CN104722866B - A kind of real-time optimal-search control system of ULTRASONIC COMPLEX EDM Technology and its control method - Google Patents

Abstract

The invention discloses a real-time optimization control system and a control method of an ultrasonic composite electrical processing technology. The ultrasonic power supply is respectively connected to a current sensor and a transducer, a computer is connected to a synchronous data acquisition card, and the synchronous data acquisition card collects current sensors, voltage sensors, and current sensors. 1. The processing parameter data of the processed workpiece collected by the laser micro-displacement sensor probe. The processed workpiece is placed on the magnetic levitation workbench, the tool electrode is fixed on the lower end surface of the horn, the upper end of the horn is connected to the transducer, and the positive pole of the pulse power supply is connected synchronously. Chopper, the synchronous chopper receives the chopping control signal given by the laser micro-displacement sensor controller, the synchronous chopper is connected to the workpiece to be processed, the working fluid is filled between the workpiece and the electrode, and the electrode is connected to the current sensor through the current limiting resistor. The current sensor is connected to the negative electrode of the pulse power supply, and the voltage sensor is connected to the output terminal of the pulse power supply. The beneficial effect of the invention is that vibration displacement, temperature and voltage state parameters can be obtained in real time.

Description

A real-time optimization control system and control method of ultrasonic composite electric machining technology

technical field

The invention belongs to the technical field of composite precision and micro special processing, and relates to a real-time optimization control system and a control method of ultrasonic composite electric processing technology.

Background technique

Difficult-to-machine materials (such as electronic ceramics, high-temperature alloys, hard alloys, etc.), special-shaped surfaces (such as three-dimensional curved surfaces, special-shaped holes, etc.) Technology and engineering are applied to an integrated science and technology system, which has become a research hotspot in manufacturing science and an important means for the competing research and development of various technologies.

Due to the special mechanical properties (high hardness, high strength, high brittleness, etc.) and special geometric characteristics of difficult-to-machine materials and special-shaped parts, ordinary machining and CNC cutting are not economical and effective methods. Ultrasonic composite electrical machining technology uses ultrasonic The organic combination of cavitation, pump suction, eddy current action, micro-spark discharge, electrochemical action and other effects of high-frequency vibration, instead of cutting with hard tools, can effectively solve the problem of micro-finishing of difficult-to-machine materials and parts with special-shaped surfaces, and It has the advantages of small processing cutting force, cutting heat and deformation, low (or none) tool loss.

In the practice of ultrasonic composite electrical machining, due to the complex and changeable physical and chemical processes between electrodes, it is difficult to maintain the stability of the machining process when the machining depth and area increase. will decrease. Aiming at the existing problems in the ultrasonic composite electrical machining method, through online modulation of electromechanical parameters, the relationship between ultrasonic, discharge and electrolysis energy is changed, and the influence of each effect on the machining process and its mutual synergistic mechanism are studied to establish and maintain the stability of the machining process. The mathematical model of the synergistic effect of various effects, and the development of an ultrasonic composite electric machining control system that can measure online and control processing parameters in real time, maintain the continuous stability and optimization of the processing process, and realize efficient and fine processing of materials with various physical characteristics.

Contents of the invention

The purpose of the present invention is to provide a real-time optimization control system for processing parameters of ultrasonic composite electric processing technology, which solves the problem that in the processing process, as the processing depth and area increase, the stability of the processing process is difficult to maintain continuously, and the processing efficiency and precision drop problem.

Another object of the present invention is to provide a control method for a real-time optimization control system of ultrasonic composite electrical machining technology.

