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CN104792252A - Displacement sensor - Google Patents

Displacement sensor Download PDF

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CN104792252A
CN104792252A CN201510030424.7A CN201510030424A CN104792252A CN 104792252 A CN104792252 A CN 104792252A CN 201510030424 A CN201510030424 A CN 201510030424A CN 104792252 A CN104792252 A CN 104792252A
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coil
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electrode
output
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CN104792252B (en
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中野泰志
井上直也
东城孝一
加藤英雄
久保山丰
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Nabtesco Corp
Shinko Electric Co Ltd
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Nabtesco Corp
Shinko Electric Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/0005Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/007Environmental aspects, e.g. temperature variations, radiation, stray fields
    • G01R33/0082Compensation, e.g. compensating for temperature changes

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Toxicology (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)

Abstract

提供一种位移传感器。包括线圈(6)和电容器(8、10)的并联谐振电路(4)设置于NPN晶体管(12)的输出侧,并联谐振电路4的输出被反馈到晶体管(12)的输入侧,从而构成了持续地振荡的考毕兹振荡电路(2)。晶体管(12)的输出电平根据被测量物相对于线圈(6)的位置的变化而变化。恒流源(26)对线圈(6)持续地提供直流电流。RC低通滤波器(30)根据因流过线圈(6)的直流电流引起的压降来检测线圈(6)的直流电阻值的变化。微处理器(38)基于RC低通滤波器(30)的输出来调整晶体管(12)的输出电平。

A displacement sensor is provided. A parallel resonant circuit (4) including a coil (6) and capacitors (8, 10) is arranged on the output side of the NPN transistor (12), and the output of the parallel resonant circuit 4 is fed back to the input side of the transistor (12), thereby forming a Continuously oscillating Colpitts oscillator circuit (2). The output level of the transistor (12) varies according to the position of the object to be measured relative to the coil (6). The constant current source (26) continuously provides DC current to the coil (6). The RC low-pass filter (30) detects a change in the DC resistance value of the coil (6) based on a voltage drop caused by a DC current flowing through the coil (6). The microprocessor (38) adjusts the output level of the transistor (12) based on the output of the RC low pass filter (30).

Description

位移传感器Motion detector

技术领域technical field

本发明涉及一种利用线圈来检测被测量物的位置变化的位移传感器,特别涉及对基于线圈的电阻值随温度的变化引起的误差进行补偿。The invention relates to a displacement sensor which uses a coil to detect the position change of the object to be measured, in particular to compensating the error caused by the change of the resistance value of the coil with temperature.

背景技术Background technique

作为利用线圈的位移传感器,例如存在涡流式位移传感器。涡流式位移传感器利用以下原理:当作为被测量物的导电体接近流通交流电流的线圈时,涡流流过导电体而产生交流磁场,由此线圈的阻抗发生变化。在该涡流式位移传感器中,线圈的阻抗还根据使用环境的温度变化而变化,因此需要对该温度变化所引起的阻抗变化进行补偿。在日本特开昭60-67819号公报(专利文献1)中公开了该补偿技术的一例。As a displacement sensor using a coil, for example, there is an eddy current type displacement sensor. The eddy current displacement sensor utilizes the following principle: When a conductor as an object to be measured approaches a coil through which an alternating current flows, an eddy current flows through the conductor to generate an alternating magnetic field, thereby changing the impedance of the coil. In this eddy current displacement sensor, the impedance of the coil also changes according to the temperature change of the use environment, so it is necessary to compensate for the impedance change caused by the temperature change. An example of this compensation technique is disclosed in JP-A-60-67819 (Patent Document 1).

