CN104697555A - Magnetic sensor device, magnetic encoder device, and magnetic sensor - Google Patents
Magnetic sensor device, magnetic encoder device, and magnetic sensor Download PDFInfo
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- CN104697555A CN104697555A CN201410717574.0A CN201410717574A CN104697555A CN 104697555 A CN104697555 A CN 104697555A CN 201410717574 A CN201410717574 A CN 201410717574A CN 104697555 A CN104697555 A CN 104697555A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2451—Incremental encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/24485—Error correction using other sensors
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Abstract
Provided are a magnetic sensor device, a magnetic encoder device, and a magnetic sensor, whereby mutual magnetic interference between magnetoresistive elements adjacent to each other can be reduced even in the cases where a plurality of magnetoresistive elements are disposed in parallel to each other. Specifically, in the magnetic sensor device and a linear encoder device, a magnetic sensor (20) has disposed therein a plurality of magnetoresistive elements (R1-R4, R11-R14) along the relative moving direction with respect to a magnetic medium (9), and influence of harmonic components is effectively reduced by means of the magnetoresistive elements (R1-R4, R11-R14). A distance (d) between adjacent magnetoresistive elements among the magnetoresistive elements (R1-R4, R11-R14) is equal to or more than a width dimension (w) of the magnetoresistive elements. Consequently, mutual magnetic interference between the adjacent magnetoresistive elements can be reduced.
Description
Technical field
The present invention relates to magnet sensor arrangement, use the magnetic encoder apparatus of this magnet sensor arrangement and Magnetic Sensor.
Background technology
The magnet sensor arrangement used in magnetic encoder apparatus etc. has magnetic medium and the Magnetic Sensor relative with magnetic medium, and the changes of magnetic field that Magnetic Sensor produces the relative movement along with itself and magnetic medium detects.In above-mentioned magnet sensor arrangement, the magnetoresistance that the change of the internal resistance and magnetic field that make use of the magnetoresistive element being located at Magnetic Sensor changes accordingly.More specifically, along with the relative movement of magnetic medium and Magnetic Sensor, the relative position of COS signal to magnetic medium and Magnetic Sensor that the SIN signal exported according to the magnetoresistive element from A phase and the magnetoresistive element from B phase export detects.Now, the COS signal distributions that the SIN signal exported from the magnetoresistive element of A phase and the magnetoresistive element from B phase export is that to involve cosine wave (CW) be ideal to sine, but above-mentioned output signal is generally made up of fundametal compoment and the harmonic component overlapping with this fundametal compoment.
Therefore, have and a kind ofly multiple magnetoresistive element be configured at the position separating the distance obtained by following formula, the technology with harmonic carcellation component:
[n/2±m/(2×k)]λ
In above formula, n=integer, m=odd number, k=odd harmonic exponent number, λ=pole piece spacing (distance of S pole and N pole) (with reference to patent documentation 1).
Prior art document
Patent documentation
Patent documentation 1: Japanese Patent Laid-Open No. Sho 63-225124 publication
But when when separating the magnetoresistive element of position configuration elimination five order harmonic component of the distance obtained by following formula, magnetoresistive element is approximating as a result, exist because of the interactional impact of magnetoresistive element can not harmonic carcellation component is so rightly problem.
Summary of the invention
In view of above problem, even if technical matters of the present invention is to provide a kind of can relax magnet sensor arrangement, magnetic encoder apparatus and the Magnetic Sensor that adjacent magnetoresistive element magnetic each other interferes mutually when making multiple magnetoresistive element arranged side by side, also.
In order to solve the problems of the technologies described above, magnet sensor arrangement of the present invention comprises: magnetic medium; And Magnetic Sensor, this Magnetic Sensor is relative with above-mentioned magnetic medium, and the changes of magnetic field produced along with the relative movement with above-mentioned magnetic medium is detected, above-mentioned magnetic medium is alternately configured with S pole and N pole along the relative movement direction of above-mentioned magnetic medium and above-mentioned Magnetic Sensor, it is characterized in that, above-mentioned Magnetic Sensor comprises multiple magnetoresistive element along above-mentioned relative movement direction, the adjacent magnetoresistive element in above-mentioned multiple magnetoresistive element be spaced apart more than the width dimensions of above-mentioned magnetoresistive element.
In the present invention, Magnetic Sensor comprises multiple magnetoresistive element along the relative movement direction of itself and magnetic medium, but adjacent magnetoresistive element in multiple magnetoresistive element be spaced apart more than the width dimensions of magnetoresistive element.Therefore, adjacent magnetoresistive element magnetic each other can be relaxed mutually to interfere.
In the present invention, it is preferable that, above-mentioned multiple magnetoresistive element is configured to offset harmonic component.According to said structure, magnetoresistive element is closer to each other, but adjacent magnetoresistive element be spaced apart more than the width dimensions of magnetoresistive element.Therefore, adjacent magnetoresistive element magnetic each other can be relaxed and mutually interfere, therefore, effectively can relax the impact of harmonic component.
In the present invention, it is preferable that, above-mentioned multiple magnetoresistive element is configured to counteracting three order harmonic component and five order harmonic component.
In the present invention, following structure can be adopted: the distance that above-mentioned magnetoresistive element obtains across following formula: [n/2 ± m/ (2 × k)] λ, wherein, n=integer, m=odd number, k=odd harmonic exponent number, λ=pole piece spacing (interval of S pole and N pole).
