CN104779763A - Two-freedom-degree voice coil driving device - Google Patents
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Abstract
Description
技术领域 technical field
本发明涉及超精密运动定位设备领域,具体涉及一种两自由度音圈式驱动装置。 The invention relates to the field of ultra-precise motion positioning equipment, in particular to a two-degree-of-freedom voice coil driving device.
背景技术 Background technique
音圈电机((Voice Coil Actuator VCA)是一种特殊形式的直接驱动电机,具有结构简单、体积小、高速、高加速和响应快等特性。其工作原理是,通电线圈(导体)放在磁场内就会产生力,力的大小与施加在线圈上的电流成比例,基于此原理制造的音圈电机的运动形式可以为直线或圆弧。 Voice coil motor (Voice Coil Actuator VCA) is a special form of direct drive motor, which has the characteristics of simple structure, small size, high speed, high acceleration and fast response. Its working principle is that the energized coil (conductor) is placed in the magnetic field A force will be generated inside, and the magnitude of the force is proportional to the current applied to the coil. The movement form of the voice coil motor manufactured based on this principle can be a straight line or a circular arc.
自从问世以来,音圈电机被广泛的应用于计算机存储设备、航天仪器(例如航天制冷机)、精密测距仪器(例如霍尔位移测量装置)、精密车床以及移动电话中,特别是应用在高档家用电器和计算机中。音圈电机是一种性能非常先进的直线电机,有着广泛的应用前景。 Since its inception, voice coil motors have been widely used in computer storage devices, aerospace instruments (such as aerospace refrigerators), precision ranging instruments (such as Hall displacement measuring devices), precision lathes and mobile phones, especially in high-end household appliances and computers. The voice coil motor is a linear motor with very advanced performance and has a wide range of application prospects.
近年来,随着对高速、高精度定位系统性能要求的提高和音圈电机技术的迅速发展,音圈电机驱动装置在许多不同形式的高加速、高频激励上也得到广泛应用。如,光学系统中透镜的定位,机械工具的多坐标定位平台,医学装置中精密电子管、真空管控制,激光光束扫描器的驱动。在柔性机器人中,为使末端执行器快速、精确定位,还可以用音圈电机驱动装置来有效地抑制振动。 In recent years, with the improvement of performance requirements for high-speed and high-precision positioning systems and the rapid development of voice coil motor technology, voice coil motor drives have also been widely used in many different forms of high acceleration and high frequency excitation. For example, the positioning of lenses in optical systems, the multi-coordinate positioning platform of mechanical tools, the control of precision electronic tubes and vacuum tubes in medical devices, and the drive of laser beam scanners. In flexible robots, in order to make the end effector fast and precise positioning, the voice coil motor drive can also be used to effectively suppress vibration.
传统结构音圈电机驱动装置设计中,存在以下技术问题: In the design of the voice coil motor drive device with traditional structure, there are the following technical problems:
(1)电机外部漏磁,且磁路元件的机械结构尺寸设计不适合有严格要求的精密定位平台; (1) The external magnetic flux leakage of the motor, and the mechanical structure size design of the magnetic circuit components are not suitable for the precise positioning platform with strict requirements;
(2)由于结构体积的限制,传统的音圈电机驱动装置只能实现单自由度的往复运动,从而导致音圈电机驱动装置不符合小尺寸大出力、高行程高频率、多自由度运动的应用要求; (2) Due to the limitation of the structural volume, the traditional voice coil motor drive device can only achieve single-degree-of-freedom reciprocating motion, which leads to the voice coil motor drive device not meeting the requirements of small size, large output, high stroke, high frequency, and multi-degree-of-freedom motion. application requirements;
(3)由于磁路设计不够合理,线圈动子在磁路中的线圈面积没有得到充分利用,导致磁体性能得不到充分发挥。 (3) Due to the unreasonable design of the magnetic circuit, the coil area of the coil mover in the magnetic circuit is not fully utilized, resulting in that the performance of the magnet cannot be fully utilized.
