CN104730784B - Array base palte and its manufacture method, display panel and display device - Google Patents

Abstract

The present invention provides an array substrate. The array substrate is divided into a plurality of pixel units. The array substrate includes a first electrode layer, an insulating layer covering the first electrode layer, and a second electrode layer formed on the insulating layer. An electrode layer, the first electrode layer includes a first electrode arranged in each of the pixel units, the insulating layer includes an insulating layer unit covering the surface of each of the first electrodes, and the second electrode layer It includes a second electrode disposed above the insulating layer unit, wherein, in each of the pixel units, the insulating layer unit includes a plurality of insulating regions, and at least one of the insulating regions has a dielectric constant different from that of the other ones. The dielectric constant of the insulating region. The invention also provides a display panel, a display device and a manufacturing method of an array substrate. In the present invention, a multi-domain liquid crystal display device can be realized by simply changing the structure of the insulating layer unit, thereby reducing the process cost of manufacturing the array substrate.

Description

Array substrate and manufacturing method thereof, display panel and display device

technical field

The present invention relates to the field of display devices, and in particular, to an array substrate, a display panel including the array substrate, a display device including the display panel, and a manufacturing method of the array substrate.

Background technique

In order to make the liquid crystal display device have a wider viewing angle, the liquid crystal display device can generally be configured as a dual-domain liquid crystal display, that is, when displaying, the liquid crystal molecules in one pixel unit deflect in two different directions.

At present, dual-domain display is usually achieved by changing the direction of the electrode strips of the pixel electrodes in the pixel unit, but this process is relatively complicated.

How to realize a display device capable of dual-domain display with a simple process has become a technical problem to be solved urgently in this field.

Contents of the invention

The object of the present invention is to provide an array substrate, a display panel including the array substrate, a display device including the display panel, and a manufacturing method of the array substrate. The display device can realize multi-domain display only by simply changing the structure of the insulating layer in the array substrate.

In order to achieve the above object, as one aspect of the present invention, an array substrate is provided, the array substrate is divided into a plurality of pixel units, the array substrate includes a first electrode layer, an insulating layer covering the first electrode layer, and a second electrode layer formed on the insulating layer, the first electrode layer includes a first electrode arranged in each of the pixel units, and the insulating layer includes a first electrode covering the surface of each of the first electrodes An insulating layer unit, the second electrode layer includes a second electrode disposed above the insulating layer unit, wherein, in each of the pixel units, the insulating layer unit includes a plurality of insulating regions, at least one of the The dielectric constant of the insulating region is different from the dielectric constant of the other said insulating regions.

Preferably, in each pixel unit, the insulating layer unit includes a first insulating region, a second insulating region and a third insulating region, and the dielectric constant of the first insulating region and the third insulating region Similarly, the dielectric constant of the second insulating region is different from that of the first insulating region, and the second insulating region is located between the first insulating region and the third insulating region.

Preferably, the area of the second insulating region is half of the area of the pixel unit, and the areas of the first insulating region and the third insulating region are equal.

Preferably, in each pixel unit, the first insulating region includes a first bottom insulating layer and a first top insulating layer, and the third insulating region includes a third bottom insulating layer and a third top insulating layer, The first bottom insulating layer, the second insulating region and the third bottom insulating layer are integrally formed, and the dielectric constant of the first top insulating layer is the same as that of the third top insulating layer , the top surface of the first top insulating layer, the top surface of the third top insulating layer, and the top surface of the second insulating region are even.

Preferably, the first bottom insulating layer, the second insulating region and the third bottom insulating layer are made of silicon nitride, and the first top insulating layer and the third top insulating layer are made of transparent made of resin.

Preferably, the material of the first insulating region is the same as that of the third insulating region, and the material of the first insulating region is different from that of the second insulating region.

Preferably, the first insulating region is made of silicon oxide, and the second insulating region is made of silicon nitride.