在上述位移传感器中,在对线圈提供来自振荡器的交流电流来从线圈产生了交流磁场的状态下,在线圈中感应出大小根据被测量物的位置变化而不同的涡流。基于根据涡流的大小而变化的线圈的输出电压来检测被测量物的位移。在利用了像这样线圈的输出电压随着被测量物的位置的变化而变化这一点的位移传感器中,当线圈的输出电压随着周围温度的变化而变化时,不能正确地检测被测量物的位移,需要进行温度补偿。每经过规定的采样期间,就从直流电流提供单元对线圈提供直流电流来代替交流电流,并利用直流电压检测器来检测因该直流电流而从线圈输出的直流电压。基于检测出的直流电压,由校正单元对向线圈提供的交流电流进行控制,以对线圈的输出电压伴随线圈的基于温度变化的电阻值变化所产生的变化进行校正。In the displacement sensor described above, when an alternating current from the oscillator is supplied to the coil to generate an alternating magnetic field from the coil, eddy currents whose magnitudes vary depending on the position of the object to be measured are induced in the coil. The displacement of the object to be measured is detected based on the output voltage of the coil which changes according to the magnitude of the eddy current. In a displacement sensor that utilizes the fact that the output voltage of the coil changes with the change in the position of the object to be measured, when the output voltage of the coil changes with the change in the ambient temperature, the position of the object to be measured cannot be accurately detected. displacement, temperature compensation is required. A DC current is supplied to the coil from a DC current supply unit instead of an AC current every time a predetermined sampling period passes, and a DC voltage output from the coil due to the DC current is detected by a DC voltage detector. Based on the detected DC voltage, the AC current supplied to the coil is controlled by the correction unit to correct a change in output voltage of the coil due to a change in resistance value of the coil due to temperature change.

在上述位移传感器中,必须对线圈提供来自振荡器的交流电流,因此除了线圈以外还需要设置振荡器,电路结构变得复杂。而且,需要对交流电流与直流电流进行切换的切换开关、切换控制电路,电路结构变得更加复杂,不适合将该位移传感器设置于设置空间小的场所。另外,每经过规定的采样期间就对线圈提供直流电流来进行温度补偿,因此在该温度补偿的期间无法进行位移的检测。例如,在检测内燃机的阀的位移的情况下,需要持续地进行位移的检测,无法使用专利文献1的位移传感器。In the displacement sensor described above, it is necessary to supply the coil with an alternating current from the oscillator, and therefore it is necessary to provide an oscillator in addition to the coil, and the circuit configuration becomes complicated. Moreover, a switching switch and a switching control circuit for switching between alternating current and direct current are required, and the circuit structure becomes more complicated, so it is not suitable to install the displacement sensor in a place with a small installation space. In addition, since temperature compensation is performed by supplying a direct current to the coil every predetermined sampling period, displacement cannot be detected during this temperature compensation period. For example, when detecting the displacement of a valve of an internal combustion engine, it is necessary to continuously detect the displacement, and the displacement sensor of Patent Document 1 cannot be used.

本发明的目的在于提供一种不仅能够简化电路结构、还能够一边进行温度补偿一边持续地检测位移的位移传感器。An object of the present invention is to provide a displacement sensor capable of simplifying the circuit configuration and continuously detecting displacement while performing temperature compensation.

发明内容Contents of the invention

本发明的一个方式的位移传感器具有持续地振荡的自激式振荡单元。该自激式振荡单元具备并联谐振单元和放大单元,该并联谐振单元包括线圈和电容器。上述并联谐振单元设置于放大单元的输出侧,上述并联谐振单元的输出被反馈到放大单元的输入侧。在该自激式振荡单元中,上述放大单元的输出电平根据被测量物相对于线圈的位置的变化而变化。在涡流式位移传感器的情况下,放大单元的输出电平随着被测量物相对于线圈的位置的变化而变化。作为振荡单元的振荡方式,能够使用所谓的LC振荡、例如考毕兹(Colpitts)型振荡、哈特莱(Hartley)型振荡、克拉普(Clapp)型振荡、集电极调谐型反耦合振荡、基极调谐型反耦合振荡以及它们的变形型、其它公知的各种振荡方式。直流提供单元对上述线圈持续地提供直流信号。电阻值检测单元根据因流过上述线圈的上述直流信号引起的压降来检测上述线圈的直流电阻值的变化。上述线圈的直流电阻值随着周围环境的温度变化而变化。控制单元基于上述电阻值检测单元的输出来调整上述放大单元的输出电平。A displacement sensor according to one aspect of the present invention has a self-excited oscillation unit that oscillates continuously. The self-excited oscillation unit includes a parallel resonance unit including a coil and a capacitor, and an amplification unit. The parallel resonant unit is arranged on the output side of the amplifying unit, and the output of the parallel resonant unit is fed back to the input side of the amplifying unit. In this self-excited oscillation unit, the output level of the amplifying unit changes according to a change in the position of the object to be measured with respect to the coil. In the case of an eddy current displacement sensor, the output level of the amplification unit changes as the position of the object to be measured changes relative to the coil. As the oscillation method of the oscillation unit, a so-called LC oscillation, such as a Colpitts type oscillation, a Hartley type oscillation, a Clapp type oscillation, a collector-tuned type anti-coupling oscillation, a fundamental Pole-tuned anti-coupling oscillations and their variants, and various other well-known oscillation modes. The DC supply unit continuously supplies a DC signal to the coil. The resistance value detection unit detects a change in the DC resistance value of the coil based on a voltage drop caused by the DC signal flowing through the coil. The DC resistance value of the above-mentioned coil changes with the temperature of the surrounding environment. The control unit adjusts the output level of the amplifying unit based on the output of the resistance value detecting unit.

