CN104682755A - Mass spectrometer power circuit with adjustable radio frequency - Google Patents
Mass spectrometer power circuit with adjustable radio frequency Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
- H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
- H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/4807—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode having a high frequency intermediate AC stage
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Abstract
本发明公开了一种质谱仪可调射频电源电路,由可编程信号源电路、驱动电路、射频变压电路、阻抗变换电路、受控电压源电路构成,其特征在于可编程信号源电路输出高频信号,经驱动电路放大后去驱动射频变压电路的开关管,开关管的通断会使与之相连的高频变压器初级产生周期性的电流变化,该变化的电流经射频变压器耦合至次级输出。次级输出的高压一路送至负载四级杆,为其提供高压射频电压。另一路送至阻抗变换电路。阻抗变换电路将高压交流信号转换成低压直流信号并送至受控电压源的反馈端。射频电源可通过软件设定信号源的频率并通过电位器调节受控电压源的输出电压,以达到控制射频电源频率和输出电压的目的。
The invention discloses an adjustable radio frequency power supply circuit for a mass spectrometer, which is composed of a programmable signal source circuit, a drive circuit, a radio frequency transformer circuit, an impedance transformation circuit, and a controlled voltage source circuit, and is characterized in that the output of the programmable signal source circuit is high The high-frequency signal is amplified by the drive circuit to drive the switch tube of the RF transformer circuit. The switching of the switch tube will cause periodic current changes in the primary side of the high-frequency transformer connected to it. The changed current is coupled to the secondary through the RF transformer. level output. The high voltage of the secondary output is sent to the load quadrupole all the way to provide high voltage RF voltage for it. The other way is sent to the impedance transformation circuit. The impedance conversion circuit converts the high-voltage AC signal into a low-voltage DC signal and sends it to the feedback terminal of the controlled voltage source. The RF power supply can set the frequency of the signal source through software and adjust the output voltage of the controlled voltage source through the potentiometer to achieve the purpose of controlling the frequency and output voltage of the RF power supply.
Description
技术领域technical field
本发明涉及一种质谱仪可调射频电源电路,通过调节该电路中受控电压源的输出电压和信号源的射频频率,使质谱仪能够获得不同的离子质荷比。The invention relates to an adjustable radio frequency power supply circuit of a mass spectrometer. By adjusting the output voltage of a controlled voltage source and the radio frequency frequency of a signal source in the circuit, the mass spectrometer can obtain different ion mass-to-charge ratios.
背景技术Background technique
质谱仪是一种化学分析仪器,用于分子质量精确测定与化合物分析。射频电源是其电路部分的核心部件。射频电源是质谱仪的四极杆、离子阱或者离子引导部分的驱动电源。其输出高频的交流电源,在质谱仪四级杆、离子阱或者离子引导部分的周围产生交变电场,质谱仪通过电场或磁场控制离子并监视产物运动来获得离子的质荷比。A mass spectrometer is a chemical analysis instrument used for precise determination of molecular mass and compound analysis. The RF power supply is the core component of its circuit part. The RF power supply is the driving power for the quadrupole, ion trap or ion guide of the mass spectrometer. It outputs high-frequency AC power to generate an alternating electric field around the quadrupole, ion trap or ion guide of the mass spectrometer. The mass spectrometer controls the ions through the electric field or magnetic field and monitors the product movement to obtain the mass-to-charge ratio of the ions.
目前使用较多的射频电源都是采用触发器、电感电容震荡产生高频信号,输出单一频率且幅值固定的高频高压电源。这种射频电源用于质谱仪中,只能获得在单一条件下的离子质荷比,如果需要测试其他条件下的质荷比则需要更换射频电源组件,流程繁琐并且增加了实验成本,浪费大量的时间。实际测试中为了提高测量数据的有效性,通常需要知道测试样品在何种频率、何种电压下产生的信号较强,离子质荷比的相对强度较高,从而得到更加精准有效的实验数据,为后期的理论分析提供便利。At present, most RF power supplies use triggers, inductors and capacitors to oscillate to generate high-frequency signals, and output a high-frequency high-voltage power supply with a single frequency and a fixed amplitude. This kind of RF power supply is used in mass spectrometers, and can only obtain the mass-to-charge ratio of ions under a single condition. If it is necessary to test the mass-to-charge ratio under other conditions, the RF power supply components need to be replaced. The process is cumbersome and increases the cost of the experiment, wasting a lot time. In order to improve the validity of the measurement data in the actual test, it is usually necessary to know at which frequency and voltage the test sample generates a stronger signal, and the relative strength of the ion mass-to-charge ratio is higher, so as to obtain more accurate and effective experimental data. Provide convenience for later theoretical analysis.
