CN104816526A - Surface coating cutting tool and manufacturing method thereof - Google Patents
Surface coating cutting tool and manufacturing method thereof Download PDFInfo
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- CN104816526A CN104816526A CN201510042488.9A CN201510042488A CN104816526A CN 104816526 A CN104816526 A CN 104816526A CN 201510042488 A CN201510042488 A CN 201510042488A CN 104816526 A CN104816526 A CN 104816526A
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- 238000005520 cutting process Methods 0.000 title claims abstract description 105
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 238000000576 coating method Methods 0.000 title claims description 26
- 239000011248 coating agent Substances 0.000 title claims description 25
- 239000013078 crystal Substances 0.000 claims abstract description 109
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 75
- 239000010936 titanium Substances 0.000 claims abstract description 75
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 11
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000010410 layer Substances 0.000 claims description 227
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 98
- 238000000034 method Methods 0.000 claims description 48
- 239000002245 particle Substances 0.000 claims description 35
- 238000003980 solgel method Methods 0.000 claims description 25
- 239000011247 coating layer Substances 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 18
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 17
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 16
- 239000010419 fine particle Substances 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 10
- 239000011230 binding agent Substances 0.000 claims description 8
- 238000001887 electron backscatter diffraction Methods 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- 150000004767 nitrides Chemical class 0.000 claims description 7
- 239000011195 cermet Substances 0.000 claims description 6
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 4
- 150000003609 titanium compounds Chemical class 0.000 claims description 3
- 239000000203 mixture Substances 0.000 abstract description 8
- 229910052782 aluminium Inorganic materials 0.000 abstract description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 3
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 35
- 238000010304 firing Methods 0.000 description 29
- 238000011282 treatment Methods 0.000 description 26
- 239000000843 powder Substances 0.000 description 20
- 238000001035 drying Methods 0.000 description 17
- 238000005229 chemical vapour deposition Methods 0.000 description 15
- 238000002425 crystallisation Methods 0.000 description 13
- 230000008025 crystallization Effects 0.000 description 13
- 239000012299 nitrogen atmosphere Substances 0.000 description 13
- 238000003756 stirring Methods 0.000 description 13
- 230000000694 effects Effects 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 12
- 238000005240 physical vapour deposition Methods 0.000 description 12
- 230000032683 aging Effects 0.000 description 11
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000000499 gel Substances 0.000 description 7
- 238000003466 welding Methods 0.000 description 7
- 229910001018 Cast iron Inorganic materials 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- 229910010413 TiO 2 Inorganic materials 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 6
- 238000005245 sintering Methods 0.000 description 6
- WOZZOSDBXABUFO-UHFFFAOYSA-N tri(butan-2-yloxy)alumane Chemical compound [Al+3].CCC(C)[O-].CCC(C)[O-].CCC(C)[O-] WOZZOSDBXABUFO-UHFFFAOYSA-N 0.000 description 6
- 230000002159 abnormal effect Effects 0.000 description 5
- 239000002738 chelating agent Substances 0.000 description 5
- -1 iron group metals Chemical class 0.000 description 5
- 230000007774 longterm Effects 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 150000001247 metal acetylides Chemical class 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 238000004873 anchoring Methods 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 238000006068 polycondensation reaction Methods 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000010962 carbon steel Substances 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000013329 compounding Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 238000013507 mapping Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000004445 quantitative analysis Methods 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000005211 surface analysis Methods 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- 238000000177 wavelength dispersive X-ray spectroscopy Methods 0.000 description 2
- SUDBRAWXUGTELR-HPFNVAMJSA-N 5-[[(2r,3r,4s,5s,6r)-3,4,5-trihydroxy-6-(hydroxymethyl)oxan-2-yl]oxymethyl]-1h-pyrimidine-2,4-dione Chemical compound O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@H]1OCC1=CNC(=O)NC1=O SUDBRAWXUGTELR-HPFNVAMJSA-N 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 235000015895 biscuits Nutrition 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- YRIUSKIDOIARQF-UHFFFAOYSA-N dodecyl benzenesulfonate Chemical compound CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 YRIUSKIDOIARQF-UHFFFAOYSA-N 0.000 description 1
- GVGUFUZHNYFZLC-UHFFFAOYSA-N dodecyl benzenesulfonate;sodium Chemical compound [Na].CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 GVGUFUZHNYFZLC-UHFFFAOYSA-N 0.000 description 1
- 229940071161 dodecylbenzenesulfonate Drugs 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 239000002114 nanocomposite Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- SOQBVABWOPYFQZ-UHFFFAOYSA-N oxygen(2-);titanium(4+) Chemical class [O-2].[O-2].[Ti+4] SOQBVABWOPYFQZ-UHFFFAOYSA-N 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000011158 quantitative evaluation Methods 0.000 description 1
- 238000004098 selected area electron diffraction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- BTURAGWYSMTVOW-UHFFFAOYSA-M sodium dodecanoate Chemical compound [Na+].CCCCCCCCCCCC([O-])=O BTURAGWYSMTVOW-UHFFFAOYSA-M 0.000 description 1
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 1
- 229940082004 sodium laurate Drugs 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- OBROYCQXICMORW-UHFFFAOYSA-N tripropoxyalumane Chemical compound [Al+3].CCC[O-].CCC[O-].CCC[O-] OBROYCQXICMORW-UHFFFAOYSA-N 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemically Coating (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
本发明提供一种在高速断续切削加工中发挥优异的耐崩刀性的表面包覆切削工具及其制造方法。本发明的表面包覆切削工具在表面上具有固化层的工具基体的表面具备氧化铝层,该氧化铝层具有0.2~5.0μm的平均层厚,且平滑性较高,该氧化铝层由氧化铝的α型或α型和γ型的混合相构成,并且,氧化铝层中所包含的钛的比例为超过0.02原子%且10原子%以下,且晶粒的平均周长相对于针对构成该氧化铝层的晶粒的等面积圆的周长之比为1.8~3.0。
The present invention provides a surface-coated cutting tool exhibiting excellent chipping resistance in high-speed interrupted cutting and a method of manufacturing the same. In the surface-coated cutting tool of the present invention, the surface of the tool substrate having a solidified layer on the surface is provided with an aluminum oxide layer, the aluminum oxide layer has an average layer thickness of 0.2 to 5.0 μm, and has high smoothness. Aluminum is composed of α-type or a mixed phase of α-type and γ-type, and the proportion of titanium contained in the aluminum oxide layer is more than 0.02 atomic % and not more than 10 atomic %, and the average perimeter of the crystal grains is relative to the composition of the oxide. The ratio of the perimeters of the equal-area circles of the crystal grains of the aluminum layer is 1.8 to 3.0.
Description
技术领域technical field
本发明涉及一种由于硬质包覆层具备优异的润滑性、耐崩刀性、耐磨性,因此即使在钢和铸铁等的高速断续切削加工中使用时,也会在长期使用中发挥优异的切削性能的表面包覆切削工具。The present invention relates to a hard coating that has excellent lubricity, chipping resistance, and wear resistance, so even when used in high-speed interrupted cutting of steel and cast iron, it can be used for a long time. Surface-coated cutting tools with excellent cutting performance.
背景技术Background technique
一直以来,已知有在由硬质合金构成的工具基体表面包覆形成由选自周期表的IVB、VB、VIB族中的至少一种以上元素的碳化物、氮化物、碳氮化物等构成的硬质皮膜来作为硬质包覆层,由此实现切削工具的耐磨性的提高。For a long time, it has been known to form carbides, nitrides, carbonitrides, etc. composed of at least one element selected from the IVB, VB, and VIB groups of the periodic table on the surface of the tool substrate composed of cemented carbide. The hard coating is used as a hard coating layer, thereby improving the wear resistance of cutting tools.
而且,在硬质皮膜中,α型氧化铝层由于热稳定性优异、反应性较低且硬度较高,因此在很多情况下,作为如上所述的由选自周期表的IVB、VB、VIB族中的至少一种以上元素的碳化物、氮化物、碳氮化物等构成的硬质包覆层的最表面层而包覆形成。Moreover, in the hard film, the α-type alumina layer has excellent thermal stability, low reactivity, and high hardness. The outermost layer of the hard coating layer composed of carbides, nitrides, carbonitrides, etc. of at least one element in the group is formed by coating.
作为形成α型氧化铝层作为如上所述的最表面层的硬质包覆层所相关的现有技术,已知有着眼于晶粒形状的如下技术:一种表面包覆切削工具,例如在工具基体的表面蒸镀形成(a)Ti化合物层作为下部层,且蒸镀形成(b)α型氧化铝层作为上部层,该α型氧化铝层具有平板多边形(包含平坦六边形状)状且纵长形状的晶粒组织结构,并且含有Zr,而且,(c)在上部层的晶粒中,以面积比率计60%以上的晶粒的内部被由至少一个以上的以Σ3表示的构成原子共有晶格点形态构成的晶格界面所分断,由此硬质包覆层在高速重切削加工中发挥优异的耐磨性(例如参考专利文献1)。As prior art related to forming an α-type alumina layer as the hard coating layer of the outermost layer as described above, the following technology is known focusing on the grain shape: A surface-coated cutting tool, for example, in The surface evaporation of the tool base forms (a) a Ti compound layer as the lower layer, and evaporates to form (b) an α-alumina layer having the shape of a flat polygon (including a flat hexagon) as an upper layer. And the crystal grain structure of elongated shape, and contains Zr, and (c) in the crystal grains of the upper layer, the inside of the crystal grains of 60% or more in terms of area ratio is composed of at least one structure represented by Σ3 The atoms are divided by the lattice interface formed by sharing lattice points, so that the hard coating layer exhibits excellent wear resistance in high-speed heavy cutting (for example, refer to Patent Document 1).
并且,已知有在工具基体上通过CVD法形成有由碳化钛等构成的硬质包覆层的表面包覆切削工具显示出非常优异的耐缺损性和耐磨性,其中,所述工具基体由WC基硬质合金构成,在以IVB、VB、VIB族元素的碳化物、氮化物和/或它们的固溶体为主体的硬质相、以铁族金属为主体的结合相、剩余由碳化钨(WC)构成的WC基硬质合金是通过设为在硬质相的至少一部分晶粒内存在由IVB、VB、VIB族元素的碳化物、氮化物、氧化物和/或它们的固溶体构成的至少一种化合物(除了构成晶粒的硬质相成分以外)的结构而得到,且硬度与韧性的平衡优异(例如参考专利文献2)。Also, it is known that a surface-coated cutting tool in which a hard coating layer composed of titanium carbide or the like is formed on a tool base by CVD method exhibits very excellent fracture resistance and wear resistance, wherein the tool base Composed of WC-based cemented carbide, in the hard phase mainly composed of carbides, nitrides and/or their solid solutions of IVB, VB, VIB group elements, the binding phase mainly composed of iron group metals, and the rest composed of tungsten carbide The WC-based cemented carbide composed of (WC) is composed of carbides, nitrides, oxides and/or solid solutions of IVB, VB, and VIB group elements in at least a part of the grains of the hard phase. The structure of at least one compound (except the hard phase component constituting the crystal grains) is obtained, and the balance between hardness and toughness is excellent (for example, refer to Patent Document 2).
并且,已知在WC基硬质合金制工具基体表面上通过物理蒸镀来形成有由0.2~2.0μm的平均层厚的CrN层构成的硬质包覆层的表面包覆切削工具中,所述CrN层具有与平均层厚相等的高度,且由沿相对于工具基体表面直立的方向生长的纵长平板状CrN晶粒构成,并且,对从CrN层的表面起0.1μm的深度的水平截面上的晶粒组织进行观察时,短边为5~100nm、纵横尺寸比为3以上的纵长平板状CrN晶粒所占的面积比例为总水平截面积的30%以上,通过设为如上结构,硬质包覆层在断续重切削加工中发挥优异的耐缺损性(例如参考专利文献3)。In addition, it is known that in a surface-coated cutting tool in which a hard coating layer composed of a CrN layer with an average layer thickness of 0.2 to 2.0 μm is formed by physical vapor deposition on the surface of a WC-based cemented carbide tool substrate, the The CrN layer has a height equal to the average layer thickness, and is composed of elongated flat-shaped CrN crystal grains growing in a direction vertical to the surface of the tool base, and a horizontal section at a depth of 0.1 μm from the surface of the CrN layer When the grain structure on the surface is observed, the area ratio of the long and flat CrN grains with a short side of 5 to 100nm and an aspect ratio of 3 or more occupies more than 30% of the total horizontal cross-sectional area. By setting the above structure , the hard coating exhibits excellent chipping resistance in interrupted heavy cutting (for example, refer to Patent Document 3).
