CN104616952B - Cathode-controlled multi-cathode distributed X-ray device - Google Patents
Cathode-controlled multi-cathode distributed X-ray device Download PDFInfo
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- CN104616952B CN104616952B CN201410800756.4A CN201410800756A CN104616952B CN 104616952 B CN104616952 B CN 104616952B CN 201410800756 A CN201410800756 A CN 201410800756A CN 104616952 B CN104616952 B CN 104616952B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/08—Electrical details
- H05G1/26—Measuring, controlling or protecting
- H05G1/30—Controlling
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/02—Arrangements for diagnosis sequentially in different planes; Stereoscopic radiation diagnosis
- A61B6/03—Computed tomography [CT]
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Abstract
本发明的阴控多阴极分布式X射线装置具备：真空盒，四周密封且内部为高真空；多个阴极，每个阴极互相独立且安装在真空盒内部的一端；多个聚焦限流装置，与阴极一一对应地安装在真空盒内的靠近阴极处，且各聚焦限流装置相互连接形成电场均衡面；阳极，安装在真空盒内部的另一端；电源系统，为所述多个阴极、多个聚焦限流装置和阳极提供电源。
The cathode-controlled multi-cathode distributed X-ray device of the present invention includes: a vacuum box, which is sealed around and has a high vacuum inside; a plurality of cathodes, each of which is independent of each other and is installed at one end inside the vacuum box; a plurality of focusing current limiting devices, The cathodes are installed in the vacuum box close to the cathodes in one-to-one correspondence, and the focusing current limiting devices are connected to each other to form an electric field equalization surface; the anode is installed at the other end inside the vacuum box; the power supply system is for the plurality of cathodes, Multiple focused current limiting devices and anodes provide power.
Description
The application is the divisional application of following applications:
Denomination of invention: yin controls more cathode distribution X-ray apparatus and the CT equipment with the device
The applying date: on December 31st, 2012
Application number: 201210588832.0.
Technical field
The present invention relates to a kind of devices for generating distributed X-ray, in particular to pass through in an X-ray source equipment
It arranges multiple independent hot cathode and generates the X-ray according to predetermined order shift the focus position by being controlled cathode
The more cathode distribution X-ray apparatus of yin control.
Background technique
X-ray source refers to the equipment for generating X-ray, usually by X-ray tube, power supply and control system, cooling and shielding
Equal auxiliary devices etc. are constituted, and core is X-ray tube.X-ray tube is usually made of cathode, anode, glass or ceramic shell.Yin
Extremely directly-heated type helical tungsten filament by electric current, is heated to the about operating temperature of 2000K, generates the electricity of heat emission at work
Beamlet stream, the metal cap that cathode is slotted by a front end surround, and metal cap makes electron focusing.Anode is inlayed in copper billet end face
Tungsten target is applied with hundreds of thousands of volt high pressures at work between the anode and cathode, and the electronics that cathode generates adds under electric field action
Anode is flown in speed movement, and hits target surface, to generate X-ray.
X-ray has a wide range of applications in fields such as industrial nondestructive testing, safety inspection, medical diagnosis and treatments.Especially
It is that radioscopy imaging device made of the high-penetration ability using X-ray is played in the every aspect of people's daily life
Important function.This kind of equipment early stage be film type plane perspective imaging device, current advanced technology is digitlization, more view
The stereoscopic imaging apparatus of angle and high resolution, such as CT(computed tomography), high-definition three can be obtained
Solid figure or sectioning image are tieed up, is advanced high-end applications.
In CT equipment (including industrial flaw detection CT, luggage and articles safety check CT, medical diagnosis CT etc.), usually by X-ray
Source is placed on the side of detected object, and the detector for receiving ray is placed in the other side of detected object, is examined when X-ray passes through
When article, intensity can change with information such as thickness, the density of examined object product, the power for the X-ray that detector receives
Contain the structural information of a view directions of examined object product.If x-ray source and detector turned around examined object product again
Change place, so that it may obtain the structural information in different perspectives direction.Using computer system and software algorithm to these information into
Row structural remodeling, so that it may obtain the stereo-picture of detected object.Current CT equipment is to be fixed on x-ray source and detector
On the round slip ring of detected object, as soon as every movement circle at work, obtains the figure of a thickness section of detected object
Picture is referred to as being sliced, detected object again through-thickness move, obtain a series of slices, these slice be exactly altogether by
Examine the three-dimensional Fine stereo structure of object.Therefore, in existing CT equipment, in order to obtain different multi-view image information, just
The position of x-ray source is converted, therefore, x-ray source and detector needs move on slip ring, in order to improve inspection speed, lead to
The movement velocity of normal x-ray source and detector is very high.Due to the high-speed motion of x-ray source and detector on slip ring, cause
The reliability and stability of equipment entirety reduce, in addition, being limited by movement velocity, the inspection speed of CT is also restricted.
Although the CT of latest generation uses the detector of circumferential arrangement in recent years, so as to so that detector is not taken exercises, X-ray
Source furthermore, it is possible to increase multi-detector, makes X-ray source movement one week, obtains multiple slice maps there is still a need for moving on slip ring
Picture, to improve CT examination speed, still, there is no fundamentally solve the problems, such as to move on slip ring to bring for this.Therefore, exist
It needs a kind of can to generate the x-ray source at multiple visual angles not shift position in CT equipment.
In addition, the electron beam large power long Time Continuous that the cathode of usual x-ray source generates bangs in order to improve inspection speed
Anode tungsten target is hit, still, due to target spot area very little, so the heat dissipation of target spot also becomes very big problem.