在如上所述那样构成的位移传感器中,使用了自激式的振荡单元,因此能够简化电路结构。并且,使用持续地振荡的自激式振荡单元,并且持续地对自激式振荡单元的线圈提供直流信号,因此不需要为了检测电阻值而使自激式振荡单元的振荡停止,能够持续地检测位移。In the displacement sensor configured as described above, since a self-excited oscillation unit is used, the circuit configuration can be simplified. In addition, a self-excited oscillation unit that continuously oscillates is used, and a DC signal is continuously supplied to the coil of the self-excited oscillation unit. Therefore, it is not necessary to stop the oscillation of the self-excited oscillation unit in order to detect the resistance value, and it is possible to continuously detect displacement.

能够将上述直流提供单元设为对上述线圈提供恒流的恒流源。在该情况下,上述电阻值检测单元是检测上述线圈中产生的直流电压的滤波单元。The direct current supply unit can be used as a constant current source that supplies a constant current to the coil. In this case, the resistance value detection unit is a filter unit that detects a DC voltage generated in the coil.

当构成为这种结构时,只有直流成分被滤波单元所检测,能够不受交流成分的影响而检测电阻值。With such a configuration, only the DC component is detected by the filter unit, and the resistance value can be detected without being affected by the AC component.

在上述方式中,能够使上述放大单元具有有源元件,该有源元件具有第一电极至第三电极,按照第一电极与第二电极之间的信号来改变第一电极与第三电极之间的导电状态。在该情况下,由上述控制单元对设置于第一电极与第二电极之间的电流调整单元进行控制。作为有源元件,例如能够使用双极型晶体管(bipolar transistor)或场效应晶体管。In the above mode, the amplifying unit can be provided with an active element having first to third electrodes, and the distance between the first electrode and the third electrode is changed according to a signal between the first electrode and the second electrode. conduction state between them. In this case, the current adjustment unit provided between the first electrode and the second electrode is controlled by the control unit. As active elements, for example, bipolar transistors or field effect transistors can be used.

当构成为这种结构时,能够通过对流过有源元件的第一电极与第三电极之间的电流进行控制来调整振荡单元的增益,其结果,能够进行线圈的温度补偿,而且自激式振荡单元保持稳定的振荡状态。When configured in this way, the gain of the oscillation unit can be adjusted by controlling the current flowing between the first electrode and the third electrode of the active element. As a result, the temperature compensation of the coil can be performed, and the self-excited The oscillation unit maintains a stable oscillation state.

附图说明Description of drawings

图1是本发明的一个实施方式的位移传感器的电路图。FIG. 1 is a circuit diagram of a displacement sensor according to one embodiment of the present invention.

图2是表示图1的位移传感器中的被测量物与线圈的关系的图。FIG. 2 is a diagram showing a relationship between an object to be measured and a coil in the displacement sensor of FIG. 1 .

图3是表示图1的位移传感器的线圈的电阻值的变化的图。FIG. 3 is a graph showing changes in resistance values of coils of the displacement sensor shown in FIG. 1 .

