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CN104854721A - Photoelectric conversion element - Google Patents

Photoelectric conversion element Download PDF

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CN104854721A
CN104854721A CN201380063670.1A CN201380063670A CN104854721A CN 104854721 A CN104854721 A CN 104854721A CN 201380063670 A CN201380063670 A CN 201380063670A CN 104854721 A CN104854721 A CN 104854721A
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photoelectric conversion
electrode layer
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conversion element
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森浦祐太
石本仁
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Panasonic Intellectual Property Management Co Ltd
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    • HELECTRICITY
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    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80Constructional details
    • H10K30/81Electrodes
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    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/70Surface textures, e.g. pyramid structures
    • H10F77/707Surface textures, e.g. pyramid structures of the substrates or of layers on substrates, e.g. textured ITO layer on a glass substrate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80Constructional details
    • H10K30/87Light-trapping means
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/82Cathodes
    • H10K50/822Cathodes characterised by their shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/113Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
    • H10K85/1135Polyethylene dioxythiophene [PEDOT]; Derivatives thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/114Poly-phenylenevinylene; Derivatives thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/115Polyfluorene; Derivatives thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
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    • Y02E10/549Organic PV cells

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  • Optics & Photonics (AREA)
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Abstract

光电转换元件具有第一电极层、光电转换层以及第二电极层。第一电极层包括第一基材和形成在该第一基材上的粗膜层。光电转换层形成在粗膜层上,第二电极层形成在光电转换层上。粗膜层由在第一基材的表面不规则地连接的多个金属微粒构成,光电转换层进入构成粗膜层的多个金属微粒之间。

The photoelectric conversion element has a first electrode layer, a photoelectric conversion layer, and a second electrode layer. The first electrode layer includes a first base material and a coarse film layer formed on the first base material. The photoelectric conversion layer is formed on the coarse film layer, and the second electrode layer is formed on the photoelectric conversion layer. The rough film layer is composed of a plurality of metal fine particles irregularly connected on the surface of the first base material, and the photoelectric conversion layer enters between the plurality of metal fine particles constituting the rough film layer.

Description

光电转换元件Photoelectric conversion element

技术领域technical field

本发明涉及光电转换元件。The present invention relates to a photoelectric conversion element.

背景技术Background technique

为了有效利用可再生能源,利用了光伏效应的技术开发变得越来越重要。这种技术开发的结果是不断进行光电转换元件的改良。光电转换元件包括将光转换为电能的发电型元件、以及相反将电能转换为光的发光型元件。这两者具有基本相同的构造,根据在电极间配置的层使用光电转换材料还是使用发光材料,前者为发电型元件,后者为发光型元件。In order to effectively utilize renewable energy, the development of technologies utilizing the photovoltaic effect is becoming more and more important. As a result of this technological development, improvements in photoelectric conversion elements have continued. The photoelectric conversion element includes a power generation type element that converts light into electrical energy, and a light emitting type element that converts electrical energy into light conversely. Both have basically the same structure, and depending on whether a photoelectric conversion material or a light-emitting material is used for a layer arranged between electrodes, the former is a power-generating element and the latter is a light-emitting element.

作为前者,代表性的元件是太阳能电池,作为后者,代表性的元件是发光二极管。太阳能电池存在无机系太阳能电池和有机系太阳能电池。作为无机系太阳能电池,有利用硅制造的晶体(多晶)硅太阳能电池、非晶硅太阳能电池、使用了化合物半导体的CIGS(Copper Indium GalliumDiSelenide,铜铟镓二硒)太阳能电池等。并且,随着市场的扩大,需要低价格且高性能的太阳能电池。另外,作为有机系太阳能电池,存在有机薄膜太阳能电池。这种太阳能电池以染料、聚合物为原料,因此材料的费用较低。另外,由于能够使用涂布等的印刷技术,所以制造工序容易,能够进行大幅的低成本化以及大面积化。As the former, a typical element is a solar cell, and as the latter, a typical element is a light emitting diode. Solar cells include inorganic solar cells and organic solar cells. As inorganic solar cells, there are crystalline (polycrystalline) silicon solar cells made of silicon, amorphous silicon solar cells, and CIGS (Copper Indium Gallium DiSelenide, Copper Indium Gallium DiSelenide) solar cells using compound semiconductors. And, as the market expands, low-cost and high-performance solar cells are required. In addition, organic thin-film solar cells exist as organic solar cells. This solar cell uses dyes and polymers as raw materials, so the cost of materials is relatively low. In addition, since a printing technique such as coating can be used, the manufacturing process is easy, and significant cost reduction and area enlargement are possible.

通过对作为给体材料的p型半导体和作为受体材料的n型半导体进行混合并形成本体异质层,从而能够提高有机薄膜太阳能电池的转换效率。尤其是,最好增加P-N结界面。By mixing a p-type semiconductor as a donor material and an n-type semiconductor as an acceptor material to form a bulk heterogeneous layer, the conversion efficiency of an organic thin film solar cell can be improved. Especially, it is better to increase the P-N junction interface.

图5是现有的光电转换元件(将光转换为电能的类型)的剖视图。该光电转换元件具有基材11、在基材11上形成的第一电极层13、光电转换层14、以及第二电极层17。另外,为了提高转换效率,还在积极开发使第一电极层13的表面积扩大的方法、以及利用表面等离子体效应提高效率的方法。Fig. 5 is a cross-sectional view of a conventional photoelectric conversion element (the type that converts light into electric energy). This photoelectric conversion element has a substrate 11 , a first electrode layer 13 formed on the substrate 11 , a photoelectric conversion layer 14 , and a second electrode layer 17 . In addition, in order to improve conversion efficiency, a method of enlarging the surface area of the first electrode layer 13 and a method of improving efficiency by utilizing the surface plasmon effect are being actively developed.

另一方面,对于作为一种发光二极管的有机EL元件而言,为了提高性能,正在积极进行如下研究,即:通过在电极表面形成凹凸从而提高电子注入效率的研究;利用与表面等离子体的共振使电极与临近的发光体相互作用从而增强发光效率的研究。On the other hand, in order to improve the performance of the organic EL element, which is a kind of light-emitting diode, the following researches are being actively carried out: research on improving the electron injection efficiency by forming unevenness on the electrode surface; The study of enhancing luminous efficiency by interacting electrodes with adjacent light emitters.

此外,作为与本发明相关的现有技术文献信息,例如已知专利文献1~3和非专利文献1、2。In addition, Patent Documents 1 to 3 and Non-Patent Documents 1 and 2 are known as prior art document information related to the present invention, for example.

