloses a bondable multilayer ceramic capacitor of this structure. The first and second internal electrodes in the capacitor contain two lead-out electrodes respectively, and are respectively connected to them by these lead-out electrodes. Connect to upper and lower external electrodes. Capacitors of this structure may cause block deformation during lamination or compression, causing cutting defects, and are also prone to chipping or cracking when mounted inside the circuit board. Chinese Patent Application Publication No. CN 1832070 filed by Samsung Electro-Mechanics Co., Ltd. shows a highly reliable bondable multilayer chip capacitor that utilizes vias to connect internal electrodes to external electrodes with relatively little chipping , However, in the lamination process, it is difficult to fully align the via holes, so it is easy to form poor electrode contact, and it is not easy to make a small-sized capacitor.
发明内容Contents of the invention
鉴于以上存在的问题,本发明所要解决的技术问题在于提供一种高可靠性、高电容量的可键合多层陶瓷电容器以及该可键合多层陶瓷电容器的制备方法。In view of the above problems, the technical problem to be solved by the present invention is to provide a bondable multilayer ceramic capacitor with high reliability and high capacitance and a method for preparing the bondable multilayer ceramic capacitor.
根据本发明的一方面,提供一种可键合多层陶瓷电容器,包括:多个陶瓷介电层;分别交替地形成在所述多个陶瓷介电层上的多个第一和第二内部电极;以及垂直穿过所述多个陶瓷介电层的第一类和第二类垂直过孔,所述第一类垂直过孔与所述第一内部电极的主电极相连接,并且所述第二类垂直过孔与所述第二内部电极的主电极相连接;所述第一类垂直过孔通向所述电容器的底部,与底部的外部电极相连接,并且所述第二类垂直过孔通向所述电容器的顶部,与顶部的外部电极相连接。According to an aspect of the present invention, there is provided a bondable multilayer ceramic capacitor, comprising: a plurality of ceramic dielectric layers; a plurality of first and second inner inner layers alternately formed on the plurality of ceramic dielectric layers; electrodes; and first and second types of vertical vias vertically passing through the plurality of ceramic dielectric layers, the first type of vertical vias is connected to the main electrode of the first internal electrode, and the The second type of vertical via hole is connected to the main electrode of the second internal electrode; the first type of vertical via hole leads to the bottom of the capacitor and is connected to the bottom external electrode, and the second type of vertical via hole Vias lead to the top of the capacitor to connect with the top external electrodes.
根据本发明的可键合多层陶瓷电容器,外部电极位于多层陶瓷电容器的上下位置,电容器被允许在基板内部进行安装,可经受较少碎裂,且可制作成小尺寸电容器。According to the bondable multilayer ceramic capacitor of the present invention, the external electrodes are located at upper and lower positions of the multilayer ceramic capacitor, the capacitor is allowed to be mounted inside the substrate, can withstand less chipping, and can be made into a small-sized capacitor.
在本发明中,也可以是,所述第一内部电极包括主电极和副电极,该主电极与副电极隔开预定距离;所述第二内部电极包括主电极和副电极,该主电极与副电极隔开预定距离。In the present invention, it is also possible that the first internal electrode includes a main electrode and a secondary electrode, and the main electrode is separated from the secondary electrode by a predetermined distance; the second internal electrode includes a main electrode and a secondary electrode, and the main electrode is separated from the secondary electrode. The sub electrodes are separated by a predetermined distance.
根据本发明,所述第一和第二内部电极的主电极和副电极不互相接触。According to the present invention, the primary and secondary electrodes of the first and second internal electrodes are not in contact with each other.
在本发明中,也可以是,所述第一类和第二类垂直过孔与第一和第二内部电极的连接是通过点与面接触的。In the present invention, it may also be that the connection between the first type and the second type of vertical via holes and the first and second internal electrodes is through point-to-surface contact.
在本发明垂直中,也可以是,所述第一和第二内部电极中的每个均分别具有两个或多个第一类和第二类通孔;其中,所述第一过孔通过所述第一和第二内部电极中的所述第一类通孔;所述第二类垂直过孔通过所述第一和第二内部电极中的所述第二类通孔;所述第一类和第二类垂直过孔分别与所述第一类和第二类通孔的内圆周相接触。In the aspect of the present invention, it may also be that each of the first and second internal electrodes has two or more through holes of the first type and the second type respectively; wherein, the first via holes pass through The first type of via holes in the first and second internal electrodes; the second type of vertical via holes passing through the second type of via holes in the first and second internal electrodes; the first type of vertical via holes in the first and second internal electrodes; The vertical via holes of the first type and the second type are respectively in contact with the inner circumferences of the through holes of the first type and the second type.
