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CN104651802A - Method for directly synthesising nitrogen-doped graphene by simply using solid nitrogen source - Google Patents

Method for directly synthesising nitrogen-doped graphene by simply using solid nitrogen source Download PDF

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CN104651802A
CN104651802A CN201510025211.5A CN201510025211A CN104651802A CN 104651802 A CN104651802 A CN 104651802A CN 201510025211 A CN201510025211 A CN 201510025211A CN 104651802 A CN104651802 A CN 104651802A
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nitrogen
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doped graphene
graphene
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胡宝山
卞亚伟
方千瑞
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Zhejiang Sheng Yuan Chemical Fibre Co Ltd
Chongqing University
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Zhejiang Sheng Yuan Chemical Fibre Co Ltd
Chongqing University
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Abstract

本发明属于纳米碳材料制备技术领域,提供一种以三聚氰胺为主氮、碳源,甲烷为辅助碳源,在常压条件下使用化学气相沉积法合成掺氮石墨烯的新方法。该方法不使用金属基底以外的其他催化剂,没有使用常规的气体或者液体氮源,成本低,无毒,操作简便,便于工艺应用。而且反应过程对设备没有特殊要求,不需要主加热装置以外的其他加热装置,可操作性强,适合实际推广。通过先在低温阶段使铜缓慢升温,当达到反应温度后将氮源、碳源一次同时引入管式炉中,然后待反应完成后,迅速降温至室温。此时金属表面已生成一层掺氮石墨烯薄膜。石墨烯中氮的掺杂量和掺杂类型以及石墨烯的厚度、结晶程度等结构调控均可以通过优化氮源量、前后温区的温度匹配、反应时间、反应温度等参数加以实现。

The invention belongs to the technical field of nano-carbon material preparation, and provides a new method for synthesizing nitrogen-doped graphene by using chemical vapor deposition under normal pressure conditions, with melamine as the main nitrogen and carbon source and methane as the auxiliary carbon source. The method does not use other catalysts other than metal substrates, does not use conventional gas or liquid nitrogen sources, has low cost, is non-toxic, is easy to operate, and is convenient for process application. Moreover, the reaction process has no special requirements on equipment, does not need other heating devices other than the main heating device, has strong operability, and is suitable for practical promotion. Firstly, the temperature of copper is raised slowly in the low temperature stage, and when the reaction temperature is reached, the nitrogen source and the carbon source are simultaneously introduced into the tube furnace at one time, and then the temperature is rapidly lowered to room temperature after the reaction is completed. At this time, a layer of nitrogen-doped graphene film has been formed on the metal surface. The doping amount and doping type of nitrogen in graphene, as well as the thickness and crystallinity of graphene can be controlled by optimizing the parameters of nitrogen source, temperature matching of front and rear temperature zones, reaction time, reaction temperature and other parameters.

Description

一种简单使用固体氮源直接合成掺氮石墨烯的方法A simple method for directly synthesizing nitrogen-doped graphene using a solid nitrogen source

技术领域technical field

本发明属于碳纳米材料制备技术领域,涉及一种以三聚氰胺为氮源,无需外加催化剂,在CVD过程中一步合成掺氮石墨烯,反应过程中使用仪器简单,过程简洁,不需要除主加热设备以外的其他加热设备的CVD合成石墨烯的方法。The invention belongs to the technical field of carbon nanomaterial preparation, and relates to a method of synthesizing nitrogen-doped graphene in one step in a CVD process using melamine as a nitrogen source without adding a catalyst. The instrument used in the reaction process is simple, the process is simple, and no main heating equipment CVD synthesis of graphene methods other than heating equipment.

背景技术Background technique

石墨稀作为一种独特的sp2杂化的二维单层材料,其稳定的六边形晶格结构赋予了石墨稀许多优异的物理和化学性质(Geim A K.science,2009,324,1530.)。例如其热导性能(3000W/(m K))10倍于铜(397W/(m K)),杨氏模量达1.0TPa,硬度大于金刚石,是目前自然界最硬的材料。此外室温下石墨烯还具有超高的电子迁移率(约15000cm2/(V s))大于单晶硅,电阻率约为10-6Ω·cm,低于铜或银,为目前世界上电阻率最小的材料。而且单层石墨烯具有很好的光学性质,在很宽的波段内吸光率仅为2.3%。这使得它在许多高科技领域都有广阔的应用前景,这也使得石墨烯的制备成为近期研究的热点(李旭.材料导报,2008,22(8),48.)。Graphene is a unique sp 2 hybridized two-dimensional single-layer material, and its stable hexagonal lattice structure endows graphene with many excellent physical and chemical properties (Geim A K.science, 2009, 324, 1530 .). For example, its thermal conductivity (3000W/(m K)) is 10 times that of copper (397W/(m K)), Young's modulus reaches 1.0TPa, and its hardness is greater than that of diamond. It is currently the hardest material in nature. In addition, graphene also has ultra-high electron mobility (about 15000cm 2 /(V s)) at room temperature, which is higher than that of single crystal silicon, and its resistivity is about 10 -6 Ω·cm, which is lower than that of copper or silver. material with the lowest rate. Moreover, single-layer graphene has very good optical properties, and its light absorption rate is only 2.3% in a wide wavelength band. This makes it have broad application prospects in many high-tech fields, which also makes the preparation of graphene a recent research focus (Li Xu. Materials Herald, 2008, 22(8), 48.).