另外,作为着眼于Al2O3层中含有钛氧化物的技术,已知有在由硬质合金或金属陶瓷构成的工具基体上包覆单层或多层时,具有0.5~25μm的厚度的至少一层具有Al2O3层及ZrO2和/或HfO2层,且在该层中导入由钛的氧化物、碳氧化物、氮氧化物或碳氧氮化物构成的第3微细分散性相,由此改善耐磨性(例如参考专利文献4)。In addition, as a technology focusing on the inclusion of titanium oxide in the Al 2 O 3 layer, it is known that when a single layer or multiple layers are coated on a tool substrate made of cemented carbide or cermet, the thickness is 0.5 to 25 μm. At least one layer has an Al 2 O 3 layer and a ZrO 2 and/or HfO 2 layer, and a third fine dispersion of titanium oxide, carbon oxide, nitrogen oxide or carbon oxynitride is introduced into the layer phase, thereby improving wear resistance (for example, refer to Patent Document 4).
作为包覆形成如上所述的现有的硬质包覆层、即氧化铝层的方法,通常采用化学蒸镀(CVD)法和物理蒸镀(PVD)法,除此之外,还已知有通过溶胶-凝胶法形成氧化铝层。溶胶-凝胶法为能够由溶液制作多孔质凝胶、有机无机混合物、玻璃、陶瓷、纳米复合材料的材料合成法。与现有的熔融法和烧结法相比,能够以较低的温度制作高温材料,并且,有望作为能够在制作各种微细结构及散体、纤维、涂层、粒子等多种形态的产品时应用的比较新颖的包覆形成方法。As a method of forming the above-mentioned existing hard coating layer, that is, an aluminum oxide layer, the chemical vapor deposition (CVD) method and the physical vapor deposition (PVD) method are generally used. In addition, it is also known There is an aluminum oxide layer formed by a sol-gel method. The sol-gel method is a material synthesis method that can produce porous gels, organic-inorganic mixtures, glasses, ceramics, and nanocomposites from solutions. Compared with the existing melting method and sintering method, high-temperature materials can be produced at a lower temperature, and it is expected to be used in the production of products with various microstructures and various forms such as loose bodies, fibers, coatings, and particles. A relatively new coating forming method.
专利文献1:日本专利公开2009-172748号公报Patent Document 1: Japanese Patent Laid-Open No. 2009-172748
专利文献2:日本专利公开2000-38636号公报Patent Document 2: Japanese Patent Laid-Open No. 2000-38636
专利文献3:日本专利公开2011-156639号公报Patent Document 3: Japanese Patent Laid-Open No. 2011-156639
专利文献4:日本专利公表2002-526654号公报Patent Document 4: Japanese Patent Publication No. 2002-526654
在通过CVD法包覆形成氧化铝层作为硬质包覆层的表面包覆切削工具中,可以举出在进行钢和铸铁等的高速断续切削加工时,包覆工具的前刀面的耐磨性得到提高,这尤其基于所形成的α型氧化铝的热稳定性、非反应性较高。In surface-coated cutting tools that are coated with an alumina layer as a hard coating layer by the CVD method, the resistance of the rake face of the coated tool during high-speed interrupted cutting of steel and cast iron can be cited. Grinding properties are improved, based inter alia on the higher thermal stability, non-reactivity of the alpha-alumina formed.
上述专利文献1中公开的α型氧化铝层由于高温强度及表面性质无法令人满意,因此当在更高速的条件下进行重切削加工时,不仅容易发生崩刀,还容易产生热塑性变形、偏磨,以此为原因,耐磨性下降,存在在比较短时间内达到使用寿命的课题。The α-alumina layer disclosed in Patent Document 1 is unsatisfactory in high temperature strength and surface properties. Therefore, when heavy cutting is performed at a higher speed, not only chipping but also thermoplastic deformation and misalignment are prone to occur. For this reason, wear resistance decreases, and there is a problem that the service life is reached in a relatively short period of time.
并且,上述专利文献2中公开的碳化钛层由于结晶性较低,力学特性和界面强度较差,因此容易产生剥离,存在即使包覆氧化铝层,结果磨损也会急剧进展的课题。In addition, the titanium carbide layer disclosed in the above-mentioned Patent Document 2 has low crystallinity, poor mechanical properties and interface strength, and thus tends to be peeled off, and there is a problem that wear rapidly progresses as a result even if it is coated with an alumina layer.
并且,上述专利文献3中公开的CrN层在断续重切削加工中使用时,无法避免层内的龟裂的进展,以此为原因,存在产生层的剥离和缺损的课题。Furthermore, when the CrN layer disclosed in Patent Document 3 is used in interrupted heavy cutting, the progression of cracks in the layer cannot be avoided, and this causes the problem of layer peeling and chipping.
并且,在上述专利文献4中公开的具有Al2O3层及ZrO2和/或HfO2层且在该层中导入有由钛的氧化物、碳氧化物、氮氧化物或碳氧氮化物构成的第3微细分散性相的复合材料中,产生因切削时所产生的热而引起刀尖的塑性变形的课题。Also, the Al2O3 layer and the ZrO2 and/or HfO2 layer disclosed in the above - mentioned Patent Document 4 , and the oxide, oxycarbide, oxynitride, or carbon oxynitride of titanium is introduced into the layer. In the composite material of the third finely dispersed phase, the problem of plastic deformation of the cutting edge due to heat generated during cutting occurs.
发明内容Contents of the invention
因此,本发明所要解决的技术课题、即本发明的目的在于提供一种包覆形成氧化铝层作为硬质包覆层的表面包覆切削工具,其即使在铸铁和碳钢等的高速断续切削中使用时,也难以引起崩刀和剥离,且在长时间发挥优异的切削性能。Therefore, the technical problem to be solved by the present invention, that is, the object of the present invention is to provide a surface-coated cutting tool coated with an aluminum oxide layer as a hard coating layer, which can withstand high-speed intermittent cutting of cast iron and carbon steel, etc. When used in cutting, it is difficult to cause chipping and peeling, and it exhibits excellent cutting performance for a long time.
因此,本发明人们为了在工具基体表面上形成耐磨性优异的氧化铝层,着眼于通过目前为止作为切削工具用硬质包覆层的形成方法没有进行充分研究的基于溶胶-凝胶法的氧化铝层的形成进行了深入研究,结果发现如下:在通过规定方法进行利用溶胶-凝胶法形成氧化铝层之后的干燥及烧成处理,或者利用溶胶-凝胶法形成氧化铝层时,应用具有促进氧化铝的结晶化的效果的Ti氧化物,在预先利用CVD法和PVD法、溶胶-凝胶法等而形成的Ti氧化物层上,利用溶胶-凝胶法形成氧化铝层,由此能够以所希望的尺寸和纵横尺寸比形成具有复杂的晶粒形状的氧化铝层,即使在供断续的冲击性负荷作用于切削刃的高速断续切削加工时,通过相邻的晶粒彼此沿着凹凸相互啮合,晶粒彼此的粘附力得到提高,耐崩刀性、耐剥离性优异,且能够在长时间维持优异的切削性能。Therefore, in order to form an alumina layer excellent in wear resistance on the surface of a tool base, the present inventors focused on a method based on a sol-gel method that has not been sufficiently studied so far as a method for forming a hard coating layer for cutting tools. The formation of the alumina layer has been intensively studied, and as a result, it has been found that when the drying and firing treatment after forming the alumina layer by the sol-gel method is performed by a predetermined method, or the alumina layer is formed by the sol-gel method, An alumina layer is formed by a sol-gel method on a Ti oxide layer previously formed by a CVD method, a PVD method, a sol-gel method, etc., using Ti oxide having an effect of promoting the crystallization of alumina, Thus, an aluminum oxide layer with a complex grain shape can be formed with a desired size and aspect ratio, and even during high-speed interrupted cutting where intermittent impact loads act on the cutting edge, the adjacent grains The grains mesh with each other along the unevenness, the adhesion between the crystal grains is improved, the chipping resistance and the peeling resistance are excellent, and the excellent cutting performance can be maintained for a long time.
即,发现如下:利用RTA(红外线加热)法等能够仅对基体进行加热的热处理方法,或者在形成氧化铝层时通过应用Ti氧化物的溶胶-凝胶法,以使氧化铝层下部优先结晶化的起点为目的而配置氧化铝层,并进行热处理,由此能够使特定的晶粒的晶体选择性地生长,晶体生长时不会阻碍其他晶粒而能够形成晶体沿氧化铝层中的所有方向生长的、由凹凸性较高的晶界构成的复杂形状的晶粒。另外,能够根据烧成条件来控制晶粒的尺寸及纵横尺寸比、氧化铝层的晶体结构,通过晶粒彼此的锚定效果,晶界的强度得到大幅提高,并且由于具有优异的耐磨性和润滑性,因此即使在进行因较大冲击和刀尖附近的发热而容易引起剥离和微小崩刀等异常损伤的高速断续切削时,也可以在长时间发挥优异的切削性能。That is, it has been found that the lower part of the alumina layer is preferentially crystallized by a heat treatment method capable of heating only the substrate such as the RTA (infrared heating) method, or by applying a sol-gel method of Ti oxide when forming the alumina layer. The aluminum oxide layer is arranged for the purpose of the starting point, and heat treatment is performed, so that the crystals of specific grains can be selectively grown, and the crystal growth can be formed along all the crystals in the aluminum oxide layer without hindering other grains. Crystal grains of complex shape composed of grain boundaries with high concavo-convexity grown in the direction of growth. In addition, the size and aspect ratio of the grains and the crystal structure of the alumina layer can be controlled according to the firing conditions. Through the anchoring effect of the grains, the strength of the grain boundaries is greatly improved, and because of its excellent wear resistance And lubricity, so even when performing high-speed interrupted cutting where abnormal damage such as peeling and micro chipping is likely to occur due to large impact and heat near the cutting edge, it can exhibit excellent cutting performance for a long time.
本发明是鉴于上述见解而完成的,其具有以下方式。The present invention has been made in view of the above knowledge, and has the following aspects.
(1)一种表面包覆切削工具,通过在由碳化钨基硬质合金或碳氮化钛基金属陶瓷构成的工具基体的表面包覆形成硬质包覆层而成,其中,(1) A surface-coated cutting tool formed by coating the surface of a tool substrate composed of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet to form a hard coating layer, wherein,
(a)所述硬质包覆层具备具有0.2~5.0μm的平均层厚的氧化铝层,(a) the hard coating layer includes an aluminum oxide layer having an average layer thickness of 0.2 to 5.0 μm,
(b)构成所述氧化铝层的晶粒具有α型的晶体结构或α型和γ型的混合相的晶体结构,(b) the crystal grains constituting the alumina layer have an α-type crystal structure or a crystal structure of a mixed phase of α-type and γ-type,
(c)当将所述晶粒的纵横尺寸比设为通过电子背散射衍射法求出的层厚方向的粒径相对于层厚垂直方向的粒径的比时,所述晶粒的平均纵横尺寸比为0.5~5.0,并且通过电子背散射衍射法求出的该晶粒的周长相对于具有与晶粒的面积相等的面积的圆的周长之比的平均值为1.8~3.0。(c) When the aspect ratio of the crystal grains is defined as the ratio of the grain diameter in the layer thickness direction to the grain diameter in the perpendicular direction to the layer thickness obtained by the electron backscatter diffraction method, the average aspect ratio of the crystal grains is The size ratio is 0.5 to 5.0, and the average value of the ratio of the perimeter length of the crystal grain to the perimeter length of a circle having an area equal to the area of the crystal grain is 1.8 to 3.0 as determined by electron backscatter diffraction method.
(2)所述(1)中记载的表面包覆切削工具,其中,所述氧化铝层含有钛氧化物的晶粒,(2) The surface-coated cutting tool described in (1), wherein the aluminum oxide layer contains crystal grains of titanium oxide,
(a)在所述氧化铝层中,Ti在所有金属元素中所占的含有比例为超过0.02at%且10at%以下,(a) In the alumina layer, the content ratio of Ti to all metal elements is more than 0.02 at % and not more than 10 at %,
(b)所述钛氧化物的晶粒是平均粒径为0.01~0.10μm的钛氧化物微粒,该钛氧化物微粒以围绕构成所述氧化铝层的晶粒的方式凝聚形成,并且在构成所述氧化铝层的晶粒的周长上存在的钛氧化物微粒的数量的平均值为5~50个。(b) The crystal grains of the titanium oxide are titanium oxide fine particles having an average particle diameter of 0.01 to 0.10 μm, the titanium oxide fine particles are aggregated to surround the crystal grains constituting the aluminum oxide layer, and The average number of titanium oxide particles present on the perimeter of the crystal grains of the aluminum oxide layer is 5 to 50.