In the present invention, it is preferable that, above-mentioned multiple magnetoresistive element comprise across interval, λ/6 magnetoresistive element to and across the magnetoresistive element pair at (λ/2+ λ/10) interval.According to said structure, for eliminating the magnetoresistive element of five order harmonic component to being also configured at the position separating enough distances.Therefore, adjacent magnetoresistive element magnetic each other can be relaxed and mutually interfere, therefore, effectively can relax the impact of harmonic component.
In the present invention, it is preferable that, the width of the above-mentioned magnetoresistive element of Thickness Ratio of above-mentioned magnetoresistive element is thin.According to said structure, adjacent magnetoresistive element magnetic each other can be relaxed and mutually interfere.
Apply magnet sensor arrangement of the present invention can be used in magnetic encoder apparatus.In this case, in magnetic linear encoder apparatus, the direction that above-mentioned Magnetic Sensor and above-mentioned magnetic medium arrange along S pole and N pole relatively moves linearly.In addition, in magnetic rotary encoder device, above-mentioned Magnetic Sensor and above-mentioned magnetic medium relatively carry out in rotary moving along the direction of S pole and the arrangement of N pole.
The feature of Magnetic Sensor of the present invention is, the multiple magnetoresistive elements extended in a first direction are arranged in the second direction of intersecting with this first direction, the adjacent magnetoresistive element in above-mentioned multiple magnetoresistive element be spaced apart more than the width dimensions of above-mentioned magnetoresistive element.
In the present invention, it is preferable that, between the adjacent magnetoresistive element in multiple magnetoresistive element, be spaced apart more than the width dimensions of magnetoresistive element.Therefore, adjacent magnetoresistive element magnetic each other can be relaxed mutually to interfere.
In this case, it is preferable that, the width of the above-mentioned magnetoresistive element of Thickness Ratio of above-mentioned magnetoresistive element is thin.According to said structure, adjacent magnetoresistive element magnetic each other can be relaxed and mutually interfere.
In the present invention, Magnetic Sensor comprises multiple magnetoresistive element along the relative movement direction of itself and magnetic medium, but adjacent magnetoresistive element in multiple magnetoresistive element be spaced apart more than the width dimensions of magnetoresistive element.Therefore, adjacent magnetoresistive element magnetic each other can be relaxed mutually to interfere.
Accompanying drawing explanation
Fig. 1 is the key diagram applying magnetic encoder apparatus of the present invention.
Fig. 2 (a) to Fig. 2 (c) is the key diagram representing the structure applying magnetic encoder apparatus of the present invention.
Fig. 3 is the key diagram schematically representing the magnetoresistive element being formed at the Magnetic Sensor applying magnetic linear encoder apparatus of the present invention.
Fig. 4 (a) and Fig. 4 (b) is the key diagram of the bridge circuit of the magnetoresistive element being formed at the Magnetic Sensor applying magnetic linear encoder apparatus of the present invention.
Fig. 5 (a) and Fig. 5 (b) is the key diagram representing the Cleaning Principle applying magnetic linear encoder apparatus of the present invention.
Fig. 6 (a) and Fig. 6 (b) is the key diagram of the magnetoresistive element of the Harmonics elimination being formed at the Magnetic Sensor applying magnetic linear encoder apparatus of the present invention.
Fig. 7 (a) and Fig. 7 (b) is the key diagram of the magnetic field intensity represented between magnetoresistive element.
Fig. 8 is the key diagram of the preference of the layout representing the magnetoresistive element being formed at the Magnetic Sensor applying magnetic linear encoder apparatus of the present invention.
Symbol description
1 magnet sensor arrangement
9 magnetic medium
20 Magnetic Sensors
25 magnetoresistive elements
The magnetoresistive element of 25 (+a)+a phase
The magnetoresistive element of 25 (-a)-a phase
The magnetoresistive element of 25 (+b)+b phase
The magnetoresistive element of 25 (-b)-b phase
Ra first magnetoresistive element group
Rb second magnetoresistive element group
R1 ~ R4, R11 ~ R14, R21 ~ R24, R31 ~ R34 magnetoresistive element
Embodiment
With reference to accompanying drawing, application magnet sensor arrangement of the present invention, magnetic encoder apparatus and Magnetic Sensor are described.
(one-piece construction)
Fig. 1 is the key diagram applying magnetic encoder apparatus of the present invention.Fig. 2 (a) to Fig. 2 (c) is the key diagram representing the structure applying magnetic encoder apparatus of the present invention, Fig. 2 (a) is the schematic sectional view of the structure of the major part applying magnet sensor arrangement of the present invention, Fig. 2 (b) is its schematic isometric, and Fig. 2 (c) is its diagrammatic top view.