然而石墨烯也具有两大不足之处,首先石墨烯本身没有能带间隙,这在很大程度上限制了石墨烯在电学器件上的应用。其次,石墨烯的表面没有活化官能团,不利于与其他材料(如金属粒子与有机功能小分子)的复合,这也影响了石墨烯在很多应用领域的研究和推广。科学研究发现,在石墨烯中进行杂原子掺杂,可以在较大程度保证石墨烯优良电学性能前提下,引入能带间隙,并提供石墨烯表面反应位点,增强石墨烯的化学活性,从而可更方便的应用于诸多电化学领域,如燃料电池(Zheng B,et al.Electrochemistry Communications,2013,28,24.),传感器(Guo H L,et al.Sensors and Actuators B:Chemical,2014,193,623.),超级电容器(苏鹏.物理化学学报,2012,28,2745.)。However, graphene also has two major disadvantages. First, graphene itself has no energy band gap, which largely limits the application of graphene in electrical devices. Secondly, there are no activated functional groups on the surface of graphene, which is not conducive to the compounding with other materials (such as metal particles and organic functional small molecules), which also affects the research and promotion of graphene in many application fields. Scientific research has found that heteroatom doping in graphene can introduce energy band gaps and provide graphene surface reaction sites to enhance the chemical activity of graphene while ensuring the excellent electrical properties of graphene to a large extent. It can be more conveniently applied to many electrochemical fields, such as fuel cells (Zheng B, et al. Electrochemistry Communications, 2013, 28, 24.), sensors (Guo H L, et al. Sensors and Actuators B: Chemical, 2014, 193,623.), Supercapacitor (Su Peng. Acta Physicochemical Sinica, 2012,28,2745.).

掺氮石墨烯按照C-N的键接方式可以分为三种,即石墨型N,吡啶型N和吡咯型N。其中影响掺氮石墨烯的电学性质的因素,主要是掺氮方式和掺氮量,而且各掺氮方式的相对比例起主导作用。例如有研究表明,石墨型N的相对含量对于掺氮石墨烯电催化性能起主导作用(Wang Z,et al.Journal of Materials Chemistry C,2014,2,7396.),Wang的课题组合成的掺氮石墨烯与之前报道(Lu Y F,et al.ACS Nano,2013,7,6522.),两个课题组合成的掺氮石墨烯的掺氮量均为5.6%,但是Wang的掺氮类型中石墨型氮达到40%以上,最终掺氮石墨烯的电子迁移率分别为74cm2V-1s-1和5cm2V-1s-1,二者相差较多。Nitrogen-doped graphene can be divided into three types according to the bonding mode of CN, namely graphite-type N, pyridine-type N and pyrrole-type N. Among them, the factors affecting the electrical properties of nitrogen-doped graphene are mainly the nitrogen doping method and the amount of nitrogen doping, and the relative proportion of each nitrogen doping method plays a leading role. For example, studies have shown that the relative content of graphite-type N plays a leading role in the electrocatalytic performance of nitrogen-doped graphene (Wang Z, et al. Journal of Materials Chemistry C, 2014, 2, 7396.), and the doped Nitrogen graphene and the previous report (Lu Y F, et al. ACS Nano, 2013, 7, 6522.), the nitrogen doping amount of the nitrogen doped graphene combined by the two subjects is 5.6%, but the nitrogen doping type of Wang The graphitic nitrogen reaches more than 40%, and the electron mobilities of the final nitrogen-doped graphene are 74cm 2 V -1 s -1 and 5cm 2 V -1 s -1 respectively, which are quite different.

掺氮石墨烯的性质研究和应用有赖于它的廉价规模化制备。自从石墨烯首次被胶带剥离法制备得到以来,关于掺氮石墨烯的制备也随着人们对其电催化活性的关注而不断涌现新的方法,比如:氧化石墨烯共热法、化学气象沉积法、水热法、等离子处理法等。The properties research and application of nitrogen-doped graphene depend on its cheap and large-scale preparation. Since graphene was first prepared by the tape stripping method, new methods have been emerging for the preparation of nitrogen-doped graphene as people pay attention to its electrocatalytic activity, such as: graphene oxide co-heating method, chemical vapor deposition method , hydrothermal method, plasma treatment method, etc.

