CN104635036A - Micromechanical high-precision cantilever type microwave power detection system and preparation method thereof - Google Patents
Micromechanical high-precision cantilever type microwave power detection system and preparation method thereof Download PDFInfo
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 14
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- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 5
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Abstract
本发明公开了一种微机械高精度悬臂梁式微波功率检测系统及其制备方法，该方法用于在线式测量，在中心信号线传输过程中，通过悬臂梁耦合器耦合出10％的微波功率，传输给负载电阻，通过热电堆得塞贝克效应将微波功率转化成电势差，通过电势差来测量微波功率的幅度。本发明的微机械高精度悬臂梁式微波功率检测系统是由砷化镓为衬底，在衬底上设有中心信号传输线A、悬臂梁耦合器B、校正电极C以及热电式微波功率传感器D。由于制作后的悬臂梁耦合器易弯曲，当悬臂梁处于上翘状态时，在压焊块上加正电压，当悬臂梁处于下拉状态时，在压焊块上加负电压，最终使悬臂梁恢复平整，从而提高系统检测的精确度。
The invention discloses a micromechanical high-precision cantilever beam microwave power detection system and a preparation method thereof. The method is used for online measurement, and 10% of the microwave power is coupled through a cantilever beam coupler during the transmission process of the central signal line. , transmitted to the load resistance, the microwave power is converted into a potential difference through the Seebeck effect of the thermopile, and the magnitude of the microwave power is measured through the potential difference. The micro-mechanical high-precision cantilever beam type microwave power detection system of the present invention is based on gallium arsenide as a substrate, and a central signal transmission line A, a cantilever beam coupler B, a correction electrode C, and a thermoelectric microwave power sensor D are arranged on the substrate . Since the manufactured cantilever beam coupler is easy to bend, when the cantilever beam is in an upturned state, a positive voltage is applied to the pad, and when the cantilever beam is in a pull-down state, a negative voltage is applied to the pad to finally make the cantilever beam Restoring flatness, thereby improving the accuracy of system detection.
Description
技术领域technical field
本发明涉及微电子机械系统技术领域，特别涉及一种微机械高精度悬臂梁式微波功率检测系统及其制备方法。The invention relates to the technical field of micro-electro-mechanical systems, in particular to a micro-mechanical high-precision cantilever beam microwave power detection system and a preparation method thereof.
背景技术Background technique
在微电子机械系统(简称：MEMS)的微波研究中，微波功率是表征微波信号的一个重要参数。在微波信号的产生、传输及接收各个环节的研究中，微波功率的检测是必不可少的。最常见的微波功率检测器是基于热电转换原理的微波功率传感器，它把微波信号通过负载电阻转化成热，然后再利用热电堆的Seebeck效应把此热转换成与待测微波功率成正比的直流电压输出。在线式微波功率检测系统是通过耦合电容耦合出10％的功率提供给热电式微波功率传感器进行检测的。但是制作后的耦合电容易弯曲导致在线式微波功率检测系统没有很高的精度，另外在线式微波功率检测系统灵敏度也不高，而本发明能够很好地解决上面的问题。In the microwave research of microelectromechanical systems (referred to as: MEMS), microwave power is an important parameter to characterize microwave signals. In the research of each link of microwave signal generation, transmission and reception, the detection of microwave power is essential. The most common microwave power detector is a microwave power sensor based on the principle of thermoelectric conversion. It converts the microwave signal into heat through the load resistance, and then uses the Seebeck effect of the thermopile to convert the heat into direct current proportional to the microwave power to be measured. voltage output. The on-line microwave power detection system couples 10% of the power through the coupling capacitor and provides it to the thermoelectric microwave power sensor for detection. However, the produced coupled electrodes are easy to bend, so that the online microwave power detection system does not have high precision, and the sensitivity of the online microwave power detection system is not high, and the present invention can well solve the above problems.
发明内容Contents of the invention
本发明目的在于提供了一种微机械高精度悬臂梁式微波功率检测系统，本发明可对微波信号的功率进行高精度的测量，而且跟传统的在线式微波功率检测系统相比，大大的提高了其灵敏度。The purpose of the present invention is to provide a micro-mechanical high-precision cantilever beam microwave power detection system. The present invention can measure the power of microwave signals with high precision, and compared with the traditional on-line microwave power detection system, it greatly improves its sensitivity.