As shown in Figure 1, the magnet sensor arrangement 1 of present embodiment is configured to magnetic linear encoder apparatus 100 (magnetic encoder apparatus).Magnet sensor arrangement 1 has Magnetic Sensor 20 and magnetic medium 9 (magnetic scale), and Magnetic Sensor 20 is relative with magnetic medium 9.Be formed with magnetic track N pole and S pole being alternately arranged along the long side direction relative movement direction of magnetic medium 9 (magnet sensor arrangement 1 with) as described later at magnetic medium 9, Magnetic Sensor 20 is by detecting amount of movement when detecting Magnetic Sensor 20 and magnetic medium 9 relative movement, position to the rotating magnetic field on the surface being formed at magnetic medium 9.Magnet sensor arrangement 1 comprises: the keeper 6 be made up of nonmagnetic substance; The lid 68 be made up of nonmagnetic substance; And from the cable 7 that keeper 6 extends, be configured with Magnetic Sensor 20 in the inner side of keeper 6.Cable inserting hole 69 is formed with, from this cable inserting hole 69 drawn out cable 7 in the side of keeper 6.In the magnet sensor arrangement 1 formed like this, the side in Magnetic Sensor 20 (keeper 6) and magnetic medium 9 is configured at fixing side, and the opposing party is configured at mobile side.In the present embodiment, magnetic medium 9 is configured at mobile side, and Magnetic Sensor 20 (keeper 6) is configured at fixing side.
As shown in Fig. 2 (a), Fig. 2 (b), Fig. 2 (c), be formed with reference field 60 in the bottom surface relative with magnetic medium 9 of keeper 6, this reference field 60 is formed from the tabular surface that the bottom surface of keeper 6 is outstanding by across step difference.Be formed with peristome 65 at reference field 60, be configured with the Magnetic Sensor 20 comprising the device substrate 10 such as silicon substrate, ceramic glaze substrate (ceramics glazed substrate) at peristome 65, thus form sensor cover 250.Device substrate 10 is connected with flexible wiring substrate 34.
Magnetic Sensor 20 comprises the magnetoresistive element 25 (B) of the magnetoresistive element 25 (A) each other with the A phase of the phase differential of 90 ° as magnetoresistive element 25 and B phase.In addition, in the accompanying drawings, SIN is marked to the magnetoresistive element 25 (A) of A phase, COS is marked to the magnetoresistive element 25 (B) of B phase.
The magnetoresistive element 25 (A) of A phase comprises the phase differential with 180 ° and carries out the magnetoresistive element 25 (+a) of+a phase of the mobility detect of magnetic medium 9 and the magnetoresistive element 25 (-a) of-a phase, in the accompanying drawings, the magnetoresistive element 25 (+a) of right+a phase represents SIN+, and the magnetoresistive element 25 (-a) of p-a phase marks SIN-.Similarly, the magnetoresistive element 25 (B) of B phase comprises the phase differential with 180 ° and carries out the magnetoresistive element 25 (+b) of+b phase of the mobility detect of magnetic medium 9 and the magnetoresistive element 25 (-b) of-b phase, in the accompanying drawings, the magnetoresistive element 25 (+b) of right+b phase marks COS+, and the magnetoresistive element 25 (-b) of p-b phase marks COS-.
In the present embodiment, the magnetoresistive element 25 (-b) of the magnetoresistive element 25 (+a) of+a phase, the magnetoresistive element 25 (-a) of-a phase, the magnetoresistive element 25 (+b) of+b phase and-b phase be formed at a block element substrate 10 the same face on (on first type surface).Magnetoresistive element 25 (+a), 25 (-a), 25 (+b), 25 (-b) are configured to clathrate on device substrate 10, the magnetoresistive element 25 (+a) of+a phase and the magnetoresistive element 25 (-a) of-a phase are formed at diagonal position, and the magnetoresistive element 25 (+b) of+b phase and the magnetoresistive element 25 (-b) of-b phase are formed at diagonal position.
In magnetic medium 9, be formed with the magnetic track 91 that N pole and S pole are alternately arranged along moving direction, in the present embodiment, three row magnetic tracks 91 (91A, 91B, 91C) are arranged side by side in the direction of the width.Herein, adjacent between magnetic track 91A, 91B, 91C, the position of N pole and S pole differs a magnetic pole in the direction of movement.Therefore, in magnetic track 91A, 91C of both sides, the position of N pole and S pole is consistent in the direction of movement.In addition, adjacent magnetic track 91A is such as formed as with the boundary member 912 between magnetic track 91B and the boundary member 912 between magnetic track 91B with magnetic track 91C: not clip the mode without magnetized spot, nonmagnetic portion that there is not magnetic pole, the N pole of this adjacent boundary member 912 is extremely directly contacted with S.
In the magnetic medium 9 formed like this, in the boundary member 912 of magnetic track 91A, 91B, 91C, produce the rotating magnetic field that intensity is larger.In addition, in the present embodiment, adjacent magnetic track 91A is formed as making the N pole of this boundary member 912 extremely directly to contact with S with the boundary member 912 between magnetic track 91B and the boundary member 912 between magnetic track 91B with magnetic track 91C, therefore, the larger rotating magnetic field of intensity is produced at boundary member 912 place of magnetic track 91A, 91B, 91C.Therefore, in the present embodiment, as shown in Fig. 2 (c), make the sensor cover 250 of magnet sensor arrangement 1 relative with the boundary member 912 of magnetic track 91A, 91B, 91C.In addition, sensor cover 250 is positioned at the centre of the Width of magnetic medium 9, therefore, one end 251 of the Width of sensor cover 250 is arranged in the substantial middle place of the Width of the magnetic track 91A of three magnetic tracks 91A, 91B, 91C, and the other end 252 is positioned at the substantial middle place of the Width of magnetic track 91C.Therefore, the region of the region being formed with the magnetoresistive element 25 (+a) of+a phase and the magnetoresistive element 25 (+b) being formed with+b phase is relative with the boundary member 912 between magnetic track 91A, 91B, and the region of the region being formed with the magnetoresistive element 25 (-a) of-a phase and the magnetoresistive element 25 (-b) being formed with-b phase is relative with the boundary member 912 between magnetic track 91B, 91C.Magnetic track 91B is formed at the centre of magnetic medium 9, the public magnetic track 91B of magnetic track, the i.e. dual-purpose relative with this regional of region being formed with the magnetoresistive element 25 (-a) of-a phase and the magnetoresistive element 25 (-b) of-b phase using the region as the magnetoresistive element 25 (+b) with the magnetoresistive element 25 (+a) and+b phase that are formed with+a phase.
