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CN104677290B - Twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle - Google Patents

Twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle Download PDF

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CN104677290B
CN104677290B CN201510109878.3A CN201510109878A CN104677290B CN 104677290 B CN104677290 B CN 104677290B CN 201510109878 A CN201510109878 A CN 201510109878A CN 104677290 B CN104677290 B CN 104677290B
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fiber grating
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CN104677290A (en
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崔继文
冯昆鹏
党竑
朱圣琪
谭久彬
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Harbin Institute of Technology Shenzhen
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Abstract

基于自组装原理的双芯光纤光栅微尺度测量探针制作方法属于精密仪器制造技术领域;本方法采用机械加工或氢氟酸光纤腐蚀处理的方式减小刻写光纤光栅后的单模光纤的直径,再将两根直径减小后的刻写光纤光栅后的单模光纤穿过带有内锥角的细管中,并将下端浸没在低粘度紫外胶中,利用毛细力对其进行自组装,从而形成最紧凑的并列结构,对自组装后的两根直径减小后的刻写光纤光栅后的单模光纤进行紫外胶固化,制成双芯光纤光栅,在光纤研磨机上对双芯光纤光栅的端面进行研磨,采用熔融光纤法或微球安装法在双芯光纤光栅研磨端加工出一个球形针尖,完成双芯光纤光栅探针的加工;本发明光纤光栅信号无串扰,低成本,低损耗。

The method for making a micro-scale measurement probe of a double-core fiber grating based on the principle of self-assembly belongs to the technical field of precision instrument manufacturing; the method adopts machining or hydrofluoric acid fiber corrosion treatment to reduce the diameter of the single-mode fiber after the fiber grating is written, Then two single-mode optical fibers with reduced diameter and written fiber gratings are passed through a thin tube with an inner taper angle, and the lower ends are immersed in low-viscosity ultraviolet glue, and self-assembled by capillary force, thereby Form the most compact side-by-side structure. After self-assembly, two self-assembled single-mode fibers with reduced diameters and written fiber gratings are cured with UV glue to make a double-core fiber grating. Grinding, processing a spherical needle tip at the grinding end of the dual-core fiber grating by using the molten fiber method or the microsphere installation method, and completing the processing of the dual-core fiber grating probe; the fiber grating signal of the present invention has no crosstalk, low cost, and low loss.

Description

基于自组装原理的双芯光纤光栅微尺度测量探针制作方法Fabrication method of dual-core fiber grating microscale measurement probe based on self-assembly principle

技术领域technical field

本发明属于精密仪器制造技术领域,特别涉及一种基于自组装原理的双芯光纤光栅微尺度测量探针制作方法。The invention belongs to the technical field of precision instrument manufacturing, in particular to a method for manufacturing a double-core optical fiber grating microscale measuring probe based on the self-assembly principle.

背景技术Background technique

随着航空航天工业、汽车工业、电子工业以及尖端工业等的不断发展,对于精密微小构件的需求急剧增长。由于受到空间尺度和待测微小构件遮蔽效应的限制以及测量接触力的影响,微小构件尺度的精密测量越来越难以实现,尤其是测量微小内腔构件的深度难以提高,这些已然成为制约行业发展的“瓶颈”。为了实现更小尺寸测量、增加测量深度,最广泛使用的办法就是使用细长的探针深入微小构件的内腔进行探测,通过瞄准发讯的方式测量不同深度上的微小内尺寸。因此,目前微小构件尺寸的精密测量方法主要以坐标测量机结合瞄准触发式探针的探测方式为主,由于坐标测量机技术的发展已经比较成熟,可以提供精密的三维空间运动,因此瞄准触发式探针的探测方式成为微小构件尺寸探测系统设计的关键。而且,光纤光栅探针以其传感器与测量系统分立的优点,可以完全克服遮蔽效应,突破测量深度对探针的限制,同时光纤光栅探针兼具小型化、抗干扰等优点,非常适合用于制作微尺度测量探针。With the continuous development of the aerospace industry, automobile industry, electronics industry and cutting-edge industries, the demand for precision and tiny components has increased dramatically. Due to the limitations of the space scale and the shadowing effect of the tiny components to be measured, as well as the influence of the measurement contact force, it is becoming more and more difficult to achieve precise measurement of the scale of tiny components, especially the difficulty in improving the depth of the measurement of tiny inner cavity components, which has become a constraint on the development of the industry the "bottleneck". In order to achieve smaller size measurement and increase the measurement depth, the most widely used method is to use a slender probe to penetrate into the inner cavity of tiny components for detection, and measure the tiny inner dimensions at different depths by aiming at the signal. Therefore, at present, the precision measurement method of tiny component size is mainly based on the detection method of coordinate measuring machine combined with aiming trigger probe. Since the development of coordinate measuring machine technology has been relatively mature, it can provide precise three-dimensional space movement, so aiming trigger probe The detection method of the probe becomes the key to the design of the detection system for small component sizes. Moreover, the fiber grating probe can completely overcome the shadowing effect and break through the limitation of the probe on the measurement depth due to its advantages of separating the sensor and the measurement system. Fabrication of microscale measurement probes.

目前,基于光纤光栅设计的微尺度测量探针包括以下几种:At present, the micro-scale measurement probes designed based on fiber gratings include the following:

2011年,中国哈尔滨工业大学崔继文教授和杨福铃等人提出了一种基于FBGBending的微孔尺寸测量装置及方法,该方法利用光纤光栅探针和光源、检测装置构成瞄准触发系统,配合双频激光干涉仪测长装置,可以获得不同截面的微孔直径。该方法的光纤光栅探针触测变形时,探针的主要应力不作用于光纤光栅上,系统的分辨率很低、不具有三维测量能力,性能难以进一步提高。In 2011, Professor Cui Jiwen and Yang Fuling of Harbin Institute of Technology in China proposed a micropore size measurement device and method based on FBGBending. This method uses a fiber grating probe, a light source, and a detection device to form an aiming trigger system, and cooperates with dual-frequency laser interference. The length measuring device of the instrument can obtain the micropore diameter of different sections. When the fiber grating probe touches the deformation of this method, the main stress of the probe does not act on the fiber grating, the resolution of the system is very low, the three-dimensional measurement capability is not available, and the performance is difficult to further improve.

2014年,中国哈尔滨工业大学崔继文教授和冯昆鹏等人提出了基于多芯光纤光栅的微尺度测量装置及方法,该方法设计了特殊的多芯光纤光栅探针,使探针在与工件触测过程中产生的应力充分作用于光纤光栅上,较之前的基于FBG Bending的微孔尺寸测量装置及方法的探测分辨力有很大的提高;而且,不同的多芯光纤纤芯分布结构可以实现二维、三维测的解耦,具有良好的测量性质。但是,该方法在特殊的多芯光纤上刻写光纤光栅,一方面,多芯光纤刻写过程中会带来纤芯和纤芯间的刻写串扰问题;另一方面,购买的多芯光纤制作探针导致探针结构参数不能自主设计。In 2014, Professor Cui Jiwen and Feng Kunpeng of Harbin Institute of Technology in China proposed a micro-scale measurement device and method based on multi-core fiber gratings. In this method, a special multi-core fiber grating probe is designed to make the probe touch the workpiece. The stress generated in the process fully acts on the fiber grating, which greatly improves the detection resolution of the previous microhole size measurement device and method based on FBG Bending; moreover, different multi-core optical fiber core distribution structures can realize two-dimensional , The decoupling of 3D measurement has good measurement properties. However, this method writes fiber gratings on a special multi-core fiber. On the one hand, the writing process of the multi-core fiber will cause the problem of crosstalk between the core and the core; on the other hand, the purchased multi-core fiber makes the probe As a result, the probe structure parameters cannot be designed independently.