(3)所述(1)或(2)中记载的表面包覆切削工具,其中,所述表面包覆切削工具通过在由碳化钨基硬质合金构成的工具基体的表面包覆形成硬质包覆层而成,从上述工具基体的表面沿深度方向形成有具有0.5~3.0μm的平均层厚的基体表面固化层,该基体表面固化层中所包含的作为结合相金属的Co的平均含量小于2.0质量%。(3) The surface-coated cutting tool described in (1) or (2), wherein the surface-coated cutting tool is formed by coating the surface of a tool substrate made of tungsten carbide-based cemented carbide. Formed from a cladding layer, a solidified layer on the surface of the substrate with an average layer thickness of 0.5 to 3.0 μm is formed from the surface of the tool substrate along the depth direction, and the average content of Co contained in the solidified layer on the surface of the substrate as a binder phase metal is Less than 2.0% by mass.
(4)所述(1)或(2)中记载的表面包覆切削工具,其中,所述表面包覆切削工具通过在由碳氮化钛基金属陶瓷构成的工具基体的表面包覆形成硬质包覆层而成,从上述工具基体的表面沿深度方向形成有具有0.5~3.0μm的平均层厚的基体表面固化层,该基体表面固化层中所包含的作为结合相金属的Co及Ni的总计平均含量小于2.0质量%。(4) The surface-coated cutting tool described in the above (1) or (2), wherein the surface-coated cutting tool is formed by coating the surface of a tool base made of titanium carbonitride-based cermet. Formed from a coating layer, a solidified layer on the surface of the substrate with an average layer thickness of 0.5 to 3.0 μm is formed from the surface of the tool substrate in the depth direction, and the solidified layer on the surface of the substrate contains Co and Ni as binder phase metals. The total average content of is less than 2.0% by mass.
(5)一种表面包覆切削工具的制造方法,其为制造所述(1)至(4)中记载的表面包覆切削工具的方法,其中,所述氧化铝层通过溶胶-凝胶法形成于钛氧化物层上。(5) A method of manufacturing a surface-coated cutting tool, which is a method of manufacturing the surface-coated cutting tool described in (1) to (4), wherein the aluminum oxide layer is obtained by a sol-gel method formed on the titanium oxide layer.
(6)所述(1)或(2)中记载的表面包覆切削工具,其中,所述硬质包覆层还包含形成于所述氧化铝层的正下方的基底层。(6) The surface-coated cutting tool described in (1) or (2), wherein the hard coating layer further includes a base layer formed directly under the alumina layer.
(7)所述(6)中记载的表面包覆切削工具,其中,所述基底层由含有选自周期表的IVB、VB、VIB族及Si中的至少一种以上元素的氮化物或氧化物构成。(7) The surface-coated cutting tool described in (6) above, wherein the base layer is made of nitride or oxide containing at least one element selected from Groups IVB, VB, VIB and Si of the periodic table. things constitute.
(8)所述(6)中记载的表面包覆切削工具,其中,所述基底层由钛化合物构成。(8) The surface-coated cutting tool described in (6) above, wherein the base layer is made of a titanium compound.
根据本发明的表面包覆切削工具,在工具基体的表面包覆形成有通过溶胶-凝胶法成膜的氧化铝层,其本身具备优异的表面平滑性、润滑性、耐熔敷性、耐崩刀性,并且构成氧化铝层的晶粒的周缘部的形状具有凹凸较多的形状,因此晶粒彼此的结合力得到提高。与这些效果相结合,即使在伴随高热发生且断续的冲击性负荷作用于切削刃的钢和铸铁等的高速断续切削加工中使用该表面包覆切削工具时,也不会发生崩刀、剥离等异常损伤,且在长期使用中发挥优异的切削性能,其效果非常大。According to the surface-coated cutting tool of the present invention, the aluminum oxide layer formed by the sol-gel method is coated on the surface of the tool base, and it itself has excellent surface smoothness, lubricity, welding resistance, and resistance to corrosion. chipping, and the shape of the peripheral portion of the crystal grains constituting the alumina layer has a shape with many irregularities, so the bonding force between the crystal grains is improved. Combined with these effects, no chipping, Abnormal damage such as peeling, and exhibits excellent cutting performance in long-term use, its effect is very large.
附图说明Description of drawings
图1表示通过TEM对本发明工具15的氧化铝层的纵截面进行观察的组织照片。FIG. 1 shows a photograph of the structure of the longitudinal section of the aluminum oxide layer of the tool 15 of the present invention observed by TEM.
图2表示通过SEM对本发明工具15的氧化铝层的纵截面进行观察的组织照片。FIG. 2 shows a micrograph of the longitudinal section of the aluminum oxide layer of the tool 15 of the present invention observed by SEM.
图3表示通过SEM对本发明工具15的氧化铝层的表面进行观察的组织照片。FIG. 3 shows a photograph of the structure of the surface of the aluminum oxide layer of the tool 15 of the present invention observed by SEM.
符号说明Symbol Description
1-Ti氧化物微粒,2-氧化铝层(Al2O3层),3-钛化合物层(TiO2层)1-Ti oxide particles, 2-alumina layer (Al 2 O 3 layers), 3-titanium compound layer (TiO 2 layers)
具体实施方式Detailed ways
以下,对本发明进行详细说明。Hereinafter, the present invention will be described in detail.
(a)构成硬质包覆层的氧化铝层的平均层厚:(a) Average layer thickness of the aluminum oxide layer constituting the hard coating:
本发明的实施方式所涉及的表面包覆切削工具具备通过溶胶-凝胶法成膜的平均层厚为0.2~5.0μm的氧化铝层作为硬质包覆层,若氧化铝层的平均层厚小于0.2μm,则无法发挥晶粒彼此的锚定效果来提高晶界的强度这种本发明特有的效果,该晶粒彼此的锚定效果通过如上所述的凹凸性较高的晶界来获得,另一方面,若平均层厚超过5.0μm,则容易产生层的剥离,因此不优选。因此,氧化铝层的平均层厚设定为0.2~5.0μm。The surface-coated cutting tool according to the embodiment of the present invention includes, as a hard coating layer, an aluminum oxide layer with an average layer thickness of 0.2 to 5.0 μm formed by a sol-gel method. If the average layer thickness of the aluminum oxide layer is If it is less than 0.2 μm, the unique effect of the present invention, which is to increase the strength of the grain boundary, by the anchoring effect between crystal grains, which is obtained by the grain boundary with high unevenness as described above, cannot be exerted. , on the other hand, when the average layer thickness exceeds 5.0 μm, peeling of the layer tends to occur, which is not preferable. Therefore, the average layer thickness of the alumina layer is set to 0.2 to 5.0 μm.
(b)构成氧化铝层的晶粒的晶体结构:(b) Crystal structure of grains constituting the aluminum oxide layer:
氧化铝的晶体形态中有α、κ、γ、δ、θ,当使用溶胶-凝胶法形成氧化铝层时,主要形成由具有γ型晶体结构的晶粒构成的氧化铝层,由于γ型氧化铝具有较高的润滑性,因此耐熔敷性和切削时的发热抑制效果较高,但高温硬度不优异,且缺乏耐磨性,尤其在刀尖附近的发热较大的高速切削中,会在比较短的时间内磨耗,因此单独γ型晶体结构时不足以作为表面包覆切削工具的硬质包覆层。在本发明中,通过规定的干燥及烧成处理来形成氧化铝层,或者在氧化铝层的基底中应用TiO2和Ti2O3、Ti3O5、Ti4O7等钛氧化物(以下还记为“Ti氧化物”),以此来促进结晶化,因此不仅能够根据烧成条件,还能够根据Ti氧化物基底层的厚度来控制氧化铝层的晶体结构。另外,在刀尖温度升高的高速切削中,优选为高温硬度和耐热性优异的α型氧化铝层,但在抑制刀尖的发热及要求耐熔敷性的切削方式下,与α型氧化铝一同包含γ型氧化铝的氧化铝层为宜。因此,构成氧化铝层的晶粒的晶体结构设定为α型或α型和γ型的混合相。The crystal forms of alumina include α, κ, γ, δ, and θ. When the sol-gel method is used to form the alumina layer, the alumina layer composed of grains with a γ-type crystal structure is mainly formed. Because the γ-type Alumina has high lubricity, so the welding resistance and the heat suppression effect during cutting are high, but the high-temperature hardness is not excellent, and it lacks wear resistance, especially in high-speed cutting where heat is large near the tool tip. It will wear out in a relatively short time, so the γ-type crystal structure alone is not enough as a hard coating for surface-coated cutting tools. In the present invention, the aluminum oxide layer is formed through prescribed drying and firing treatments, or titanium oxides such as TiO 2 and Ti 2 O 3 , Ti 3 O 5 , Ti 4 O 7 are applied to the base of the aluminum oxide layer ( Hereinafter, it is also referred to as "Ti oxide") to promote crystallization, so that the crystal structure of the aluminum oxide layer can be controlled not only by firing conditions but also by the thickness of the Ti oxide base layer. In addition, in high-speed cutting where the temperature of the tool tip increases, the α-type alumina layer with excellent high-temperature hardness and heat resistance is preferred, but in the cutting method that suppresses the heat generation of the tool tip and requires welding resistance, it is different from the α-type alumina layer. The aluminum oxide preferably contains an alumina layer of gamma alumina together. Therefore, the crystal structure of crystal grains constituting the alumina layer is set to be an α type or a mixed phase of an α type and a γ type.
(c)构成氧化铝层的晶粒的纵横尺寸比及晶粒形状:(c) Aspect ratio and grain shape of crystal grains constituting the alumina layer:
在本发明中发现如下:通过将构成氧化铝层的晶粒的纵横尺寸比控制为规定的值,并且将氧化铝晶粒的周缘部、即晶界的形状设为凹凸较多的形状,从而使相邻的晶粒彼此沿着凹凸相互啮合,由此能够通过所谓的锚定效果来赋予较高的粘附力,从而提高耐磨性及耐崩刀性。并且,关于前述晶粒周缘部的形状,通过进行大量实验确认到能够使用晶粒的周长相对于具有与晶粒的晶粒面积相等的面积的圆的周长之比的值来进行定量评价。In the present invention, it was found that by controlling the aspect ratio of the crystal grains constituting the aluminum oxide layer to a predetermined value, and making the peripheral portion of the aluminum oxide crystal grains, that is, the shape of the grain boundaries into a shape with many irregularities, Adjacent crystal grains are meshed with each other along the unevenness, thereby imparting a high adhesive force due to the so-called anchor effect, thereby improving wear resistance and chipping resistance. In addition, regarding the shape of the peripheral portion of the crystal grain, it has been confirmed through numerous experiments that quantitative evaluation can be performed using the value of the ratio of the circumference of the crystal grain to the circumference of a circle having an area equal to the grain area of the crystal grain.
即,对于该氧化铝层的纵截面,使用电子背散射衍射法,例如以纵横8μm×6μm的观察视场、测定步长50nm,对5个视场求出上述观察视场范围内的各个晶粒形状时,将层厚垂直方向的最大直径定义为层厚垂直方向的粒径,将层厚方向的最大直径定义为层厚方向的粒径,分别计算出层厚方向的粒径相对于层厚垂直方向的粒径的比,将其平均值设为该氧化铝层中的晶粒的平均纵横尺寸比时,所述晶粒的平均纵横尺寸比小于0.5时缺乏耐磨性,另一方面,若超过5.0则成为粗大组织,因此容易发生脱落崩刀。因此,构成氧化铝层的晶粒的平均纵横尺寸比设定为0.5~5.0。That is, for the longitudinal section of the aluminum oxide layer, using the electron backscatter diffraction method, for example, with an observation field of 8 μm x 6 μm in length and width, and a measurement step size of 50 nm, the crystallinity of each crystal within the above-mentioned observation field range is obtained for five fields of view. For particle shape, the maximum diameter in the vertical direction of the layer thickness is defined as the particle diameter in the vertical direction of the layer thickness, and the maximum diameter in the direction of the layer thickness is defined as the particle size in the layer thickness direction, and the particle diameter in the layer thickness direction relative to the layer When the average value of the grain diameter ratio in the thickness vertical direction is taken as the average aspect ratio of crystal grains in the alumina layer, wear resistance is lacking when the average aspect ratio of the crystal grains is less than 0.5, and on the other hand , and if it exceeds 5.0, it will become a coarse structure, so falling off and chipping will easily occur. Therefore, the average aspect ratio of crystal grains constituting the alumina layer is set to 0.5 to 5.0.