(structure of magnetoresistive element)
Fig. 3 is the key diagram schematically representing the magnetoresistive element being formed at the Magnetic Sensor 20 applying magnetic linear encoder apparatus 100 of the present invention.Fig. 4 (a) and Fig. 4 (b) is the key diagram of the bridge circuit of the magnetoresistive element being formed at the Magnetic Sensor 20 applying magnetic linear encoder apparatus 100 of the present invention.Fig. 5 (a) and Fig. 5 (b) is the key diagram representing the Cleaning Principle applying magnetic linear encoder apparatus 100 of the present invention.
As shown in Figure 3, at the first type surface of device substrate 10, be formed with magnetoresistive element 25 (+a), 25 (-a), 25 (+b), 25 (-b) at the middle section of the long side direction (moving direction) of device substrate 10.One side end 11 of device substrate 10 is set as the first terminal portion 21, and end side 12 is set as the second portion of terminal 22.The magnetoresistive element 25 (+a) of+a phase and the magnetoresistive element 25 (-a) of-a phase are formed at diagonal position, and the magnetoresistive element 25 (+b) of+b phase and the magnetoresistive element 25 (-b) of-b phase are formed at diagonal position.
One end of the magnetoresistive element 25 (+a) of+a phase and the magnetoresistive element 25 (-a) of-a phase is connected with power supply terminal 212 (Vcc), 222 (Vcc), and the other end is connected with ground terminal 213 (GND), 223 (GND).In addition, correspond to the output terminal 211 (+a) of SIN+ to be connected with the point midway of the magnetoresistive element 25 (+a) of+a phase, correspond to the output terminal 211 (-a) of SIN-and be connected with the point midway of the magnetoresistive element 25 (-a) of-a phase.Therefore, as shown in Fig. 4 (a), if apply power supply potential Vcc towards power supply terminal 212 (Vcc), 222 (Vcc), ground terminal 213 (GND), 223 (GND) are set to earthing potential GND, then can obtain and export SIN+ and export SIN-.Therefore, after exporting SIN+ and exporting SIN-digitizing, if input to subtracter, then as shown in Fig. 5 (a), the differential output SIN corresponding with the changes of magnetic field based on magnetic medium 9 can be obtained.
Again in figure 3, one end of the magnetoresistive element 25 (-b) of-b phase and the magnetoresistive element 25 (+b) of+b phase is connected with power supply terminal 224 (Vcc), 214 (Vcc).In addition, the other end of the magnetoresistive element 25 (+b) of+b phase is connected with ground terminal 213 (GND) in the same manner with the magnetoresistive element 25 (+a) of+a phase, and the other end of the magnetoresistive element 25 (-b) of-b phase and the magnetoresistive element 25 (-a) of-a phase are connected with the ground terminal 223 (GND) as the second public terminal in the same manner.In addition, correspond to the output terminal 225 (-b) of COS-to be connected with the point midway of the magnetoresistive element 25 (-b) of-b phase, correspond to the output terminal 215 (+b) of COS+ and be connected with the point midway of the magnetoresistive element 25 (+b) of+b phase.Therefore, as shown in Fig. 4 (b), if apply power supply potential Vcc towards power supply terminal 224 (Vcc), 214 (Vcc), ground terminal 213 (GND), 223 (GND) are set to earthing potential GND, then can obtain and export COS+ and export COS-.Therefore, after exporting COS+ and exporting COS-digitizing, if input to subtracter, then as shown in Fig. 5 (a), the differential output COS corresponding with the changes of magnetic field based on magnetic medium 9 can be obtained.
Thus, as shown in Fig. 5 (b), if use differential output SIN, COS of obtaining, by following formula θ=tan
-1(SIN θ/COS θ) obtains arc tangent, then can detect the relative position of magnetic medium 9 and Magnetic Sensor 20.
In addition, as shown in Figure 3, except above-mentioned terminal, be also formed with virtual terminal in the first terminal portion 21 of device substrate 10, except above-mentioned terminal, be yet formed with virtual terminal in the second portion of terminal 22.In addition, being formed with the magnetoresistive element 25 (Z) of the Z phase for detecting origin position in the region adjacent with above-mentioned magnetoresistive element of the middle section of the long side direction of device substrate 10, being also formed with power supply terminal 226 (Vcc), ground terminal 227 (GND), lead-out terminal 228 (Z), 229 (Z) of the magnetoresistive element 25 (Z) corresponding to Z phase in the second portion of terminal 22.