综上所述,现有的基于光纤光栅设计的微尺度测量探针中,多芯光纤光栅探针以其分辨力高、多维测量解耦的特点被广泛关注,具有很好的应用前景,但是现有的多芯光纤光栅探针主要存在以下问题:In summary, among the existing micro-scale measurement probes based on fiber grating design, the multi-core fiber grating probe has been widely concerned due to its high resolution and multi-dimensional measurement decoupling characteristics, and has a good application prospect. The existing multi-core fiber grating probes mainly have the following problems:

1.考虑多芯光纤光栅探针的制作成本问题,多芯光纤只能选用光纤生产厂家的特有型号,不能根据测量要求设计特殊结构的多芯光纤以用来制作多芯光纤光栅探针。1. Considering the production cost of the multi-core fiber grating probe, the multi-core fiber can only be selected from the special model of the fiber manufacturer, and the multi-core fiber with a special structure cannot be designed according to the measurement requirements to make the multi-core fiber grating probe.

2.在制作多芯光纤光栅探针时,需要利用准分子激光相位掩膜法在多芯光纤上刻写光纤光栅,多芯光纤的纤芯距只有几十微米,在一根多芯光纤的纤芯上刻写光纤光栅时会影响临近纤芯,产生刻写串扰,最终制成的多芯光纤光栅探针,各个纤芯中的光纤光栅反射率低且光谱扭曲严重,严重影响测量的准确性。2. When making a multi-core fiber grating probe, it is necessary to use the excimer laser phase mask method to write the fiber grating on the multi-core fiber. The core distance of the multi-core fiber is only tens of microns. When the fiber grating is written on the core, it will affect the adjacent fiber cores, resulting in writing crosstalk, and finally the multi-core fiber grating probe, the fiber grating in each core has low reflectivity and severe spectral distortion, which seriously affects the accuracy of the measurement.

3.多芯光纤光栅探针在使用时,需要获取多芯光纤内每根纤芯内光纤光栅的反射光谱,因此每个多芯光纤光栅探针需要安装一个多芯光纤扇出接头实现多芯光纤每根纤芯与外部单模光纤的耦合,但是这种接头价格高昂、光损耗大,不适合多芯光纤光栅探针在微尺度测量中的推广、应用。3. When the multi-core fiber grating probe is in use, it is necessary to obtain the reflection spectrum of the fiber grating in each core of the multi-core fiber, so each multi-core fiber grating probe needs to be installed with a multi-core fiber fan-out connector to achieve multi-core Each fiber core of the optical fiber is coupled with an external single-mode optical fiber, but this kind of joint is expensive and has a large optical loss, which is not suitable for the promotion and application of multi-core fiber grating probes in micro-scale measurement.

发明内容Contents of the invention

本发明的目的是解决多芯光纤光栅探针应用中多芯光纤结构受生产厂家限制、刻写串扰以及扇出接头光损耗大的问题,提出了一种基于自组装原理的双芯光纤光栅微尺度测量探针制作方法,采用自组装的方式将刻写光纤光栅后的普通单模光纤制成双芯芯光纤光栅微尺度测量探针,并且可以根据测量需求,设计双芯光纤光栅微尺度测量探针的结构,而且采用该方法保证了制成的双芯光纤光栅微尺度测量探针每个信道与一根普通单模光纤连接,无需扇出接头,达到结构设计灵活、光谱信号好、光损耗小,成本低的目的。The purpose of the present invention is to solve the problems that the multi-core fiber structure is limited by the manufacturer, the writing crosstalk and the light loss of the fan-out connector in the application of the multi-core fiber grating probe, and proposes a micro-scale dual-core fiber grating based on the principle of self-assembly The manufacturing method of the measurement probe is to use the self-assembly method to make the ordinary single-mode optical fiber after the fiber grating is written into a dual-core fiber grating micro-scale measurement probe, and the dual-core fiber grating micro-scale measurement probe can be designed according to the measurement requirements Moreover, this method ensures that each channel of the manufactured dual-core fiber grating micro-scale measuring probe is connected to an ordinary single-mode optical fiber without fan-out connectors, achieving flexible structural design, good spectral signals, and low optical loss , the purpose of low cost.

本发明的技术方案是:一种基于自组装原理的双芯光纤光栅微尺度测量探针制作方法,所述方法包括以下步骤:The technical solution of the present invention is: a method for manufacturing a dual-core fiber grating microscale measurement probe based on the principle of self-assembly, the method comprising the following steps:

(1).减小刻写光纤光栅后的单模光纤直径(1). Reduce the diameter of the single-mode fiber after writing the fiber grating

取两根长度为100~1000mm刻写光纤光栅后的单模光纤,光纤光栅栅区处于刻写光纤光栅后的单模光纤的一端30~50mm的位置,光纤光栅栅区长度为10~20mm,将刻写光纤光栅后的单模光纤靠近光纤光栅栅区的末端长度为50~80mm部分的涂覆层剥除,之后采用机械处理的方法减小刻写光纤光栅后的单模光纤剥除涂覆层部分的直径:将刻写光纤光栅后的单模光纤拉直,两端固定在同步旋转电机的固定装置上并且使将刻写光纤光栅后的单模光纤的转动轴线与同步旋转电机的转动轴线重合,在刻写光纤光栅后的单模光纤转动轴上方装有一个包裹研磨片的转轮,包裹研磨片的转轮靠近并接触刻写光纤光栅后的单模光纤并沿刻写光纤光栅后的单模光纤在剥除涂覆层部分反复匀速运动,进行磨削,同时采用显微观察系统检测刻写光纤光栅后的单模光纤剥除涂覆层部分的直径,当刻写光纤光栅后的单模光纤剥除涂覆层部分的直径减小至50~100μm时,停止磨削;用光纤切割刀将直径减小后的刻写光纤光栅后的单模光纤上的光纤光栅栅区之后30~50mm的单模光纤切去,使光纤光栅栅区处于直径减小后的刻写光纤光栅后的单模光纤的末端,并保光纤光栅栅区长度为5~10mm,之后放置于装有无水乙醇的超声清洗机中洗涤5~20分钟;Take two single-mode optical fibers with a length of 100-1000mm after writing the fiber grating. The coating layer of the single-mode fiber after the fiber grating is stripped near the end of the fiber grating region with a length of 50-80 mm, and then mechanical treatment is used to reduce the coating layer of the single-mode fiber after the fiber grating is written. Diameter: Straighten the single-mode fiber after writing the fiber grating, fix both ends on the fixture of the synchronous rotating motor and make the rotation axis of the single-mode fiber after writing the fiber grating coincide with the rotation axis of the synchronous rotating motor. A rotating wheel wrapping the abrasive sheet is installed above the rotating shaft of the single-mode fiber behind the fiber Bragg grating. The wheel wrapping the abrasive sheet is close to and contacts the single-mode fiber after the fiber Bragg grating is written and is stripped along the single-mode fiber after the fiber Bragg grating is written. The coating layer moves repeatedly at a constant speed for grinding. At the same time, a microscopic observation system is used to detect the diameter of the stripped coating layer of the single-mode fiber after the fiber grating is written. When the diameter of the part is reduced to 50-100 μm, stop grinding; use a fiber cutter to cut off the 30-50 mm single-mode fiber after the fiber grating grating area on the single-mode fiber after the fiber grating is written, Make the fiber grating grating area at the end of the single-mode optical fiber after the fiber grating has been written with a reduced diameter, and keep the fiber grating grating area at a length of 5-10 mm, and then place it in an ultrasonic cleaning machine equipped with absolute ethanol for 5-5 mm. 20 minutes;

