CN104575500B - Application, speech recognition system and method for the electronic skin in speech recognition - Google Patents
Application, speech recognition system and method for the electronic skin in speech recognition Download PDFInfo
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Abstract
本发明公开了一种语音识别系统,包括:电子皮肤,所述的电子皮肤包括柔性的敏感层,所述敏感层的上表面和下表面至少之一为非平面结构,所述敏感层的上表面和下表面上分别形成有上电极层和下电极层;数据处理模块,接收来自电子皮肤的信号并将处理后的信号发送至显示模块;显示模块,接收并显示来自数据处理模块的信号。本发明的识别系统具有同步识别,识别率高,体积简小且携带方便的优点,同时由于使用柔性薄膜材料,可以方便的将本器件整合成可穿戴电子设备。
The invention discloses a voice recognition system, comprising: an electronic skin, the electronic skin includes a flexible sensitive layer, at least one of the upper surface and the lower surface of the sensitive layer is a non-planar structure, and the upper surface of the sensitive layer is An upper electrode layer and a lower electrode layer are respectively formed on the surface and the lower surface; the data processing module receives the signal from the electronic skin and sends the processed signal to the display module; the display module receives and displays the signal from the data processing module. The identification system of the present invention has the advantages of synchronous identification, high identification rate, small size and convenient portability. At the same time, due to the use of flexible film materials, the device can be easily integrated into a wearable electronic device.
Description
技术领域technical field
本申请属于传感器领域,特别是涉及一种电子皮肤在语音识别上的应用及语音识别系统和识别方法。The application belongs to the field of sensors, and in particular relates to an application of electronic skin in speech recognition, a speech recognition system and a recognition method.
背景技术Background technique
随着通信技术的快速发展和计算机科学技术的不断进步,语音识别是一项令人瞩目的高新智能人机交互技术,它涉及语音学、发声机理学、微电子技术、计算机信息处理技术、语音信号处理技术、电路与系统以及传感技术等多学科的综合性技术,其应用已经成为一个具有竞争性的新兴高技术产业。智能语音识别产业作为我国战略性新兴产业之一,一直受到国家各级主管部门的高度重视,已被列入多项国家科技发展规划和政策支持领域。With the rapid development of communication technology and the continuous advancement of computer science and technology, speech recognition is an eye-catching high-tech intelligent human-computer interaction technology, which involves phonetics, vocal mechanism, microelectronics technology, computer information processing technology, voice The application of multi-disciplinary comprehensive technologies such as signal processing technology, circuits and systems, and sensing technology has become a competitive emerging high-tech industry. As one of my country's strategic emerging industries, the intelligent speech recognition industry has always been highly valued by national authorities at all levels, and has been included in a number of national science and technology development plans and policy support areas.
目前报道的语音识别技术大都是基于语音模板、大词汇连续语音识别、声学模型等方法。然而,这些传统的语音识别技术面临很多问题,比如在吵闹的环境、口音或方言等不清晰的发音以及多人同时发音的情况下,语音输入效果差,识别率不高,甚至无法识别。存在以上问题的主要原因是传统的语音采集模块通过捕捉语音在空气中的传播信号进行语音采集,而外界的其他声源干扰会影响到采集的语音数据。Most of the currently reported speech recognition technologies are based on speech templates, large vocabulary continuous speech recognition, and acoustic models. However, these traditional speech recognition technologies face many problems. For example, in noisy environments, unclear pronunciations such as accents or dialects, and multiple people speaking at the same time, the voice input effect is poor, the recognition rate is not high, or even cannot be recognized. The main reason for the above problems is that the traditional voice acquisition module collects voice by capturing the propagation signal of voice in the air, and the interference of other external sound sources will affect the collected voice data.
发明内容Contents of the invention
本发明的目的在于提供一种电子皮肤在语音识别上的应用及语音识别系统和方法,以解决现有技术中语音输入效果差、识别率不高的问题。The object of the present invention is to provide an application of electronic skin in speech recognition and a speech recognition system and method, so as to solve the problems of poor speech input effect and low recognition rate in the prior art.