现有技术文献prior art literature

专利文献patent documents

专利文献1:日本特开2006-245074号公报Patent Document 1: Japanese Patent Laid-Open No. 2006-245074

专利文献2:日本特开2005-310388号公报Patent Document 2: Japanese Patent Laid-Open No. 2005-310388

专利文献3:日本特开昭59-198781号公报Patent Document 3: Japanese Patent Application Laid-Open No. 59-198781

非专利文献non-patent literature

非专利文献1:J.Phys.Chem.C 2007,111,7218-7223Non-Patent Document 1: J.Phys.Chem.C 2007, 111, 7218-7223

非专利文献2:Appl.Phys.Lett.96,043307(2010)Non-Patent Document 2: Appl. Phys. Lett. 96, 043307 (2010)

发明内容Contents of the invention

本发明的光电转换元件具有第一电极层、光电转换层以及第二电极层。第一电极层包括第一基材和在该第一基材上形成的粗膜层。光电转换层形成在粗膜层上,第二电极层形成在光电转换层上。粗膜层由在第一基材的表面不规则地连接的多个金属微粒构成,光电转换层进入由多个金属微粒形成的连结体之间。The photoelectric conversion element of the present invention has a first electrode layer, a photoelectric conversion layer, and a second electrode layer. The first electrode layer includes a first substrate and a coarse film layer formed on the first substrate. The photoelectric conversion layer is formed on the coarse film layer, and the second electrode layer is formed on the photoelectric conversion layer. The rough film layer is composed of a plurality of metal fine particles irregularly connected on the surface of the first base material, and the photoelectric conversion layer enters between the junctions formed of the plurality of metal fine particles.

根据该结构,光电转换元件的电极面积增大,能够提高电极本身、电极与基材的界面的机械强度。另外,通过使金属粒子形成薄的粗膜,从而控制表面等离子体效应,能够提高特性。According to this structure, the electrode area of the photoelectric conversion element increases, and the mechanical strength of the electrode itself and the interface between the electrode and the substrate can be improved. In addition, by forming the metal particles into a thin rough film, the surface plasmon effect can be controlled and the characteristics can be improved.

附图说明Description of drawings

图1是本发明的实施方式1的光电转换元件的示意剖视图。FIG. 1 is a schematic cross-sectional view of a photoelectric conversion element according to Embodiment 1 of the present invention.

图2是本发明的实施方式1的其他光电转换元件的示意剖视图。2 is a schematic cross-sectional view of another photoelectric conversion element according to Embodiment 1 of the present invention.

图3是本发明的实施方式2的光电转换元件的示意剖视图。3 is a schematic cross-sectional view of a photoelectric conversion element according to Embodiment 2 of the present invention.

图4是本发明的实施方式3的光电转换元件的示意剖视图。4 is a schematic cross-sectional view of a photoelectric conversion element according to Embodiment 3 of the present invention.

图5是现有的光电转换元件的示意剖视图。Fig. 5 is a schematic cross-sectional view of a conventional photoelectric conversion element.

具体实施方式Detailed ways

在进行本发明的实施方式的说明之前,对现有的光电转换元件中的问题进行说明。在形成图5所示的现有的光电转换元件的情况下,从作为透明电极层的第二电极层17起,依次形成光电转换层14、作为对置电极的第一电极层13。Before describing the embodiments of the present invention, problems in conventional photoelectric conversion elements will be described. When forming the conventional photoelectric conversion element shown in FIG. 5 , the photoelectric conversion layer 14 and the first electrode layer 13 as a counter electrode are formed sequentially from the second electrode layer 17 as a transparent electrode layer.

根据非专利文献1,为了提高转换效率,对于用于入射以及发光的每面积的第一电极层13,最好增大其表面积(面积扩大化)。第一电极层13形成在基材11上,因而一般需要在基材11上对氧化物等进行高温处理。为此,基材11的种类受到限定。因此,作为基材11使用柔性衬底,进行面积扩大化而形成第一电极层13时存在问题。According to Non-Patent Document 1, in order to improve the conversion efficiency, it is desirable to increase the surface area (enlargement of the area) per area of the first electrode layer 13 for incident and light emission. The first electrode layer 13 is formed on the base material 11 , so it is generally necessary to perform high temperature treatment on the base material 11 such as oxides. For this reason, the type of base material 11 is limited. Therefore, there is a problem in forming the first electrode layer 13 by enlarging the area using a flexible substrate as the base material 11 .

专利文献3中记载有,利用蒸镀在电极层的与光电转换层相接的面处形成微小的凹凸。但是,该蒸镀是复杂的工序,并且存在各种限制。另外,如专利文献3所示,在以岛状形成凹凸的构造中,难以进一步进行面积扩大化。Patent Document 3 describes that fine unevenness is formed on the surface of the electrode layer in contact with the photoelectric conversion layer by vapor deposition. However, this vapor deposition is a complicated process and has various limitations. In addition, as shown in Patent Document 3, it is difficult to further enlarge the area in the structure in which the unevenness is formed in an island shape.

在非专利文献1、非专利文献2中,作为第一电极层13形成有氧化物。在这种情况下,电极层自身的机械强度、电极层与基材的界面的机械强度较小。In Non-Patent Document 1 and Non-Patent Document 2, an oxide is formed as the first electrode layer 13 . In this case, the mechanical strength of the electrode layer itself and the mechanical strength of the interface between the electrode layer and the substrate are small.

如以上所示,现有的光电转换元件难以在对第一电极层进行面积扩大化的同时得到足够的机械强度。尤其是,在柔性衬底上形成光电转换元件的情况下,这些问题较为显著。As described above, it is difficult to obtain sufficient mechanical strength while enlarging the area of the first electrode layer in conventional photoelectric conversion elements. In particular, these problems are conspicuous in the case of forming a photoelectric conversion element on a flexible substrate.

下面,参照附图,说明基于本发明的实施方式的光电转换元件,该光电转换元件对电极进行面积扩大化,减少表面等离子体吸收或者表面等离子体损失,并且提高电极本身的机械强度、电极与基材的界面的机械强度。此外,对于构成与先说明的实施方式相同的结构的部件,标注相同的参照符号进行说明,有时省略详细的说明。Next, with reference to the drawings, a photoelectric conversion element according to an embodiment of the present invention will be described. The photoelectric conversion element enlarges the area of the electrode, reduces surface plasmon absorption or surface plasmon loss, and improves the mechanical strength of the electrode itself, and the electrode and the surface plasmon. The mechanical strength of the interface of the substrate. In addition, components having the same configuration as those in the previously described embodiment are described with the same reference numerals, and detailed description may be omitted.

