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CN104576455A - Device for cleaning black silicon cell piece - Google Patents

Device for cleaning black silicon cell piece Download PDF

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Publication number
CN104576455A
CN104576455A CN201410799107.7A CN201410799107A CN104576455A CN 104576455 A CN104576455 A CN 104576455A CN 201410799107 A CN201410799107 A CN 201410799107A CN 104576455 A CN104576455 A CN 104576455A
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Prior art keywords
black silicon
crucible
cleaning
metal working
working tank
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Pending
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CN201410799107.7A
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Chinese (zh)
Inventor
罗西佳
蒋仙
吴而义
李华
范琼
刘林华
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WUXI DEXIN SOLAR POWER CO Ltd
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WUXI DEXIN SOLAR POWER CO Ltd
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Priority to CN201410799107.7A priority Critical patent/CN104576455A/en
Publication of CN104576455A publication Critical patent/CN104576455A/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

本发明公开了一种清洗黑硅电池片的装置,包括金属工作槽、坩埚和超声波发生器,所述坩埚位于立方体形金属工作槽内部,所述金属工作槽底部设有多个超声波发生器;所述金属工作槽与坩埚之间设有间隙;所述坩埚中盛放硝酸溶液用于清洗黑硅电池片;本发明提供了一种避免金属残留,保证黑硅电池的电性能的清洗黑硅电池片的装置。

The invention discloses a device for cleaning black silicon cells, which comprises a metal working tank, a crucible and an ultrasonic generator. The crucible is located inside the cubic metal working tank, and a plurality of ultrasonic generators are arranged at the bottom of the metal working tank; There is a gap between the metal working tank and the crucible; the nitric acid solution is contained in the crucible for cleaning the black silicon battery; the invention provides a cleaning black silicon battery that avoids metal residue and ensures the electrical performance of the black silicon battery. Cell device.

Description

一种清洗黑硅电池片的装置A device for cleaning black silicon cells

技术领域 technical field

本发明涉及光伏电池制造领域,具体涉及一种清洗黑硅电池片的装置。 The invention relates to the field of photovoltaic cell manufacturing, in particular to a device for cleaning black silicon cells.

背景技术 Background technique

黑硅电池制绒后的常规清洗是只用硝酸来浸泡黑硅,银与硝酸的反应速度较慢程度弱,虽然浸泡数十分钟,仍然无法确保附着的纳米金属颗粒无残留,若清洗效果不理想,表面有金属残留时会导致严重的俄歇复合,会直接影响黑硅电池的电性能,转换效率下降。 The conventional cleaning of black silicon cells after texturing is to soak the black silicon only with nitric acid. The reaction between silver and nitric acid is relatively slow and weak. Even if soaked for tens of minutes, it is still impossible to ensure that there are no residues of the attached nano-metal particles. If the cleaning effect is not Ideally, when there are metal residues on the surface, it will cause serious Auger recombination, which will directly affect the electrical performance of black silicon cells and reduce the conversion efficiency.

发明内容 Contents of the invention

发明目的:针对现有技术存在的不足,本发明提供了一种避免金属残留,保证黑硅电池的电性能的清洗黑硅电池片的装置。 Purpose of the invention: Aiming at the deficiencies in the prior art, the present invention provides a device for cleaning black silicon cells that avoids metal residues and ensures the electrical properties of the black silicon cells.

技术方案:一种清洗黑硅电池片的装置,包括金属工作槽、坩埚和超声波发生器,所述坩埚位于长方体形金属工作槽内部;所述金属工作槽底部设有多个超声波发生器;所述金属工作槽与坩埚之间设有间隙。 Technical solution: A device for cleaning black silicon cells, including a metal working tank, a crucible and an ultrasonic generator, the crucible is located inside a cuboid metal working tank; multiple ultrasonic generators are arranged at the bottom of the metal working tank; There is a gap between the metal working tank and the crucible.

具体地,所述超声波发生器至少4个以上,通过超声波发生器将高频电能转换为超声波。 Specifically, there are at least four ultrasonic generators, and the high-frequency electric energy is converted into ultrasonic waves through the ultrasonic generators.