The real-time optimization control system of the ultrasonic composite electrical processing technology of the present invention includes an ultrasonic power supply, an ultrasonic vibration system, a pulse power supply, a synchronous chopper, a processing platform, a data acquisition system, a control computer, an output interface D\A, and a power amplifier circuit. The ultrasonic vibration system includes an ultrasonic transducer, a horn, and a tool head. The processing platform includes a magnetic levitation workbench and a base. The data acquisition system includes a sensor, a signal conditioning circuit, and a synchronous data acquisition card. The ultrasonic power supply is respectively connected to the current sensor and transducer of the ultrasonic power supply, the temperature sensor and the conductivity sensor probe are placed in the working fluid, the voltage sensor is respectively connected to the processing workpiece and the tool electrode, and the displacement sensor measures the displacement of the magnetic levitation table (that is, the processing depth). The workbench is fixed on the base, the workpiece to be processed is installed and positioned on the magnetic levitation workbench, the tool electrode is fixed on the lower end of the horn, the upper end of the horn is connected to the transducer, and the measuring head of the laser micro-displacement sensor measures the lower end of the horn in real time Vibration displacement, the output signal cable is connected to the laser micro-displacement sensor controller, the positive pole of the pulse power supply is connected to the synchronous chopper, and the synchronous chopper receives the chopping control signal given by the laser micro-displacement sensor controller, and the synchronous chopper is connected by The workpiece is processed, the working fluid is filled between the workpiece and the electrode, the electrode is connected to the current sensor through the current limiting resistor, the current sensor is connected to the negative electrode of the pulse power supply, and the voltage sensor is connected to the output end of the pulse power supply; the input end of the signal conditioning circuit is respectively connected to the current sensor of the ultrasonic power supply and the pulse power supply Voltage sensor, current sensor, laser micro-displacement sensor controller, temperature sensor, conductivity sensor, voltage sensor, displacement sensor, the output end is connected to the synchronous data acquisition card, and the synchronous data acquisition card is connected to the control computer through the PCI interface; the control computer is connected to The output interface D\A, the input terminal of the power amplifier circuit is connected to the output interface D\A, the output terminal of the power amplifier circuit is connected to the ultrasonic power supply and the pulse power supply, and the control computer is connected to the laser micro-displacement sensor controller through a USB interface cable.

Further, the transducer is a piezoelectric ultrasonic transducer.

Further, the pulse power supply is a high-frequency pulse power supply (frequency up to 100KHz).

A control method for a real-time optimization control system of ultrasonic composite electrical machining technology:

Step 1: Select the initial processing parameters, apply a constant contact pressure of 0.10N to 5.0N between the workpiece and the tool electrode, and select fine nano-scale particles mixed with powder, and the particle size is 30-100 nanometers;

Step 2: Collection of machining process parameters, the main influencing factors of the effect of ultrasonic composite electrical machining: ultrasonic vibration parameters (amplitude A, frequency f, power W), electrical parameters of the machining process (peak voltage U, peak current I, pulse duty cycle D, Pulse frequency f _v , charging gap △, inter-electrode voltage u, inter-electrode current i), temperature t, conductivity σ, process index parameters include processing speed v, processing accuracy δ, surface roughness Ra;

For the measurement of the ultrasonic amplitude A, the laser micro-displacement sensor measuring head is used to measure the lower end surface of the horn, and the ultrasonic frequency f can be obtained by processing the measured vibration waveform through the computer; the ultrasonic power W can be obtained from the ultrasonic power supply by the current sensor Characterized by electrical signal; measurement of peak voltage U: select the pulse power supply voltage sensor to connect to the output end of the pulse power supply, and can measure the output peak voltage during processing, and process the pulse voltage U to obtain the pulse duty ratio D and pulse frequency f _v ; For the inter-electrode voltage u, use a voltage sensor to connect the tool electrode and the workpiece to measure the inter-electrode voltage value during processing; for the inter-electrode current i, use a current sensor to connect to the pulse power circuit to measure the real-time processing current between the electrodes ; For the temperature t, use a thermocouple temperature sensor to detect the temperature of the working fluid in real time; for the conductivity σ, use a conductivity sensor to detect the working fluid; for the processing speed v, use a displacement sensor to detect the displacement of the magnetic levitation table, and process it through the control software Obtain the processing speed v, connect the output terminal of the above-mentioned sensor to the signal conditioning circuit, filter and amplify the collected signal, send it to the synchronous data acquisition card, and then transmit it to the control computer in real time through the PCI bus;

Step 3: Data analysis and processing. The control software located in the computer analyzes the collected data, judges the processing status, and calculates the optimal processing parameters. For the energy density of the three effects of ultrasound, discharge, and electrolysis, there are the following relationships:

