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CN104848936B - The double permanent magnet centripetal excitation rectangle low-frequency vibration calibration console that magnetic field tracking compensates - Google Patents

The double permanent magnet centripetal excitation rectangle low-frequency vibration calibration console that magnetic field tracking compensates Download PDF

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CN104848936B
CN104848936B CN201510236218.1A CN201510236218A CN104848936B CN 104848936 B CN104848936 B CN 104848936B CN 201510236218 A CN201510236218 A CN 201510236218A CN 104848936 B CN104848936 B CN 104848936B
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yoke
permanent magnet
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guide rail
magnetic field
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CN104848936A (en
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谭久彬
崔俊宁
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Harbin Institute of Technology Shenzhen
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Abstract

The double permanent magnet centripetal excitation rectangle low-frequency vibration calibration console that magnetic field tracking compensates belongs to vibration measurement technical field, the open magnetic field type magnetic structure of a kind of rectangle is proposed, double permanent magnet symmetry is arranged on long yoke inner surface and arranges in opposite directions with magnetic pole, symmetrical closed magnetic circuit is formed by yoke, the high-intensity magnetic field distribution of high evenness is produced in air gap, the array microstructure of deep trench form is provided with on the central magnetic yoke adjacent with air gap surface, effectively can suppress eddy current loss, central magnetic yoke is provided with compensating coil, form compensating field and synchronized tracking compensation is carried out on the impact of armature reaction, organically blend with static pressure air-bearing guiding technique and design, outstanding Electromagnetic Drive mechanics performance and high motion guide precision can be obtained simultaneously, the present invention can take into account Long Distances, high thrust, linear electromagnetic driving force specislity and high motion guide precision, for low frequency/superlow frequency vibrating calibration provides the high-performance low-frequency vibration calibration console technical scheme of a kind of high precision, Long Distances.

Description

磁场跟踪补偿的双排永磁体向心励磁矩形低频振动校准台Double-row permanent magnet centripetal excitation rectangular low-frequency vibration calibration table for magnetic field tracking compensation

技术领域technical field

本发明属于振动计量技术领域,主要涉及一种磁场跟踪补偿的双排永磁体向心励磁矩形低频振动校准台。The invention belongs to the technical field of vibration measurement, and mainly relates to a rectangular low-frequency vibration calibration table with double-row permanent magnet centripetal excitation for magnetic field tracking compensation.

背景技术Background technique

产生标准振动信号的振动校准台是实现高精度振动校准的核心设备,高精度振动校准台一般均采用电磁振动台形式。近年来,航空航天、建筑桥梁、防震减灾等领域均提出了低频/超低频振动校准的需求。为提高标准振动信号的信噪比,保证低频/超低频振动的校准精度,要求振动校准台在保证推力和精度的前提下,具有尽可能大的行程。在大行程振动校准台的设计过程中,存在着振幅、磁场均匀性、电磁驱动力大小、线性电磁驱动力特性、运动导向精度、加工与装配精度之间的矛盾,其中的关键和难点是如何通过合理的电磁设计与结构设计,并通过保证加工与装配精度,在长气隙内实现高均匀度的强磁感应强度分布,并使线圈通电后在全行程内输出的电磁驱动力大小与工作线圈中的电流成正比,而与工作线圈所处的位置无关,即获得理想的线性电磁驱动力特性。The vibration calibration table that generates standard vibration signals is the core equipment to achieve high-precision vibration calibration, and the high-precision vibration calibration table generally adopts the form of an electromagnetic vibration table. In recent years, aerospace, building bridges, earthquake prevention and disaster reduction and other fields have raised the need for low-frequency/ultra-low-frequency vibration calibration. In order to improve the signal-to-noise ratio of the standard vibration signal and ensure the calibration accuracy of low-frequency/ultra-low-frequency vibration, the vibration calibration table is required to have as large a stroke as possible under the premise of ensuring thrust and precision. In the design process of the large-stroke vibration calibration table, there are contradictions among the amplitude, uniformity of the magnetic field, the magnitude of the electromagnetic driving force, the characteristics of the linear electromagnetic driving force, the accuracy of motion guidance, and the accuracy of processing and assembly. What are the key and difficult points? Through reasonable electromagnetic design and structural design, and by ensuring processing and assembly accuracy, a highly uniform distribution of strong magnetic induction intensity is achieved in a long air gap, and the electromagnetic driving force output within the entire stroke after the coil is energized is comparable to that of the working coil. It is proportional to the current in it, and has nothing to do with the position of the working coil, that is, the ideal linear electromagnetic driving force characteristic is obtained.

浙江大学的何闻等提出了一种大行程振动校准台技术方案(1.浙江大学,“大行程电磁振动台的双磁路结构”,中国专利号:ZL200710069095.2;2.浙江大学,“一种电磁振动台”,中国专利号:ZL200820087256.0;3.浙江大学,“具有基于直线光栅尺反馈控制装置的振动台”,中国专利号:ZL201110115072.7;4.WenHe,etal.“Closed-Double-MagneticCircuitforaLong-strokeHorizontalElectromagneticVibrationExciter”,IEEETransactionsonMagnetics,2011,49(8):4865-4872)。该技术方案中,圆柱形磁体、中心磁极(磁轭)和筒状外磁极同轴线装配,两磁体的同磁极相对、安装在中心磁极两端,磁体中心设有通孔,采用非导磁螺栓进行固定,中心磁极同轴装配在筒状外磁极内部,筒状线圈套装在中心磁极上而位于气隙中,线圈与气浮套固定连接而通过气浮导轨进行导向,线圈通电后在磁场中受力并产生运动,产生标准振动信号。该技术方案采用双磁体互补,漏磁较小,磁体利用率高,能够实现较大的推力、较大的行程和较低的波形失真度指标,是国内公开报道的具有自主知识产权和较高实用化程度的振动校准台技术方案之一。He Wen from Zhejiang University proposed a technical solution for a large-stroke vibration calibration table (1. Zhejiang University, "Dual Magnetic Circuit Structure of a Large-stroke Electromagnetic Vibration Table", Chinese Patent No.: ZL200710069095.2; 2. Zhejiang University, " An Electromagnetic Vibration Table", Chinese Patent No.: ZL200820087256.0; 3. Zhejiang University, "A Vibration Table with Feedback Control Device Based on a Linear Grating Scale", Chinese Patent No.: ZL201110115072.7; 4. WenHe, et al. "Closed - Double-Magnetic Circuit for a Long-stroke Horizontal Electromagnetic Vibration Exciter", IEEE Transactions on Magnetics, 2011, 49(8): 4865-4872). In this technical scheme, the cylindrical magnet, the central magnetic pole (yoke) and the cylindrical outer magnetic pole are assembled on the same axis, and the same magnetic poles of the two magnets are opposite to each other, and are installed at both ends of the central magnetic pole. Bolts are fixed, the central magnetic pole is coaxially assembled inside the cylindrical outer magnetic pole, and the cylindrical coil is set on the central magnetic pole and located in the air gap. Medium force and motion, produce standard vibration signal. The technical solution adopts double magnet complementation, with small magnetic flux leakage and high magnet utilization rate, which can realize greater thrust, greater stroke and lower waveform distortion index. It is a domestic public report with independent intellectual property rights and higher It is one of the technical schemes of the practical level vibration calibration table.

