CN104849285A - Linear scanning honeycomb ceramic detection device and detection method - Google Patents
Linear scanning honeycomb ceramic detection device and detection method Download PDFInfo
- Publication number
- CN104849285A CN104849285A CN201510254863.6A CN201510254863A CN104849285A CN 104849285 A CN104849285 A CN 104849285A CN 201510254863 A CN201510254863 A CN 201510254863A CN 104849285 A CN104849285 A CN 104849285A
- Authority
- CN
- China
- Prior art keywords
- honey comb
- ceramic honey
- detected
- line sweep
- imaging array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 136
- 238000001514 detection method Methods 0.000 title claims abstract description 18
- 238000003384 imaging method Methods 0.000 claims abstract description 67
- 241000264877 Hippospongia communis Species 0.000 claims description 128
- 238000000034 method Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 208000037656 Respiratory Sounds Diseases 0.000 description 2
- 230000001413 cellular effect Effects 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a linear scanning honeycomb ceramic detection device and a detection method. A light source is arranged on any end face of honeycomb ceramic to be detected; a linear scanning imaging array is arranged on the other end face of the honeycomb ceramic to be detected, and corresponds to the light source; a scanned image of the whole end face of the honeycomb ceramic to be detected is obtained through the linear scanning imaging array, is bright at holes and dark at hole walls, is consistent with an image obtained in projection and photographing manners, and has a resolution of 600dpi, and the wall thickness of ordinary honeycomb ceramic is in a submillimeter scale. In addition, microlens linear array imaging is adopted for the linear scanning imaging array such as a CIS (Contact Image Sensor), single points of the obtained image are prevented from the influence of the other points, and the real condition of the honeycomb ceramic to be detected can be really reflected, so that the detection efficiency and accuracy of each characteristic of the honeycomb ceramic are improved.
Description
Technical field
The present invention relates to ceramic honey comb detection technique field, particularly relate to a kind of line sweep formula ceramic honey comb pick-up unit and detection method.
Background technology
At present, the traditional detection method for features such as ceramic honey comb through-hole rate, crackle, shape of hole wall, circularity is based on surface imaging principle, Polaroid to whole carrier end face, and then identifies the various features of ceramic honey comb.But the method exists following not enough: one, to the homogeneity of light source and stability requirement very high, otherwise the impact brought by intensity of illumination region and the change of time cannot be eliminated.Two, imaging process is completed by single lens, high to resolution requirement, generally want ten million pixel, cost is high, and the edge deformation to be introduced by camera lens cannot be eliminated, (honeycomb is larger, and required focal length is longer thus to limit the volume of tested honeycomb, resolution is higher), and long-focus increases instrument volume.Three, surface imaging is by charge coupled cell (Charge-coupled Device, or complementary metal oxide semiconductor (CMOS) (Complementary Metal Oxide Semiconductor CCD), CMOS) camera completes, based on unified aperture, and then cause edge halation, cause cell edge part None-identified.Tight light-shielding structure must be introduced for alleviating this problem, instrument complexity and volume will be strengthened further like this.Four, due to the restriction of pipeline vision, photo taking type detection method can not direct opposite end surface imaging, the means such as texturing glass must be used to form " curtain ", duct is projected on curtain and takes pictures again, reduce resolution so from the beginning, and transparent pallet etc. must be used to be unfavorable for the structure of on-line operation.Because ceramic honey comb exists fine and close through-hole structure, and orifice throat length is usually very long, therefore adopts visual inspection to there is pipeline vision, simply cannot discover defect.There is very large uncertainty in traditional hand inspection, and resolution is very low.Meanwhile, although have people to propose some auxiliary examination methods for the problems referred to above, existing published auxiliary examination method ubiquity poor practicability, complex structure and other problems.
Summary of the invention
The object of the invention is to, by a kind of line sweep formula ceramic honey comb detection method and device, solve the problem that above background technology part is mentioned.