发明内容 Contents of the invention
本发明要解决的技术问题是针对现有技术的不足,提供一种能在加强磁场的同时有效屏蔽电机漏磁磁场、且磁路元件的机械结构尺寸设计适合精密定位平台严格要求的一种两自由度音圈式驱动装置。 The technical problem to be solved by the present invention is to provide a two-way motor that can effectively shield the leakage magnetic field of the motor while strengthening the magnetic field, and the mechanical structure size design of the magnetic circuit element is suitable for the strict requirements of the precision positioning platform. Freedom Voice Coil Driver.
为解决上述技术问题,本发明采用以下技术方案: In order to solve the problems of the technologies described above, the present invention adopts the following technical solutions:
一种两自由度音圈式驱动装置,包括构成上下盖合配合的方框状磁体上盖组件和磁体下盖组件,所述磁体上盖组件和磁体下盖组件的每条边上设置有一个永磁体,在所述磁体上盖组件和磁体下盖组件上位于两个上下相邻永磁体的位置处形成半密封腔室,上下相邻永磁体之间均设置有一个线圈组件。 A two-degree-of-freedom voice coil driving device, comprising a square frame-shaped magnet upper cover assembly and a magnet lower cover assembly that are fitted up and down, and each side of the magnet upper cover assembly and the magnet lower cover assembly is provided with a For the permanent magnet, a semi-sealed chamber is formed at the position of two upper and lower adjacent permanent magnets on the magnet upper cover assembly and the magnet lower cover assembly, and a coil assembly is arranged between the upper and lower adjacent permanent magnets.
作为本发明的进一步改进:所述磁体上盖组件和磁体下盖组件均包括磁轭盖体以及位于磁轭盖体上的永磁体安装部,永磁体嵌设于永磁体安装部,所述磁体上盖组件和磁体下盖组件上的永磁体安装部配合形成半密封腔室。 As a further improvement of the present invention: the magnet upper cover assembly and the magnet lower cover assembly both include a yoke cover and a permanent magnet installation part located on the yoke cover, the permanent magnet is embedded in the permanent magnet installation part, and the magnet The upper cover assembly and the permanent magnet mounting part on the magnet lower cover assembly cooperate to form a semi-sealed chamber.
作为本发明的进一步改进:所述每个半密封腔室内的上下两个永磁体均水平方向双向充磁、且充磁方向相反以形成垂直于线圈组件的闭环磁路。 As a further improvement of the present invention: the upper and lower permanent magnets in each semi-sealed chamber are bidirectionally magnetized in a horizontal direction, and the magnetization directions are opposite to form a closed-loop magnetic circuit perpendicular to the coil assembly.
作为本发明的进一步改进:所述线圈组件包括线圈骨架和绕制在线圈骨架上的线圈,所述线圈骨架均从半密封腔室内伸出且相互连接。 As a further improvement of the present invention: the coil assembly includes a bobbin and coils wound on the bobbin, and the bobbins protrude from the semi-sealed chamber and are connected to each other.
作为本发明的进一步改进:所述线圈包括漆包线绕组,所述线圈骨架包括由环氧玻璃布层压板FR-4制成的印制电路板。 As a further improvement of the present invention: the coil includes an enameled wire winding, and the coil frame includes a printed circuit board made of epoxy glass cloth laminated board FR-4.
作为本发明的进一步改进:所述永磁体由钕铁硼N50M材料制成。 As a further improvement of the present invention: the permanent magnet is made of NdFeB N50M material.
与现有技术相比,本发明的优点在于: Compared with the prior art, the present invention has the advantages of:
(1)本发明的一种两自由度音圈式驱动装置,采用上下盖形式的软铁磁轭构成半密封空腔,并在半密封空腔内采用磁极反向联排永磁体构成闭环磁路,在加强磁场的同时,有效屏蔽电机漏磁磁场,降低了电机外部漏磁,减小对电机临近紧凑布置的电磁元件的影响;同时,有效减小了磁路元件的机械结构尺寸,适合应用于对机械结构尺寸有严格要求的精密定位平台设计。 (1) A two-degree-of-freedom voice coil driving device of the present invention adopts a soft iron yoke in the form of an upper and lower cover to form a semi-sealed cavity, and in the semi-sealed cavity, permanent magnets with opposite magnetic poles are used to form a closed-loop magnet. While strengthening the magnetic field, it effectively shields the magnetic field leakage of the motor, reduces the external magnetic flux leakage of the motor, and reduces the impact on the electromagnetic components that are closely arranged near the motor; at the same time, it effectively reduces the mechanical structure size of the magnetic circuit components, suitable for It is applied to the design of precision positioning platform with strict requirements on mechanical structure size.