在本发明中,也可以是,所述第一类和第二类过孔与所述第一和第二内部电极的连接是通过点与面接触的。In the present invention, it may also be that the connection between the first type and the second type via holes and the first and second internal electrodes is through point-to-surface contact.
在本发明中,也可以是,所述第一类垂直过孔与第一内部电极的主电极的电极表面接触,与第二内部电极的副电极的电极表面接触;而第二类垂直过孔与第二内部电极的主电极的电极表面接触,与第一内部电极的副电极的电极表面接触。这种结构使得第一内部电极的主电极仅与第一类垂直过孔相连接,第二内部电极的主电极仅与第二类垂直过孔相连接。In the present invention, it may also be that the first type of vertical via hole is in contact with the electrode surface of the main electrode of the first internal electrode, and is in contact with the electrode surface of the secondary electrode of the second internal electrode; and the second type of vertical via hole In contact with the electrode surface of the main electrode of the second internal electrode, and in contact with the electrode surface of the secondary electrode of the first internal electrode. This structure makes the main electrode of the first internal electrode only connected to the first type of vertical via hole, and the main electrode of the second internal electrode is only connected to the second type of vertical via hole.
在本发明中,也可以是,可键合多层陶瓷电容器可进一步包括:上外部电极,即顶电极,形成在所述电容器的顶部;以及下外部电极,即底电极,形成在所述电容器的底部,其中,第一类垂直过孔将第一内部电极的主电极与所述下外部电极相连接,第二类垂直过孔将第二内部电极的主电极与所述上外部电极相连接。上外部电极及下外部电极为可与金丝、金带、铝丝或铜丝键合的金属层。In the present invention, it is also possible that the bondable multilayer ceramic capacitor may further include: an upper external electrode, namely a top electrode, formed on the top of the capacitor; and a lower external electrode, namely a bottom electrode, formed on the capacitor , wherein a first type of vertical via connects the main electrode of the first internal electrode with the lower external electrode, and a second type of vertical via connects the main electrode of the second internal electrode with the upper external electrode . The upper external electrode and the lower external electrode are metal layers that can be bonded to gold wire, gold ribbon, aluminum wire or copper wire.
在本发明中,也可以是,第一类垂直过孔通向下外部电极的部分与电路基板上的导电层相连接,并且第二类垂直过孔通向上外部电极的部分可在微组装中进行键合或与嵌入的印刷电路板的上导电层相连接。In the present invention, it is also possible that the part of the first type of vertical via hole leading to the lower external electrode is connected to the conductive layer on the circuit substrate, and the part of the second type of vertical via hole leading to the upper external electrode can be in the micro-assembly For bonding or connection to the upper conductive layer of the embedded printed circuit board.
根据本发明的实施例,可键合多层陶瓷电容器的厚度与长度和宽度的比率应当足够大,以确保电容器的可靠性。According to an embodiment of the present invention, the ratio of the thickness to the length and width of the bondable multilayer ceramic capacitor should be large enough to ensure the reliability of the capacitor.