Preferably, in each of the pixel units, the second electrode includes a second left electrode and a second right electrode, the second left electrode includes a plurality of parallel second left electrode strips, the second The right electrode includes a plurality of second right electrode strips parallel to each other, and the inclination directions of the second left electrode strips and the second right electrode strips are different.

Preferably, the second left electrode and the second right electrode are mirror-symmetrical about the center line of the pixel unit, the center line divides the pixel unit into two parts along the length direction, and the second left electrode strip and The included angle between the midlines is 7° to 11°.

Preferably, the first electrode is a bulk electrode.

As another aspect of the present invention, a display panel is provided, and the display panel includes an array substrate, wherein the array substrate is the above-mentioned array substrate provided by the present invention.

As yet another aspect of the present invention, a display device is provided, and the display device includes a display panel, wherein the display panel is the above-mentioned display panel provided by the present invention.

As yet another aspect of the present invention, a method for manufacturing an array substrate is provided, the array substrate is divided into a plurality of pixel units, wherein the method for manufacturing includes:

forming a first electrode layer, the first electrode layer including a first electrode disposed in each of the pixel units;

forming an insulating layer, the insulating layer covers the first electrode layer, and the insulating layer includes an insulating layer unit covering the surface of each of the first electrodes, and in each of the pixel units, the insulating layer a cell comprising a plurality of insulating regions, at least one of said insulating regions having a different dielectric constant than the other said insulating regions;

A second electrode layer is formed, the second electrode layer including a second electrode disposed on the insulating layer unit.

Preferably, in each pixel unit, the insulating layer unit includes a first insulating region, a second insulating region and a third insulating region, and the dielectric constant of the first insulating region and the third insulating region Similarly, the dielectric constant of the second insulating region is different from that of the first insulating region, and the second insulating region is located between the first insulating region and the third insulating region.

Preferably, the area of the second insulating region is half of the area of the pixel unit, and the areas of the first insulating region and the third insulating region are equal.

Preferably, the step of forming the insulating layer includes:

forming a bottom insulating material layer, in each of the pixel units, the bottom insulating material layer includes a first bottom insulating layer, a second insulating region and a third bottom insulating layer;

forming a top insulating material layer, the top insulating material layer including a top insulating material unit arranged in each of the pixel units, the top insulating material unit including a first top insulating material layer arranged on the first bottom insulating material layer an insulating material layer and a third top insulating material layer disposed on the third bottom insulating layer, the dielectric constant of the first top insulating layer is the same as that of the third top insulating layer, and the first top insulating layer A top surface of a top insulating layer, a top surface of the third top insulating layer, and a top surface of the second insulating region are flush.

Preferably, the bottom insulating material layer is made of silicon nitride, and the top insulating material layer is made of transparent resin.

Preferably, the step of forming the insulating layer includes:

forming a first insulating material layer;

A first through hole corresponding to the position of the first insulating region is formed on the first insulating layer, and a third through hole is formed on the first insulating layer corresponding to the position of the third insulating region, thereby utilizing the first The insulating layer forms a second insulating region;

The first insulating region is formed in the first through hole, and the third insulating region is formed in the third through hole.

Preferably, the first insulating region is made of silicon oxide, and the second insulating region is made of silicon nitride.

Preferably, in each of the pixel units, the second electrode includes a second left electrode and a second right electrode, the second left electrode includes a plurality of parallel second left electrode strips, the second The right electrode includes a plurality of second right electrode strips parallel to each other, and the inclination directions of the second left electrode strips and the second right electrode strips are different.

Preferably, the second left electrode and the second right electrode are mirror-symmetrical about the center line of the pixel unit, the center line divides the pixel unit into two parts along the length direction, and the second left electrode strip and The included angle between the midlines is 7° to 11°.

Preferably, the first electrode is a bulk electrode.