(2).两根直径减小后的刻写光纤光栅后的单模光纤的自组装(2).Self-assembly of two single-mode optical fibers with reduced diameter and written fiber gratings

准备长度10~30mm、一端有内锥角、内径为(50~100μm)×3+(1~5)μm的细管,将第(1)步处理后两根直径减小后的刻写光纤光栅后的单模光纤从细管一端的内锥角插入,保证两根直径减小后的刻写光纤光栅后的单模光纤端部平齐且超出细管一端5~10mm;竖直固定细管并将超出细管一端的两根直径减小后的刻写光纤光栅后的单模光纤浸没在装有粘度小于100cp的紫外胶的玻璃杯中3~6mm,在毛细作用力下低粘度紫外胶沿着两根直径减小后的刻写光纤光栅后的单模光纤向上运动,并使两根直径减小后的刻写光纤光栅后的单模光纤紧紧靠近形成最紧凑的并列结构,对两根直径减小后的刻写光纤光栅后的单模光纤进行自组装;5~15分钟后,将细管和其中自组装后的两根直径减小后的刻写光纤光栅后的单模光纤从紫外胶中取出,保证自组装后的两根直径减小后的刻写光纤光栅后的单模光纤不发生错位,并用紫外胶固化光源对超出细管一端自组装后的两根直径减小后的刻写光纤光栅后的单模光纤照射1~10分钟完成紫外胶固化,形成双芯光纤光栅;尔后,在细管一端的内锥角处滴入热固化胶并填满内锥角,将插有双芯光纤光栅的细管放在50~180℃恒温电加热器上加热10~60分钟,使细管一端的内锥角中的热固化胶固化;Prepare a thin tube with a length of 10-30mm, an inner taper angle at one end, and an inner diameter of (50-100μm)×3+(1-5)μm, and write the two fiber gratings with reduced diameters after the treatment in step (1) Insert the final single-mode optical fiber from the inner taper angle of one end of the thin tube to ensure that the ends of the two reduced-diameter single-mode optical fibers after writing fiber gratings are flush and extend 5-10mm beyond the end of the thin tube; fix the thin tube vertically and Immerse the two single-mode optical fibers with reduced diameter beyond one end of the thin tube and write fiber gratings in a glass cup filled with UV glue with a viscosity less than 100cp. Under the capillary force, the low viscosity UV glue goes along The two single-mode fibers with reduced diameters and written fiber gratings move upward, and make the two single-mode fibers with reduced diameters written with fiber gratings close together to form the most compact parallel structure. After 5-15 minutes, the thin tube and the two self-assembled single-mode fibers with reduced diameter after writing the fiber grating are taken out from the ultraviolet glue , to ensure that the two self-assembled single-mode fibers with reduced diameters after writing fiber gratings are not misaligned, and use a UV glue curing light source to fix the two self-assembled fiber gratings with reduced diameters beyond one end of the thin tube The single-mode optical fiber is irradiated for 1 to 10 minutes to complete the curing of the ultraviolet glue to form a dual-core fiber grating; then, drop the heat-curing glue at the inner cone angle at one end of the thin tube and fill the inner cone angle, and insert the dual-core fiber grating Place the thin tube on a constant temperature electric heater at 50-180°C and heat it for 10-60 minutes to cure the heat-curing glue in the inner cone angle at one end of the thin tube;

(3).双芯光纤光栅的端面研磨(3). End face grinding of dual-core fiber grating

将第(2)步中插有双芯光纤光栅的细管固定在光纤研磨机上,调整细管高度,使双芯光纤光栅与光纤研磨机上的研磨片接触,之后按照FC/PC光纤接头的研磨方式对其端面进行研磨,并用端面观察装置确认平整、无裂痕和残缺,停止双芯光纤光栅的端面研磨并用蘸有酒精的无尘纸将端面擦拭干净;Fix the thin tube with the dual-core fiber grating inserted in step (2) on the fiber grinder, adjust the height of the thin tube so that the dual-core fiber grating is in contact with the polishing sheet on the fiber grinder, and then grind according to the FC/PC fiber optic connector. Grind the end face of the dual-core fiber grating by using the end face observation device to confirm that it is flat, free of cracks and incompleteness, stop the end face grinding of the dual-core fiber grating and wipe the end face clean with a dust-free paper dipped in alcohol;

(4).对端面研磨后的双芯光纤光栅端部球形针尖制作(4). Fabricate the spherical tip of the dual-core fiber grating end after the end face is ground

熔融光纤法:将第(3)步中端面研磨后的双芯光纤光栅上端的细管竖直固定,调节细管高度使端面研磨后的双芯光纤光栅下端处于电火花加工机两根放电电极针尖中心下方0.5~3mm位置,调节电火花加工机的放电时间和放电电流,利用电火花放电产生的热量将端面研磨后的双芯光纤光栅下端0.5~3mm的光纤熔化,利用重力和熔融光纤的表面张力形成一个良好的光纤球,待其冷却后在端面研磨后的双芯光纤光栅下端形成一个光纤球形针尖,完成端面研磨后的双芯光纤光栅端部球形针尖的加工;在电子显微镜下对光纤球形针尖加工质量进行检定,要求光纤球针尖与端面研磨后的双芯光纤光栅的同轴度小于5μm、光纤球无气泡和破损、光纤球直径和端面研磨后的双芯光纤光栅直径之比大于或等于1.2,挑选合格的双芯光纤光栅探针,完成双芯光纤光栅探针的制作。Fused fiber method: fix the fine tube at the upper end of the double-core fiber grating after the end face grinding in step (3) vertically, adjust the height of the thin tube so that the lower end of the double-core fiber grating after the end face grinding is at the two discharge electrodes of the EDM At the position 0.5-3mm below the center of the needle tip, adjust the discharge time and discharge current of the EDM machine, use the heat generated by the EDM to melt the 0.5-3mm optical fiber at the lower end of the double-core fiber grating after the end face is ground, and use the gravity and the melting of the optical fiber The surface tension forms a good fiber optic ball, and after it cools down, a fiber spherical needle tip is formed at the lower end of the double-core fiber grating after end grinding, and the processing of the spherical needle tip at the end of the dual-core fiber grating after end grinding is completed; The processing quality of the optical fiber spherical tip is verified. It is required that the concentricity between the optical fiber spherical tip and the dual-core optical fiber grating after grinding the end face is less than 5 μm, the optical fiber ball has no bubbles and damage, and the ratio of the diameter of the optical fiber ball to the diameter of the dual-core optical fiber grating after grinding the end face. Greater than or equal to 1.2, select qualified dual-core fiber grating probes, and complete the production of dual-core fiber grating probes.

本发明的优点是:The advantages of the present invention are:

1.采用刻写光纤光栅后的单模光纤制作双芯光纤光栅探针,可以根据测量需求设计双芯光纤光栅探针的结构参数,如双芯光纤光栅探针直径、长度和球形针尖直径等。1. Use the single-mode fiber after the fiber grating is written to make the dual-core fiber grating probe. The structural parameters of the dual-core fiber grating probe can be designed according to the measurement requirements, such as the diameter, length and spherical tip diameter of the dual-core fiber grating probe.

2.采用刻写光纤光栅后的单模光纤制作双芯光纤光栅探针,避免了直接在多芯光纤上刻写光纤光栅带来刻写串扰,制作完成的双芯光纤光栅探针具有光谱信号好的特点。2. The dual-core fiber grating probe is made of the single-mode fiber after the fiber grating is written, which avoids the writing crosstalk caused by writing the fiber grating directly on the multi-core fiber. The completed dual-core fiber grating probe has the characteristics of good spectral signal .