具体地,所述坩埚中盛放硝酸溶液用于清洗黑硅电池片。 Specifically, a nitric acid solution is contained in the crucible for cleaning the black silicon cells.

具体地,所述坩埚内部放置多个硅片承载盒。 Specifically, a plurality of silicon wafer carrying boxes are placed inside the crucible.

更具体地,所述坩埚与硅片承载盒之间设有间隙。 More specifically, a gap is provided between the crucible and the silicon wafer carrying box.

更具体地,所述硅片承载盒完全浸没于硝酸清洗液中。 More specifically, the silicon wafer carrying box is completely submerged in the nitric acid cleaning solution.

具体地,所述硅片承载盒至少有4个以上。 Specifically, there are at least four silicon wafer carrying boxes.

具体地,所述金属工作槽中盛放水作为超声波传导介质,保持坩埚与金属工作槽间超声波的良好传导。 Specifically, water is contained in the metal working tank as an ultrasonic transmission medium, so as to maintain good conduction of ultrasonic waves between the crucible and the metal working tank.

具体地,所述金属工作槽的外壳为不锈钢外壳。 Specifically, the shell of the metal working tank is a stainless steel shell.

有益效果:与现有技术相比,本发明提供的一种清洗黑硅电池片的装置,利用超声波对硅片表面纳米金属颗粒的进行物理超声波冲击,使其从纳米深坑中流出,同时配合硝酸浸泡清洗,从而加速化学反应,可避免金属残留,保证黑硅电池的电性能。 Beneficial effects: Compared with the prior art, the device for cleaning black silicon cells provided by the present invention uses ultrasonic waves to physically impact the nano-metal particles on the surface of the silicon chips to make them flow out of the nano-deep pits, and at the same time cooperate with Soaking and cleaning in nitric acid accelerates the chemical reaction, avoids metal residues, and ensures the electrical performance of the black silicon battery.

附图说明 Description of drawings

图1是本发明的侧面结构图; Fig. 1 is a side structural view of the present invention;

图2是本发明的俯视图。 Figure 2 is a top view of the present invention.

具体实施方式 Detailed ways

下面结合附图和具体实施方式,进一步阐明本发明。 The present invention will be further explained below in conjunction with the accompanying drawings and specific embodiments.

如图1-2所示,一种清洗黑硅电池片的装置,包括金属工作槽1、坩埚2、硅片承载盒3和超声波发生器5,金属工作槽1外形为立方体,外壳为金属外壳,底部设有多个超声波发生器5,通过超声波发生器5将高频电能转换为机械振动,坩埚2位于金属工作槽1槽底7上,并且金属工作槽1与坩埚2之间设有间隙,用于注入纯水;坩埚2内部可放置至少四个硅片承载盒3,坩埚2与硅片承载盒3之间设有间隙,硅片承载盒3彼此之间设有间隙,用于注入溶液;硅片承载盒3内设有若干个用于放置黑硅电池片4的凹槽。 As shown in Figure 1-2, a device for cleaning black silicon cells includes a metal working tank 1, a crucible 2, a silicon wafer carrying box 3 and an ultrasonic generator 5. The shape of the metal working tank 1 is a cube, and the outer shell is a metal shell. , the bottom is provided with a plurality of ultrasonic generators 5, through which the high frequency electric energy is converted into mechanical vibration, the crucible 2 is located on the bottom 7 of the metal working tank 1, and there is a gap between the metal working tank 1 and the crucible 2 , used to inject pure water; at least four silicon wafer carrying boxes 3 can be placed inside the crucible 2, a gap is provided between the crucible 2 and the silicon wafer carrying box 3, and a gap is provided between the silicon wafer carrying boxes 3 for injection Solution; the silicon chip carrying box 3 is provided with several grooves for placing black silicon battery chips 4 .