具体实施方式Detailed ways

本发明的一个实施方式的位移传感器例如是涡流式位移传感器,如图1所示那样具有自激式振荡单元、例如考毕兹振荡电路2。考毕兹振荡电路2具有并联谐振单元、例如并联谐振电路4。该并联谐振电路4是将两个电容器8、10的串联电路与线圈6并联连接而成的。对于该并联谐振电路4,以使该并联谐振电路4以规定的频率并联谐振的方式选择线圈6、电容器8、10的值。并且,考毕兹振荡电路2还具有有源元件、例如双极型晶体管、具体为NPN晶体管12。NPN晶体管12具有:第一电极、例如基极;第二电极、例如发射极;以及第三电极、例如集电极。由未图示的偏置(bias)电路对该NPN晶体管12提供适当的偏压。并且,NPN晶体管12通过未图示的电容器而与基准电位、例如接地电位连接,以例如作为基极接地电路进行动作。The displacement sensor according to one embodiment of the present invention is, for example, an eddy current type displacement sensor, and has a self-excited oscillation unit such as a Colpitts oscillation circuit 2 as shown in FIG. 1 . The Colpitts oscillator circuit 2 has a parallel resonant unit, for example, a parallel resonant circuit 4 . This parallel resonant circuit 4 is formed by connecting a series circuit of two capacitors 8 and 10 to the coil 6 in parallel. For the parallel resonance circuit 4 , the values of the coil 6 and the capacitors 8 and 10 are selected so that the parallel resonance circuit 4 resonates in parallel at a predetermined frequency. Furthermore, the Colpitts oscillating circuit 2 further has an active element such as a bipolar transistor, specifically an NPN transistor 12 . The NPN transistor 12 has: a first electrode such as a base; a second electrode such as an emitter; and a third electrode such as a collector. An appropriate bias voltage is given to the NPN transistor 12 by a bias circuit (not shown). Furthermore, the NPN transistor 12 is connected to a reference potential, for example, a ground potential via a capacitor not shown, and operates, for example, as a base ground circuit.

并联谐振电路4的一端与接地电位连接,并联谐振电路4的另一端经由直流阻断电容器14而与NPN晶体管12的集电极连接。晶体管12的发射极被连接于电容器8与电容器10的相互连接点。因而,通过未图示的电容器以高频方式连接的基极-集电极之间产生的输出的一部分被反馈到发射极侧。集电极经由包括阻抗元件的负载16而与电源端子、例如正的电源端子18连接,集电极还与输出端子20连接。另外,发射极经由形成上述偏置电路的一部分的电流调整单元、例如可变电流源22而与接地电位连接。One end of the parallel resonance circuit 4 is connected to the ground potential, and the other end of the parallel resonance circuit 4 is connected to the collector of the NPN transistor 12 via the DC blocking capacitor 14 . The emitter of transistor 12 is connected to the mutual connection point of capacitor 8 and capacitor 10 . Therefore, a part of the output generated between the base and the collector, which is connected at high frequency through a capacitor not shown in the figure, is fed back to the emitter side. The collector is connected to a power supply terminal, for example, a positive power supply terminal 18 via a load 16 including an impedance element, and the collector is also connected to an output terminal 20 . In addition, the emitter is connected to the ground potential via a current adjustment unit, for example, a variable current source 22 forming part of the bias circuit.

该考毕兹振荡电路2以由并联谐振电路4的并联谐振频率决定的振荡频率持续地振荡,其振荡输出从输出端子20被取出。如图2所示,当被测量物、例如船舶的发动机的阀24相对于线圈6的位置发生变化、例如接近时,如与以往技术相关联地说明的那样,线圈6的阻抗发生变化,从而输出端子20处产生的振荡输出的电平发生变化。由未图示的检测单元来检测该电平的变化,从而检测阀24的位移。The Colpitts oscillation circuit 2 continuously oscillates at an oscillation frequency determined by the parallel resonance frequency of the parallel resonance circuit 4 , and the oscillation output thereof is taken out from an output terminal 20 . As shown in FIG. 2, when the position of the object to be measured, such as the valve 24 of the engine of the ship, changes relative to the coil 6, for example, when it approaches, as described in connection with the prior art, the impedance of the coil 6 changes, thereby The level of the oscillation output generated at the output terminal 20 changes. This level change is detected by a detection unit not shown, thereby detecting the displacement of the valve 24 .