(实施方式1)(Embodiment 1)

图1是基于本发明的实施方式1的光电转换元件31的示意剖视图。光电转换元件(以下称为元件)31具有:导电性的第一电极层3、光电转换层(以下称为转换层)4、以及第二电极层7。第一电极层3包括具有导电性的第一基材1、以及在第一基材1上形成的粗膜层2。转换层4形成在粗膜层2上,以覆盖第一基材1的表面整体。在转换层4上形成有第二电极层7。元件31能够将光转换为电能。FIG. 1 is a schematic cross-sectional view of a photoelectric conversion element 31 according to Embodiment 1 of the present invention. A photoelectric conversion element (hereinafter referred to as an element) 31 has a conductive first electrode layer 3 , a photoelectric conversion layer (hereinafter referred to as a conversion layer) 4 , and a second electrode layer 7 . The first electrode layer 3 includes a conductive first substrate 1 and a coarse film layer 2 formed on the first substrate 1 . The conversion layer 4 is formed on the coarse film layer 2 so as to cover the entire surface of the first substrate 1 . A second electrode layer 7 is formed on the conversion layer 4 . Element 31 is capable of converting light into electrical energy.

粗膜层2由不规则地连接的多个金属微粒2a连接在第一基材1的表面而构成。另外,在单独取出第一电极层3的情况下,粗膜层2在内部具有很多空孔。因此,转换层4进入由多个金属微粒2a形成的连结体2b之间。第二电极层7由形成在转换层4上的导电层5、以及形成在导电层5之上的第二基材6构成。The rough film layer 2 is composed of a plurality of irregularly connected metal particles 2 a connected to the surface of the first substrate 1 . In addition, when the first electrode layer 3 is taken out alone, the rough film layer 2 has many pores inside. Therefore, the conversion layer 4 enters between the connected bodies 2b formed of the plurality of metal fine particles 2a. The second electrode layer 7 is composed of a conductive layer 5 formed on the conversion layer 4 and a second base material 6 formed on the conductive layer 5 .

在元件31中,若光射入第二电极层7,则在转换层4内产生空穴(hole)和电子。空穴在转换层4的膜厚方向移动而从导电层5被取出,电子从第一电极层3被取出。In the element 31 , when light enters the second electrode layer 7 , holes (holes) and electrons are generated in the conversion layer 4 . Holes move in the film thickness direction of conversion layer 4 and are extracted from conductive layer 5 , and electrons are extracted from first electrode layer 3 .

下面,对这种元件31的各结构进行说明。首先对第一电极层3进行说明。如上所述,第一电极层3承担用于取出由转换层4产生的电子的电极(电子取出电极)的任务。由于光射入第二电极层7,所以第一电极层3无须一定透明。Each structure of such an element 31 will be described below. First, the first electrode layer 3 will be described. As described above, the first electrode layer 3 assumes the role of an electrode (electron extraction electrode) for extracting electrons generated by the conversion layer 4 . Since light enters the second electrode layer 7, the first electrode layer 3 does not have to be transparent.

粗膜层2由多个连结体2b构成,该多个连结体2b形成为多个金属微粒2a不规则地连接并且从第一基材1的表面伸出。连结体2b是分支为多个枝并且不具有锐角部分的构造体。因此,如上所述,在单独取出第一电极层3的情况下,粗膜层2在内部具有很多空孔。这些空孔与外部连通,因此通过这些空孔使表面积变大。Coarse film layer 2 is composed of a plurality of connected bodies 2 b formed such that a plurality of metal microparticles 2 a are irregularly connected and protrude from the surface of first base material 1 . The connection body 2b is a structure branched into a plurality of branches and does not have an acute-angled portion. Therefore, as described above, when the first electrode layer 3 is taken out alone, the coarse film layer 2 has many voids inside. These pores communicate with the outside, so the surface area is increased by these pores.

此外,连结体2b既可以重叠基本相同的粒径的金属微粒2a而形成,也可以随机层叠粒径不同的金属微粒2a而形成。或者,可以在根基部分配置粒径大的金属微粒2a,在顶端部分配置粒径小的金属微粒2a。利用这种结构,能够提高金属微粒2a与第一基材1的紧贴性,并且维持较大的表面积。In addition, the connected body 2b may be formed by stacking metal fine particles 2a having substantially the same particle diameter, or may be formed by stacking metal fine particles 2a with different particle diameters at random. Alternatively, metal fine particles 2a with a large particle diameter may be arranged at the root portion, and metal fine particles 2a with a small particle diameter may be arranged at the tip portion. With such a structure, the adhesion between the metal fine particles 2a and the first substrate 1 can be improved while maintaining a large surface area.

例如,第一基材1是厚度为10~50μm的高纯度铝箔,金属微粒2a的主要成分也是铝。此外,第一基材1以及金属微粒2a能够由铝合金、金、银、铜、钛、铌、钽等各种金属形成。不过,第一基材1以及金属微粒2a中的任一者优选用熔点较低的铝构成。通过用铝构成粗膜层2,在用例如蒸镀法进行制作的情况下生产率较为优越。For example, the first substrate 1 is a high-purity aluminum foil with a thickness of 10 to 50 μm, and the main component of the metal particles 2 a is also aluminum. In addition, the first base material 1 and the metal fine particles 2a can be formed of various metals such as aluminum alloy, gold, silver, copper, titanium, niobium, and tantalum. However, either of the first base material 1 and the metal fine particles 2a is preferably made of aluminum having a relatively low melting point. By constituting the rough film layer 2 with aluminum, productivity is excellent when producing it by, for example, a vapor deposition method.

第一基材1可以是导电性高分子薄膜、或者透明导电性玻璃等。还可以是在绝缘物上设置了具有导电性的膜的基材。即,第一基材1只要是具有导电性的基材材料即可。The first substrate 1 may be a conductive polymer film, or transparent conductive glass, or the like. It may also be a substrate provided with a conductive film on an insulator. That is, the first base material 1 may be any base material as long as it has conductivity.

另外,粗膜层2和第一基材1的主要成分可以不同,但优选采用相同的金属。通过选择这种材料,能够利用蒸镀时的热使第一基材1适度软化,在维持第一基材1的形状的同时增强第一基材1与金属微粒2a的结合。In addition, the main components of the rough film layer 2 and the first base material 1 may be different, but the same metal is preferably used. By selecting such a material, the first base material 1 can be moderately softened by the heat during vapor deposition, and the bond between the first base material 1 and the metal fine particles 2 a can be strengthened while maintaining the shape of the first base material 1 .

如上所述,第一基材1优选具有导电性。但是,第一基材1也可以仅仅作为支撑粗膜层2的基材起作用。在此情况下,第一基材1可以不具有导电性。在该结构中,粗膜层2承担第一电极层的导电功能。As described above, the first base material 1 preferably has electrical conductivity. However, the first base material 1 may function only as a base material supporting the coarse film layer 2 . In this case, the first base material 1 may not have conductivity. In this structure, the coarse film layer 2 assumes the conductive function of the first electrode layer.

粗膜层2能够通过以下过程形成。Coarse film layer 2 can be formed through the following procedure.