Because in each pixel unit, the electric field intensity between the first electrode and the second electrode is related to the dielectric constant of the insulating unit layer between the first electrode and the second electrode, because there is at least one dielectric constant in the insulating layer unit The constant is different from other insulating regions. Therefore, in a pixel unit, there are at least two different electric field strengths, so that there are at least two different deflection directions of liquid crystal molecules in a pixel unit. It can be seen that the present invention provides The array substrate can realize the multi-domain display of the liquid crystal display panel.

In the display device, the requirement for the dimensional accuracy of the insulating layer unit is low, and the insulating layer unit has a larger size compared with the electrode strips. Therefore, a multi-domain liquid crystal display device can be realized by simply changing the structure of the insulating layer unit, Therefore, the process cost of manufacturing the array substrate can be reduced.

Description of drawings

The accompanying drawings are used to provide a further understanding of the present invention, and constitute a part of the description, together with the following specific embodiments, are used to explain the present invention, but do not constitute a limitation to the present invention. In the attached picture:

FIG. 1 is a schematic cross-sectional view of a first embodiment of an array substrate provided by the present invention;

FIG. 2 is a schematic cross-sectional view of a second embodiment of the array substrate provided by the present invention;

3 is a schematic top view of the array substrate provided by the present invention;

4 is a schematic diagram of the state of liquid crystal molecules in the off state (off state) of the display panel provided by the present invention;

FIG. 5 is a schematic diagram of the state of liquid crystal molecules when the display panel provided by the present invention is in the on state (on state).

Explanation of reference signs

100: first electrode 200: insulating layer unit

210: first insulating region 210a: first bottom insulating layer

210b: first top insulating layer 300: second electrode

310: second left electrode strip 320: second right electrode

410, 420, 430, 440: liquid crystal molecules

detailed description

Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

As an aspect of one aspect of the present invention, an array substrate is provided, the array substrate is divided into a plurality of pixel units, the array substrate includes a first electrode layer, an insulating layer covering the first electrode layer, and an insulating layer formed on The second electrode layer on the insulating layer, the first electrode layer includes a first electrode 100 arranged in each of the pixel units, and the insulating layer includes an insulating layer covering the surface of each first electrode 100 Unit 200, the second electrode layer includes a second electrode 300 disposed above the insulating layer unit 200, wherein, in each pixel unit, the insulating layer unit 200 includes a plurality of insulating regions, at least one of the insulating regions The dielectric constant of is different from the dielectric constant of the other said insulating regions.

In a liquid crystal display device, liquid crystal molecules are driven to deflect according to a torsional force generated by an electric field between a first electrode and a second electrode.

It is well known that when the medium is applied with an electric field, it will generate induced charges and weaken the electric field. The ratio of the electric field in the medium to the original applied electric field (in vacuum) is the relative permittivity. The dielectric constant is the product of the relative permittivity and the absolute permittivity in vacuum. If a material with a high dielectric constant is placed in the electric field, the strength of the electric field will drop appreciably within the dielectric.

When electricity is supplied to the first electrode and the second electrode, an electric field will be generated between the first electrode and the second electrode, and the insulating layer unit 200 is a medium between the first electrode and the second electrode. Since the dielectric constant of at least one insulating region in the insulating layer unit 200 is different from that of other insulating regions, at the insulating region where the dielectric constant is different from other insulating regions, the gap between the first electrode and the second electrode The strength of the electric field between them is different from the strength of the electric field in other regions.

In other words, in a pixel unit, there are at least two different electric field strengths, so that there are at least two different deflection directions of liquid crystal molecules in a pixel unit. It can be seen that the array substrate provided by the present invention can realize liquid crystal display Multi-domain display of the panel.

Since in the display device, the requirement for the dimensional accuracy of the insulating layer unit is low, and the insulating layer unit has a larger size compared with the electrode strip, therefore, a multi-domain liquid crystal display device can be realized by simply changing the structure of the insulating layer unit , so that the process cost of manufacturing the array substrate can be reduced.