并且,与上述平均纵横尺寸比同样地,通过电子背散射衍射法,以纵横8μm×6μm的观察视场、测定步长50nm,对5个视场求出构成该氧化铝层的各个晶粒的形状,将各晶粒的晶界的长度、即各晶粒形状的外周的长度设为各晶粒的周长时,通过电子背散射衍射法求出晶粒的晶粒面积,该晶粒的周长相对于具有与晶粒面积相等的面积的圆的周长之比的平均值小于1.8,则晶界形状的凹凸较少,变得比较平滑,晶粒彼此的啮合减少,因此得不到锚定效果,无法充分发挥提高晶粒彼此的结合力的效果。另一方面,若超过3.0,则着眼于一个晶粒时,成为凹凸非常大的晶粒形状,因此会形成例如细长的凸部等形状上脆弱的部分,因此容易产生龟裂,性能低劣。因此,通过电子背散射衍射法求出晶粒的晶粒面积,该晶粒的周长相对于具有与晶粒面积相等的面积的圆的周长之比的平均值设定为1.8~3.0。And, similarly to the above-mentioned average aspect ratio, by the electron backscatter diffraction method, with an observation field of 8 μm x 6 μm in length and width, and a measurement step size of 50 nm, the ratio of each crystal grain constituting the aluminum oxide layer was obtained for five fields of view. Shape, when the length of the grain boundary of each crystal grain, that is, the length of the outer periphery of each crystal grain shape, is taken as the perimeter of each crystal grain, the grain area of the crystal grain is obtained by the electron backscatter diffraction method, and the perimeter of the crystal grain is phase The average value of the ratio of the circumference of a circle having an area equal to the grain area is less than 1.8, the shape of the grain boundary has less unevenness and becomes relatively smooth, and the meshing of the grains is reduced, so the anchoring effect cannot be obtained and cannot be obtained. Fully exhibit the effect of improving the bonding force between crystal grains. On the other hand, if it exceeds 3.0, when focusing on one crystal grain, it becomes a crystal grain shape with very large unevenness, so that a fragile portion in shape such as elongated protrusions is formed, so cracks are likely to occur, and the performance is inferior. Therefore, the grain area of the crystal grains was obtained by the electron backscatter diffraction method, and the average value of the ratio of the circumference of the crystal grains to the circumference of a circle having an area equal to the grain area was set to 1.8 to 3.0.
另外,所述氧化铝层直接成膜于工具基体,由此能够发挥其性能,但在以包含碳氮化钛的硬质合金为基体时,通过在氮气氛中进行烧成,能够在工具基体表面附近大量含有Ti、Ta、Nb、Zr中的至少一种的耐磨性较高的碳氮化物来形成基体表面固化层,并且提高氧化铝层与工具基体的粘附强度来延长工具寿命。另外,形成该基体表面固化层之后的硬质合金基体的硬度以维氏硬度(Hv)计优选为2200以上2800以下。此时,通过含有大量碳氮化物而使基体表面附近的Co相对减少,例如使用扫描型电子显微镜(SEM)从工具基体表面沿深度方向对0.5~3.0μm的截面进行观察,并在分析视场区域1μm×1μm的范围内通过基于波长分散型X射线分光法的定量分析来检测作为结合相金属的Co的平均含量时,若少于2.0质量%,则会充分形成成为工具基体表面固化的主要原因的碳氮化物,耐磨性得到进一步提高。In addition, the aluminum oxide layer can be directly formed on the tool substrate to exhibit its performance, but when the cemented carbide containing titanium carbonitride is used as the substrate, firing in a nitrogen atmosphere can make the tool substrate A large number of carbonitrides with high wear resistance of at least one of Ti, Ta, Nb, and Zr near the surface form a solidified layer on the surface of the substrate, and improve the adhesion strength between the aluminum oxide layer and the tool substrate to prolong the tool life. In addition, the hardness of the cemented carbide substrate after forming the solidified layer on the surface of the substrate is preferably 2200 to 2800 in terms of Vickers hardness (Hv). At this time, by containing a large amount of carbonitrides, the Co near the surface of the substrate is relatively reduced. For example, a scanning electron microscope (SEM) is used to observe a section of 0.5 to 3.0 μm from the surface of the tool substrate in the depth direction, and analyze it in the field of view. When the average content of Co as the binder phase metal is detected by quantitative analysis based on wavelength dispersive X-ray spectroscopy in the range of 1 μm × 1 μm, if it is less than 2.0% by mass, it will be sufficiently formed to become the main cause of surface solidification of the tool substrate. Due to the carbonitride, the wear resistance is further improved.
并且,在以碳氮化钛基金属陶瓷为基体时,在烧结工序中将升温及以最高温度保持时的气氛设为规定的氮气氛,在保持的途中或降温时进行减压,由此与在一定压力的氮气氛中实施整个烧结工序的情况相比,能够使表面更加固化。这是因为,若在一定压力的氮气氛中实施以最高温度保持为止的工序,则在基体内部均匀地分散形成硬度较高的碳氮化物,但若将其在升温或保持的途中为止,在比较高的氮压力下进行处理,且从保持的途中或降温时起在进一步减压的氮气氛下进行处理,则只有工具基体的最表面被脱氮,Ti和Nb等向Ni和Co的金属结合相的熔解及从内部向工具基体表面的扩散变得活跃,在表面促进形成Ti和Nb等的碳氮化物,从而形成工具基体表面固化层。另外,形成工具基体表面固化层之后的金属陶瓷基体的硬度以维氏硬度(Hv)计优选为2000以上2600以下。并且,此时,与前述硬质合金基体同样地,工具基体表面附近的Ni及Co相对减少,若将作为结合相金属的Ni及Co的总计平均含量设为小于2.0质量%,则会充分形成成为工具基体表面固化的主要原因的碳氮化物,从而耐磨性得到进一步提高。In addition, when titanium carbonitride-based cermets are used as the substrate, the atmosphere at the time of raising the temperature and holding at the highest temperature in the sintering process is set to a predetermined nitrogen atmosphere, and the pressure is reduced during the holding or when the temperature is lowered. Compared with the case where the entire sintering process is carried out in a nitrogen atmosphere at a constant pressure, the surface can be more solidified. This is because, if the process is carried out until the highest temperature is maintained in a nitrogen atmosphere at a constant pressure, carbonitrides with high hardness will be uniformly dispersed and formed inside the matrix, but if it is in the middle of heating or maintaining, the If the treatment is carried out under a relatively high nitrogen pressure, and the treatment is carried out under a nitrogen atmosphere with a further reduced pressure from the middle of holding or when the temperature is lowered, only the outermost surface of the tool substrate is denitrified, and the metals such as Ti and Nb are converted to Ni and Co. The melting of the binder phase and the diffusion from the inside to the surface of the tool base become active, and the formation of carbonitrides such as Ti and Nb is promoted on the surface, thereby forming a solidified layer on the surface of the tool base. In addition, the hardness of the cermet substrate after forming the solidified layer on the surface of the tool substrate is preferably not less than 2000 and not more than 2600 in terms of Vickers hardness (Hv). In addition, at this time, similar to the above-mentioned cemented carbide substrate, the Ni and Co near the surface of the tool substrate are relatively reduced, and if the total average content of Ni and Co as the binder phase metal is set to be less than 2.0% by mass, it will be fully formed. Carbonitrides, which are the main cause of surface solidification of the tool substrate, further improve wear resistance.
并且,本发明的表面包覆切削工具也可以不直接在工具基体的表面形成氧化铝层,而是通过物理蒸镀(PVD)法、化学蒸镀(CVD)法或溶胶-凝胶法,形成本领域技术人员已周知的硬质皮膜、即由含有选自周期表的IVB、VB、VIB族及Si中的至少一种以上元素的氮化物、或氧化物构成的至少一层以上的硬质皮膜之后,在该硬质皮膜的表面包覆形成所述氧化铝层。Moreover, the surface-coated cutting tool of the present invention may not directly form an aluminum oxide layer on the surface of the tool substrate, but may be formed by a physical vapor deposition (PVD) method, a chemical vapor deposition (CVD) method, or a sol-gel method. The hard film known to those skilled in the art, that is, a hard film consisting of at least one layer or more of nitrides or oxides containing at least one element selected from the group IVB, VB, VIB and Si of the periodic table. After forming the hard film, the aluminum oxide layer is coated on the surface of the hard film.
对于本发明的表面包覆切削工具的构成硬质包覆层的氧化铝层,如后述,作为通过溶胶-凝胶法形成氧化铝层的方法,通过RTA法等实施热处理,或者通过溶胶-凝胶法在利用CVD法等成膜的Ti氧化物之上进行氧化铝层的成膜,由此能够在特定的部位选择性地促进结晶化,该氧化铝层中的晶粒的晶体能够以比较高的自由度生长,因此会形成具有凹凸性较高的复杂形状的晶界的氧化铝晶粒。For the aluminum oxide layer constituting the hard coating layer of the surface-coated cutting tool of the present invention, as described later, as a method of forming the aluminum oxide layer by the sol-gel method, heat treatment is performed by the RTA method or the like, or by the sol-gel method. The gel method forms an aluminum oxide layer on a Ti oxide film formed by a CVD method or the like, whereby crystallization can be selectively promoted at a specific site, and the crystal grains in the aluminum oxide layer can be crystallized as Since it grows with a relatively high degree of freedom, alumina crystal grains having complex-shaped grain boundaries with high unevenness are formed.
另外,在对刀尖施加大量负荷的切削深度较大的断续切削中,使具有结晶化促进效果的Ti氧化物本身分散形成于该氧化铝层中,从而能够有助于提高性能。为了使Ti氧化物微粒分散于该氧化铝层中,优选在上述记载的Ti氧化物基底上进行氧化铝的成膜之后,以基底Ti氧化物分解且在氧化铝层中扩散混合的900℃以上的温度进行烧成。根据该方法,Ti氧化物成为微粒而进入到氧化铝层中,并且形成于该氧化铝晶粒的周围,因此能够缓和断续切削时的冲击,能够在长时间发挥优异的耐磨性。In addition, in interrupted cutting with a large depth of cut where a large load is applied to the cutting edge, Ti oxide itself having a crystallization promoting effect is dispersed and formed in the alumina layer, thereby contributing to performance improvement. In order to disperse Ti oxide particles in the alumina layer, it is preferable to form a film of alumina on the Ti oxide substrate described above, and then decompose the Ti oxide as the substrate and diffuse and mix in the alumina layer at a temperature of 900°C or higher. temperature for firing. According to this method, Ti oxide enters into the alumina layer as fine particles and is formed around the alumina crystal grains, so the impact during interrupted cutting can be alleviated and excellent wear resistance can be exhibited for a long time.
(d)氧化铝层中的Ti氧化物的含有比例:(d) The content ratio of Ti oxide in the alumina layer:
发现本发明的氧化铝层的特征为通过规定的烧成处理及将氧化铝层的Ti氧化物用作基底来将晶粒周缘部的形状设为凹凸较多的形状,当将Ti氧化物用作基底时,根据烧成条件,能够使Ti氧化物粒子导入到该氧化铝层中,尤其在断续切削中能够提高耐磨性。It was found that the aluminum oxide layer of the present invention is characterized in that the shape of the peripheral portion of the crystal grains is made into a shape with many concavities and convexities through a predetermined firing treatment and using the Ti oxide of the aluminum oxide layer as a base. When used as a base, depending on firing conditions, Ti oxide particles can be introduced into the alumina layer, and wear resistance can be improved especially in interrupted cutting.
此时,当利用透射型电子显微镜(TEM)及扫描型电子显微镜(SEM)对氧化铝层进行观察时,如图1、图2、图3所示,观察到所述Ti氧化物晶粒是平均粒径为0.01~0.10μm的微细晶粒,若例如通过使用TEM的能量分散型X射线分析装置进行元素映射,则可知Ti氧化物晶粒形成于氧化铝晶粒的周围。而且,可知其数量的平均值在晶粒的一个周长上为5~50个。At this time, when the aluminum oxide layer was observed with a transmission electron microscope (TEM) and a scanning electron microscope (SEM), as shown in Figure 1, Figure 2, and Figure 3, it was observed that the Ti oxide crystal grains were For fine crystal grains having an average particle diameter of 0.01 to 0.10 μm, it can be seen that Ti oxide crystal grains are formed around aluminum oxide crystal grains, for example, when element mapping is performed by an energy dispersive X-ray analyzer using a TEM. Furthermore, it can be seen that the average value of the number is 5 to 50 on one perimeter of crystal grains.
