CN104821266B - Microscope stage - Google Patents
Microscope stage Download PDFInfo
- Publication number
- CN104821266B CN104821266B CN201510230274.4A CN201510230274A CN104821266B CN 104821266 B CN104821266 B CN 104821266B CN 201510230274 A CN201510230274 A CN 201510230274A CN 104821266 B CN104821266 B CN 104821266B
- Authority
- CN
- China
- Prior art keywords
- dovetail
- slide holder
- chip
- chip slot
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000001681 protective effect Effects 0.000 claims abstract description 24
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000007689 inspection Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 238000001259 photo etching Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 101100204059 Caenorhabditis elegans trap-2 gene Proteins 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention provides a microscope stage, and relates to the field of semiconductor chip manufacturing. The microscope stage mainly comprises a stage (1) which is milled with a first chip slot (2) and/or a second chip slot (3). The periphery of the stage (1) is fixed to a protective plate through protective plate threaded holes (7). The two sides of the stage (1) are respectively provided with a first dovetail grooved rail (8), and each first dovetail grooved rail (8) is in sliding connection with a first dovetail groove (13). The bottom surfaces of the two ends of each first dovetail groove frame (9) are fixed to the top surfaces of the two ends of a corresponding second dovetail groove frame (12). Each second dovetail groove (14) is in sliding connection with a corresponding second dovetail grooved rail (17). The second dovetail grooved rails (17) are arranged on a second dovetail grooved rail frame (16), and the second dovetail grooved rail frame (16) is fixed to a microscope. The phenomenon of chip slip-off caused by fast moving of the stage can be prevented effectively, and the product yield is improved.
Description
Technical field
The present invention relates to semiconductor chip manufactures field and in particular to a kind of microscope stage.
Background technology
During modern semiconductor chips are manufactured, carrying out mesa photoetching, ito photoetching, sio2Deng after photoetching aobvious
The complete Protection glue being required for using special chemical liquid removal chip surface of shadow, every one photoetching go to be required for people after glue process
Work is checked.
Generally workman's checking tool is exactly simple microscope at present, and microscopical slide holder is also common to open rectangle
Plate.
When chip is checked, slide holder quickly moves, and edge chip is easily slipped to desktop or ground from slide holder
On, cause contamination of products, damage or scrap.
Content of the invention
(1) technical problem solving
For the deficiencies in the prior art, the invention provides a kind of microscope stage is so that chip to be checked being capable of jail
Admittedly be placed on chip slot, and thus preventing from quickly moving, due to slide holder, the chip landing phenomenon causing, improve finished product
Rate.
(2) technical scheme
For realizing object above, the present invention is achieved by the following technical programs:
A kind of microscope stage that the present invention provides, main includes slide holder it is preferred that being milled with described slide holder
First chip slot and/or the second chip slot；Described slide holder surrounding is fixed by protective plate screwed hole and protective plate；
Preferably, the both sides of described slide holder have the first dovetail grooved rail, and the first dovetail truss has the first dovetail groove；
Described first dovetail grooved rail and described first dovetail groove are slidably connected；The bottom surface and second at the first described dovetail truss two ends
On dovetail truss two ends, top surface is fixed together；The second dovetail groove is had on described second dovetail truss；Described second dovetail groove
It is slidably connected with the second dovetail rail, in the second dovetail groove rail gantry, the second dovetail groove rail gantry is fixed on aobvious described second dovetail rail
On micro mirror.
Preferably, described slide holder is milled with least one first chip slot.
Preferably, described slide holder is milled with least one second chip slot.
Preferably, the left and right sides on the described edge of the first chip slot all has and takes film perforation.
Preferably, the described edge of the second chip slot has and take film perforation.
Preferably, the described depth dimensions taking film perforation is more than the first described chip slot, the depth of described second chip slot
Degree size.
Preferably, the upper plane that the first described dovetail truss is contacted with slide holder is milled with bearing groove.
Preferably, bearing is installed in described bearing groove, described bearing can rotate in described bearing groove.
Preferably, the depth dimensions with diameter greater than described bearing groove of described bearing.
Preferably, the two ends of described first dovetail grooved rail are provided with derailing cylinder.