J _USM (t)＝1/2·ρ·c·(ωA) ² ∝K _USM [A(t)/T(t)] ² , where: J _USM is the real-time ultrasonic energy density, K _USM is the working Medium density ρ, ultrasonic propagation velocity c correlation coefficient, ω is ultrasonic vibration circular frequency, A is ultrasonic amplitude, T(t) is vibration period;

J _EDM (t)∝K _EDM u(t) i'(t), where J _EDM is the real-time micro-spark discharge energy density, K _EDM is the discharge coefficient, which is related to the working fluid, workpiece and electrode material, It is related to the energized state between electrodes, and i′(t) is the micro-spark discharge current waveform;

J _ECM (t)∝K _ECM u(t) i(t), where J _ECM is the energy density of real-time electrolysis, K _ECM is the electrolysis coefficient, which is related to the working fluid, workpiece and electrode material, etc., i( t) is the electrolytic current waveform between electrodes;

Ultrasonic modulation discharge-electrolytic composite machining process parameters: composite electrical machining accuracy δ, surface roughness Ra, and processing efficiency v, which can be described by three functional formulas: δ=f _δ [i(t), u(t), Δ(t)], v=H/t=f _v [i(t), u(t)], R _a = f _Ra [i(t), u(t)], where f _δ , f _v and f _Ra respectively represent the processing accuracy function, processing efficiency function, and surface roughness relationship function. According to the processing process parameters corresponding to the processing effect matching relationship, the ultrasonic, discharge, and electrolytic effects are adjusted online to meet the required process requirements;

Step 4: Adjustment of processing parameters, obtain parameter adjustment instructions according to processing status, adjust ultrasonic power supply and pulse power supply, change ultrasonic frequency f, power W, peak voltage U, pulse frequency f _v , pulse duty cycle D; laser micro The displacement sensor is connected to the control computer through the USB serial port, and the threshold value of the tolerance comparator is set through the control software, thereby changing the power-on gap △.

The beneficial effects of the present invention are as follows: the matching of processing parameters is determined by the usual test analysis method, the proportional relationship of multi-effect synergy is difficult to achieve reasonable optimization, the stability and optimization of the processing process are difficult to realize, and the actual processing process often stagnates, requiring manual intervention; The invention can quantitatively understand the various effects of compound processing, and can provide theoretical basis and control means for stable processing and continuous optimization of processing; create an online parameter real-time optimization system, which can track the change of processing parameters in time and adjust system parameters to achieve Real-time optimization, to maintain the stability of the processing process, to achieve the goal of high precision machining and efficiency optimization; to change the energy ratio relationship of each composite effect, which can be used for high-precision and stable processing of various physical characteristics materials and complex surface parts (such as: Single ultrasonic processing of insulating materials, combined processing of parts with good conductivity and high productivity requirements).

Description of drawings

Figure 1 is a schematic diagram of the real-time optimization control system of ultrasonic composite electrical machining technology.

In the figure, 1. Power amplifier circuit; 2. Output interface D\A; 3. Control computer; 4. Ultrasonic power supply; 5. Pulse power supply; 6. Synchronous chopper; 7. First current sensor; 8. Pulse power supply voltage Sensor; 9. Second current sensor; 10. Synchronous data acquisition card; 11. Signal conditioning circuit; 12. Current limiting resistor; 13. Laser micro-displacement sensor controller; 14. Base; 15. Magnetic levitation workbench; 16. Laser Micro-displacement sensor measuring head; 17. Transducer; 18. Horn; 19. Temperature sensor; 20. Conductivity sensor; 21. Voltage sensor; 22. Displacement sensor; 23. Processing workpiece; 24. Tool electrode.