本发明解决其技术问题所采取的技术方案是：本发明提供了一种微机械高精度悬臂梁式微波功率检测系统，该系统是由砷化镓为衬底，在衬底上设有中心信号传输线、悬臂梁耦合器、校正电极以及热电式微波功率传感器组成。当微波信号在中心信号传输线上从A端口向B端口传输时，悬臂梁耦合器在传输线上耦合出10％的微波信号，该信号通过共面波导传输线传输至后端的热电式微波功率传感器，待测功率由后端的热电式微波功率传感器检测。当前端悬臂梁耦合微波信号时，由于本发明制作后的悬臂梁易弯曲，那么就可以通过调节校正电极来使得悬臂梁恢复平整。The technical solution adopted by the present invention to solve the technical problems is: the present invention provides a micro-mechanical high-precision cantilever beam microwave power detection system, which uses gallium arsenide as the substrate and has a central signal on the substrate. It consists of a transmission line, a cantilever beam coupler, a correction electrode and a pyroelectric microwave power sensor. When the microwave signal is transmitted from port A to port B on the central signal transmission line, the cantilever beam coupler couples 10% of the microwave signal on the transmission line, and the signal is transmitted to the back-end thermoelectric microwave power sensor through the coplanar waveguide transmission line, to be The measured power is detected by the pyroelectric microwave power sensor at the back end. When the front-end cantilever beam is coupled with microwave signals, since the cantilever beam manufactured by the present invention is easy to bend, the cantilever beam can be restored to be flat by adjusting the correction electrode.
本发明所述系统的悬臂梁耦合器是在中心信号传输线1上设有悬臂梁4，当微波信号从中心信号传输线端口A向端口B传输时，悬臂梁4会耦合出10％的微波信号。The cantilever beam coupler of the system of the present invention is provided with a cantilever beam 4 on the central signal transmission line 1. When the microwave signal is transmitted from port A to port B of the central signal transmission line, the cantilever beam 4 will couple 10% of the microwave signal.
本发明所述系统的校正电极，当制作后的悬臂梁4弯曲，当悬臂梁4处于上翘状态时，就在压焊块5上加正电压，反之，当悬臂梁4处于下拉状态时，在压焊块5上加负电压，最终使得悬臂梁4恢复平整，从而提高了微波功率的检测精准度。The correcting electrode of the system of the present invention, when the fabricated cantilever beam 4 is bent, when the cantilever beam 4 is in an upturned state, a positive voltage is applied to the pressure welding block 5, otherwise, when the cantilever beam 4 is in a pulled-down state, Applying a negative voltage to the pressure welding block 5 finally restores the cantilever beam 4 to be flat, thereby improving the detection accuracy of the microwave power.
本发明所述系统的热电式微波功率传感器是由共面波导传输线2、两对并联电阻9、热电堆8、输出电压端口10和稳定热电堆冷端温度的金属块11组成。The thermoelectric microwave power sensor of the system of the present invention is composed of a coplanar waveguide transmission line 2, two pairs of parallel resistors 9, a thermopile 8, an output voltage port 10 and a metal block 11 for stabilizing the temperature of the cold end of the thermopile.
本发明所述系统的悬臂梁耦合器是在中心信号传输线上设有悬臂梁，当微波信号从中心信号传输线端口A向端口B传输时，悬臂梁会耦合出10％的微波信号。The cantilever beam coupler of the system of the present invention is provided with a cantilever beam on the central signal transmission line. When the microwave signal is transmitted from port A to port B of the central signal transmission line, the cantilever beam will couple 10% of the microwave signal.
本发明所述系统的校正电极，当制作后的悬臂梁弯曲，当悬臂梁处于上翘状态时，就在压焊块上加正电压，反之，当悬臂梁处于下拉状态时，在压焊块上加负电压，最终使得悬臂梁恢复平整，从而提高了微波功率测量的精确度。The correcting electrode of the system of the present invention, when the fabricated cantilever beam is bent, when the cantilever beam is in the upturned state, a positive voltage is applied to the pressure welding block; otherwise, when the cantilever beam is in the pull-down state, the pressure welding block Applying a negative voltage finally restores the cantilever beam to be flat, thereby improving the accuracy of microwave power measurement.