德国联邦物理技术研究院(PTB)的Hans-J.vonMartens等也提出了一种大行程振动校准台技术方案(1.Hans-J.vonMartens,etal,″TraceabilityofVibrationandShockMeasurementsbyLaserInterferometry″,Measurement,2000,28:3-20)。该技术方案采用圆柱形软磁芯、圆筒形永磁体和圆筒形软磁管,两永磁体的同磁极相对、安装在圆筒形软磁管的两端,软磁芯同轴装配在软磁管的内部,通过两端的软磁部件形成闭合磁路,线圈骨架和工作线圈均为圆筒形,线圈骨架套装在中心磁轭上,并与气浮运动部件固定连接,通过气浮导轨进行导向。采用该技术方案的大行程振动校准台的振幅较大,配合高性能永磁体和磁轭材料,可实现较高水平的横向振动比、波形失真度等技术指标。Hans-J.vonMartens etc. of German Federal Institute of Physics and Technology (PTB) also proposed a kind of large-stroke vibration calibration platform technical scheme (1.Hans-J.vonMartens, et al, "TraceabilityofVibrationandShockMeasurementsbyLaserInterferometry", Measurement, 2000, 28:3 -20). The technical scheme adopts a cylindrical soft magnetic core, a cylindrical permanent magnet and a cylindrical soft magnetic tube. The same magnetic poles of the two permanent magnets are opposite and are installed at both ends of the cylindrical soft magnetic tube. Inside the soft magnetic tube, a closed magnetic circuit is formed by the soft magnetic parts at both ends. The coil bobbin and the working coil are both cylindrical. to guide. The large-stroke vibration calibration table adopting this technical solution has a large amplitude, and with high-performance permanent magnets and yoke materials, it can achieve a high level of technical indicators such as lateral vibration ratio and waveform distortion.

上述两种技术方案存在的不足之处在于:1)圆筒形外磁轭需进行长内尺寸加工,加工困难,精度难以保证;2)采用圆柱形永磁体时,永磁体上需加工通孔并通过非导磁螺栓固定在磁轭上,装配复杂且会对磁路产生影响;采用圆筒形永磁体时,大尺寸圆筒形永磁体的烧结、加工、充磁和装配均较为困难;3)圆筒形外磁轭需套装在中心磁轭上,如永磁体采用先充磁后装配的方式,装配十分困难,装配精度难以保证;如采用AlNiCo材料的永磁体,可采用先装配后充磁的方式,但由于AlNiCo材料永磁体矫顽力较低,性能欠佳,严重制约力学性能与指标。The disadvantages of the above two technical solutions are: 1) the cylindrical outer yoke needs to be processed in the long inner dimension, which is difficult to process and difficult to guarantee the accuracy; 2) when the cylindrical permanent magnet is used, the through hole needs to be processed on the permanent magnet And it is fixed on the yoke by non-magnetic bolts, the assembly is complicated and will affect the magnetic circuit; when a cylindrical permanent magnet is used, it is difficult to sinter, process, magnetize and assemble a large-sized cylindrical permanent magnet; 3) The cylindrical outer yoke needs to be set on the central yoke. If the permanent magnet is magnetized first and then assembled, the assembly is very difficult and the assembly accuracy is difficult to guarantee; if the permanent magnet made of AlNiCo material is used, it can be assembled first and then assembled. However, due to the low coercive force of AlNiCo material permanent magnets, the performance is not good, which seriously restricts the mechanical properties and indicators.

美国APS公司的KennethJosephMetzgar等也提出了一种大行程振动校准台技术方案(KennethJosephMetzgaretal,“ElectrodynamicForceGenerator”,美国专利号:US3816777)。该技术方案中得电磁驱动结构是由4组相同的子装配体构成,每个子装配体由两个楔形磁极片、一个衔接块(软磁材料)、一个磁体组成,衔接块分隔并连接两个楔形磁极片的厚端,形成一个具有长气隙的钳形结构,磁体安装在气隙中并固定在一个楔形磁极片表面,磁体可采用先装配后充磁的方式。4组子装配体两两层叠后,采用螺栓将两个层叠的子装配体固定形成两个相同结构的部件,再将这两个部件的钳口端对接,并采用卧在楔形磁极片中的螺栓将对接结构连接紧固,形成完整的电磁驱动结构。对接后的电磁驱动结构具有两条长气隙,动圈(工作线圈)位于气隙中,并通过轴承和沿轴线方向的轴承杆进行导向。该技术方案易在气隙中实现高磁感应强度,且进行了较成熟的产品化和推广。KennethJosephMetzgar of APS Company in the United States also proposed a technical solution for a large-stroke vibration calibration table (KennethJosephMetzgaretal, "ElectrodynamicForceGenerator", US Patent No.: US3816777). The electromagnetic drive structure in this technical solution is composed of 4 groups of identical subassemblies. Each subassembly is composed of two wedge-shaped magnetic pole pieces, a connecting block (soft magnetic material), and a magnet. The connecting block separates and connects two The thick end of the wedge-shaped pole piece forms a pincer structure with a long air gap. The magnet is installed in the air gap and fixed on the surface of a wedge-shaped pole piece. The magnet can be assembled first and then magnetized. After the 4 groups of subassemblies are stacked in pairs, bolts are used to fix the two stacked subassemblies to form two parts of the same structure, and then the jaw ends of these two parts are butted together, and a pole piece lying in the wedge-shaped pole piece is used The bolts connect and fasten the butt joint structure to form a complete electromagnetic drive structure. The electromagnetic drive structure after docking has two long air gaps, and the moving coil (working coil) is located in the air gap, and is guided by the bearing and the bearing rod along the axial direction. This technical solution is easy to achieve high magnetic induction in the air gap, and has been commercialized and popularized relatively maturely.

该技术方案存在的不足之处在于:1)电磁驱动结构由多个结构组合、拼接构成,结构复杂;小块永磁体需采用胶粘或其它方式安装在楔形磁极片上,装配复杂,难以保证装配精度;2)气隙中某一位置的静态磁感应强度与该处永磁体的工作点直接相关,整个气隙内磁场的均匀性难以保证,对小块永磁体的材料和工艺的一致性要求较高;3)永磁体直接面对气隙,工作线圈通电后产生的附加磁场会对其产生强制充磁或去磁作用,当工作线圈中通以较大电流时,容易使永磁体产生不可逆退磁;4)工作线圈通电时,线圈一侧的磁通增大、另一侧磁通减少,由于永磁体直接面对气隙,磁通增大一侧的磁路容易饱和,此时线圈一侧增加的磁通比另一侧减少的磁通要少,导致线圈所在位置的平均磁感应强度降低,进而使产生的标准振动信号产生波形失真。The shortcomings of this technical solution are: 1) The electromagnetic drive structure is composed of multiple structural combinations and splicing, and the structure is complex; the small permanent magnet needs to be installed on the wedge-shaped pole piece by glue or other methods, which is complicated to assemble and difficult to ensure. Accuracy; 2) The static magnetic induction intensity at a certain position in the air gap is directly related to the working point of the permanent magnet at that place, and the uniformity of the magnetic field in the entire air gap is difficult to guarantee, and the requirements for the consistency of the materials and processes of the small permanent magnets are relatively high. High; 3) The permanent magnet directly faces the air gap, and the additional magnetic field generated after the working coil is energized will have a forced magnetization or demagnetization effect on it. When a large current is passed through the working coil, it is easy to cause irreversible demagnetization of the permanent magnet ;4) When the working coil is energized, the magnetic flux on one side of the coil increases and the magnetic flux on the other side decreases. Since the permanent magnet directly faces the air gap, the magnetic circuit on the side where the magnetic flux increases is easy to saturate. The increased flux is less than the decreased flux on the other side, resulting in a decrease in the average magnetic induction at the location of the coil, which in turn distorts the waveform of the standard vibration signal generated.