detailed description

The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

The control system of the present invention is shown in Figure 1, comprises power amplifier circuit 1, and power amplifier circuit 1 is respectively connected to output interface D\A2, ultrasonic power supply 4, pulse power supply 5, and output interface D\A2 is connected to control computer 3, and control computer 3 is connected via A USB interface cable is connected to the laser micro-displacement sensor controller 13, the ultrasonic power supply 4 is respectively connected to the second current sensor 9 and the transducer 17, the control computer 3 is connected to the synchronous data acquisition card 10, and the synchronous data acquisition card 10 is connected to the signal conditioning The circuit 11 and the signal conditioning circuit 11 are respectively connected to the second current sensor 9, the pulse power supply voltage sensor 8, the laser micro-displacement sensor controller 13, the temperature sensor 19, the conductivity sensor 20, the voltage sensor 21, the displacement sensor 22 and the first current sensor 7. Among them, the temperature sensor 19 and the conductivity sensor 20 probes are placed in the working fluid, the voltage sensor 21 is respectively connected to the workpiece 23 and the tool electrode 24, the displacement sensor 22 is placed under the magnetic levitation worktable 15, and the magnetic levitation workbench 15 is fixed on the base 14, the workpiece 23 is placed on the magnetic levitation workbench 15, the tool electrode 24 is fixed on the lower end surface of the horn 18, the upper end of the horn 18 is connected to the transducer 17, and the measuring head 16 of the laser micro-displacement sensor is placed on the horn 18 Below the end face, its output cable is connected to the laser micro-displacement sensor controller 13, the positive pole of the pulse power supply 5 is connected to the synchronous chopper 6, and the synchronous chopper 6 is respectively connected to the laser micro-displacement sensor controller 13 and the workpiece 23 to be processed. The current sensor 7 is connected to the tool electrode 24 through the current limiting resistor 12 , the negative pole of the pulse power supply 5 is connected to the first current sensor 7 , and the pulse power supply 5 is also connected to the pulse power supply voltage sensor 8 . The transducer 17 is a piezoelectric transducer. The pulse power supply 5 is a high-frequency pulse power supply.

Among them, the ultrasonic power supply 4 generates high-frequency alternating current, causing the piezoelectric ceramics in the transducer 17 to vibrate at high frequency, amplified by the horn 18, and driving the tool electrode 24 to vibrate at high frequency, and the second current sensor 9 measures the ultrasonic power The current of 4 is used to represent the ultrasonic power; the pulse power supply 5 generates high-frequency pulse current, which is modulated and chopped by the synchronous chopper 6 to perform electrolytic processing, the voltage sensor 8 measures the peak voltage of the pulse power supply, and the first current sensor 7 measures the processing The inter-electrode current at the time; the laser micro-displacement sensor 16 measures the vibration amplitude of the lower end surface of the horn 18, and relies on the threshold value set in the tolerance comparator to output the chopping level to control the breaking of the synchronous chopping circuit; the displacement sensor 22 Detect the rising displacement of the magnetic levitation workbench 15, which is processed by the computer 3 and converted into a processing speed; the temperature sensor 19 measures the temperature change of the working fluid; the conductivity sensor 20 measures the conductivity value of the working fluid; the voltage sensor 21 measures the inter-electrode voltage during processing The signal conditioning circuit 11 is connected to each sensor, and the processing parameters are filtered and amplified, and then collected and converted into digital quantities recognizable by the computer 3 through the synchronous data acquisition card 10. The control computer 3 is connected with the synchronous data acquisition card 10 via the PCI bus, analyzes and processes the collected data, obtains the optimal processing parameter sequence, regulates the power controller, and changes the ultrasonic frequency, power, peak voltage, pulse duty cycle, and pulse frequency .

The control computer 3 relies on the control program to analyze and judge the processing state of the collected data. When the processing state changes, such as the speed drops, it adjusts the corresponding influencing parameters (power, peak voltage) to maintain the optimal processing state. The control computer 3 transmits the parameter change instruction to the ultrasonic power supply 4 and the pulse power supply 5 through the output interface 2 and the power amplifier circuit 1 to regulate the power and voltage. The control computer 3 can set the threshold value of the laser micro displacement sensor controller 13 to change the power-on gap .

A real-time optimization control method for ultrasonic composite electrical machining technology provided by the present invention includes the following steps:

Step 1: Selection of processing initial parameters. Apply a constant contact pressure of 0.10N to 5.0N between the workpiece 23 and the tool electrode 24, and select fine nano-scale particles mixed with powder, the particle size of which is 30-100 nanometers;

Step 2: Collection of machining process parameters, the main influencing factors of the effect of ultrasonic composite electrical machining: ultrasonic vibration parameters (amplitude A, frequency f, power W), electrical parameters of the machining process (peak voltage U, peak current I, pulse duty cycle D, Pulse frequency f _v , charging gap △, inter-electrode voltage u, inter-electrode current i), temperature t, conductivity σ, process index parameters include processing speed v, processing accuracy δ, surface roughness Ra;