为实现上述目的,本发明提供如下技术方案:To achieve the above object, the present invention provides the following technical solutions:
本申请实施例公开了电子皮肤在语音识别上的应用,所述的电子皮肤包括柔性的敏感层,所述敏感层的上表面和下表面至少之一为非平面结构,所述敏感层的上表面和下表面上分别形成有上电极层和下电极层。The embodiment of the present application discloses the application of electronic skin in speech recognition. The electronic skin includes a flexible sensitive layer, at least one of the upper surface and the lower surface of the sensitive layer is a non-planar structure, and the upper surface of the sensitive layer An upper electrode layer and a lower electrode layer are respectively formed on the surface and the lower surface.
本发明还公开了一种语音识别系统,包括:The invention also discloses a speech recognition system, comprising:
电子皮肤,所述的电子皮肤包括柔性的敏感层,所述敏感层的上表面和下表面至少之一为非平面结构,所述敏感层的上表面和下表面上分别形成有上电极层和下电极层;Electronic skin, the electronic skin includes a flexible sensitive layer, at least one of the upper surface and the lower surface of the sensitive layer is a non-planar structure, the upper surface and the lower surface of the sensitive layer are respectively formed with an upper electrode layer and a lower electrode layer;
数据处理模块,接收来自电子皮肤的信号并将处理后的信号发送至显示模块;The data processing module receives the signal from the electronic skin and sends the processed signal to the display module;
显示模块,接收并显示来自数据处理模块的信号。The display module receives and displays the signal from the data processing module.
优选的,在上述的语音识别系统中,所述敏感层的材质为聚二甲基硅氧烷(PDMS),厚度范围为2~50μm,优选为50μm。Preferably, in the above speech recognition system, the material of the sensitive layer is polydimethylsiloxane (PDMS), and the thickness ranges from 2 to 50 μm, preferably 50 μm.
优选的,在上述的语音识别系统中,所述敏感层的材质为高分子材料,所述的高分子材料选自聚苯二甲酸乙二酯、聚乙烯醇、聚乙烯醇缩甲醛、聚乙烯中的一种或多种的组合。Preferably, in the above speech recognition system, the material of the sensitive layer is a polymer material, and the polymer material is selected from polyethylene phthalate, polyvinyl alcohol, polyvinyl formal, polyethylene one or a combination of more.
优选的,在上述的语音识别系统中,所述的敏感层和下电极层之间还设置有柔性的支撑层。Preferably, in the above speech recognition system, a flexible supporting layer is further arranged between the sensitive layer and the lower electrode layer.
优选的,在上述的语音识别系统中,所述的支撑层为聚乙烯(PE)薄膜,厚度范围为1~100μm,优选为12μm。Preferably, in the above speech recognition system, the support layer is a polyethylene (PE) film with a thickness in the range of 1-100 μm, preferably 12 μm.
优选的,在上述的语音识别系统中,所述的支撑层材料还可以选自高透明高柔性的聚氯乙烯(PVC)薄膜、聚偏二氯乙烯(PVDC),聚对苯二甲酸乙二醇酯(PET)薄膜中一种或多种的组合。Preferably, in the above speech recognition system, the material of the support layer can also be selected from highly transparent and flexible polyvinyl chloride (PVC) film, polyvinylidene chloride (PVDC), polyethylene terephthalate One or more combinations of alcohol ester (PET) films.
优选的,在上述的语音识别系统中,所述的上电极层和下电极层材质选自金、铂、镍、银、铟、铜、铝、碳纳米管、石墨烯、银纳米线中的一种或多种的组合。Preferably, in the above speech recognition system, the material of the upper electrode layer and the lower electrode layer is selected from gold, platinum, nickel, silver, indium, copper, aluminum, carbon nanotubes, graphene, and silver nanowires. One or more combinations.