本发明所述系统的热电式微波功率传感器是由共面波导传输线末端的两对并联电阻、热电堆、输出电压端口和稳定热电堆冷端温度的金属块组成。The thermoelectric microwave power sensor of the system of the present invention is composed of two pairs of parallel resistors at the end of the coplanar waveguide transmission line, a thermopile, an output voltage port and a metal block for stabilizing the temperature of the cold end of the thermopile.
本发明还提供了一种微机械高精度悬臂梁式微波功率检测系统的制备方法，该方法包括如下步骤：The present invention also provides a preparation method of a micromechanical high-precision cantilever beam microwave power detection system, the method comprising the following steps:
步骤1：准备砷化镓衬底：选用的是未掺杂的砷化镓衬底；Step 1: Prepare the gallium arsenide substrate: the undoped gallium arsenide substrate is selected;
步骤2：在衬底上离子注入N+型的GaAs，形成热偶的GaAs臂；Step 2: Ion-implanting N + type GaAs on the substrate to form the GaAs arm of the thermocouple;
步骤3：在衬底上淀积、刻蚀氮化钽，形成共面波导末端的并联电阻，即氮化钽电阻；Step 3: Deposit and etch tantalum nitride on the substrate to form a parallel resistor at the end of the coplanar waveguide, that is, a tantalum nitride resistor;
步骤4：在衬底上溅射金，剥离去除光刻胶：形成热偶的金臂、共面波导传输线、校正电极，溅射的厚度为0.3μm；Step 4: sputtering gold on the substrate, stripping and removing the photoresist: forming the gold arm of the thermocouple, the coplanar waveguide transmission line, and the correction electrode, and the sputtering thickness is 0.3 μm;
步骤5：淀积氮化硅介质层：用等离子体增强化学气相淀积法工艺方法生长的氮化硅介质层；Step 5: Deposit silicon nitride dielectric layer: grow by plasma-enhanced chemical vapor deposition process Silicon nitride dielectric layer;
步骤6：光刻并刻蚀氮化硅介质层；保留悬臂梁下方CPW的中心信号线、耦合器下方的连接线和校正电极上的氮化硅；Step 6: Photolithography and etching the silicon nitride dielectric layer; retain the central signal line of the CPW under the cantilever beam, the connection line under the coupler and the silicon nitride on the correction electrode;
步骤7：淀积并光刻聚酰亚胺牺牲层：淀积1.6μm厚的聚酰亚胺牺牲层，聚酰亚胺牺牲层的厚度决定了悬臂梁耦合器与氮化硅介质层之间的高度，光刻聚酰亚胺牺牲层，仅保留悬臂梁耦合器下的牺牲层；Step 7: Deposit and lithography polyimide sacrificial layer: deposit a 1.6 μm thick polyimide sacrificial layer, the thickness of the polyimide sacrificial layer determines the thickness between the cantilever beam coupler and the silicon nitride dielectric layer The height of the photoetched polyimide sacrificial layer, only the sacrificial layer under the cantilever coupler remains;
步骤8：溅射钛/金/钛：溅射用于电镀共面波导传输线和悬臂梁耦合器的底金，钛/金/钛的厚度为 Step 8: Sputter titanium/gold/titanium: Sputter the base gold for plating coplanar waveguide transmission lines and cantilever couplers, the thickness of titanium/gold/titanium is
步骤9：电镀金：电镀共面波导传输线和悬臂梁耦合器，厚度为2μm；Step 9: Electroplating gold: electroplating coplanar waveguide transmission lines and cantilever beam couplers with a thickness of 2 μm;
步骤10：去除光刻胶、释放牺牲层：用显影液释放悬臂梁结构下方的聚酰亚胺牺牲层，并用无水乙醇脱水，形成悬臂梁耦合器。Step 10: Removing the photoresist and releasing the sacrificial layer: release the polyimide sacrificial layer under the cantilever beam structure with a developer, and dehydrate with absolute ethanol to form a cantilever beam coupler.