(3) beneficial effect
The invention provides a kind of microscope stage, due to the led chip slot of fixed dimension being milled with slide holder, look into
During inspection, chip is placed on chip slot, and the surrounding of slide holder is equipped with the protective plate exceeding slide holder such that it is able to effectively anti-
The chip landing phenomenon only causing because slide holder quickly moves, improves finished product rate.
Take dovetail groove type to be connected before and after the present invention between fixed support and slide holder, carry on the back with slide holder above fixed support
Side adopts rotatable bearing touch, it is ensured that slide holder when slide holder quickly moves or rests on extreme position in left and right
It is horizontal, need not stop to adjust microscope focus when from left to right observing chip, improve work efficiency.
Simultaneously as chip is fixed in chip slot, during inspection there is not relative movement in chip and slide holder, saves operation
Time used by personnel's focusing, it is possible to increase the efficiency that chip checks.
Additionally, the leftmost side on each led chip slot and the rightmost side are milled with the aperture that depth is more than chip slot, therefore
Chip can smoothly be taken out from object stage by the operator of usual left hand and right hand.
Take dovetail groove type to be connected before and after the present invention between fixed support and slide holder, carry on the back with slide holder above fixed support
Side adopts rotatable bearing touch, it is ensured that slide holder when slide holder quickly moves or rests on extreme position in left and right
It is horizontal, need not stop to adjust microscope focus when from left to right observing chip, improve work efficiency；
Brief description
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
Have technology description in required use accompanying drawing be briefly described it should be apparent that, drawings in the following description be only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, acceptable
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the top view of microscope stage；
Fig. 2 is the assembling schematic diagram of slide holder；
Fig. 3 is the left view of microscope stage；
Fig. 4 is the top view of microscope sliding rail rack；
Fig. 5 is the front view of microscope sliding rail rack；
Fig. 6 is the left view of microscope sliding rail rack；
Fig. 7 is dovetail groove front view；
Wherein, 1- slide holder, 2- first chip slot, 3- second chip slot, 4- takes film perforation, 6- field of microscope scope, 7-
Protective plate fixing screwed hole, 8- the first dovetail grooved rail, 9- the first dovetail truss, 10- bearing groove, 11- bearing, 12- second dovetail
Truss, 13- first dovetail groove, 14- second dovetail groove, 15- derailing cylinder, 16- the second dovetail groove rail gantry, 17- second dovetail
Grooved rail.
Specific embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with attached in the embodiment of the present invention
Figure, is clearly and completely described to the technical scheme in the embodiment of the present invention it is clear that described embodiment is the present invention
A part of embodiment, rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art are not having
The every other embodiment being obtained under the premise of making creative work, broadly falls into the scope of protection of the invention.
A kind of microscope stage provided in an embodiment of the present invention, including slide holder 1, milling on wherein said slide holder 1
There are the first chip slot 2 of at least one same diameter size and the second chip slot 3 of at least one same diameter size；First core
Film trap 2 is different with the diameter dimension of the second chip slot 3；It is solid with protective plate that described slide holder 1 surrounding passes through protective plate screwed hole 7
Fixed；The both sides of described described slide holder 1 have the first dovetail grooved rail 8；Described slide holder 1 pass through the first dovetail grooved rail 8 with
First dovetail truss 9 connects；The bottom surface at the first dovetail truss 9 two ends described in two and two the second dovetail truss 12 two ends
Upper top surface welds together；The second dovetail groove 14 is had on described two second dovetail truss 12；The second described dovetail truss
12 are arranged on microscope by the second dovetail groove 14；
As described above, the first chip slot 2 and the second chip slot 3 are used for placing various sizes of chip to be checked, due to can
It is fixed in groove, and the surrounding in slide holder 1 is mounted with protective plate so that slide holder is when mobile, can prevent that chip is slided
The phenomenon falling, it is to avoid damage that product produces because of landing, damage, it is possible to increase the yield rate of product, improves the quality of product.
At least one the first chip slot 2 and at least one second chip slot 3 are milled with slide holder 1, by increasing capacitance it is possible to increase once examine
The number of chips looked into, thus improve inspection efficiency.