3.采用刻写光纤光栅后的单模光纤制作双芯光纤光栅探针,双芯光纤光栅探针尾纤自带单模尾纤,避免了使用扇出接头,降低了双芯光纤光栅探针使用中的成本和光损耗。3. The dual-core fiber grating probe is made of the single-mode optical fiber after the fiber grating is written. The dual-core fiber grating probe pigtail comes with a single-mode pigtail, which avoids the use of fan-out connectors and reduces the use of dual-core fiber grating probes. The cost and optical loss in.

附图说明Description of drawings

图1为机械处理的方法减小刻写光纤光栅后的单模光纤直径装置图;Fig. 1 is the device diagram of reducing the diameter of the single-mode fiber after the optical fiber grating is written by the method of mechanical processing;

图2为直径减小后刻写光纤光栅后的单模光纤自组装装置图;Figure 2 is a diagram of a single-mode fiber self-assembly device after the fiber grating is written after the diameter is reduced;

图3为图2中的A-A的剖视图;Fig. 3 is the sectional view of A-A in Fig. 2;

图4为图2中细管结构示意图;Fig. 4 is a schematic diagram of the capillary structure in Fig. 2;

图5为双芯光纤光栅端面研磨装置图;Fig. 5 is a diagram of a dual-core fiber grating end face grinding device;

图6为熔融光纤法形成球形针尖装置图;Fig. 6 is a diagram of a device for forming a spherical needle tip by the molten optical fiber method;

图7为氢氟酸光纤腐蚀处理的方法减小刻写光纤光栅后的单模光纤直径装置图;Fig. 7 is the method for hydrofluoric acid optical fiber corrosion treatment to reduce the single-mode optical fiber diameter device diagram after writing optical fiber grating;

图8为图7的俯视图;Figure 8 is a top view of Figure 7;

图9为微球安装法形成球形针尖示意图;Fig. 9 is a schematic diagram of forming a spherical needle tip by the microsphere installation method;

图10为图9中B部结构局部示意图;Fig. 10 is a partial schematic diagram of the structure of part B in Fig. 9;

图中:1.刻写光纤光栅后的单模光纤,2.光纤光栅栅区,3.包裹研磨片的转轮,4.同步旋转电机,5.固定装置,6.直径减小后的刻写光纤光栅后的单模光纤,7.细管,8.内锥角,9.玻璃杯,10.紫外胶,11.双芯光纤光栅,12.光纤研磨机,13.研磨片,14.端面研磨后的双芯光纤光栅15.电极,16.电火花加工机,17.光纤球形针尖,18.塑料桶盖,19.塑料桶,20.氢氟酸溶液,21.红宝石球形针尖,22.水平平台,23.V形槽,24.六自由度调整装置。In the figure: 1. Single-mode optical fiber after fiber grating writing, 2. Fiber grating grating area, 3. Rotary wheel wrapped with abrasive sheet, 4. Synchronous rotating motor, 5. Fixing device, 6. Writing optical fiber after diameter reduction Single-mode fiber after grating, 7. Thin tube, 8. Inner cone angle, 9. Glass cup, 10. Ultraviolet glue, 11. Dual-core fiber grating, 12. Optical fiber grinder, 13. Grinding sheet, 14. End face grinding 15. Electrode, 16. EDM, 17. Optical fiber spherical needle tip, 18. Plastic bucket cover, 19. Plastic bucket, 20. Hydrofluoric acid solution, 21. Ruby spherical needle tip, 22. Level Platform, 23. V-shaped groove, 24. Six degrees of freedom adjustment device.

具体实施方式detailed description

下面结合附图对本发明实施方案进行详细描述。Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

一种基于自组装原理的双芯光纤光栅微尺度测量探针制作方法,所述方法包括以下步骤:A method for manufacturing a dual-core fiber grating microscale measurement probe based on the principle of self-assembly, the method comprising the following steps:

(1).减小刻写光纤光栅后的单模光纤直径(1). Reduce the diameter of the single-mode fiber after writing the fiber grating

取两根长度为100~1000mm刻写光纤光栅后的单模光纤1,光纤光栅栅区2处于刻写光纤光栅后的单模光纤1的一端30~50mm的位置,光纤光栅栅区2长度为10~20mm,将刻写光纤光栅后的单模光纤1靠近光纤光栅栅区2的末端长度为50~80mm部分的涂覆层剥除,之后采用机械处理的方法减小刻写光纤光栅后的单模光纤1剥除涂覆层部分的直径:将刻写光纤光栅后的单模光纤1拉直,两端固定在同步旋转电机4的固定装置5上并且使刻写光纤光栅后的单模光纤1的转动轴线与同步旋转电机4的转动轴线重合,在刻写光纤光栅后的单模光纤1转动轴上方装有一个包裹研磨片的转轮3,包裹研磨片的转轮3靠近并接触刻写光纤光栅后的单模光纤1并沿刻写光纤光栅后的单模光纤1剥除涂覆层部分反复匀速运动,进行磨削,同时采用显微观察系统检测刻写光纤光栅后的单模光纤1剥除涂覆层部分的直径,当刻写光纤光栅后的单模光纤1剥除涂覆层部分的直径减小至50~100μm时,停止磨削;用光纤切割刀将直径减小后的刻写光纤光栅后的单模光纤6上的光纤光栅栅区2之后30~50mm的单模光纤切去,使光纤光栅栅区2处于直径减小后的刻写光纤光栅后的单模光纤1的末端,并保光纤光栅栅区2长度为5~10mm,之后放置于装有无水乙醇的超声清洗机中洗涤5~20分钟;Take two single-mode optical fibers 1 with a length of 100-1000 mm after writing the fiber grating. The fiber grating area 2 is at the position of 30-50 mm at one end of the single-mode optical fiber 1 after the fiber grating is written. The length of the fiber grating area 2 is 10-50 mm. 20mm, peel off the coating layer of the 50-80mm portion of the end of the single-mode fiber 1 after the fiber grating is written near the fiber grating region 2, and then use mechanical treatment to reduce the size of the single-mode fiber 1 after the fiber grating is written. Strip the diameter of the coating layer: straighten the single-mode fiber 1 after writing the fiber grating, fix the two ends on the fixing device 5 of the synchronous rotating motor 4 and make the rotation axis of the single-mode fiber 1 after writing the fiber grating and The rotation axes of the synchronous rotating motor 4 are coincident, and a runner 3 wrapping the abrasive sheet is installed above the rotation axis of the single-mode optical fiber 1 after the fiber grating is written. The optical fiber 1 is repeatedly moved at a constant speed along the stripped coating layer of the single-mode optical fiber 1 after the fiber grating is written, and is ground. Diameter, when the diameter of the single-mode optical fiber 1 after the optical fiber grating is stripped is reduced to 50-100 μm, stop grinding; the single-mode optical fiber with the optical fiber grating after the optical fiber grating is reduced in diameter Cut off the 30-50mm single-mode optical fiber after the fiber grating grating area 2 on 6, so that the fiber grating grating area 2 is at the end of the single-mode optical fiber 1 after the fiber grating is written with a reduced diameter, and keep the fiber grating grating area 2 The length is 5-10mm, and then placed in an ultrasonic cleaner filled with absolute ethanol for 5-20 minutes;

(2).两根直径减小后的刻写光纤光栅后的单模光纤的自组装(2).Self-assembly of two single-mode optical fibers with reduced diameter and written fiber gratings