(elimination of harmonic component)
Fig. 6 (a) and Fig. 6 (b) is the key diagram of the magnetoresistive element of the Harmonics elimination being formed at the Magnetic Sensor 20 applying magnetic linear encoder apparatus 100 of the present invention, Fig. 6 (a) is the key diagram of the relation representing magnetic pole and magnetoresistive element, and Fig. 6 (b) is the key diagram of the width dimensions representing magnetoresistive element etc.
In the present embodiment, in order to harmonic carcellation component from the signal obtained by Magnetic Sensor 20, n is set to integer when working as, m is set to odd number, k be set to odd harmonic exponent number, when λ being set to pole piece spacing (distance/reference Fig. 6 (a) of S pole and N pole), the position separating along Magnetic Sensor 20 and the relative movement direction of magnetic medium 9 distance obtained by following formula in Magnetic Sensor 20 is configured with multiple magnetoresistive element:
[n/2±m/(2×k)]λ
In above formula, n=integer, m=odd number, k=odd harmonic exponent number, λ=pole piece spacing (distance of S pole and N pole).
More specifically, first, as shown in Fig. 6 (a), the first magnetoresistive element group Ra and the second magnetoresistive element group Rb is equipped with in Magnetic Sensor 20 any one magnetoresistive element in magnetoresistive element 25 (+a), 25 (-a), 25 (+b), 25 (-b), wherein, above-mentioned first magnetoresistive element group Ra comprises the multiple magnetoresistive element R1 ~ R4 be made up of magnetoresistive film, and above-mentioned second magnetoresistive element group Rb comprises multiple magnetoresistive element R11 ~ R14 of being made up of magnetoresistive film and paired with the first magnetoresistive element group Ra.Herein, magnetoresistive element R1 ~ R4, R11 ~ R14 are upper in the direction (first direction) intersected with moving direction respectively to be extended, and arranges along moving direction (second direction).Magnetoresistive element R1 ~ R4 is in series electrically connected, and magnetoresistive element R11 ~ R14 is in series electrically connected.In addition, the first magnetoresistive element group Ra and the second magnetoresistive element group Rb is in series electrically connected and in pairs.
Herein, multiple magnetoresistive element R1 ~ R4, R11 ~ R14 are configured to counteracting three order harmonic component and five order harmonic component, and the first magnetoresistive element group Ra and the second magnetoresistive element group Rb is configured to counteracting seven order harmonic component.
More specifically, in the first magnetoresistive element group Ra, the distance of magnetoresistive element R1 and magnetoresistive element R2 and the distance of magnetoresistive element R3 and magnetoresistive element R4 are λ/10, in above formula, and n=0, m=1, k=5.Therefore, can utilize magnetoresistive element R1 and magnetoresistive element R2 this pair and magnetoresistive element R3 and magnetoresistive element R4 this to elimination five order harmonic component.
In addition, in the first magnetoresistive element group Ra, the distance of magnetoresistive element R1 and magnetoresistive element R3 and the distance of magnetoresistive element R2 and magnetoresistive element R4 are λ/6, in above formula, and n=0, m=1, k=3.Therefore, can utilize magnetoresistive element R1 and magnetoresistive element R3 this pair and magnetoresistive element R2 and magnetoresistive element R4 this to elimination three order harmonic component.
In the present embodiment, the second magnetoresistive element group Rb is configured with the position that the pattern identical with above-mentioned basic pattern is being separated with the first magnetoresistive element group Ra, in the second magnetoresistive element group Rb, the distance of magnetoresistive element R11 and magnetoresistive element R12 and the distance of magnetoresistive element R13 and magnetoresistive element R14 are λ/10, in above formula, n=0, m=1, k=5.Therefore, can utilize magnetoresistive element R11 and magnetoresistive element R12 this pair and magnetoresistive element R13 and magnetoresistive element R14 this to elimination five order harmonic component.
In addition, in the second magnetoresistive element group Rb, the distance of magnetoresistive element R11 and magnetoresistive element R13 and the distance of magnetoresistive element R12 and magnetoresistive element R14 are λ/6, in above formula, and n=0, m=1, k=3.Therefore, can utilize magnetoresistive element R11 and magnetoresistive element R13 this pair and magnetoresistive element R12 and magnetoresistive element R14 this to elimination three order harmonic component.
Herein, the distance of the first magnetoresistive element group Ra and the second magnetoresistive element group Rb also sets according to above formula.In the present embodiment, the distance of the first magnetoresistive element group Ra and the second magnetoresistive element group Rb is λ/2+ λ/14, in above formula, and n=1, m=1, k=7.Therefore, the distance of magnetoresistive element R1 and magnetoresistive element R11 is λ/2+ λ/14, in above formula, and n=1, m=1, k=7.In addition, the distance of the distance of magnetoresistive element R2 and magnetoresistive element R12, the distance of magnetoresistive element R3 and magnetoresistive element R13 and magnetoresistive element R4 and magnetoresistive element R14 is also λ/2+ λ/14, in above formula, and n=1, m=1, k=7.Therefore, the first magnetoresistive element group Ra and the second magnetoresistive element group Rb can be utilized to eliminate seven order harmonic component.
(the setting example at the interval of magnetoresistive element R1 ~ R4, R11 ~ R14)
Fig. 7 (a) and Fig. 7 (b) is the key diagram of the magnetic field intensity represented between magnetoresistive element.