(1)将第一基材1配置在蒸镀槽内,保持0.01~0.001Pa的真空状态。(1) The first base material 1 is arranged in a vapor deposition tank, and a vacuum state of 0.01 to 0.001 Pa is maintained.

(2)在第一基材1的周边,流入氩气的流量相对于氧气为2~6倍的惰性气体,使第一基材1的周边的压力为10~30Pa的状态。(2) In the periphery of the first base material 1 , an inert gas whose flow rate is 2 to 6 times that of oxygen is flowed into the argon gas so that the pressure around the first base material 1 is 10 to 30 Pa.

(3)将第一基材1的温度保持在150~300℃的范围。(3) The temperature of the first base material 1 is kept in the range of 150 to 300°C.

(4)在将铝配设于蒸镀源的状态下,利用真空蒸镀形成粗膜层2。(4) The rough film layer 2 is formed by vacuum vapor deposition in a state where aluminum is disposed on the vapor deposition source.

此外,在上述工序(2)中,也可以在不流入氧气以及氩气的情况下进行蒸镀。In addition, in the above-mentioned step (2), vapor deposition may be performed without flowing oxygen gas and argon gas.

通过以上工艺能够形成粗膜层2。粗膜层2的厚度例如优选为5nm以上且10.0μm以下。通过使粗膜层2的厚度为5nm以上,能够增大第一电极层3的表面积。另外,在粗膜层2极其薄的情况下,薄层电阻变得过大。通过使粗膜层2的厚度为10.0μm以下,射入第二基材6的光容易到达转换层4。The rough film layer 2 can be formed through the above process. The thickness of the rough film layer 2 is preferably, for example, not less than 5 nm and not more than 10.0 μm. The surface area of the first electrode layer 3 can be increased by setting the thickness of the rough film layer 2 to be 5 nm or more. In addition, when the rough film layer 2 is extremely thin, the sheet resistance becomes too large. When the thickness of the rough film layer 2 is 10.0 μm or less, the light incident on the second base material 6 can easily reach the conversion layer 4 .

此外,在以上说明中,作为形成粗膜层2的工艺,举出了蒸镀的例子,但只要能够形成将多个金属微粒2a相连、在各个金属微粒2a之间形成了间隙的稀疏构造体,也可以使用蒸镀以外的方法。例如,可以对第一基材1的表面进行蚀刻处理而形成粗膜层2。In addition, in the above description, an example of vapor deposition was given as a process for forming the rough film layer 2, but as long as a sparse structure in which a plurality of metal fine particles 2a are connected and gaps are formed between the respective metal fine particles 2a can be formed, , methods other than vapor deposition can also be used. For example, the rough film layer 2 may be formed by etching the surface of the first base material 1 .

金属微粒2a的平均粒子直径优选为5nm以上且300nm以下,例如约为100nm。即,金属微粒2a的直径的众数为5nm以上且300nm以下。在平均粒子直径不足5nm的情况下,有时金属微粒2a的连接部分极细,机械强度变弱。另外,若平均粒子直径超过300nm,则难以增大表面积。此外,为了保持机械强度,金属微粒2a的连接部分的直径优选为金属微粒2a的粒子直径的30%以上。The average particle diameter of the metal fine particles 2 a is preferably not less than 5 nm and not more than 300 nm, for example, about 100 nm. That is, the mode of the diameter of the metal fine particle 2a is 5 nm or more and 300 nm or less. When the average particle diameter is less than 5 nm, the connecting portion of the metal microparticles 2a may be extremely thin, and the mechanical strength may be weakened. In addition, when the average particle diameter exceeds 300 nm, it becomes difficult to increase the surface area. In addition, in order to maintain mechanical strength, the diameter of the connection portion of the metal fine particles 2a is preferably 30% or more of the particle diameter of the metal fine particles 2a.

另外,在第一基材1单独的状态下,粗膜层2的空孔直径的众数优选为5nm以上且1μm以下。以此方式,粗膜层2的空孔直径优选极其微小。粗膜层2的空孔直径能够使用水银压入法根据式(1)求出。In addition, in the state of the first substrate 1 alone, the mode of the pore diameter of the coarse film layer 2 is preferably 5 nm or more and 1 μm or less. In this way, the pore diameter of the coarse film layer 2 is preferably extremely small. The pore diameter of the coarse film layer 2 can be obtained from the formula (1) using the mercury intrusion porosimetry.

D=-4γcosθ/P   (1)D=-4γcosθ/P (1)

P是为了将水银填充到空孔内而施加的压力,D是空孔直径(直径)、γ是水银的表面张力(480dyne·cm-1),θ是水银和细孔壁面的接触角。空孔直径的众数是空孔直径D的分布的峰值。P is the pressure applied to fill the pores with mercury, D is the pore diameter (diameter), γ is the surface tension of mercury (480 dyne·cm -1 ), and θ is the contact angle between mercury and the pore wall. The mode of the pore diameter is the peak value of the distribution of the pore diameter D.

另外,在第一基材1单独的状态下,粗膜层2的空隙率为50%~80%左右。通过基于粗膜层2的重量、体积和蒸镀材料的真密度进行计算,从而能够求出空隙率。In addition, in the state of the first base material 1 alone, the porosity of the rough film layer 2 is about 50% to 80%. The porosity can be obtained by calculation based on the weight and volume of the rough film layer 2 and the true density of the vapor deposition material.

此外,如图1所示,粗膜层2由多个金属微粒2a结合的状态下的连结体2b构成。因此,在垂直方向(层叠方向)的剖面上,在金属微粒2a的粒子之间,连接部分存在较多,有时不易测定各个粒子直径。在此情况下,通过对粒子的水平剖面的扫描型电子显微镜(SEM)照片进行图像处理,从而使金属微粒2a的平均粒子直径的测定变得容易。In addition, as shown in FIG. 1 , the rough film layer 2 is composed of a connected body 2 b in a state where a plurality of metal fine particles 2 a are bonded. Therefore, in the cross section in the vertical direction (stacking direction), there are many connecting portions between the particles of the metal fine particles 2a, and it may be difficult to measure the diameter of each particle. In this case, the measurement of the average particle diameter of the metal microparticles 2 a is facilitated by image processing a scanning electron microscope (SEM) photograph of a horizontal cross section of the particles.

如上所述,在粗膜层2中,铝等多个金属微粒2a从第一基材1朝向表层连接形成。因此,能够实现电极面积的增大,并且与形成于该表面的转换层4的接触界面增加,界面可靠性提高。此外,连结体2b优选分别分支为多个枝而形成。由此,电极面积进一步增大,与转换层4的接触界面增加。As described above, in the coarse film layer 2, a plurality of metal fine particles 2a such as aluminum are connected and formed from the first base material 1 toward the surface layer. Therefore, it is possible to increase the electrode area, increase the contact interface with the conversion layer 4 formed on the surface, and improve interface reliability. In addition, it is preferable that the connection body 2b is formed by branching into a plurality of branches. As a result, the electrode area is further increased, and the contact interface with the conversion layer 4 is increased.