其中氧化石墨烯共热法,过程中需要使用浓硫酸,然后与NH3(Zhang L.S,et al.PhysicalChemistry Chemical Physics,2010,12,12055.)或有机氮源(如三聚氰胺)(Sheng Z.H,et al.ACSNano,2011,5,4350.)进行共热而制得。水热法经常使用金属氮盐与有机分子反应,如Li3N/CCl4(Deng D,et al.Chemistry of Materials,2011,23,1188.)。等离子法使用氧化石墨烯与N2(Shao Y,et al.Journal of Materials Chemistry,2010,20,7491.)发生反应制得掺氮石墨烯。Wherein the graphene oxide co-heating method requires the use of concentrated sulfuric acid in the process, and then with NH 3 (Zhang LS, et al.PhysicalChemistry Chemical Physics, 2010,12,12055.) or organic nitrogen source (such as melamine) (Sheng ZH, et al. al.ACSNano, 2011, 5, 4350.) was prepared by co-heating. Hydrothermal methods often use metal nitrogen salts to react with organic molecules, such as Li 3 N/CCl 4 (Deng D, et al. Chemistry of Materials, 2011, 23, 1188.). The plasma method uses graphene oxide to react with N 2 (Shao Y, et al. Journal of Materials Chemistry, 2010, 20, 7491.) to prepare nitrogen-doped graphene.

由于氧化石墨烯法需要使用浓硫酸,反应的安全性限制了该方法的实际推广;水热法则由于其成本较高以及重现性较差限制了其发展;等离子处理法对反应装置要求较高,不利于实际应用。相比而言,化学气相沉积法合成掺氮石墨烯的研究取得了丰硕的成果,其中以铜为催化基底研究的较为成熟,关于氮源的选择,分别为气体氮源、液体氮源与固体氮源。气体氮源的研究以NH3(Wei D,et al.Nano Letters,2009,9,1752.)较多,其具体操作为使用NH3与CH4混合后通入反应装置;液体氮源主要使用大分子含氮化合物,如使用吡啶(Jin Z,et al.ACS Nano,2011,5,4112.),该法合成的掺氮石墨烯质量较高,但是由于吡啶价格较高且有一定的毒性,不利于生产推广。Since the graphene oxide method requires the use of concentrated sulfuric acid, the safety of the reaction limits the practical promotion of this method; the hydrothermal method limits its development due to its high cost and poor reproducibility; the plasma treatment method has higher requirements on the reaction device , which is not conducive to practical application. In contrast, the research on the synthesis of nitrogen-doped graphene by chemical vapor deposition has achieved fruitful results. Among them, the research on copper as the catalytic substrate is relatively mature. Regarding the choice of nitrogen source, they are gaseous nitrogen source, liquid nitrogen source and solid Nitrogen source. NH 3 (Wei D, et al. Nano Letters, 2009, 9, 1752.) is the most researched gaseous nitrogen source, and its specific operation is to use NH 3 mixed with CH 4 and then pass it into the reaction device; the liquid nitrogen source mainly uses Macromolecular nitrogen-containing compounds, such as pyridine (Jin Z, et al. ACS Nano, 2011, 5, 4112.), the nitrogen-doped graphene synthesized by this method is of high quality, but due to the high price of pyridine and certain toxicity , is not conducive to production promotion.

关于固体氮源目前研究较少,现有主要成果是:Sun课题组使用三聚氰胺溶于PMMA溶液作为碳源、氮源,反应过程需在低压条件下进行,而且需要旋涂后使用光刻蚀方法辅助合成石墨烯(Sun Z Z,et al.Nature,2010,468,549.),合成掺氮量为2%。Wang课题组使用三聚氰胺作为氮源(Wang Z,et al.Journal of Materials Chemistry C,2014,2,7396.),合成产物的掺氮量为5.6%,但是过程采用低压条件,并且使用了额外加热装置,过程较复杂。At present, there are few studies on solid nitrogen sources. The main achievements are: Sun’s research group uses melamine dissolved in PMMA solution as carbon and nitrogen sources. The reaction process needs to be carried out under low pressure conditions, and photolithography is required after spin coating. Assisted in the synthesis of graphene (Sun Z Z, et al. Nature, 2010, 468, 549.), the synthetic nitrogen doping amount is 2%. Wang's research group used melamine as a nitrogen source (Wang Z, et al. Journal of Materials Chemistry C, 2014, 2, 7396.), and the nitrogen doping amount of the synthesized product was 5.6%, but the process used low pressure conditions and used additional heating device, the process is more complicated.

本研究直接使用三聚氰胺作为氮源,不需要对三聚氰胺进行溶剂化、涂覆于催化剂表面等特殊预处理,反应过程在常压下进行,反应成本低廉,不需要除主加热设备以外的其他加热设备,对反应装置的要求低,且操作方便,工艺简单易于生产推广。In this study, melamine was directly used as the nitrogen source, and special pretreatments such as solvation of melamine and coating on the surface of the catalyst were not required. The reaction process was carried out under normal pressure, and the reaction cost was low, and no heating equipment other than the main heating equipment was required. , low requirements on the reaction device, convenient operation, simple process and easy production and popularization.