As illustrated with reference to Fig. 6 (a), in order to configure magnetoresistive element R1 ~ R4, R11 ~ R14 side by side, in the present embodiment, as shown in Fig. 6 (b), the interval d between the adjacent magnetoresistive element in multiple magnetoresistive element R1 ~ R4, R11 ~ R14 is more than the width dimensions w of magnetoresistive element.According to said structure, by the reason of following explanation, adjacent magnetoresistive element magnetic each other can be relaxed and mutually interfere.
Such as, as the comparative example represented in Fig. 7 (b), the width w of magnetoresistive element R is being set to 40 μm, the interval d of arranged side by side two magnetoresistive element R is set to be less than 40 μm, such as 17.1 μm when, when simulating the magnetic field intensity of each position during magnetic field applied on the direction orthogonal with magnetoresistive element R, as in Fig. 7 (b) with justifying and surrounding and represent, magnetic conductance between two magnetoresistive element R becomes large, and between two magnetoresistive element R, magnetic flux density is higher.Therefore, in magnetoresistive element R1 ~ R4, the R11 ~ R14 shown in Fig. 6 (a), when the position that the width dimensions w of the interval d reluctancy element R that there is magnetoresistive element R is narrow and small, the output of its both sides can produce difference, thus can not harmonic carcellation component.
On the other hand, as the embodiments of the invention represented in Fig. 7 (a), the width w of magnetoresistive element R is being set to 40 μm, the interval d of arranged side by side two magnetoresistive element R is set to more than 40 μm, such as 40 μm when, when simulating the magnetic field intensity of each position during magnetic field applied on the direction orthogonal with magnetoresistive element R, magnetic conductance between two magnetoresistive element R diminishes, and between two magnetoresistive element R, magnetic flux density is lower.Therefore, in magnetoresistive element R1 ~ R4, the R11 ~ R14 shown in Fig. 6 (a), even if there is the position that the interval d of magnetoresistive element R is narrow and small, if this interval d is more than the width dimensions w of magnetoresistive element R, then in the both sides at the narrow and small position of interval d, export and also can not produce difference, thus can harmonic carcellation component.
In addition, in magnetoresistive element R1 ~ R4, R11 ~ R14, the sensitivity of the magnetoresistive element that resistance is less is higher.Therefore, when making the width dimensions w of magnetoresistive element R become narrow and small, the thickness of the magnetoresistive film of increase formation magnetoresistive element R1 ~ R4, R11 ~ R14 is ideal.But mutually interfere such from the view point of the adjacent magnetoresistive element magnetic each other of mitigation, in the present embodiment, the width dimensions w of the Film Thickness Ratio magnetoresistive element R of magnetoresistive element R1 ~ R4, R11 ~ R14 is thin.
(main efficacy results of present embodiment)
As mentioned above, in the magnet sensor arrangement 1 and uniform enconding apparatus 100 of present embodiment, Magnetic Sensor 20 comprises multiple magnetoresistive element R1 ~ R4, R11 ~ R14 along the relative movement direction of itself and magnetic medium 9, but the interval d of adjacent magnetoresistive element in multiple magnetoresistive element R1 ~ R4, R11 ~ R14 is more than the width dimensions w of magnetoresistive element.Therefore, adjacent magnetoresistive element magnetic each other can be relaxed mutually to interfere.Especially in the present embodiment, multiple magnetoresistive element R1 ~ R4, R11 ~ R14 are configured to harmonic carcellation component, and therefore, magnetoresistive element R1 ~ R4, R11 ~ R14 are closer to each other, but the interval d of adjacent magnetoresistive element is more than the width dimensions w of magnetoresistive element.Therefore, adjacent magnetoresistive element magnetic each other can be relaxed and mutually interfere, therefore, effectively can relax the impact of harmonic component.
In addition, the width dimensions w of the Film Thickness Ratio magnetoresistive element R of magnetoresistive element R1 ~ R4, R11 ~ R14 is thin.Therefore, adjacent magnetoresistive element magnetic each other can be relaxed mutually to interfere.
(preference of magnetoresistive element R1 ~ R4, R11 ~ R14)
Fig. 8 is the key diagram of the preference of the layout representing the magnetoresistive element being formed at the Magnetic Sensor 20 applying magnetic linear encoder apparatus 100 of the present invention.
In the embodiment illustrated with reference to Fig. 6 (a) and Fig. 6 (b) etc., be λ/10 for the distance of magnetoresistive element R11 and magnetoresistive element R12 of eliminating five order harmonic component and the distance of magnetoresistive element R13 and magnetoresistive element R14, but in the present embodiment, as shown in Figure 8, distance right for the magnetoresistive element being used for eliminating five order harmonic component is set as λ/2+ λ/10, thus expands magnetoresistive element interval each other.
More specifically, in the first magnetoresistive element group Ra, the distance of magnetoresistive element R21 and magnetoresistive element R22 and the distance of magnetoresistive element R23 and magnetoresistive element R24 are λ/2+ λ/10, in above formula, and n=1, m=1, k=5.Therefore, can utilize magnetoresistive element R21 and magnetoresistive element R22 this pair and magnetoresistive element R23 and magnetoresistive element R24 this to elimination five order harmonic component.