First chip slot 2 high order end and low order end and the second chip slot 3 high order end and low order end all have and take film perforation 4, energy
Operator are enough facilitated to pick and place chip to be checked.
The upper plane that first dovetail truss 9 is contacted with slide holder 1 is milled with bearing groove 10, is provided with bearing in bearing groove 10
11, described bearing 11 can rotate in described bearing groove 10.The upper end of described bearing 11 is higher than the upper of the first dovetail truss 9
Plane.Due to having bearing groove 10 in the upper plane of the first dovetail truss 9, and bearing 11 is installed, and dovetail truss and load
Piece platform 1 is connected by dovetail groove, and contact area is big, therefore when slide holder 1 is when moving left and right, ensure that slide holder 1 all the time
Keep in the horizontal plane, reducing the focusing number of times when checking chip for the operator, the review time being shortened, improve and check effect
Rate.
The two ends of the first dovetail grooved rail 8 are provided with derailing cylinder 15, when slide holder 1 moves to extreme position, anticreep
Rail cylinder 15 can stop that slide holder 1 continues to move to, thus preventing slide holder 1 from producing derailment accident, protection product and operator
Safety.
In the prior art, moving left and right on the guide rail bracket of slide glass platform is to drive belt mobile by handle, leads
Slide anteroposterior in rail gantry and microscope body is also to drive belt movement by handle；In the present invention for slide holder before
The control move afterwards, moving left and right also takes identical scheme, and therefore, left and right on the first dovetail truss 9 for the slide holder 1 is moved
Dynamic is to drive belt mobile by handle, and movable on microscope of the second dovetail groove rail gantry is also to be driven by handle
Belt movement.
Embodiment 1
, be further elaborated, the embodiment of the present invention includes taking 2 cun of led chips as a example, slide holder 1, the first chip slot 2,
Two chip slot 3, take film perforation 4, protective plate fixing screwed hole 7, the first dovetail grooved rail 8, the first dovetail truss 9, bearing groove 10, bearing
11st, the second dovetail truss 12, the first dovetail groove 13, the second dovetail groove 14, derailing cylinder 15；
Wherein, slide holder 1 is milled with the first chip slot 2 and the second chip slot 3, the first chip slot 2 is used for fixing 2 cun of led
Chip, the depth of the first chip slot 2 is 0.4mm, a diameter of 51mm；When checking to 2 cun of led chip, ensure that to 2 cun
So as to there is not relative movement when slide holder 1 quickly moves in the fixation of led chip.
On slide holder 1, the surrounding of plane has protective plate fixing screwed hole, passes through spiral shell at the left and right sides edge of slide holder
Bolt is fixed with the protective plate of two pieces of 200mm × 10mm × 2mm, forward edge be bolted one piece of 300mm × 10mm ×
The protective plate of 2mm, prevents chip landing from slide holder 1.The high order end of the first chip slot 2 and low order end are all milled with and take film perforation 4,
Take a diameter of 6mm of film perforation 4, depth is 0.5mm, ensure that 2 cun of chips are successfully taken by operator from left side or right side
Go out.
The side bottom of slide holder 1 has two the first dovetail grooved rails 8, on the first dovetail grooved rail 8 and the first dovetail truss 9
The first dovetail groove 13 match it is ensured that slide holder 1 moves horizontally in the lateral direction；First dovetail groove 13 two ends have anticreep
Rail cylinder 15, is prevented from slide holder 1 derailing landing.
The upper plane that two first dovetail truss 9 on slide holder 1 are contacted with slide holder 1 has 5 bearing grooves 10, axle
Hold and bearing 11 is installed in groove 10, the upper top of bearing 11 is slightly above the upper plane of the first dovetail truss 9, and bearing 11 can be in axle
Hold in groove 10 and roll；Bearing 11 is contacted with slide holder 1, and when slide holder 1 moves left and right, bearing 10 rolls, and slide holder 1 can be made light
Just move in left-right direction.
Second dovetail truss 12 is located at below the first dovetail truss 9, is an entirety with the first dovetail truss 9；Second swallow
Stern notch frame 12 can be linked together by dovetail groove with microscope body so that slide holder 1 can do water in the longitudinal direction
Translation is dynamic.