发明内容Contents of the invention

合成掺氮石墨烯采用固体氮源法,简化反应过程,降低成本,利用廉价的固体氮源三聚氰胺,在常压条件下利用CVD过程直接合成掺氮石墨烯。方法过程除了石墨烯生长的催化金属外,无需外加催化剂,不需要对固体的三聚氰胺进行特殊处理(比如配制成溶液、或者涂覆于外加催化材料表面),而且除使用主加热装置外不需要其他的加热设备。The synthesis of nitrogen-doped graphene adopts the solid nitrogen source method, which simplifies the reaction process and reduces the cost. The cheap solid nitrogen source melamine is used to directly synthesize nitrogen-doped graphene by CVD process under normal pressure conditions. In addition to the catalytic metal for graphene growth, the process of the method does not require additional catalysts, does not require special treatment of solid melamine (such as being formulated into a solution, or coated on the surface of an external catalytic material), and does not require other catalysts except for the use of the main heating device. heating equipment.

本发明解决其技术问题采用的技术方案是:利用双温区管式炉,在上气流方向将三聚氰胺置于特制的石英样品舟内,在下气流方向,将金属催化基底(如铜箔)置于带有磁石手柄的石英托盘上,其后安装好管式炉两侧法兰,打开混气系统并依次调节CVD中所需要的气体流量,然后在载气保护下,调节控温装置,将管式炉以10-20℃/min的速率升温到待定反应温度。该方法中,为了解决三聚氰胺的热挥发问题,在到达反应温度前三聚氰胺样品始终置于管式炉加热区外部,当到达预定温度后再将样品送至加热炉中。利用载气/反应气的气流方向,将气化的碳源和氮源输送到下气流方向的催化金属基底上实现碳源/氮源的分解,碳原子/氮原子在催化金属表面的沉积、扩散/溶解、成核、生长等过程。待反应结束后,将下气流方向(第二温区)的催化金属移出加热温区,以20-50℃/min的速率快速降温。待冷却至室温后取出金属基底,此时催化金属表面成功合成掺氮石墨烯。The technical solution adopted by the present invention to solve its technical problem is: utilize double-temperature-zone tubular furnace to place melamine in a special quartz sample boat in the direction of the upper airflow, and place the metal catalytic substrate (such as copper foil) in the direction of the lower airflow. On the quartz tray with a magnet handle, install the flanges on both sides of the tube furnace, turn on the gas mixing system and adjust the gas flow required in CVD in turn, and then under the protection of the carrier gas, adjust the temperature control device to turn the tube The furnace was heated up to the undetermined reaction temperature at a rate of 10-20°C/min. In this method, in order to solve the problem of thermal volatilization of melamine, the melamine sample is always placed outside the heating zone of the tube furnace before reaching the reaction temperature, and the sample is sent to the heating furnace after reaching the predetermined temperature. Using the gas flow direction of the carrier gas/reaction gas, the vaporized carbon source and nitrogen source are transported to the catalytic metal substrate in the downward gas flow direction to realize the decomposition of the carbon source/nitrogen source, and the deposition of carbon atoms/nitrogen atoms on the surface of the catalytic metal, Diffusion/dissolution, nucleation, growth and other processes. After the reaction is finished, the catalytic metal in the downflow direction (the second temperature zone) is removed from the heating temperature zone, and the temperature is rapidly lowered at a rate of 20-50° C./min. After cooling to room temperature, the metal substrate was taken out, and nitrogen-doped graphene was successfully synthesized on the catalytic metal surface.

本发明的有益效果是,反应压力为大气压,过程中不需要金属催化基底以外的其他催化剂,而且没有使用常规的气体或者液体氮源,成本低,无毒,操作简便,便于工艺应用。对反应设备没有特殊要求,不需要主加热装置以外的其他加热装置,可操作性强,适合实际推广。石墨烯中氮的掺杂量和掺杂类型以及石墨烯的厚度、结晶程度等结构调控均可以通过优化氮源量、前后温区的温度匹配、反应时间、反应温度等参数加以实现。The beneficial effect of the present invention is that the reaction pressure is atmospheric pressure, no catalyst other than the metal catalytic substrate is needed in the process, and no conventional gas or liquid nitrogen source is used, the method is low in cost, non-toxic, easy to operate and convenient for process application. There is no special requirement for the reaction equipment, no heating device other than the main heating device is needed, the operability is strong, and it is suitable for practical promotion. The doping amount and doping type of nitrogen in graphene, as well as the thickness and crystallinity of graphene can be controlled by optimizing the parameters of nitrogen source, temperature matching of front and rear temperature zones, reaction time, reaction temperature and other parameters.

附图说明Description of drawings

下面结合附图和实例对本发明进一步说明。The present invention will be further described below in conjunction with accompanying drawings and examples.

图1是本发明合成掺氮石墨烯的反应装置示意图。Fig. 1 is a schematic diagram of a reaction device for synthesizing nitrogen-doped graphene in the present invention.

图2是本发明合成掺氮石墨烯在不同时间段的温度取值示意图。Fig. 2 is a schematic diagram of temperature values of nitrogen-doped graphene synthesized in different time periods in the present invention.