As a specific embodiment of the present invention, as shown in FIG. 3, in each pixel unit, the insulating layer unit includes a first insulating region 210, a second insulating region 220, and a third insulating region 230. The dielectric constant of the first insulating region 210 and the third insulating region 230 is the same, the dielectric constant of the second insulating region 220 is different from the dielectric constant of the first insulating region 210, and the second insulating region 220 is located between the first insulating region 210 and the second insulating region 210. Between the three insulating regions 230 . It is easy to understand that since the dielectric constant of the third insulating region 230 is the same as that of the first insulating region 210, the dielectric constant of the second insulating region 220 is also different from that of the third insulating region 230. .

In the embodiment shown in FIG. 3, at least three-domain liquid crystal display can be realized. In a liquid crystal display device, the larger the number of domains, the more effectively the color shift in the liquid crystal display device can be improved.

As a preferred embodiment of the present invention, the area of the second insulating region 220 is half of the area of the pixel unit, and the areas of the first insulating region 210 and the third insulating region 220 are equal.

In the present invention, the dielectric constants of the first insulating region and the second insulating region are different through various implementation methods.

As a preferred embodiment of the present invention, as shown in FIG. 1, in each pixel unit, the first insulating region 210 includes a first bottom insulating layer 210a and a first top insulating layer 210b, and the third insulating The region includes a third bottom insulating layer and a third top insulating layer (not shown), the first bottom insulating layer 210a, the second insulating region 220 and the third bottom insulating layer are integrally formed, and the first top insulating layer 210b The dielectric constant is the same as that of the third top insulating layer, and the top surface of the first top insulating layer 210b, the top surface of the third top insulating layer and the top surface of the second insulating region 220 are even.

The method for forming this embodiment will be described in detail below, and will not be repeated here.

Preferably, the first bottom insulating layer 210a, the second insulating region 220 and the third bottom insulating layer are made of silicon nitride (SiNx), and the first top insulating layer 210b and the third top insulating layer are made of transparent made of resin. Silicon nitride can be formed by chemical vapor deposition, and the transparent resin can be formed by coating. It can be seen that the insulating layer unit in this embodiment can reduce the process cost.

As another embodiment of the present invention, as shown in FIG. 2, the material of the first insulating region 210 is the same as that of the third insulating region, and the material of the first insulating region 210 is different from that of the second insulating region 220. Material.

It should be noted that, in this embodiment, the first insulating region 210 is made of the same material, the third insulating region is made of the same material, and the second insulating region 220 is made of the same material.

Preferably, the first insulating region is made of silicon oxide (SiOx), and the second insulating region is made of silicon nitride (SiNx).

In order to realize liquid crystal display with more domains, preferably, as shown in FIG. 3 , in each pixel unit, the second electrode includes a second left electrode and a second right electrode, and the second left electrode includes There are a plurality of second left electrode strips 310 parallel to each other, and the second right electrode includes a plurality of second right electrode strips 320 parallel to each other. The second left electrode strips 310 and the second right electrode strips 320 have different inclination directions.

Since the inclinations of the second left electrode strip 310 and the second right electrode strip 320 are different, the electric field generated between the second left electrode and the common electrode and the first electrode and the electric field generated between the second right electrode and the first electrode different. In addition, the dielectric constants of the insulating regions are different, so more domains can be displayed.

In order to facilitate manufacturing and reference and make the electric field generated in the pixel unit more uniform, preferably, the second left electrode and the second right electrode are mirror-symmetrical about the centerline M of the pixel unit. As shown in FIG. 3 , the middle line M divides the length direction of the pixel unit into two parts. The included angle between the second left electrode strip 310 and the midline M is α, and the included angle between the second right electrode strip 320 and the midline M is also α. Preferably, 7°≤α≤11°.

