CN104789964B - A kind of preparation method of high temperature insulation coating on the surface of superalloy - Google Patents
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- 238000000576 coating method Methods 0.000 title claims abstract description 64
- 239000011248 coating agent Substances 0.000 title claims abstract description 59
- 229910000601 superalloy Inorganic materials 0.000 title claims abstract description 30
- 238000009413 insulation Methods 0.000 title claims abstract description 9
- 238000002360 preparation method Methods 0.000 title claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 54
- 239000002184 metal Substances 0.000 claims abstract description 54
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 21
- 239000000956 alloy Substances 0.000 claims abstract description 10
- 239000013078 crystal Substances 0.000 claims abstract description 10
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 9
- 239000011810 insulating material Substances 0.000 claims abstract description 4
- 239000010936 titanium Substances 0.000 claims description 22
- 238000005516 engineering process Methods 0.000 claims description 16
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 15
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 13
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 10
- 238000007745 plasma electrolytic oxidation reaction Methods 0.000 claims description 9
- 230000003647 oxidation Effects 0.000 claims description 8
- 238000007254 oxidation reaction Methods 0.000 claims description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 5
- 239000008367 deionised water Substances 0.000 claims description 5
- 229910021641 deionized water Inorganic materials 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000007747 plating Methods 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 2
- 238000000151 deposition Methods 0.000 abstract description 3
- 238000007789 sealing Methods 0.000 abstract description 2
- 238000011282 treatment Methods 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- 239000002131 composite material Substances 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 6
- 238000004528 spin coating Methods 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 3
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- 239000003566 sealing material Substances 0.000 description 3
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 238000007750 plasma spraying Methods 0.000 description 2
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- 230000009286 beneficial effect Effects 0.000 description 1
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- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
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- 238000005240 physical vapour deposition Methods 0.000 description 1
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Abstract
本发明公开一种高温合金表面高温绝缘涂层的制备方法，步骤：1)将高温合金基片表面预处理；2)在高温合金基片表面沉积一层Ti金属层；3)在Ti金属层上继续沉积一层Al金属层；4)将高温合金基片表面的Al金属层完全氧化，直至氧化部分Ti金属层；5)选用高温绝缘材料对氧化后的涂层表面进行多次封孔处理，将涂层中的孔洞填充；6)在表面涂层上溅射Al2O3，将表面涂层中剩余的缝隙填充；7)将高温合金基片热处理，使涂层中Al2O3的晶型向α—Al2O3转化。本发明能以更高的效率制备一种在高温下仍具有较好绝缘性的涂层，结合牢固，且制备工艺更为灵活。
The invention discloses a method for preparing a high-temperature insulating coating on the surface of a high-temperature alloy. The steps are: 1) pretreating the surface of a high-temperature alloy substrate; 2) depositing a Ti metal layer on the surface of a high-temperature alloy substrate; 3) depositing a layer of Ti metal on the Ti metal layer Continue to deposit a layer of Al metal layer; 4) Completely oxidize the Al metal layer on the surface of the superalloy substrate until the oxidized part of the Ti metal layer; 5) Use high-temperature insulating materials to perform multiple sealing treatments on the oxidized coating surface , to fill the holes in the coating; 6) Sputter Al 2 O 3 on the surface coating to fill the remaining gaps in the surface coating; 7) Heat-treat the superalloy substrate to make the Al 2 O 3 in the coating The crystal form of α-Al 2 O 3 transforms. The invention can prepare a coating that still has good insulation at high temperature with higher efficiency, has firm combination, and has more flexible preparation process.
Description
技术领域technical field
本发明涉及表面处理技术领域，特别涉及一种在高温下仍具有良好绝缘性涂层产品的制备方法。The invention relates to the technical field of surface treatment, in particular to a method for preparing a coating product with good insulation properties even at high temperatures.
背景技术Background technique
高温合金，通常指在760℃—1500℃以上及一定应力条件下长期工作的高温金属材料，具有优异的高温强度和良好的抗氧化、抗腐蚀能力，按基体元素主要分为铁基高温合金、镍基高温合金、钴基高温合金三大类。近些年来，随着高温合金在航空航天领域中的不断拓展应用，尤其是镍基高温合金在军民用燃气涡轮机发动机热端部件方面的应用，高温合金的表面处理技术也越来越得到人们的重视，包括表面绝缘性、耐蚀性、耐磨性、隔热性等都是表面处理的技术要求，而在这些要求中，高温下良好的绝缘性又是非常重要的性能之一。Superalloys usually refer to high-temperature metal materials that work for a long time at 760°C-1500°C and under certain stress conditions. They have excellent high-temperature strength and good oxidation and corrosion resistance. According to the matrix elements, they are mainly divided into iron-based superalloys, Nickel-based superalloys, cobalt-based superalloys three categories. In recent years, with the continuous expansion of the application of superalloys in the aerospace field, especially the application of nickel-based superalloys in the hot end parts of military and civilian gas turbine engines, the surface treatment technology of superalloys has also gained more and more attention. Pay attention, including surface insulation, corrosion resistance, wear resistance, heat insulation, etc. are all technical requirements for surface treatment, and among these requirements, good insulation at high temperature is one of the very important properties.