如图3所示,线圈6的电阻值、阀24的固有电阻值随着周围环境的温度变化而变化,因此若对此置之不理,则来自输出端子20的振荡输出的电平会发生变化,不能正确地检测阀24的位移。特别是在周围温度从摄氏零度以下变化到100度以上的温度的环境下,该振荡输出的电平大幅变化。因此,在该实施方式中,直流提供单元、例如恒流源26与线圈6的一端连接。该恒流源26的一端与正的电源端子连接,该恒流源26的另一端与线圈6的一端连接。来自该恒流源26的直流信号、例如直流电流经由线圈6持续地流向接地电位。以阻止该直流电流流向NPN晶体管12的集电极等为目的而设置了直流阻断电容器14。As shown in FIG. 3 , the resistance value of the coil 6 and the intrinsic resistance value of the valve 24 change with the temperature of the surrounding environment. Therefore, if this is ignored, the level of the oscillation output from the output terminal 20 will change and cannot The displacement of the valve 24 is correctly detected. In particular, in an environment where the ambient temperature changes from below zero degrees Celsius to a temperature above 100 degrees Celsius, the level of the oscillation output greatly changes. Therefore, in this embodiment, a direct current supply unit, for example, a constant current source 26 is connected to one end of the coil 6 . One end of the constant current source 26 is connected to a positive power supply terminal, and the other end of the constant current source 26 is connected to one end of the coil 6 . A DC signal, for example, a DC current from the constant current source 26 continuously flows to the ground potential via the coil 6 . The DC blocking capacitor 14 is provided for the purpose of preventing the DC current from flowing to the collector of the NPN transistor 12 or the like.

当存在周围环境的温度变化时,线圈6的电阻值发生变化,因来自恒流源26的直流电流而在线圈6的两端之间产生的直流电压的值发生变化。为了检测该直流电压,在线圈6的两端之间连接有电阻值检测单元、例如低通滤波器30。低通滤波器30例如是包括电阻器32和电容器34的RC低通滤波器。使用低通滤波器30是为了阻止检测出考毕兹振荡电路2的振荡信号。该低通滤波器30的输出信号例如被直流放大器36放大后被提供到控制单元、例如微处理器38。在微处理器38中,使直流放大器36的输出信号数字化,对该数字输出信号进行校正使其与温度呈线性关系。将该校正后的数字输出信号与预先决定的基准值进行比较,例如与作为基准的温度下的校正值进行比较,来生成控制信号。该控制信号被提供到设置于NPN晶体管12的发射极的可变电流源22,来控制从NPN晶体管12的发射极引出的电流,进而控制被集电极吸入的电流。由此,能够在使输出端子20处产生的振荡输出的电平不受周围温度的影响而保持线性的状态下进行位移测量。例如,当对NPN晶体管12提供使振荡输出的电平变为1.2倍的电流时,在阀24的想要测量的整个行程中振荡输出的电平也几乎为1.2倍,保持线性关系。When there is a temperature change in the surrounding environment, the resistance value of the coil 6 changes, and the value of the DC voltage generated between both ends of the coil 6 due to the DC current from the constant current source 26 changes. In order to detect this DC voltage, a resistance value detection unit such as a low-pass filter 30 is connected between both ends of the coil 6 . The low-pass filter 30 is, for example, an RC low-pass filter including a resistor 32 and a capacitor 34 . The low-pass filter 30 is used to prevent the detection of the oscillation signal of the Colpitts oscillation circuit 2 . The output signal of the low-pass filter 30 is amplified by a DC amplifier 36 and then provided to a control unit such as a microprocessor 38 . In the microprocessor 38, the output signal of the DC amplifier 36 is digitized, and the digital output signal is corrected so as to have a linear relationship with temperature. The corrected digital output signal is compared with a predetermined reference value, for example, a correction value at a reference temperature to generate a control signal. The control signal is provided to the variable current source 22 provided at the emitter of the NPN transistor 12 to control the current drawn from the emitter of the NPN transistor 12 and further control the current drawn into the collector. Thereby, displacement measurement can be performed in a state where the level of the oscillation output generated at the output terminal 20 is kept linear without being affected by the ambient temperature. For example, when a current that doubles the level of the oscillation output is supplied to the NPN transistor 12, the level of the oscillation output is also approximately 1.2 times over the entire stroke of the valve 24 to be measured, maintaining a linear relationship.