As shown in FIG. 3, a part of the second left electrode is located on the first insulating region 210, another part of the second left electrode is located on the second insulating region 220, and a part of the second right electrode is located on the second insulating region 220, Another part of the second right electrode is located on the third insulating region 230, therefore, the display device shown in FIG. 3 can realize four-domain liquid crystal display.

The sectional views shown in FIGS. 1 and 2 are A-A sectional views of the pixel unit shown in FIG. 3 .

As shown in FIG. 4 , when the display panel is in the off state, the liquid crystal molecules are not deflected.

As shown in FIG. 5 , when the display panel is in an on state, four electric fields with different intensities are formed in one pixel unit. The electric field generated between the part of the second left electrode on the first insulating region and the first electrode is E1, the electric field generated between the part of the second left electrode on the second insulating region and the first electrode is E2, and the second The electric field generated between the part of the right electrode on the second insulating region and the first electrode is E3, and the electric field generated between the part of the second right electrode on the third insulating region and the first electrode is E4. Therefore, the deflection direction of a group of liquid crystal molecules 410 corresponding to the electric field E1, the deflection direction of a group of liquid crystal molecules 420 corresponding to the electric field E2, the deflection direction of a group of liquid crystal molecules 430 corresponding to the electric field E3, and the deflection direction of a group of liquid crystal molecules 430 corresponding to the electric field E4 The deflection directions are different from each other, that is, when the display panel is in the on state, the liquid crystal molecules in one pixel unit have four deflection directions, that is, four-domain display can be realized.

Usually, the first electrode 100 is a bulk electrode.

In the present invention, the first electrode may be a common electrode, and the second electrode may be a pixel electrode.

As another aspect of the present invention, a display panel is provided, and the display panel includes an array substrate, wherein the array substrate is the above-mentioned array substrate provided by the present invention.

Since the manufacturing process of the array substrate is simple and the cost is low, a multi-domain display panel has been obtained by using a simple manufacturing process.

As yet another aspect of the present invention, a display device is provided, and the display device includes a display panel, wherein the display panel is the above-mentioned display panel provided by the present invention.

The display device may be a display device such as a mobile phone, a computer, or a television.

As yet another aspect of the present invention, a method for manufacturing an array substrate is provided, the array substrate is divided into a plurality of pixel units, wherein the method for manufacturing includes:

forming a first electrode layer, the first electrode layer including a first electrode disposed in each of the pixel units;

forming an insulating layer, the insulating layer covers the first electrode layer, and the insulating layer includes an insulating layer unit covering the surface of each of the first electrodes, and in each of the pixel units, the insulating layer a cell comprising a plurality of insulating regions, at least one of said insulating regions having a different dielectric constant than the other said insulating regions;

A second electrode layer is formed, the second electrode layer including a second electrode disposed on the insulating layer unit.

Compared with forming electrode strips with various inclination directions, the process of forming an insulating layer unit with multiple insulating regions is simpler.

As mentioned above, in each of the pixel units, the insulating layer unit includes a first insulating region, a second insulating region and a third insulating region, and the insulating region between the first insulating region and the third insulating region The dielectric constants are the same, the dielectric constant of the second insulating region is different from that of the first insulating region, and the second insulating region is located between the first insulating region and the third insulating region.

As mentioned above, as an embodiment of the present invention, the area of the second insulating region is half of the area of the pixel unit, and the areas of the first insulating region and the third insulating region are equal.

In order to realize the embodiment shown in FIG. 1, preferably, the step of forming the insulating layer includes:

forming a bottom insulating material layer, in each of the pixel units, the bottom insulating material layer includes a first bottom insulating layer, a second insulating region and a third bottom insulating layer;

forming a top insulating material layer, the top insulating material layer including a top insulating material unit arranged in each of the pixel units, the top insulating material unit including a first top insulating material layer arranged on the first bottom insulating material layer an insulating material layer and a third top insulating material layer disposed on the third bottom insulating layer, the dielectric constant of the first top insulating layer is the same as that of the third top insulating layer, and the first top insulating layer A top surface of a top insulating layer, a top surface of the third top insulating layer, and a top surface of the second insulating region are flush.