The present invention for achieving the above object, adopts following technical scheme:
A kind of line sweep formula ceramic honey comb pick-up unit, comprises light source, line sweep imaging array, drive unit and host computer; Described light source and line sweep imaging array are oppositely arranged; Ceramic honey comb to be detected is placed between described light source and line sweep imaging array, and its both ends of the surface are respectively towards described light source and line sweep imaging array; Described drive unit drives described ceramic honey comb to be detected and the relative movement of described line sweep imaging array, make described line sweep imaging array complete scanning to the whole end face of described ceramic honey comb to be detected, thus export the scan image of the whole end face of described ceramic honey comb to be detected; Described host computer is electrically connected described line sweep imaging array, receives the scan image of the whole end face of described ceramic honey comb to be detected.
It is further characterized in that: described line sweep imaging array selects contact-type image sensor (Contact Image Sensor, CIS).
Described host computer selects computing machine.
A kind of form: described ceramic honey comb to be detected lies in a horizontal plane on the travelling belt of drive unit; Described light source is arranged at arbitrary end of ceramic honey comb to be detected; Described line sweep imaging array is corresponding with the position of described light source, is arranged at the other end place of described ceramic honey comb to be detected; Described in described belt-driven, ceramic honey comb to be detected moves, and line sweep imaging array completes the scanning to the whole end face of described ceramic honey comb to be detected, exports the scan image of the whole end face of described ceramic honey comb to be detected to host computer.
Another kind of form: described ceramic honey comb to be detected is vertically placed on the travelling belt of drive unit; Described light source is arranged at arbitrary end of ceramic honey comb to be detected; Described line sweep imaging array is corresponding with the position of described light source, is arranged at the other end place of described ceramic honey comb to be detected; Described in described belt-driven, ceramic honey comb to be detected moves, and line sweep imaging array completes the scanning to the whole end face of described ceramic honey comb to be detected, exports the scan image of the whole end face of described ceramic honey comb to be detected to host computer.
Also has a kind of form: described ceramic honey comb to be detected lies in a horizontal plane on the travelling belt of drive unit, and wherein, described travelling belt is light-emitting area, and now, this travelling belt is light source; Described line sweep imaging array is arranged at the top of described ceramic honey comb to be detected; Described in described belt-driven, ceramic honey comb to be detected moves, and line sweep imaging array completes the scanning to the whole end face of described ceramic honey comb to be detected, exports the scan image of the whole end face of described ceramic honey comb to be detected to host computer.
Adopt a ceramic honey comb detection method for above-mentioned line sweep formula ceramic honey comb pick-up unit, it is characterized in that: arbitrary end light source being arranged at ceramic honey comb to be detected; Corresponding with the position of described light source, line sweep imaging array is arranged at the other end place of described ceramic honey comb to be detected; Drive described ceramic honey comb to be detected and the relative movement of described line sweep imaging array, make described line sweep imaging array complete scanning to the whole end face of described ceramic honey comb to be detected, thus export the scan image of the whole end face of described ceramic honey comb to be detected; According to described scan image, detect each feature of described ceramic honey comb to be detected.
The line sweep formula ceramic honey comb detection method that the present invention proposes and device solve legacy cellular Test of ceramics method Problems existing, and light source is arranged at arbitrary end of ceramic honey comb to be detected by this device; Corresponding with the position of described light source, scanning imagery array is arranged at the other end place of described ceramic honey comb to be detected; The scan image of the whole end face of ceramic honey comb to be detected is obtained by scanning imagery array (such as CIS), this scan image is bright by place, hole wall place is dark, consistent with the image that projection shooting style obtains, 600dpi(about 43 microns can be realized) resolution, and the wall thickness of general ceramic honey comb is in submillimeter magnitude.In addition, owing to being based on lenticule linear array imaging as the scanning imagery array of CIS, obtain image and do not put by other on independent point and affect, the truth of ceramic honey comb to be detected can be reacted really, thus the detection efficiency that improve each feature of ceramic honey comb and accuracy rate.
Accompanying drawing explanation
The line sweep formula ceramic honey comb structure of the detecting device schematic diagram that Fig. 1 provides for the embodiment of the present invention one.
The line sweep formula ceramic honey comb structure of the detecting device schematic diagram that Fig. 2 provides for the embodiment of the present invention two.