氧化铝涂层由于具有耐高温、耐腐蚀、耐磨、绝缘强度高等优点，常被用作金属表面的绝缘层，这其中α-Al2O3又是常温和高温下最稳定的晶型。目前有很多方法都可用于制备该涂层，常用的氧化铝电绝缘涂层加工方法有化学气相沉积、物理气相沉积、溶胶—凝胶法、热氧化法、等离子喷涂等。Alumina coating is often used as an insulating layer on metal surfaces due to its high temperature resistance, corrosion resistance, wear resistance, and high dielectric strength. Among them, α-Al 2 O 3 is the most stable crystal form at room temperature and high temperature. At present, there are many methods that can be used to prepare the coating. Commonly used alumina electrical insulation coating processing methods include chemical vapor deposition, physical vapor deposition, sol-gel method, thermal oxidation method, plasma spraying and so on.
然而，传统的气相沉积方法制备氧化铝涂层沉积速率慢，且更适宜制备薄膜；溶胶—凝胶法和热氧化法制备较厚的氧化铝涂层耗时时间长，效率低，不适合大批量生产；等离子喷涂虽然可以高速率地制备较厚的氧化铝涂层，但是制备出的氧化铝涂层与基体结合力较差，且表面粗糙、孔洞多。However, the traditional vapor deposition method has a slow deposition rate and is more suitable for the preparation of thin films; the sol-gel method and thermal oxidation method take a long time to prepare thicker alumina coatings, have low efficiency, and are not suitable for large-scale Mass production; although plasma spraying can prepare thicker alumina coatings at a high rate, the prepared alumina coatings have poor adhesion to the substrate, and the surface is rough and has many holes.
针对上述传统工艺中制备氧化铝涂层的缺点，本发明提出了一种高效制备高温绝缘复合氧化铝涂层的方法。Aiming at the shortcomings of preparing alumina coatings in the above-mentioned traditional process, the present invention proposes a method for efficiently preparing high-temperature insulating composite alumina coatings.
发明内容Contents of the invention
针对现有技术的不足，本发明提供一种高温合金表面高温绝缘涂层的制备方法，且该涂层各项性能优良。Aiming at the deficiencies of the prior art, the invention provides a method for preparing a high-temperature insulating coating on the surface of a high-temperature alloy, and the coating has excellent properties.
为实现上述目的，本发明采用以下技术方案实现：To achieve the above object, the present invention adopts the following technical solutions:
一种高温合金表面高温绝缘涂层的制备方法，按以下步骤完成：A method for preparing a high-temperature insulating coating on the surface of a high-temperature alloy is completed according to the following steps:
1)将高温合金基片表面打磨平整，并依次用丙酮、酒精、去离子水超声清洗干净，烘干；1) Polish the surface of the superalloy substrate to make it smooth, and then use acetone, alcohol, and deionized water to clean it ultrasonically, and then dry it;
2)采用磁控溅射技术在经过步骤1)处理的高温合金基片表面沉积一层Ti金属层，所得到的Ti金属层厚度为1μm以上；2) using magnetron sputtering technology to deposit a layer of Ti metal layer on the surface of the superalloy substrate treated in step 1), and the thickness of the obtained Ti metal layer is more than 1 μm;
3)在Ti金属层上继续沉积一层Al金属层，所得到的Al金属层厚度为1μm以上；3) continue to deposit a layer of Al metal layer on the Ti metal layer, and the thickness of the obtained Al metal layer is more than 1 μm;
4)将高温合金基片表面Al金属层完全氧化，直至氧化部分Ti金属层；4) fully oxidizing the Al metal layer on the surface of the superalloy substrate until the Ti metal layer is partially oxidized;
5)选用高温绝缘材料对氧化后的涂层表面进行多次封孔处理，将涂层中的孔洞填充，提高绝缘性；5) Use high-temperature insulating materials to seal the surface of the oxidized coating multiple times to fill the holes in the coating to improve insulation;
6)采用磁控溅射技术在表面涂层上溅射Al2O3，将表面涂层中剩余的缝隙填充；6) Using magnetron sputtering technology to sputter Al 2 O 3 on the surface coating to fill the remaining gaps in the surface coating;
7)将步骤6)中制备好的高温合金基片放入马弗炉，在1200℃热处理，使涂层中Al2O3的晶型向α—Al2O3转化。7) Put the high-temperature alloy substrate prepared in step 6) into a muffle furnace, and heat-treat at 1200° C. to convert the crystal form of Al 2 O 3 in the coating to α-Al 2 O 3 .