另外,关于在分散有Ti氧化物的氧化铝层中Ti在所有金属元素中所占的含有比例,例如在纵截面视场区域0.2μm×0.3μm的范围内,通过TEM所附带的能量分散型X射线分析装置对5个视场实施观察视场范围内的定量分析,并求出其平均值,则可知超过0.02at%且10at%以下。In addition, regarding the content ratio of Ti in all metal elements in the aluminum oxide layer dispersed with Ti oxide, for example, in the range of 0.2 μm × 0.3 μm in the field of view of the longitudinal section, the energy dispersion type When the X-ray analyzer performs quantitative analysis within the observation field of view for five fields of view, and calculates the average value, it can be found that it exceeds 0.02 at% and is not more than 10 at%.
另外,根据图1,可以观察到Ti氧化物微粒1(图1中用箭头表示的部分)在氧化铝晶粒的晶界形成为环绕该氧化铝晶粒。In addition, according to FIG. 1 , it can be observed that Ti oxide fine particles 1 (portions indicated by arrows in FIG. 1 ) are formed at grain boundaries of alumina crystal grains so as to surround the alumina crystal grains.
在此,形成于氧化铝晶粒周围的Ti氧化物微粒的数量的平均值在一个周长上少于5个时,无法充分缓和切削时的冲击,另一方面,若超过50个,则孤立于氧化铝素坯,切削时容易脱落,因此不优选。因此,优选的形成于氧化铝晶粒周围的Ti氧化物微粒的数量设定为5~50个。Here, when the average number of Ti oxide fine particles formed around the alumina crystal grains is less than 5 per circumference, the impact during cutting cannot be sufficiently alleviated. On the other hand, if it exceeds 50, isolated Alumina biscuits are not preferable because they tend to come off during cutting. Therefore, it is preferable to set the number of Ti oxide fine particles formed around the alumina crystal grains to be 5 to 50 pieces.
本发明的表面包覆切削工具的构成硬质包覆层的氧化铝层能够通过以下所示的溶胶-凝胶法形成。The aluminum oxide layer constituting the hard coating layer of the surface-coated cutting tool of the present invention can be formed by the sol-gel method described below.
氧化铝溶胶的制备:Preparation of alumina sol:
首先,在铝的醇盐(例如,仲丁醇铝(ASB)、丙醇铝)中添加醇(例如,乙醇、1-丁醇)和水作为溶剂,还添加酸(例如,盐酸、硝酸)作为催化剂,添加月桂酸钠(C11H23COONa)或十二烷基苯磺酸钠(DBSN)作为表面活性剂之后,在-10~20℃以下的温度范围内进行搅拌之后,与搅拌时的温度范围同样地,例如搅拌和熟化处理的总计时间经12小时以上的长时间进行保持在-10~20℃以下的温度范围内的熟化处理,从而形成氧化铝溶胶。另外,在本发明中使用的氧化铝溶胶优选将二甲基甲酰胺(DMF)和乙酰丙酮(AcAc)用作螯合剂。这是为了抑制过度促进结晶化,若不使用具有抑制过度促进结晶化的效果的螯合剂,则容易促进结晶化,在该层中的所有部位开始进行氧化铝的结晶化,因此晶体的生长受到其他晶体的生长的阻碍,因此具有成为微粒组织的趋势,不会形成具有所希望的尺寸、纵横尺寸比的复杂形状的晶粒。即,通过使用螯合剂进行制备以使结晶化开始温度升高,同时通过规定的烧成处理及使用Ti氧化物来在氧化铝层中的限定的特定部位开始结晶化,由此,晶体能够在晶体生长方向上保持比较高的自由度生长,其结果,能够以所希望的尺寸和纵横尺寸比形成具有复杂形状的晶界的氧化铝晶粒。First, alcohols (e.g., ethanol, 1-butanol) and water are added as solvents, and acids (e.g., hydrochloric acid, nitric acid) are added to aluminum alkoxides (e.g., aluminum sec-butoxide (ASB), aluminum propoxide) As a catalyst, after adding sodium laurate (C 11 H 23 COONa) or sodium dodecylbenzenesulfonate (DBSN) as a surfactant, after stirring at a temperature range of -10 to 20°C, the same as when stirring Similarly, for example, the total time of stirring and aging treatment is 12 hours or more, and the aging treatment is performed at a temperature range of -10 to 20° C. or lower to form an alumina sol. In addition, the alumina sol used in the present invention preferably uses dimethylformamide (DMF) and acetylacetone (AcAc) as a chelating agent. This is for the purpose of suppressing excessively accelerated crystallization. If a chelating agent having an effect of suppressing excessively accelerated crystallization is not used, crystallization is easily promoted, and crystallization of alumina begins to proceed in all parts of the layer, so the growth of crystals is restricted. Since the growth of other crystals is inhibited, there is a tendency to become a fine grain structure, and crystal grains having a complex shape having a desired size and aspect ratio cannot be formed. That is, by using a chelating agent to prepare to increase the crystallization start temperature, and at the same time start crystallization at a limited specific site in the aluminum oxide layer through a prescribed firing treatment and use of Ti oxide, the crystal can be formed in the The crystal growth direction can be grown with a relatively high degree of freedom, and as a result, alumina crystal grains having complex-shaped grain boundaries can be formed with a desired size and aspect ratio.
并且,若使用表面活性剂,则溶胶的润湿性得到提高,且膜的均匀性得到提高。但是,若在干燥工序中不将添加至溶胶中的表面活性剂热分解而从层中去除,则容易形成龟裂,因此作为能够充分去除的量,优选相对于Al的醇盐以摩尔比计为0.1以下。In addition, when a surfactant is used, the wettability of the sol is improved, and the uniformity of the film is improved. However, if the surfactant added to the sol is not thermally decomposed and removed from the layer in the drying process, cracks are likely to be formed, so as the amount that can be removed sufficiently, it is preferably measured in molar ratio with respect to Al alkoxide 0.1 or less.
另外,基于Ti氧化物的氧化铝的结晶化促进效果的机理尚不明确,但认为是在Ti氧化物被还原时成为用于使Al氧化的氧供给源,并且,成为氧化铝晶粒从Ti氧化物的表面生长的起点,在Ti氧化物附近的限定部位能够在比较低的温度下结晶化。另外,氧化铝中的Ti氧化物微粒配置并形成为烧成时沿氧化铝晶界,但该Ti氧化物微粒的粒径因烧成时的气氛而发生变化,若气氛中的氧量较多,则具有粒径变大的趋势,若平均粒径小于0.01μm,则铝的氧化所需的氧的供给不充分,因此难以结晶化,若平均粒径超过0.10μm,则在氧化铝层中会含有粗大的Ti氧化物,烧成后容易成为龟裂和剥离的起点。因此,氧化铝层中的Ti氧化物微粒的平均粒径设为0.01~0.10μm。In addition, the mechanism of the crystallization-promoting effect of alumina based on Ti oxide is not clear, but it is considered that when Ti oxide is reduced, it serves as an oxygen supply source for The starting point of oxide surface growth can be crystallized at a relatively low temperature at a limited site near Ti oxide. In addition, Ti oxide particles in alumina are arranged and formed along alumina grain boundaries during firing, but the particle size of the Ti oxide particles changes due to the atmosphere during firing. If the amount of oxygen in the atmosphere is large, , the particle size tends to become larger. If the average particle size is less than 0.01 μm, the supply of oxygen required for the oxidation of aluminum is insufficient, so it is difficult to crystallize. If the average particle size exceeds 0.10 μm, the aluminum oxide layer Contains coarse Ti oxides, which tend to be the starting point of cracking and peeling after firing. Therefore, the average particle diameter of the Ti oxide fine particles in the alumina layer is set to 0.01 to 0.10 μm.
当设为如上所述的在氧化铝层中分散含有Ti氧化物微粒的结构时,若在氧化铝层中Ti在所有金属元素中所占的含有比例为0.02at%以下,则缓和切削时的冲击所需的Ti氧化物微粒的量不充分,另一方面,若超过10at%,则钛氧化物的含有比率过度增高,因此无法发挥氧化铝所具有的优异的高温硬度和抗氧化性。因此,在氧化铝层中Ti在所有金属元素中所占的含有比例优选设为超过0.02at%且10at%以下。When adopting the structure in which Ti oxide fine particles are dispersed in the alumina layer as described above, if the content ratio of Ti in all metal elements in the alumina layer is 0.02 at % or less, the stress during cutting will be eased. The amount of Ti oxide fine particles required for impact is not sufficient. On the other hand, if it exceeds 10 at%, the content ratio of titanium oxide increases too much, so that the excellent high-temperature hardness and oxidation resistance of alumina cannot be exhibited. Therefore, the content ratio of Ti in the aluminum oxide layer to all metal elements is preferably set to be more than 0.02 at % and not more than 10 at %.
通常制备氧化铝溶胶时,在40~80℃下进行搅拌且在该搅拌温度下进行数小时左右的熟化处理,但在本发明中,优选在-10~20℃的低温度范围进行搅拌和熟化,例如进行总计12小时以上的长时间的低温处理。Usually, when preparing alumina sol, stirring is performed at 40 to 80°C and aging treatment is performed at this stirring temperature for several hours, but in the present invention, it is preferable to carry out stirring and aging at a low temperature range of -10 to 20°C , for example, perform a long-term low-temperature treatment for a total of 12 hours or more.
在此,若搅拌及熟化处理时的温度超过20℃,则会快速进行水解及缩聚反应,因此,难以致密地形成氧化铝前体,在后工序的烧成处理中难以形成α型氧化铝,因此将搅拌及熟化处理时的温度上限设为20℃,另一方面,当搅拌及熟化处理时的温度低于-10℃时,难以进行水解及缩聚反应,在上述记载的规定的烧成方法及使用Ti氧化物的后工序的烧成处理中难以结晶化,因此设为-10~20℃的低温温度范围。Here, if the temperature during the stirring and aging treatment exceeds 20°C, the hydrolysis and polycondensation reactions will proceed rapidly, so it will be difficult to form an alumina precursor densely, and it will be difficult to form α-alumina in the subsequent firing treatment. Therefore, the upper limit of the temperature during stirring and aging treatment is set at 20°C. On the other hand, when the temperature during stirring and aging treatment is lower than -10°C, it is difficult to carry out hydrolysis and polycondensation reactions. And since crystallization is difficult in the baking process of the post process which uses Ti oxide, it is made into the low temperature range of -10-20 degreeC.
另外,将搅拌及熟化时间设为总计12小时以上,这是使在所述搅拌及熟化时的温度范围产生的化学反应充分进行至成为平衡状态,从而得到水解缩聚的致密地形成有Al与O的网络的稳定的氧化铝前体溶胶所需的时间。In addition, the stirring and aging time is set to be 12 hours or more in total, because the chemical reaction generated in the temperature range during the stirring and aging is sufficiently advanced to reach an equilibrium state, thereby obtaining a hydrolytic polycondensation densely formed Al and O The time required for the network to stabilize the alumina precursor sol.