In order to solve slip ring bring reliability in existing CT equipment, stability problem and check speed issue and anode
The resistance to heat problem of target spot, provides certain methods in existing patent document.Such as rotary target x-ray source, it can be to a certain degree
Upper to solve the problems, such as that anode target overheats, still, its structure is complicated and it is whole still relative to x-ray source to generate the target spot of X-ray
It is so a determining target position.For example, some technologies are in order to realize multiple visual angles of fixed x-ray source and at one
The multiple independent conventional X-ray sources of close-packed arrays replace the movement of x-ray source on circumference, although also can be realized more views in this way
Angle, but it is at high cost, also, the target spot spacing of different perspectives is big, and image quality (three-dimensional resolution) is very poor.In addition, in patent
Document 1(US4926452) in propose a kind of light source and method for generating distributed X-ray, anode target has very big face
Product alleviates the problem of target overheats, also, target position circumferentially changes, and can produce multiple visual angles.Although patent document 1
It is to be scanned deflection to obtaining the high energy electron beam accelerated, there is that control difficulty is big, target position is not discrete and repetition
Property difference problem, but still be a kind of effective ways that can generate distributed light source.In addition, for example in patent document 2
(US20110075802) with proposed in patent document 3(WO2011/119629) a kind of light source for generating distributed X-ray with
And method, anode target have very big area, alleviate the problem of target overheats, also, target position dispersion is fixed and array
Arrangement, can produce multiple visual angles.In addition, using carbon nanotube as cold cathode, and array arrangement, benefit are carried out to cold cathode
Flied emission is controlled with the voltage of cathode grid interpolar, so that each cathode launching electronics in order are controlled, by corresponding on anode
Ordinal position bombards target spot, becomes distributed X-ray source.But there are production technologies complicated, carbon nanotube emissivities with
Service life not high shortcoming.
Summary of the invention
Present invention is proposed to solve the above problem, and its purpose is to provide one kind can produce without mobile light source
Raw multiple visual angles and the more cathodes of yin control point for being conducive to simplify structure, raising system stability, reliability, raising inspection efficiency
Cloth X-ray apparatus.
The present invention provides a kind of yin control more cathode distribution X-ray apparatus, which is characterized in that has: vacuum box, four is careful
It seals and internal for high vacuum；One end that multiple cathodes mutual independence at each cathodes and are mounted on inside the vacuum box；It is multiple
Current-limiting apparatus is focused, is mounted on the middle part in the vacuum box correspondingly close to the position of the cathode with the cathode,
Also, each focusing current-limiting apparatus is interconnected to form electric field isostatic surface；Anode is mounted on another inside the vacuum box
End；Power-supply system provides power supply for the multiple cathode, multiple focusing current-limiting apparatus and anode.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, the power-supply system includes: power supply and control
System, with multiple cathode powers, the focusing current-limiting apparatus power supply being connect with focusing current-limiting apparatus interconnected, anode high voltage
Power supply, the control device for carrying out integrated logic control to each power supply；Plug type high-voltage connection device is used for the sun
Pole is connected with the anode high voltage power supply, is mounted on the side close to described anode one end of the vacuum box；It is multiple pluggable
Formula cathode power attachment device is mounted on the close described of the vacuum box for connecting the cathode and the cathode power
The side of cathode one end.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, the cathode also includes cathode shell, packet
The cathode filament and the cathode surface are enclosed, also, position corresponding with the center of the cathode surface is provided with beam
Aperture is flowed, the outer of line aperture is provided with planar structure, the outer of the planar structure is provided with inclined-plane；Cathode screen,
In the outside of the cathode shell, other faces, institute other than surrounding the face in addition to being provided with line aperture of the cathode shell
It states heater lead and is drawn out to the plug type cathode power connection dress across the cathode shell and the cathode screen
It sets.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, the cathode shell and the cathode screen
It covers for rectangular shape, the cathode surface and the line aperture corresponding with the center of the cathode surface are rectangular
Shape.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, the cathode shell and the cathode screen
Covering for rectangular shape, the cathode surface and the line aperture corresponding with the center of the cathode surface is circle.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, the cathode shell and the cathode screen
It covers for rectangular shape, the cathode surface is spherical arc shape, the corresponding line aperture in the center of the cathode surface
For circle.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, the vacuum box is made of glass or ceramics.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, the vacuum box is made of metal, vacuum box
Inner wall and the multiple cathode, the focusing current-limiting apparatus, the anode keep enough insulation distances.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, in the plug type high-voltage connection device
Portion is connected with the anode, and the vacuum box is stretched out in outside, closely connect with the vacuum box wall, is formed together vacuum sealing
Structure.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, each plug type cathode power connects
Connection device is connected inside the vacuum box with the heater lead of the cathode, and the vacuum box is stretched out in outside, with institute
It states vacuum box wall closely to connect, is formed together vacuum seal structure.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, also includes vacuum power, be included in described
In power supply and control system；Vacuum plant is mounted on the side wall of the vacuum box, is worked using the vacuum power,
Maintain the high vacuum in the vacuum box.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, also includes shielding and collimator apparatus, install
In the outside of the vacuum box, strip opening corresponding with the anode is provided in available X-ray outlet port.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, the shielding uses lead material with collimator apparatus
Material.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, the focusing current-limiting apparatus includes: that electric field is equal
Weighing apparatus face is made of metal and has metering hole at its center；Focusing electrode is made of metal and is tubular, tip face institute
The line aperture of cathode is stated, the size of the metering hole is less than or equal to the centre bore of the focusing electrode.
It is controlled in more cathode distribution X-ray apparatus in yin provided by the invention, the multiple cathode arrangement is in line type, and
And the multiple focusing current-limiting apparatus is also arranged in a straight line type.
Controlled in more cathode distribution X-ray apparatus in yin provided by the invention, the multiple cathode arrangement at circular arc type, and
And the multiple focusing current-limiting apparatus is also arranged in circular arc type, the anode is conical surface arc, and is limited according to cathode, focusing
Stream device, anode sequence accordingly arrange that and plane where the outer camber line of anode is and first where the multiple cathode
Second plane parallel third plane of a plane where with the multiple focusing current-limiting apparatus, the interior edge of anode relative to
Outer with focus current-limiting apparatus at a distance from farther out.
The present invention provides a kind of CT equipment, wherein has yin as described above and controls more cathode distribution X-ray apparatus.