(2)本发明的一种两自由度音圈式驱动装置,不仅能满足音圈电机动子X轴方向的运动要求,而且电机动子能够沿Y轴方向运动,增加了电机的工作空间,解决了现有音圈电机结构中动子只能单向运动的问题。 (2) A two-degree-of-freedom voice coil driving device of the present invention can not only meet the movement requirements of the voice coil motor mover in the X-axis direction, but also the motor mover can move along the Y-axis direction, which increases the working space of the motor. The problem that the mover can only move in one direction in the existing voice coil motor structure is solved.
(3)本发明的一种两自由度音圈式驱动装置,更大程度地利用了线圈动子在磁路中的有效线圈面积,能够形成非常均匀的磁场,使得在运动过程中电机出力的变化很小,特别适合于超精密定位领域。 (3) A two-degree-of-freedom voice coil driving device of the present invention utilizes the effective coil area of the coil mover in the magnetic circuit to a greater extent, and can form a very uniform magnetic field, so that the output force of the motor can be reduced during the movement. The change is very small, especially suitable for the field of ultra-precise positioning.
附图说明 Description of drawings
图1是本发明一种两自由度音圈式驱动装置的立体结构原理示意图。 FIG. 1 is a schematic diagram of the three-dimensional structure of a two-degree-of-freedom voice coil driving device according to the present invention.
图2是本发明一种两自由度音圈式驱动装置的立体分解原理示意图。 Fig. 2 is a three-dimensional exploded principle schematic diagram of a two-degree-of-freedom voice coil driving device of the present invention.
图3是本发明在实施例中图2的A-A剖视示意图。 Fig. 3 is a schematic sectional view of A-A of Fig. 2 in an embodiment of the present invention.
图4是本发明在实施例中图1的B-B剖视原理示意图。 Fig. 4 is a schematic diagram of the principle of the B-B section of Fig. 1 in an embodiment of the present invention.
图例说明: illustration:
1、磁体上盖组件;11、上磁轭盖体;12、上永磁体;2、磁体下盖组件;21、下磁轭盖体;22、下永磁体;3、线圈组件;31、线圈骨架;32、线圈。 1. Magnet upper cover assembly; 11. Upper yoke cover; 12. Upper permanent magnet; 2. Magnet lower cover assembly; 21. Lower yoke cover; 22. Lower permanent magnet; 3. Coil assembly; 31. Coil Skeleton; 32, coil.
具体实施方式 Detailed ways
以下结合具体实施例和附图对本发明作进一步详细说明。 The present invention will be described in further detail below in conjunction with specific embodiments and accompanying drawings.
如图1至图4所示,本发明提供一种两自由度音圈式驱动装置,包括构成上下盖合配合的方框状磁体上盖组件1和磁体下盖组件2,所述磁体上盖组件1和磁体下盖组件2的每条边上设置有一个永磁体,在所述磁体上盖组件1和磁体下盖组件2上位于两个上下相邻永磁体的位置处形成半密封腔室,上下相邻永磁体之间均设置有一个线圈组件3。 As shown in Figures 1 to 4, the present invention provides a two-degree-of-freedom voice coil drive device, which includes a square frame-shaped magnet upper cover assembly 1 and a magnet lower cover assembly 2 that form an upper and lower cover fit, and the magnet upper cover A permanent magnet is arranged on each side of the assembly 1 and the magnet lower cover assembly 2, and a semi-sealed chamber is formed at the positions of two upper and lower adjacent permanent magnets on the magnet upper cover assembly 1 and the magnet lower cover assembly 2 , a coil assembly 3 is arranged between the upper and lower adjacent permanent magnets.