干燥处理及烧成处理:Drying treatment and firing treatment:
当通过RTA法进行热处理时,将如上述制备的氧化铝溶胶直接涂布于工具基体的表面,或者涂布于通过化学蒸镀(CVD)法和物理蒸镀(PVD)法形成于工具基体表面上的作为基底层的硬质皮膜的表面,接着,以5~20℃/sec这种在使用RTA法的一般的溶胶-凝胶膜的形成中不经常使用的比较慢的升温速度进行加热,以使氧化铝溶胶中的有机成分的热分解速度变缓慢,并且,以100~600℃,更优选以200~500℃保持5分钟以上并进行干燥、冷却之后,再次将氧化铝溶胶涂布于所述表面上,重复实施以上述条件进行干燥处理的工序,直至成为所希望的膜厚,形成氧化铝的干燥凝胶之后,在600~1100℃的温度范围进行基于RTA法的烧成处理,从而包覆形成氧化铝层。RTA法是通过从红外线灯辐射的电磁波进行加热的方法,在半导体产业中经常使用Si晶片等的热处理等。由于能够实现非接触且快速的升降温,并且使用近红外线,因此吸收容易度不仅因被加热物的透射率而不同,还因颜色等表面状态而不同,因此能够进行局部加热。另外,在本发明中,若升温速度较快,则涂布膜中的有机成分急剧燃烧、挥发,因此在涂布膜中容易形成气孔,难以成为致密的膜。并且,通过一次涂布所形成的膜厚例如作为烧成后的净膜厚优选为0.2μm以下,通过较薄地重复形成,能够形成更加致密的膜。When heat treatment is carried out by the RTA method, the alumina sol prepared as above is directly coated on the surface of the tool substrate, or coated on the surface of the tool substrate formed by chemical vapor deposition (CVD) and physical vapor deposition (PVD). The surface of the hard film as the base layer on the upper surface is then heated at a relatively slow heating rate of 5 to 20°C/sec, which is not often used in the formation of a general sol-gel film using the RTA method, In order to slow down the thermal decomposition rate of the organic components in the alumina sol, and keep it at 100-600°C, more preferably at 200-500°C for 5 minutes or more, dry and cool, then apply the alumina sol on the On the above-mentioned surface, the process of performing the drying treatment under the above-mentioned conditions is repeated until the desired film thickness is obtained, and after the dry gel of alumina is formed, the firing treatment based on the RTA method is performed at a temperature range of 600 to 1100° C. Thereby covering and forming an aluminum oxide layer. The RTA method is a method of heating by electromagnetic waves radiated from an infrared lamp, and is often used in the semiconductor industry for heat treatment of Si wafers and the like. Since non-contact and rapid temperature rise and fall are possible, and near-infrared rays are used, the ease of absorption varies not only with the transmittance of the object to be heated, but also with the surface state such as color, so localized heating is possible. In addition, in the present invention, if the rate of temperature increase is fast, the organic components in the coating film will burn and volatilize rapidly, so pores are likely to be formed in the coating film, making it difficult to form a dense film. In addition, the film thickness formed by one application is preferably 0.2 μm or less as a net film thickness after firing, and a denser film can be formed by repeating thin film formation.
并且,当应用对氧化铝的结晶化的促进具有效果的Ti氧化物时,将氧化铝溶胶涂布于在工具基体表面上通过CVD法等形成有Ti氧化物层的基底层的表面上,此时,与上述同样地通过一次涂布所形成的膜厚也优选为0.2μm以下,通过较薄地重复形成,能够形成更加致密的膜。并且,此时,干燥和烧成等热处理也可以不通过RTA法进行,利用通常的电炉便充分。And, when applying Ti oxide which is effective in promoting the crystallization of alumina, the alumina sol is applied to the surface of the base layer on which the Ti oxide layer is formed on the surface of the tool base by CVD or the like. In this case, the thickness of the film formed by one application in the same manner as above is preferably 0.2 μm or less, and a denser film can be formed by repeating thinner film formation. In addition, at this time, heat treatment such as drying and firing may not be performed by the RTA method, and a normal electric furnace is sufficient.
当使用电炉时,在100~600℃,更优选在200~500℃下重复进行一次以上的干燥处理,接着,在600~1100℃的温度范围进行烧成处理来包覆形成氧化铝层。When an electric furnace is used, the drying treatment is repeated at least once at 100-600°C, more preferably at 200-500°C, followed by firing at a temperature range of 600-1100°C to coat and form an alumina layer.
通过所述干燥处理来形成氧化铝的干燥凝胶,通过接下来进行的烧成处理,在硬质皮膜表面上形成具有由复杂形状的氧化铝的晶粒构成的具有α型晶体结构或α型和γ型晶体结构的氧化铝层,根据烧成条件形成分散含有Ti氧化物微粒的氧化铝层。The dried gel of alumina is formed by the drying treatment, and the α-type crystal structure or α-type gel formed of complex-shaped alumina crystal grains is formed on the surface of the hard film by the subsequent firing treatment. An alumina layer with a γ-type crystal structure and an alumina layer containing Ti oxide fine particles dispersed are formed depending on the firing conditions.
所述氧化铝层的膜厚依赖于氧化铝溶胶的涂布厚度及涂布次数,如上所述,当包覆形成的氧化铝层的膜厚小于0.2μm时,无法在长期使用中发挥作为表面包覆切削工具的优异的耐磨性,另一方面,若膜厚超过5.0μm,则氧化铝层容易发生脱落崩刀,因此氧化铝层的膜厚设为0.2~5.0μm。The film thickness of the aluminum oxide layer depends on the coating thickness and the number of times of coating of the alumina sol. As mentioned above, when the film thickness of the aluminum oxide layer formed by coating is less than 0.2 μm, it cannot be used as a surface in long-term use. The excellent wear resistance of the coated cutting tool, on the other hand, if the film thickness exceeds 5.0 μm, the aluminum oxide layer is likely to fall off and chip, so the film thickness of the aluminum oxide layer is set to 0.2 to 5.0 μm.
并且,将干燥处理的温度范围设定为100~600℃,更优选设定为200~500℃,且将烧成处理的温度范围设定为600~1100℃的原因在于,关于干燥温度,当低于100℃时,不会发生有机溶剂和表面活性剂等的热分解,若超过600℃,则急剧进行凝胶的体积收缩而产生龟裂等,皮膜容易产生剥离等,关于烧成温度,当低于600℃时,即使使用RTA法等规定的烧成方法和Ti氧化物,也不会发生结晶化,因此耐磨性不充分,另一方面,当以超过1100℃的温度进行烧成时,工具基体劣化且粒状组织粗大化,因此耐缺损性、耐崩刀性、平滑性显示出下降趋势。In addition, the reason why the temperature range of the drying treatment is set to 100 to 600°C, more preferably 200 to 500°C, and the temperature range of the firing treatment is set to 600 to 1100°C is that when the drying temperature is When the temperature is lower than 100°C, thermal decomposition of organic solvents and surfactants does not occur. If the temperature exceeds 600°C, the volume of the gel rapidly shrinks to cause cracks, etc., and the film is easy to peel off. Regarding the firing temperature, When the temperature is lower than 600°C, crystallization will not occur even if a prescribed firing method such as the RTA method and Ti oxide are used, so the wear resistance is insufficient. On the other hand, when firing at a temperature exceeding 1100°C , the tool matrix deteriorates and the granular structure becomes coarser, so the chipping resistance, chipping resistance, and smoothness show a downward trend.
[实施例1][Example 1]
接着,通过实施例对本发明进行更具体说明。Next, the present invention will be described more specifically by way of examples.
(a1)作为原料粉末,准备平均粒径为0.8μm的微粒WC粉末、平均粒径为2~3μm的中粒WC粉末、及均具有1~3μm的平均粒径的TiCN粉末、ZrC粉末、TaC粉末、NbC粉末、Cr3C2粉末、VC粉末及Co粉末,将这些原料粉末配合成表1所示的规定的配合组成,进一步加入石蜡并在丙酮中球磨混合24小时,减压干燥之后,在98MPa的压力下冲压成型为规定形状的压坯,并将该压坯在5Pa的真空中,在以1400℃的温度保持1小时的条件下进行真空烧结,烧结后,对切削刃部实施R:0.05mm的刃口修磨加工,由此制造出具有ISO·CNMG120408中规定的刀片形状的WC基硬质合金制工具基体A、B、C、D、E、E1、E2、E3、E4、E5(称为工具基体A、B、C、D、E、E1、E2、E3、E4、E5)。(a1) As raw material powders, fine particle WC powder with an average particle diameter of 0.8 μm, medium-grained WC powder with an average particle diameter of 2 to 3 μm, and TiCN powder, ZrC powder, and TaC powder with an average particle diameter of 1 to 3 μm are prepared. powder, NbC powder, Cr 3 C 2 powder, VC powder and Co powder, these raw material powders are compounded into the prescribed compounding composition shown in Table 1, and paraffin wax is further added and ball milled in acetone for 24 hours. After drying under reduced pressure, Under the pressure of 98MPa, it is stamped into a green compact with a specified shape, and the green compact is vacuum sintered at a temperature of 1400°C for 1 hour in a vacuum of 5 Pa. After sintering, R is applied to the cutting edge. : 0.05mm edge grinding process, thereby manufacturing WC-based cemented carbide tool substrates A, B, C, D, E, E1, E2, E3, E4, with the blade shape specified in ISO·CNMG120408, E5 (referred to as tool bases A, B, C, D, E, E1, E2, E3, E4, E5).
但是,关于在1400℃下保持1小时之后成为1320℃为止进行的冷却,对工具基体E2在3.3kPa的氮气氛中进行40分钟,对工具基体E3在1kPa的氮气氛中进行40分钟,对工具基体E4在2kPa的氮气氛中进行10分钟,对工具基体E5在3.3kPa的氮气氛中进行120分钟的冷却,由此对基体表面进行固化处理。However, for cooling to 1320° C. after holding at 1,400° C. for 1 hour, the tool base E2 was cooled in a nitrogen atmosphere of 3.3 kPa for 40 minutes, and the tool base E3 was cooled in a nitrogen atmosphere of 1 kPa for 40 minutes. The base E4 was cooled in a nitrogen atmosphere of 2 kPa for 10 minutes, and the tool base E5 was cooled in a nitrogen atmosphere of 3.3 kPa for 120 minutes, whereby the surface of the base was solidified.
(b1)接着,对上述工具基体A~E形成基底层。另外,当形成基底层时,对于上述工具基体A及B,装入化学蒸镀装置中,使用表2所示的成膜条件,以表5所示的皮膜构成预先形成作为基底层的具有粒状晶体组织的TiN层、纵长生长晶体组织的TiCN层(以下用l-TiCN表示)、由TiO2、Ti2O3构成的Ti化合物层。另一方面,对于上述工具基体C及D,装入作为一种物理蒸镀装置的电弧离子镀装置中,预先形成表5所示的膜厚的由Ti0.5Al0.5N层构成的基底层。(b1) Next, base layers are formed on the tool bases A to E described above. In addition, when forming the base layer, the above-mentioned tool substrates A and B were loaded into a chemical vapor deposition device, and the film formation conditions shown in Table 2 were used to form a granular layer as the base layer in advance with the film composition shown in Table 5. A TiN layer with a crystal structure, a TiCN layer with a longitudinally grown crystal structure (hereinafter referred to as 1-TiCN), and a Ti compound layer composed of TiO 2 and Ti 2 O 3 . On the other hand, the above-mentioned tool bases C and D were installed in an arc ion plating apparatus as a physical vapor deposition apparatus, and an underlayer composed of a Ti 0.5 Al 0.5 N layer having a film thickness shown in Table 5 was formed in advance.
并且,对于上述工具基体E,通过溶胶-凝胶法预先形成表5所示的膜厚的由TiO2层构成的基底层。In addition, with respect to the above-mentioned tool base E, an underlayer composed of a TiO 2 layer having a film thickness shown in Table 5 was formed in advance by a sol-gel method.
另一方面,对于上述工具基体E1、E2、E3、E4、E5,未特别形成基底层。On the other hand, for the above-mentioned tool bases E1, E2, E3, E4, and E5, the base layer was not particularly formed.
(c1)接着,在基底层之上,如下制备用于利用溶胶-凝胶法包覆形成氧化铝层的氧化铝溶胶。(c1) Next, on the base layer, an alumina sol for coating an alumina layer by a sol-gel method was prepared as follows.
在表3所示的规定量的铝的醇盐、即仲丁醇铝(ASB)中,作为溶剂添加同样地表3所示的规定量的乙醇,在恒温槽中以5℃进行搅拌,进一步作为催化剂,经1小时滴加添加有表3所示的规定量的水的盐酸。To a predetermined amount of aluminum alkoxide shown in Table 3, that is, aluminum sec-butoxide (ASB), a predetermined amount of ethanol similarly shown in Table 3 was added as a solvent, stirred at 5° C. in a thermostat, and further prepared as As a catalyst, hydrochloric acid to which a predetermined amount of water shown in Table 3 was added was dropped over 1 hour.
(d1)将此以在恒温槽中保持为5℃的状态持续搅拌12小时以上,并且,以5℃的低温进行24小时的熟化处理,从而制备还添加表3所示的规定量的乙酰丙酮作为螯合剂的氧化铝溶胶。(d1) This was kept under constant stirring at 5°C in a constant temperature tank for 12 hours or more, and aging treatment was carried out at a low temperature of 5°C for 24 hours to prepare a predetermined amount of acetylacetone shown in Table 3. Alumina sol as a chelating agent.