优选的,在上述的电子皮肤中,所述的上电极层和下电极层电极是通过蒸镀、化学沉积、打印、喷涂或溅射方式形成。Preferably, in the above-mentioned electronic skin, the electrodes of the upper electrode layer and the lower electrode layer are formed by evaporation, chemical deposition, printing, spraying or sputtering.
优选的,在上述的语音识别系统中,所述的非平面结构为凸伸的多个多棱椎体。Preferably, in the above speech recognition system, the non-planar structure is a plurality of protruding polygonal pyramids.
优选的,在上述的语音识别系统中,所述的每个椎体的底面为10μm×10μm的正方形,侧面与底面的夹角为54.7°,椎体高度为7.06μm ,椎体之间间距为1~100μm,椎体之间间距优选为10μm。Preferably, in the above speech recognition system, the bottom surface of each vertebral body is a square of 10 μm×10 μm, the angle between the side surface and the bottom surface is 54.7°, the height of the vertebral bodies is 7.06 μm, and the distance between the vertebral bodies is 1-100 μm, the distance between vertebral bodies is preferably 10 μm.
本发明还公开了一种语音识别方法,包括;The invention also discloses a speech recognition method, comprising;
利用上述的电子皮肤采集声带的振动信号;Using the above-mentioned electronic skin to collect vibration signals of the vocal cords;
对采集的振动信号进行滤波、放大,并提取特征信号;Filter and amplify the collected vibration signal, and extract the characteristic signal;
采用时域分析法或频域分析法对特征信号进行分析识别,并将识别结果通过显示模块显示。The characteristic signal is analyzed and identified by a time-domain analysis method or a frequency-domain analysis method, and the identification result is displayed through a display module.
与现有技术相比,本发明的优点在于:Compared with the prior art, the present invention has the advantages of:
本发明的电子皮肤与新型微纳传感技术相融合,由于使用了无毒且生物相容性很好的超薄弹性薄膜材料,故能很好的和人体皮肤融为一体,构筑成可穿戴式器件能带来超好的用户体验感;同时由于敏感材料独特的纳米结构使得该设备具有的灵敏度更高、稳定性更好;加上整个器件轻小灵巧具有携带方便的优点。The electronic skin of the present invention is integrated with the new micro-nano sensing technology. Since it uses a non-toxic and biocompatible ultra-thin elastic film material, it can be well integrated with human skin and constructed into a wearable skin. The type device can bring a super good user experience; at the same time, due to the unique nanostructure of the sensitive material, the device has higher sensitivity and better stability; in addition, the whole device is light, small and smart, and has the advantage of being easy to carry.
本发明由上述电子皮肤获得的语音识别系统,具有同步识别,识别率高,体积简小、携带方便且可穿戴的优点。The speech recognition system obtained by the electronic skin of the present invention has the advantages of synchronous recognition, high recognition rate, small size, convenient portability and wearable.
附图说明Description of drawings
为了更清楚地说明本申请实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请中记载的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments described in this application. Those skilled in the art can also obtain other drawings based on these drawings without creative work.
图1所示为本发明具体实施例中语音识别系统的示意图;Fig. 1 shows the schematic diagram of speech recognition system in the specific embodiment of the present invention;
图2所示为本发明具体实施例中电子皮肤的剖视图;Figure 2 is a cross-sectional view of the electronic skin in a specific embodiment of the present invention;
图3所示为本发明具体实施例中硅晶片模板的SEM图;Fig. 3 shows the SEM figure of the silicon wafer template in the specific embodiment of the present invention;
图4所示为由图3所示模板制作的PDMS柔性薄膜的SEM图;Figure 4 shows the SEM image of the PDMS flexible film made from the template shown in Figure 3;
图5所示为利用本发明实施例中的语音识别系统对语音识别的示意图。FIG. 5 is a schematic diagram of speech recognition by the speech recognition system in the embodiment of the present invention.