The more cathode distribution X-ray apparatus of yin control of the invention have multiple independent cathodes, multiple focusing current-limiting apparatus, sun
Pole, vacuum box, plug type high-voltage connection device, multiple plug type cathode power attachment devices, power supply and control system.Its
In, cathode, focusing current-limiting apparatus, anode are mounted in vacuum box, and high-voltage connection device, cathode power attachment device are mounted on very
On sylphon wall, integral seal structure is formed together with vacuum box.Cathode generates electronics under the heat effect of cathode filament, leads to
Often, the negative voltage that current-limiting apparatus has hectovolt grade relative to cathode is focused, electronics is limited in cathode.Control system is according to institute
Control logic is set, negative high voltage pulse of each cathode power successively to one KV level of each cathode is made, is receiving negative height
It presses the internal electron of the cathode of pulse quickly to fly to focusing current-limiting apparatus, is focused into fleck line, and pass through metering hole, into
Enter to the high pressure accelerating field area focused between current-limiting apparatus and anode, by the electric field acceleration of dozens to hundreds of kilovolt, obtains
Energy finally bombards anode, generates X-ray.Due to there is multiple independent cathode array arrangements, so, the generation position of electronic beam current
Setting and bombarding X-ray caused by anode is also what respective array was arranged.
In the more cathode distribution X-ray apparatus of yin control of the invention, generated in some sequence in a light source equipment
The X-ray of periodic transformation focal position.The present invention uses hot cathode source, designs the big, service life with emission current relative to other
Long advantage；Multiple independent cathodes line up a linear array, each cathode it is independent and using independent cathode power into
Row control, it is convenient, flexible；Focusing current-limiting apparatus corresponding with each cathode is arranged in a straight line and interconnects, in stable small
Negative voltage potential, it is easily controllable；There are a certain distance, production easy to process between cathode and focusing current-limiting apparatus；Using long strip type
The design of big anode, has been effectively relieved the problem of anode overheats, and is conducive to the power for improving light source；Cathode can be arranged in a straight line,
Whole to become linear type distribution X-ray apparatus, cathode can also be whole to become ring-like distributed X-ray apparatus with annular array,
It is flexible in application.Relatively other distributed X-ray source equipment, electric current of the present invention is big, target spot is small, target position is evenly distributed and again
Renaturation is good, and output power is high, and structure is simple, easy to control.
Distributed X-ray source of the invention is applied to CT equipment, multiple visual angles can be generated without mobile light source, because
This can be omitted link motion, is conducive to simplify structure, improves system stability, reliability, improves and check efficiency.
Detailed description of the invention
Fig. 1 is the schematic diagram that yin of the invention controls more cathode distribution X-ray apparatus.
Fig. 2 is the schematic diagram of the structure of the independent cathode of one of present invention.
Fig. 3 is the schematic diagram for the structure that one of present invention focuses current-limiting apparatus.
Fig. 4 is the schematic diagram of the structure of one of present invention rectangular cathode, and (A) is side view, and (B) is top view.
Fig. 5 is showing for the structure of the surface of the distributed X-ray apparatus using rectangular cathode in the present invention
It is intended to.
Fig. 6 is the schematic diagram of the relative positional relationship of a kind of cathode of the invention, focusing current-limiting apparatus and anode.
Fig. 7 is the schematic diagram for showing the structure of distributed X-ray apparatus of circular arc type arrangement.
Description of symbols:
1,11,12,13,14,15 cathode
2,21,22,23,24,25 current-limiting apparatus is focused
3 anodes
4 vacuum boxs
5 plug type high-voltage connection devices
6,61,62,63,64,65 plug type cathode power attachment device
7 power supplys and control system
8 vacuum plants
9 shieldings and collimator apparatus
E electronic beam current
X X-ray
C anode and focusing current-limiting apparatus angle.
Specific embodiment
Hereinafter, referring to attached drawing, the present invention will be described.
Fig. 1 is the schematic diagram that yin of the invention controls more cathode distribution X-ray apparatus.As shown in Figure 1, yin control of the invention
More cathode distribution X-ray apparatus have multiple cathode 1(at least two, be also particularly referred to as later cathode 11,12,13,14,
15 ...), also particularly referred to as focus after multiple focusing current-limiting apparatus 2(corresponding with multiple cathodes 1 current-limiting apparatus 21,
22,23,24,25 ...), anode 3, vacuum box 4, plug type high-voltage connection device 5, multiple plug type cathode powers connect
Connection device 6 and power supply and control system 7.
Multiple cathodes 1, multiple focusing current-limiting apparatus 2, anode 3 are mounted on the inside of vacuum box 4, and multiple cathodes 1 are arranged in
On straight line, it is multiple focus current-limiting apparatus 2 each is corresponding with each cathode 1 respectively, also arrange in alignment, this two
Straight line is parallel to each other and is parallel to the surface of anode 3, plug type high-voltage connection device 5 and plug type cathode electricity
Source attachment device 6 is mounted in the box wall of vacuum box 4, constitutes integral seal structure with vacuum box 4.