在本实施例中,所述磁体上盖组件1和磁体下盖组件2均包括磁轭盖体以及位于磁轭盖体上的永磁体安装部,永磁体嵌设于永磁体安装部,所述磁体上盖组件1和磁体下盖组件2上的永磁体安装部配合形成半密封腔室。 In this embodiment, the magnet upper cover assembly 1 and the magnet lower cover assembly 2 both include a yoke cover and a permanent magnet installation part located on the yoke cover, and the permanent magnet is embedded in the permanent magnet installation part. The permanent magnet installation parts on the magnet upper cover assembly 1 and the magnet lower cover assembly 2 cooperate to form a semi-sealed chamber.
在本实施例中,所述每个半密封腔室内的上下两个永磁体均水平方向双向充磁、且充磁方向相反以形成垂直于线圈组件3的闭环磁路。 In this embodiment, the upper and lower permanent magnets in each semi-sealed chamber are bidirectionally magnetized in a horizontal direction, and the magnetization directions are opposite to form a closed-loop magnetic circuit perpendicular to the coil assembly 3 .
如图4所示,在本实施例中,处于磁体上盖组件1上的上永磁体12左侧为S极、右侧为N极,处于磁体下盖组件2上的下永磁体22左侧为N极、右侧为S极,上下两个永磁体的S极N极相互对置,使得在永磁体左侧磁路为从下至上,在永磁体右侧磁路为从上至下;由于磁体上盖组件1和磁体下盖组件2构成上下盖合配合,磁体上盖组件1的上磁轭盖体11和磁体下盖组件2的下磁轭盖体21的四条边的外侧面上下对应相连形成四个半密封腔室,通过上磁轭盖体11和下磁轭盖体21的导磁作用形成闭环磁场,从而在加强磁场的同时,有效屏蔽电机漏磁磁场,降低了电机外部漏磁,减小对电机临近紧凑布置的电磁元件的影响;并且封闭磁场垂直穿过线圈组件3的有效表面,电流方向与磁场方向垂直,最大化地利用了每个线圈组件3的有效面积,从而能够输出更大的推力,减少电机空间尺寸;同时,由于在半密封空腔内采用磁极反向联排永磁体构成闭环磁路,有效减小了磁路元件的机械结构尺寸,降低了电机外部漏磁,使得本发明适合应用于对机械结构尺寸有严格要求的精密定位平台设计。 As shown in Figure 4, in this embodiment, the left side of the upper permanent magnet 12 on the magnet upper cover assembly 1 is the S pole, the right side is the N pole, and the left side of the lower permanent magnet 22 on the magnet lower cover assembly 2 N pole and S pole on the right side, the S pole and N pole of the upper and lower permanent magnets face each other, so that the magnetic circuit on the left side of the permanent magnet is from bottom to top, and the magnetic circuit on the right side of the permanent magnet is from top to bottom; Since the magnet upper cover assembly 1 and the magnet lower cover assembly 2 form an upper and lower cover fit, the upper yoke cover body 11 of the magnet upper cover assembly 1 and the lower yoke cover body 21 of the magnet lower cover assembly 2 are on the outer sides of the four sides up and down. Correspondingly connected to form four semi-sealed chambers, a closed-loop magnetic field is formed through the magnetic conduction of the upper yoke cover 11 and the lower yoke cover 21, thereby effectively shielding the magnetic field leakage of the motor while strengthening the magnetic field, and reducing the external load of the motor. Flux leakage reduces the impact on the compactly arranged electromagnetic components adjacent to the motor; and the closed magnetic field passes through the effective surface of the coil assembly 3 vertically, and the current direction is perpendicular to the direction of the magnetic field, maximizing the effective area of each coil assembly 3, In this way, a greater thrust can be output and the space size of the motor can be reduced; at the same time, since the closed-loop magnetic circuit is formed by using permanent magnets with opposite magnetic poles in the semi-sealed cavity, the mechanical structure size of the magnetic circuit components is effectively reduced, and the motor capacity is reduced. The external magnetic flux leakage makes the present invention suitable for the design of precision positioning platforms with strict requirements on mechanical structure size.