发明内容Contents of the invention
本发明是为了克服现有技术中存在的不足之处,提供了一种输出电压和频率可以调节的射频电源,并且所述射频电源结构简单、稳定性好。The invention aims to overcome the disadvantages of the prior art, and provides a radio frequency power supply whose output voltage and frequency can be adjusted, and the radio frequency power supply has a simple structure and good stability.
为了解决上述技术问题,本发明所采用的技术方案是:In order to solve the problems of the technologies described above, the technical solution adopted in the present invention is:
本发明一种质谱仪可调射频电源电路包括可编程信号源电路、驱动电路、射频变压电路、阻抗变换电路、受控电压源电路。其特征在于可编程信号源电路的输出端与驱动电路的输入端相连接,驱动电路的输出端与射频变压电路的输入端相连接,射频变压电路的输出端一路与阻抗变换电路的输入端相连接,另一路与负载相连接,阻抗变换电路的输出端与受控电压源电路的反馈端相连接,受控电压源电路的电压输出端与射频变压电路的电源输入端相连接,每块电路均由直流电源供电。可编程信号源电路输出高频信号,经驱动电路放大后去驱动射频变压电路的开关管,开关管的通断会使与之相连的高频变压器初级产生周期性的电流变化,该变化的电流经射频变压器耦合至次级输出,同时送至阻抗变换电路。阻抗变换电路将高压交流信号转换成低压直流信号并送至受控电压源的反馈端。射频变压电路的输出端与负载相连,为负载提供高压射频电压。射频电源可通过软件编程改变信号源的频率,通过电位器调节受控电压源的输出电压,从而达到控制射频电源频率和供电电压的目的。本发明相对于传统射频电源,利用可编程控制器实现了频率调节,利用以受控电压源电路和阻抗变换电路为核心的反馈电路实现射频电源可调稳压输出。An adjustable radio frequency power supply circuit of a mass spectrometer in the invention comprises a programmable signal source circuit, a drive circuit, a radio frequency transformer circuit, an impedance transformation circuit, and a controlled voltage source circuit. It is characterized in that the output end of the programmable signal source circuit is connected with the input end of the drive circuit, the output end of the drive circuit is connected with the input end of the radio frequency transformer circuit, and the output end of the radio frequency transformer circuit is connected with the input of the impedance transformation circuit. The other end is connected with the load, the output end of the impedance transformation circuit is connected with the feedback end of the controlled voltage source circuit, the voltage output end of the controlled voltage source circuit is connected with the power input end of the radio frequency transformer circuit, Each circuit is powered by a DC power source. The programmable signal source circuit outputs a high-frequency signal, which is amplified by the drive circuit to drive the switch tube of the RF transformer circuit. The switching of the switch tube will cause periodic current changes in the primary side of the high-frequency transformer connected to it. The current is coupled to the secondary output through the RF transformer, and sent to the impedance transformation circuit at the same time. The impedance conversion circuit converts the high-voltage AC signal into a low-voltage DC signal and sends it to the feedback terminal of the controlled voltage source. The output terminal of the radio frequency transformer circuit is connected with the load to provide high voltage radio frequency voltage for the load. The RF power supply can change the frequency of the signal source through software programming, and adjust the output voltage of the controlled voltage source through the potentiometer, so as to achieve the purpose of controlling the frequency and supply voltage of the RF power supply. Compared with the traditional radio frequency power supply, the present invention uses a programmable controller to realize frequency adjustment, and utilizes a feedback circuit with a controlled voltage source circuit and an impedance transformation circuit as the core to realize adjustable and stable voltage output of the radio frequency power supply.
与现有技术相比,本发明有益效果体现在:Compared with the prior art, the beneficial effects of the present invention are reflected in:
1、本发明中可编程信号源电路采用CPLD,通过软件编程实现输出频率可变的高频方波信号,从而使射频电源能够产生精准的、频率可调的高频信号。1. In the present invention, the programmable signal source circuit adopts CPLD, and realizes outputting a high-frequency square wave signal with variable frequency through software programming, so that the radio frequency power supply can generate accurate high-frequency signals with adjustable frequency.
2、本发明驱动电路采用高速MOS管驱动芯片驱动射频变压电路的MOS管,增强了MOS管的驱动能力,输出信号稳定,简化了电路。2. The drive circuit of the present invention uses a high-speed MOS tube drive chip to drive the MOS tube of the radio frequency transformer circuit, which enhances the drive capability of the MOS tube, stabilizes the output signal, and simplifies the circuit.