In addition, cathode 1 for generating electronics, be mounted on inside vacuum box 4 one end (defined herein as lower end, referring to
Fig. 1).In addition, a kind of structure of cathode 1 is shown in FIG. 2, comprising: cathode filament 101；Cathode surface 102；Cathode shell
103；Cathode screen 104；Heater lead 105.As shown in Fig. 2, cathode surface 102 links together with cathode filament 101, and
They are surrounded by cathode shell 103, and the position corresponding with the center of cathode surface 102 of cathode shell 103 is provided with line
Aperture, in the outside of cathode shell 103, other than the face in addition to being provided with line aperture, other faces are wrapped by cathode screen 104
It encloses, heater lead 105 draws from the both ends of cathode filament 101 and passes through cathode shell 103 and cathode screen 104.Cathode modulation
Silk 101 generallys use tungsten wire, and cathode surface 102 generallys use the strong material of thermal electron ability, can use and for example aoxidize
Barium, scandate, lanthanum hexaboride etc..Cathode shell 103 is manufactured by metal material, is electrically connected with one end of cathode filament 101, in yin
The face for being provided with line aperture of pole housing 103, line aperture outer design have planar structure, convenient for line tapping with
And the electric field of surrounding is concentrated, and the outer of the planar structure is provided with inclined-plane, convenient for the electric field gentle transition between neighbouring cathode.Yin
Pole shielding 104 uses insulation high-temperature-resistant material, can be using for example ceramic, protection and neighbouring cathode for cathode mechanical strength
Between insulation, two apertures passed through for two heater leads 105 are offered in the bottom of cathode screen 104.But for two
The aperture that heater lead 105 passes through is not limited to that the bottom of cathode screen 104 is arranged in, as long as setting can make heater lead
105 positions passed through.When cathode is worked, under the action of cathode power, cathode filament 101 is by cathode surface
102 are heated to 1000~2000 DEG C, and cathode surface 102 generates a large amount of electronics, the electricity of the line tapping of usual cathode shell 103
Field is negative, and electronics is limited in cathode shell 103, if power supply and control system 7 make cathode power generate a negative high pressure
Pulse, the 2kV~10kV being usually negative, such as negative 5kV, then the electric field of line tapping becomes positive electric field, and electronics is from line
Aperture is launched, and launching electronics line E is become, and emission can reach several A/cm2。
In addition, focusing the size that current-limiting apparatus 2 is used to be focused electronic beam current and limit its size, it is mounted on vacuum
The inside of box 4, close to cathode 1.Fig. 3 shows a kind of single structure for focusing current-limiting apparatus 2.Current-limiting apparatus 2 is focused by focusing electrode
201, metering hole 202 and electric field isostatic surface 203 form.Focusing current-limiting apparatus 2 is all-metal structure.Focusing electrode 201 is by made of metal
It makes and is tubular, in addition, the line aperture of its tip face cathode 1, electric field are opened from the line of the upper surface of cathode shell 103
Hole and its surrounding level are assembled to the tip for the focusing electrode 201 for focusing current-limiting apparatus 2, form focusing electric field, are emitted from cathode 1
Electronic beam current out generates focussing force.In addition, electric field isostatic surface 203 is manufactured by metal, metering hole 202 is located therein centre.
The size of metering hole 202 is less than or equal to the size of the centre bore of the focusing electrode 201 of tubular, and electronic beam current passes through focusing electrode 201
Centre bore enter and focus current-limiting apparatus 2, carry out of short duration forward direction drift motion, when reaching metering hole 202, edge, forward direction
Property difference electronics by the flow restriction around metering hole 202 (that is, the portion other than metering hole 202 of electric field isostatic surface 203
Point) stop, therefore, only before tropism is good, concentrates on the electronic beam current of range of small is entered by metering hole 202 and focus current limliting
High voltage electric field between device 2 and anode 3.Herein, preferably the central axis of metering hole 202 is identical as the central axis of focusing electrode 201,
Entered thereby, it is possible to the better electronic beam current of tropism before making by metering hole 202 and is focused between current-limiting apparatus 2 and anode 3
High voltage electric field.Focus current-limiting apparatus 2 the electric field isostatic surface 203 opposite with anode 3 be a plane, length direction (that is,
Left and right directions in Fig. 1 and Fig. 3) on it is parallel with the surface of anode 3, to be formed between current-limiting apparatus 2 and anode 3 focusing
Power line is parallel to each other and high voltage electric field perpendicular to anode 3.Focus the power supply application that current-limiting apparatus 2 is focused current-limiting apparatus
One negative voltage-V forms reversed electric field (that is, the electric field of line tapping is for the line tapping in cathode shell 103
It is negative), the cathode shell 103 so that thermoelectron for limiting cathode surface 102 flies out.
In addition, the structure for focusing current-limiting apparatus 2 is illustrated as described above, still, the structure of current-limiting apparatus 2 is focused
It is without being limited thereto, as long as focusing and current limliting can be played the role of, it is also possible to other structures, for example, multiple focusing current limlitings fill
Set 2 electric field isostatic surface 203 it is integrally formed, also, form metering hole 202 every scheduled distance.In such manner, it is possible to reduce manufacture
The process for focusing current-limiting apparatus 2 and manufacturing X-ray apparatus, and reduce manufacturing cost.
In addition, cathode 1 can be the structure of square-outside and round-inside, that is, cathode shell 103 and cathode screen 104 are cuboid
Shape, cathode surface 102 are circle, and the line aperture of the upper surface of cathode shell 103 is circle.In addition, in order to make cathode surface
The 102 electrically realized better convergent effects generated, in general, cathode surface 102 is processed to spherical arc shape.Cathode surface
102 diameter is usually several mm to ten mm, such as diameter is 4mm, and the diameter of the line aperture of cathode shell 103 is usually several
Mm, such as diameter are 2mm.The corresponding focusing electrode 201 for focusing current-limiting apparatus 2 is cylindrical shape and metering hole 202 is also round
Shape, in general, the diameter of focusing electrode 201 is suitable with the line opening diameter of cathode shell 103, for example, the inner hole of focusing electrode 201 is straight
Diameter is 1.5mm, and the diameter of metering hole 202 is 1mm.It is logical from the distance of the focusing electrode 201 to the metering hole 202 that focus current-limiting apparatus 2
It is often several mm, such as distance is 4mm.
Moreover it is preferred that cathode is inside and outside rectangle structure, that is, cathode shell 103, cathode screen 104 are cuboid
Shape and cathode surface 102 and line aperture corresponding with the center of cathode surface 102 are rectangle.Multiple cathodes 1
Linearly aligned direction is the narrow side (rectangular width) of single cathode, and the orientation perpendicular to cathode 1 is broadside (rectangle
Length).A kind of structure of rectangular cathode is shown in FIG. 4, (A) is side view, and (B) is top view.Cathode surface 102 is length
Rectangular, preferably cylinder cambered surface, this electronic beam current for being conducive to narrow side direction are further assembled.Usual arc length is several mm
To more than ten mm, width is several mm, such as arc length is 10mm, width 3mm.The beam of upper surface about cathode shell 103
The size of aperture is flowed, width W is preferably 2mm, and length D is preferably 8mm.In addition, the corresponding focusing electrode for focusing current-limiting apparatus 2
201 be cuboid tubular and metering hole 202 is rectangle, also, multiple current-limiting apparatus 2 that focus are according to the cloth of multiple cathodes 1
Corresponding linear array is set, the preferably hole size of focusing electrode 201 is long 8mm, width 1.5mm, and the preferably size of metering hole 202 is length
The distance of 8mm, width 1mm, preferably focusing electrode 201 to metering hole 202 is 4mm.