如前所述,在大行程振动校准台的设计过程中,存在着振幅、磁场均匀性、电磁驱动力大小、线性电磁驱动力特性、运动导向精度、加工与装配精度之间的矛盾,设计的难点和关键是通过合理的电磁设计与结构设计,在长气隙内实现高均匀度的强磁感应强度分布,并使工作线圈通电后在全行程内输出的电磁驱动力与电流大小成正比,而与工作线圈所处的位置无关,即获得理想的线性电磁驱动力特性。而现有技术均存在各种问题与不足,气隙内静态磁感应强度分布的均匀性、线圈通电后输出电磁驱动力的线性度指标很难有进一步提升。其中的关键问题有三点:As mentioned above, in the design process of the large-stroke vibration calibration table, there are contradictions among the amplitude, uniformity of the magnetic field, the magnitude of the electromagnetic driving force, the characteristics of the linear electromagnetic driving force, the accuracy of motion guidance, and the accuracy of processing and assembly. The difficulty and the key is to achieve a highly uniform distribution of strong magnetic induction intensity in the long air gap through reasonable electromagnetic design and structural design, and to make the electromagnetic driving force output in the whole stroke after the working coil is energized proportional to the current, while It has nothing to do with the position of the working coil, that is, the ideal linear electromagnetic driving force characteristic is obtained. However, there are various problems and deficiencies in the existing technologies. It is difficult to further improve the uniformity of static magnetic induction intensity distribution in the air gap and the linearity index of the output electromagnetic driving force after the coil is energized. There are three key issues:

(1)长气隙内主磁路磁感应强度分布的均匀性难以保证。线圈通电前,永磁体励磁形成稳定的主磁路磁感应强度分布,随着振动校准台行程的增大,长气隙内磁场的均匀性很难保证,直接影响线圈通电后输出电磁驱动力的线性度;有研究人员尝试通过调整电流波形进行补偿,但效果难以保证,尤其是对高阶磁场非均匀性误差补偿效果欠佳,目前国内外尚未提出有效的且具有较高实用性的补偿方法。(1) The uniformity of the magnetic induction intensity distribution of the main magnetic circuit in the long air gap is difficult to guarantee . Before the coil is energized, the permanent magnet is excited to form a stable distribution of the magnetic induction intensity of the main magnetic circuit. As the stroke of the vibration calibration table increases, it is difficult to ensure the uniformity of the magnetic field in the long air gap, which directly affects the linearity of the output electromagnetic driving force after the coil is energized. Some researchers try to compensate by adjusting the current waveform, but the effect is difficult to guarantee, especially for high-order magnetic field non-uniformity error compensation. At present, no effective and highly practical compensation method has been proposed at home and abroad.

(2)工作线圈通电后的电枢反应制约输出电磁驱动力的线性度及输出振动波形的失真度 指标。工作线圈通电后会产生附加磁场,该附加磁场与主磁场叠加耦合,对主磁场产生增磁或去磁作用,使气隙内不同位置、尤其工作线圈所在位置的磁感应强度分布变得不均匀,该现象称为电枢反应。受电枢反应影响,在行程内不同位置当线圈所加载电流密度相同时,输出的电磁驱动力不一致;而在同一位置电磁驱动力的大小与电流密度不成正比,存在一定的非线性。电枢反应是振动校准台输出振动波形产生失真度的关键因素之一,它的影响随驱动电流的增大而增大,是振动校准台设计中的一个难题。(2) The armature reaction after the working coil is energized restricts the linearity of the output electromagnetic driving force and the distortion index of the output vibration waveform. After the working coil is energized, an additional magnetic field will be generated. The additional magnetic field is superimposed and coupled with the main magnetic field, which will increase or demagnetize the main magnetic field, making the distribution of magnetic induction intensity at different positions in the air gap, especially where the working coil is located, uneven. This phenomenon is called armature reaction. Affected by the armature reaction, when the coil is loaded with the same current density at different positions in the stroke, the output electromagnetic driving force is inconsistent; while at the same position, the magnitude of the electromagnetic driving force is not proportional to the current density, and there is a certain nonlinearity. The armature reaction is one of the key factors for the distortion of the output vibration waveform of the vibration calibration table, and its influence increases with the increase of the driving current, which is a difficult problem in the design of the vibration calibration table.

(3)长磁轭与大尺寸永磁体加工与装配困难、精度难以保证。大行程振动校准台中,长中心磁轭需采用合理的方式以两端支撑方式固定,为保证磁通的连续性和完整性,磁通密集的关键部位应尽量避免加工通孔/螺纹孔等安装结构;大尺寸永磁体的烧结、加工与装配均十分困难,成品率很低,永磁体为脆性材料且价格昂贵,装配方法及结构不合理容易导致损坏,一般不宜在永磁体上加工通孔等形式的安装结构;同时要获得较大的电磁驱动力,一般采用NdFeB等材料的强磁永磁体,强磁永磁体零件装配过程中需要克服巨大的磁吸力,是本技术领域的一个难题。(3) It is difficult to process and assemble long yokes and large-size permanent magnets, and the accuracy is difficult to guarantee . In the large-stroke vibration calibration table, the long center yoke needs to be fixed in a reasonable way with support at both ends. In order to ensure the continuity and integrity of the magnetic flux, the key parts with dense magnetic flux should try to avoid processing through holes/threaded holes and other installations. Structure: The sintering, processing and assembly of large-size permanent magnets are very difficult, and the yield is very low. Permanent magnets are brittle materials and expensive. Unreasonable assembly methods and structures can easily lead to damage. Generally, it is not suitable to process through holes on permanent magnets, etc. The installation structure of form; At the same time, to obtain larger electromagnetic driving force, strong magnetic permanent magnets of materials such as NdFeB are generally used. In the assembly process of strong magnetic permanent magnet parts, it is necessary to overcome huge magnetic attraction force, which is a difficult problem in the technical field.

此外,涡流损耗也是影响振动校准台精度与性能的一个难题。在振动校准台工作时,工作线圈中通入的是交变驱动电流,电流幅值最大可达几十安培,线圈在长气隙中沿轴线方向以正弦规律往复运动,根据电磁场理论,交变电流及线圈运动产生的交变磁场会在磁轭表面,尤其是与气隙相邻的磁轭表面会产生电涡流,引起涡流损耗。涡流损耗一方面会产生功率最高可达几百瓦的热损耗,发热量惊人,进而带来一系列的热扰动与热变形问题;另一方面交变磁场及电涡流引起的瞬态场问题,会使实际的性能指标相对按传统设计理论、分析方法得到的结果产生较大偏差,严重影响设计精度与效果。涡流损耗是振动校准台设计中的一个难题,目前国内外尚未找到有效的解决办法。In addition, eddy current loss is also a problem that affects the accuracy and performance of the vibration calibration table . When the vibration calibration table is working, the working coil is fed with an alternating driving current, and the current amplitude can reach tens of amperes at most. The alternating magnetic field generated by the current and coil movement will generate eddy current on the surface of the yoke, especially the surface of the yoke adjacent to the air gap, causing eddy current loss. On the one hand, eddy current loss will generate heat loss with a power of up to several hundred watts, and the heat generation will be astonishing, which will bring a series of thermal disturbance and thermal deformation problems; on the other hand, the transient field problems caused by alternating magnetic fields and eddy currents, The actual performance index will have a large deviation from the results obtained by traditional design theory and analysis methods, which will seriously affect the design accuracy and effect. Eddy current loss is a difficult problem in the design of vibration calibration table, and no effective solution has been found at home and abroad.

综上,受上述问题制约,采用现有技术方案产生的标准低频振动在波形失真度等指标上难有进一步突破,难以满足低频/超低频振动的高精度校准,尤其是下一代具有甚低频和超精密特征的振动校准的需求。因此,如何通过方法、结构、材料和优化设计等环节的创新,提出具有超大行程、超低工作频率和超高精度的振动校准台技术方案,对于振动计量技术的发展具有重要的意义。上述问题中的一项或几项获得解决,均会使大行程振动校准台的性能获得显著提升,使低频/超低频振动校准技术获得实质性突破。In summary, restricted by the above problems, it is difficult to make further breakthroughs in the waveform distortion and other indicators of the standard low-frequency vibration generated by the existing technical solutions, and it is difficult to meet the high-precision calibration of low-frequency/ultra-low-frequency vibration, especially the next generation with very low frequency and The need for vibration calibration of ultra-precise features. Therefore, it is of great significance for the development of vibration measurement technology to propose a technical scheme of vibration calibration table with ultra-large stroke, ultra-low operating frequency and ultra-high precision through the innovation of methods, structures, materials, and optimization design. If one or several of the above problems are solved, the performance of the large-stroke vibration calibration table will be significantly improved, and the low-frequency/ultra-low-frequency vibration calibration technology will achieve a substantial breakthrough.