最终的溶液组成调整为以摩尔比计成为The final solution composition was adjusted to become
(仲丁醇铝(ASB)):(水):(乙醇):(盐酸):(乙酰丙酮)=1:(50~100):20:(0.5~0.8):(0.8~1.2)。(Aluminum sec-butoxide (ASB)):(water):(ethanol):(hydrochloric acid):(acetylacetone)=1:(50~100):20:(0.5~0.8):(0.8~1.2).
(e1)接着,对于所述工具基体A~E5,在通过化学蒸镀法、物理蒸镀法及溶胶-凝胶法形成的Ti化合物层上,或者在未实施特别表面处理的基体表面上涂布所述氧化铝溶胶。(e1) Next, for the tool substrates A to E5, the Ti compound layer formed by the chemical vapor deposition method, the physical vapor deposition method and the sol-gel method, or the surface of the substrate without special surface treatment is coated with Cloth the alumina sol.
(f1)接着,将所述涂布的氧化铝溶胶进行表4所示的规定条件的干燥处理,还重复进行涂布和干燥之后,以600~1100℃进行表4所示的条件的烧成处理,包覆形成本发明氧化铝层,从而制造出表5、6所示的本发明的表面包覆切削工具1~21(称为本发明工具1~21)。(f1) Next, dry the coated alumina sol under the prescribed conditions shown in Table 4, repeat the coating and drying, and then perform firing under the conditions shown in Table 4 at 600 to 1100°C. The aluminum oxide layer of the present invention was formed by coating, thereby producing surface-coated cutting tools 1 to 21 of the present invention shown in Tables 5 and 6 (referred to as tools 1 to 21 of the present invention).
对于本发明工具1~21,利用透射型电子显微镜(TEM)对氧化铝层的纵截面进行观察,结果确认到在氧化铝层中形成有凹凸性较高的晶界,一部分本发明工具在该晶粒周围形成有新的微粒晶粒。在确认该凹凸性较高的晶粒形状时,使用电子背散射衍射法,分别求出氧化铝层中的各晶粒的纵横尺寸比、该晶粒的周长相对于具有与各晶粒的面积相等的面积的圆的周长之比。并且,在确认晶体结构时,使用X射线衍射装置和透射型电子显微镜(TEM)并通过选区电子衍射法对该各晶粒进行分析,结果由该晶粒得到清晰的电子射线衍射图案,根据该图案的分析及X射线衍射图案确认到氧化铝具有α型或α型和γ型的混合相。另外,使用基于TEM的能量分散型X射线分析装置确定了微粒晶粒为钛氧化物。As a result of observing the longitudinal section of the aluminum oxide layer with a transmission electron microscope (TEM) for the tools 1 to 21 of the present invention, it was confirmed that grain boundaries with high unevenness were formed in the aluminum oxide layer. New grains of particles are formed around the grains. When confirming the crystal grain shape with high concavo-convexity, the aspect ratio of each crystal grain in the aluminum oxide layer, the perimeter length of the crystal grain relative to the area of each crystal grain, were obtained by electron backscatter diffraction method. The ratio of the circumferences of circles of equal area. In addition, when confirming the crystal structure, the crystal grains were analyzed by the selected area electron diffraction method using an X-ray diffraction device and a transmission electron microscope (TEM). As a result, a clear electron beam diffraction pattern was obtained from the crystal grains. According to the The analysis of the pattern and the X-ray diffraction pattern confirmed that alumina has an α-type or a mixed phase of α-type and γ-type. In addition, using an energy dispersive X-ray analyzer based on TEM, it was confirmed that the microparticle crystal grains were titanium oxide.
在图1中示出本发明工具15的氧化铝层的纵截面TEM照片的一例,并且在图2及图3中同样对本发明工具15示出其氧化铝层的纵截面和表面SEM照片。在图2、图3中,上部层为以Al2O3为主成分的氧化铝层2,下部层为以TiO2为主成分的钛化合物层3。图2、图3中的白色部位表示Ti氧化物。另外,上述记载的主成分是指相对于各层的总成分以质量%计为50%以上。根据图2、图3,能够确认分散于氧化铝层中的微细Ti氧化物粒以围绕氧化铝晶粒的方式凝集形成。1 shows an example of a vertical cross-sectional TEM photograph of the aluminum oxide layer of the tool 15 of the present invention, and FIGS. 2 and 3 also show the vertical cross-section and surface SEM photographs of the aluminum oxide layer of the tool 15 of the present invention. In FIGS. 2 and 3 , the upper layer is an aluminum oxide layer 2 mainly composed of Al 2 O 3 , and the lower layer is a titanium compound layer 3 mainly composed of TiO 2 . The white parts in Fig. 2 and Fig. 3 represent Ti oxides. In addition, the main component described above means 50% or more by mass % with respect to the total component of each layer. From FIG. 2 and FIG. 3 , it can be confirmed that the fine Ti oxide particles dispersed in the alumina layer are aggregated and formed so as to surround the alumina crystal grains.
(比较例1)(comparative example 1)
为了进行比较,利用以下的制造方法制造出表面包覆切削工具。For comparison, a surface-coated cutting tool was manufactured by the following manufacturing method.
即,对于所述(a1)的工具基体A~E5,在所述(b1)的工序中形成硬质皮膜,在所述(c1)的工序(参考表3)中制备氧化铝溶胶。That is, for the tool bases A to E5 of the above (a1), the hard film was formed in the step (b1), and the alumina sol was prepared in the step (c1) (see Table 3).
接着,代替所述(d1)的工序,以在恒温槽中保持为40℃的状态持续进行12小时的搅拌,并且进行以40℃熟化24小时的处理,添加乙酰丙酮作为螯合剂,由此制备氧化铝溶胶。Next, instead of the step of (d1), stirring was continued for 12 hours in a constant temperature tank at 40°C, and aging was performed at 40°C for 24 hours, and acetylacetone was added as a chelating agent to prepare Alumina sol.
接着,与所述(e1)同样地,对于工具基体A~E5,在通过化学蒸镀法、物理蒸镀法及溶胶-凝胶法形成的所述Ti化合物层上,或者在未实施特别表面处理的基体表面上涂布所述氧化铝溶胶。Next, similarly to (e1) above, for the tool bases A to E5, on the Ti compound layer formed by the chemical vapor deposition method, physical vapor deposition method, or sol-gel method, or on the surface without special The alumina sol is coated on the surface of the treated substrate.
接着,与所述(f1)同样地,对所述涂布的氧化铝溶胶进行干燥处理,还重复进行涂布和干燥处理之后,进行烧成处理,但此时,干燥条件和烧成条件使用与本发明工具不同的条件,在最表面上包覆形成氧化铝层,由此制造出表7、8所示的比较例的表面包覆切削工具1~21(称为比较例工具1~21)。Next, in the same manner as in (f1) above, the coated alumina sol is dried, and the coating and drying treatments are repeated, followed by firing treatment. However, at this time, the drying conditions and firing conditions used Under different conditions from the tool of the present invention, an aluminum oxide layer was coated on the outermost surface, thereby producing surface-coated cutting tools 1 to 21 of comparative examples shown in Tables 7 and 8 (referred to as comparative example tools 1 to 21). ).
对于所述本发明工具1~21及比较例工具1~21,使用附带能量分散型X射线分析装置的透射型电子显微镜,将氧化铝层的纵截面,以10万倍的观察视场范围0.2×0.3μm对5个视场进行元素映射分析,求出Ti氧化物微粒的数量的平均值,并且关于其结果,假设为平面,对将分散含于氧化铝层中的该微细Ti氧化物粒子的面积计算为圆的面积时的近似圆的直径进行5点测定,将其平均值设为该微细Ti氧化物粒子的平均粒径。For tools 1 to 21 of the present invention and tools 1 to 21 of comparative examples, using a transmission electron microscope with an energy dispersive X-ray analysis device, the longitudinal section of the aluminum oxide layer was observed at a field of view of 100,000 times 0.2 ×0.3μm Element mapping analysis is performed on 5 fields of view, the average value of the number of Ti oxide particles is obtained, and the result is assumed to be a plane, and the fine Ti oxide particles that will be dispersed in the alumina layer The diameter of an approximate circle when the area of is calculated as the area of a circle is measured at five points, and the average value thereof is defined as the average particle diameter of the fine Ti oxide particles.
并且,在纵截面视场区域0.2μm×0.3μm的范围,通过TEM所附带的能量分散型X射线分析装置,实施5个视场的观察视场范围内的定量面分析,并求出其平均值,由此测定在氧化铝层中Ti在所有金属元素中所占的含有比例。In addition, in the range of 0.2 μm × 0.3 μm in the field of view of the longitudinal section, the energy dispersive X-ray analyzer attached to the TEM was used to perform quantitative surface analysis within the observation field of view of five fields of view, and the average value was obtained. value, thereby determining the proportion of Ti in all metal elements in the alumina layer.
并且,关于硬质基体表面的Co的含量,通过使用扫描型电子显微镜(SEM)的波长分散型X射线分光法,对氧化铝层或硬质基体的纵截面观察视场内进行定量分析,并采用其平均值。关于硬质基体表面的Co含量,通过从基板表面沿深度方向0.5~3.0μm的范围内的分析视场区域1μm×1μm的面分析,进行5个视场的测定。In addition, the Co content on the surface of the hard substrate was quantitatively analyzed in the field of observation of the longitudinal section of the aluminum oxide layer or the hard substrate by wavelength-dispersive X-ray spectroscopy using a scanning electron microscope (SEM), and Take its average value. The Co content on the surface of the hard substrate was measured in five fields of view by surface analysis of an analysis field of view area of 1 µm×1 µm in the range of 0.5 to 3.0 µm in the depth direction from the substrate surface.
并且,同时使用扫描型电子显微镜氧化铝层的平均层厚进行截面测定,结果均显示出与目标层厚基本上相同的平均值(5处的平均值)。In addition, when the average layer thickness of the aluminum oxide layer was measured using a scanning electron microscope at the same time, all of them showed an average value (average value at five locations) that was substantially the same as the target layer thickness.
在表6、8中示出测定结果。Tables 6 and 8 show the measurement results.
接着,对于本发明工具1~21及比较例工具1~21,实施以下所示的碳钢的干式高速断续切削试验、铸铁的湿式高速断续切削试验,并且均测定切削刃的后刀面磨损宽度。Next, for the tools 1 to 21 of the present invention and tools 1 to 21 of comparative examples, the dry high-speed interrupted cutting test of carbon steel and the wet high-speed interrupted cutting test of cast iron shown below were carried out, and the relief of the cutting edge was measured in both. Face wear width.
切削条件1:Cutting condition 1:
工件:JIS·SCM435的在长度方向上等间隔地有四条纵槽的圆棒Workpiece: JIS·SCM435 round bar with four longitudinal grooves equally spaced in the length direction
切削速度:360m/minCutting speed: 360m/min
切削深度:1.2mmCutting depth: 1.2mm
进给速度:0.2mm/revFeed speed: 0.2mm/rev
切削时间:5分钟Cutting time: 5 minutes
(通常的切削速度为220m/min)(The usual cutting speed is 220m/min)
切削条件2:Cutting condition 2:
工件:JIS·FCD450的在长度方向上等间隔地有四条纵槽的圆棒Workpiece: JIS·FCD450 round bar with four longitudinal grooves at equal intervals in the length direction
切削速度:320m/minCutting speed: 320m/min
切削深度:1.0mmCutting depth: 1.0mm
进给速度:0.2mm/revFeed speed: 0.2mm/rev
切削时间:5分钟Cutting time: 5 minutes
(通常的切削速度为200m/min)(The usual cutting speed is 200m/min)
将这些结果示于表6、8。These results are shown in Tables 6 and 8.
[表1][Table 1]
[表2][Table 2]
[表3][table 3]
[表4][Table 4]
(注)投入是表示向保持为规定温度的炉中投入试料的方法。(Note) Throwing means throwing a sample into a furnace kept at a predetermined temperature.
[表5][table 5]
[表6][Table 6]
[表7][Table 7]
[表8][Table 8]
(注)无法判定表示因缺损而无法测定磨损量的状态。(Note) Unable to judge means that the wear amount cannot be measured due to chipping.