本发明的另一方面提供了一种可键合多层陶瓷电容器的制备方法,该方法包括:采用溶剂为醇-酯混合溶剂的流延浆料制备陶瓷生带,切片,打孔,制备第一类、第二类陶瓷生片和第三类外电极陶瓷生片;通过在第一类陶瓷生片上形成两个或多个第一类和第二类垂直过孔,并且在第一类陶瓷生片上形成主电极和副电极而构成第一内部电极,主电极与副电极隔开预定距离,第一类和第二类垂直过孔分别用于引出第一内部电极的主电极和副电极;通过在第二类陶瓷生片上形成两个或多个第一类和第二类垂直过孔,并且在第二类陶瓷生片上形成主电极和副电极而构成第二内部电极,主电极与副电极隔开预定距离,第一类和第二类垂直过孔分别用于引出第二内部电极的副电极和主电极;通过在第三陶瓷生片上形成两个或多个第一类或第二类通孔,用于连接内部电极的第一类过孔或第二类垂直过孔;通过交替地层叠所述第一类陶瓷生片和第二类陶瓷生片,并在顶层和底层重叠第三陶瓷生片,从而形成陶瓷坯体,并烧结成陶瓷板。在陶瓷板底部和顶部形成上下外部电极,分别连接至所述第一类和第二类垂直过孔。Another aspect of the present invention provides a method for preparing a bondable multilayer ceramic capacitor, the method comprising: preparing a ceramic green tape with a casting slurry whose solvent is an alcohol-ester mixed solvent, slicing, punching holes, and preparing the second Type I, Type II ceramic green sheets and Type III external electrode ceramic green sheets; by forming two or more vertical via holes of the first type and the second type on the first type ceramic green sheets, and A main electrode and a secondary electrode are formed on the green sheet to form a first internal electrode, the main electrode and the secondary electrode are separated by a predetermined distance, and the first type and the second type of vertical via holes are respectively used to lead out the main electrode and the secondary electrode of the first internal electrode; The second inner electrode is constituted by forming two or more vertical via holes of the first type and the second type on the second type ceramic green sheet, and forming a main electrode and an auxiliary electrode on the second type ceramic green sheet, and the main electrode and the auxiliary electrode are formed on the second type ceramic green sheet. The electrodes are separated by a predetermined distance, and the first type and the second type of vertical via holes are respectively used to lead out the secondary electrode and the main electrode of the second internal electrode; by forming two or more first type or second type on the third ceramic green sheet The through hole is used to connect the first type of via hole or the second type of vertical via hole of the internal electrode; by alternately stacking the first type of ceramic green sheets and the second type of ceramic green sheets, and overlapping the first type of ceramic green sheets on the top layer and the bottom layer Three ceramic green sheets are formed to form a ceramic body and sintered into a ceramic plate. Upper and lower external electrodes are formed on the bottom and top of the ceramic board, respectively connected to the first type and the second type of vertical via holes.
在本发明中,也可以是,多个填满电极的所述第一类和第二类通孔分别相重叠形成所述第一类和第二类垂直过孔。In the present invention, it is also possible that a plurality of through holes of the first type and the second type filled with electrodes are respectively overlapped to form the vertical via holes of the first type and the second type.
根据本发明,电极之间的相互连接是通过点与面相对准,和点与点对准相比,可增加电极间的连接作用,同时,两个或多个第一和第二过孔也可提高电极间的连通性,使得多层陶瓷电容器内部不易发生断路,提高电容器的可靠性,可制备成小尺寸电容器。此外,本发明中的可键合多层陶瓷电容器中的面电极可与相邻的內电极间形成一个小电容,可提升单个电容器的电容量。According to the present invention, the mutual connection between the electrodes is through point-to-surface alignment, and compared with point-to-point alignment, the connection between electrodes can be increased. At the same time, two or more first and second via holes can also It can improve the connectivity between electrodes, make the multilayer ceramic capacitor less prone to open circuit, improve the reliability of the capacitor, and can be prepared into a small-sized capacitor. In addition, the surface electrodes in the bondable multilayer ceramic capacitor of the present invention can form a small capacitance with adjacent internal electrodes, which can increase the capacitance of a single capacitor.
通过结合附图的以下详细描述,本发明的上述和其它方面的特征与优点将更加显而易见。The features and advantages of the above and other aspects of the present invention will become more apparent from the following detailed description in conjunction with the accompanying drawings.
附图说明Description of drawings
图1示意性示出了根据本发明的一实施形态的可键合多层陶瓷电容器在x 方向、y方向上穿过过孔的截面图;FIG. 1 schematically shows a cross-sectional view of a bondable multilayer ceramic capacitor passing through a via hole in the x direction and the y direction according to an embodiment of the present invention;
图2a 至图2b 示出了根据本发明的该实施形态的可键合多层陶瓷电容器的第一和第二内电极的示意性结构立体图;2a to 2b show schematic perspective views of the structure of the first and second internal electrodes of the bondable multilayer ceramic capacitor according to this embodiment of the present invention;
图3a 至图3b 示出了根据本发明的该实施形态的可键合多层陶瓷电容器的顶部和底部的上下外部电极的示意性结构立体图。3a to 3b show schematic perspective views of the structure of the upper and lower external electrodes on the top and bottom of the bondable multilayer ceramic capacitor according to this embodiment of the present invention.