发明内容Contents of the invention

本发明的目的是针对现有技术方案存在的问题,提供一种磁场跟踪补偿的双排永磁体向心励磁矩形低频振动校准台技术方案,本发明中通过电磁设计与结构设计的创新及电磁驱动技术与静压气浮导向技术的有效融合,能够兼顾大行程、大推力、线性电磁驱动力特性和高运动导向精度,可有效解决现有技术方案存在的问题与不足,尤其具有突出的补偿电枢反应对标准振动波形失真度影响的特性,为低频/超低频振动校准提供一种高精度、大行程的超低频振动校准台。The purpose of the present invention is to solve the problems existing in the existing technical solutions, and provide a technical solution of a double-row permanent magnet centripetal excitation rectangular low-frequency vibration calibration table for magnetic field tracking compensation. The effective integration of technology and static pressure air bearing technology can take into account large stroke, large thrust, linear electromagnetic driving force characteristics and high motion guidance accuracy, and can effectively solve the problems and deficiencies of existing technical solutions, especially with outstanding compensation electric The influence of the pivotal reaction on the distortion of the standard vibration waveform provides a high-precision, large-stroke ultra-low-frequency vibration calibration table for low-frequency/ultra-low-frequency vibration calibration.

本发明的技术解决方案是:Technical solution of the present invention is:

一种磁场跟踪补偿的双排永磁体向心励磁矩形低频振动校准台,由基座、电磁驱动结构、静压气浮导轨和工作台构成,电磁驱动结构和静压气浮导轨以运动轴线平行的方式安装在基座上,工作台安装在静压气浮导轨中滑套的上表面,所述基座由底板、下过渡板、框架、上盖板和导轨支撑件自下而上层叠安装构成,电磁驱动结构安装在下过渡板的上表面、框架的内部,下过渡板的中间部位设有矩形开口,矩形开口的长度大于电磁驱动结构中线圈骨架的运动范围,静压气浮导轨通过两个导轨支撑件以两端支撑的方式安装在框架上;静压气浮导轨由导轨、滑套和滑套连接件构成,滑套可滑动地套装在导轨上且与导轨通过静压气浮作用相互润滑与支撑,滑套与电磁驱动结构中的线圈骨架通过滑套连接件刚性连接,滑套连接件穿过上盖板的两条狭缝,狭缝的长度大于线圈骨架的运动范围;电磁驱动结构由矩形截面的中心磁轭、永磁体、外磁轭和端磁轭和口字形截面的线圈骨架构成,整体成轴对称结构,两个外磁轭的两端分别与两个端磁轭刚性连接、构成口字形磁轭结构,中心磁轭安装在口字形磁轭结构的长轴线上、两端分别与两个端磁轭刚性连接,永磁体的长度小于外磁轭的长度,两个长条形永磁体对称粘接装配在两个外磁轭和中心磁轭之间的两个外磁轭相对的两个表面上,两个永磁体的同磁极相对布置,两个永磁体与中心磁轭之间通过两条等宽度的气隙分隔开,线圈骨架可滑动地套装在中心磁轭上,线圈骨架上绕有工作线圈,工作线圈中通以精密可控的驱动电流,中心磁轭上均匀地绕有补偿线圈,补偿线圈中所通的电流与工作线圈中的电流方向相反、相位同步跟踪、幅值成一确定比例。A rectangular low-frequency vibration calibration table with double-row permanent magnet centripetal excitation for magnetic field tracking compensation, which is composed of a base, an electromagnetic drive structure, a static pressure air-floating guide rail and a workbench, and the electromagnetic drive structure and the static pressure air-floating guide rail are parallel to the movement axis The worktable is installed on the upper surface of the sliding sleeve in the static pressure air bearing guide rail, and the base is stacked and installed from bottom to top by the bottom plate, the lower transition plate, the frame, the upper cover plate and the guide rail support Composition, the electromagnetic drive structure is installed on the upper surface of the lower transition plate and inside the frame, the middle part of the lower transition plate is provided with a rectangular opening, the length of the rectangular opening is greater than the movement range of the coil skeleton in the electromagnetic drive structure, and the static pressure air bearing guide rail passes through two The first guide rail support is installed on the frame in the way of supporting at both ends; the static pressure air bearing guide rail is composed of guide rail, sliding sleeve and sliding sleeve connector, and the sliding sleeve is slidably set on the guide rail and passes the static pressure air flotation effect with the guide rail. Mutual lubrication and support, the sliding sleeve and the coil bobbin in the electromagnetic drive structure are rigidly connected through the sliding sleeve connecting piece, and the sliding sleeve connecting piece passes through the two slits of the upper cover plate, and the length of the slit is greater than the movement range of the coil bobbin; The driving structure is composed of a central yoke with a rectangular section, a permanent magnet, an outer yoke, an end yoke and a coil skeleton with a square section. The overall structure is axisymmetric. Rigidly connected to form a zigzag yoke structure, the center yoke is installed on the long axis of the zigzag yoke structure, and the two ends are rigidly connected to the two end yokes respectively. The length of the permanent magnet is less than the length of the outer yoke, and the two The strip-shaped permanent magnets are symmetrically bonded and assembled on the two opposite surfaces of the two outer yokes between the two outer yokes and the center yoke. The same magnetic poles of the two permanent magnets are arranged opposite to each other. The yokes are separated by two equal-width air gaps. The coil bobbin is slidably set on the central yoke. A working coil is wound on the coil bobbin. A precise and controllable driving current is passed through the working coil. A compensation coil is uniformly wound on the yoke, and the direction of the current passing through the compensation coil is opposite to that of the working coil, the phase is synchronously tracked, and the amplitude is in a certain ratio.

所述中心磁轭的安装方式是采用两个口字形截面、不导磁材料的磁轭安装框,将两个磁轭安装框套装在中心磁轭的两端且与中心磁轭刚性连接,将两个磁轭安装框穿过下过渡板上的矩形开口固定在底板的上表面,从而将中心磁轭以两端支撑的方式固定。The installation method of the center yoke is to adopt two yoke installation frames with square-shaped cross-section and non-magnetic materials. The two yoke installation frames are set on the two ends of the center yoke and rigidly connected with the center yoke. The two yoke mounting frames pass through the rectangular openings on the lower transition plate and are fixed on the upper surface of the bottom plate, so that the central yoke is fixed in a manner of supporting at both ends.

所述永磁体是采用多个小块永磁体,以粘接的方式拼接构成。The permanent magnet is formed by splicing a plurality of small permanent magnets by bonding.

本发明的技术创新性及产生的良好效果在于:The technical innovation of the present invention and the good effect that produce are:

(1)本发明提出一种矩形开放式磁场的电磁驱动结构设计,永磁体和磁轭零件的截面均为矩形,电磁驱动结构简单可靠,零部件容易保证加工与装配精度;由于永磁体可采用先充磁、后装配的方式,因此可采用NdFeB等材料的高性能永磁体,从而可获得高气隙磁感应强度与大电磁驱动力;解决了现有技术方案中长尺寸圆筒形磁轭难以加工,零件加工与装配精度难以保证,强磁永磁体装配困难等问题;可使长气隙内主磁路的磁感应强度分布实现较高 的均匀性指标。这是本发明区别于现有技术的创新点之一。(1) The present invention proposes an electromagnetic drive structure design of a rectangular open magnetic field. The cross-sections of the permanent magnet and the yoke parts are rectangular, the electromagnetic drive structure is simple and reliable, and the parts are easy to ensure processing and assembly accuracy; since the permanent magnet can be used The way of magnetizing first and then assembling, so high-performance permanent magnets of NdFeB and other materials can be used, so that high air-gap magnetic induction intensity and large electromagnetic driving force can be obtained; Processing, parts processing and assembly accuracy are difficult to guarantee, and the assembly of strong magnetic permanent magnets is difficult; it can make the magnetic induction intensity distribution of the main magnetic circuit in the long air gap achieve a high uniformity index . This is one of the innovative points that the present invention is different from the prior art.