金属工作槽1高度为40cm,长度为76cm;坩埚2高度为35 cm,长度为70cm,硅片承载盒3长度为30cm,因此金属工作槽1的高度大于坩埚2高度,金属工作槽1的长度大于坩埚2长度,坩埚2长度大于硅片承载盒3长度,坩埚2长度大于两个硅片承载盒3长度。 The height of the metal working tank 1 is 40cm, and the length is 76cm; the height of the crucible 2 is 35 cm, and the length is 70cm, and the length of the silicon wafer carrying box 3 is 30cm, so the height of the metal working tank 1 is greater than the height of the crucible 2, and the length of the metal working tank 1 greater than the length of the crucible 2, the length of the crucible 2 is greater than the length of the silicon wafer carrying box 3, and the length of the crucible 2 is greater than the length of the two silicon wafer carrying boxes 3.

装满制绒后的黑硅电池片的硅片承载盒3先放置在坩埚2内,再将硝酸溶液注入坩埚2内,然后将纯水注入金属工作槽1与坩埚2之间的间隙内,打开超声清洗器5,超声清洗20分钟,结束后取出硅片承载盒3,再取出黑硅电池片4。 The silicon wafer carrying box 3 filled with textured black silicon cells is first placed in the crucible 2, then the nitric acid solution is injected into the crucible 2, and then pure water is injected into the gap between the metal working tank 1 and the crucible 2, Turn on the ultrasonic cleaner 5 and perform ultrasonic cleaning for 20 minutes. After the end, take out the silicon wafer carrier box 3 and then take out the black silicon cell 4 .

工作原理:利用金属工作槽所发出的的50Hz的交频电流,通过超声波发生器5转换成了交频机械振荡而传播到介质硝酸清洗液中,强力的超声波在清洗液中以疏密相间的形式向被洗物件辐射,使黑硅电池片4的面、孔、隙中的污垢被分散、破裂及剥落,达到净化清洁。 Working principle: Utilize the 50Hz alternating-frequency current emitted by the metal working tank, which is converted into alternating-frequency mechanical oscillation by the ultrasonic generator 5 and propagated into the medium nitric acid cleaning solution. The form radiates to the object to be washed, so that the dirt in the surface, hole and gap of the black silicon cell 4 is dispersed, broken and peeled off to achieve purification and cleanliness.

本发明结合物理法的超声波清洗黑硅电池片4表面,增强深坑中银颗粒震动使其掉落出坑洞结构,增加了杂质与硝酸溶液的接触,增强清洗,改善了黑硅电池片4清洗效果。 The present invention combines physical methods to ultrasonically clean the surface of the black silicon cell 4, strengthens the vibration of the silver particles in the deep pit to make it fall out of the pit structure, increases the contact between impurities and nitric acid solution, strengthens the cleaning, and improves the cleaning of the black silicon cell 4 Effect.

Claims (9)