具体实施方式Detailed ways
当前信息产业的国际竞争已经日益表现为对科学技术的争夺,语音识别行业作为战略性和前瞻性的重要新兴技术产业一直是国内外科学界和产业界关注的焦点。本发明涉及一种新型语音识别技术及相应的装置,本发明提出用微纳传感器采集发音时声带产生的振动信号,而不是像传统的语音识别技术通过采集模块捕捉语音在空气中的传播信号,再对振动信号进行放大、滤波等预处理,提取特征信号利用时域分析法、频域分析法等识别分析,从而得到一种简便、可行、系统的振动信号识别方法,最后显示识别结果。The current international competition in the information industry has increasingly manifested itself as a competition for science and technology. As a strategic and forward-looking important emerging technology industry, the speech recognition industry has always been the focus of attention of the scientific and industrial circles at home and abroad. The present invention relates to a new type of speech recognition technology and corresponding devices. The present invention proposes to use a micro-nano sensor to collect the vibration signal generated by the vocal cords during pronunciation, instead of capturing the propagation signal of speech in the air through the acquisition module as in the traditional speech recognition technology. Then the vibration signal is amplified, filtered and preprocessed, the characteristic signal is extracted and identified and analyzed by time domain analysis method, frequency domain analysis method, etc., so as to obtain a simple, feasible and systematic vibration signal identification method, and finally display the identification result.
本发明在传统语音识别技术基础上进行了创新,主要集中在语音信号的采集方式和提取装置上,具有同步识别,识别率高,体积简小且携带方便的优点,同时由于使用柔性薄膜材料,可以方便的将本器件整合成可穿戴电子设备。The present invention innovates on the basis of traditional speech recognition technology, and mainly focuses on the collection method and extraction device of speech signals. It has the advantages of synchronous recognition, high recognition rate, small size and convenient portability. At the same time, due to the use of flexible film materials, The device can be easily integrated into a wearable electronic device.
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行详细的描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
参图1所示,本发明实施例中,语音识别系统包括电子皮肤、数据处理模块和显示模块。Referring to Fig. 1, in the embodiment of the present invention, the voice recognition system includes an electronic skin, a data processing module and a display module.
电子皮肤用以采集声带的振动信号;数据处理模块对采集的振动信号进行滤波、放大,并提取特征信号,采用时域分析法或频域分析法对特征信号进行分析识别,并将识别结果通过显示模块显示。The electronic skin is used to collect the vibration signal of the vocal cords; the data processing module filters and amplifies the collected vibration signal, and extracts the characteristic signal, uses the time domain analysis method or the frequency domain analysis method to analyze and identify the characteristic signal, and passes the recognition result through Display module display.
参图2所示,本实施例中的电子皮肤包括柔性的支撑层1、形成于支撑层1上表面的柔性的敏感层2,以及分别形成于敏感层2上表面和支撑层1下表面的上电极层3和下电极层4。2, the electronic skin in this embodiment includes a flexible support layer 1, a flexible sensitive layer 2 formed on the upper surface of the support layer 1, and a flexible sensitive layer 2 formed on the upper surface of the sensitive layer 2 and the lower surface of the support layer 1, respectively. Upper electrode layer 3 and lower electrode layer 4.
敏感层2的材料优选为PDMS(聚二甲基硅氧烷),敏感层2的材料还可以是其他高分子材料,如聚苯二甲酸乙二酯、聚乙烯醇、聚乙烯醇缩甲醛、聚乙烯中的任意一种或多种。The material of the sensitive layer 2 is preferably PDMS (polydimethylsiloxane), and the material of the sensitive layer 2 can also be other polymer materials, such as polyethylene phthalate, polyvinyl alcohol, polyvinyl formal, Any one or more of polyethylene.