The line sweep formula ceramic honey comb structure of the detecting device schematic diagram that Fig. 3 provides for the embodiment of the present invention three.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.Be understandable that, specific embodiment described herein is only for explaining the present invention, but not limitation of the invention.It also should be noted that, for convenience of description, illustrate only part related to the present invention in accompanying drawing but not full content, unless otherwise defined, all technology used herein and scientific terminology are identical with belonging to the implication that those skilled in the art of the present invention understand usually.Term used herein, just in order to describe specific embodiment, is not intended to be restriction the present invention.
Following embodiment one to three is and realizes based on following line sweep formula ceramic honey comb detection method, and this line sweep formula ceramic honey comb detection method specifically comprises: arbitrary end light source being arranged at ceramic honey comb to be detected; Corresponding with the position of described light source, line sweep imaging array is arranged at the other end place of described ceramic honey comb to be detected; Drive described ceramic honey comb to be detected and the relative movement of described line sweep imaging array, make described line sweep imaging array complete scanning to the whole end face of described ceramic honey comb to be detected, thus export the scan image of the whole end face of described ceramic honey comb to be detected; According to described scan image, detect each feature of described ceramic honey comb to be detected.Wherein, each feature of described ceramic honey comb to be detected includes but not limited to through-hole rate, crackle, shape of hole wall, the circularity of ceramic honey comb.
Embodiment one
As shown in Figure 1, the present embodiment centerline scan formula ceramic honey comb pick-up unit specifically comprises light source 101, line sweep imaging array 102, drive unit 103 and host computer (not shown).Described light source 101 is arranged at arbitrary end of ceramic honey comb 104 to be detected; Described line sweep imaging array 102 is corresponding with the position of described light source 101, is arranged at the other end place of described ceramic honey comb to be detected 104; Described drive unit 103 drives described ceramic honey comb to be detected 104 and the relative movement of described line sweep imaging array 102, make described line sweep imaging array 102 complete scanning to the whole end face of described ceramic honey comb 104 to be detected, thus export the scan image of the whole end face of described ceramic honey comb to be detected 104; Described host computer is electrically connected described line sweep imaging array 102, receives the scan image of the whole end face of described ceramic honey comb to be detected 104.
Lie in a horizontal plane on the travelling belt of drive unit 103 in ceramic honey comb 104 to be detected described in the present embodiment; Described light source 101 is arranged at the top of ceramic honey comb 104 1 end face to be detected; Described line sweep imaging array 102 is corresponding with the position of described light source 101, is arranged at the below of the other end of described ceramic honey comb to be detected 104; Described in described belt-driven, ceramic honey comb 104 to be detected moves, and line sweep imaging array 102 completes the scanning to the whole end face of described ceramic honey comb 104 to be detected, exports the scan image of the whole end face of described ceramic honey comb to be detected 104 to host computer.It should be noted that, the setting position of light source 101 and the setting position of line sweep imaging array 102 can exchange in the present embodiment.Described line sweep imaging array 102 selects contact-type image sensor.Described host computer selects computing machine.
Embodiment two
As shown in Figure 2, the present embodiment centerline scan formula ceramic honey comb pick-up unit specifically comprises light source 201, line sweep imaging array 202, drive unit 203 and host computer (not shown).Described ceramic honey comb to be detected 204 is vertically placed on the travelling belt of drive unit 203; Described light source 201 is longitudinally arranged at arbitrary end of ceramic honey comb 204 to be detected; Described line sweep imaging array 202 is corresponding with the position of described light source 201, is longitudinally arranged at the other end place of described ceramic honey comb to be detected 204; Described in described belt-driven, ceramic honey comb 204 to be detected moves, and line sweep imaging array 202 completes the scanning to the whole end face of described ceramic honey comb 204 to be detected, exports the scan image of the whole end face of described ceramic honey comb to be detected 204 to host computer.It should be noted that, described line sweep imaging array 202 selects contact-type image sensor in the present embodiment.Described host computer selects computing machine.