有益效果：Beneficial effect:
1、本发明精度高：在悬臂梁耦合器中，制作的悬臂梁易弯曲，如果不加以调节，那么耦合出微波信号传输至后端热电式微波功率传感器时，会产生很大的误差，此时，本发明校正电极的设计可以减小测量误差。当悬臂梁处于上翘状态时，那么在压焊块上加上正电压，当悬臂梁处于下拉状态时，在压焊块上加上负电压，这样就使得悬臂梁在耦合微波信号时处于平整状态，从而提高了检测精度。1. The present invention has high precision: in the cantilever beam coupler, the produced cantilever beam is easy to bend. If it is not adjusted, a large error will be generated when the coupled microwave signal is transmitted to the rear-end thermoelectric microwave power sensor. , the design of the correction electrode of the present invention can reduce measurement errors. When the cantilever beam is in an upturned state, add a positive voltage to the pad, and when the cantilever beam is in a pull-down state, apply a negative voltage to the pad, so that the cantilever is flat when coupling microwave signals state, thereby improving the detection accuracy.
2、本发明灵敏度高：本发明所设计的热电式微波功率检测系统与传统的结构相比，增加了一组热电堆，从而提高了灵敏度。2. The present invention has high sensitivity: Compared with the traditional structure, the thermoelectric microwave power detection system designed by the present invention adds a group of thermopiles, thereby improving the sensitivity.
3、本发明是基于微电子机械系统技术，具有微机械系统的基本优点，如：体积小、重量轻、功耗低等，另外它与单片微波集成电路(MMIC)完全兼容，便于集成，而且本发明的结构是用于在线式测量，在中心信号线传输过程中，直接通过悬臂梁来耦合出10％的微波信号，再传输至后端热电堆，通过塞贝克效应将微波功率转化成电势差，最终通过电势差来得出微波功率幅度。校正电极的设计可以减小测量误差。当悬臂梁处于上翘状态时，那么在压焊块上加上正电压，当悬臂梁处于下拉状态时，在压焊块上加上负电压，这样就使得悬臂梁在耦合微波信号时处于平整状态，从而提高了检测精度。这一系列优点是传统的在线式微波功率检测系统无法比拟的，因此它具有很好的研究和应用价值。3. The present invention is based on micro-electro-mechanical system technology and has the basic advantages of micro-mechanical systems, such as: small size, light weight, low power consumption, etc. In addition, it is fully compatible with monolithic microwave integrated circuits (MMICs) and is easy to integrate. Moreover, the structure of the present invention is used for online measurement. During the transmission process of the central signal line, 10% of the microwave signal is directly coupled through the cantilever beam, and then transmitted to the back-end thermopile, and the microwave power is converted into The potential difference, and finally the microwave power amplitude is obtained through the potential difference. The design of the calibration electrode can reduce the measurement error. When the cantilever beam is in an upturned state, add a positive voltage to the pad, and when the cantilever beam is in a pull-down state, apply a negative voltage to the pad, so that the cantilever is flat when coupling microwave signals state, thereby improving the detection accuracy. This series of advantages is incomparable to the traditional on-line microwave power detection system, so it has good research and application value.
附图说明Description of drawings
图1是本发明微机械高精度悬臂梁式微波功率检测系统的原理图。Fig. 1 is a schematic diagram of a micro-mechanical high-precision cantilever beam microwave power detection system of the present invention.
标识说明：A-共面波导传输线；B-悬臂梁耦合器；C-校正电极；D-热电式微波功率传感器。Identification description: A-coplanar waveguide transmission line; B-cantilever beam coupler; C-correction electrode; D-thermoelectric microwave power sensor.
图2是本发明微机械高精度悬臂梁式微波功率检测系统的结构示意图。Fig. 2 is a structural schematic diagram of a micro-mechanical high-precision cantilever beam microwave power detection system of the present invention.