准备长度10~30mm、一端有内锥角8、内径为(50~100μm)×3+(1~5)μm的细管7,将第(1)步处理后两根直径减小后的刻写光纤光栅后的单模光纤6从细管7一端的内锥角8插入,保证两根直径减小后的刻写光纤光栅后的单模光纤6端部平齐且超出细管7一端5~10mm;竖直固定细管7并将超出细管7一端的两根直径减小后的刻写光纤光栅后的单模光纤6浸没在装有粘度小于100cp的紫外胶10的玻璃杯9中3~6mm,在毛细作用力下低粘度紫外胶10沿着两根直径减小后的刻写光纤光栅后的单模光纤6向上运动,并使两根直径减小后的刻写光纤光栅后的单模光纤6紧紧靠近形成最紧凑的并列结构,对两根直径减小后的刻写光纤光栅后的单模光纤6进行自组装;5~15分钟后,将细管7和其中自组装后的两根直径减小后的刻写光纤光栅后的单模光纤6从紫外胶中取出,保证自组装后的两根直径减小后的刻写光纤光栅后的单模光纤6不发生错位,并用紫外胶10固化光源对超出细管7一端自组装后的两根直径减小后的刻写光纤光栅后的单模光纤6照射1~10分钟完成紫外胶固化,形成双芯光纤光栅11;尔后,在细管7一端的内锥角8处滴入热固化胶并填满内锥角8,将插有双芯光纤光栅11的细管7放在50~180℃恒温电加热器上加热10~60分钟,使细管7一端的内锥角8中的热固化胶固化;Prepare a thin tube 7 with a length of 10-30 mm, an inner cone angle of 8 at one end, and an inner diameter of (50-100 μm)×3+(1-5) μm, and write the two diameter-reduced tubes after step (1) The single-mode optical fiber 6 behind the fiber grating is inserted from the inner cone angle 8 at one end of the thin tube 7 to ensure that the ends of the two reduced-diameter single-mode optical fibers 6 after writing the optical fiber grating are flush and exceed the end of the thin tube 7 by 5-10mm ; Vertically fix the capillary 7 and immerse the two reduced-diameter single-mode optical fibers 6 beyond one end of the capillary 7 after writing the fiber grating into the glass 9 filled with ultraviolet glue 10 with a viscosity less than 100cp for 3-6mm , under the capillary force, the low-viscosity ultraviolet glue 10 moves upward along the two single-mode optical fibers 6 after the fiber grating is written with the reduced diameter, and makes the two single-mode optical fibers 6 after the fiber grating is written with the reduced diameter Closely close to form the most compact juxtaposed structure, self-assemble two single-mode optical fibers 6 with reduced diameters after writing fiber gratings; The reduced single-mode optical fiber 6 after writing the fiber grating is taken out from the ultraviolet glue to ensure that the self-assembled two single-mode optical fibers 6 with reduced diameter after writing the fiber grating are not misaligned, and the light source is cured with ultraviolet glue 10 Irradiate the two single-mode optical fibers 6 with reduced diameter and written fiber gratings beyond one end of the thin tube 7 after self-assembly for 1 to 10 minutes to complete the curing of the ultraviolet glue to form a dual-core fiber grating 11; then, at one end of the thin tube 7 Drop heat-curing glue into the inner cone angle 8 of the inner cone angle 8 and fill the inner cone angle 8. Put the narrow tube 7 inserted with the dual-core fiber grating 11 on a constant temperature electric heater at 50-180°C for 10-60 minutes to make the thin tube The thermosetting glue in the inner cone angle 8 at one end of the pipe 7 is cured;

(3).双芯光纤光栅的端面研磨(3). End face grinding of dual-core fiber grating

将第(2)步中插有双芯光纤光栅11的细管7固定在光纤研磨机12上,调整细管7高度,使双芯光纤光栅11与光纤研磨机12上的研磨片13接触,之后按照FC/PC光纤接头的研磨方式对其端面进行研磨,并用端面观察装置确认平整、无裂痕和残缺,停止双芯光纤光栅11的端面研磨并用蘸有酒精的无尘纸将端面擦拭干净;Fix the capillary 7 with the dual-core fiber grating 11 inserted in the step (2) on the optical fiber grinder 12, adjust the height of the capillary 7 so that the dual-core fiber grating 11 contacts the polishing sheet 13 on the fiber grinder 12, Then grind the end face according to the grinding method of the FC/PC optical fiber connector, and use the end face observation device to confirm that it is flat, without cracks and incompleteness, stop the end face grinding of the dual-core fiber grating 11 and wipe the end face clean with a dust-free paper dipped in alcohol;

(4).端面研磨后的双芯光纤光栅端部球形针尖的加工(4). Processing of spherical needle tip at the end of dual-core fiber grating after end grinding

熔融光纤法:将第(3)步中端面研磨后的双芯光纤光栅14上端的细管7竖直固定,调节细管7高度使端面研磨后的双芯光纤光栅14下端处于电火花加工机16两根放电电极15针尖中心下方0.5~3mm位置,调节电火花加工机16的放电时间和放电电流,利用电火花放电产生的热量将端面研磨后的双芯光纤光栅14下端0.5~3mm的光纤熔化,利用重力和熔融光纤的表面张力形成一个良好的光纤球,待其冷却后在端面研磨后的双芯光纤光栅14下端形成一个光纤球形针尖17,完成端面研磨后的双芯光纤光栅14端部球形针尖的加工;在电子显微镜下对光纤球形针尖17加工质量进行检定,要求光纤球形针尖17与端面研磨后的双芯光纤光栅14的同轴度小于5μm、光纤球无气泡和破损、光纤球形针尖17直径和端面研磨后的双芯光纤光栅14直径之比大于或等于1.2,挑选合格的双芯光纤光栅探针,完成双芯光纤光栅探针的加工。Fused optical fiber method: the thin tube 7 at the upper end of the dual-core optical fiber grating 14 after the end face grinding in step (3) is vertically fixed, and the height of the thin tube 7 is adjusted so that the lower end of the double-core optical fiber grating 14 after the end face grinding is placed in the electric discharge machine 16. Two discharge electrodes 15 are located 0.5-3 mm below the center of the needle tip. Adjust the discharge time and discharge current of the EDM machine 16, and use the heat generated by the EDM to grind the end face of the double-core fiber grating 14 to 0.5-3 mm from the lower end of the optical fiber. Melting, using gravity and the surface tension of the molten optical fiber to form a good optical fiber ball, after cooling, a spherical fiber tip 17 is formed at the lower end of the dual-core fiber grating 14 after end grinding, and the end of the dual-core optical fiber grating 14 after end grinding The processing of the spherical tip; the processing quality of the optical fiber spherical tip 17 is verified under an electron microscope, and the coaxiality between the optical fiber spherical tip 17 and the double-core fiber grating 14 after end grinding is required to be less than 5 μm, and the optical fiber ball has no bubbles and damage. The ratio of the diameter of the spherical needle tip 17 to the diameter of the dual-core fiber grating 14 after end grinding is greater than or equal to 1.2, and a qualified dual-core fiber grating probe is selected to complete the processing of the dual-core fiber grating probe.