敏感层2的上表面为非平面结构,优选为多个凸起的椎体21,每个椎体21的底面为为10μm×10μm的正方形,侧面与底面的夹角为54.7°,椎体高度为7.06μm ,椎体之间间距为10μm。The upper surface of the sensitive layer 2 is a non-planar structure, preferably a plurality of raised vertebral bodies 21, the bottom surface of each vertebral body 21 is a square of 10 μm×10 μm, the angle between the side surface and the bottom surface is 54.7°, and the height of the vertebral body is is 7.06μm, and the distance between vertebral bodies is 10μm.
在其他实施例中,敏感层2上表面的形状也可以为波浪状等其他非平面结构。In other embodiments, the shape of the upper surface of the sensitive layer 2 may also be other non-planar structures such as waves.
易于想到的是,敏感层2的下表面也可以设置为非平面形状,相应地,敏感层2的下表面也需要设置一层电极层。It is easy to imagine that the lower surface of the sensitive layer 2 can also be set in a non-planar shape, and correspondingly, an electrode layer also needs to be set on the lower surface of the sensitive layer 2 .
支撑层1优选为高透明高柔性的超薄PE(聚乙烯)薄膜,其厚度优选为12μm。The supporting layer 1 is preferably a highly transparent and highly flexible ultra-thin PE (polyethylene) film, and its thickness is preferably 12 μm.
PE薄膜作用在于帮助在硅晶片表面的图案化PDMS膜与模板能完整轻易分离,同时作为衬底支撑PDMS膜。The role of the PE film is to help the patterned PDMS film on the surface of the silicon wafer to be completely and easily separated from the template, and at the same time serve as a substrate to support the PDMS film.
上电极层3和下电极层4的材料选自金、铂、镍、银、铟、铜、铝、碳纳米管、石墨烯、银纳米线中的一种或多种的组合。The materials of the upper electrode layer 3 and the lower electrode layer 4 are selected from one or more combinations of gold, platinum, nickel, silver, indium, copper, aluminum, carbon nanotubes, graphene, and silver nanowires.
上述的电子皮肤,支撑层1和敏感层2的整体厚度小于70μm,该超薄电子皮肤具备与人体皮肤相同的柔软度及杨氏模量,重量也超轻轻,可以直接与皮肤黏合,是一种可穿戴性器件。In the above-mentioned electronic skin, the overall thickness of the support layer 1 and the sensitive layer 2 is less than 70 μm. This ultra-thin electronic skin has the same softness and Young’s modulus as human skin, and is also ultra-light in weight. It can be directly bonded to the skin. A wearable device.
上述的电子皮肤的制作方法如下:The manufacturing method of the above-mentioned electronic skin is as follows:
S1、制作可形成非平面结构的模板S1. Making templates that can form non-planar structures
本实施例利用MEMS加工制造技术中的光刻、刻蚀等工艺制作出具有微结构的模板(优选4寸硅晶片)。先将硅晶圆表面进行洁净处理,再旋涂光刻胶、前烘、光刻、显影、后烘,最后利用刻蚀将图形转移到硅晶圆,得到具有微结构的模板,具体制备方法如下:In this embodiment, a template with a microstructure (preferably a 4-inch silicon wafer) is produced by using photolithography, etching and other processes in the MEMS manufacturing technology. Clean the surface of the silicon wafer first, then spin-coat photoresist, pre-baking, photolithography, development, and post-baking, and finally transfer the pattern to the silicon wafer by etching to obtain a template with a microstructure. The specific preparation method as follows:
1、制板1. Board making
通过设计论证后利用做图软件绘制图纸,单纯的增加图案的宽度和高度以及图案之间的间距都有利于器件灵敏度的提高,但综合后,微图案优选为金字塔结构,塔底面为10μm×10μm的正方形,侧面与底面的 夹角为54.7°,塔顶到底面的距离为7.06μm ,图案间距为10μm,按照图纸的尺寸去做掩模板。After passing the design demonstration, use the drawing software to draw the drawings. Simply increasing the width and height of the pattern and the spacing between the patterns are conducive to improving the sensitivity of the device. However, after synthesis, the micropattern is preferably a pyramid structure, and the bottom surface of the tower is 10μm×10μm The angle between the side and the bottom is 54.7°, the distance between the top and the bottom of the tower is 7.06 μm, and the pattern pitch is 10 μm. Make a mask according to the size of the drawing.