图3是第一个实例以三聚氰胺为氮源,CH4为碳源,以铜箔为基底,定温950℃,H2流量为10sccm下反应生成掺氮石墨烯,其中反应过程中升温到1050℃退火,然后降温到反应温度反应,待反应完成后,迅速降温生成的掺氮石墨烯经过常规的湿化学法转移至SiO2(厚300nm)/Si表面的光学显微镜测试图片及拉曼光谱图。Figure 3 is the first example of using melamine as the nitrogen source, CH4 as the carbon source, copper foil as the substrate, a constant temperature of 950 ° C, and a H2 flow rate of 10 sccm to generate nitrogen-doped graphene, in which the temperature was raised to 1050 ° C during the reaction Annealing, and then cooling down to the reaction temperature for reaction. After the reaction is completed, the nitrogen-doped graphene formed by cooling down rapidly is transferred to the SiO 2 (thickness 300nm)/Si surface by a conventional wet chemical method. Optical microscope test pictures and Raman spectrum pictures.

图4是按照第一个实例的条件,生成氮掺杂石墨烯的XPS图谱。证实了利用本技术成功实现了氮掺杂石墨烯的合成。Fig. 4 is according to the condition of first example, produces the XPS spectrum of nitrogen-doped graphene. It was confirmed that the synthesis of nitrogen-doped graphene was successfully achieved using this technique.

图5是是第二个实例以三聚氰胺为氮源,CH4为碳源,铜箔为基底在低温500-1000℃和还原性载气H2的作用下,反应生成的低结晶度石墨烯经过常规的湿化学法转移至SiO2(厚300nm)/Si表面的光学显微镜测试图片和典型的拉曼光谱图。Figure 5 is the second example of the low crystallinity graphene produced by the reaction using melamine as the nitrogen source, CH4 as the carbon source, and copper foil as the substrate at a low temperature of 500-1000 ° C and reducing carrier gas H2 . Optical microscope test pictures and typical Raman spectra transferred to SiO 2 (thickness 300nm)/Si surface by conventional wet chemical method.

图6第三个实例以三聚氰胺为氮源,CH4为碳源,以铜箔为基底,定温1000℃,H2流量分别为10-50sccm下反应生成掺氮石墨烯,当温度到1000℃时将碳源与氮源同时引入,待反应完成后,迅速降温生成的掺氮石墨烯经过常规的湿化学法转移至SiO2(厚300nm)/Si表面的光学显微镜测试图片及拉曼光谱图。Figure 6 The third example uses melamine as the nitrogen source, CH4 as the carbon source, and copper foil as the substrate. The temperature is set at 1000°C, and the H2 flow rate is 10-50sccm to react to form nitrogen-doped graphene. When the temperature reaches 1000°C The carbon source and the nitrogen source are introduced at the same time. After the reaction is completed, the nitrogen-doped graphene formed by rapid cooling is transferred to the SiO 2 (thickness 300nm)/Si surface by the conventional wet chemical method. Optical microscope test pictures and Raman spectra.

具体实施方式Detailed ways

本发明是先让双温区管式炉达到待定温度,加热过程中通入H2以防止铜箔氧化,过程中碳源与氮源均不通入管式炉,当达到待定温度后将管式炉上气流方向温区一侧的氮、碳源引入至管式炉,利用高温使其分解解离出含碳、氮的物质,利用载气输送至铜箔表面发生化学反应,其后利用快速降温使铜箔表面生成掺氮石墨烯。其中CVD法合成掺氮石墨烯过程中使用的金属基底本身充当催化剂的作用,因此这里不需要再外加催化剂。而且相对于传统方法不使用气、液氮源,反应过程只需要一个主加热设备就可以完成,不需要其他加热设备,因此我们的方法更简单、廉价,适合推广。In the present invention, the tube furnace with dual temperature zones reaches the undetermined temperature first, and H2 is introduced during the heating process to prevent the copper foil from being oxidized. The nitrogen and carbon sources on the side of the temperature zone in the airflow direction of the furnace are introduced into the tube furnace, and the high temperature is used to decompose and dissociate the carbon and nitrogen-containing substances. Lowering the temperature causes nitrogen-doped graphene to be formed on the surface of the copper foil. Among them, the metal substrate used in the process of synthesizing nitrogen-doped graphene by CVD method itself acts as a catalyst, so no additional catalyst is needed here. Moreover, compared with the traditional method that does not use gas or liquid nitrogen sources, the reaction process can be completed with only one main heating device and no other heating devices are required. Therefore, our method is simpler, cheaper and suitable for promotion.