In addition, in the first magnetoresistive element group Ra, the distance of magnetoresistive element R21 and magnetoresistive element R23 and the distance of magnetoresistive element R22 and magnetoresistive element R24 are λ/6, in above formula, and n=0, m=1, k=3.Therefore, can utilize magnetoresistive element R21 and magnetoresistive element R23 this pair and magnetoresistive element R22 and magnetoresistive element R24 this to elimination three order harmonic component.
In the present embodiment, the second magnetoresistive element group Rb is configured with the position that the pattern identical with above-mentioned basic pattern is being separated with the first magnetoresistive element group Ra, in the second magnetoresistive element group Rb, the distance of magnetoresistive element R31 and magnetoresistive element R32 and the distance of magnetoresistive element R33 and magnetoresistive element R34 are λ/2+ λ/10, in above formula, n=1, m=1, k=5.Therefore, can utilize magnetoresistive element R31 and magnetoresistive element R32 this pair and magnetoresistive element R33 and magnetoresistive element R34 this to elimination five order harmonic component.
In addition, in the second magnetoresistive element group Rb, the distance of magnetoresistive element R31 and magnetoresistive element R33 and the distance of magnetoresistive element R32 and magnetoresistive element R34 are λ/6, in above formula, and n=0, m=1, k=3.Therefore, can utilize magnetoresistive element R31 and magnetoresistive element R33 this pair and magnetoresistive element R32 and magnetoresistive element R34 this to elimination three order harmonic component.
Herein, the distance of the first magnetoresistive element group Ra and the second magnetoresistive element group Rb also sets according to above formula.In the present embodiment, the distance of the first magnetoresistive element group Ra and the second magnetoresistive element group Rb is λ+λ/14, in above formula, and n=2, m=1, k=7.Therefore, the distance of magnetoresistive element R21 and magnetoresistive element R31 is λ+λ/14, in above formula, and n=2, m=1, k=7.In addition, the distance of the distance of magnetoresistive element R22 and magnetoresistive element R32, the distance of magnetoresistive element R23 and magnetoresistive element R33 and magnetoresistive element R24 and magnetoresistive element R34 is also λ+λ/14, in above formula, and n=2, m=1, k=7.Therefore, the first magnetoresistive element group Ra and the second magnetoresistive element group Rb can be utilized to eliminate seven order harmonic component.
If said structure, then for the magnetoresistive element of eliminating five order harmonic component, the position separating enough distances is also configured to (magnetoresistive element R21 and magnetoresistive element R22 this pair, magnetoresistive element R23 and magnetoresistive element R24 this pair, magnetoresistive element R31 and magnetoresistive element R32 this pair and magnetoresistive element R33 and magnetoresistive element R34 this pair).Therefore, in magnetoresistive element R21 ~ R24, R31 ~ R34, even if the position the narrowest and small at interval, also there is the interval of λ/6.Therefore, easily the interval d of adjacent magnetoresistive element is set to more than the width dimensions w of magnetoresistive element.
[structure of other magnetic encoder apparatus]
Above-mentioned embodiment is all examples magnet sensor arrangement being configured to uniform enconding apparatus, but rotary encoder apparatus in rotary moving is relatively carried out in the direction that Magnetic Sensor 20 and magnetic medium 9 also can be formed along S pole and the arrangement of N pole.
Claims (10)
1. a magnet sensor arrangement, comprising:
Magnetic medium; And
Magnetic Sensor, this Magnetic Sensor is relative with described magnetic medium, and detects the changes of magnetic field produced along with the relative movement with described magnetic medium,
Described magnetic medium is alternately configured with S pole and N pole along the relative movement direction of described magnetic medium and described Magnetic Sensor, it is characterized in that,
Described Magnetic Sensor comprises multiple magnetoresistive element along described relative movement direction,
Adjacent magnetoresistive element in described multiple magnetoresistive element be spaced apart more than the width dimensions of described magnetoresistive element.
2. magnet sensor arrangement as claimed in claim 1, is characterized in that,
Described multiple magnetoresistive element is configured to offset harmonic component.
3. magnet sensor arrangement as claimed in claim 2, is characterized in that,
Described multiple magnetoresistive element is configured to counteracting three order harmonic component and five order harmonic component.
4. magnet sensor arrangement as claimed in claim 3, is characterized in that,
The distance that described magnetoresistive element obtains across following formula: [n/2 ± m/ (2 × k)] λ, wherein, n=integer, m=odd number, k=odd harmonic exponent number, λ=pole piece spacing.
5. magnet sensor arrangement as claimed in claim 4, is characterized in that,
Described multiple magnetoresistive element comprise across interval, λ/6 magnetoresistive element to and across the magnetoresistive element pair at (λ/2+ λ/10) interval.
6. magnet sensor arrangement as claimed in claim 1, is characterized in that,
Described in the Thickness Ratio of described magnetoresistive element, the width of magnetoresistive element is thin.
7. a magnetic encoder apparatus, comprises the magnet sensor arrangement according to any one of claim 1 to 6, it is characterized in that,
The direction that described Magnetic Sensor and described magnetic medium arrange along S pole and N pole relatively moves linearly.
8. a magnetic encoder apparatus, comprises the magnet sensor arrangement according to any one of claim 1 to 6, it is characterized in that,
Described Magnetic Sensor and described magnetic medium relatively carry out in rotary moving along the direction of S pole and the arrangement of N pole.