具体实施方式detailed description
以下将结合附图来详细描述本发明的优选实施形态,更确切地说,本发明可以被实施为许多不同形式并且不受本文所阐述的实施例限制。在整个说明书中,相同的或等同的元件以相同的附图标记标示。Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. More specifically, the present invention can be implemented in many different forms and is not limited by the embodiments described herein. Throughout the specification, the same or equivalent elements are marked with the same reference numerals.
图1示意性示出了根据本发明的一实施形态的可键合多层陶瓷电容器在x 方向、y方向上穿过过孔的截面图;图2a 至图2b 是示意性地示出了图1 的可键合多层陶瓷电容器的第一和第二内电极的结构的立体图;并且图3a 至图3b 是示意性地示出了图1 的可键合多层陶瓷电容器的顶部和底部的上下外部电极的结构的立体图。Fig. 1 schematically shows a cross-sectional view of a bondable multilayer ceramic capacitor passing through a via hole in the x direction and y direction according to an embodiment of the present invention; Fig. 2a to Fig. 2b schematically show 1 is a perspective view of the structure of the first and second internal electrodes of the bondable multilayer ceramic capacitor; and FIGS. 3a to 3b are schematic diagrams showing the top and bottom of the bondable multilayer ceramic capacitor A perspective view of the structure of the upper and lower external electrodes.
根据本发明的该实施形态,x 方向是指陶瓷体的长度方向,并且y 方向是指陶瓷体的宽度方向,z 方向(陶瓷体的厚度方向)是指以这样的方向堆叠内部电极,并且一个介电层介于所堆叠的相邻的内部电极之间。According to this embodiment of the present invention, the x direction refers to the length direction of the ceramic body, and the y direction refers to the width direction of the ceramic body, and the z direction (thickness direction of the ceramic body) refers to stacking internal electrodes in such a direction, and a A dielectric layer is interposed between adjacent stacked internal electrodes.
参照图1、图2a-图2b、及图3a-图3b,根据本发明的实施形态的可键合多层陶瓷电容器100 可包括介电层、第一和第二内部电极103 和104、第一类和第二类垂直过孔113 和114 、以及分别形成在电容器100 的顶部和底部的上下外电极101 和102 。Referring to Fig. 1, Fig. 2a-Fig. 2b, and Fig. 3a-Fig. Type one and type two vertical vias 113 and 114 , and upper and lower external electrodes 101 and 102 are formed on the top and bottom of capacitor 100 , respectively.
电容器100 的形状和尺寸没有特别的限制,可以制作高容量的可键合多层陶瓷电容器。The shape and size of the capacitor 100 are not particularly limited, and a high-capacity bondable multilayer ceramic capacitor can be fabricated.
电容器100 具有堆叠的多个介电层(参考图1、图2a-图2b、及图3a-图3b中的附图标记41、42、51和52),烧结所堆叠的介电层从而形成电容器器身。介电层41、42、51和52可通过烧结包括陶瓷粉末、醇-酯混合溶剂和有机粘接剂的陶瓷生片形成,本发明可采用的是具有X7R或X8R等温度特性的陶瓷粉末。The capacitor 100 has a plurality of dielectric layers stacked (refer to reference numerals 41, 42, 51 and 52 in FIGS. 1, 2a-2b, and 3a-3b), and the stacked dielectric layers are sintered to form capacitor body. Dielectric layers 41, 42, 51 and 52 can be formed by sintering ceramic green sheets including ceramic powder, alcohol-ester mixed solvent and organic binder. The present invention can use ceramic powder with temperature characteristics such as X7R or X8R.
如图1 所示,第一内部电极103 和第二内部电极104 分别形成在介电层41 和42上,并且交替地堆叠,从而形成电容器器身。第一内部电极103 和第二内部电极104具有相反的极性。As shown in FIG. 1, first internal electrodes 103 and second internal electrodes 104 are formed on the dielectric layers 41 and 42, respectively, and are stacked alternately, thereby forming a capacitor body. The first internal electrode 103 and the second internal electrode 104 have opposite polarities.