在本发明的方法中所述金属基底均指的是用醋酸、丙酮和异丙醇依次超声5min后的洁净基底;所述气体比例均为标准体积流量比;In the method of the present invention, the metal substrates all refer to the clean substrates after ultrasonic 5min successively with acetic acid, acetone and isopropanol; the gas ratios are all standard volume flow ratios;

具体来说,我们以三聚氰胺为主氮、碳源,CH4为辅碳源使用CVD法合成石墨烯的方法实例包括如下步骤:Specifically, we use melamine as the main nitrogen and carbon source, and CH as an auxiliary carbon source The method example of using CVD method to synthesize graphene includes the following steps:

图1与图2所示是本发明以三聚氰胺为氮源,CH4为碳源,CVD合成石墨烯的方法及主加热设备在不同时间段温度取值的示意图。图中T1温度前为缓慢升温阶段,其后根据实验需要分为对催化金属进行退火和不退火处理两种情形。其中,不退火处理的情形当温区升到T1温度后马上引入氮源和碳源,经历一段时间反应后快速降温;退火处理的情形是将下气流一侧温区的催化金属在T2温度下退火一定时间,降温至反应温度T3后,引入氮源和碳源进行一定时间的反应,然后快速降温。其中整个过程的载气流量变化情况为,在反应开始前载气流量配比保持不变,且载气为仅含有Ar和H2的混合气,当达到反应阶段时将碳源与氮源同时引入参加反应。该阶段载气除Ar和H2的混合气外还含有辅助碳源CH4,反应完成后为快速降温阶段,此时载气流量配比与初始情况一致,即仅含有Ar和H2的混合气。通过该方法我们已经成功制得了掺氮石墨烯。Figure 1 and Figure 2 show that the present invention uses melamine as a nitrogen source, CH as a carbon source, a schematic diagram of the method for CVD synthesis of graphene and the temperature values of the main heating equipment in different time periods. In the figure, before T1 temperature is a slow temperature rise stage, and then divided into two cases of annealing and no annealing treatment of the catalytic metal according to the experimental needs. Among them, in the case of no annealing treatment, the nitrogen source and carbon source are introduced immediately after the temperature zone rises to T 1 temperature, and the temperature is rapidly lowered after a period of reaction; Anneal at high temperature for a certain period of time, after cooling down to the reaction temperature T3 , introduce nitrogen source and carbon source to react for a certain period of time, and then rapidly cool down. Wherein the change of the carrier gas flow rate in the whole process is that before the reaction starts, the carrier gas flow ratio remains unchanged, and the carrier gas is a mixed gas containing only Ar and H 2 , and when the reaction stage is reached, the carbon source and the nitrogen source are simultaneously Introduced to participate in the reaction. In this stage, the carrier gas also contains the auxiliary carbon source CH 4 in addition to the mixed gas of Ar and H 2 . After the reaction is completed, it is a rapid cooling stage. gas. We have successfully prepared nitrogen-doped graphene by this method.

图3所示的是按图2所示经过对铜箔进行退火处理后的实验过程所生成的掺氮石墨烯的一实例。该实例载气流量配比为Ar/H2=50/1,反应温度选为950℃。从结果上可看出,该条件下具有较好的连续性,而且其拉曼2D峰强较好,因而生成了质量较好的掺氮石墨烯。Figure 3 shows an example of nitrogen-doped graphene produced in the experimental process after annealing the copper foil as shown in Figure 2 . In this example, the carrier gas flow ratio is Ar/H 2 =50/1, and the reaction temperature is selected as 950°C. It can be seen from the results that under this condition, there is better continuity, and the Raman 2D peak intensity is better, so nitrogen-doped graphene with better quality is produced.

图4所示是按图3所示的生成掺氮石墨烯的XPS测试。测试结果显示在结合能为399.34eV的位置出现了N1s的特征峰,这充分表明利用本技术可以成功合成氮掺杂石墨烯。Shown in Figure 4 is the XPS test of generating nitrogen-doped graphene as shown in Figure 3 . The test results show that the characteristic peak of N1s appears at the position of binding energy of 399.34eV, which fully shows that nitrogen-doped graphene can be successfully synthesized by this technology.

图5所示的是按图2所示的退火组实例。该实例包含了在不同反应温度下掺氮石墨烯的影响。其中a-e组Ar流量为400-600sccm,H2流量均为20sccm,反应温度分别为500、800、900、950、1000℃,观察拉曼谱图可看出,由于2D峰(2700cm-1附近)为1000℃时最强,950℃具有较弱的2D峰,900℃以下时没有2D峰的出现。所以在900℃以下可以生长结晶性较低的掺氮石墨烯。对比光学显微镜图,反应温度为1000℃时连续性较差,而950℃具有较好的连续性。因此,我们的技术可以通过温度的调控来获取不同结晶程度的氮掺杂石墨烯。FIG. 5 shows an example of an annealing group as shown in FIG. 2 . This example includes the effect of nitrogen-doped graphene at different reaction temperatures. Among them, the flow rate of Ar in group ae is 400-600 sccm, the flow rate of H 2 is 20 sccm, and the reaction temperatures are 500, 800, 900, 950, and 1000°C respectively. It can be seen from the observation of the Raman spectrum that due to the 2D peak (near 2700cm -1 ) It is strongest at 1000°C, has a weaker 2D peak at 950°C, and no 2D peak appears below 900°C. Therefore, nitrogen-doped graphene with low crystallinity can be grown below 900 °C. Compared with the optical microscope images, the continuity is poor when the reaction temperature is 1000°C, while the continuity is better at 950°C. Therefore, our technology can obtain nitrogen-doped graphene with different crystallinity through temperature regulation.