2、准备4寸硅晶圆2. Prepare a 4-inch silicon wafer
硅晶圆采用4寸单面抛光,单面300nm热氧化SiO2层硅晶圆,MOS级丙酮、去离子水分别超声15分钟,然后MOS级乙醇超声10分钟后吹干,接下来105℃烘干10分钟。The silicon wafer is polished on one side of 4 inches, 300nm thermally oxidized SiO 2- layer silicon wafer on one side, MOS grade acetone and deionized water are ultrasonicated for 15 minutes, then MOS grade ethanol is ultrasonicated for 10 minutes and dried, and then baked at 105 °C Let dry for 10 minutes.
3、图形化光刻胶3. Patterned photoresist
a、甩胶:在准备好的4寸硅晶圆表面旋涂6-7um光刻胶,优选AZ4620,预转速500rpm 时间 6s,旋涂转速 400rpm 时间 30s ;a. Spin glue: Spin-coat 6-7um photoresist on the surface of the prepared 4-inch silicon wafer, preferably AZ4620, pre-rotate at 500rpm for 6s, and spin-coat at 400rpm for 30s;
b、前烘:在95°下前烘,210 秒;b. Pre-baking: pre-baking at 95° for 210 seconds;
c、曝光:使用MA6 接触式光刻机,在低真空模式下曝光 24 s;c. Exposure: Expose for 24 s in low vacuum mode using MA6 contact lithography machine;
d、显影:所用显影液的配比为四甲基氢氧化铵:去离子水=1:8,显影时间95 s;d. Development: The ratio of the developer used is tetramethylammonium hydroxide: deionized water = 1:8, and the development time is 95 s;
e、后烘:后烘 95°,180 秒。e. Post-baking: post-baking at 95° for 180 seconds.
4、图形转移至硅晶圆4. Graphic transfer to silicon wafer
a、去胶:等离子体去胶机去除显影后残留的光刻胶胶膜;a. Degumming: The plasma degumming machine removes the remaining photoresist film after development;
b、干法刻蚀:使用反应离子刻蚀(RIE)去除图形化的SiO2层,时间 6分钟b. Dry etching: use reactive ion etching (RIE) to remove the patterned SiO2 layer for 6 minutes
c、湿法定向刻蚀:用30% KOH溶液在78℃下刻蚀9分钟,最终在硅晶圆表面形成反四棱锥结构,参图3所示。c. Wet directional etching: use 30% KOH solution to etch at 78°C for 9 minutes, and finally form an inverted quadrangular pyramid structure on the surface of the silicon wafer, as shown in Figure 3.
、在模板表面形成一层有机物分子层, forming a layer of organic molecules on the surface of the template
在模板表面加工处理(如气相沉积或者熏涂)一层薄薄的有机物(三甲基氯硅烷或者全氟辛基三氯硅烷)分子层保证在硅晶片表面的PDMS膜与模板的能完整轻易分离。A thin layer of organic (trimethylchlorosilane or perfluorooctyltrichlorosilane) molecular layer is processed (such as vapor deposition or fumigation) on the surface of the template to ensure the integrity and ease of the PDMS film on the surface of the silicon wafer and the template. separate.
、在有机物分子层上形成敏感层, Form a sensitive layer on the organic molecular layer
接着在有机物分子层上旋涂(优选转速在3000r/min,时间30S)一种透明的液体高分子聚合物(如聚二甲基硅氧烷,优选引发剂和反应剂的配比量为质量比1:10,)使之均匀形成一层很薄(优选厚度为50μm)的薄膜。Then spin-coat (preferably at 3000r/min, time 30S) a transparent liquid polymer (such as polydimethylsiloxane) on the organic molecular layer, preferably the ratio of initiator and reactant is mass Ratio 1:10,) to make it evenly form a thin film (preferably 50μm in thickness).