接着,对转换层4进行说明。如图1所示,转换层4以覆盖在第一基材1上形成的粗膜层2整体的方式形成。转换层4对元件31的电荷分离做出贡献,具有将生成的电子以及空穴分别向相反方向的第一电极层3、第二电极层7输送的功能。Next, conversion layer 4 will be described. As shown in FIG. 1 , the conversion layer 4 is formed to cover the entire rough film layer 2 formed on the first base material 1 . The conversion layer 4 contributes to charge separation of the element 31 and has a function of transporting generated electrons and holes to the first electrode layer 3 and the second electrode layer 7 in opposite directions, respectively.

转换层4用具有电子接收性以及电子提供性的两种功能的单一的层示出,但也可以层叠具有电子接收性的功能的电子接收性层和具有电子提供性的功能的电子提供性层而形成。下面对由单一的层构成的例子进行说明。The conversion layer 4 is shown as a single layer having both electron-accepting and electron-donating functions, but an electron-accepting layer having an electron-accepting function and an electron-donating layer having an electron-donating function may be laminated. And formed. An example composed of a single layer will be described below.

转换层4含有电子提供性材料以及电子接收性材料。因此,利用在转换层4内形成的P-N结产生电荷分离,因此能够单独进行光电转换。作为电子提供性材料,只要具有电子提供体的功能即可,不做特别限定。另外,作为电子接收性材料,只要具有作为电子接收体的功能即可,不做特别限定。但是,这些材料优选为导电性高分子材料。如果是导电性高分子材料,则也能够进行利用湿式涂布法的成膜,能够以低成本制造大面积的光电转换元件。The conversion layer 4 contains an electron donating material and an electron accepting material. Therefore, charge separation is generated by the P-N junction formed in the conversion layer 4, so that photoelectric conversion can be performed independently. The electron donating material is not particularly limited as long as it has the function of an electron donor. In addition, the electron-accepting material is not particularly limited as long as it has a function as an electron acceptor. However, these materials are preferably conductive polymer materials. If it is a conductive polymer material, film formation by a wet coating method is also possible, and a large-area photoelectric conversion element can be manufactured at low cost.

尤其是,作为p型有机半导体,优选使用聚3-己基噻吩(P3HT),作为n型有机半导体,优选使用[6,6]-苯基-C61-丁酸甲酯(PCBM)等富勒烯衍生物。通过对这些材料进行混合,从而能够形成称为本体异质型的光电转换层。In particular, poly-3-hexylthiophene (P3HT) is preferably used as a p-type organic semiconductor, and fullerenes such as [6,6]-phenyl-C61-butyric acid methyl ester (PCBM) are preferably used as an n-type organic semiconductor. derivative. By mixing these materials, a so-called bulk heterogeneous photoelectric conversion layer can be formed.

转换层4的膜厚优选位于在本体异质型光电转换元件中一般采用的范围内。具体而言,为了覆盖粗膜层2整体,比粗膜层2的厚度更厚为佳。因此,优选为5nm以上且10.0μm以下的范围。The film thickness of the conversion layer 4 is preferably within a range generally employed in bulk heterogeneous photoelectric conversion elements. Specifically, in order to cover the entire coarse film layer 2 , it is preferably thicker than the thickness of the coarse film layer 2 . Therefore, it is preferably in the range of 5 nm or more and 10.0 μm or less.

电子提供性材料和电子接收性材料的混合比根据所使用的材料的种类适当调整为最佳的混合比。The mixing ratio of the electron-donating material and the electron-accepting material is appropriately adjusted to an optimal mixing ratio according to the type of materials used.

作为形成转换层4的方法,只要是能够均匀地形成为规定膜厚的方法即可,不做特别限定。在这样的方法中,优选使用湿式涂布法。若采用湿式涂布法,则能够在大气中形成转换层4,能够实现低成本化、大面积化。即,转换层4能够用例如模涂法、旋涂法、浸涂法、辊涂法、喷涂法、凹版涂敷法、喷墨法、丝网印刷法等制造方法形成。The method of forming conversion layer 4 is not particularly limited as long as it can be uniformly formed to a predetermined film thickness. Among such methods, a wet coating method is preferably used. According to the wet coating method, the conversion layer 4 can be formed in the air, and it is possible to reduce the cost and increase the area. That is, the conversion layer 4 can be formed by a manufacturing method such as die coating, spin coating, dip coating, roll coating, spray coating, gravure coating, inkjet, and screen printing, for example.

接着,对第二电极层7进行说明。构成第二电极层7的导电层5在转换层4的上面形成,由具有导电性的材料构成。尤其优选使用由ITO等金属氧化物构成的透光性的导电性材料。这种导电层5能够用涂布法、溅射法、电解聚合法等各种方法形成。另外,也可以利用使用了金属粒子等的网格构造,形成能够透过光的导电层5。Next, the second electrode layer 7 will be described. The conductive layer 5 constituting the second electrode layer 7 is formed on the conversion layer 4 and is made of a conductive material. In particular, it is preferable to use a translucent conductive material made of a metal oxide such as ITO. Such conductive layer 5 can be formed by various methods such as a coating method, a sputtering method, and an electrolytic polymerization method. Alternatively, the conductive layer 5 capable of transmitting light may be formed using a mesh structure using metal particles or the like.

另一方面,第二基材6成为受光面,因而优选用透明材料形成。作为透明材料,不做特别限定,例如能够使用石英玻璃、合成石英板等不具有可挠性的透明的刚性材料,或者透明树脂膜、光学用树脂板等具有可挠性的透明的柔性材料。另外,无须用第二电极层7覆盖元件31的整个表面,也可以是网格这样的形状。在此情况下,第二电极层7不必一定由透明的材料形成。即,可以利用金属网布线电极、金属纳米线电极构成第二电极层7。On the other hand, since the second base material 6 serves as a light-receiving surface, it is preferably formed of a transparent material. The transparent material is not particularly limited, and for example, non-flexible transparent rigid materials such as quartz glass and synthetic quartz plates, or flexible transparent flexible materials such as transparent resin films and optical resin plates can be used. In addition, it is not necessary to cover the entire surface of the element 31 with the second electrode layer 7, and it may be in a grid shape. In this case, the second electrode layer 7 does not necessarily have to be formed of a transparent material. That is, the second electrode layer 7 can be constituted by metal mesh wiring electrodes and metal nanowire electrodes.