优选地，在执行所述步骤2)时，Ti金属层厚度优选为1～100μm。Preferably, when performing the step 2), the thickness of the Ti metal layer is preferably 1-100 μm.
优选地，在执行所述步骤3)时，Al金属层厚度优选为1～100μm。Preferably, when performing the step 3), the thickness of the Al metal layer is preferably 1-100 μm.
优选地，在执行所述步骤3)时，采用磁控溅射或者热浸镀的方法沉积一层Al金属层。Preferably, when step 3) is performed, a metal layer of Al is deposited by magnetron sputtering or hot-dip plating.
优选地，在执行所述步骤4)时，采用微弧氧化或者阳极氧化的方法对表面的Al金属层进行完全氧化。Preferably, when step 4) is performed, the Al metal layer on the surface is completely oxidized by micro-arc oxidation or anodic oxidation.
优选地，在执行所述步骤5)时，选用SiO2溶胶或者Al2O3溶胶作为填充材料。Preferably, when performing the step 5), SiO 2 sol or Al 2 O 3 sol is selected as the filling material.
本发明中所用的高温合金基片材料为镍基高温合金材料，用来进行封孔的高温绝缘材料选用Al2O3或者SiO2。制备的高温绝缘涂层厚度为2—200μm，涂层主要由氧化铝组成，且氧化铝的晶型基本上都为α—Al2O3，不含有或仅含有少量γ—Al2O3，涂层中的孔洞主要由SiO2溶胶或Al2O3溶胶填充。特别地，本发明制备的高温绝缘涂层为一种复合涂层，主要由氧化铝层和下面的氧化钛层组成，涂层中的孔洞和缝隙由Al2O3或者SiO2来填充。The high-temperature alloy substrate material used in the present invention is a nickel-based high-temperature alloy material, and the high-temperature insulating material used for sealing holes is selected from Al 2 O 3 or SiO 2 . The thickness of the prepared high-temperature insulating coating is 2-200 μm. The coating is mainly composed of alumina, and the crystal form of alumina is basically α-Al 2 O 3 , containing no or only a small amount of γ-Al 2 O 3 , The pores in the coating are mainly filled by SiO 2 sol or Al 2 O 3 sol. In particular, the high-temperature insulating coating prepared in the present invention is a composite coating mainly composed of an aluminum oxide layer and a titanium oxide layer below, and holes and gaps in the coating are filled with Al 2 O 3 or SiO 2 .
与现有的技术相比，本发明的有益效果是：Compared with prior art, the beneficial effect of the present invention is:
本发明可高效地在高温合金表面制备一种高温绝缘复合氧化铝涂层，该涂层与基底结合牢固，涂层的厚度易于控制，制备过程灵活性强，并且涂层在高温下具有良好的绝缘性能。The invention can efficiently prepare a high-temperature insulating composite alumina coating on the surface of a high-temperature alloy. The coating is firmly bonded to the substrate, the thickness of the coating is easy to control, the preparation process is flexible, and the coating has good performance at high temperatures. insulation properties.
附图说明Description of drawings
通过阅读参照以下附图对非限制性实施例所作的详细描述，本发明的其它特征、目的和优点将会变得更明显：Other characteristics, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:
图1为本发明制备方法的一个具体实施方式的流程示意图。Fig. 1 is a schematic flow diagram of a specific embodiment of the preparation method of the present invention.
具体实施方式detailed description
下面结合具体实施例对本发明进行详细说明。以下实施例将有助于本领域的技术人员进一步理解本发明，但不以任何形式限制本发明。应当指出的是，对本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进。这些都属于本发明的保护范围。The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
如图1，为本发明具体实施方式的流程示意图。以下实施例参照该流程进行。Fig. 1 is a schematic flow chart of a specific embodiment of the present invention. The following examples are carried out with reference to this process.