1. 一种清洗黑硅电池片的装置,其特征在于:包括金属工作槽(1)、坩埚(2)超声波发生器(5),所述坩埚(2)位于长方体形金属工作槽(1)内部;所述金属工作槽(1)底部设有多个超声波发生器(5);所述金属工作槽(1)与坩埚(2)之间设有间隙。 1. A device for cleaning black silicon cells, characterized in that it includes a metal working tank (1), a crucible (2) and an ultrasonic generator (5), and the crucible (2) is located in a cuboid metal working tank (1) Inside; the bottom of the metal working tank (1) is provided with a plurality of ultrasonic generators (5); a gap is provided between the metal working tank (1) and the crucible (2). 2.根据权利要求1所述的一种清洗黑硅电池片的装置,其特征在于:所述超声波发生器(5)至少4个以上。 2. A device for cleaning black silicon cells according to claim 1, characterized in that there are at least four ultrasonic generators (5). 3.根据权利要求1所述的一种清洗黑硅电池片的装置,其特征在于:所述坩埚(2)中盛放硝酸溶液用于清洗黑硅电池片(4)。 3 . The device for cleaning black silicon cells according to claim 1 , characterized in that: the crucible ( 2 ) contains nitric acid solution for cleaning the black silicon cells ( 4 ). 4 . 4.根据权利要求1所述的一种清洗黑硅电池片的装置,其特征在于:所述坩埚(2)内部可放置多个硅片承载盒(3)。 4. The device for cleaning black silicon solar cells according to claim 1, characterized in that: multiple silicon wafer carrying boxes (3) can be placed inside the crucible (2). 5.根据权利要求1或4所述的一种清洗黑硅电池片的装置,其特征在于:所述坩埚(2)与硅片承载盒(3)之间设有间隙。 5. The device for cleaning black silicon solar cells according to claim 1 or 4, characterized in that there is a gap between the crucible (2) and the silicon wafer carrying box (3). 6.根据权利要求4所述的一种清洗黑硅电池片的装置,其特征在于:所述硅片承载盒(3)完全浸没于硝酸清洗液中。 6 . The device for cleaning black silicon cells according to claim 4 , characterized in that: the silicon chip carrying box ( 3 ) is completely submerged in the nitric acid cleaning solution. 7 . 7.根据权利要求1所述的一种清洗黑硅电池片的装置,其特征在于:所述硅片承载盒(3)至少有4个以上。 7. The device for cleaning black silicon solar cells according to claim 1, characterized in that there are at least four silicon wafer carrying boxes (3). 8.根据权利要求1所述的一种清洗黑硅电池片的装置,其特征在于:所述金属工作槽(1)中盛放水作为超声波传导介质。 8. The device for cleaning black silicon cells according to claim 1, characterized in that: the metal working tank (1) holds water as the ultrasonic wave conduction medium. 9.根据权利要求1所述的一种清洗黑硅电池片的装置,其特征在于:所述金属工作槽(1)的外壳为不锈钢外壳。 9. A device for cleaning black silicon cells according to claim 1, characterized in that: the shell of the metal working tank (1) is a stainless steel shell.
CN201410799107.7A 2014-12-19 2014-12-19 Device for cleaning black silicon cell piece Pending CN104576455A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
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WO2016183707A1 (en) * 2015-05-15 2016-11-24 Acm Research (Shanghai) Inc. Methods and apparatus for cleaning semiconductor wafers
WO2018053678A1 (en) * 2016-09-20 2018-03-29 Acm Research (Shanghai) Inc. Methods and apparatus for cleaning substrates
CN109326538A (en) * 2018-09-13 2019-02-12 江西展宇新能源股份有限公司 A wet black silicon texturing cleaning tank, a texturing machine and a wet black silicon texturing method
CN110491810A (en) * 2019-09-03 2019-11-22 冯云 A kind of solar battery sheet processing cleaning equipment
TWI698291B (en) * 2016-11-02 2020-07-11 大陸商盛美半導體設備(上海)股份有限公司 Substrate cleaning method and cleaning device
US11141762B2 (en) 2015-05-15 2021-10-12 Acm Research (Shanghai), Inc. System for cleaning semiconductor wafers

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CN102157608A (en) * 2010-12-30 2011-08-17 中国科学院物理研究所 Method for reducing surface light reflectivity of silicon chip

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016183707A1 (en) * 2015-05-15 2016-11-24 Acm Research (Shanghai) Inc. Methods and apparatus for cleaning semiconductor wafers
US11141762B2 (en) 2015-05-15 2021-10-12 Acm Research (Shanghai), Inc. System for cleaning semiconductor wafers
US11633765B2 (en) 2015-05-15 2023-04-25 Acm Research (Shanghai) Inc. System for cleaning semiconductor wafers
US11752529B2 (en) 2015-05-15 2023-09-12 Acm Research (Shanghai) Inc. Method for cleaning semiconductor wafers
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TWI698291B (en) * 2016-11-02 2020-07-11 大陸商盛美半導體設備(上海)股份有限公司 Substrate cleaning method and cleaning device
CN109326538A (en) * 2018-09-13 2019-02-12 江西展宇新能源股份有限公司 A wet black silicon texturing cleaning tank, a texturing machine and a wet black silicon texturing method
CN110491810A (en) * 2019-09-03 2019-11-22 冯云 A kind of solar battery sheet processing cleaning equipment

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Application publication date: 20150429