此外,在上述内容中,第二基材6优选是透明树脂膜等柔性材料。透明树脂膜较轻,并且加工性能优越,能够实现制造成本的降低。另外,由于用有机材料形成,所以对于弯折等外部应力,可靠性较高。因此,通过提高柔软性,作为元件31的使用用途,能够适用于非平坦的曲面形状。In addition, in the above, the second base material 6 is preferably a flexible material such as a transparent resin film. The transparent resin film is light, has excellent processability, and can reduce manufacturing costs. In addition, since it is formed of an organic material, it has high reliability against external stress such as bending. Therefore, by improving the flexibility, it is possible to apply the element 31 to a non-flat curved surface shape as an application of the element 31 .

在图5所示的现有的光电转换元件中,第一电极层13和光电转换层14的紧贴性较低,第一电极层13和光电转换层14的界面无法得到足够的可靠性。尤其是,在第一电极层13用无机材料构成,光电转换层14用有机材料构成的情况下,这两者的紧贴性较低,无法得到足够的界面可靠性。此外,若要求光电转换元件具有柔软性,则长期的界面可靠性较为重要。In the conventional photoelectric conversion element shown in FIG. 5 , the adhesion between the first electrode layer 13 and the photoelectric conversion layer 14 is low, and the interface between the first electrode layer 13 and the photoelectric conversion layer 14 cannot obtain sufficient reliability. In particular, when the first electrode layer 13 is made of an inorganic material and the photoelectric conversion layer 14 is made of an organic material, the adhesion between the two is low, and sufficient interface reliability cannot be obtained. In addition, if the photoelectric conversion element is required to have flexibility, long-term interface reliability is important.

在形成第二电极层7之后,通过从元件31的至少上下表面的一者施加压力,从而能够进行后处理工序。或者,如图2所示,也可以将与元件31相同构造的层叠体以减压状态封装于绝缘性的外包装部件20,形成光电转换元件(以下称为元件)32。通过以各层为单位来形成,最后进行加压,或者利用作为真空包装的外包装部件20进行密封,从而能够进行各层的接合,作为电子器件提高功能。此外,真空包装的真空度优选为100Pa以下。其结果是,能够提高第一电极层3与转换层4的紧贴性,提高第一电极层3与转换层4的界面的接合可靠性。优选以如上方式对粗膜层2与转换层4进行压接。在将对表面进行了蚀刻处理的金属制的第一基材1作为第一电极使用的情况下,这种加压、以减压状态封装于绝缘性外包装部件20的效果也是有效的。After the second electrode layer 7 is formed, a post-processing step can be performed by applying pressure from at least one of the upper and lower surfaces of the element 31 . Alternatively, as shown in FIG. 2 , a laminate having the same structure as the element 31 may be packaged in an insulating exterior member 20 in a decompressed state to form a photoelectric conversion element (hereinafter referred to as element) 32 . By forming each layer as a unit and finally applying pressure or sealing with the outer package member 20 which is a vacuum package, the bonding of each layer can be performed, and the function as an electronic device can be improved. In addition, the vacuum degree of the vacuum packaging is preferably 100 Pa or less. As a result, the adhesion between the first electrode layer 3 and the conversion layer 4 can be improved, and the bonding reliability at the interface between the first electrode layer 3 and the conversion layer 4 can be improved. Preferably, the rough film layer 2 and the conversion layer 4 are crimped as described above. When the metal first substrate 1 whose surface is etched is used as the first electrode, the effect of pressing and sealing it in the insulating exterior member 20 in a depressurized state is also effective.

按照上述方式,在元件31、32中,与在现有技术中那样进行蚀刻处理的情况相比,能够增大第一电极层3的面积。并且,能够极大地增大由金属微粒2a构成的粗膜层2与转换层4的接触界面。另外,粗膜层2具有由金属微粒2a不规则地连接而成的连结体2b构成的特殊构造,因此除了能够增大电极面积以外,还通过表面等离子体吸收效应提高光电转换效率。另外,通过增加第一电极层3与转换层4的接触界面,第一电极层3本身、二者的界面的机械强度增加,二者的紧贴性提高。并且,对弯折的追踪性也变好。因此,元件31、32能够长期具有高可靠性。As described above, in the elements 31 and 32 , the area of the first electrode layer 3 can be increased compared to the case where the etching process is performed as in the related art. In addition, the contact interface between the coarse film layer 2 made of metal fine particles 2 a and the conversion layer 4 can be greatly increased. In addition, the rough film layer 2 has a special structure composed of a junction body 2b in which metal particles 2a are irregularly connected, so in addition to increasing the electrode area, it also improves photoelectric conversion efficiency through the surface plasmon absorption effect. In addition, by increasing the contact interface between the first electrode layer 3 and the conversion layer 4 , the mechanical strength of the first electrode layer 3 itself and the interface between the two increases, and the adhesion between the two increases. In addition, the traceability to bending is also improved. Therefore, the elements 31, 32 can have high reliability over a long period of time.

(实施方式2)(Embodiment 2)

图3是基于本发明的实施方式2的光电转换元件(以下称为元件)33的示意剖视图。相对于图1所示的实施方式1的构造,元件33在转换层4与导电层5的界面处具有空穴输送层(以下称为输送层)8。即,元件33在转换层4与导电层5之间具有输送层8。除此以外的结构与实施方式1相同。FIG. 3 is a schematic cross-sectional view of a photoelectric conversion element (hereinafter referred to as an element) 33 according to Embodiment 2 of the present invention. Compared to the structure of Embodiment 1 shown in FIG. 1 , element 33 has hole transport layer (hereinafter referred to as transport layer) 8 at the interface between conversion layer 4 and conductive layer 5 . That is, element 33 has transport layer 8 between conversion layer 4 and conductive layer 5 . Other configurations are the same as those of Embodiment 1.

通过设置输送层8,与转换层4接触的输送层8使从转换层4向导电层5的电荷移动变得顺利。因此,能够提高电荷(空穴)取出效率。其结果是,能够提高光电转换效率。By providing the transport layer 8 , the transport layer 8 in contact with the conversion layer 4 smoothes the charge transfer from the conversion layer 4 to the conductive layer 5 . Therefore, the charge (hole) extraction efficiency can be improved. As a result, photoelectric conversion efficiency can be improved.

此外,在图3中,输送层8形成于转换层4的整个表面,但也可以至少形成于转换层4的一部分。输送层8设置为与转换层4、导电层5双方直接接触。In addition, in FIG. 3 , the transport layer 8 is formed on the entire surface of the conversion layer 4 , but may be formed on at least a part of the conversion layer 4 . The transport layer 8 is provided in direct contact with both the conversion layer 4 and the conductive layer 5 .

在元件33中,光经由第二电极层7、输送层8射入到转换层4,因此输送层8具有透光性。具体而言,输送层8的总透光率优选为80%以上。同样,对于第二电极层7,可以通过将透明电极或网格状的电极作为导电层5使用,从而使总透光率为80%以上。In the element 33 , since light enters the conversion layer 4 via the second electrode layer 7 and the transport layer 8 , the transport layer 8 has light transmittance. Specifically, the total light transmittance of the transport layer 8 is preferably 80% or more. Similarly, for the second electrode layer 7 , the total light transmittance can be made 80% or more by using a transparent electrode or a grid-shaped electrode as the conductive layer 5 .