For the ultrasonic amplitude A, the laser micro-displacement sensor measuring head 16 is used to measure the lower end face of the horn 18; the ultrasonic power W can be characterized by obtaining the ultrasonic power electric signal from the ultrasonic power supply 4 by the second current sensor 9; the peak voltage U measurement, select The pulse power supply voltage sensor 8 is connected to the output terminal of the pulse power supply 5, and can measure the peak voltage output during processing, and process the pulse voltage U to obtain the pulse duty ratio D and pulse frequency _fv ; for the inter-electrode voltage u, use a voltage sensor 21 Connect the tool electrode 24 and the workpiece 23 to measure the inter-electrode voltage value during processing; for the inter-electrode current i, use the first current sensor 7 to connect in the circuit of the pulse power supply 5, and measure the inter-electrode voltage during processing. current; for the temperature t, the temperature sensor 19 of the thermocouple is used to detect the temperature of the working fluid in real time; for the conductivity σ, the conductivity sensor 20 is used to detect the working fluid; for the processing speed v, the displacement sensor 22 is used to detect the magnetic levitation workbench 15 The rising displacement is processed by the control software to obtain the processing speed v. Connect the above-mentioned sensor output terminal to the signal conditioning circuit 11, filter and amplify the collected signal, send it to the synchronous data acquisition card 10, and then transmit it to the control computer 3 in real time through the PCI bus.

Step 3: Data analysis and processing. The control software located in the computer can analyze the collected data, judge the processing status, and calculate the optimal processing parameters. For the energy density of the three effects of ultrasound, discharge, and electrolysis, it has been verified that there is the following relationship:

J _USM (t)＝1/2·ρ·c·(ωA) ² ∝K _USM [A(t)/T(t)] ² , where: J _USM is the real-time ultrasonic energy density, K _USM is the working Medium density ρ, ultrasonic propagation velocity c correlation coefficient, ω is ultrasonic vibration circular frequency, A is ultrasonic amplitude, T(t) is vibration period;

J _EDM (t)∝K _EDM u(t) i'(t), where J _EDM is the real-time micro-spark discharge energy density, K _EDM is the discharge coefficient, which is related to the working fluid, workpiece and electrode material, It is related to the energized state between electrodes, and i′(t) is the micro-spark discharge current waveform;

J _ECM (t)∝K _ECM u(t) i(t), where: J _ECM is the real-time electrolysis energy density, K _ECM is the electrolysis coefficient, which is related to the working fluid, workpiece and electrode material, etc., i( t) is the electrolytic current waveform between electrodes.

The control system can realize online adjustment and distribution of the proportional relationship of the three kinds of energy based on the energy density relationship of the three effects of ultrasound, discharge and electrolysis.

Ultrasonic composite electrical machining process parameters: composite electrical machining accuracy δ, surface roughness Ra, and processing efficiency v, which can be described by three functional expressions: δ=f _δ [i(t), u(t), Δ(t )], v=H/t=f _v [i(t), u(t)], R _a =f _Ra [i(t), u(t)], where f _δ , f _v , f _Ra represents the machining accuracy function, machining efficiency function, and surface roughness relationship function respectively. According to the machining process parameters corresponding to the machining effect matching relationship, the ultrasonic, discharge, and electrolytic effects are adjusted online to meet the required process requirements.

Step 4: Controlling of process parameters. In the process of ultrasonic composite electric machining, the adjustable parameters are: ultrasonic frequency f, power W, peak voltage U, pulse frequency f _v , pulse duty cycle D, and charging gap △. After the analysis of the control software, the parameter adjustment instructions are obtained according to the processing status, and the power controller is controlled to adjust the ultrasonic power supply and pulse power supply, change the frequency f, power W, peak voltage U, pulse frequency f _v , pulse duty cycle D; laser The micro-displacement sensor is connected to the control computer via the USB serial port, and the threshold value of the tolerance comparator can be set through the control software, thereby changing the power-on gap △.