In addition, anode 3 be elongated metal, be mounted on the inside of vacuum box 4 the other end (defined herein as upper end,
Referring to Fig. 1), it is parallel in the longitudinal direction with current-limiting apparatus 2 is focused, also, formed in the direction of the width with focusing current-limiting apparatus 2
One small angle.Anode 3 is substantially parallel (as shown in Figure 1) with focusing current-limiting apparatus 2 in the longitudinal direction, applies on anode 3
Added with positive high tension voltage, usually tens kV~several hundred kV are typical such as 180kV, in anode 3 and focus current-limiting apparatus
Parallel high voltage electric field is formed between 2, acceleration of the electronic beam current by high voltage electric field of metering hole 202 is had passed through, along electric field
Direction movement, it is final to bombard anode 3, to generate X-ray.Furthermore it is preferred that anode 3 uses metal tungsten material resistant to high temperature.
In addition, be shown in FIG. 5 using the distributed X-ray apparatus of rectangular cathode 1 surface structure (herein
Place, using the left and right directions in figure as width direction, using the direction vertical with paper as length direction, length direction namely yin
The direction of 1 linear array of pole).Cathode 1 is shown in Fig. 6, focuses the relative positional relationship between current-limiting apparatus 2 and anode 3.Such as
Shown in Fig. 5, Fig. 6, the width direction and focusing current-limiting apparatus 2 of anode 3 form a small angle C.Electron beam bombardment anode 3
Generated X-ray with maximum intensity on direction of the incident electronic beam current at an angle of 90 degrees, it is available that the direction becomes ray
Direction.Anode 3 tilts scheduled small angle C relative to current-limiting apparatus 2 is focused, and usually the several years are advantageous in this way to ten several years
In the outgoing of X-ray, on the other hand, wider electronic beam current (width of electronic beam current herein, is denoted as T) such as T=8mm's
Electronic beam current projects on anode 3, and still, in terms of the exit direction of X-ray, generated radiation H is smaller, such as H=
1mm, this, which is equivalent to, reduces focal spot size.
In addition, vacuum box 4 is cavity shell sealed around, inside is high vacuum, and shell is preferably insulating materials, such as
Glass or ceramics etc. are but it is also possible to be stainless steel and other metal materials.Also, the box wall of vacuum box 4 and cathode 1 focus current limliting dress
It sets 2, anode 3 and keeps enough insulation distances.In the inside of vacuum box 4, multiple cathodes 1 are mounted on its lower end and are arranged in straight
Line is equipped with multiple focusing current-limiting apparatus 2, each position for focusing current-limiting apparatus 2 and cathode 1 close to the array of cathode 1 at middle part
Correspondence is set, is equally arranged in a straight line, also, the electric field isostatic surface 203 of adjacent focusing current-limiting apparatus 2 is connected to each other and forms one
A plane is equipped with the anode 3 of strip in upper end, also, in the longitudinal direction, and anode 3 focuses current-limiting apparatus 2, cathode 1
This three is parallel to each other.The movement of the enough electronic beam currents in the space of the inside of vacuum box 4 in the electric field, will not generate any resistance
Gear.High vacuum in vacuum box 4 is obtained and toasting exhaust in high-temperature exhaust air furnace, and vacuum degree is typically superior to 10-5Pa。
In addition, plug type high-voltage connection device 5 is used to the cable connection of anode 3 and high voltage power supply being mounted on vacuum
The side of 3 one end of close anode of box 4.5 inside of plug type high-voltage connection device is connect with anode 3, and outside reaches vacuum
Except box 4, closely it is connect with the box wall of vacuum box 4, is formed together vacuum seal structure.
Plug type cathode power attachment device 6(also by plug type cathode power attachment device 61,62,63,64,
65 ... are referred to as plug type cathode power attachment device 6) for cathode 1 to be connected with cathode power, it is mounted on vacuum box 4
1 one end of close cathode side.Plug type cathode power attachment device 6 has quantity identical with cathode 1 and arrangement side
Formula, each cathode power attachment device 6 are connected in 4 inside of vacuum box with the heater lead 105 of cathode 1, outside to stretching
Except vacuum box 4, closely it is connect with the box wall of vacuum box 4, is formed together vacuum seal structure.
Each component that 7 pairs of yin of power supply and control system control more cathode distribution X-ray apparatus provides required power supply and work
It controls.Power supply includes with control system 7: multiple cathode power PS1, PS2, PS3, PS4 for powering to cathode 1,
PS5,……；For to the focusing current-limiting apparatus power supply-V. for focusing the power supply of current-limiting apparatus 2；Anode for powering to anode 3
High voltage power supply+H.V.；And control device etc..Control device carries out integrated logic control to each power supply, thus the entire system of control
The normal work of system, and external control interface and man machine operation interface can also be provided.Typically, control system can be passed through
Programming, output heater current size and cathode negative high voltage impulse magnitude to each cathode power carry out program setting and negative-feedback
Adjust automatically, after realizing that the electronic beam current of each cathode generation is accelerated and practices shooting, generated X-ray intensity is consistent, in addition,
It can also be programmed by control system, the sequence of negative high voltage pulse is exported according to each cathode power, determines each cathode
Working sequence can be single cathode sequential working (for example, the 1st → the 2nd → the 3rd → the 4th → the 5th
→... ...), be also possible to multiple interval cathode sequential workings (for example, (the 1st, 5,9) → (the 2nd, 6,10) → (the 3rd, 7,
11) →... ...) etc. multiple programs set scheme.