(2)本发明采用磁轭安装框可将长中心磁轭以两端支撑方式可靠安装固定,装配过程简单可靠,大大降低了装配难度;解决了长中心磁轭可靠安装固定的问题。这是本发明区别于现有技术的创新点之二。(2) The present invention adopts the yoke installation frame to reliably install and fix the long center yoke in the way of supporting at both ends, the assembly process is simple and reliable, and greatly reduces the difficulty of assembly; it solves the problem of reliable installation and fixation of the long center yoke . This is the second innovative point that the present invention is different from the prior art.

(3)本发明在中心磁轭上设置补偿线圈,所通电流与工作线圈中加载的电流方向相反、相位同步跟踪、幅值成一定比例,理论研究及实验结果均表明,补偿线圈形成的补偿磁场可对工作线圈通电后产生附加磁场影响主磁场分布的现象、即电枢反应的影响进行同步跟踪补偿;可实现近似理想的线性电磁驱动力特性,有效解决了电枢反应对电磁振动台输出标准振 动波形失真度的影响问题。这是本发明区别现有技术的创新点之三。(3) The present invention arranges the compensating coil on the center yoke, the direction of the passing current is opposite to the current loaded in the working coil, the phase is synchronously tracked, and the amplitude is proportional to a certain ratio. Theoretical research and experimental results all show that the compensating coil formed The magnetic field can synchronously track and compensate the phenomenon that the additional magnetic field generated after the working coil is energized and affects the distribution of the main magnetic field, that is, the influence of the armature reaction; it can realize approximately ideal linear electromagnetic driving force characteristics, and effectively solve the problem of the armature reaction on the output of the electromagnetic vibrating table The impact of standard vibration waveform distortion. This is the third innovative point that the present invention differs from the prior art.

(4)本发明将电磁驱动技术与静压气浮导向技术有效融合,利用静压气浮导轨无摩擦、无磨损、高运动导向精度等特性,可同时获得突出的电磁驱动力学特性和高运动导向精度,进一步保证了振动校准台输出标准振动波形的失真度指标。这是本发明区别现有技术的创新点之四。(4) The present invention effectively integrates the electromagnetic drive technology and the static pressure air flotation guide technology, and utilizes the characteristics of the static pressure air flotation guide rail such as no friction, no wear, and high motion guidance accuracy, and can obtain outstanding electromagnetic drive mechanical characteristics and high motion at the same time. The guiding accuracy further ensures the distortion index of the standard vibration waveform output by the vibration calibration table. This is the fourth innovative point that the present invention differs from the prior art.

(5)本发明中长条形大尺寸永磁体可采用小块永磁体以先拼接后充磁的方式获得,可大大降低大尺寸永磁体的烧结、加工与充磁的难度;解决了现有技术方案中大尺寸圆柱形、圆筒形永磁体烧结、加工和充磁困难等问题。这是本发明区别于现有技术的创新点之五。(5) The strip-shaped large-size permanent magnets in the present invention can be obtained by splicing first and then magnetizing by adopting small pieces of permanent magnets, which can greatly reduce the difficulty of sintering, processing and magnetization of large-size permanent magnets; In the technical solution, there are problems such as difficulties in sintering, processing and magnetization of large-size cylindrical and cylindrical permanent magnets. This is the fifth innovative point that the present invention is different from the prior art.

附图说明Description of drawings

图1为磁场跟踪补偿的双排永磁体向心励磁矩形低频振动校准台的爆炸结构示意图;Figure 1 is a schematic diagram of the explosive structure of a rectangular low-frequency vibration calibration table with double-row permanent magnet centripetal excitation for magnetic field tracking compensation;

图2为磁场跟踪补偿的双排永磁体向心励磁矩形低频振动校准台的整体结构示意图;Figure 2 is a schematic diagram of the overall structure of a rectangular low-frequency vibration calibration table with double-row permanent magnet centripetal excitation for magnetic field tracking compensation;

图3为电磁驱动结构的整体示意图;3 is an overall schematic diagram of the electromagnetic drive structure;

图4为图3的俯视图;Fig. 4 is the top view of Fig. 3;

图5为永磁体磁极布置方式和主磁路的示意图;Fig. 5 is the schematic diagram of permanent magnet magnetic pole layout and main magnetic circuit;

图6为采用磁轭安装框对中心磁轭进行安装固定的示意图;Fig. 6 is a schematic diagram of installing and fixing the center yoke by using the yoke installation frame;

图7为磁轭安装框的结构示意图;Fig. 7 is a structural schematic diagram of a yoke mounting frame;

图8为线圈骨架一个实施例的结构示意图。Fig. 8 is a structural schematic diagram of an embodiment of a coil bobbin.

图中件号说明:2中心磁轭、3永磁体、4外磁轭、5端磁轭、6线圈骨架、7气隙、8工作线圈、10磁轭安装框、11第一磁路、12第二磁路、13电磁驱动结构、14静压气浮导轨、15工作台、16基座、17底板、18下过渡板、19框架、20上盖板、21导轨支撑件、22矩形开口、23导轨、24滑套、25滑套连接件、26狭缝、27补偿线圈。Part number description in the figure: 2 center yoke, 3 permanent magnet, 4 outer yoke, 5 end yoke, 6 coil bobbin, 7 air gap, 8 working coil, 10 yoke mounting frame, 11 first magnetic circuit, 12 The second magnetic circuit, 13 electromagnetic drive structure, 14 static pressure air bearing guide rail, 15 worktable, 16 base, 17 bottom plate, 18 lower transition plate, 19 frame, 20 upper cover plate, 21 guide rail support, 22 rectangular opening, 23 guide rails, 24 sliding sleeves, 25 sliding sleeve connectors, 26 slits, 27 compensation coils.

具体实施方式detailed description

下面结合附图对本发明的具体实施方式进行详细说明,并给出实施例。The specific implementation manner of the present invention will be described in detail below with reference to the accompanying drawings, and examples will be given.