标识说明：1-中心信号传输线；2-共面波导传输线；3-地线；4-悬臂梁；5-压焊块；6-传感电极；7-空气桥；8-热电堆；9-热电式微波功率传感器电阻；10热电式微波功率传感器检测系统的输出端口；11-增加冷端温度稳定性的金属块。Identification instructions: 1-center signal transmission line; 2-coplanar waveguide transmission line; 3-ground wire; 4-cantilever beam; 5-pressure welding block; 6-sensing electrode; 7-air bridge; 8-thermopile; 9- Thermoelectric microwave power sensor resistance; 10 - the output port of the thermoelectric microwave power sensor detection system; 11 - a metal block that increases the temperature stability of the cold end.
具体实施方式Detailed ways
以下结合说明书附图对本发明作进一步的详细说明。The present invention will be further described in detail below in conjunction with the accompanying drawings.
如图1所示，当微波信号在中心信号传输线上传输时，悬臂梁耦合器用来耦合出10％的微波信号，通过共面波导传输线传至后端的热电式微波功率传感器，通过对输出的电势差的测量，从而得出与之一一对应的微波信号的功率幅度。特别指出，本发明所设计的校正电极的作用是使制作后的悬臂梁恢复平整，提高测量精度。As shown in Figure 1, when the microwave signal is transmitted on the central signal transmission line, the cantilever beam coupler is used to couple 10% of the microwave signal, which is transmitted to the back-end thermoelectric microwave power sensor through the coplanar waveguide transmission line, and the output potential difference , so as to obtain the power amplitude of the microwave signal corresponding to one of them. It is particularly pointed out that the function of the correction electrode designed in the present invention is to restore the flatness of the manufactured cantilever beam and improve the measurement accuracy.
如图2所示，微波信号在中心信号线上从端口A向端口B传输，此时，悬臂梁耦合器耦合出10％的微波信号，由于耦合微波信号的悬臂梁在制作时易弯曲，如果不加以校正使其恢复平整，那么会使耦合的信号出现较大的误差，会影响测量精度，本发明所设计的校正电极改善了这方面问题。当悬臂梁处于上翘状态时，在压焊块上加正电压，当悬臂梁处于下拉状态时，在压焊块上加负电压，最终使悬臂梁恢复平整。As shown in Figure 2, the microwave signal is transmitted from port A to port B on the central signal line. At this time, the cantilever beam coupler couples 10% of the microwave signal. Since the cantilever beam coupling the microwave signal is easy to bend during production, if If it is not corrected to restore it to a flat surface, large errors will occur in the coupled signal, which will affect the measurement accuracy. The correcting electrode designed in the present invention improves this problem. When the cantilever beam is in an upturned state, a positive voltage is applied to the pressure welding block, and when the cantilever beam is in a pull-down state, a negative voltage is applied to the pressure welding block to finally restore the cantilever beam to a flat state.
耦合出的微波信号通过共面波导传输线传至后端热电式微波功率传感器，两对并联电阻吸收微波功率，通过热电堆将吸收的微波功率转化为电势差，电势差是与信号功率幅度一一对应，从而检测出信号的功率幅度。为了使热电堆的冷端与衬底温度相同，在其旁边连接了一块大面积的金属，热电堆的冷热两端分别连接在两个检测电势差的端口上。The coupled microwave signal is transmitted to the back-end thermoelectric microwave power sensor through the coplanar waveguide transmission line. Two pairs of parallel resistors absorb the microwave power, and the absorbed microwave power is converted into a potential difference through the thermopile. The potential difference corresponds to the signal power amplitude one by one. Thus the power amplitude of the signal is detected. In order to make the cold end of the thermopile the same temperature as the substrate, a large area of metal is connected next to it, and the cold and hot ends of the thermopile are respectively connected to two ports for detecting potential difference.
本发明的微机械高精度悬臂梁式微波功率检测系统是由砷化镓为衬底，在衬底上设有中心信号传输线、悬臂梁耦合器、校正电极以及热电式微波功率传感器组成。The micromechanical high-precision cantilever beam type microwave power detection system of the present invention is composed of gallium arsenide as a substrate, on which a central signal transmission line, a cantilever beam coupler, a correction electrode and a thermoelectric microwave power sensor are arranged.