[实施例2][Example 2]
作为原料粉末,准备均具有0.5~2μm的平均粒径的TiCN(以质量比计为TiC/TiN=50/50)粉末、Mo2C粉末、NbC粉末、TaC粉末、WC粉末、Co粉末及Ni粉末,将这些配合成表9所示的规定的配合组成,并利用球磨机湿式混合24小时,干燥之后,在98MPa的压力下冲压成型为压坯,将该压坯在1.3kPa的氮气氛中,在以温度:1540℃保持1小时的条件下进行烧结,烧结之后,对切削刃部分实施R:0.07mm的刃口修磨加工,由此制造出具有ISO标准·CNMG120412的刀片形状的TiCN基金属陶瓷制工具基体F、G、H、I、J、J1、J2、J3、J4、J5(称为工具基体F~J5)。但是,对于工具基体J2,在1.3kPa的氮气氛中,将升温速度设为2℃/min,从室温升温至1540℃并保持30分钟之后,设为13Pa的真空,进一步在1540℃下保持30分钟之后降温而使其表面固化。对于工具基体J3,始终在13Pa的真空中升温及在1540℃下保持60分钟,对于工具基体J4,在1.3kPa的氮气氛中从室温升温至1540℃并保持30分钟之后,设为13Pa的真空,进一步在1540℃下保持5分钟,对于工具基体J5,在1.3kPa的氮气氛中从室温升温至1540℃并保持30钟之后,设为13Pa的真空,进一步在1540℃下保持90分钟之后降温而使表面固化。As raw material powders, TiCN (TiC/TiN=50/50 in mass ratio) powder, Mo 2 C powder, NbC powder, TaC powder, WC powder, Co powder and Ni These powders were compounded into the specified compounding composition shown in Table 9, and were wet-mixed for 24 hours using a ball mill. After drying, they were pressed into compacts under a pressure of 98 MPa, and the compacts were placed in a nitrogen atmosphere of 1.3 kPa. Sintering is carried out at a temperature of 1540°C for 1 hour. After sintering, the cutting edge part is subjected to R: 0.07mm edge grinding, thereby manufacturing a TiCN-based metal with an ISO standard CNMG120412 blade shape. Ceramic tool bases F, G, H, I, J, J1, J2, J3, J4, J5 (referred to as tool bases F to J5). However, for the tool base J2, in a nitrogen atmosphere of 1.3 kPa, the temperature increase rate was set to 2 °C/min, and after the temperature was raised from room temperature to 1540 °C and kept for 30 minutes, it was set to a vacuum of 13 Pa and kept at 1540 °C for 30 minutes. After 10 minutes, the temperature was lowered to solidify the surface. For the tool base J3, the temperature is always raised in a vacuum of 13Pa and kept at 1540°C for 60 minutes. For the tool base J4, after the temperature is raised from room temperature to 1540°C in a nitrogen atmosphere of 1.3kPa and held for 30 minutes, it is set to a vacuum of 13Pa. , and further kept at 1540°C for 5 minutes. For the tool base J5, after raising the temperature from room temperature to 1540°C in a nitrogen atmosphere of 1.3kPa and keeping it for 30 minutes, set it to a vacuum of 13Pa, and then keep it at 1540°C for 90 minutes and then lower the temperature to harden the surface.
[表9][Table 9]
接着,对上述工具基体F~J形成基底层。Next, base layers are formed on the tool bases F to J described above.
另外,当形成基底层时,对于上述工具基体F及G,装入化学蒸镀装置中,使用表2所示的成膜条件,以表10的由Ti化合物构成的皮膜构成预先形成基底层。另一方面,对于上述工具基体H、I,装入作为一种物理蒸镀装置的电弧离子镀装置中,预先形成表10所示的膜厚的由Ti0.5Al0.5N层构成的基底层。In addition, when forming the base layer, the above-mentioned tool bases F and G were installed in a chemical vapor deposition apparatus, and the base layer was formed in advance with the film composition of the Ti compound in Table 10 using the film formation conditions shown in Table 2. On the other hand, the above-mentioned tool bases H and I were installed in an arc ion plating apparatus as a physical vapor deposition apparatus, and an underlayer composed of a Ti 0.5 Al 0.5 N layer having a film thickness shown in Table 10 was formed in advance.
并且,对于上述工具基体J,通过溶胶-凝胶法预先形成表10所示的膜厚的由TiO2层构成的基底层。In addition, for the above-mentioned tool base J, an underlayer composed of a TiO 2 layer having a film thickness shown in Table 10 was formed in advance by a sol-gel method.
另一方面,对于上述工具基体J1~J5,未特别形成基底层。On the other hand, for the above-mentioned tool bases J1 to J5, the base layer was not particularly formed.
接着,对于形成有基底层的上述工具基体F、G、H、I、J、及未形成基底层的上述工具基体J1~J5中的任意一个,均与实施例1同样地使用表3、4的制备条件及干燥条件、烧成条件进行氧化铝主体层的成膜,从而制造出表10、11所示的本发明的包覆工具22~42(称为本发明工具22~42)。Next, Tables 3 and 4 were used in the same manner as in Example 1 for any of the above-mentioned tool bases F, G, H, I, and J on which a base layer was formed, and any of the above-mentioned tool bases J1 to J5 without a base layer. The preparation conditions, drying conditions, and firing conditions were performed to form an alumina main layer to manufacture coated tools 22-42 of the present invention shown in Tables 10 and 11 (referred to as tools 22-42 of the present invention).
对于本发明工具22~42,与实施例1同样地测定并计算出氧化铝层的晶体结构、晶粒的平均纵横尺寸比、晶粒的周长相对于等面积圆的周长之比的平均值、在氧化铝层中Ti在所有金属元素中所占的含有比例(at%)、存在于晶界的Ti氧化物微粒的平均数量(个)、存在于晶界的Ti氧化物微粒的平均粒径(μm)、TiCN基金属陶瓷表面所包含的作为结合相金属的Co及Ni的总计平均含量(at%)。For tools 22 to 42 of the present invention, the crystal structure of the aluminum oxide layer, the average aspect ratio of crystal grains, the average value of the ratio of the circumference of crystal grains to the circumference of a circle of equal area were measured and calculated in the same manner as in Example 1. The content ratio (at%) of Ti in all metal elements in the alumina layer, the average number (pieces) of Ti oxide particles existing in grain boundaries, and the average particle size of Ti oxide particles existing in grain boundaries ( μm), the total average content (at%) of Co and Ni contained in the surface of the TiCN-based cermet as a binder phase metal.
在表11中示出其结果。The results are shown in Table 11.
[表10][Table 10]
[表11][Table 11]
(比较例2)(comparative example 2)
使用与所述实施例2中使用的工具基体相同的工具基体F~J5,与实施例2同样地通过溶胶-凝胶法,使用表3所示的溶胶制备条件、表4所示的干燥/烧成条件进行氧化铝主体层的成膜,直至成为表13所示的规定目标层厚,从而制造出表12、13所示的比较例的包覆工具22~42(称为比较例工具22~42)。Using the same tool bases F to J5 as the tool bases used in Example 2, the sol-gel method was used in the same manner as in Example 2, using the sol preparation conditions shown in Table 3 and the drying/gelling conditions shown in Table 4. The firing conditions were to form the alumina main layer until the predetermined target layer thickness shown in Table 13 was obtained, and the coated tools 22 to 42 of the comparative examples shown in Tables 12 and 13 (referred to as comparative tool 22 ~42).
将氧化铝层的晶体结构、晶粒的平均纵横尺寸比、晶粒的周长相对于等面积圆的周长之比的平均值、在氧化铝层中Ti在所有金属元素中所占的含有比例(at%)、存在于晶界的Ti氧化物微粒的平均数量(个)、存在于晶界的Ti氧化物微粒的平均粒径(μm)、TiCN基金属陶瓷表面所包含的作为结合相金属的Co及Ni的总计平均含量(at%)示于表13。The crystal structure of the aluminum oxide layer, the average aspect ratio of the crystal grains, the average value of the ratio of the circumference of the crystal grains to the circumference of a circle of equal area, and the content ratio of Ti in all metal elements in the aluminum oxide layer (at %), the average number (pieces) of Ti oxide particles present at grain boundaries, the average particle diameter (μm) of Ti oxide particles present at grain boundaries, Co Table 13 shows the total average content (at%) of Ni and Ni.
[表12][Table 12]
[表13][Table 13]
对于上述本发明工具22~42、比较例工具22~42,以以下条件进行干式高速断续切削加工试验。With regard to the tools 22 to 42 of the present invention and the tools 22 to 42 of the comparative examples described above, a dry high-speed interrupted cutting test was performed under the following conditions.
切削条件1:Cutting condition 1:
工件:JIS·SCM435的在长度方向上等间隔地有四条纵槽的圆棒Workpiece: JIS·SCM435 round bar with four longitudinal grooves equally spaced in the length direction
切削速度:280m/minCutting speed: 280m/min
切削深度:1.4mmCutting depth: 1.4mm
进给速度:0.25mm/revFeed speed: 0.25mm/rev
切削时间:5分钟Cutting time: 5 minutes
(通常的切削速度为220m/min)(The usual cutting speed is 220m/min)
切削条件2:Cutting condition 2:
工件:JIS·FCD450的在长度方向上等间隔地有四条纵槽的圆棒、Workpiece: JIS·FCD450 round bar with four longitudinal grooves at equal intervals in the length direction,
切削速度:340m/minCutting speed: 340m/min
切削深度:0.8mmCutting depth: 0.8mm
进给速度:0.4mm/revFeed speed: 0.4mm/rev
切削时间:5分钟Cutting time: 5 minutes
(通常的切削速度为200m/min)、(The usual cutting speed is 200m/min),
将这些结果示于表11、13。These results are shown in Tables 11 and 13.
由表6、11及表8、13所示的结果明确可知:在本发明工具1~42中,在工具基体的表面上通过溶胶-凝胶法包覆形成有氧化铝层,且该氧化铝层具备优异的表面平滑性、耐熔敷性、晶粒彼此的粘附力,因此即使在钢、铸铁等的高速断续切削加工中使用时,也不会发生崩刀、剥离等异常损伤,且在长期使用中发挥优异的耐磨性、切屑排出性。From the results shown in Tables 6 and 11 and Tables 8 and 13, it is clear that in the tools 1 to 42 of the present invention, the surface of the tool substrate is coated with an aluminum oxide layer by the sol-gel method, and the aluminum oxide layer The layer has excellent surface smoothness, welding resistance, and adhesion between crystal grains, so even when used in high-speed interrupted cutting of steel, cast iron, etc., abnormal damage such as chipping and peeling will not occur, In addition, it exhibits excellent wear resistance and chip discharge performance in long-term use.
相对于此,在表面的氧化铝层上未形成复杂形状晶粒的比较例工具1~42中,虽然表面平滑性、耐熔敷性优异,但晶粒彼此的粘附力不充分,无法耐于断续切削的较大冲击,尤其容易发生刃口修磨部附近的微小崩刀,因此容易引起异常损伤,无法维持优异的耐磨性,月牙洼磨损进展,从而在短时间内达到使用寿命,这是显而易见的。On the other hand, in comparative example tools 1 to 42 in which crystal grains of complicated shapes were not formed on the alumina layer on the surface, although the surface smoothness and welding resistance were excellent, the adhesion between the crystal grains was insufficient, and the resistance to welding was not sufficient. Due to the large impact of intermittent cutting, micro chipping near the sharpening part is especially prone to occur, so it is easy to cause abnormal damage, cannot maintain excellent wear resistance, crater wear progresses, and thus reaches the service life in a short time , which is obvious.
另外,在前述实施例中,使用刀片形状的工具对硬质包覆层的性能进行了评价,但用钻头、立铣刀等也当然可以得到相同的结果,这是不言而喻的。In addition, in the foregoing examples, the performance of the hard coating was evaluated using an insert-shaped tool, but it goes without saying that the same results can be obtained with a drill, an end mill, or the like.
产业上的可利用性Industrial availability
根据本发明的表面包覆切削工具,在表面通过溶胶-凝胶法包覆形成有氧化铝层,该氧化铝层具备优异的表面平滑性、耐熔敷性、晶粒彼此的粘附力,因此即使在钢、铸铁等的高速断续切削加工中使用时,也不会发生崩刀、剥离等异常损伤,且在长期使用中发挥优异的切削性能,从而能够实现工具寿命的长寿命化,其实用上的效果非常大。According to the surface-coated cutting tool of the present invention, an aluminum oxide layer is formed on the surface by coating with a sol-gel method, and the aluminum oxide layer has excellent surface smoothness, welding resistance, and adhesion between crystal grains, Therefore, even when used in high-speed interrupted cutting of steel, cast iron, etc., abnormal damage such as chipping and peeling will not occur, and excellent cutting performance will be exhibited in long-term use, thereby achieving a longer tool life. In fact, the practical effect is very large.
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US20210046561A1 (en) * | 2019-04-19 | 2021-02-18 | Sumitomo Electric Hardmetal Corp. | Cutting tool |
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