In turn, it can also include vacuum plant 8 that yin, which controls more cathode distribution X-ray apparatus,.Vacuum plant 8 is mounted on vacuum
It on the side wall of box 4, works under the action of vacuum power, for maintaining the high vacuum in vacuum box 4.Usual distribution X
X-ray apparatus at work, electron beam bombardment anode 3, so that anode 3 can generate heat and discharge a small amount of gas, in the present invention,
It is able to use vacuum plant 8 quickly to extract this portion gas out, maintains the condition of high vacuum degree inside vacuum box 4.Furthermore it is preferred that vacuum
Device 8 uses vacuum ion pump.Correspondingly, yin controls the power supply of more cathode distribution X-ray apparatus and control system 7 further includes using
In the power supply Vacc PS to power to vacuum plant 8.
In turn, it can also include shielding and collimator apparatus 9 that yin, which controls more cathode distribution X-ray apparatus,.Shielding is filled with collimation
Set 9 outsides for being mounted on vacuum box 4, for shielding unwanted X-ray, available X-ray outlet port offer with
The opening of the corresponding strip of anode 3 is provided with along X-ray exit direction in length direction, width in the opening
Part (referring to Fig. 5) in the range of application required for X-ray is limited to by the up and down direction in direction and Fig. 5, in addition, excellent
Choosing shielding is made with collimator apparatus 9 of lead material.
It is important to note that controlling in more cathode distribution X-ray apparatus in above-mentioned yin, multiple cathodes 1 be can be directly
Linear array, but it is also possible to circular arc type arrangement, to meet different application demands.Fig. 7 is that a kind of circular arc type yin control is more
The schematic diagram of the structure of cathode distribution X-ray apparatus, (A) are perspective view (front), and (B) is end view drawing.According to from the top down
Sequence, multiple cathodes 1 are arranged as arc-shaped in first plane, corresponding multiple focusing current-limiting apparatus 2 with first
Be arranged as in second parallel plane of plane it is arc-shaped, also, on overlying relation each focusings current-limiting apparatus 2 with respectively
A cathode 1 corresponds.In addition, the anode 3 of conical surface arc be arranged in focus current-limiting apparatus 2 lower section, on arc direction with
First plane is parallel, forms a scheduled angle C with first plane radially, and usually the several years are to ten several years, and
Inclined direction is that edge tilts down (see shown in Fig. 7 (end face B)) in anode.Electronic beam current is emitted from cathode 1, by poly-
Enter after the focusing and current limliting of burnt current-limiting apparatus 2 and focus between current-limiting apparatus and anode, accelerated by high voltage electric field, bombards anode
3, a series of focus of the arc-shaped arrangement formed on anode 3 31,32,33,34,35 ... the outgoing side of useful X-ray
To the center of circle for being directed toward circular arc.The exit Xray of circular arc type distribution X-ray apparatus all points to the center of circle of circular arc, can be applied to
Need the occasion of radiographic source circular arrangement.
(system composition)
As shown in FIG. 1 to FIG. 7, the more cathode distribution X-ray apparatus of yin control of the invention have multiple cathodes 1, Duo Geju
Burnt current-limiting apparatus 2, anode 3, vacuum box 4, plug type high-voltage connection device 5, multiple plug type cathode power attachment devices 6
And power supply and control system 7, further, it is also possible to further have vacuum plant 8 and shielding and collimator apparatus 9.Multiple yin
The lower end that linear array is mounted on inside vacuum box 4 is lined up in pole 1, and each cathode 1 is independent mutually, and multiple focusing current-limiting apparatus 2 are pacified
Middle part in vacuum box 4 focuses current-limiting apparatus 2 and cathode 1 corresponds, be also arranged in linear close to the position of cathode 1
Array, all focusing current-limiting apparatus 2 are connected with each other, and the anode 3 of strip is mounted on the upper end in vacuum box 4, the battle array of cathode 1
Column, the array for focusing current-limiting apparatus 2, this three of anode 3 are parallel to each other.Plug type high-voltage connection device 5 is mounted on vacuum box 4
Upper end, internal to be connected with anode 3, outside can connect high-tension cable, and multiple plug type cathode power attachment devices 6 are mounted on very
4 lower end of sylphon, 6 inside of plug type cathode power attachment device are connected with cathode 1, and outside can pass through cable connection to each yin
Pole power supply.Vacuum plant 8 is mounted on the side wall of vacuum box 4.Power supply and control system 7 include multiple cathode power PS1, PS2,
PS3, PS4, PS5 ..., focus current-limiting apparatus power supply-V., vacuum power Vacc PS, anode high voltage power supply+H.V., control
Multiple modules such as device, by power cable and control cable respectively with multiple cathodes 1, multiple focusing current-limiting apparatus 2, vacuum holding
The components such as 8, anode 3 are set to be connected.