In the present invention, the bottom insulating material layer may be formed by a dry etching process. Specifically, a layer of bottom insulating material is first formed; a mask layer is formed on the bottom insulating material, and through holes are respectively formed on the mask layer corresponding to the positions of the first bottom insulating layer and the second bottom insulating layer; the access process gas, and the first bottom insulating layer, the second insulating region and the third bottom insulating layer can be formed by controlling the duration of feeding the process gas.

Preferably, the bottom insulating material layer is made of silicon nitride, and the top insulating material layer is made of transparent resin.

In order to form the embodiment shown in FIG. 2, preferably, the step of forming the insulating layer includes:

forming a first insulating material layer;

A first through hole corresponding to the position of the first insulating region is formed on the first insulating layer, and a third through hole is formed on the first insulating layer corresponding to the position of the third insulating region, thereby utilizing the first The insulating layer forms a second insulating region;

The first insulating region is formed in the first through hole, and the third insulating region is formed in the third through hole.

The first through hole and the third through hole may also be formed by a dry etching process. The specific process is similar to the process of forming the first bottom insulating layer, the second insulating region and the third bottom insulating layer above, and will not be repeated here.

Preferably, the first insulating region is made of silicon oxide, and the second insulating region is made of silicon nitride.

As mentioned above, preferably, in each of the pixel units, the second electrode includes a second left electrode and a second right electrode, and the second left electrode includes a plurality of parallel second left electrode strips , the second right electrode includes a plurality of second right electrode strips parallel to each other, and the second left electrode strips and the second right electrode strips have different inclination directions.

As mentioned above, preferably, the second left electrode and the second right electrode are mirror-symmetrical about the center line of the pixel unit, the center line divides the pixel unit into two parts along the length direction, and the first The angle between the two left electrode strips and the midline is 7° to 11°. It is easy to understand that since the second left electrode and the second right electrode are mirror-symmetrical with respect to the center line of the pixel unit, the angle between the second left electrode strip and the center line is the same as that of the second right electrode The angles between the bars and the midline are equal in size.

As mentioned above, preferably, the first electrode is a bulk electrode.

In the present invention, the first electrode and the second electrode can be formed using the same patterning process as the conventional patterning process.

It can be understood that, the above embodiments are only exemplary embodiments adopted for illustrating the principle of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also regarded as the protection scope of the present invention.

Claims (14)