实施例1：Example 1:
本实施例中，采用磁控溅射的方法沉积Al金属层，采用微弧氧化的方法将高温合金表面的Al金属层氧化完全，选用SiO2溶胶作为封孔材料。In this embodiment, the Al metal layer is deposited by magnetron sputtering, the Al metal layer on the surface of the superalloy is completely oxidized by the micro-arc oxidation method, and SiO2 sol is selected as the sealing material.
1)将镍基高温合金基片表面打磨平整，并依次用丙酮、酒精、去离子水超声清洗干净，并烘干；1) Polish the surface of the nickel-based superalloy substrate to make it smooth, and then use acetone, alcohol, and deionized water to clean it ultrasonically, and dry it;
2)采用磁控溅射技术在经过预处理的高温合金基片表面溅射Ti金属层，所得到的Ti金属层厚度为5μm；2) Using magnetron sputtering technology to sputter a Ti metal layer on the surface of the pretreated superalloy substrate, the thickness of the obtained Ti metal layer is 5 μm;
3)采用磁控溅射技术在Ti金属层上溅射Al金属层，所得到的Al金属层厚度为14μm；3) Using magnetron sputtering technology to sputter an Al metal layer on the Ti metal layer, the thickness of the obtained Al metal layer is 14 μm;
4)采用微弧氧化技术将Al金属层完全微弧氧化，直至微弧氧化Ti金属层3μm，得到大部分晶型为α—Al2O3的表面涂层；4) Using micro-arc oxidation technology to completely micro-arc oxidize the Al metal layer until the micro-arc oxidation of the Ti metal layer is 3 μm, and obtain a surface coating with most of the crystal form being α-Al 2 O 3 ;
5)选用SiO2溶胶对涂层表面进行封孔处理：共旋涂三次SiO2溶胶材料，每次旋涂过后在400℃保温30min进行固化，使SiO2溶胶中的有机溶剂挥发只剩下SiO2，最终将微弧氧化后表面涂层中的孔洞填充；5) Use SiO 2 sol to seal the surface of the coating: Spin the SiO 2 sol material three times, and cure it at 400°C for 30 minutes after each spin coating, so that the organic solvent in the SiO 2 sol volatilizes and only SiO is left. 2. Finally, the holes in the surface coating after micro-arc oxidation are filled;
6)采用磁控溅射技术在表面涂层上溅射Al2O3，溅射Al2O3的厚度为2μm，将表面涂层中剩余的缝隙填充；6) Using magnetron sputtering technology to sputter Al 2 O 3 on the surface coating, the thickness of the sputtered Al 2 O 3 is 2 μm, and fill the remaining gaps in the surface coating;
7)将制备好复合氧化铝涂层的高温合金基片放入马弗炉，在1200℃保温2h，使涂层中Al2O3的晶型向α—Al2O3转化。7) Put the superalloy substrate prepared with composite alumina coating into a muffle furnace, and keep it at 1200°C for 2 hours to convert the crystal form of Al 2 O 3 in the coating to α-Al 2 O 3 .
实施例2Example 2
本实施例中，前面的步骤同实施例1，不同的是这里选用Al2O3溶胶作为封孔材料。In this embodiment, the previous steps are the same as in Embodiment 1, except that Al 2 O 3 sol is selected as the sealing material here.
1)将镍基高温合金基片表面打磨平整，并依次用丙酮、酒精、去离子水超声清洗干净，并烘干；1) Polish the surface of the nickel-based superalloy substrate to make it smooth, and then use acetone, alcohol, and deionized water to clean it ultrasonically, and dry it;
2)采用磁控溅射技术在经过预处理的高温合金基片表面溅射Ti金属层，所得到的Ti金属层厚度为5μm；2) Using magnetron sputtering technology to sputter a Ti metal layer on the surface of the pretreated superalloy substrate, the thickness of the obtained Ti metal layer is 5 μm;
3)采用磁控溅射技术在Ti金属层上溅射Al金属层，所得到的Al金属层厚度为14μm；3) Using magnetron sputtering technology to sputter an Al metal layer on the Ti metal layer, the thickness of the obtained Al metal layer is 14 μm;
4)采用微弧氧化技术将Al金属层完全微弧氧化，直至微弧氧化Ti金属层3μm，得到大部分晶型为α—Al2O3的表面涂层；4) Using micro-arc oxidation technology to completely micro-arc oxidize the Al metal layer until the micro-arc oxidation of the Ti metal layer is 3 μm, and obtain a surface coating with most of the crystal form being α-Al 2 O 3 ;
5)选用Al2O3溶胶对涂层表面进行封孔处理：这里选用纳米氧化铝溶胶，采用旋涂的方式进行封孔，共旋涂三次，每次旋涂过后在500℃保温30min进行固化，使氧化铝溶胶中有机溶剂挥发，刷涂三次完毕后最终在1000℃进行一次性烧结，最终将微弧氧化后表面涂层中的孔洞填充；5) Use Al 2 O 3 sol to seal the surface of the coating: nano-alumina sol is used here, and the holes are sealed by spin coating. Spin coating three times in total, and cure at 500°C for 30 minutes after each spin coating. , so that the organic solvent in the alumina sol is volatilized, and after brushing for three times, it is finally sintered at 1000°C at one time, and finally the holes in the surface coating after micro-arc oxidation are filled;
6)采用磁控溅射技术在表面涂层上溅射Al2O3，溅射Al2O3的厚度为1μm，将表面涂层中剩余的缝隙填充；6) Using magnetron sputtering technology to sputter Al 2 O 3 on the surface coating, the thickness of the sputtered Al 2 O 3 is 1 μm, and fill the remaining gaps in the surface coating;
7)将制备好复合氧化铝涂层的高温合金基片放入马弗炉，在1200℃保温2h，使涂层中Al2O3的晶型向α—Al2O3转化。7) Put the superalloy substrate prepared with composite alumina coating into a muffle furnace, and keep it at 1200°C for 2 hours to convert the crystal form of Al 2 O 3 in the coating to α-Al 2 O 3 .