图6所示的是经过图2所示的不退火情形实例。该实例包含了在不同载气流量配比条件下对合成的掺氮石墨烯质量的影响。其中a-d图中Ar流量为400-600sccm,H2分别为50、20、15、10sccm。反应后样品经过光学显微镜图和拉曼光谱测试,其中石墨烯转移过程均是将石墨烯利用湿式转移法转移到SiO2(厚300nm)/Si表面后进行的。从光学显微镜图中我们可以看到,H2流量在20sccm时生成了质量相对较好的一层膜,当H2改变时膜的连续性变差。观察拉曼谱图,当H2从50sccm到10sccm变化时均具有2D峰(2700cm-1附近),且生成的碳膜都具有一定的D峰(1350cm-1附近),证明此时生成了掺氮石墨烯(标准形态的石墨烯随着N原子进入石墨烯晶格会产生反应缺陷程度的D峰)。而且,从光学显微镜的颜色对照可以看出,生成膜的厚度和连续性受氢气流量的影响很大。因此,我们的技术可以通过氢气等反应条件的调控来获取不同厚度的氮掺杂石墨烯,甚至有望合成规则分布的氮掺杂石墨烯量子点。Figure 6 shows an example of the situation without annealing shown in Figure 2 . This example includes the influence on the quality of synthesized nitrogen-doped graphene under different carrier gas flow ratio conditions. Among them, the Ar flow rate in the ad diagrams is 400-600 sccm, and the H 2 is 50, 20, 15, and 10 sccm respectively. After the reaction, the samples were tested by optical microscopy and Raman spectroscopy, and the graphene transfer process was carried out after the graphene was transferred to the SiO 2 (thickness 300nm)/Si surface by a wet transfer method. From the optical microscope image we can see that the H2 flow at 20 sccm produces a film of relatively good quality, and the continuity of the film becomes poor when the H2 is changed. Observing the Raman spectrum, when H2 changes from 50sccm to 10sccm, it has a 2D peak (near 2700cm -1 ), and the generated carbon film has a certain D peak (near 1350cm -1 ), which proves that the doped Nitrogen graphene (the standard form of graphene will produce a D peak of the degree of reaction defects as N atoms enter the graphene lattice). Moreover, as can be seen from the color contrast of the optical microscope, the thickness and continuity of the resulting film are greatly affected by the hydrogen flow rate. Therefore, our technology can obtain nitrogen-doped graphene with different thicknesses through the regulation of reaction conditions such as hydrogen, and it is even expected to synthesize regularly distributed nitrogen-doped graphene quantum dots.

上述实例和表征结果证明我们发明的方法可以在较低温度下用三聚氰胺作为固体氮源,反应可生成掺氮石墨烯。本技术由于使用CVD技术,可以方便地通过优化氮源量、前后温区的温度匹配、反应时间、反应温度等反应参数实现石墨烯中氮的掺杂量和掺杂类型以及石墨烯的厚度、结晶程度等结构特征的调控。The above examples and characterization results prove that the method we invented can use melamine as a solid nitrogen source at a relatively low temperature, and the reaction can generate nitrogen-doped graphene. Due to the use of CVD technology, this technology can easily realize the doping amount and doping type of nitrogen in graphene, as well as the thickness, Control of structural features such as degree of crystallinity.

Claims (10)