一种磁场跟踪补偿的双排永磁体向心励磁矩形低频振动校准台,由基座16、电磁驱动结构13、静压气浮导轨14和工作台15构成,电磁驱动结构13和静压气浮导轨14以运动轴线平行的方式安装在基座16上,工作台15安装在静压气浮导轨14中滑套24的上表面,所述基座16由底板17、下过渡板18、框架19、上盖板20和导轨支撑件21自下而上层叠安装构成,电磁驱动结构13安装在下过渡板18的上表面、框架19的内部,下过渡板18的中间部位设有矩形开口22,矩形开口22的长度大于电磁驱动结构13中线圈骨架6的运动范围,静压气浮导轨14通过两个导轨支撑件21以两端支撑的方式安装在框架19上;静压气浮导轨14由导轨23、滑套24和滑套连接件25构成,滑套24可滑动地套装在导轨23上且与导轨23通过静压气浮作用相互润滑与支撑,滑套24与电磁驱动结构13中的线圈骨架6通过滑套连接件25刚性连接,滑套连接件25穿过上盖板20的两条狭缝26,狭缝26的长度大于线圈骨架6的运动范围;电磁驱动结构13由矩形截面的中心磁轭2、永磁体3、外磁轭4和端磁轭5和口字形截面的线圈骨架6构成,整体成轴对称结构,两个外磁轭4的两端分别与两个端磁轭5刚性连接、构成口字形磁轭结构,中心磁轭2安装在口字形磁轭结构的长轴线上、两端分别与两个端磁轭5刚性连接,永磁体3的长度小于外磁轭4的长度,两个长条形永磁体3对称粘接装配在两个外磁轭4和中心磁轭2之间的两个外磁轭4相对的两个表面上,两个永磁体3的同磁极相对布置,两个永磁体3与中心磁轭2之间通过两条等宽度的气隙7分隔开,线圈骨架6可滑动地套装在中心磁轭2上,线圈骨架6上绕有工作线圈8,工作线圈8中通以精密可控的驱动电流,中心磁轭2上均匀地绕有补偿线圈27,补偿线圈27中所通的电流与工作线圈8中的电流方向相反、相位同步跟踪、幅值成一确定比例。A rectangular low-frequency vibration calibration platform with double-row permanent magnet centripetal excitation for magnetic field tracking compensation, consisting of a base 16, an electromagnetic drive structure 13, a static pressure air flotation guide rail 14, and a workbench 15, the electromagnetic drive structure 13 and the static pressure air flotation The guide rail 14 is installed on the base 16 in a manner parallel to the movement axis, and the worktable 15 is installed on the upper surface of the sliding sleeve 24 in the static pressure air bearing guide rail 14. The base 16 is composed of a base plate 17, a lower transition plate 18, and a frame 19 , the upper cover plate 20 and the guide rail support member 21 are stacked and installed from bottom to top. The electromagnetic drive structure 13 is installed on the upper surface of the lower transition plate 18 and the inside of the frame 19. The middle part of the lower transition plate 18 is provided with a rectangular opening 22. The length of the opening 22 is greater than the range of motion of the coil bobbin 6 in the electromagnetic drive structure 13, and the static pressure air bearing guide rail 14 is installed on the frame 19 in a manner supported at both ends by two guide rail supports 21; the static pressure air bearing guide rail 14 is formed by the guide rail 23. The sliding sleeve 24 and the sliding sleeve connecting piece 25 are formed. The sliding sleeve 24 is slidably set on the guide rail 23 and is mutually lubricated and supported by the guide rail 23 through static pressure air flotation. The sliding sleeve 24 and the coil in the electromagnetic drive structure 13 The frame 6 is rigidly connected by a sliding sleeve connecting piece 25, and the sliding sleeve connecting piece 25 passes through two slits 26 of the upper cover plate 20, and the length of the slit 26 is greater than the range of motion of the coil frame 6; the electromagnetic driving structure 13 consists of a rectangular section The central yoke 2, the permanent magnet 3, the outer yoke 4, the end yoke 5 and the coil skeleton 6 with a square cross section form an axisymmetric structure as a whole, and the two ends of the two outer yokes 4 are respectively connected to the two end yokes 5 are rigidly connected to form a zigzag yoke structure. The central yoke 2 is installed on the long axis of the zigzag yoke structure, and the two ends are rigidly connected to the two end yokes 5 respectively. The length of the permanent magnet 3 is shorter than that of the outer yoke 4 The length of the two strip-shaped permanent magnets 3 is symmetrically bonded and assembled on the two opposite surfaces of the two outer yokes 4 between the two outer yokes 4 and the center yoke 2, and the two permanent magnets 3 are at the same time The magnetic poles are oppositely arranged, and the two permanent magnets 3 are separated from the central yoke 2 by two air gaps 7 of equal width. Coil 8, a precise and controllable driving current is passed through the working coil 8, and a compensation coil 27 is evenly wound on the center yoke 2, and the direction of the current passing through the compensation coil 27 is opposite to that of the working coil 8, and the phase is synchronously tracked , The amplitude becomes a certain ratio.

所述中心磁轭2的安装方式是采用两个口字形截面、不导磁材料的磁轭安装框10,将两个磁轭安装框10套装在中心磁轭2的两端且与中心磁轭2刚性连接,将两个磁轭安装框10穿过下过渡板18上的矩形开口22固定在底板17的上表面,从而将中心磁轭2以两端支撑的方式固定。The installation method of the center yoke 2 is to adopt two yoke installation frames 10 with cross-section and non-magnetic materials, and the two yoke installation frames 10 are set on the two ends of the center yoke 2 and connected with the center yoke. 2. Rigid connection, the two yoke mounting frames 10 are fixed on the upper surface of the bottom plate 17 through the rectangular opening 22 on the lower transition plate 18, so that the central yoke 2 is fixed in a manner supported at both ends.

所述永磁体3是采用多个小块永磁体,以粘接的方式拼接构成。The permanent magnet 3 is formed by splicing a plurality of small pieces of permanent magnets by bonding.

下面结合图1~图5给出本发明的一个实施例。本实施例中,磁场跟踪补偿的双排永磁体向心励磁矩形低频振动校准台用于产生水平方向的标准低频振动,最大振幅为1.2m。An embodiment of the present invention is given below in conjunction with FIG. 1 to FIG. 5 . In this embodiment, the rectangular low-frequency vibration calibration table with double-row permanent magnet centripetal excitation for magnetic field tracking compensation is used to generate standard low-frequency vibration in the horizontal direction, with a maximum amplitude of 1.2 m.

电磁驱动结构13中,永磁体3是NdFeB材料的强磁永磁体,材料的剩磁强度为1.17T,矫顽力为890kA/m,两个永磁体3的N极相对布置,对称安装在两个外磁轭4和中心磁轭2之间、两个外磁轭4相对的两个表面上,采用粘接方式装配固定。中心磁轭2、两个外磁轭4、两个端磁轭5采用高磁导率电工纯铁材料DT4C制成,最大相对磁导率可达到12000,饱和磁通量约为2.5T。中心磁轭2、两个永磁体3、两个外磁轭4、两个端磁轭5的截面均为矩形,中心磁轭2和两个端磁轭5同轴装配。中心磁轭2和两个永磁体3之间通过两条长气隙7分隔开,气隙7的宽度为15mm。中心磁轭2、两个外磁轭4的两端与两个端磁轭5均采用螺钉刚性连接。两个长条形永磁体3通过闭合磁轭结构形成两个对称闭合磁路,在气隙7中产生高均匀度的强磁感应强度分布In the electromagnetic drive structure 13, the permanent magnet 3 is a strong magnetic permanent magnet made of NdFeB material, the remanent magnetic strength of the material is 1.17T, and the coercive force is 890kA/m. Between the two outer yokes 4 and the center yoke 2, on the two opposite surfaces of the two outer yokes 4, they are assembled and fixed by bonding. The center yoke 2, the two outer yokes 4, and the two end yokes 5 are made of high-permeability electrical pure iron material DT4C, the maximum relative permeability can reach 12000, and the saturation magnetic flux is about 2.5T. The cross sections of the central yoke 2 , the two permanent magnets 3 , the two outer yokes 4 and the two end yokes 5 are all rectangular, and the central yoke 2 and the two end yokes 5 are coaxially assembled. The central yoke 2 and the two permanent magnets 3 are separated by two long air gaps 7 with a width of 15mm. Both ends of the central yoke 2 and the two outer yokes 4 are rigidly connected with the two end yokes 5 by screws. Two strip-shaped permanent magnets 3 form two symmetrical closed magnetic circuits through the closed yoke structure, which produces a highly uniform and strong magnetic induction intensity distribution in the air gap 7

静压气浮导轨14通过两个导轨支撑件21以两端支撑的方式固定在框架19上,导轨23的轴线与电磁驱动结构13的轴线互相平行。导轨23为T型导轨,长度为2米,滑套24可渭动地套装在导轨23上,二者之间通过静压气浮作用互相润滑与承载。工作台15采用螺钉固定在滑套24的上表面,上盖板20上具有两条细长的狭缝26,狭缝26的长度为1.4米,滑套24通过滑套连接件25、穿过狭缝26与线圈骨架6采用螺钉刚性连接。The static pressure air bearing guide rail 14 is fixed on the frame 19 by means of two guide rail support members 21 supported at both ends, and the axis of the guide rail 23 and the axis of the electromagnetic driving structure 13 are parallel to each other. The guide rail 23 is a T-shaped guide rail with a length of 2 meters. The sliding sleeve 24 can be movably sleeved on the guide rail 23, and the two are mutually lubricated and carried by static pressure air flotation. The workbench 15 is fixed on the upper surface of the sliding sleeve 24 by screws. There are two slender slits 26 on the upper cover plate 20. The length of the slits 26 is 1.4 meters. The sliding sleeve 24 passes through the sliding sleeve connector 25 and The slit 26 and the coil frame 6 are rigidly connected by screws.