实施例3Example 3
本实施例中，采用热浸镀的方法沉积Al金属层，采用阳极氧化的方法将高温合金表面的Al金属层氧化完全，选用SiO2溶胶作为封孔材料。In this embodiment, the Al metal layer is deposited by hot-dip plating, the Al metal layer on the surface of the superalloy is completely oxidized by anodic oxidation, and SiO 2 sol is selected as the sealing material.
1)将镍基高温合金基片表面打磨平整，并依次用丙酮、酒精、去离子水超声清洗干净，并烘干；1) Polish the surface of the nickel-based superalloy substrate to make it smooth, and then use acetone, alcohol, and deionized water to clean it ultrasonically, and dry it;
2)采用磁控溅射技术在经过预处理的高温合金基片表面溅射Ti金属层，所得到的Ti金属层厚度为5μm；2) Using magnetron sputtering technology to sputter a Ti metal layer on the surface of the pretreated superalloy substrate, the thickness of the obtained Ti metal layer is 5 μm;
3)采用热浸镀的方法在Ti金属层上沉积一层Al金属层，所得到的Al金属层厚度为20μm；3) A layer of Al metal layer is deposited on the Ti metal layer by hot-dip plating, and the thickness of the obtained Al metal layer is 20 μm;
4)采用阳极氧化技术将Al金属层完全阳极氧化，直至阳极氧化Ti金属层2μm；4) The Al metal layer is completely anodized by anodic oxidation technology until the anodized Ti metal layer is 2 μm;
5)选用SiO2溶胶对涂层表面进行封孔处理：共旋涂三次SiO2溶胶材料，每次旋涂过后在400℃保温30min进行固化，使SiO2溶胶中的有机溶剂挥发只剩下SiO2，最终将阳极氧化后表面涂层中的孔洞填充；5) Use SiO 2 sol to seal the surface of the coating: Spin the SiO 2 sol material three times, and cure it at 400°C for 30 minutes after each spin coating, so that the organic solvent in the SiO 2 sol volatilizes and only SiO is left. 2. Finally, the holes in the surface coating after anodic oxidation are filled;
6)采用磁控溅射技术在表面涂层上溅射Al2O3，溅射Al2O3的厚度为2μm，将表面涂层中剩余的缝隙填充；6) Using magnetron sputtering technology to sputter Al 2 O 3 on the surface coating, the thickness of the sputtered Al 2 O 3 is 2 μm, and fill the remaining gaps in the surface coating;
7)将制备好复合氧化铝涂层的高温合金基片放入马弗炉，在1100℃保温2h，使涂层中Al2O3的晶型向α—Al2O3转化。7) Put the superalloy substrate prepared with the composite alumina coating into the muffle furnace, and keep it at 1100°C for 2 hours to convert the crystal form of Al 2 O 3 in the coating to α-Al 2 O 3 .
通过以上实施例的具体描述，进一步阐述了本发明的目的、技术方案和实施效果。需要理解的是，本发明并不局限于上述特定实施方式，本领域技术人员可以在权利要求的范围内做出各种变形或修改，这并不影响本发明的实质内容。Through the specific description of the above embodiments, the purpose, technical solution and implementation effect of the present invention are further illustrated. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art may make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention.
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