根据本发明的该实施形态,第一内部电极103 和第二内部电极104 可以包括导电金属,并且所述导电金属可以是银钯电极、镍电极等。According to this embodiment of the present invention, the first internal electrode 103 and the second internal electrode 104 may include a conductive metal, and the conductive metal may be a silver-palladium electrode, a nickel electrode, or the like.
如图2a所示,第一内部电极103 包括主电极103a 和副电极103b,如图2b所示,第二内部电极104 包括主电极104a 和副电极104b。此外,第一类和第二类垂直过孔113 和114 在电容器器身105中垂直地延伸。第一类垂直过孔113 与第一内部电极103 的主电极103a 和第二内部电极104 的副电极104b 相连接,第二类垂直过孔114 与第一内部电极103 的副电极103b 和第二内部电极104 的主电极104a 相连接。As shown in FIG. 2a, the first internal electrode 103 includes a main electrode 103a and a secondary electrode 103b, and as shown in FIG. 2b, the second internal electrode 104 includes a main electrode 104a and a secondary electrode 104b. In addition, the first and second types of vertical vias 113 and 114 extend vertically in the capacitor body 105 . The first type of vertical via hole 113 is connected to the main electrode 103a of the first internal electrode 103 and the secondary electrode 104b of the second internal electrode 104, and the second type of vertical via hole 114 is connected to the secondary electrode 103b of the first internal electrode 103 and the second The main electrodes 104a of the internal electrodes 104 are connected.
第一类和第二类垂直过孔113 和114 均能导电,导电金属可为银钯电极。第一类垂直过孔113 通向电容器100 的底部,与下外部电极102 相连接,第二类垂直过孔114 通向电容器100 的底部,与上外部电极101 相连接。Both the first type and the second type of vertical vias 113 and 114 can conduct electricity, and the conductive metal can be silver palladium electrodes. The first type of vertical vias 113 leads to the bottom of the capacitor 100 and is connected to the lower external electrode 102 , and the second type of vertical vias 114 leads to the bottom of the capacitor 100 and is connected to the upper external electrode 101 .
图2a 至图2b是示意性地示出了图1的可键合多层陶瓷电容器的第一和第二内部电极的结构的立体图。参考图2a 至图2b,第一内部电极103 和第二内部电极104 分别形成在介电层41 和42 上,并且第一内部电极103 和第二内部电极104 上均有两个第一类垂直过孔113 和第二类垂直过孔114 。2a to 2b are perspective views schematically illustrating structures of first and second internal electrodes of the bondable multilayer ceramic capacitor of FIG. 1 . 2a to 2b, the first internal electrode 103 and the second internal electrode 104 are respectively formed on the dielectric layer 41 and 42, and the first internal electrode 103 and the second internal electrode 104 each have two first type vertical vias 113 and the second type of vertical vias 114 .
如图2a 所示,阴影部分为第一内部电极103 。第一内部电极103 被分割成大小不等的两部分,面积较大的一部分为主电极103a,另一部分为副电极103b ,副电极103b 与主电极103a 隔开预定距离,第一类垂直过孔113 连接至所述第一内部电极103 的副电极103b,第二类垂直过孔114 连接至第一内部电极103 的主电极103a ,使得在第一内部电极103上,第二类垂直过孔114 不与第一类垂直过孔113 相连接。As shown in FIG. 2 a , the shaded part is the first internal electrode 103 . The first internal electrode 103 is divided into two parts of different sizes. The larger part is the main electrode 103a, and the other part is the secondary electrode 103b. The secondary electrode 103b is separated from the main electrode 103a by a predetermined distance. The first type of vertical via hole 113 is connected to the secondary electrode 103b of the first internal electrode 103, and the second type of vertical via hole 114 is connected to the main electrode 103a of the first internal electrode 103, so that on the first internal electrode 103, the second type of vertical via hole 114 Not connected to the first type of vertical via hole 113 .