步骤(1)中,减小刻写光纤光栅后的单模光纤1的直径也可以采用氢氟酸腐蚀的处理方式,将刻写光纤光栅后的单模光纤1向下穿过塑料桶盖18上的微孔并固定,向塑料桶19内加入体积分数为10~50%的氢氟酸溶液20,并使刻写光纤光栅后的单模光纤1剥除涂覆层部分的末端浸入体积分数为10~50%的氢氟酸溶液20中60~90mm,每隔2030分钟将刻写光纤光栅后的单模光纤1从塑料桶7中取出,在电子显微镜下测量刻写光纤光栅后的单模光纤1剥除涂覆层部分的直径;当刻写光纤光栅后的单模光纤1剥除涂覆层部分的直径被腐蚀减小至50~100μm时,将直径减小后的刻写光纤光栅后的单模光纤6从塑料桶19中取出并放入装有丙酮的玻璃桶中,使直径减小后的刻写光纤光栅后的单模光纤6剥除涂覆层部分的末端浸入丙酮中80~90mm,做10~30分钟软化处理;用光纤切割刀将直径减小后的刻写光纤光栅后的单模光纤6上的光纤光栅栅区2之后30~50mm的单模光纤切去,使直径减少后的刻写光纤光栅后的单模光纤6上的光纤光栅栅区2处于直径减小后的刻写光纤光栅后的单模光纤6的最末端,并保证刻写光纤光栅后的单模光纤6上的光纤光栅栅区2长度为5~10mm,之后,放置于装有无水乙醇的超声清洗机中洗涤5~20分钟。In step (1), reducing the diameter of the single-mode optical fiber 1 after writing the fiber grating can also be treated by hydrofluoric acid corrosion, and passing the single-mode optical fiber 1 after writing the fiber grating downward through the plastic bucket cover 18. The microholes are fixed, and a hydrofluoric acid solution 20 with a volume fraction of 10-50% is added to the plastic bucket 19, and the end of the single-mode optical fiber 1 stripped of the coating layer after the optical fiber grating is written is immersed in a volume fraction of 10-50%. 50% hydrofluoric acid solution 20 60 ~ 90mm, take out the single-mode fiber 1 after writing the fiber grating from the plastic bucket 7 every 2030 minutes, measure the single-mode fiber 1 after writing the fiber grating under the electron microscope and strip The diameter of the coating layer part; when the diameter of the single-mode optical fiber 1 after the optical fiber grating is written and the coating layer is stripped is reduced to 50-100 μm by corrosion, the single-mode optical fiber 6 after the optical fiber grating is written after the diameter is reduced Take out from the plastic barrel 19 and put into the glass barrel that acetone is housed, make the end of the single-mode optical fiber 6 stripping the coating layer part after the reduction of the diameter after writing the optical fiber grating, immerse in the acetone 80~90mm, do 10~ Softening treatment for 30 minutes; use a fiber cutter to cut off the 30-50mm single-mode optical fiber after the fiber grating grating area 2 on the fiber grating grating area 2 after the reduced diameter of the single-mode optical fiber after the fiber grating is written, so that the fiber grating after the reduced diameter is written The fiber grating grating area 2 on the single-mode optical fiber 6 is at the end of the single-mode optical fiber 6 after the fiber grating is written after the diameter is reduced, and it is ensured that the fiber grating grating area 2 on the single-mode optical fiber 6 after the optical fiber grating is written The length is 5-10 mm, and then placed in an ultrasonic cleaner filled with absolute ethanol for washing for 5-20 minutes.

步骤(2)中,细管7的材料为石英或金属。In step (2), the material of the thin tube 7 is quartz or metal.

步骤(4)中,也可以采用微球安装法在端面研磨后的双芯光纤光栅14端部加工一个球形针尖:将第(3)步中端面研磨后的双芯光纤光栅14上端的细管7水平固定在六自由度调整装置24上,并在研磨后的一端用点胶针头涂抹紫外胶10,在视觉监视系统下手动调节六自由度调整装置24,使端面研磨后双芯光纤光栅14涂抹紫外胶10的一端接近水平平台22上V型槽23中固定的红宝石球形针尖21,端面研磨后的双芯光纤光栅14在与红宝石球形针尖21中心对准后,推进端面研磨后的双芯光纤光栅14与红宝石球形针尖21接触,之后用紫外胶固化光源对接触点照射1~10分钟,完成端面研磨后的双芯光纤光栅14端部球形针尖的加工,完成双芯光纤光栅探针的加工。In step (4), a spherical needle tip can also be processed at the end of the dual-core fiber grating 14 after end grinding by using the microsphere installation method: the fine tube at the upper end of the dual-core fiber grating 14 after end grinding in step (3) 7. Fix it horizontally on the six-degree-of-freedom adjustment device 24, and apply ultraviolet glue 10 on the polished end with a dispensing needle, and manually adjust the six-degree-of-freedom adjustment device 24 under the visual monitoring system to make the double-core fiber grating 14 after the end surface is ground One end coated with UV glue 10 is close to the ruby spherical needle point 21 fixed in the V-shaped groove 23 on the horizontal platform 22, and the double-core fiber grating 14 after the end face grinding is aligned with the center of the ruby spherical needle point 21, and the double-core fiber grating after the end face grinding is pushed forward. The optical fiber grating 14 is in contact with the ruby spherical needle tip 21, and then irradiates the contact point with an ultraviolet glue curing light source for 1 to 10 minutes to complete the processing of the spherical needle tip at the end of the dual-core optical fiber grating 14 after end grinding, and to complete the double-core optical fiber grating probe. processing.

红宝石球形针尖21直径与端面研磨后的双芯光纤光栅14直径之比大于或等于1.2。The ratio of the diameter of the ruby spherical needle point 21 to the diameter of the double-core optical fiber grating 14 after end face grinding is greater than or equal to 1.2.

基于自组装原理的双芯光纤光栅微尺度测量探针制作方法的技术创新点和有益技术效果是:采用刻写光纤光栅后的单模光纤制作双芯光纤光栅探针,避免了直接在多芯光纤上刻写光纤光栅带来刻写串扰,制作完成的双芯光纤光栅探针具有光谱信号好的特点,可以提高双芯光纤光栅探针输出信号的信噪比;本发明可以根据测量需求设计双芯光纤光栅探针的结构参数,如双芯光纤光栅探针的直径、长度和球形针尖的直径等,具有设计、制作灵活的特点;本发明制作的双芯光纤光栅探针自带单模尾纤,避免使用多芯光纤扇出接头,极大地降低了双芯光纤光栅探针使用中的成本和光损耗,有利于双芯光纤光栅探针在微尺度测量领域中的推广和应用。The technical innovations and beneficial technical effects of the method of making dual-core fiber grating micro-scale measurement probes based on the principle of self-assembly are: the dual-core fiber grating probe is made by using the single-mode fiber after the fiber grating is written, which avoids directly inserting the fiber grating on the multi-core fiber. Writing fiber gratings on it brings writing crosstalk, and the completed dual-core fiber grating probe has the characteristics of good spectral signals, which can improve the signal-to-noise ratio of the output signal of the dual-core fiber grating probe; the invention can design dual-core fiber optics according to measurement requirements The structural parameters of the grating probe, such as the diameter of the double-core fiber grating probe, the length and the diameter of the spherical needle point, etc., have the characteristics of flexible design and manufacture; the double-core fiber grating probe made by the present invention comes with a single-mode pigtail, Avoiding the use of multi-core optical fiber fan-out connectors greatly reduces the cost and optical loss in the use of dual-core fiber grating probes, which is conducive to the promotion and application of dual-core fiber grating probes in the field of micro-scale measurement.