输送层8由能够输送空穴的材料形成。即,输送层8所使用的材料只要满足上述特性,能够高效地进行从转换层4向导电层5的空穴取出即可,不做特别限定。具体而言,优选聚乙烯基二氧噻吩/聚苯乙烯磺酸(PEDOT/PSS)。除此以外,还能够使用掺杂的聚苯胺、聚苯撑乙烯、聚噻吩、聚吡咯等导电性高分子材料。The transport layer 8 is formed of a material capable of transporting holes. That is, the material used for the transport layer 8 is not particularly limited as long as it satisfies the above characteristics and can efficiently extract holes from the conversion layer 4 to the conductive layer 5 . Specifically, polyvinyldioxythiophene/polystyrenesulfonic acid (PEDOT/PSS) is preferred. In addition, conductive polymer materials such as doped polyaniline, polyphenylene vinylene, polythiophene, and polypyrrole can also be used.

作为输送层8的膜厚,优选在5nm以上且600nm以下的范围内。若过厚,则膜的体积电阻率有可能变大。The film thickness of the transport layer 8 is preferably within a range of not less than 5 nm and not more than 600 nm. When too thick, the volume resistivity of a film may become large.

输送层8能够利用湿式涂布法等形成。作为涂布方法,只要是能够均匀地形成为规定膜厚的方法即可,不做特别限定,例如能够举出模涂法、旋涂法、浸涂法、辊涂法、珠涂法、喷涂法、凹版涂敷法、喷墨法、丝网印刷法等。通过这种方法在转换层4的上表面的至少一部分处形成输送层8之后,与实施方式1同样地形成导电层5,在其上面配置第二基材6,由此能够制作元件33。The transport layer 8 can be formed by a wet coating method or the like. The coating method is not particularly limited as long as it can uniformly form a predetermined film thickness, and examples thereof include die coating, spin coating, dip coating, roll coating, bead coating, and spray coating. , gravure coating method, inkjet method, screen printing method, etc. After forming the transport layer 8 on at least a part of the upper surface of the conversion layer 4 by this method, the conductive layer 5 is formed in the same manner as in Embodiment 1, and the second base material 6 is placed thereon, whereby the element 33 can be produced.

(实施方式3)(Embodiment 3)

图4是本发明的实施方式3的光电转换元件(以下称为元件)34的示意剖视图。元件34在图1所示的实施方式1的构造中,代替转换层4而具有光电转换层(以下称为转换层)24。若在第一电极层3与第二电极层7之间施加电场,则自第二电极层7移动到转换层24内的电荷(空穴)与从导电层5注入到转换层24内的电子结合发光。这样,元件34能够将电能转换为光。除此以外的结构与实施方式1相同。FIG. 4 is a schematic cross-sectional view of a photoelectric conversion element (hereinafter referred to as an element) 34 according to Embodiment 3 of the present invention. In the structure of the first embodiment shown in FIG. 1 , the element 34 has a photoelectric conversion layer (hereinafter referred to as a conversion layer) 24 instead of the conversion layer 4 . If an electric field is applied between the first electrode layer 3 and the second electrode layer 7, the charges (holes) moving from the second electrode layer 7 into the conversion layer 24 and the electrons injected from the conductive layer 5 into the conversion layer 24 Combine glow. In this way, element 34 is capable of converting electrical energy into light. Other configurations are the same as those of Embodiment 1.

在该结构中,第一电极层3承担用于将电子注入到转换层24的电极(电子注入电极)的任务。在元件34中,光从转换层24向第二电极层7穿透。因此,与实施方式1同样,第一电极层3无须一定透明。In this structure, the first electrode layer 3 takes on the role of an electrode (electron injection electrode) for injecting electrons into the conversion layer 24 . In the element 34 light penetrates from the conversion layer 24 to the second electrode layer 7 . Therefore, like Embodiment 1, the first electrode layer 3 does not necessarily have to be transparent.

在元件34中,金属微粒2a的平均粒子直径、粗膜层2的空孔直径的众数、粗膜层2的空隙率、粗膜层2的厚度等的优选范围与实施方式1同样。In the element 34 , preferred ranges of the average particle diameter of the metal fine particles 2 a , the mode of the pore diameter of the coarse film layer 2 , the porosity of the coarse film layer 2 , and the thickness of the coarse film layer 2 are the same as those in the first embodiment.

接着,对转换层24进行说明。如图4所示,转换层24以覆盖在第一基材1上形成的粗膜层2整体的方式形成。转换层24对元件34的发光做出贡献,具有将电子以及空穴从第一电极层3、第二电极层7分别注入,使产生的电荷结合的功能。Next, the conversion layer 24 will be described. As shown in FIG. 4 , the conversion layer 24 is formed to cover the entire coarse film layer 2 formed on the first base material 1 . The conversion layer 24 contributes to the light emission of the element 34, and has a function of injecting electrons and holes from the first electrode layer 3 and the second electrode layer 7 respectively, and combining the generated charges.

在图4中,转换层24用具有电子接收性以及电子提供性的两种功能的单一的层示出。但是,也可以层叠具有电子接收性的功能的电子接收性层和具有电子提供性的功能的电子提供性层而形成。下面对由单一的层构成的例子进行说明。In FIG. 4 , the conversion layer 24 is shown as a single layer having both electron-accepting and electron-donating functions. However, an electron-accepting layer having an electron-accepting function and an electron-donating layer having an electron-donating function may be laminated. An example composed of a single layer will be described below.

作为发光层的转换层24含有电子提供性材料以及电子接收性材料。因此,利用在转换层24内再次结合的电荷进行发光,因此发光层24单独作为发光层发挥作用。The conversion layer 24 as a light emitting layer contains an electron donating material and an electron accepting material. Therefore, light is emitted by the charges recombined in the conversion layer 24 , so the light-emitting layer 24 alone functions as a light-emitting layer.

具体而言,作为发光材料,优选使用聚对苯。除此以外,转换层24能够使用聚对苯撑、聚(9,9二烷基芴)等电子传导性聚合物。Specifically, polyparaphenylene is preferably used as the luminescent material. In addition, electron conductive polymers such as polyparaphenylene and poly(9,9 dialkylfluorene) can be used for the conversion layer 24 .

转换层24的厚度优选是在高分子有机EL型发光元件中一般采用的膜厚。另外,为了覆盖粗膜层2整体,比粗膜层2的厚度更厚为佳。因此,优选为5nm以上且10.0μm以下的范围。The thickness of the conversion layer 24 is preferably a film thickness generally used in polymer organic EL light-emitting devices. In addition, in order to cover the entire coarse film layer 2 , it is preferably thicker than the thickness of the coarse film layer 2 . Therefore, it is preferably in the range of 5 nm or more and 10.0 μm or less.