如图2b 所示,阴影部分为第二内部电极104 。第二内部电极104 被分割成大小不等的两部分,面积较大的一部分为主电极104a,另一部分为副电极104b ,副电极104b 与主电极104a 隔开预定距离,第一类垂直过孔113 连接至第二内部电极104 的主电极104a,第二类垂直过孔114 连接至第二内部电极104 的副电极104b ,使得在第二内部电极104上,第二类垂直过孔114 不与第一类垂直过孔113 相连接。As shown in FIG. 2 b , the shaded part is the second internal electrode 104 . The second internal electrode 104 is divided into two parts of different sizes. The larger part is the main electrode 104a, and the other part is the secondary electrode 104b. The secondary electrode 104b is separated from the main electrode 104a by a predetermined distance. The first type of vertical via hole 113 is connected to the main electrode 104a of the second internal electrode 104, and the second type of vertical via hole 114 is connected to the secondary electrode 104b of the second internal electrode 104, so that on the second internal electrode 104, the second type of vertical via hole 114 is not connected with The first type of vertical vias 113 are connected.
第一内部电极103 和第二内部电极104 可采用丝网印刷形成在介电层上。The first internal electrodes 103 and the second internal electrodes 104 may be formed on the dielectric layer by screen printing.
图3a 至图3b 是示意性地示出了图1的可键合多层陶瓷电容器的上下外部电极的结构的立体图,阴影部分为外部电极。上下外电极101 和102 形成在介电层51 和52 上。3a to 3b are perspective views schematically showing the structure of the upper and lower external electrodes of the bondable multilayer ceramic capacitor in FIG. 1 , and the shaded parts are the external electrodes. Upper and lower external electrodes 101 and 102 are formed on the dielectric layers 51 and 52 .
由图3a 所示,上外部电极101 与第二类垂直过孔114 相连接,不与第一类垂直过孔113 相连接。As shown in FIG. 3 a , the upper external electrode 101 is connected to the second type of vertical via hole 114 and not connected to the first type of vertical via hole 113 .
由图3b 所示,下外部电极102 与第一类垂直过孔113 相连接,不与第二类垂直过孔114 相连接。As shown in FIG. 3 b , the lower external electrode 102 is connected to the vertical via hole 113 of the first type, and is not connected to the vertical via hole 114 of the second type.
上下外电极101 和102 可以包括导电金属,并且所述导电金属可以是银钯电极、金电极等能满足键合需要的金属。The upper and lower external electrodes 101 and 102 may include conductive metals, and the conductive metals may be silver palladium electrodes, gold electrodes and other metals that can meet the bonding requirements.
本发明另一方面提供上述嵌入式可键合多层陶瓷电容器的制备方法。Another aspect of the present invention provides a method for preparing the above-mentioned embedded bondable multilayer ceramic capacitor.
采用混有陶瓷粉末、醇-酯混合溶剂和有机粘接剂的流延浆料制备陶瓷生带,陶瓷粉末可包括具有X7R或X8R等温度特性的钛酸钡(BaTiO3)或钛酸钙(CaTiO3)等所有陶瓷电介质材料。The ceramic green belt is prepared by casting slurry mixed with ceramic powder, alcohol-ester mixed solvent and organic binder. The ceramic powder can include barium titanate (BaTiO 3 ) or calcium titanate ( CaTiO 3 ) and other ceramic dielectric materials.
对陶瓷生带进行切片,通过机械法或激光法对陶瓷生片进行打孔,制备第一类、第二类陶瓷生片和第三类外电极陶瓷生片。The ceramic green tape is sliced, and the ceramic green sheet is punched by a mechanical method or a laser method to prepare the first type, the second type ceramic green sheet and the third type external electrode ceramic green sheet.
采用丝网印刷、电镀、物理气相沉积、化学气相沉积等方法在陶瓷生片上形成电极,且电极材料可包括银钯电极、镍电极,铜电极、金电极等导电金属材料中的一种或若干种的组合。Electrodes are formed on ceramic green sheets by methods such as screen printing, electroplating, physical vapor deposition, and chemical vapor deposition, and the electrode materials can include one or more of conductive metal materials such as silver-palladium electrodes, nickel electrodes, copper electrodes, and gold electrodes. combination of species.
在第一类陶瓷生片上形成主电极和副电极而构成第一内部电极103 ,主电极与副电极隔开预定距离,第一类和第二类垂直过孔分别用于引出第一内部电极103的主电极103a 和副电极103b;在第二类陶瓷生片上形成主电极和副电极而构成第二内部电极104 ,主电极与副电极隔开预定距离,第一类和第二类垂直过孔分别用于引出第二内部电极的副电极104b 和主电极104a 。The main electrode and the auxiliary electrode are formed on the first type of ceramic green sheet to form the first internal electrode 103, the main electrode and the auxiliary electrode are separated by a predetermined distance, and the first type and the second type of vertical via holes are respectively used to lead out the first internal electrode 103 The main electrode 103a and the auxiliary electrode 103b; the main electrode and the auxiliary electrode are formed on the second type of ceramic green sheet to form the second internal electrode 104, the main electrode and the auxiliary electrode are separated by a predetermined distance, the first type and the second type of vertical via holes They are respectively used to lead out the secondary electrode 104b and the main electrode 104a of the second internal electrode.