Claims (5)

1.一种基于自组装原理的双芯光纤光栅微尺度测量探针制作方法,其特征在于:所述方法包括以下步骤:1. A method for making a dual-core fiber grating micro-scale measurement probe based on the principle of self-assembly, characterized in that: the method may further comprise the steps: (1).减小刻写光纤光栅后的单模光纤直径(1). Reduce the diameter of the single-mode fiber after writing the fiber grating 取两根长度为100~1000mm刻写光纤光栅后的单模光纤,光纤光栅栅区处于刻写光纤光栅后的单模光纤的一端30~50mm的位置,光纤光栅栅区长度为10~20mm,将刻写光纤光栅后的单模光纤靠近光纤光栅栅区的末端长度为50~80mm部分的涂覆层剥除,之后采用机械处理的方法减小刻写光纤光栅后的单模光纤剥除涂覆层部分的直径:将刻写光纤光栅后的单模光纤拉直,两端固定在同步旋转电机的固定装置上并且使将刻写光纤光栅后的单模光纤的转动轴线与同步旋转电机的转动轴线重合,在刻写光纤光栅后的单模光纤转动轴上方装有一个包裹研磨片的转轮,包裹研磨片的转轮靠近并接触刻写光纤光栅后的单模光纤并沿刻写光纤光栅后的单模光纤在剥除涂覆层部分反复匀速运动,进行磨削,同时采用显微观察系统检测刻写光纤光栅后的单模光纤剥除涂覆层部分的直径,当刻写光纤光栅后的单模光纤剥除涂覆层部分的直径减小至50~100μm时,停止磨削;用光纤切割刀将直径减小后的刻写光纤光栅后的单模光纤上的光纤光栅栅区之后30~50mm的单模光纤切去,使光纤光栅栅区处于直径减小后的刻写光纤光栅后的单模光纤的末端,并保证 光纤光栅栅区长度为5~10mm,之后放置于装有无水乙醇的超声清洗机中洗涤5~20分钟;Take two single-mode optical fibers with a length of 100-1000mm after writing the fiber grating. The coating layer of the single-mode fiber after the fiber grating is stripped near the end of the fiber grating region with a length of 50-80 mm, and then mechanical treatment is used to reduce the coating layer of the single-mode fiber after the fiber grating is written. Diameter: Straighten the single-mode fiber after writing the fiber grating, fix both ends on the fixture of the synchronous rotating motor and make the rotation axis of the single-mode fiber after writing the fiber grating coincide with the rotation axis of the synchronous rotating motor. A rotating wheel wrapping the abrasive sheet is installed above the rotating shaft of the single-mode fiber behind the fiber Bragg grating. The wheel wrapping the abrasive sheet is close to and contacts the single-mode fiber after the fiber Bragg grating is written and is stripped along the single-mode fiber after the fiber Bragg grating is written. The coating layer moves repeatedly at a constant speed for grinding. At the same time, a microscopic observation system is used to detect the diameter of the stripped coating layer of the single-mode fiber after the fiber grating is written. When the diameter of the part is reduced to 50-100 μm, stop grinding; use a fiber cutter to cut off the 30-50 mm single-mode fiber after the fiber grating grating area on the single-mode fiber after the fiber grating is written, Make the fiber grating grating area at the end of the single-mode optical fiber after the fiber grating has been written with a reduced diameter, and ensure that the fiber grating grating area is 5-10mm in length, and then place it in an ultrasonic cleaning machine equipped with absolute ethanol for 5-5 mm. 20 minutes; (2).两根直径减小后的刻写光纤光栅后的单模光纤的自组装(2).Self-assembly of two single-mode optical fibers with reduced diameter and written fiber gratings 准备长度10~30mm、一端有内锥角、内径为(50~100μm)×3+(1~5)μm的细管,将第(1)步处理后两根直径减小后的刻写光纤光栅后的单模光纤从细管一端的内锥角插入,保证两根直径减小后的刻写光纤光栅后的单模光纤端部平齐且超出细管一端5~10mm;竖直固定细管并将超出细管一端的两根直径减小后的刻写光纤光栅后的单模光纤浸没在装有粘度小于100cp的紫外胶的玻璃杯中3~6mm,在毛细作用力下低粘度紫外胶沿着两根直径减小后的刻写光纤光栅后的单模光纤向上运动,并使两根直径减小后的刻写光纤光栅后的单模光纤紧紧靠近形成最紧凑的并列结构,对两根直径减小后的刻写光纤光栅后的单模光纤进行自组装;5~15分钟后,将细管和其中自组装后的两根直径减小后的刻写光纤光栅后的单模光纤从紫外胶中取出,保证自组装后的两根直径减小后的刻写光纤光栅后的单模光纤不发生错位,并用紫外胶固化光源对超出细管一端自组装后的两根直径减小后的刻写光纤光栅后的单模光纤照射1~10分钟完成紫外胶固化,形成双芯光纤光栅;尔后,在细管一端的内锥角处滴入热固化胶并填满内锥角,将插有双芯光纤光栅的细管放在50~180℃恒温电加热器上加热10~60分钟,使细管一端的内锥角中的热固化胶固化;Prepare a thin tube with a length of 10-30mm, an inner taper angle at one end, and an inner diameter of (50-100μm)×3+(1-5)μm, and write the two fiber gratings with reduced diameters after the treatment in step (1) Insert the final single-mode optical fiber from the inner taper angle of one end of the thin tube to ensure that the ends of the two reduced-diameter single-mode optical fibers after writing fiber gratings are flush and extend 5-10mm beyond the end of the thin tube; fix the thin tube vertically and Immerse the two single-mode optical fibers with reduced diameter beyond one end of the thin tube and write fiber gratings in a glass cup filled with UV glue with a viscosity less than 100cp. Under the capillary force, the low viscosity UV glue goes along The two single-mode fibers with reduced diameters and written fiber gratings move upward, and make the two single-mode fibers with reduced diameters written with fiber gratings close together to form the most compact parallel structure. After 5-15 minutes, the thin tube and the two self-assembled single-mode fibers with reduced diameter after writing the fiber grating are taken out from the ultraviolet glue , to ensure that the two self-assembled single-mode fibers with reduced diameters after writing fiber gratings are not misaligned, and use a UV glue curing light source to fix the two self-assembled fiber gratings with reduced diameters beyond one end of the thin tube The single-mode optical fiber is irradiated for 1 to 10 minutes to complete the curing of the ultraviolet glue to form a dual-core fiber grating; then, drop the heat-curing glue at the inner cone angle at one end of the thin tube and fill the inner cone angle, and insert the dual-core fiber grating Place the thin tube on a constant temperature electric heater at 50-180°C and heat it for 10-60 minutes to cure the heat-curing glue in the inner cone angle at one end of the thin tube; (3).双芯光纤光栅的端面研磨(3). End face grinding of dual-core fiber grating 将第(2)步中插有双芯光纤光栅的细管固定在光纤研磨机上,调整细管高度,使双芯光纤光栅与光纤研磨机上的研磨片接触,之后按照FC/PC光纤接头的研磨方式对其端面进行研磨,并用端面观察装置确认平整、无裂痕和残缺,停止双芯光纤光栅的端面研磨并用蘸有酒精的无尘纸将端面擦拭干净;Fix the thin tube with the dual-core fiber grating inserted in step (2) on the fiber grinder, adjust the height of the thin tube so that the dual-core fiber grating is in contact with the polishing sheet on the fiber grinder, and then grind according to the FC/PC fiber optic connector. Grind the end face of the dual-core fiber grating by using the end face observation device to confirm that it is flat, free of cracks and incompleteness, stop the end face grinding of the dual-core fiber grating and wipe the end face clean with a dust-free paper dipped in alcohol; (4).端面研磨后的双芯光纤光栅端部球形针尖制作(4). Fabrication of spherical needle tip at the end of dual-core fiber grating after end grinding 熔融光纤法:将第(3)步中端面研磨后的双芯光纤光栅上端的细管竖直固定,调节细管高度使端面研磨后的双芯光纤光栅下端处于电火花加工机两根放电电极针尖中心下方0.5~3mm位置,调节电火花加工机的放电时间和放电电流,利用电火花放电产生的热量将端面研磨后的双芯光纤光栅下端0.5~3mm的光纤熔化,利用重力和熔融光纤的表面张力形成一个良好的光纤球,待其冷却后在端面研磨后的双芯光纤光栅下端形成一个光纤球形针尖,完成端面研磨后的双芯光纤光栅端部球形针尖的加工;在电子显微镜下对光纤球形针尖加工质量进行检定,要求光纤球针尖与端面研磨后的双芯光纤光栅的同轴度小于5μm、光纤球无气泡和破损、光纤球直径和端面研磨后的双芯光纤光栅直径之比大于或等于1.2,挑选合格的双芯光纤光栅探针,完成双芯光纤光栅探针的制作。