(working principle)
It is controlled in more cathode distribution X-ray apparatus in yin, according to the control of power supply and control system 7, makes multiple cathode electricity
Source PS1, PS2, PS3, PS4, PS5 ..., focus current-limiting apparatus power supply-V., vacuum power Vacc PS, anode high voltage power supply+
H.V. equal to start to work respectively according to the program of setting.Cathode power powers to cathode filament 101, and cathode filament 101 is by cathode
Surface 102 is heated to very high temperature, generates a large amount of thermal electrons；Current-limiting apparatus power supply-V. is focused to interconnected
The negative voltage that current-limiting apparatus 2 applies 200V is focused, forms a reversed electric field, limitation yin in the line tapping of each cathode 1
The thermoelectron of pole surface 102 flies out cathode shell 103.Anode high voltage power supply+H.V. provides the positive high voltage of 160kV to anode 3,
It focuses and forms positive high voltage electric field between the array and anode 3 of current-limiting apparatus 2.Moment 1: power supply and control system 7 control yin
Pole power ps 1 generate the negative high voltage pulse of a 2kV and provide it to cathode 11, and the global voltage pulsed of cathode 11 is fallen
It falls, so that cathode 11 and the electric field umklappen focused between current-limiting apparatus 21 are positive field, in the cathode shell of cathode 11
Thermoelectron emitted from line tapping, fly to focus current-limiting apparatus 21 focusing electrode, thermoelectron during the motion by
To focussing force, become small sized electronic beam current, the overwhelming majority enters the centre bore of focusing electrode, reaches after of short duration drift motion
The electronics of metering hole, edge, preceding tropism difference is stopped by the flow restriction around metering hole, only concentrates on range of small
Interior, consistent forward electronics into positive high voltage electric field and is accelerated by metering hole and obtains energy, finally bombard anode
3, X-ray is generated, the focal position of X-ray is the cathode surface 102 of cathode 11, the focusing electrode 201 of focusing current-limiting apparatus 21, limit
Projection of the line of 202 this three of discharge orifice on anode 3, i.e. focus 31.Moment 2:, power supply and control system 7 similar with the moment 1
Control cathode power PS2 generates the negative high voltage pulse of a 2kV and provides it to cathode 12, the global voltage pulse of cathode 12
Formula is fallen, so that cathode 12 and the electric field umklappen focused between current-limiting apparatus 22 are positive field, the cathode casing of cathode 12
Intracorporal thermoelectron is emitted from line tapping, flies to the focusing electrode for focusing current-limiting apparatus 22, thermoelectron is in motion process
In by focussing force, become small sized electronic beam current, the overwhelming majority enters the centre bores of focusing electrode, after of short duration drift motion
Metering hole is reached, the electronics of edge, preceding tropism difference is stopped by the flow restriction around metering hole, only concentrates on small size model
In enclosing, unanimously forward electronics into positive high voltage electric field and is accelerated by metering hole and obtains energy, final bombardment
Anode 3, generates X-ray, and the focal position of X-ray is the cathode surface 102 of cathode 12, the focusing electrode for focusing current-limiting apparatus 22
201, projection of the line of 202 this three of metering hole on anode 3, i.e. focus 32.Similarly, at the moment 3, cathode 13 obtains arteries and veins
Negative high voltage is rushed, electron beam is generated, is focused the focusing of current-limiting apparatus 23, current limliting, it is accelerated into high-voltage electricity place, anode 3 is bombarded,
Generate X-ray, focal position 33；It is focal position 34 at the moment 4；It is focal position 35 at the moment 5；... to the last one
A emission of cathode line, generates the last one focal position, completes a duty cycle.In next cycle, repeat from coke
Point position 31,32,33,34 ... be sequentially generated X-ray.
The gas discharged when anode 3 is by electron beam bombardment is taken away in real time by vacuum plant 8, makes to maintain in vacuum box 4
High vacuum is conducive to long-time steady operation.Shielding shields the X-ray on useless direction with collimator apparatus 9, allows on usable direction
X-ray pass through, and X-ray is limited in predetermined range.Power supply and control system 7 are in addition to controlling each power supply by setting
Driven by program all parts carry out except co-ordination, additionally it is possible to external command is received by communication interface and man-machine interface, it is right
The key parameter of system is modified and is set, and more new procedures and carries out automatically controlling adjustment.
Furthermore it is possible to the more cathode distribution X-ray apparatus of yin control of the invention are applied to CT equipment, thereby, it is possible to
The CT equipment at multiple visual angles can be generated not shift position in X-ray apparatus to a kind of.
(effect)
The present invention provides a kind of yin control more cathode distribution X-ray apparatus, generates in a light source equipment suitable by making a reservation for
The X-ray of sequence periodic transformation focal position.The present invention uses hot cathode source, big with emission current relative to other designs,
The advantage of service life length；Multiple independent cathodes line up linear array, also, each cathode is independent and electric using independent cathode
Source is controlled, convenient, flexible；Focusing current-limiting apparatus corresponding with each cathode is arranged in a straight line and interconnects, in steady
Fixed small negative voltage potential, it is easily controllable；There are biggish distance, production easy to process between cathode and focusing current-limiting apparatus；Using
The problem of anode overheats has been effectively relieved in the design of the big anode of long strip type, is conducive to the power for improving light source；Cathode can be with straight line
Arrangement, whole to become linear type distribution X-ray apparatus, cathode can also be whole to become camber distribution X-ray with arc shooting
Device, it is flexible in application.Relative to other distributed X-ray source equipment, in the present invention, electric current is big and target spot is small, target spot position
It sets and is evenly distributed and reproducible, output power is high, and structure is simple, easy to control.In addition, being penetrated by distributed X of the invention
In the case that linear light source is applied to CT equipment, multiple visual angles can be generated without mobile light source, therefore, it is convenient to omit slip ring fortune
It is dynamic, be conducive to simplify structure, improve system stability, reliability, improves and check efficiency.
As described above, the present application is illustrated, however, it is not limited to this, and be construed as can be in the present invention
It is made various changes in the range of objective.For example, anode is not limited to anode used in above embodiment, as long as being capable of shape
It can be applied to the present invention at the anode of multiple target positions and excellent heat radiation performance, in addition, cathode is also not necessarily limited to of the invention
Cathode construction applied in embodiment, as long as can emit the cathode of X-ray can be applied to the present invention.
Claims (16)
1. a kind of yin controls more cathode distribution X-ray apparatus, which is characterized in that have:
Vacuum box, it is sealed around and internal for high vacuum；
One end that multiple cathodes mutual independence at each cathodes and are mounted on inside the vacuum box；
Multiple focusing current-limiting apparatus are mounted on the middle part in the vacuum box close to the cathode with the cathode correspondingly
Position, also, each focusing current-limiting apparatus is interconnected to form electric field isostatic surface；
Anode, the other end being mounted on inside the vacuum box；And
Power-supply system provides power supply for the multiple cathode, multiple focusing current-limiting apparatus and anode,
The cathode includes cathode shell, surrounds the cathode filament and the cathode surface, also, with the cathode
The corresponding position in the center on surface is provided with line aperture, the outer of line aperture is provided with planar structure, in the planar junction
The outer of structure is provided with inclined-plane；Cathode screen, in the outside of the cathode shell, surround the cathode shell in addition to being provided with
Other faces except the face of line aperture,
The heater lead passes through the cathode shell and the cathode screen is drawn out to the connection of plug type cathode power
Device.