如图1和图2所示,当X轴方向上的两个线圈组件3通电时,X轴方向上两个线圈组件3在洛仑磁力的作用下可以实现X轴方向的运动;当Y轴方向上的两个线圈组件3通电时,Y轴方向上两个线圈组件3在洛仑磁力的作用下可以实现Y轴方向的运动;当四个线圈组件3都通电时,线圈组件3可以实现X轴Y轴方向平面运动。这样不仅能满足音圈电机动子X轴方向的运动要求,而且电机动子能够沿Y轴方向运动,增加了电机的工作空间,解决了现有音圈电机驱动装置结构中动子只能单向运动的问题。 As shown in Figures 1 and 2, when the two coil assemblies 3 in the X-axis direction are energized, the two coil assemblies 3 in the X-axis direction can move in the X-axis direction under the action of the Lorent magnetic force; when the Y-axis When the two coil assemblies 3 in the Y direction are energized, the two coil assemblies 3 in the Y-axis direction can realize the movement in the Y-axis direction under the action of the Loren magnetic force; when the four coil assemblies 3 are all energized, the coil assemblies 3 can realize X-axis Y-axis plane movement. This can not only meet the movement requirements of the voice coil motor mover in the X-axis direction, but also the motor mover can move along the Y-axis direction, which increases the working space of the motor and solves the problem that the mover can only be single-handed in the existing structure of the voice coil motor drive device. problem of movement.
在本实施例中,所述线圈组件3包括线圈骨架31和绕制在线圈骨架31上的线圈32,所述线圈骨架31均从半密封腔室内伸出且相互连接。 In this embodiment, the coil assembly 3 includes a bobbin 31 and a coil 32 wound on the bobbin 31 , and the bobbins 31 protrude from the semi-sealed chamber and are connected to each other.
在本实施例中,所述线圈32包括漆包线绕组,所述线圈骨架31包括由环氧玻璃布层压板FR-4制成的印制电路板。 In this embodiment, the coil 32 includes an enameled wire winding, and the coil frame 31 includes a printed circuit board made of epoxy glass cloth laminated board FR-4.
在本实施例中,所述永磁体由钕铁硼N50M材料制成。在实际使用中,磁体上盖组件1和磁体下盖组件2的横向纵向尺寸可以根据需要稍大于线圈组件3的尺寸,这样线圈组件3能够在X轴、Y轴方向获得更大的行程。 In this embodiment, the permanent magnet is made of NdFeB N50M material. In actual use, the lateral and longitudinal dimensions of the magnet upper cover assembly 1 and the magnet lower cover assembly 2 can be slightly larger than the size of the coil assembly 3 as required, so that the coil assembly 3 can obtain a larger stroke in the X-axis and Y-axis directions.
以上仅是本发明的优选实施方式,本发明的保护范围并不仅局限于上述实施例,凡属于本发明思路下的技术方案均属于本发明的保护范围。应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理前提下的若干改进和润饰,应视为本发明的保护范围。 The above are only preferred implementations of the present invention, and the protection scope of the present invention is not limited to the above-mentioned embodiments, and all technical solutions under the idea of the present invention belong to the protection scope of the present invention. It should be pointed out that for those skilled in the art, some improvements and modifications without departing from the principle of the present invention should be regarded as the protection scope of the present invention.
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CN112987512A (en) * | 2021-03-08 | 2021-06-18 | 上海隐冠半导体技术有限公司 | Six-degree-of-freedom micro-motion device and electron beam equipment |
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US6130490A (en) * | 1999-04-06 | 2000-10-10 | Nikon Corporation | X-Y stage with movable magnet plate |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN112987512A (en) * | 2021-03-08 | 2021-06-18 | 上海隐冠半导体技术有限公司 | Six-degree-of-freedom micro-motion device and electron beam equipment |
CN112987512B (en) * | 2021-03-08 | 2023-05-30 | 上海隐冠半导体技术有限公司 | Six-degree-of-freedom micro-motion device and electron beam equipment |
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