CN104784816A - Cuff electrode having garland structure and manufacturing method thereof - Google Patents

Abstract

The invention provides a cuff electrode having a garland structure. The cuff electrode having the garland structure comprises a stripped belt (1), an extensible garland structure (2), a lead (3), an electrode point (4), a ratchet (5), a lock ring (7), a lock ring opening (6) and a lead node (8). According to the garland structure, after the cuff electrode is planted, the stripped belt is extended along swelling of nerves, tissues are not pressed, neurhumor is not blocked due to the hollow garland structure, meanwhile the electrode point and the nerves are in close contact, and the exciting effect and the signal recording accuracy are guaranteed.

Description

A kind of kraft electrode with pull flower structure and its manufacturing method

technical field

The invention relates to the technical field of micro-nano processing and the field of biomedical engineering, in particular to a kraft electrode with a patterned structure and a manufacturing method thereof.

Background technique

As an implantable nerve electrode, Kraft electrode can be used to record nerve signals and stimulate nerve tissue. Through the stimulation of the nerve tissue, the control of the corresponding muscle movement can be realized, so as to restore some dysfunctions of the spinal cord injury patients.

Existing Kraft electrodes will need to completely wrap the stimulated part of the nerve area, and this way of completely wrapping the nerve tissue will cause the nutrient solution in the wrapped area to be blocked. At the same time, after the electrode is implanted, the nerve tissue is prone to swelling, and since the diameter of the Kraft electrode is fixed after the implantation is completed, the nerve tissue will be compressed.

Existing kraft electrodes include Medtronic's U.S. patent application, patent No. US5344438, a U-shaped kraft electrode that only wraps part of the nerve. This electrode can relieve nerve compression, but it cannot stimulate and record the entire nerve. easily disturbed by the outside world.

Peking University's patent application, patent number 201410024820, an implantable kraft nerve electrode and its manufacturing method. According to the structure of the tie, a tie-type kraft electrode with adjustable diameter is proposed, which can be passed through the ratchet of the tie. Designed to precisely control the diameter of the Kraft, but the diameter of this electrode is not adjustable after implantation, which may also cause nerve compression.

To sum up, the existing Kraft electrodes have problems such as non-adjustable diameter after implantation, easy tissue swelling, large nerve compression, and blockage of nutrient solution.

Contents of the invention

The invention provides a kraft electrode with a patterned structure, comprising a long strip (1), a stretchable patterned structure (2), a lead wire (3), an electrode point (4), a ratchet (5), lock ring (7), lock ring opening (6) and lead node (8), the garland structure (2) is arranged in the middle of the strip (1), and is connected with the strip (1); the lead (3) and the electrode point (4) are on the same side of the pattern structure (2).

The beneficial effects that can be produced by the present invention are: 1. Using a pattern structure on the belt of the Kraft electrode can ensure that when the nerve is swollen, the electrode belt can automatically stretch along with the swelling of the nerve, reducing the damage and damage to the nerve caused by the implanted electrode. 2. The kraft electrode adopts a latte structure, the nerve is not completely covered, and part of it can be well connected with the outside world, so that the nutrient solution in the body will not be blocked; 3. The electrode point adopts a raised three-dimensional structure, so that It can have a better contact with the nerve, ensuring the effect of stimulation and recording.

Description of drawings

Fig. 1 is a schematic diagram of a kraft electrode with a garland structure in the present invention;

Fig. 2 is the wavy structural mode of the garland in the kraft electrode with the garland structure of the present invention;

(a)-(b) in Fig. 3 are the rhombus structure of the pattern in the Kraft electrode with the pattern structure of the present invention.

Explanation of reference signs:

1: Kraft tape

2: Latte structure

3: Lead

4: Metal electrode

5: Ratchet

6: Lock ring opening

7: Lock ring

8: Lead node

9: The strength-enhancing structure added in the wavy pull flower structure

10: The strength-enhancing structure added to the diamond-shaped pull flower structure

Detailed ways

The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are only used to illustrate the present invention, but can not be used to limit the scope of the present invention.

As shown in Figure 1, the present invention has the kraft electrode of garland structure and comprises elongated tape (1), stretchable garland structure (2), lead wire (3), electrode point (4), ratchet (5) ), lock ring (7), lock ring opening (6) and lead junction (8). The patterned structure (2) is arranged in the middle of the strip (1) and connected to the strip (1); the lead wire (3) and the electrode point (4) are on the same side of the patterned structure (2).

The strip (1) and the patterned structure (2) are made of the same material, which is a polymer film with biocompatibility, which may be parylene with biocompatibility. The lead wire (3) and the electrode point (4) are made of the same material and have electrical conductivity, and the material can be a metal film such as titanium, gold, platinum, etc. grown by physical vapor deposition.