3、本发明受控电压源采用的是开关稳压器,输出稳定的可调电压,通过调节电位器阻值的大小来调节开关稳压器输出电压,从而调节射频电源的供电电压,以达到调节射频电源输出电压的目的。3. The controlled voltage source of the present invention adopts a switching regulator, which outputs a stable adjustable voltage, and adjusts the output voltage of the switching regulator by adjusting the resistance value of the potentiometer, thereby adjusting the power supply voltage of the radio frequency power supply to achieve The purpose of adjusting the output voltage of the RF power supply.
4、本发明将射频变压电路输出的高压射频电源经过阻抗变换电路反馈到受控电压源电路,受控电压源电路通过调节射频变压电路供电电压的占空比,从而调节射频电源的输出电压,使其输出保持稳定。4. The present invention feeds back the high-voltage radio frequency power output from the radio frequency transformer circuit to the controlled voltage source circuit through the impedance conversion circuit, and the controlled voltage source circuit adjusts the output of the radio frequency power supply by adjusting the duty cycle of the power supply voltage of the radio frequency transformer circuit voltage to keep its output stable.
附图说明Description of drawings
图1为本发明的射频电源结构示意图;Fig. 1 is the structure diagram of radio frequency power supply of the present invention;
图2为本发明的射频电源电路原理图;Fig. 2 is a schematic diagram of the radio frequency power supply circuit of the present invention;
具体实施方式Detailed ways
下面结合附图对本发明进一步说明。The present invention will be further described below in conjunction with the accompanying drawings.
在图1中,可编程信号源电路的输出端与驱动电路的输入端相连接,驱动电路的输出端与射频变压电路的输入端相连接,射频变压电路的输出端一路与阻抗变换电路的输入端相连接,另一路与负载相连接,阻抗变换电路的输出端与受控电压源电路的反馈端相连接,受控电压源电路的电压输出端与射频变压电路的电源输入端相连接,每块电路均由直流电源供电。In Figure 1, the output end of the programmable signal source circuit is connected to the input end of the drive circuit, the output end of the drive circuit is connected to the input end of the radio frequency transformer circuit, and the output end of the radio frequency transformer circuit is connected to the impedance transformation circuit The input terminal of the controlled voltage source circuit is connected with the input terminal of the controlled voltage source circuit, and the other circuit is connected with the load. The output terminal of the impedance transformation circuit is connected with the feedback terminal of the controlled voltage source circuit. connection, each circuit is powered by a DC power source.
正常工作中,可编程信号源电路输出高频信号,经驱动电路放大后去驱动射频变压电路的开关管,开关管的通断会使与之相连的高频变压器初级产生周期性的电流变化,该变化的电流经射频变压器耦合至次级输出,同时送至阻抗变换电路。阻抗变换电路将高压交流信号转换成具有较强驱动能力的低压直流信号并送至受控电压源的反馈端。射频电源通过软件编程改变信号源的频率,通过电位器调节受控电压源的输出电压,从而达到控制射频电源频率和供电电压的目的。射频变压电路的输出端与负载相连,从而达到控制射频电源输出电压的目的。In normal operation, the programmable signal source circuit outputs a high-frequency signal, which is amplified by the drive circuit to drive the switching tube of the RF transformer circuit. The switching of the switching tube will cause periodic current changes in the primary side of the high-frequency transformer connected to it. , the changed current is coupled to the secondary output through the RF transformer, and sent to the impedance transformation circuit at the same time. The impedance conversion circuit converts the high-voltage AC signal into a low-voltage DC signal with strong driving capability and sends it to the feedback terminal of the controlled voltage source. The RF power supply changes the frequency of the signal source through software programming, and adjusts the output voltage of the controlled voltage source through the potentiometer, so as to achieve the purpose of controlling the frequency and supply voltage of the RF power supply. The output end of the radio frequency transformer circuit is connected to the load, so as to achieve the purpose of controlling the output voltage of the radio frequency power supply.
在图2中,可编程信号源电路是由是CPLD及其外围电路组成,软件上对CPLD编程,设定输出500KHz到1.5MHz的高频方波信号,所述高频方波信号的频率可变。In Fig. 2, the programmable signal source circuit is made up of CPLD and its peripheral circuits. The CPLD is programmed in the software, and the high-frequency square wave signal from 500KHz to 1.5MHz is set to be output. The frequency of the high-frequency square wave signal can be Change.