例如在周围环境的温度高于基准温度而线圈6的电阻值变大的情况下,振荡输出电平变小,因此通过使可变电流源22的电流变大来增大振荡能,由此使振荡输出电平变大。反之,在周围环境的温度低于基准温度而线圈的电阻值变小从而振荡输出变大时,使可变电流源22的电流变小来使振荡输出电平变小。而且,可变电流源22的电流值与振荡输出电平之间存在线性关系,微处理器对可变电流源22的控制变得容易。For example, when the temperature of the surrounding environment is higher than the reference temperature and the resistance value of the coil 6 becomes large, the oscillation output level becomes small, so the oscillation energy is increased by increasing the current of the variable current source 22, thereby making The oscillation output level becomes larger. Conversely, when the temperature of the surrounding environment is lower than the reference temperature and the resistance value of the coil decreases to increase the oscillation output, the current of the variable current source 22 is decreased to decrease the oscillation output level. Moreover, there is a linear relationship between the current value of the variable current source 22 and the oscillation output level, and the control of the variable current source 22 by the microprocessor becomes easy.

通过这样,即使存在周围环境的温度变化,也能够对位移传感器的输出电平进行温度补偿。而且,该温度补偿不是每隔规定的时间进行,而是持续地进行,因此能够精密地进行温度补偿,且不需要为了进行温度补偿而使振荡电路2的振荡停止。因而,能够持续地检测位移,从而能够精密地检测位移。例如,能够一边使用热敏电阻等来进行温度补偿一边持续地检测位移,但是,在该情况下,部件件数增加,位移传感器的结构变得复杂,除此以外,位移传感器的故障率与部件件数的增加相应地增加,因此热敏电阻等的使用并不理想。另外,对于温度所引起的振荡电平的变化,也能够不是通过增减振荡器的振荡电平来进行校正,而是通过以下方式进行校正:将振荡器的输出输入到乘法电路中来作为乘法运算的一项,将另一项设为基于温度的系数。但是,不仅电路变得复杂,成本也上升。与此相对,在本位移传感器中,通过控制可变电流源22来改变发射极电流进而改变集电极电流,因此能够在使振荡状态稳定的状态下改变振荡信号的输出电平,因此电路结构简单,在成本方面也有利。In this way, even if there is a temperature change in the surrounding environment, it is possible to perform temperature compensation on the output level of the displacement sensor. Furthermore, since this temperature compensation is not performed every predetermined time, but is continuously performed, precise temperature compensation can be performed, and there is no need to stop the oscillation of the oscillation circuit 2 for temperature compensation. Therefore, the displacement can be detected continuously, and the displacement can be detected precisely. For example, it is possible to continuously detect displacement while performing temperature compensation using a thermistor or the like. However, in this case, the number of parts increases and the structure of the displacement sensor becomes complicated. In addition, the failure rate of the displacement sensor and the number of parts The increase of the corresponding increase, so the use of thermistor etc. is not ideal. In addition, the change in the oscillation level due to temperature can also be corrected not by increasing or decreasing the oscillation level of the oscillator, but by inputting the output of the oscillator to a multiplication circuit as a multiplication One term of the operation, set the other term as a temperature-based coefficient. However, not only does the circuit become complicated, but the cost also increases. In contrast, in this displacement sensor, the emitter current is changed by controlling the variable current source 22 to change the collector current, so the output level of the oscillation signal can be changed while the oscillation state is stabilized, so the circuit structure is simple , is also advantageous in terms of cost.