When 2 cun of led chips are checked, first 82 cun of led chip is put into the first chip slot 2 on slide holder
Interior, by the first dovetail truss 9 and the mobile slide holder 1 of the second dovetail truss 12 so that led chip is located at field of microscope scope
In 6, focus, 2 cun of led chips are checked.
After inspection, slide holder is moved on to put and just takes by the first dovetail truss 9 and the second dovetail truss 12 mobile slide holder 1
Led chip is taken out from the position taking film perforation 4 of the first chip slot 2 left or right by the position put with tweezers.
Embodiment 2
, it is further elaborated, the embodiment of the present invention includes taking 4 cun of led chips of checking as a example,
Slide holder 1, the first chip slot 2, the second chip slot 3, take film perforation 4, protective plate fixing screwed hole 7, the first dovetail groove
Rail 8, the first dovetail truss 9, bearing groove 10, bearing 11, the second dovetail truss 12, the first dovetail groove 13, the second dovetail groove 14, anti-
Derailing cylinder 15；
Wherein, slide holder 1 is milled with the first chip slot 2 and the second chip slot 3, the first chip slot 2 is used for fixing 2 cun of led
Chip, the depth of the first chip slot 2 is 0.35mm, a diameter of 101mm；When checking to 2 cun of led chip, ensure that to 2
So as to there is not relative movement when slide holder 1 quickly moves in the fixation of very little led chip.
On slide holder 1, the surrounding of plane has protective plate fixing screwed hole, passes through spiral shell at the left and right sides edge of slide holder
Bolt is fixed with the protective plate of two pieces of 200mm × 10mm × 2mm, forward edge be bolted one piece of 300mm × 10mm ×
The protective plate of 2mm, prevents chip landing from slide holder 1.
The high order end of the second chip slot 3 and low order end are all milled with and take film perforation 4, take a diameter of 6mm of film perforation 4, and depth is
0.5mm, the high order end of the first chip slot 2 and low order end are all milled with and take film perforation 4, ensure that operator successfully by 4 cun of led
Chip takes out from left side or right side.
The side bottom of slide holder 1 has two the first dovetail grooved rails 8, on the first dovetail grooved rail 8 and the first dovetail truss 9
The first dovetail groove 13 match it is ensured that slide holder 1 moves horizontally in the lateral direction；First dovetail groove 13 two ends have anticreep
Rail cylinder 15, is prevented from slide holder 1 landing from microscope body.
The upper plane that two first dovetail truss 9 on slide holder 1 are contacted with slide holder has 5 bearing grooves 10, axle
Hold and bearing 11 is installed in groove 10, the upper top of bearing 11 is slightly above the upper plane of the first dovetail truss 9, and bearing 11 can be in axle
Hold in groove 10 and roll；Bearing 11 is contacted with slide holder 1, and when slide holder 1 moves left and right, bearing 10 rolls, and slide holder 1 can be made light
Just move in left-right direction.
Second dovetail truss 12 is located at below the first dovetail truss 9, is an entirety with the first dovetail truss 9；Second swallow
Stern notch frame 12 can be linked together by dovetail groove with microscope body so that slide holder 1 can do water in the longitudinal direction
Translation is dynamic.
When 4 cun of led chips are checked, first 24 cun of led chip is put into the second chip slot 3 on slide holder
Interior, by the first dovetail truss 9 and the mobile slide holder 1 of the second dovetail truss 12 so that led chip is located at field of microscope scope
In 6, focus, 4 cun of led chips are checked.
After inspection, slide holder is moved on to put and just takes by the first dovetail truss 9 and the second dovetail truss 12 mobile slide holder 1
Led chip is taken out from the position taking film perforation 4 of the second chip slot 3 left or right by the position put with tweezers.