驱动电路由电阻R1、R2、电容C1、驱动芯片及其外围电路组成。CPLD输出信号的高电平电压为3.3V,无法直接驱动MOS管U1,本发明将CPLD产生的频率可调方波通过高频MOS管驱动芯片FAN3100进行放大,从而驱动MOS管U1。电容C1和电阻R2构成加速电路,可以使射频变压电路中的MOS管迅速导通和关闭。The drive circuit is composed of resistors R1, R2, capacitor C1, drive chip and its peripheral circuits. The high-level voltage of the CPLD output signal is 3.3V, which cannot directly drive the MOS transistor U1. The present invention amplifies the frequency-adjustable square wave generated by the CPLD through the high-frequency MOS transistor driver chip FAN3100, thereby driving the MOS transistor U1. Capacitor C1 and resistor R2 form an acceleration circuit, which can quickly turn on and off the MOS tube in the radio frequency transformer circuit.
射频变压电路由电阻R3、R4、R5、二极管D1、电容C2、MOS管U1、和耦合变压器T1组成。电路MOS管U1采用高频MOS管FDD7N20作为驱动对高频信号进行功率放大。MOS管U1工作在开关模式,驱动耦合变压器T1,变压器T1将高频直流信号转化成高频高压交流信号输出给负载。当MOS管D1截止时,续流二极管D1为耦合变压器T1的初级提供放电回路,保护MOS管。电阻R4、R5起到限流作用。耦合变压器T1采用镍锌材质的磁环变压器,可将耦合变压器的初级电压耦合至次级,输出600~800V的电压。The radio frequency transformer circuit is composed of resistors R3, R4, R5, diode D1, capacitor C2, MOS tube U1, and coupling transformer T1. The circuit MOS tube U1 uses a high-frequency MOS tube FDD7N20 as a driver to amplify the power of the high-frequency signal. The MOS tube U1 works in the switch mode, drives the coupling transformer T1, and the transformer T1 converts the high-frequency DC signal into a high-frequency high-voltage AC signal and outputs it to the load. When the MOS transistor D1 is cut off, the freewheeling diode D1 provides a discharge circuit for the primary of the coupling transformer T1 to protect the MOS transistor. Resistors R4 and R5 act as current limiters. The coupling transformer T1 adopts a nickel-zinc magnetic ring transformer, which can couple the primary voltage of the coupling transformer to the secondary, and output a voltage of 600-800V.
阻抗变换电路由电阻R6、R7、R8、R9、R10、电容C3、C4、C5、C6、C7、C8、整流桥D2和运算放大器U2组成。阻抗变化电路将滤波耦合变压器T1输出的射频电压经过高压电容C3、C4、C5、C6和整流桥D2和由C7、C8、L1构成的π型滤波器整流滤波后得到直流电压信号,经过负反馈电路反馈到受控电压源电路的电压反馈端,对射频电压进行阻抗匹配。射频电压经过整流滤波后转化成直流低压信号输入到以运算放大器LM358为核心的差分放大电路中,当差分放大电路负输入端有偏差存在时,输出端输出一个经过放大的偏差电压给受控电压源电路电压反馈端,对输入偏差进一步调节,并可有效抑制共模干扰电压的影响。The impedance transformation circuit is composed of resistors R6, R7, R8, R9, R10, capacitors C3, C4, C5, C6, C7, C8, rectifier bridge D2 and operational amplifier U2. The impedance change circuit rectifies and filters the RF voltage output by the filter coupling transformer T1 through the high-voltage capacitors C3, C4, C5, C6, the rectifier bridge D2 and the π-type filter composed of C7, C8, and L1 to obtain a DC voltage signal. The circuit is fed back to the voltage feedback terminal of the controlled voltage source circuit to perform impedance matching on the radio frequency voltage. After the RF voltage is rectified and filtered, it is converted into a DC low-voltage signal and input to the differential amplifier circuit with the operational amplifier LM358 as the core. When there is a deviation at the negative input terminal of the differential amplifier circuit, the output terminal outputs an amplified deviation voltage to the controlled voltage. The source circuit voltage feedback terminal further adjusts the input deviation and can effectively suppress the influence of common-mode interference voltage.