在上述实施方式中对涡流式位移传感器实施了本发明,但是也能够对其它类型、例如差动变压式位移传感器实施本发明。在上述实施方式中检测了阀24的位移,但是不限于此,能够将本发明的位移传感器使用于检测其它被测量物的位移。另外,在上述实施方式中使用了考毕兹振荡电路2,但是不限于此,也能够使用公知的自激式振荡电路、例如克拉普振荡电路、哈特莱振荡电路等。另外,在上述实施方式中使用了NPN晶体管12,但是也能够使用PNP晶体管,还能够使用FET。另外,使NPN晶体管12以基极接地方式进行动作,但是也能够使其以发射极接地方式进行动作。在上述实施方式中使用了RC低通滤波器30,但是也能够使用利用了运算放大器、电阻器以及电容器的有源低通滤波器,还能够使用LC低通滤波器。在上述实施方式中将可变电流源22用作电流调整单元,但是也能够将如下那样构成的结构用作电流调整单元:将电阻器的一端与NPN晶体管的发射极连接,将电阻器的另一端经由可变电压源接地。或者也能够通过如下方式来构成电流调整单元:将NPN晶体管12的发射极经由发射极电阻器接地,通过改变基极电压来调整电流。在上述实施方式中使用微处理器38使直流放大器36的输出数字化来控制可变电流源22,但是也能够构成为:将直流放大器36的输出按原样提供到以模拟方式构成的线性校正电路,将该线性校正电路的输出提供到以模拟形式构成的比较器,将该比较器的输出提供到可变电流源22。In the above-described embodiments, the present invention is implemented for the eddy current type displacement sensor, but it is also possible to implement the present invention for other types, such as a differential transformer type displacement sensor. In the above embodiment, the displacement of the valve 24 is detected, but the invention is not limited thereto, and the displacement sensor of the present invention can be used to detect the displacement of other objects to be measured. In addition, although the Colpitts oscillation circuit 2 was used in the above-mentioned embodiment, it is not limited thereto, and a known self-excited oscillation circuit such as a Clapp oscillation circuit or a Hartley oscillation circuit can also be used. In addition, although the NPN transistor 12 was used in the above-mentioned embodiment, it is also possible to use a PNP transistor, or to use an FET. In addition, the NPN transistor 12 is operated with the base grounded, but it can also be operated with the emitter grounded. In the above embodiment, the RC low-pass filter 30 is used, but an active low-pass filter using an operational amplifier, a resistor, and a capacitor can also be used, and an LC low-pass filter can also be used. In the above embodiment, the variable current source 22 is used as the current adjusting means, but it is also possible to use, as the current adjusting means, a configuration in which one end of the resistor is connected to the emitter of the NPN transistor, and the other end of the resistor is connected to the emitter of the NPN transistor. One end is grounded via a variable voltage source. Alternatively, the current adjustment unit can be configured by grounding the emitter of the NPN transistor 12 via an emitter resistor, and adjusting the current by changing the base voltage. In the above embodiment, the microprocessor 38 is used to digitize the output of the DC amplifier 36 to control the variable current source 22, but it is also possible to provide the output of the DC amplifier 36 as it is to the linearity correction circuit configured in analog, The output of this linearity correction circuit is supplied to a comparator configured in an analog form, and the output of this comparator is supplied to a variable current source 22 .

Claims (3)

1. a displacement transducer, possesses:
The auto-excitation type oscillating unit vibrated constantly, it comprises parallel resonance unit and amplifying unit, this parallel resonance unit comprises coil and capacitor, this parallel resonance unit is arranged at the outgoing side of this amplifying unit, the output of above-mentioned parallel resonance unit is fed back to the input side of this amplifying unit, and the output level of above-mentioned amplifying unit changes relative to the change of the position of above-mentioned coil according to measured object;
Direct current providing unit, it provides direct current signal constantly to above-mentioned coil;
Resistance value detecting unit, it detects the change of the DC resistance of above-mentioned coil according to the pressure drop that the above-mentioned direct current signal because flowing through above-mentioned coil causes; And
Control module, its output based on above-mentioned resistance value detecting unit adjusts the output level of above-mentioned amplifying unit.
2. displacement transducer according to claim 1, is characterized in that,
Above-mentioned direct current providing unit is the constant current source above-mentioned coil being provided to constant current, and above-mentioned resistance value detecting unit is the filter unit detecting the DC voltage produced in above-mentioned coil.
3. displacement transducer according to claim 1 and 2, is characterized in that,
Above-mentioned amplifying unit has active component, and this active component has the first electrode to the 3rd electrode, changes the conduction state between the first electrode and the 3rd electrode according to the signal between the first electrode and the second electrode,
By above-mentioned control module, the current-variable unit be arranged between the first electrode and the second electrode is controlled.
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