Embodiment 3
, it is further elaborated, the embodiment of the present invention includes simultaneously taking check 2 cun and 4 cun of led chips as a example, slide holder 1,
First chip slot 2, the second chip slot 3, take film perforation 4, protective plate fixing screwed hole 7, the first dovetail grooved rail 8, the first dovetail truss
9th, bearing groove 10, bearing 11, the second dovetail truss 12, the first dovetail groove 13, the second dovetail groove 14, derailing cylinder 15；
Wherein, slide holder 1 is milled with the first chip slot 2 and the second chip slot 3, the first chip slot 2 is used for fixing 2 cun of led
Chip, the depth of the first chip slot 2 is 0.4mm, a diameter of 51mm；A diameter of 101mm of the second chip slot 3, depth is
0.35mm, to 2 cun, 4 cun led chip check simultaneously when, ensure that the fixation to 2 cun, 4 cun led chips, make
There is not relative movement when slide holder 1 quickly moves in it.
On slide holder 1, the surrounding of plane has protective plate fixing screwed hole, passes through spiral shell at the left and right sides edge of slide holder
Bolt is fixed with the protective plate of two pieces of 200mm × 10mm × 2mm, forward edge be bolted one piece of 300mm × 10mm ×
The protective plate of 2mm, prevents chip landing from slide holder 1.
The high order end of chip slot 2,3 and low order end are all milled with and take film perforation 4, take a diameter of 6mm of film perforation 4, and depth is
0.5mm, the high order end of chip slot 2,3 and low order end are all milled with and take film perforation 4, ensure that operator successfully by led chip
Take out from left side or right side.
The side bottom of slide holder 1 has two the first dovetail grooved rails 8, on the first dovetail grooved rail 8 and the first dovetail truss 9
The first dovetail groove 13 match it is ensured that slide holder 1 moves horizontally in the lateral direction；First dovetail groove 13 two ends have anticreep
Rail cylinder 15, is prevented from slide holder 1 landing from microscope body.
The upper plane that two first dovetail truss 9 on slide holder 1 are contacted with slide holder has 5 bearing grooves 10, axle
Hold and bearing 11 is installed in groove 10, the upper top of bearing 11 is slightly above the upper plane of the first dovetail truss 9, and bearing 11 can be in axle
Hold in groove 10 and roll；Bearing 11 is contacted with slide holder 1, and when slide holder 1 moves left and right, bearing 10 rolls, and slide holder 1 can be made light
Just move in left-right direction.
Second dovetail truss 12 is located at below the first dovetail truss 9, is an entirety with the first dovetail truss 9；Second swallow
Stern notch frame 12 can be linked together by dovetail groove with microscope body so that slide holder 1 can do water in the longitudinal direction
Translation is dynamic.
To 2 cun, 4 cun of led chips check simultaneously when, first 42 cun of led chip is put into the side on slide holder
4 the first chip slot 2 in, then 14 cun of led chip is placed in the second chip slot 3 of opposite side；By the first dovetail groove
Frame 9 and the mobile slide holder 1 of the second dovetail truss 12, so that led chip is located in field of microscope scope 6, focus, to 2
Very little, 4 cun of led chips are checked.
After inspection, slide holder is moved on to put and just takes by the first dovetail truss 9 and the second dovetail truss 12 mobile slide holder 1
Led chip is taken from the position taking film perforation 4 of the first chip slot 2, the second chip slot 3 left or right by the position put with tweezers
Go out.
To sum up, the embodiment of the present invention possesses following beneficial effect:
Embodiments provide a kind of microscope stage, due to the led core of fixed dimension being milled with slide holder
Film trap, during inspection, chip is placed on chip slot, and the surrounding of slide holder be equipped with the protective plate exceeding slide holder such that it is able to
Effectively prevent the chip landing phenomenon causing because slide holder quickly moves, improve finished product rate.
Take dovetail groove type to be connected before and after the embodiment of the present invention between fixed support and slide holder, above fixed support and carry
Piece platform dorsal part adopts rotatable bearing touch, can avoid slide holder when left and right is quickly moved or rested on extreme position,
Appoint and so can ensure that slide holder is horizontal, need not stop to adjust microscope focus when from left to right observing chip, improve
Work efficiency；
Simultaneously as chip is fixed in chip slot, during inspection there is not relative movement in chip and slide holder, it is possible to increase
The efficiency of chip detection.
Additionally, the leftmost side on each led chip slot and the rightmost side are milled with the aperture being slightly deeper than led chip slot, because
Chip can smoothly be taken out from object stage by the operator of this usual left hand and right hand.