当微波信号在中心信号传输线上从A端口向B端口传输时，悬臂梁耦合器在传输线上耦合出10％的微波信号，该信号通过共面波导传输线传输至后端的热电式微波功率传感器，待测功率由后端的热电式微波功率传感器检测。当前端悬臂梁耦合微波信号时，由于制作后的悬臂梁易弯曲，那么就通过调节校正电极来使悬臂梁恢复平整。When the microwave signal is transmitted from port A to port B on the central signal transmission line, the cantilever beam coupler couples 10% of the microwave signal on the transmission line, and the signal is transmitted to the back-end thermoelectric microwave power sensor through the coplanar waveguide transmission line, to be The measured power is detected by the pyroelectric microwave power sensor at the back end. When the front-end cantilever beam is coupled with a microwave signal, since the fabricated cantilever beam is easy to bend, the correction electrode is adjusted to restore the cantilever beam to be flat.
本发明所述的悬臂梁耦合器是在中心信号传输线1上设有悬臂梁4，当微波信号从中心信号传输线端口A向端口B传输时，悬臂梁4会耦合出10％的微波信号。The cantilever beam coupler of the present invention is provided with a cantilever beam 4 on the central signal transmission line 1, when the microwave signal is transmitted from port A to port B of the central signal transmission line, the cantilever beam 4 will couple 10% of the microwave signal.
本发明所述的校正电极是由压焊块5和传感电极6组成的，由于制作后的悬臂梁4易弯曲，当悬臂梁4处于上翘状态时，就在压焊块5上加正电压，反之，当悬臂梁4处于下拉状态时，在压焊块5上加负电压，最终使得悬臂梁4恢复平整，从而提高了微波功率测量的精度。The correcting electrode of the present invention is made up of pressure welding block 5 and sensing electrode 6, because the cantilever beam 4 after making is easy to bend, when cantilever beam 4 is in the upturned state, just add positive electrode on pressure welding block 5. On the contrary, when the cantilever beam 4 is in the pull-down state, a negative voltage is applied to the pressure welding block 5, and finally the cantilever beam 4 is restored to be flat, thereby improving the measurement accuracy of the microwave power.
本发明所述的热电式微波功率传感器是由共面波导传输线2、热电堆8、两对并联电阻9、输出电压端口10和稳定热电堆冷端温度的金属块11组成。The thermoelectric microwave power sensor of the present invention is composed of a coplanar waveguide transmission line 2, a thermopile 8, two pairs of parallel resistors 9, an output voltage port 10 and a metal block 11 for stabilizing the temperature of the cold end of the thermopile.
一种微机械高精度悬臂梁式微波功率检测系统的制备方法，该方法包括如下步骤：A preparation method of a micromechanical high-precision cantilever beam microwave power detection system, the method comprising the following steps:
1)准备砷化镓衬底：选用的是未掺杂的砷化镓衬底；1) Prepare the gallium arsenide substrate: the undoped gallium arsenide substrate is selected;
2)在衬底上离子注入N+型的GaAs，形成热偶的GaAs臂；2) Ion-implanting N + type GaAs on the substrate to form the GaAs arm of the thermocouple;
3)在衬底上淀积、刻蚀氮化钽，形成共面波导末端的并联电阻，即氮化钽电阻；3) Deposit and etch tantalum nitride on the substrate to form a parallel resistor at the end of the coplanar waveguide, that is, a tantalum nitride resistor;
4)在衬底上溅射金，剥离去除光刻胶：形成热偶的金臂、共面波导传输线、校正电极，溅射的厚度为0.3μm；4) Sputtering gold on the substrate, stripping and removing the photoresist: forming the gold arm of the thermocouple, the coplanar waveguide transmission line, and the correction electrode, and the sputtering thickness is 0.3 μm;
5)淀积氮化硅介质层：用等离子体增强化学气相淀积法工艺生长的氮化硅介质层；5) Deposition of silicon nitride dielectric layer: growth by plasma-enhanced chemical vapor deposition Silicon nitride dielectric layer;
6)光刻并刻蚀氮化硅介质层；保留固支梁下方CPW的中心信号线、耦合器下方的连接线和校正电极上的氮化硅；6) Photolithography and etching the silicon nitride dielectric layer; retain the central signal line of the CPW under the fixed support beam, the connection line under the coupler and the silicon nitride on the correction electrode;