The primary condition for ultrasonic composite electrical machining is to maintain the resonance of the vibration system. For different types of ultrasonic frequency vibration devices (horn, transducer and tool head), there is an optimal resonance point, so that the vibration device can be at the resonance frequency The amplitude is maximum at f ₀ . During the processing, the ultrasonic frequency f is adjusted by detecting the amplitude of the end face of the horn, and the frequency that can produce the maximum amplitude value under the voltage condition is found. After the system reaches resonance, different control strategies are adopted according to whether the material is conductive or not.

For non-conductive materials, turn off the pulse power supply and use single ultrasonic processing. During the processing, according to the preset processing speed v ₀ , the processing speed is kept stable by adjusting the ultrasonic power W.

For conductive materials, ultrasonic composite electric machining is adopted, and the principle is to optimize efficiency while ensuring machining accuracy. In the process of processing, when the speed drops, you can increase the ultrasonic power W, increase the pulse power supply voltage U, increase the pulse frequency f _v , and set a higher threshold value of the laser displacement sensor to achieve a large charging gap △ , increase the energy of ultrasound, discharge, and electrolysis, and also change the matching relationship between ultrasound, discharge, and electrolysis to increase the processing speed.

During processing, the collection, evaluation, and adjustment of processing parameters by the system is a cyclic process, and the processing state is kept optimal in the dynamic state. Ultrasonic composite electrical machining is an organic combination of the three effects of ultrasonic, electric discharge, and electrolysis. In actual machining, reasonable selection and setting of machining parameters can obtain a certain machining rate while ensuring high machining accuracy requirements. When the workpiece is processed to a predetermined depth, turn off the pulse power supply and the ultrasonic power supply in turn to stop processing.

The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Any simple modifications made to the above embodiments according to the technical essence of the present invention, equivalent changes and modifications, all belong to this invention. within the scope of the technical solution of the invention.

Claims (4)