基座16的作用是提供整体安装基础和框架。上盖板20位于静压气浮导轨14和电磁驱动结构13之间。电磁驱动结构13安装在框架19的内部,两个导轨支撑件21采用螺钉固定在框架19两端上表面,框架19与下过渡板18、底板17采用螺钉刚性连接固定在一起,下过渡板18的中间部位设有矩形开口22,磁轭安装框10穿过矩形开口22而固定在底板17的上表面,从而将中心磁轭2以两端支撑的方式固定,因此线圈骨架6及绕于其上的工作线圈8沿中心磁轭2的轴线运动时,不会与底板17发生机械干涉。The function of the base 16 is to provide the overall mounting base and frame. The upper cover plate 20 is located between the static pressure air bearing guide rail 14 and the electromagnetic driving structure 13 . The electromagnetic drive structure 13 is installed inside the frame 19, and the two guide rail supports 21 are fixed on the upper surfaces of the two ends of the frame 19 with screws. The frame 19 is rigidly connected with the lower transition plate 18 and the bottom plate 17. There is a rectangular opening 22 in the middle of the center, and the yoke mounting frame 10 passes through the rectangular opening 22 and is fixed on the upper surface of the bottom plate 17, so that the central yoke 2 is fixed in a manner supported by both ends, so the coil bobbin 6 and its winding When the working coil 8 moves along the axis of the central yoke 2, there will be no mechanical interference with the bottom plate 17.

本实施例中,永磁体励磁所形成主磁路的磁力线所经过的路径如图5所示。以第一磁路11为例,磁力线从永磁体3的N极出发,依次经过中心磁轭2、端磁轭5、与永磁体3同侧的外磁轭4,然后回到永磁体的S极形成闭合磁路。图中第一磁路11和第二磁路12呈上下对称形式。In this embodiment, the path of the magnetic field lines of the main magnetic circuit formed by the permanent magnet excitation is shown in FIG. 5 . Taking the first magnetic circuit 11 as an example, the magnetic field line starts from the N pole of the permanent magnet 3, passes through the central yoke 2, the end yoke 5, and the outer yoke 4 on the same side as the permanent magnet 3, and then returns to the S pole of the permanent magnet. The poles form a closed magnetic circuit. In the figure, the first magnetic circuit 11 and the second magnetic circuit 12 are symmetrical up and down.

线圈骨架6采用99氧化铝陶瓷制成,截面为口字形,中心的方形开口使线圈骨架6能够可滑动地套装在中心磁轭2上。工作线圈8是采用绝缘铜漆包线在线圈骨架6外表面缠绕形成,截面也是口字形,厚度为5mm,所通最大电流密度为5A/mm2。电磁振动台电磁驱动结构装配完成后,线圈骨架6和工作线圈8有两个边位于气隙7中。电磁振动台工作时,控制信号经功率放大器放大后,输出有效值最高达几十A的功率电流加载到工作线圈8中,根据电磁场理论,磁场中通电的工作线圈8受到水平方向洛伦兹力作用,从而输出精密可控的电磁驱动力。通过控制所通电流的大小和方向可以精密控制电磁驱动力的大小和方向。控制信号如果采用标准正弦电信号,工作线圈8与线圈骨架6将在电磁驱动力的作用下沿轴向产生标准低频正弦振动。The coil bobbin 6 is made of 99 alumina ceramics, with a square cross section, and the square opening in the center enables the coil bobbin 6 to be slidably fitted on the central yoke 2 . The working coil 8 is formed by winding an insulated copper enameled wire on the outer surface of the coil frame 6 . After the electromagnetic drive structure of the electromagnetic vibrating table is assembled, two sides of the coil bobbin 6 and the working coil 8 are located in the air gap 7 . When the electromagnetic vibrating table is working, the control signal is amplified by the power amplifier, and the power current with an output effective value of up to tens of A is loaded into the working coil 8. According to the electromagnetic field theory, the working coil 8 energized in the magnetic field is subjected to the Lorentz force in the horizontal direction function, so as to output precise and controllable electromagnetic driving force. The magnitude and direction of the electromagnetic driving force can be precisely controlled by controlling the magnitude and direction of the applied current. If the control signal adopts a standard sinusoidal electrical signal, the working coil 8 and the coil frame 6 will produce standard low-frequency sinusoidal vibration along the axial direction under the action of the electromagnetic driving force.

电磁振动台工作时,工作线圈8加载电流后会产生附加磁场,该附加磁场会影响永磁体3励磁产生的主磁路的磁场分布,该现象称为电枢反应,电枢反应是影响电磁振动台输出标准振动的波形失真度的主要因素。本发明在中心磁轭2上设有补偿线圈27,补偿线圈27是采用绝缘铜漆包线在中心磁轭2外表面缠绕形成,截面也是口字形,厚度为1.5mm,所通最大电流密度为4A/mm2,补偿线圈27中所通的电流与工作线圈8中的电流方向相反、相位同步跟踪、幅值成一确定比例,补偿线圈27所产生的补偿磁场会对工作线圈8产生的附加磁场进行同步跟踪补偿,可有效改善电枢反应对电磁振动台输出标准振动的波形失真度的影响。When the electromagnetic vibrating table is working, an additional magnetic field will be generated after the working coil 8 is loaded with current. This additional magnetic field will affect the magnetic field distribution of the main magnetic circuit generated by the excitation of the permanent magnet 3. This phenomenon is called armature reaction, which affects electromagnetic vibration. The main factor of the waveform distortion of the standard vibration output by the platform. The present invention is provided with compensating coil 27 on the central yoke 2, and compensating coil 27 is to adopt insulated copper enameled wire to wind on the outer surface of central yoke 2 to form, and cross-section is also square shape, and thickness is 1.5mm, and the maximum current density that passes through is 4A/ mm 2 , the direction of the current passing through the compensation coil 27 is opposite to the current in the working coil 8, the phase is synchronously tracked, and the amplitude is in a certain ratio. The compensation magnetic field generated by the compensation coil 27 will synchronize the additional magnetic field generated by the working coil 8 Tracking compensation can effectively improve the influence of armature reaction on the waveform distortion of the standard vibration output by the electromagnetic vibrating table.

下面结合图6、图7给出磁轭安装框的一个实施例。要使线圈骨架6和工作线圈8套装在中心磁轭2上且具有较长的行程,长尺寸中心磁轭2必须以两端支撑的方式进行安装固定。本实施例中,磁轭安装框10采用陶瓷材料制成,截面为口字形,两个磁轭安装框10套装在中心磁轭2的两端并通过螺钉与中心磁轭2刚性连接,两个磁轭安装框10上有螺纹孔,两个磁轭安装框10穿过下过渡板18上的矩形开口22固定在底板17的上表面。An embodiment of the yoke installation frame is given below in conjunction with FIG. 6 and FIG. 7 . In order to make the bobbin 6 and the working coil 8 fit on the center yoke 2 and have a longer stroke, the long-size center yoke 2 must be installed and fixed in a manner supported by both ends. In this embodiment, the yoke mounting frame 10 is made of ceramic material with a cross-section. The two yoke mounting frames 10 are set on both ends of the central yoke 2 and are rigidly connected to the central yoke 2 by screws. There are threaded holes on the yoke mounting frames 10 , and the two yoke mounting frames 10 pass through the rectangular opening 22 on the lower transition plate 18 and are fixed on the upper surface of the bottom plate 17 .