通过交替地层叠所述第一类陶瓷生片和第二类陶瓷生片,并在顶层和底层重叠第三陶瓷生片,从而形成陶瓷坯体,并烧结成陶瓷板。在陶瓷板底部和顶部形成上下外部电极,分别连接至所述第一类和第二类垂直过孔。A ceramic green body is formed by alternately stacking the first-type ceramic green sheets and the second-type ceramic green sheets, and overlapping the third ceramic green sheets on the top layer and the bottom layer, and is sintered into a ceramic plate. Upper and lower external electrodes are formed on the bottom and top of the ceramic board, respectively connected to the first type and the second type of vertical via holes.
多个填满电极的所述第一类和第二类通孔分别相重叠形成所述第一类和第二类垂直过孔。A plurality of through holes of the first type and the second type filled with electrodes overlap to form the vertical via holes of the first type and the second type respectively.
下面进一步举例实施例以详细说明本发明,同样应理解,以下实施例只用于对本发明进行进一步说明,不能理解为对本发明保护范围的限制,本领域的技术人员根据本发明的上述内容作出的一些非本质的改进和调整均属于本发明的保护范围。Examples are further given below to describe the present invention in detail. It should also be understood that the following examples are only used to further illustrate the present invention, and cannot be interpreted as limiting the protection scope of the present invention. Those skilled in the art make according to the above-mentioned content of the present invention Some non-essential improvements and adjustments all belong to the protection scope of the present invention.
作为实施例1,可以包括以下步骤。As Embodiment 1, the following steps may be included.
(1)按流延浆料体系中的各相配比,称取商业化的具有X7R温度特性的钛酸钡(BaTiO3)陶瓷粉末、加入醇-酯混合溶剂、分散剂、粘结剂和增塑剂进行一次性球磨,经真空脱泡后,流延成型,得到所述嵌入式多层陶瓷电容器的低温共烧陶瓷生带材料。(1) According to the ratio of each phase in the casting slurry system, weigh commercial barium titanate (BaTiO 3 ) ceramic powder with X7R temperature characteristics, add alcohol-ester mixed solvent, dispersant, binder and The plasticizer is subjected to one-time ball milling, vacuum defoaming, and tape casting to obtain the low-temperature co-fired ceramic green tape material of the embedded multilayer ceramic capacitor.
(2)采用本发明的制备方法制得的成卷LTCC 生带表面平整,厚度均匀。(2) The rolled LTCC raw tape prepared by the preparation method of the present invention has smooth surface and uniform thickness.
(3)将制备好的成卷LTCC 生带材料切成大小相同的单层LTCC 生片,并进行打孔,制备第一类陶瓷生片,第二类陶瓷生片,第三类外电极陶瓷生片。(3) Cut the prepared rolled LTCC green tape material into single-layer LTCC green sheets of the same size, and punch holes to prepare the first type of ceramic green sheet, the second type of ceramic green sheet, and the third type of external electrode ceramics Raw film.
(4)按照图2a-图2b、及图3a-图3b所设计图案准备填孔网版,内电极网版。通过丝网印刷先对陶瓷生片进行填孔,并印刷电极图案。(4) According to the design patterns in Figure 2a-Figure 2b and Figure 3a-Figure 3b, prepare the hole-filling screen and the internal electrode screen. The ceramic green sheet is firstly filled with holes by screen printing, and electrode patterns are printed.
(5)对陶瓷生片进行定位叠层。(5) Positioning and lamination of ceramic green sheets.
(6)对陶瓷生片印刷上下面电极。采用热等静压成型,然后切割成单个电容器。将陶瓷生片合成板放入马弗炉中,排塑,烧结,即可得到可键合多层陶瓷电容器。(6) Print the upper and lower electrodes on the ceramic green sheet. Formed by hot isostatic pressing and then cut into individual capacitors. Put the composite board of ceramic green sheets into a muffle furnace, discharge the plastic, and sinter to obtain a bondable multilayer ceramic capacitor.