In embodiments of the present invention, with as a example 2 cun, 4 cun of led chip, being only used for invention is further illustrated, not
Limit to it, be not meant to that the present invention is only used for the inspection of led chip it is also possible to be used for other aspects；The present invention is real
Apply 2 the second chip slot proposed in example and 8 the first chip slot, simply a kind of preferred scheme, is not meant to this
The slide holder of bright offer can only have 2 the second chip slot and 8 the first chip slot, can be at least one first chip slot and/
Or at least one second chip slot, in the embodiment of the present invention, pointed chip slot is circle, and also the non-shape to chip slot is entered
Row limits, but a kind of preferred version, can rectangular or other shapes.
It should be noted that herein, such as first and second or the like relational terms are used merely to a reality
Body or operation are made a distinction with another entity or operation, and not necessarily require or imply these entities or deposit between operating
In any this actual relation or order.And, term " inclusion ", "comprising" or its any other variant are intended to
Comprising of nonexcludability, wants so that including a series of process of key elements, method, article or equipment and not only including those
Element, but also include other key elements being not expressly set out, or also include for this process, method, article or equipment
Intrinsic key element.In the absence of more restrictions, the key element that limited by sentence "including a ..." it is not excluded that
Also there is other identical element including in the process of described key element, method, article or equipment.
Above example only in order to technical scheme to be described, is not intended to limit；Although with reference to the foregoing embodiments
The present invention has been described in detail, it will be understood by those within the art that: it still can be to aforementioned each enforcement
Technical scheme described in example is modified, or carries out equivalent to wherein some technical characteristics；And these modification or
Replace, do not make the essence of appropriate technical solution depart from the spirit and scope of various embodiments of the present invention technical scheme.
Claims (10)
1. a kind of microscope stage, including slide holder (1) it is characterised in that: be milled with the first chip on described slide holder (1)
Groove (2) and/or the second chip slot (3)；Described slide holder (1) surrounding is fixed with protective plate by protective plate screwed hole (7)；
The both sides of described slide holder (1) have the first dovetail grooved rail (8), and the first dovetail truss (9) has the first dovetail groove
(13)；Described first dovetail grooved rail (8) and described first dovetail groove (13) are slidably connected；The first described dovetail truss (9) two
The bottom surface at end is fixed together with top surface on the second dovetail truss (12) two ends；Is had on described second dovetail truss (12)
Two dovetail grooves (14)；Described second dovetail groove (14) and the second dovetail rail (17) are slidably connected, and described second dovetail rail (17) exists
In second dovetail groove rail gantry (16), the second dovetail groove rail gantry (16) is fixed on microscope.
2. as claimed in claim 1 a kind of microscope stage it is characterised in that: be milled with least on described slide holder (1)
One the first chip slot (2).
3. as claimed in claim 1 a kind of microscope stage it is characterised in that: be milled with least on described slide holder (1)
One the second chip slot (3).
4. as claimed in claim 2 a kind of microscope stage it is characterised in that: the edge of described the first chip slot (2)
On the left and right sides all have and take film perforation (4).
5. as claimed in claim 4 a kind of microscope stage it is characterised in that: the described depth dimensions taking film perforation (4)
Depth dimensions more than described first chip slot (2), described second chip slot (3).
6. as claimed in claim 3 a kind of microscope stage it is characterised in that: the edge of described the second chip slot (3)
On have and take film perforation (4).
7. as claimed in claim 6 a kind of microscope stage it is characterised in that: the described depth dimensions taking film perforation (4)
Depth dimensions more than described first chip slot (2), described second chip slot (3).
8. as claimed in claim 1 a kind of microscope stage it is characterised in that: described the first dovetail truss (9) with carry
The upper plane that piece platform (1) contacts is milled with bearing groove (10).
9. as claimed in claim 8 a kind of microscope stage it is characterised in that: in described bearing groove (10), axle is installed
Hold (11), described bearing (11) can rotate in described bearing groove (10).