图8给出了线圈骨架的一个实施例。本实施例中,线圈骨架6采用99氧化铝陶瓷材料,截面为口字形,壁厚为5mm,其中心的方形开口使线圈骨架6能够可滑动地套装在中心磁轭2上。工作线圈8均匀密绕在线圈骨架6上,线圈骨架6的两端加工有小凸台,用于防止工作线圈8脱落。实际实施过程中,线圈骨架6的壁上可以设置密布圆孔、小方孔等形式的减重孔,用于减轻线圈骨架6的重量,减小振动校准台的动载荷。Figure 8 shows an embodiment of the bobbin. In this embodiment, the coil bobbin 6 is made of 99 alumina ceramic material with a cross-section and a wall thickness of 5 mm. The square opening in the center enables the coil bobbin 6 to be slidably fitted on the central yoke 2 . The working coil 8 is evenly and densely wound on the bobbin 6 , and both ends of the bobbin 6 are processed with small bosses for preventing the working coil 8 from falling off. In the actual implementation process, the wall of the coil frame 6 can be provided with densely distributed round holes, small square holes and other forms of weight-reducing holes, which are used to reduce the weight of the coil frame 6 and reduce the dynamic load of the vibration calibration table.

Claims (3)

1.一种磁场跟踪补偿的双排永磁体向心励磁矩形低频振动校准台,由基座(16)、电磁驱动结构(13)、静压气浮导轨(14)和工作台(15)构成,电磁驱动结构(13)和静压气浮导轨(14)以运动轴线平行的方式安装在基座(16)上,工作台(15)安装在静压气浮导轨(14)中滑套(24)的上表面,其特征在于:所述基座(16)由底板(17)、下过渡板(18)、框架(19)、上盖板(20)和导轨支撑件(21)自下而上层叠安装构成,电磁驱动结构(13)安装在下过渡板(18)的上表面、框架(19)的内部,下过渡板(18)的中间部位设有矩形开口(22),矩形开口(22)的长度大于电磁驱动结构(13)中线圈骨架(6)的运动范围,静压气浮导轨(14)通过两个导轨支撑件(21)以两端支撑的方式安装在框架(19)上;静压气浮导轨(14)由导轨(23)、滑套(24)和滑套连接件(25)构成,滑套(24)可滑动地套装在导轨(23)上且与导轨(23)通过静压气浮作用相互润滑与支撑,滑套(24)与电磁驱动结构(13)中的线圈骨架(6)通过滑套连接件(25)刚性连接,滑套连接件(25)穿过上盖板(20)的两条狭缝(26),狭缝(26)的长度大于线圈骨架(6)的运动范围;电磁驱动结构(13)由矩形截面的中心磁轭(2)、永磁体(3)、外磁轭(4)和端磁轭(5)和口字形截面的线圈骨架(6)构成,整体成轴对称结构,两个外磁轭(4)的两端分别与两个端磁轭(5)刚性连接、构成口字形磁轭结构,中心磁轭(2)安装在口字形磁轭结构的长轴线上、两端分别与两个端磁轭(5)刚性连接,永磁体(3)的长度小于外磁轭(4)的长度,所述永磁体(3)为两个且为长条形,对称粘接装配在两个外磁轭(4)和中心磁轭(2)之间的两个外磁轭(4)相对的两个表面上,两个永磁体(3)的同磁极相对布置,两个永磁体(3)与中心磁轭(2)之间通过两条等宽度的气隙(7)分隔开,线圈骨架(6)可滑动地套装在中心磁轭(2)上,线圈骨架(6)上绕有工作线圈(8),工作线圈(8)中通以精密可控的驱动电流,中心磁轭(2)上均匀地绕有补偿线圈(27),补偿线圈(27)中所通的电流与工作线圈(8)中的电流方向相反、相位同步跟踪、幅值成一确定比例。 1. A double-row permanent magnet centripetal excitation rectangular low-frequency vibration calibration table for magnetic field tracking compensation, consisting of a base (16), an electromagnetic drive structure (13), a static pressure air-floating guide rail (14) and a workbench (15) , the electromagnetic drive structure (13) and the static pressure air bearing guide rail (14) are installed on the base (16) in a manner parallel to the movement axis, and the workbench (15) is installed in the static pressure air bearing guide rail (14). 24) on the upper surface, characterized in that: the base (16) consists of a bottom plate (17), a lower transition plate (18), a frame (19), an upper cover plate (20) and a rail support (21) from the bottom And the upper stacked installation constitutes, the electromagnetic drive structure (13) is installed on the upper surface of the lower transition plate (18), the inside of the frame (19), the middle part of the lower transition plate (18) is provided with a rectangular opening (22), and the rectangular opening ( 22) is longer than the range of motion of the coil skeleton (6) in the electromagnetic drive structure (13), and the static pressure air-floating guide rail (14) is installed on the frame (19) in a manner supported at both ends by two guide rail supports (21). On; the static pressure air bearing guide rail (14) is made of guide rail (23), sliding sleeve (24) and sliding sleeve connector (25), and sliding sleeve (24) is slidably sleeved on the guide rail (23) and is connected with the guide rail ( 23) Mutual lubrication and support through static pressure and air flotation, the sliding sleeve (24) and the coil skeleton (6) in the electromagnetic drive structure (13) are rigidly connected through the sliding sleeve connector (25), and the sliding sleeve connector (25) Two slits (26) passing through the upper cover plate (20), the length of the slits (26) is greater than the range of motion of the bobbin (6); the electromagnetic drive structure (13) consists of a central yoke (2) with a rectangular cross-section , a permanent magnet (3), an outer yoke (4), an end yoke (5) and a coil skeleton (6) with a cross-section, the overall structure is axisymmetric, and the two ends of the two outer yokes (4) are respectively It is rigidly connected with the two end yokes (5) to form a zigzag yoke structure. The central yoke (2) is installed on the long axis of the zigzag yoke structure, and the two ends are respectively rigid with the two end yokes (5). connection, the length of the permanent magnet (3) is less than the length of the outer yoke (4), the permanent magnets (3) are two and elongated, symmetrically bonded and assembled between the two outer yokes (4) and the center On the two opposite surfaces of the two outer yokes (4) between the yokes (2), the same magnetic poles of the two permanent magnets (3) are arranged opposite to each other, and the two permanent magnets (3) and the central yoke (2) They are separated by two air gaps (7) of equal width, the coil bobbin (6) is slidably set on the central yoke (2), and the coil bobbin (6) is wound with a working coil (8). A precise and controllable driving current is passed through the coil (8), and a compensation coil (27) is evenly wound on the center yoke (2), and the current passed through the compensation coil (27) is the same as the current in the working coil (8). The direction is opposite, the phase is synchronously tracked, and the amplitude is in a certain ratio. 2.根据权利要求1所述的磁场跟踪补偿的双排永磁体向心励磁矩形低频振动校准台,其特征在于:所述中心磁轭(2)的安装方式是采用两个口字形截面、不导磁材料的磁轭安装框(10),将两个磁轭安装框(10)套装在中心磁轭(2)的两端且与中心磁轭(2)刚性连接,将两个磁轭安装框(10)穿过下过渡板(18)上的矩形开口(22)固定在底板(17)的上表面,从而将中心磁轭(2)以两端支撑的方式固定。 2. The double-row permanent magnet centripetal excitation rectangular low-frequency vibration calibration table for magnetic field tracking compensation according to claim 1, characterized in that: the center yoke (2) is installed in two square-shaped sections, not The yoke mounting frame (10) of magnetically conductive material, the two yoke mounting frames (10) are set on the two ends of the central yoke (2) and rigidly connected with the central yoke (2), and the two yokes are installed The frame (10) passes through the rectangular opening (22) on the lower transition plate (18) and is fixed on the upper surface of the bottom plate (17), so that the central yoke (2) is fixed in a manner of supporting at both ends. 3.根据权利要求1或2所述的磁场跟踪补偿的双排永磁体向心励磁矩形低频振动校准台,其特征在于:所述永磁体(3)是采用多个小块永磁体,以粘接的方式拼接构成。 3. The double-row permanent magnet centripetal excitation rectangular low-frequency vibration calibration table for magnetic field tracking compensation according to claim 1 or 2 is characterized in that: the permanent magnet (3) adopts a plurality of small permanent magnets to stick Splicing in a splicing manner.
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