1. An array substrate, the array substrate is divided into a plurality of pixel units, the array substrate includes a first electrode layer, an insulating layer covering the first electrode layer, and a second electrode formed on the insulating layer layer, the first electrode layer includes a first electrode arranged in each of the pixel units, the insulating layer includes an insulating layer unit covering the surface of each of the first electrodes, and the second electrode layer includes The second electrode arranged above the insulating layer unit is characterized in that, in each of the pixel units, the insulating layer unit includes a plurality of insulating regions, and at least one of the insulating regions has a dielectric constant different from that of the other the dielectric constant of the insulating region; In each pixel unit, the insulating layer unit includes a first insulating region, a second insulating region and a third insulating region, the first insulating region and the third insulating region have the same dielectric constant, so The dielectric constant of the second insulating region is different from that of the first insulating region, and the second insulating region is located between the first insulating region and the third insulating region; In each pixel unit, the first insulating region includes a first bottom insulating layer and a first top insulating layer, the third insulating region includes a third bottom insulating layer and a third top insulating layer, and the first insulating layer includes a third bottom insulating layer and a third top insulating layer. A bottom insulating layer, the second insulating region, and the third bottom insulating layer are integrated, the dielectric constant of the first top insulating layer is the same as that of the third top insulating layer, and the dielectric constant of the first top insulating layer is the same as that of the third top insulating layer. A top surface of the first top insulating layer, a top surface of the third top insulating layer, and a top surface of the second insulating region are flush. 2 . The array substrate according to claim 1 , wherein the area of the second insulating region is half of the area of the pixel unit, and the areas of the first insulating region and the third insulating region are equal. 3. The array substrate according to claim 1, wherein the first bottom insulating layer, the second insulating region and the third bottom insulating layer are made of silicon nitride, and the first The top insulating layer and the third top insulating layer are made of transparent resin. 4. The array substrate according to any one of claims 2 to 3, wherein in each of the pixel units, the second electrode comprises a second left electrode and a second right electrode, and the first The two left electrodes include a plurality of second left electrode strips parallel to each other, the second right electrode includes a plurality of second right electrode strips parallel to each other, and the inclination of the second left electrode strips and the second right electrode strips The direction is different. 5. The array substrate according to claim 4, wherein the second left electrode and the second right electrode are mirror-symmetrical about the center line of the pixel unit, and the center line connects the pixel unit along the length direction Divided into two parts, the angle between the second left electrode strip and the midline is 7° to 11°. 6. The array substrate according to claim 4, wherein the first electrode is a bulk electrode. 7. A display panel, comprising an array substrate, wherein the array substrate is the array substrate according to any one of claims 1-6. 8. A display device, comprising a display panel, wherein the display panel is the display panel according to claim 7. 9. A manufacturing method of an array substrate, the array substrate being divided into a plurality of pixel units, characterized in that the manufacturing method comprises: forming a first electrode layer, the first electrode layer including a first electrode disposed in each of the pixel units; forming an insulating layer, the insulating layer covers the first electrode layer, and the insulating layer includes an insulating layer unit covering the surface of each of the first electrodes, and in each of the pixel units, the insulating layer a cell comprising a plurality of insulating regions, at least one of said insulating regions having a different dielectric constant than the other said insulating regions; forming a second electrode layer, the second electrode layer including a second electrode disposed on the insulating layer unit; In each pixel unit, the insulating layer unit includes a first insulating region, a second insulating region and a third insulating region, the first insulating region and the third insulating region have the same dielectric constant, so The dielectric constant of the second insulating region is different from that of the first insulating region, and the second insulating region is located between the first insulating region and the third insulating region; The steps of forming the insulating layer include: forming a bottom insulating material layer, in each of the pixel units, the bottom insulating material layer includes a first bottom insulating layer, a second insulating region and a third bottom insulating layer; forming a top insulating material layer, the top insulating material layer including a top insulating material unit arranged in each of the pixel units, the top insulating material unit including a first top insulating material layer arranged on the first bottom insulating material layer an insulating material layer and a third top insulating material layer disposed on the third bottom insulating layer, the dielectric constant of the first top insulating layer is the same as that of the third top insulating layer, and the first top insulating layer A top surface of a top insulating layer, a top surface of the third top insulating layer, and a top surface of the second insulating region are flush. 10. The manufacturing method according to claim 9, wherein the area of the second insulating region is half of the area of the pixel unit, and the areas of the first insulating region and the third insulating region are equal. 11. The manufacturing method according to claim 9, wherein the bottom insulating material layer is made of silicon nitride, and the top insulating material layer is made of transparent resin. 12. The manufacturing method according to any one of claims 9-11, characterized in that, in each of the pixel units, the second electrode includes a second left electrode and a second right electrode, and the first The two left electrodes include a plurality of second left electrode strips parallel to each other, the second right electrode includes a plurality of second right electrode strips parallel to each other, the inclination of the second left electrode strips and the second right electrode strips The direction is different. 13. The manufacturing method according to claim 12, wherein the second left electrode and the second right electrode are mirror-symmetrical about the center line of the pixel unit, and the center line divides the pixel unit along the length direction Divided into two parts, the included angle between the second left electrode strip and the midline is 7° to 11°. 14. The manufacturing method according to claim 12, wherein the first electrode is a bulk electrode.