Wherein, the width of the strip (1) is 6 mm, the length is 15 mm, and the thickness is 10-20 μm;

Wherein, the width of the lead wire is 40 μm, and the size of the electrode point is 400 μm×400 μm or 500 μm×500 μm;

Wherein, the garland structure (2) includes a wavy garland structure and a diamond-shaped garland structure, and the side length and width of the wavy garland structure and the diamond-shaped garland structure are 100 μm×250 μm. Referring to accompanying drawings 1-3, preferably, the angle between the two sides of the wavy pattern structure is 10-170°, and the angle between the two sides of the diamond-shaped pattern structure is 10-170°. In one embodiment Among them, the angle between the two sides of the wavy structure and the rhombus structure can be 10°, and in one embodiment, the angle between the two sides of the wavy structure and the rhombus structure can be In one embodiment, the included angle between the two sides of the wavy patterned structure and the diamond-shaped patterned structure may be 170°, and at the same time, there is a strength-enhancing structure at the connection of each side.

Wherein, the electrode point (4) is a three-dimensional convex structure, which is higher than the strip (1).

The ratchets (5) exist on both sides of the strip in two rows, each row can have multiple, and the distance from the ratchet opening (6) can be set to the circumference of a circle corresponding to different fixed diameters.

The ratchet (5) and the lock ring (7) are made of the same material, which has certain mechanical strength, and can be metal nickel obtained by electroplating.

The preparation method of the kraft electrode with garland structure of the present invention comprises the following steps:

A silicon oxide/silicon nitride layer is grown on a silicon wafer, in which the silicon oxide layer is located in the lower layer and the silicon nitride layer is located in the upper layer. A mask for etching the front silicon nitride is made by photolithography. Etching silicon oxide will require etching The silicon surface is exposed, and the silicon is etched to a certain depth by KOH;

A layer of sacrificial Al is grown on a grooved silicon wafer by physical vapor deposition; a layer of parylene is deposited on Al;

Electrode points and leads made of titanium/gold/platinum are prepared by a lift-off process, and a second layer of parylene is deposited thereon;

The lock ring and ratchet are prepared by photolithography, electroplating and other process steps;

Expose the electrode points by photolithography, etching, etc., and further etch to obtain the opening of the lock ring and the contour of the electrode.

The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be assumed that the specific implementation of the present invention is limited to these descriptions. For those of ordinary skill in the technical field of the present invention, without departing from the concept of the present invention, some simple deduction or replacement can be made, which should be regarded as belonging to the protection scope of the present invention.

Claims (8)

1. A kraft electrode with a garland structure, including a long strip (1), a stretchable garland structure (2), a lead wire (3), an electrode point (4), a ratchet (5), a lock Ring (7), locking ring opening (6) and lead wire node (8), described drawing flower structure (2) is arranged in the middle of strip (1), and is connected with strip (1); lead wire ( 3) and the electrode point (4) are on the same side of the pattern structure (2). 2. The kraft electrode with garland structure as claimed in claim 1, wherein, said strip (1) and garland structure (2) are made of the same material, which is biocompatible polymer film. 3. The Kraft electrode with a patterned structure according to claim 1, wherein the lead wire (3) and the electrode point (4) are also made of the same material, and the material has electrical conductivity. 4. The kraft electrode with a patterned structure as claimed in claim 6, wherein the angle between the two sides of the wave patterned structure is 10-170°, and the angle between the two sides of the rhombus patterned structure 10-170°, and at the same time, there is a strength-enhancing structure at the connection of each side. 5. The kraft electrode with garland structure according to claim 1, wherein the electrode point (4) is a three-dimensional raised structure, which is higher than the strip (1). 6. The kraft electrode with garland structure as claimed in claim 1, wherein the ratchets (5) exist on both sides of the strip in two rows, each row can have multiple, and the distance from the ratchet opening The distance in (6) can be set as the circumference of circles corresponding to different fixed diameters. 7. The kraft electrode with pull flower structure as claimed in claim 1, wherein said ratchet (5) and lock ring (7) are made up of the same material, which can be metal nickel obtained by electroplating . 8. A method for manufacturing a kraft electrode with a patterned structure, comprising the following steps: A silicon oxide/silicon nitride layer is grown on a silicon wafer, in which the silicon oxide layer is located in the lower layer and the silicon nitride layer is located in the upper layer. A mask for etching the front silicon nitride is made by photolithography. Etching silicon oxide will require etching The silicon surface is exposed, and the silicon is etched to a certain depth by KOH; A layer of sacrificial layer A1 is grown on the grooved silicon wafer by physical vapor deposition; a layer of parylene is deposited on A1; Electrode points and leads made of titanium/gold/platinum are prepared by a lift-off process, and a second layer of parylene is deposited thereon; The lock ring and ratchet are prepared by photolithography, electroplating and other process steps; Expose the electrode points by photolithography, etching, etc., and further etch to obtain the opening of the lock ring and the contour of the electrode.