作为实施例2,可以包括以下步骤。As Embodiment 2, the following steps may be included.
(1)该可键合多层陶瓷电容器制备过程中的浆料配制、流延、打孔、丝网印刷、叠片流程与示例1中前5个步骤相同。(1) The slurry preparation, casting, punching, screen printing, and stacking processes in the preparation process of the bondable multilayer ceramic capacitor are the same as the first five steps in Example 1.
(2)对陶瓷生片采用热等静压成型,切割成大片陶瓷坯体,每片中含有多个多层陶瓷电容器坯体。将大片陶瓷坯体放入马弗炉中,排塑,烧结,平复。(2) The ceramic green sheet is formed by hot isostatic pressing, and cut into large pieces of ceramic green bodies, each of which contains multiple multilayer ceramic capacitor green bodies. Put the large piece of ceramic body into the muffle furnace, discharge the plastic, sinter and calm down.
(3)对烧结后的大片陶瓷烧结体进行表面金属化,并切割,即可得到可键合多层陶瓷电容器。(3) Metallize the surface of the sintered large ceramic sintered body and cut it to obtain a bondable multilayer ceramic capacitor.
本发明采用低温共烧陶瓷(LTCC)技术来制备可键合多层陶瓷电容器,产品可控性高,重复性好,成本较低,适合规模生产。所制备的可键合多层陶瓷电容器具有顶部-底部电极结构的小尺寸电容器,可用于微组装键合工艺,也可以在多层印制电路板(PCB)中作为嵌入式电容器使用,从而减少电路板上所占的空间。可键合多层陶瓷电容器的厚度与长度和宽度的比率应当足够大,使其即使是在印刷电路板弯曲的情况下,也不被碎裂。另外,该可键合多层陶瓷电容器中的面电极可与相邻的內电极间形成一个小电容,可提升单个电容器的电容量。The invention adopts low-temperature co-firing ceramics (LTCC) technology to prepare bondable multilayer ceramic capacitors, and the product has high controllability, good repeatability, low cost and is suitable for large-scale production. The prepared bondable multilayer ceramic capacitor has a small size capacitor with top-bottom electrode structure, which can be used in micro-assembly bonding process, and can also be used as an embedded capacitor in a multilayer printed circuit board (PCB), thereby reducing The space occupied on the circuit board. The ratio of thickness to length and width of a bondable multilayer ceramic capacitor should be large enough that it will not chip even if the printed circuit board is flexed. In addition, the surface electrodes in the bondable multilayer ceramic capacitor can form a small capacitor with adjacent internal electrodes, which can increase the capacitance of a single capacitor.
在不脱离本发明的基本特征的宗旨下,本发明可体现为多种形式,因此本发明中的实施形态是用于说明而非限制,由于本发明的范围由权利要求限定而非由说明书限定,而且落在权利要求界定的范围,或其界定的范围的等价范围内的所有变化都应理解为包括在权利要求书中。The present invention can be embodied in various forms without departing from the essential characteristics of the present invention, so the embodiments in the present invention are for illustration rather than limitation, because the scope of the present invention is defined by the claims rather than by the description , and all changes within the range defined in the claims, or within the range equivalent to the range defined in the claims, should be construed as being included in the claims.
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CN1832070A (en) * | 2005-03-07 | 2006-09-13 | 三星电机株式会社 | Embedded multilayer chip capacitor and printed circuit board having same |
CN1937123A (en) * | 2005-09-21 | 2007-03-28 | Tdk株式会社 | Laminated capacitor and manufacturing method thereof |
CN101502191A (en) * | 2007-10-18 | 2009-08-05 | 揖斐电株式会社 | Wiring board and its manufacturing method |
CN101930846A (en) * | 2009-06-22 | 2010-12-29 | 财团法人工业技术研究院 | Multilayer capacitor and method for manufacturing the same |
CN102956353A (en) * | 2011-08-10 | 2013-03-06 | 株式会社村田制作所 | Chip-component structure and method of producing same |
CN104637680A (en) * | 2013-11-06 | 2015-05-20 | 三星电机株式会社 | Multilayer ceramic capacitor |
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