Embodiment three
As shown in Figure 3, the present embodiment centerline scan formula ceramic honey comb pick-up unit specifically comprises light source 301, line sweep imaging array 302, drive unit 303 and host computer (not shown).Described ceramic honey comb to be detected 304 lies in a horizontal plane on the travelling belt of drive unit 303, and wherein, described travelling belt is light-emitting area, and now, this travelling belt is light source 301; Described line sweep imaging array 302 is arranged at the top of described ceramic honey comb to be detected 304; Described in described belt-driven, ceramic honey comb 304 to be detected moves, and line sweep imaging array 302 completes the scanning to the whole end face of described ceramic honey comb 304 to be detected, exports the scan image of the whole end face of described ceramic honey comb to be detected 304 to host computer.It should be noted that, described light-emitting area can adopt the modes such as oolemma+light source 301 or luminous zone to realize in the present embodiment.Described line sweep imaging array 302 selects contact-type image sensor.Described host computer selects computing machine.
Technical scheme of the present invention solves legacy cellular Test of ceramics method Problems existing, light source is arranged at arbitrary end of ceramic honey comb to be detected; Corresponding with the position of described light source, line sweep imaging array is arranged at the other end place of described ceramic honey comb to be detected; The scan image of the whole end face of ceramic honey comb to be detected is obtained by line sweep imaging array such as CIS, this scan image is bright by place, hole wall place is dark, consistent with the image that projection shooting style obtains, 600dpi(about 43 microns can be realized) resolution, and the wall thickness of general ceramic honey comb is in submillimeter magnitude.In addition, owing to being based on lenticule linear array imaging as the line sweep imaging array of CIS, obtain image and do not put by other on independent point and affect, the truth of ceramic honey comb to be detected can be reacted really, thus the detection efficiency that improve each feature of ceramic honey comb and accuracy rate.
Note, above are only preferred embodiment of the present invention and institute's application technology principle.The invention is not restricted to specific embodiment described here, various obvious change can be carried out for a person skilled in the art, readjust and substitute and can not protection scope of the present invention be departed from.Therefore, although be described in further detail invention has been by above embodiment, the present invention is not limited only to above embodiment, when not departing from the present invention's design, can also comprise other Equivalent embodiments more, and scope of the present invention is determined by appended right.
Claims (7)
1. a line sweep formula ceramic honey comb pick-up unit, is characterized in that: comprise light source, line sweep imaging array, drive unit and host computer; Described light source and line sweep imaging array are oppositely arranged; Ceramic honey comb to be detected is placed between described light source and line sweep imaging array, and its both ends of the surface are respectively towards described light source and line sweep imaging array; Described drive unit drives described ceramic honey comb to be detected and the relative movement of described line sweep imaging array, make described line sweep imaging array complete scanning to the whole end face of described ceramic honey comb to be detected, thus export the scan image of the whole end face of described ceramic honey comb to be detected; Described host computer is electrically connected described line sweep imaging array, receives the scan image of the whole end face of described ceramic honey comb to be detected.
2. line sweep formula ceramic honey comb pick-up unit according to claim 1, is characterized in that: described line sweep imaging array selects contact-type image sensor.
3. line sweep formula ceramic honey comb pick-up unit according to claim 1, is characterized in that: described host computer selects computing machine.
4. the line sweep formula ceramic honey comb pick-up unit according to any one of claim 1-3, is characterized in that: described ceramic honey comb to be detected lies in a horizontal plane on the travelling belt of drive unit; Described light source is arranged at arbitrary end of ceramic honey comb to be detected; Described line sweep imaging array is corresponding with the position of described light source, is arranged at the other end place of described ceramic honey comb to be detected; Described in described belt-driven, ceramic honey comb to be detected moves, and line sweep imaging array completes the scanning to the whole end face of described ceramic honey comb to be detected, exports the scan image of the whole end face of described ceramic honey comb to be detected to host computer.
5. the line sweep formula ceramic honey comb pick-up unit according to any one of claim 1-3, is characterized in that: described ceramic honey comb to be detected is vertically placed on the travelling belt of drive unit; Described light source is arranged at arbitrary end of ceramic honey comb to be detected; Described line sweep imaging array is corresponding with the position of described light source, is arranged at the other end place of described ceramic honey comb to be detected; Described in described belt-driven, ceramic honey comb to be detected moves, and line sweep imaging array completes the scanning to the whole end face of described ceramic honey comb to be detected, exports the scan image of the whole end face of described ceramic honey comb to be detected to host computer.