、在敏感层上形成一层支撑层, forming a support layer on the sensitive layer
再在上述薄膜表面无缝无气泡(有气泡、缝隙的情况也包括在里面)地形成一层高透明高柔性的超薄PE(聚乙烯)薄膜(厚度优选为12μm)。Then, a layer of highly transparent and flexible ultra-thin PE (polyethylene) film (thickness is preferably 12 μm) is formed on the surface of the above film seamlessly without bubbles (bubbles and gaps are also included).
、热处理,将固化后的敏感层和支撑层从模板上剥离, heat treatment, peel off the cured sensitive layer and support layer from the template
再在真空环境下加热(优选温度在65~75℃)处理一段时间(优选2~3h)后等到上述液体高分子聚合物PDMS薄膜完全固化,同时和PE膜也完全融为一体,接下来把固化的高分子聚合物薄膜从硅晶片模板表面剥离下来,从而就把硅晶片模板上的微图案复形到PDMS柔性薄膜上制备出具有金字塔型微结构的薄膜,该薄膜整体厚度<70μm,如图4所示。Then heat it in a vacuum environment (preferably at 65-75°C) for a period of time (preferably 2-3 hours) and wait until the above-mentioned liquid polymer PDMS film is completely cured, and at the same time it is completely integrated with the PE film. The cured polymer film is peeled off from the surface of the silicon wafer template, so that the micropattern on the silicon wafer template is replicated on the PDMS flexible film to prepare a film with a pyramidal microstructure. The overall thickness of the film is <70 μm, such as Figure 4 shows.
、分别于敏感层的上表面以及支撑层的下表面形成上电极层和下电极层, forming an upper electrode layer and a lower electrode layer on the upper surface of the sensitive layer and the lower surface of the supporting layer respectively
最后在薄膜的上下表面分别均匀涂覆(如蒸镀、化学沉积等,本专利优选蒸镀)一层超薄纳米导电膜(本发明优选纯度为99.9999%的Au颗粒,蒸镀Au导电膜厚度为100nm),此时就形成了具有多个灵敏位点的超薄柔性导电电子皮肤。Finally, uniform coating (such as evaporation, chemical deposition, etc., this patent preferably evaporates) a layer of ultra-thin nano-conductive film (Au particles with a purity of 99.9999% in this invention, the thickness of the evaporated Au conductive film is uniformly coated on the upper and lower surfaces of the film. 100nm), at this time, an ultra-thin flexible conductive electronic skin with multiple sensitive sites is formed.
接着在超薄柔性导电电子皮肤上下面的Au纳米导电层上各引出(如粘压、焊接等,本专利优选粘压)一条柔性电极(如直径0.1mm漆包线、20μm厚且带有压敏胶粘剂的扁平铜箔胶带、柔韧超薄(10μm厚)的铜箔,本专利优选柔韧超薄的铜箔)。Then a flexible electrode (such as enameled wire with a diameter of 0.1mm, 20μm thick and with pressure-sensitive adhesive) is drawn out (such as bonding, welding, etc., this patent is preferably bonding) on the Au nano-conductive layer on the upper and lower layers of the ultra-thin flexible conductive electronic skin. flat copper foil tape, flexible and ultra-thin (10μm thick) copper foil, this patent is preferably flexible and ultra-thin copper foil).
最后旋涂(优选转速在5000r/min,时间30S)一层PDMS,使之均匀形成一层很薄(厚度<10μm)的Au导电层的保护层,就构筑成了电容式超薄柔性电子皮肤。Finally, a layer of PDMS is spin-coated (preferably at 5000r/min, time 30S) to uniformly form a thin (thickness <10μm) protective layer of Au conductive layer, and a capacitive ultra-thin flexible electronic skin is constructed. .