1. A real-time optimization control system for ultrasonic composite electrical machining technology, characterized in that: it comprises a power amplifier circuit (1), and the power amplifier circuit (1) is connected to output interface D\A (2), ultrasonic power supply (4), pulse power supply respectively (5), the output interface D\A (2) is connected to the control computer (3), and the control computer (3) is connected to the laser micro-displacement sensor controller (13) through a USB interface cable, and the ultrasonic power supply (4) is respectively Connect the second current sensor (9) and the transducer (17), the control computer (3) connects the synchronous data acquisition card (10), the synchronous data acquisition card (10) connects the signal conditioning circuit (11), the signal conditioning circuit (11 ) are respectively connected to the second current sensor (9), pulse power supply voltage sensor (8), laser micro-displacement sensor controller (13), temperature sensor (19), conductivity sensor (20), voltage sensor (21), displacement sensor (22) and the first current sensor (7), wherein, the temperature sensor (19) and the conductivity sensor (20) probe are placed in the working fluid, and the voltage sensor (21) is respectively connected to the workpiece (23) and the tool electrode (24 ), the displacement sensor (22) is placed under the magnetic levitation worktable (15), the magnetic levitation workbench (15) is fixed on the base (14), the workpiece (23) is placed on the magnetic levitation workbench (15), and the tool electrode (24 ) is fixed on the lower end surface of the horn (18), the upper end of the horn (18) is connected to the transducer (17), the measuring head of the laser micro-displacement sensor (16) is placed under the end face of the horn (18), and its output line The cable is connected to the laser micro-displacement sensor controller (13), the positive pole of the pulse power supply (5) is connected to the synchronous chopper (6), and the synchronous chopper (6) is respectively connected to the laser micro-displacement sensor controller (13) and the workpiece to be processed (23), the first current sensor (7) connects the tool electrode (24) by the current limiting resistor (12), the negative pole of the pulse power supply (5) connects the first current sensor (7), and the pulse power supply (5) also connects the pulse power supply Voltage sensor (8). 2. A real-time optimization control system for ultrasonic composite electric processing technology according to claim 1, characterized in that: the transducer (17) is a piezoelectric transducer. 3. A real-time optimization control system for ultrasonic composite electric processing technology according to claim 1, characterized in that: the pulse power supply (5) is a high-frequency pulse power supply. 4. according to the control method of a kind of ultrasonic composite electrical machining technology real-time optimization control system according to claim 1, it is characterized in that: Step 1: Selecting the initial processing parameters, applying a constant contact pressure of 0.10N to 5.0N between the workpiece (23) and the tool electrode (24), and selecting fine and nano-scale doped powder with a particle size of 30-100 nanometers; Step 2: Collection of machining process parameters, the main influencing factors of the effect of ultrasonic composite electrical machining: ultrasonic vibration parameters (amplitude A, frequency f, power W), electrical parameters of the machining process (peak voltage U, peak current I, pulse duty cycle D, Pulse frequency f _v , charging gap △, inter-electrode voltage u, inter-electrode current i), temperature t, conductivity σ, process index parameters include processing speed v, processing accuracy δ, surface roughness Ra; For the measurement of the ultrasonic amplitude A, the laser micro-displacement sensor measuring head (16) is used to measure the lower end surface of the horn (18), and the ultrasonic frequency f can be obtained by processing the measured vibration waveform through the computer (3); The power W can be characterized by obtaining the ultrasonic power electric signal from the ultrasonic power supply (4) by the second current sensor (9); for the measurement of the peak voltage U, the pulse power supply voltage sensor (8) is selected to be connected to the output terminal of the pulse power supply (5). The peak voltage output during processing is obtained, and the pulse duty ratio D and pulse frequency f _v obtained by processing the pulse voltage U are obtained; for the inter-electrode voltage u, a voltage sensor (21) is used to connect the tool electrode (24) and the workpiece (23) , to measure the inter-electrode voltage value during processing; for the inter-electrode current i, use the first current sensor (7) to connect the pulse power supply (5) circuit, and measure the real-time processing current between the electrodes; for the temperature t, select the thermocouple temperature The sensor (19) detects the temperature of the working fluid in real time; for the conductivity σ, the conductivity sensor (20) is used to detect the working fluid; for the processing speed v, the displacement sensor (22) is used to detect the rising displacement of the magnetic levitation workbench (15), After processing by the control software, the processing speed v is obtained, and the output terminal of the above-mentioned sensor is connected to the signal conditioning circuit (11), and the collected signal is filtered and amplified, and then sent to the synchronous data acquisition card (10), and then transmitted to the control panel in real time via the PCI bus. computer (3); Step 3: Data analysis and processing. The control software located in the computer analyzes the collected data, judges the processing status, and calculates the optimal processing parameters. For the energy density of the three effects of ultrasound, discharge, and electrolysis, there are the following relationships: J _USM (t)＝1/2·ρ·c·(ωA) ² ∝K _USM [A(t)/T(t)] ² , where: J _USM is the real-time ultrasonic energy density, K _USM is the working Medium density ρ, ultrasonic propagation velocity c correlation coefficient, ω is ultrasonic vibration circular frequency, A is ultrasonic amplitude, T(t) is vibration period; J _EDM (t)∝K _EDM u(t) i'(t), where J _EDM is the real-time micro-spark discharge energy density, K _EDM is the discharge coefficient, which is related to the working fluid, workpiece and electrode material, It is related to the energized state between electrodes, and i′(t) is the micro-spark discharge current waveform; J _ECM (t)∝K _ECM u(t) i(t), where J _ECM is the energy density of real-time electrolysis, K _ECM is the electrolysis coefficient, which is related to the working fluid, workpiece and electrode material, etc., i( t) is the electrolytic current waveform between electrodes; Ultrasonic modulation discharge-electrolytic composite machining process parameters: composite electrical machining accuracy δ, surface roughness Ra, and processing efficiency v, which can be described by three functional formulas: δ=f _δ [i(t), u(t), Δ(t)], v=H/t=f _v [i(t), u(t)], R _a = f _Ra [i(t), u(t)], where f _δ , f _v and f _Ra respectively represent the processing accuracy function, processing efficiency function, and surface roughness relationship function. According to the processing process parameters corresponding to the processing effect matching relationship, the ultrasonic, discharge, and electrolytic effects are adjusted online to meet the required process requirements; Step 4: Control of processing parameters, obtain parameter adjustment instructions according to processing status, adjust ultrasonic power supply (4) and pulse power supply (5), change ultrasonic frequency f, power W, peak voltage U, pulse frequency fv, and pulse duty Ratio D; the laser micro-displacement sensor is connected to the control computer (3) via the USB serial port, and the threshold value of the tolerance comparator is set through the control software, thereby changing the power-on gap △.