Fused fiber method: fix the thin tube at the upper end of the double-core fiber grating after the end face grinding in step (3) vertically, adjust the height of the thin tube so that the lower end of the double-core fiber grating after the end face grinding is at the two discharge electrodes of the EDM At the position 0.5-3mm below the center of the needle tip, adjust the discharge time and discharge current of the EDM machine, use the heat generated by the EDM to melt the 0.5-3mm optical fiber at the lower end of the double-core fiber grating after the end face is ground, and use gravity and the melting of the optical fiber The surface tension forms a good fiber optic ball, and after it cools down, a fiber spherical needle tip is formed at the lower end of the double-core fiber grating after end grinding, and the processing of the spherical needle tip at the end of the double-core fiber grating after end grinding is completed; The processing quality of the optical fiber spherical tip is verified. It is required that the concentricity between the optical fiber spherical tip and the dual-core fiber grating after end grinding is less than 5 μm, the optical fiber ball has no bubbles and damage, and the ratio of the diameter of the optical fiber ball to the diameter of the dual-core optical fiber grating after end grinding Greater than or equal to 1.2, select qualified dual-core fiber grating probes, and complete the production of dual-core fiber grating probes. 2.根据权利要求1所述基于自组装原理的双芯光纤光栅微尺度测量探针制作方法,其特征在于:所述步骤(1)减小刻写光纤光栅后的单模光纤直径也可以采用氢氟酸腐蚀的处理方式:将刻写光纤光栅后的单模光纤向下穿过塑料桶盖上的微孔并固定,向塑料桶内加入体积分数为10~50%的氢氟酸溶液并使刻写光纤光栅后的单模光纤剥除涂覆层部分的末端浸入体积分数为10~50%的氢氟酸溶液中60~90mm,每隔20~30分钟将刻写光纤光栅后的单模光纤从塑料桶中取出,在电子显微镜下测量刻写光纤光栅后的单模光纤剥除涂覆层部分的直径;当刻写光纤光栅后的单模光纤剥除涂覆层部分的直径被腐蚀减小至50~100μm时,将直径减小后的刻写光纤光栅后的单模光纤从塑料桶中取出并放入装有丙酮的玻璃桶中,使直径减小后的刻写光纤光栅后的单模光纤剥除涂覆层部分的末端浸入丙酮中80~90mm,做10~30分钟软化处理;用光纤切割刀将直径减小后的刻写光纤光栅后的单模光纤上的光纤光栅栅区之后30~50mm的单模光纤切去,使光纤光栅栅区处于直径减小后的刻写光纤光栅后的单模光纤的最末端,并保证光纤光栅栅区长度为5~10mm,之后放置于装有无水乙醇的超声清洗机中洗涤5~20分钟。2. according to claim 1, based on the self-assembly principle of the dual-core fiber grating micro-scale measurement probe manufacturing method, it is characterized in that: the step (1) reduces the single-mode fiber diameter after writing the fiber grating and can also use hydrogen Treatment method of hydrofluoric acid corrosion: pass the single-mode optical fiber after writing the fiber grating down through the microhole on the plastic bucket cover and fix it, add a hydrofluoric acid solution with a volume fraction of 10-50% into the plastic bucket and make the writing The end of the single-mode optical fiber after the optical fiber grating is stripped of the coating layer is immersed in a hydrofluoric acid solution with a volume fraction of 10-50% for 60-90mm, and the single-mode optical fiber after the optical fiber grating is written is removed from the plastic every 20-30 minutes. Take it out from the bucket, and measure the diameter of the stripped coating layer part of the single-mode fiber after the fiber grating is written under an electron microscope; when the fiber grating is written, the diameter of the stripped coating layer part of the single-mode fiber is reduced to 50~ When the diameter is 100 μm, take out the single-mode optical fiber with reduced diameter from the plastic barrel and put it into a glass barrel filled with acetone, so that the single-mode optical fiber with reduced diameter after the optical fiber grating is stripped. The end of the cladding part is immersed in acetone for 80-90 mm, and softened for 10-30 minutes; use a fiber cutter to cut the single-mode optical fiber 30-50 mm behind the fiber grating grating area on the single-mode fiber after the fiber grating has been reduced in diameter. The mode fiber is cut off, so that the fiber grating grating area is at the end of the single-mode fiber after the fiber grating is written with reduced diameter, and the length of the fiber grating grating area is guaranteed to be 5-10mm, and then placed in an ultrasonic chamber filled with absolute ethanol. Wash in the washing machine for 5-20 minutes. 3.根据权利要求1所述基于自组装原理的双芯光纤光栅微尺度测量探针制作方法,其特征在于:在步骤(2)中,细管的材料为石英或金属。3. The method for manufacturing the microscale measuring probe based on self-assembly principle of dual-core fiber grating according to claim 1, characterized in that: in step (2), the material of the capillary is quartz or metal. 4.根据权利要求1所述基于自组装原理的双芯光纤光栅微尺度测量探针制作方法,其特征在于:在步骤(4)中,也可以采用微球安装法在端面研磨后的双芯光纤光栅端部加工一个球形针尖:将第(3)步中端面研磨后的双芯光纤光栅上端的细管水平固定在六自由度调整装置上,并在研磨后的一端用点胶针头涂抹紫外胶,在视觉监视系统下手动调节六自由度调整装置,使端面研磨后双芯光纤光栅涂抹紫外胶的一端接近水平平台上V型槽中固定的红宝石球形针尖,端面研磨后的双芯光纤光栅在与红宝石球形针尖中心对准后,推进端面研磨后的双芯光纤光栅与红宝石球形针尖接触,之后用紫外胶固化光源对接触点照射1~10分钟,完成双芯光纤光栅球形针尖的加工,制成双芯光纤光栅探针。4. according to claim 1 based on the self-assembly principle of the dual-core fiber grating micro-scale measurement probe manufacturing method, it is characterized in that: in step (4), also can adopt the microsphere mounting method to grind the double-core after the end face Process a spherical needle tip at the end of the fiber grating: fix the thin tube at the upper end of the double-core fiber grating after the end surface is ground in step (3) horizontally on the six-degree-of-freedom adjustment device, and apply UV light to the ground end with a dispensing needle. Glue, manually adjust the six-degree-of-freedom adjustment device under the visual monitoring system, so that the end of the double-core fiber grating coated with UV glue after end face grinding is close to the ruby spherical needle tip fixed in the V-shaped groove on the horizontal platform, and the end face of the double-core fiber grating after grinding After aligning with the center of the ruby spherical tip, push the double-core optical fiber grating with the end face ground into contact with the ruby spherical tip, and then irradiate the contact point with a UV glue curing light source for 1 to 10 minutes to complete the processing of the dual-core optical fiber grating spherical tip. A dual-core fiber grating probe is made. 5.根据权利要求4所述基于自组装原理的双芯光纤光栅微尺度测量探针制作方法,其特征在于:红宝石球形针尖直径与端面研磨后的双芯光纤光栅直径之比大于或等于1.2。5. According to claim 4, the method for making a micro-scale measuring probe based on the self-assembly principle of a double-core fiber grating is characterized in that: the ratio of the diameter of the ruby spherical tip to the diameter of the double-core fiber grating after end face grinding is greater than or equal to 1.2.
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