选取一片超薄柔性电子皮肤,物理切割出大小不等的2小片(优选出15mm×15 mm和20mm×15 mm的2片),再分别在这些小片有图案面的一条边缘上固定住柔性导线来制作电极,最后在透明衬底上(如玻璃,PDMS膜等,本专利优选厚度为2mm的PDMS膜)将这两片有图案面无缝贴合起来就构成了超薄可穿戴式柔性器件。Select a piece of ultra-thin flexible electronic skin, physically cut out 2 small pieces of different sizes (preferably 2 pieces of 15mm×15 mm and 20mm×15 mm), and then fix the flexible wires on one edge of the patterned surface of these small pieces respectively To make electrodes, and finally on a transparent substrate (such as glass, PDMS film, etc., this patent prefers a PDMS film with a thickness of 2mm) to seamlessly bond the two patterned surfaces to form an ultra-thin wearable flexible device .
器件在裸片情况下,使用电阻测量工具测量其基本阻抗,同时加上一个小电压(优选2~5V);在器件空载状态下用示波器测试其背景噪音,接着采集发音时声带的振动信号发现背景噪音过大,振动信号无法从噪声中有效的筛选出来。经过我们外端电路测试和分析以及对器件进行优化,将器件放在声带上时由于声带的振动使传感器阻抗产生较大变化,在采样电阻上产生的电压波动的范围高于示波器测量出来的背景噪声,所产生的电压跳变电平可以从噪声电平中分离出来,进而被测试电路识别。再借助电路中的滤波装置将背景噪声信号滤掉就得到有效的脉搏波信号,经放大电路将信号放大后利用无线蓝牙发射技术将信号发射到显示器上的接收装置从而将发音时声带振动波同步的在显示器上显示出来。When the device is on the bare chip, use a resistance measuring tool to measure its basic impedance, and at the same time add a small voltage (preferably 2-5V); use an oscilloscope to test its background noise when the device is in an unloaded state, and then collect the vibration signal of the vocal cords during pronunciation It is found that the background noise is too large, and the vibration signal cannot be effectively screened out from the noise. After testing and analyzing the external circuit and optimizing the device, when the device is placed on the vocal cord, the impedance of the sensor will change greatly due to the vibration of the vocal cord, and the range of voltage fluctuations generated on the sampling resistor is higher than the background measured by the oscilloscope Noise, the resulting voltage transition level can be separated from the noise level and identified by the test circuit. Then use the filtering device in the circuit to filter out the background noise signal to obtain an effective pulse wave signal. After the signal is amplified by the amplifier circuit, the signal is transmitted to the receiving device on the display using wireless Bluetooth transmission technology to synchronize the vocal fold vibration wave during pronunciation. displayed on the display.
参图5所示,将器件粘贴在声带处,当我们说话发音时声带会产生相应的振动,传感器会自动收集振动信号,经外电路的转换识别后利用蓝牙发射到显示器上(优选7寸pad),显示器上的波形会根据发音的轻重、长短等而出现振幅、频率不同的波形。As shown in Figure 5, paste the device on the vocal cords. When we speak and pronounce, the vocal cords will vibrate accordingly, and the sensor will automatically collect the vibration signals. After the conversion and recognition of the external circuit, it will be transmitted to the display using Bluetooth (preferably 7-inch pad ), the waveform on the display will show waveforms with different amplitudes and frequencies according to the severity and length of the pronunciation.
需要说明的是,在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括所述要素的过程、方法、物品或者设备中还存在另外的相同要素。It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is a relationship between these entities or operations. There is no such actual relationship or order between them. Furthermore, the term "comprises", "comprises" or any other variation thereof is intended to cover a non-exclusive inclusion such that a process, method, article or apparatus comprising a set of elements includes not only those elements, but also includes elements not expressly listed. other elements of or also include elements inherent in such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article or apparatus comprising said element.
以上所述仅是本申请的具体实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本申请原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本申请的保护范围。The above description is only the specific implementation of the present application. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present application, some improvements and modifications can also be made. It should be regarded as the protection scope of this application.
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