此外,如在实施方式1中参考图2所说明,在形成第二电极层7之后,优选从元件34的至少上下表面中的一者施加压力,或者将与元件34相同构造的层叠体以减压状态封装于绝缘性的外包装部件。利用其中任一种方式,能够进行各层的接合,能够作为电子器件提高功能。其结果是,能够制作与现有技术相比亮度更高的元件34。In addition, as described with reference to FIG. 2 in Embodiment Mode 1, after forming the second electrode layer 7, it is preferable to apply pressure from at least one of the upper and lower surfaces of the element 34, or to reduce the pressure of the laminate having the same structure as the element 34. The pressure state is encapsulated in the insulating outer packaging part. According to any of these methods, the bonding of the respective layers can be performed, and the function as an electronic device can be improved. As a result, it is possible to manufacture the element 34 with higher luminance than in the prior art.

按照上述方式,在元件34中,与现有技术相比能够实现电极面积的增大,并且能够极大地增大由金属微粒2a构成的粗膜层2与转换层24的接触界面。作为其结果,第一电极层3本身、第一电极层3与转换层24的机械强度提高,并且二者的紧贴性提高。另外,对弯折的追踪性变好。因此,元件34能够长期具有高可靠性。另外,通过对第一电极层3的面积和粗膜层2的膜厚进行控制,能够减少表面等离子体损失,以更高效率取出光,也能够使元件34具有高亮度。In the above manner, in the element 34 , an increase in the electrode area can be realized as compared with the prior art, and a contact interface between the coarse film layer 2 composed of metal fine particles 2 a and the conversion layer 24 can be greatly increased. As a result, the mechanical strength of the first electrode layer 3 itself, the first electrode layer 3 and the conversion layer 24 is improved, and the adhesion between them is improved. In addition, the traceability to bending becomes better. Therefore, the element 34 can have high reliability over a long period of time. In addition, by controlling the area of the first electrode layer 3 and the film thickness of the coarse film layer 2, surface plasmon loss can be reduced, light can be extracted more efficiently, and the element 34 can also have high brightness.

此外,对于与元件34相同结构的层叠体,既可以如图2所示,通过用绝缘性的外包装部件20以减压状态进行封装,从而对粗膜层2与转换层24进行压接,也可以通过加压对粗膜层2与转换层24进行压接。In addition, for a laminate having the same structure as the element 34, as shown in FIG. The rough film layer 2 and the conversion layer 24 may also be crimped by applying pressure.

产业上的可利用性Industrial availability

本发明的光电转换元件具有电极面积大、高效率(高亮度)的特点。另外,本发明的光电转换元件机械强度强,具有高可靠性,能够应用于要求柔软性的应用等。The photoelectric conversion element of the present invention has the characteristics of large electrode area and high efficiency (high brightness). In addition, the photoelectric conversion element of the present invention has strong mechanical strength and high reliability, and can be applied to applications requiring flexibility, and the like.

1  第一基材1 first substrate

2  粗膜层2 Coarse film layer

2a 金属微粒2a Metal particles

2b 连结体2b linker

3、13 第一电极层3.13 The first electrode layer

4、14、24 光电转换层(转换层)4, 14, 24 photoelectric conversion layer (conversion layer)

5  导电层5 conductive layer

6  第二基材6 Second substrate

7、17 第二电极层7, 17 Second electrode layer

8  空穴输送层(输送层)8 hole transport layer (transport layer)

11 基材11 Substrate

20 外包装部件20 Outer packing parts

31、32、33、34 光电转换元件(元件)31, 32, 33, 34 photoelectric conversion elements (elements)

Claims (8)

1.一种光电转换元件,具备:1. A photoelectric conversion element, comprising: 第一电极层,其具有第一基材、以及在所述第一基材上形成的粗膜层;The first electrode layer has a first substrate and a coarse film layer formed on the first substrate; 光电转换层,其形成在所述粗膜层上;以及a photoelectric conversion layer formed on the coarse film layer; and 第二电极层,其形成在所述光电转换层上,a second electrode layer formed on the photoelectric conversion layer, 所述粗膜层由在所述第一基材的表面不规则地连接的多个金属微粒构成,所述光电转换层进入由所述多个金属微粒形成的多个连结体之间。The rough film layer is composed of a plurality of metal fine particles irregularly connected on the surface of the first base material, and the photoelectric conversion layer enters between a plurality of connected bodies formed of the plurality of metal fine particles. 2.根据权利要求1所述的光电转换元件,其特征在于,2. The photoelectric conversion element according to claim 1, wherein 所述连结体具有分支为多个枝的构造。The connected body has a structure branched into a plurality of branches. 3.根据权利要求1所述的光电转换元件,其特征在于,3. The photoelectric conversion element according to claim 1, wherein 在所述第一基材单独的状态下,所述粗膜层的空孔直径的众数为5nm以上且1μm以下。In the state of the first base material alone, the mode of the pore diameter of the coarse film layer is not less than 5 nm and not more than 1 μm. 4.根据权利要求1所述的光电转换元件,其特征在于,4. The photoelectric conversion element according to claim 1, wherein 所述金属微粒的直径的众数为5nm以上且300nm以下。The mode of the diameter of the metal microparticles is not less than 5 nm and not more than 300 nm. 5.根据权利要求1所述的光电转换元件,其特征在于,5. The photoelectric conversion element according to claim 1, wherein 所述第二电极层是透明电极、金属网布线电极、金属纳米线电极中的任一者。The second electrode layer is any one of transparent electrodes, metal mesh wiring electrodes, and metal nanowire electrodes. 6.根据权利要求1所述的光电转换元件,其特征在于,6. The photoelectric conversion element according to claim 1, wherein 所述粗膜层与所述光电转换层被压接。The rough film layer and the photoelectric conversion layer are pressed together. 7.根据权利要求6所述的光电转换元件,其特征在于还具备:7. The photoelectric conversion element according to claim 6, further comprising: 绝缘性的外包装部件,对于包括所述第一电极层、所述光电转换层、以及所述第二电极层的层叠体,以减压状态进行了封装,an insulating outer packaging member that encapsulates a laminate including the first electrode layer, the photoelectric conversion layer, and the second electrode layer in a decompressed state, 通过所述外包装部件,所述粗膜层与所述光电转换层被压接。The rough film layer and the photoelectric conversion layer are crimped by the outer package member. 8.根据权利要求1所述的光电转换元件,其特征在于还具备:8. The photoelectric conversion element according to claim 1, further comprising: 空穴输送层,在所述光电转换层与所述第二电极层之间形成。A hole transport layer is formed between the photoelectric conversion layer and the second electrode layer.
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