受控电压源电路由电阻R11、R12、R13、R14、R15、电容C9、C10、C11、电感L2、二极管D3、保险丝F1和开关稳压器U3组成。受控源电路是以开关稳压器LM2576为核心,起到稳压和调压的作用。阻抗变换电路输出端连接到受控电压源电路的电压反馈端,受控电压源电路的输出电压接到射频电压模块的电源输入端,射频电压模块的电压输出端一路接到阻抗变换电路的输入端,构成了电压反馈,受控电压源电路通过检测反馈端电压使射频电源输出射频电压保持稳定;射频电压模块的电压输出另一路与负载相连接。射频变压电路的电源电压的大小影响到射频电源的输出电压,通过调节电位器R13可以调节受控电压源电路的输出电压,从而调节射频电源输出的射频电压的大小。The controlled voltage source circuit is composed of resistors R11, R12, R13, R14, R15, capacitors C9, C10, C11, inductor L2, diode D3, fuse F1 and switching regulator U3. The controlled source circuit is based on the switching regulator LM2576, which plays the role of voltage regulation and regulation. The output terminal of the impedance transformation circuit is connected to the voltage feedback terminal of the controlled voltage source circuit, the output voltage of the controlled voltage source circuit is connected to the power supply input terminal of the radio frequency voltage module, and the voltage output terminal of the radio frequency voltage module is connected to the input of the impedance transformation circuit. The terminal constitutes the voltage feedback, and the controlled voltage source circuit keeps the output RF voltage of the RF power supply stable by detecting the voltage of the feedback terminal; the other voltage output of the RF voltage module is connected to the load. The power supply voltage of the radio frequency transformer circuit affects the output voltage of the radio frequency power supply, and the output voltage of the controlled voltage source circuit can be adjusted by adjusting the potentiometer R13, thereby adjusting the magnitude of the radio frequency voltage output by the radio frequency power supply.
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CN201310638775.7A CN104682755A (en) | 2013-11-29 | 2013-11-29 | Mass spectrometer power circuit with adjustable radio frequency |
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CN105107087A (en) * | 2015-08-26 | 2015-12-02 | 魏红月 | Electric wave therapeutic instrument |
CN105591528A (en) * | 2016-01-04 | 2016-05-18 | 钢研纳克检测技术有限公司 | Radio frequency power supply for quadrupole mass spectrometer |
CN106711010A (en) * | 2016-12-26 | 2017-05-24 | 中国科学技术大学 | Quadrupole guide rod radio frequency power supply circuit of mass spectrometer |
CN107070184A (en) * | 2017-05-06 | 2017-08-18 | 广东大仓机器人科技有限公司 | A kind of program-controlled Buck conversion circuit |
CN112509904A (en) * | 2020-11-30 | 2021-03-16 | 上海裕达实业有限公司 | Switchable digital ion trap mass spectrum radio frequency power supply system and control method thereof |
CN112671352A (en) * | 2020-11-26 | 2021-04-16 | 钢研纳克检测技术股份有限公司 | Ion funnel radio frequency driving power supply of portable mass spectrometer |
US11342169B2 (en) | 2019-04-12 | 2022-05-24 | Agilent Technologies, Inc. | Multi frequency LC resonator topologies applicable to mass spectrometer radio-frequency drive systems |
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105107087A (en) * | 2015-08-26 | 2015-12-02 | 魏红月 | Electric wave therapeutic instrument |
CN105591528A (en) * | 2016-01-04 | 2016-05-18 | 钢研纳克检测技术有限公司 | Radio frequency power supply for quadrupole mass spectrometer |
CN105591528B (en) * | 2016-01-04 | 2018-05-01 | 钢研纳克检测技术股份有限公司 | A kind of radio-frequency power supply for quadrupole mass spectrometer |
CN106711010A (en) * | 2016-12-26 | 2017-05-24 | 中国科学技术大学 | Quadrupole guide rod radio frequency power supply circuit of mass spectrometer |
CN106711010B (en) * | 2016-12-26 | 2019-01-04 | 中国科学技术大学 | A kind of mass spectrometric quadrupole guide bar radio-frequency power supply circuit |
CN107070184A (en) * | 2017-05-06 | 2017-08-18 | 广东大仓机器人科技有限公司 | A kind of program-controlled Buck conversion circuit |
US11342169B2 (en) | 2019-04-12 | 2022-05-24 | Agilent Technologies, Inc. | Multi frequency LC resonator topologies applicable to mass spectrometer radio-frequency drive systems |
CN112671352A (en) * | 2020-11-26 | 2021-04-16 | 钢研纳克检测技术股份有限公司 | Ion funnel radio frequency driving power supply of portable mass spectrometer |
CN112671352B (en) * | 2020-11-26 | 2024-05-24 | 钢研纳克检测技术股份有限公司 | Ion funnel radio frequency driving power supply of portable mass spectrometer |
CN112509904A (en) * | 2020-11-30 | 2021-03-16 | 上海裕达实业有限公司 | Switchable digital ion trap mass spectrum radio frequency power supply system and control method thereof |
CN112509904B (en) * | 2020-11-30 | 2024-05-03 | 上海裕达实业有限公司 | Switchable digital ion trap mass spectrum radio frequency power supply system and control method thereof |
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