7)淀积并光刻聚酰亚胺牺牲层：淀积1.6μm厚的聚酰亚胺牺牲层，聚酰亚胺牺牲层的厚度决定了悬臂梁耦合器与氮化硅介质层之间的高度，光刻聚酰亚胺牺牲层，仅保留悬臂梁耦合器下的牺牲层；7) Deposit and lithography polyimide sacrificial layer: deposit a 1.6 μm thick polyimide sacrificial layer, the thickness of the polyimide sacrificial layer determines the distance between the cantilever beam coupler and the silicon nitride dielectric layer Height, photolithographic polyimide sacrificial layer, only the sacrificial layer under the cantilever coupler remains;
8)溅射钛/金/钛：溅射用于电镀共面波导传输线和悬臂梁耦合器的底金，钛/金/钛的厚度为 8) Sputtering titanium/gold/titanium: Sputtering is used to electroplate the bottom gold of the coplanar waveguide transmission line and the cantilever beam coupler, the thickness of titanium/gold/titanium is
9)电镀金：电镀共面波导传输线和悬臂梁耦合器，厚度为2μm；9) Electroplating gold: electroplating coplanar waveguide transmission lines and cantilever beam couplers with a thickness of 2 μm;
10)去除光刻胶、释放牺牲层：用显影液释放悬臂梁结构下方的聚酰亚胺牺牲层，并用无水乙醇脱水，形成悬臂梁耦合器。10) Removing the photoresist and releasing the sacrificial layer: release the polyimide sacrificial layer under the cantilever beam structure with a developer, and dehydrate with absolute ethanol to form a cantilever beam coupler.
本发明所述方法应用于微机械高精度悬臂梁式微波功率检测系统。The method of the invention is applied to a micro-mechanical high-precision cantilever beam type microwave power detection system.
本发明的结构标准如下：The structure standard of the present invention is as follows:
1.本发明是一种微机械高精度悬臂梁式微波功率检测系统，属于在线式测量检测系统，待测的微波功率是通过悬臂梁在中心信号传输线上耦合得到。1. The present invention is a micromechanical high-precision cantilever beam microwave power detection system, which belongs to the online measurement and detection system. The microwave power to be measured is obtained by coupling the cantilever beam on the central signal transmission line.
2.本发明中校正电极的设计，该设计实现了悬臂梁在恢复平整状态下去耦合微波信号，大大的提高了测量精度。校正电极工作原理如下：由于工艺制作的悬臂梁易弯曲，如果不加以调整，那么耦合出微波信号传输至后端热电式微波功率传感器时，会产生很大的误差，此时，校正电极的设计可以减小测量误差。当悬臂梁处于上翘状态时，那么在压焊块上加上正电压，当悬臂梁处于下拉状态时，在压焊块上加上负电压，这样就使得悬臂梁在耦合微波信号时处于平整状态，从而提高了检测精度。2. The design of the correction electrode in the present invention enables the cantilever beam to couple microwave signals when it returns to a flat state, greatly improving the measurement accuracy. The working principle of the calibration electrode is as follows: Since the cantilever beam made by the process is easy to bend, if it is not adjusted, a large error will be generated when the coupled microwave signal is transmitted to the back-end thermoelectric microwave power sensor. At this time, the design of the calibration electrode Measurement errors can be reduced. When the cantilever beam is in an upturned state, add a positive voltage to the pad, and when the cantilever beam is in a pull-down state, apply a negative voltage to the pad, so that the cantilever is flat when coupling microwave signals state, thereby improving the detection accuracy.
3.本发明中设计了四个并联电阻，两组热电堆，从而提高了系统的灵敏度。3. Four parallel resistors and two sets of thermopiles are designed in the present invention, thereby improving the sensitivity of the system.
满足上述条件的结构即视为本发明的微机械高精度悬臂梁式微波功率检测系统。A structure that satisfies the above conditions is regarded as the micromechanical high-precision cantilever beam microwave power detection system of the present invention.
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