2. yin as described in claim 1 controls more cathode distribution X-ray apparatus, which is characterized in that the power-supply system includes:
Power supply and control system, with cathode power, the focusing current-limiting apparatus electricity being connect with focusing current-limiting apparatus interconnected
Source, anode high voltage power supply, the control device for carrying out integrated logic control to each power supply；
Plug type high-voltage connection device is mounted on the vacuum for connecting the anode with the anode high voltage power supply
The side close to described anode one end of box；And
Multiple plug type cathode power attachment devices are mounted on described true for connecting the cathode and the cathode power
The side close to described cathode one end of sylphon.
3. yin as described in claim 1 controls more cathode distribution X-ray apparatus, which is characterized in that
The cathode shell and the cathode screen are rectangular shape, the cathode surface and with the cathode surface
The corresponding line aperture in center is rectangle.
4. yin as described in claim 1 controls more cathode distribution X-ray apparatus, which is characterized in that
The cathode shell and the cathode screen are rectangular shape, the cathode surface and with the cathode surface
The corresponding line aperture in center is circle.
5. yin as described in claim 1 controls more cathode distribution X-ray apparatus, which is characterized in that
The cathode shell and the cathode screen are rectangular shape, and the cathode surface is spherical arc shape, the yin
The corresponding line aperture in the center of pole surface is circle.
6. yin as described in claim 1 controls more cathode distribution X-ray apparatus, which is characterized in that
The vacuum box is made of glass or ceramics.
7. yin as described in claim 1 controls more cathode distribution X-ray apparatus, which is characterized in that
The vacuum box is made of metal material.
8. yin as claimed in claim 1 or 2 controls more cathode distribution X-ray apparatus, which is characterized in that
Be connected inside the plug type high-voltage connection device with the anode, the vacuum box is stretched out in outside, with it is described very
Sylphon wall closely connects, and is formed together vacuum seal structure.
9. yin as claimed in claim 1 or 2 controls more cathode distribution X-ray apparatus, which is characterized in that
Each plug type cathode power attachment device inside the vacuum box with the heater lead of the cathode
It is connected, the vacuum box is stretched out in outside, closely connect with the vacuum box wall, is formed together vacuum seal structure.
10. yin as claimed in claim 1 or 2 controls more cathode distribution X-ray apparatus, which is characterized in that
Vacuum power is also included, including in the power supply and control system；Vacuum plant is mounted on the side of the vacuum box
It on wall, is worked using the vacuum power, maintains the high vacuum in the vacuum box.
11. yin as claimed in claim 1 or 2 controls more cathode distribution X-ray apparatus, which is characterized in that
Shielding and collimator apparatus are also included, the outside of the vacuum box is mounted on, is provided in available X-ray outlet port
Strip opening corresponding with the anode.
12. yin as claimed in claim 11 controls more cathode distribution X-ray apparatus, which is characterized in that
The shielding uses lead material with collimator apparatus.
13. yin as claimed in claim 1 or 2 controls more cathode distribution X-ray apparatus, which is characterized in that
The focusing current-limiting apparatus includes: electric field isostatic surface, is made of metal and has metering hole at its center；Focusing electrode,
It is made of metal and for tubular, the line aperture of cathode described in the face of tip,
The size of the metering hole is less than or equal to the centre bore of the focusing electrode.
14. yin as claimed in claim 1 or 2 controls more cathode distribution X-ray apparatus, which is characterized in that
The multiple cathode arrangement is in line type, also, the multiple focusing current-limiting apparatus is also accordingly arranged in a straight line type.
15. yin as claimed in claim 1 or 2 controls more cathode distribution X-ray apparatus, which is characterized in that
The multiple cathode arrangement is at circular arc type, also, the multiple focusing current-limiting apparatus is also arranged in circular arc type,
The anode is conical surface arc, and the cathode, the focusing current-limiting apparatus and the anode are arranged in sequence, and sun
Plane where the outer camber line of pole be with where the multiple cathode first plane and the multiple focusing current-limiting apparatus institute
The parallel third plane of second plane, the interior edge of anode relative to outer with focus at a distance from current-limiting apparatus farther out.
16. a kind of CT equipment, which is characterized in that
Have the more cathode distribution X-ray apparatus of yin control described in any one of claim 1~15.
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| CN201410800756.4A CN104616952B (en) | 2012-12-31 | 2012-12-31 | Cathode-controlled multi-cathode distributed X-ray device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210588832.0A CN103903941B (en) | 2012-12-31 | 2012-12-31 | Negative control multi-cathode distributed X-ray device and CT equipment with the device |
| CN201410800756.4A CN104616952B (en) | 2012-12-31 | 2012-12-31 | Cathode-controlled multi-cathode distributed X-ray device |
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| JPS6224543A (en) * | 1985-07-24 | 1987-02-02 | Toshiba Corp | X-ray tube apparatus |
| US6553096B1 (en) * | 2000-10-06 | 2003-04-22 | The University Of North Carolina Chapel Hill | X-ray generating mechanism using electron field emission cathode |
| CN101523543A (en) * | 2006-10-16 | 2009-09-02 | 皇家飞利浦电子股份有限公司 | X-ray tubes with ion deflection and collection devices made of getter materials |
| CN101174533A (en) * | 2006-11-02 | 2008-05-07 | 北京普析科学仪器有限责任公司 | End-window X ray tube |
| CN201392805Y (en) * | 2008-11-24 | 2010-01-27 | 周发勇 | Core-cooling X-ray tube |
| CN201402789Y (en) * | 2009-05-11 | 2010-02-10 | 杭州万东电子有限公司 | Grid control X ray tube for dentistry |
| CN102870189B (en) * | 2010-03-22 | 2016-08-10 | 新鸿电子有限公司 | Multi-beam X-ray source and correlation technique with intelligent electronic control system |
| JP5645449B2 (en) * | 2010-04-14 | 2014-12-24 | キヤノン株式会社 | X-ray source and X-ray imaging apparatus |
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