10. as claimed in claim 1 a kind of microscope stage it is characterised in that: the two ends of described first dovetail grooved rail (8)
Derailing cylinder (15) is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510230274.4A CN104821266B (en) | 2015-05-07 | 2015-05-07 | Microscope stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510230274.4A CN104821266B (en) | 2015-05-07 | 2015-05-07 | Microscope stage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104821266A CN104821266A (en) | 2015-08-05 |
| CN104821266B true CN104821266B (en) | 2017-02-01 |
Family
ID=53731532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510230274.4A Active CN104821266B (en) | 2015-05-07 | 2015-05-07 | Microscope stage |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104821266B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106887397B (en) * | 2015-12-16 | 2019-04-23 | 北京北方华创微电子装备有限公司 | Microscope carrier mechanism and semiconductor processing equipment |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100472743C (en) * | 2002-11-21 | 2009-03-25 | 奥林巴斯株式会社 | Wafer inspection equipment |
| JP2007329300A (en) * | 2006-06-08 | 2007-12-20 | Disco Abrasive Syst Ltd | Ultraviolet irradiation device and cutting machine equipped with ultraviolet irradiation device |
| JP2008062476A (en) * | 2006-09-06 | 2008-03-21 | Disco Abrasive Syst Ltd | Processing device and chuck table |
| CN104134621B (en) * | 2013-05-02 | 2017-05-10 | 北京智朗芯光科技有限公司 | Wafer auxiliary loading device |
| CN104465467B (en) * | 2014-12-26 | 2017-12-01 | 合肥彩虹蓝光科技有限公司 | A kind of LED shells golden machine slide glass dish |
-
2015
- 2015-05-07 CN CN201510230274.4A patent/CN104821266B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104821266A (en) | 2015-08-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20210347673A1 (en) | Laser cutting and removal of contoured shapes from transparent substrates | |
| EP2734480B1 (en) | Method and apparatus for chamfering a glassplate | |
| JP2019535523A (en) | Method of laser processing a laminated work stack for forming a contour line of a first transparent workpiece and separating a resin layer from the first transparent workpiece | |
| CN105189381B (en) | The processing method of glass plate and the processing unit (plant) of glass plate | |
| CN214991160U (en) | Device for integrating glass laser cutting and splitting | |
| CN104821266B (en) | Microscope stage | |
| KR20150135381A (en) | Method and device for removing brittle-hard material which is transparent to laser radiation, by means of laser radiation | |
| CN205741098U (en) | A kind of laser quenching cladding machine bed apparatus | |
| KR20130113289A (en) | Manufacturing system and method using fs-laser for micro-notches on circumference ridge-line of the scribing wheel | |
| CN203209861U (en) | A high-performance solar energy battery piece welding apparatus | |
| KR101490318B1 (en) | Laser Edge Healing Apparatus for Substrate | |
| CN106271098B (en) | A method of utilizing laser cutting multi-core optical fiber | |
| CN206343773U (en) | A fiber laser cutting machine | |
| CN103658977A (en) | Etching device adopting square light spot to etch double faced ITO glass | |
| CN209647878U (en) | A kind of optical fiber end shear protective device | |
| CN116441745A (en) | Touch-proof laser cutting machine with high safety performance | |
| CN210575850U (en) | Back-end laser process integration equipment of flexible OLED display panel | |
| US20130251492A1 (en) | Transferring Apparatus for Glass Substrate | |
| CN203085496U (en) | Tool capable of quickly removing surface welding balls and surface-layer protection materials of chip | |
| CN217638770U (en) | Glass detection device | |
| CN219245330U (en) | Fixed double-lens structure of high-precision visual inspection device | |
| CN211120930U (en) | Utensil is examined to laser cutter apron hole site | |
| CN217916164U (en) | Device for vacuum adsorption of glass | |
| CN202825014U (en) | Etching device utilizing square light spots to etch double-face indium tin oxide (ITO) glass | |
| TWI808714B (en) | Replaceable semiconductor material optical back-side inspection and front-side inspection system and method of setting the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210302 Address after: Room 110-7, building 3, 290 Xingci 1st Road, Hangzhou Bay New District, Ningbo City, Zhejiang Province, 315336 Patentee after: Ningbo anxinmei Semiconductor Co.,Ltd. Address before: 230012 Hefei City, Anhui, New Station Industrial Park Patentee before: HEFEI IRICO EPILIGHT TECHNOLOGY Co.,Ltd. |