1.一种以三聚氰胺为氮源合成掺氮石墨烯的方法,其特征在于,在一定反应压力下,不使用金属基底以外的其他催化剂,不需要主加热设备以外的其他加热设备,在一定组成和流量的载气的保护下,先让金属基底缓慢升温,待达到反应温度后再将至于加热区外的氮源、碳源一次性同时引入反应管式炉中,在载气的作用下将三聚氰胺的分解产物和碳源引入到金属基底表面发生掺氮石墨烯的反应,待反应完成,迅速降温至室温,此时金属基底表面已生成一层掺氮石墨烯。1. A method for synthesizing nitrogen-doped graphene with melamine as a nitrogen source is characterized in that, under a certain reaction pressure, no other catalysts other than the metal substrate are used, no other heating equipment other than the main heating equipment is needed, and at a certain composition Under the protection of the carrier gas with high flow rate, let the metal substrate heat up slowly, and then introduce the nitrogen source and carbon source outside the heating zone into the reaction tube furnace at one time after reaching the reaction temperature. The decomposition products of melamine and the carbon source are introduced into the surface of the metal substrate to react with nitrogen-doped graphene. After the reaction is completed, the temperature is rapidly lowered to room temperature. At this time, a layer of nitrogen-doped graphene has been formed on the surface of the metal substrate. 2.根据权利要求1所述的一定反应压力包括化学气相沉积方法所使用的常压、真空等反应压力。2. The certain reaction pressure according to claim 1 comprises reaction pressures such as normal pressure and vacuum used in the chemical vapor deposition method. 3.根据权利要求1所述的金属基底包括化学气相沉积方法合成石墨烯所用的金属膜、金属箔、金属片。3. metal substrate according to claim 1 comprises the used metal film, metal foil, metal flake of chemical vapor deposition method synthetic graphene. 4.根据权利要求1所述的金属基底以外的其他催化剂,包括除了化学气相沉积合成掺氮石墨烯必须的金属基底以外的任何其他形态的可使三聚氰胺活化的有机物或无机物,或者工业及人工制备催化剂。4. other catalyzers except the metal base according to claim 1, comprise any other form except the necessary metal base of chemical vapor deposition synthesis nitrogen-doped graphene can make the organic or inorganic matter of melamine activation, or industrial and artificial Prepare the catalyst. 5.根据权利要求1所述的主加热设备以外的其他加热设备,包括除了提供化学气相沉积法必须温度的设备以外的加热带、多温区管式炉放置金属基底以外的其他温区、加热套等任何可以提供加热功能的设备。5. Other heating equipments other than the main heating equipment according to claim 1, comprising heating bands other than the equipment providing the necessary temperature for chemical vapor deposition, other temperature zones other than the metal base placed in the multi-temperature zone tube furnace, heating Covers and any other equipment that can provide heating functions. 6.根据权利要求1所述的反应温度包括足以使三聚氰胺分解还原生成掺氮石墨烯或无定型碳的温度区间内的温度值,以及使三聚氰胺热分解后的产物和碳源在金属催化剂表面生成掺氮石墨烯的温度区间内的温度值。6. temperature of reaction according to claim 1 comprises enough to make melamine decompose and reduce and generate the temperature value in the temperature interval of nitrogen-doped graphene or amorphous carbon, and make the product and carbon source after melamine thermal decomposition generate on metal catalyst surface Temperature values in the temperature range of nitrogen-doped graphene. 7.根据权利要求1所述的载气的组成和流量,组成包括反应气体、还原气体、载气、或者几种混合物,流量包括能将低温生成的碳产物成功转化成掺氮石墨烯的气体配比。7. The composition and flow rate of carrier gas according to claim 1, composition comprises reaction gas, reducing gas, carrier gas or several mixtures, flow rate comprises the gas that the carbon product that low temperature generation can be successfully converted into nitrogen-doped graphene Matching. 8.根据权利要求1所述的降温包括以一定速率进行的快速和缓慢降温,以及不同时间以不同速率程序控制降温的方法。8. The cooling according to claim 1 includes fast and slow cooling at a certain rate, and a method of program-controlled cooling at different rates at different times. 9.根据权利要求1所述的以三聚氰胺为氮源化学气相沉积合成掺氮石墨烯的具体方法包括如下步骤:9. taking melamine according to claim 1 as the specific method of nitrogen source chemical vapor deposition synthesis nitrogen-doped graphene comprises the steps: 1)将洗净的金属催化基底置于加热设备反应室中,通入载气。1) Place the cleaned metal catalytic substrate in the reaction chamber of the heating equipment, and feed the carrier gas. 2)利用加热设备将温度升高到权利要求6所述的温度区间,保持载气通入的同时通入三聚氰胺、CH4和还原性气体在该温度下保持一段时间,在金属催化基底上使三聚氰胺热分解后的含氮物种发生反应生成碳氮化合物。2) Utilize the heating equipment to raise the temperature to the temperature interval described in claim 6, while keeping the carrier gas passing through, pass through melamine, CH4 and reducing gas and keep it for a period of time at this temperature, and use it on the metal catalyst substrate Nitrogen-containing species after thermal decomposition of melamine react to form carbon nitrogen compounds. 3)在权利6所述的温度区间,保持一段时间进行充分反应。3) In the temperature interval described in right 6, keep for a period of time to fully react. 4)根据需要使用一定降温方式将金属催化基底的温度降至常温。4) Use a certain cooling method to reduce the temperature of the metal catalytic substrate to normal temperature as required. 10.根据权利要求1所述的载气包括:还原性载气如氢气、氨气等具有还原性的气体;惰性气体如氩气、氮气、氖气等性质较为稳定的气体;还原性载气和惰性载气的混合气体。10. The carrier gas according to claim 1 comprises: reducing carrier gas such as hydrogen, ammonia and other reducing gases; inert gas such as argon, nitrogen, neon and other stable gases; reducing carrier gas Mixed gas with inert carrier gas.
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CN107403658A (en) * 2017-07-17 2017-11-28 北京大学 A kind of high conductivity graphene film and preparation method thereof
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CN107311125B (en) * 2017-07-25 2019-10-01 江苏大学 A kind of nitrogen carbide nanometer sheet and its preparation method and application
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CN108609614A (en) * 2018-05-28 2018-10-02 天津大学 A kind of preparation method of blue, purple fluorescent single nitrogen-doped graphene
CN112517044A (en) * 2020-12-22 2021-03-19 盐城工学院 Carbon nitride quantum dot/oxide nanofiber composite photocatalytic material and preparation method thereof
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