6. the line sweep formula ceramic honey comb pick-up unit according to any one of claim 1-3, it is characterized in that: described ceramic honey comb to be detected lies in a horizontal plane on the travelling belt of drive unit, wherein, described travelling belt is light-emitting area, now, this travelling belt is light source; Described line sweep imaging array is arranged at the top of described ceramic honey comb to be detected; Described in described belt-driven, ceramic honey comb to be detected moves, and line sweep imaging array completes the scanning to the whole end face of described ceramic honey comb to be detected, exports the scan image of the whole end face of described ceramic honey comb to be detected to host computer.
7. adopt a ceramic honey comb detection method for line sweep formula ceramic honey comb pick-up unit described in any one of claim 1-6, it is characterized in that: arbitrary end light source being arranged at ceramic honey comb to be detected; Corresponding with the position of described light source, line sweep imaging array is arranged at the other end place of described ceramic honey comb to be detected; Drive described ceramic honey comb to be detected and the relative movement of described line sweep imaging array, make described line sweep imaging array complete scanning to the whole end face of described ceramic honey comb to be detected, thus export the scan image of the whole end face of described ceramic honey comb to be detected; According to described scan image, detect each feature of described ceramic honey comb to be detected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510254863.6A CN104849285A (en) | 2015-05-18 | 2015-05-18 | Linear scanning honeycomb ceramic detection device and detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510254863.6A CN104849285A (en) | 2015-05-18 | 2015-05-18 | Linear scanning honeycomb ceramic detection device and detection method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104849285A true CN104849285A (en) | 2015-08-19 |
Family
ID=53849091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510254863.6A Pending CN104849285A (en) | 2015-05-18 | 2015-05-18 | Linear scanning honeycomb ceramic detection device and detection method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104849285A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106248552A (en) * | 2016-08-19 | 2016-12-21 | 江苏龙净科杰催化剂再生有限公司 | The apparatus for inspecting through hole of cellular catalyst |
| CN107290347A (en) * | 2017-07-12 | 2017-10-24 | 江苏阿瑞斯智能设备有限公司 | Honeycomb substrate defect automated detection method |
| CN110082360A (en) * | 2019-05-17 | 2019-08-02 | 中国科学院光电技术研究所 | A kind of sequence optical element surface on-line detection device of defects and method based on array camera |
| CN111929305A (en) * | 2020-09-22 | 2020-11-13 | 维嘉数控科技（苏州）有限公司 | Detection device |
| CN113466234A (en) * | 2020-03-31 | 2021-10-01 | 日本碍子株式会社 | Method and apparatus for inspecting ceramic columnar honeycomb structure |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020140949A1 (en) * | 2001-03-30 | 2002-10-03 | Nec Corporation | Method of inspecting semiconductor integrated circuit which can quickly measure a cubic body |
| CN202002894U (en) * | 2011-01-10 | 2011-10-05 | 山东轻工业学院 | Quick online paper flaw detecting system based on machine vision |
| CN102507597A (en) * | 2011-10-08 | 2012-06-20 | 苏州赛琅泰克高技术陶瓷有限公司 | Detection system for ceramic substrate laser holes and detection method for ceramic substrate laser holes |
| CN202631443U (en) * | 2012-05-04 | 2012-12-26 | 南京文采科技有限责任公司 | Cloth inspection detecting device |
| CN204613125U (en) * | 2015-05-18 | 2015-09-02 | 无锡惠科电工高新技术有限公司 | A kind of line sweep formula ceramic honey comb pick-up unit |
-
2015
- 2015-05-18 CN CN201510254863.6A patent/CN104849285A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020140949A1 (en) * | 2001-03-30 | 2002-10-03 | Nec Corporation | Method of inspecting semiconductor integrated circuit which can quickly measure a cubic body |
| CN202002894U (en) * | 2011-01-10 | 2011-10-05 | 山东轻工业学院 | Quick online paper flaw detecting system based on machine vision |