9. a Magnetic Sensor, is characterized in that,
The multiple magnetoresistive elements extended in a first direction are arranged in the second direction of intersecting with this first direction,
Adjacent magnetoresistive element in described multiple magnetoresistive element be spaced apart more than the width dimensions of described magnetoresistive element.
10. Magnetic Sensor as claimed in claim 9, is characterized in that,
Described in the Thickness Ratio of described magnetoresistive element, the width of magnetoresistive element is thin.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013254625A JP2015114138A (en) | 2013-12-10 | 2013-12-10 | Magnetic sensor device, magnetic encoder device, and magnetic sensor |
| JP2013-254625 | 2013-12-10 |
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| CN201420742962.XU Expired - Fee Related CN204241009U (en) | 2013-12-10 | 2014-12-01 | Magnet sensor arrangement, magnetic encoder apparatus and Magnetic Sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110567353A (en) * | 2018-06-05 | 2019-12-13 | 日本电产三协株式会社 | Magnetic encoder |
| CN113316709A (en) * | 2019-01-14 | 2021-08-27 | 株式会社电装 | Rotation detecting device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015114138A (en) * | 2013-12-10 | 2015-06-22 | 日本電産サンキョー株式会社 | Magnetic sensor device, magnetic encoder device, and magnetic sensor |
| US9733317B2 (en) | 2014-03-10 | 2017-08-15 | Dmg Mori Seiki Co., Ltd. | Position detecting device |
| JP6842943B2 (en) * | 2017-02-14 | 2021-03-17 | 日本電産サンキョー株式会社 | Rotary encoder |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62204118A (en) * | 1986-03-05 | 1987-09-08 | Hitachi Ltd | A device that magnetically detects position or speed |
| JPS63225124A (en) * | 1987-03-14 | 1988-09-20 | Hitachi Ltd | magnetic position sensing device |
| JPH09218053A (en) * | 1996-02-08 | 1997-08-19 | Sankyo Seiki Mfg Co Ltd | Magnetic type encoder |
| CN1941082A (en) * | 2005-09-30 | 2007-04-04 | 日立金属株式会社 | Magnetic encoder |
| JP2007285805A (en) * | 2006-04-14 | 2007-11-01 | Hitachi Metals Ltd | Magnetic encoder |
| CN101395450A (en) * | 2006-03-06 | 2009-03-25 | 日本电产三协株式会社 | Magnetic sensor device, magnetic encoder device, and magnetic scale manufacturing method |
| CN101663564A (en) * | 2007-04-20 | 2010-03-03 | 三菱电机株式会社 | Magnetic rotating angle detector |
| CN204241009U (en) * | 2013-12-10 | 2015-04-01 | 日本电产三协株式会社 | Magnet sensor arrangement, magnetic encoder apparatus and Magnetic Sensor |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01116408A (en) * | 1987-10-30 | 1989-05-09 | Yaskawa Electric Mfg Co Ltd | Magnetic encoder |
| JPH0618279A (en) * | 1992-06-30 | 1994-01-25 | Hitachi Ltd | Position detector |
| DE4319322C2 (en) * | 1993-06-11 | 1998-04-23 | Heidenhain Gmbh Dr Johannes | Position measuring device |
| JP4232808B2 (en) * | 2006-09-19 | 2009-03-04 | 日立金属株式会社 | Magnetic encoder device |
-
2013
- 2013-12-10 JP JP2013254625A patent/JP2015114138A/en active Pending
-
2014
- 2014-12-01 CN CN201410717574.0A patent/CN104697555A/en active Pending
- 2014-12-01 WO PCT/JP2014/081678 patent/WO2015087726A1/en active Application Filing
- 2014-12-01 CN CN201420742962.XU patent/CN204241009U/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62204118A (en) * | 1986-03-05 | 1987-09-08 | Hitachi Ltd | A device that magnetically detects position or speed |
| JPS63225124A (en) * | 1987-03-14 | 1988-09-20 | Hitachi Ltd | magnetic position sensing device |
| JPH09218053A (en) * | 1996-02-08 | 1997-08-19 | Sankyo Seiki Mfg Co Ltd | Magnetic type encoder |
| CN1941082A (en) * | 2005-09-30 | 2007-04-04 | 日立金属株式会社 | Magnetic encoder |
| CN101395450A (en) * | 2006-03-06 | 2009-03-25 | 日本电产三协株式会社 | Magnetic sensor device, magnetic encoder device, and magnetic scale manufacturing method |
| JP2007285805A (en) * | 2006-04-14 | 2007-11-01 | Hitachi Metals Ltd | Magnetic encoder |
| CN101663564A (en) * | 2007-04-20 | 2010-03-03 | 三菱电机株式会社 | Magnetic rotating angle detector |
| CN204241009U (en) * | 2013-12-10 | 2015-04-01 | 日本电产三协株式会社 | Magnet sensor arrangement, magnetic encoder apparatus and Magnetic Sensor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110567353A (en) * | 2018-06-05 | 2019-12-13 | 日本电产三协株式会社 | Magnetic encoder |
| CN110567353B (en) * | 2018-06-05 | 2021-08-24 | 日本电产三协株式会社 | Magnetic encoder |
| CN113316709A (en) * | 2019-01-14 | 2021-08-27 | 株式会社电装 | Rotation detecting device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2015087726A1 (en) | 2015-06-18 |
| JP2015114138A (en) | 2015-06-22 |
| CN204241009U (en) | 2015-04-01 |
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