| CN102507597A (en) * | 2011-10-08 | 2012-06-20 | 苏州赛琅泰克高技术陶瓷有限公司 | Detection system for ceramic substrate laser holes and detection method for ceramic substrate laser holes |
| CN202631443U (en) * | 2012-05-04 | 2012-12-26 | 南京文采科技有限责任公司 | Cloth inspection detecting device |
| CN204613125U (en) * | 2015-05-18 | 2015-09-02 | 无锡惠科电工高新技术有限公司 | A kind of line sweep formula ceramic honey comb pick-up unit |
Non-Patent Citations (2)
| Title |
|---|
| 陈小春 等: "基于接触式图像传感器的自动光学检测系统研究", 《电光与控制》 * |
| 黄永林: "PCB光电检孔机关键技术研究及其系统实现", 《中国博士学位论文全文数据库 信息科技辑》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106248552A (en) * | 2016-08-19 | 2016-12-21 | 江苏龙净科杰催化剂再生有限公司 | The apparatus for inspecting through hole of cellular catalyst |
| CN107290347A (en) * | 2017-07-12 | 2017-10-24 | 江苏阿瑞斯智能设备有限公司 | Honeycomb substrate defect automated detection method |
| CN110082360A (en) * | 2019-05-17 | 2019-08-02 | 中国科学院光电技术研究所 | A kind of sequence optical element surface on-line detection device of defects and method based on array camera |
| CN113466234A (en) * | 2020-03-31 | 2021-10-01 | 日本碍子株式会社 | Method and apparatus for inspecting ceramic columnar honeycomb structure |
| CN111929305A (en) * | 2020-09-22 | 2020-11-13 | 维嘉数控科技（苏州）有限公司 | Detection device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101150755B1 (en) | Apparatus for photographing image | |
| JP7448609B2 (en) | Optical inspection equipment, methods and programs | |
| CN109765234A (en) | Device and method for optically detecting both front and back surfaces of an object at the same time | |
| CN104849285A (en) | Linear scanning honeycomb ceramic detection device and detection method | |
| CN209803004U (en) | Device for simultaneously carrying out optical detection on front surface and back surface of object | |
| CN109813223A (en) | Device and method for optically detecting two adjacent surfaces of an object at the same time | |
| CN111044524B (en) | Optical detection device and method for realizing equal optical path imaging of two opposite surfaces of semiconductor crystal grain | |
| CN213067450U (en) | Cell-phone center formation of image detection device | |
| CN106645045B (en) | TDI-CCD-based bidirectional scanning imaging method in fluorescence optical microscopy imaging | |
| CN204613125U (en) | A kind of line sweep formula ceramic honey comb pick-up unit | |
| CN104655646A (en) | Glass substrate internal defect checking system and checking method for height position of internal defect | |
| CN117571744A (en) | Optical detection method for defects on double surfaces of cover plate glass | |
| CN110849888B (en) | Illumination compensation device and method for simultaneous detection of defects on both sides of semiconductor grains | |
| CN110927175B (en) | Detection device and method for realizing equal illumination and equal optical path imaging of two adjacent surfaces of object | |
| CN110849886B (en) | Device and method for realizing simultaneous detection of top and bottom surfaces of semiconductor crystal grains based on image transfer lens | |
| CN114390152B (en) | Contact type image sensor for detecting micro concave-convex and application | |
| CN209894114U (en) | Device for simultaneously optically detecting two adjacent surfaces of an object | |
| CN107110790A (en) | Optical detection system | |
| CN100543578C (en) | A projector and method for obtaining coordinates of bright spots | |
| CN211426309U (en) | Illumination compensation device for simultaneously detecting defects on two sides of semiconductor crystal grain | |
| EP3240993B1 (en) | An arrangement of optical measurement | |
| CN106768891B (en) | Special equipment for detecting object surface normal error based on reflection image method | |
| CN116379963A (en) | Color confocal three-dimensional morphology measurement method and system capable of adjusting oblique illumination | |
| JPS63273047A (en) | Surface irregularity detector | |
| CN204188140U (en) | High-speed and continuous obtains the device of many figure warp threads picture online |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150819 |