CN104570285A - F-theta optical lens and laser processing system - Google Patents
F-theta optical lens and laser processing system Download PDFInfo
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- CN104570285A CN104570285A CN201510060642.5A CN201510060642A CN104570285A CN 104570285 A CN104570285 A CN 104570285A CN 201510060642 A CN201510060642 A CN 201510060642A CN 104570285 A CN104570285 A CN 104570285A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 64
- 238000012545 processing Methods 0.000 title claims abstract description 31
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- 238000003384 imaging method Methods 0.000 abstract description 11
- 230000004075 alteration Effects 0.000 abstract description 9
- 230000000007 visual effect Effects 0.000 abstract description 7
- 238000012544 monitoring process Methods 0.000 abstract description 3
- 230000005499 meniscus Effects 0.000 abstract 2
- 238000005286 illumination Methods 0.000 description 10
- 238000013461 design Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
- G02B13/002—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface
- G02B13/0035—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface having three lenses
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Abstract
The invention is suitable for the optical field, and provides an F-theta optical lens, and a laser processing system. The optical lens comprises a first lens, a second lens and a third lens orderly and coaxially arranged along a transmission direction of an incident laser; the first lens is a concave-convex type concave lens, the second lens is a meniscus convex lens, and the third lens is a meniscus convex lens. The phase difference of the lighting luminous is corrected while the phase difference of the processed laser is corrected by designing the optical structure, the vast majority of imaging aberration is eliminated, the lighting luminous is capable of measuring and monitoring the visual image in positioning in a processing range in match with industrial lenses with different focal lengths; the F-theta optical lens is compact in integral structure, small in processing focusing facula and centralized in energy.
Description
Technical field
The invention belongs to optical design arts, particularly relate to a kind of F-theta optical lens and laser-processing system.
Background technology
Laser processing technology has been widely used in various finishing field, and the Laser Processing of carrying machine vision also becomes the trend of industry development, need to use F-theta optical lens in machine vision processing, it is a kind of Large visual angle, small aperture, the photographic lens of middle long-focus, the general rectification only carrying out differing for optical maser wavelength of traditional F-theta optical lens, when CCD vision is taken pictures, illumination light (or visible ray) can produce larger aberration after this optical lens, particularly aberration and the curvature of field, this makes this camera lens directly to coordinate the imaging devices such as CCD to carry out vision location and measurement, especially be not suitable for being used in the system of Laser Processing and visual imaging same light path, and then seriously limit the application of laser-processing system of carrying machine vision.
Summary of the invention
The object of the embodiment of the present invention is to provide a kind of F-theta optical lens, cannot carry out differing the problem of correcting to illumination light while correcting processing laser difference to solve existing optical lens.
The embodiment of the present invention is achieved in that a kind of F-theta optical lens, comprises the first lens, the second lens, the 3rd lens of the transmission direction coaxial setting successively along incident laser; Described first lens are concave-convex type negative lens, and described second lens are curved month type positive lens, and described 3rd lens are curved month type positive lens;
Described first lens comprise first surface and the second curved surface, the second lens comprise the 3rd curved surface and the 4th curved surface, the 3rd lens comprise the 5th curved surface and the 6th curved surface, two curved surfaces of each lens are light entrance face and the light-emitting face of lens respectively, and first surface is arranged to the 6th curved surface successively along the transmission direction of incident ray; Described first surface all protrudes to light transmission direction to the center section of the 6th curved surface;
Described first surface is followed successively by-44.592 ,-194.09 ,-146.9 ,-61.76 ,-4000 ,-131.49 to the radius-of-curvature of the 14 curved surface; The margin tolerance of each described radius-of-curvature is ± and 5%.
Further, the center thickness of described first lens is 3.93mm; The center thickness of described second lens is 14.7mm; The center thickness of described 3rd lens is 14.55mm; The margin tolerance of each described center thickness is ± and 5%.
Further, the refractive index of described first lens is 1.78/25.7 with the ratio of Abbe number; The refractive index of described second lens is 1.90/31.3 with the ratio of Abbe number; The described refractive index of the 3rd lens is 1.90/31.3 with the ratio of Abbe number; Each described refractive index is 5% with the margin tolerance of the ratio of Abbe number.
Further, described first lens and the spacing of the second lens on optical axis are 1.59mm; Described second lens and the spacing of the 3rd lens on optical axis are 0.2mm; The margin tolerance of each described spacing is ± and 5%.
Further, also comprise the 4th lens of the light emission side being positioned at described 3rd lens, described 4th lens comprise the 7th curved surface and the 8th curved surface, and the radius-of-curvature of described 7th curved surface and the 8th curved surface is ∞.
Further, the described refractive index of the 4th lens is 1.52/64.2 with the ratio of Abbe number, and described refractive index is 5% with the margin tolerance of the ratio of Abbe number.
Further, the thick end, center of described 4th lens is 4mm, and the margin tolerance of described center thickness is ± 5%.
Further, described 3rd lens and the spacing of described 4th lens on optical axis are 2mm, and the margin tolerance of described spacing is ± 5%.
The embodiment of the present invention also provides a kind of laser-processing system, and comprise laser instrument and use laser to carry out the optical lens processed, described optical lens adopts the F-theta optical lens in above-described embodiment described in any one.
Further, also comprise and carry out vision positioning device, the image location wavelength of described vision positioning device is 630nm, and described Laser Processing wavelength is 1064nm.
The invention provides by a kind of F-theta optical lens and laser-processing system, by the design to optical texture, carry out differing correcting to illumination light while correcting processing laser difference, eliminate most imaging aberration, illumination light coordinates the industrial lens of different focal can carry out vision imaging location survey and monitoring in the range of work.F-theta optical lens one-piece construction of the present invention is very compact, and processing focal beam spot is little, concentration of energy, pilot light overlap completely with laser and other industrial lens can be coordinated to carry out coaxial vision location, measurement and supervision.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the embodiment of the present invention, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of the F-theta optical lens that the embodiment of the present invention provides;
Fig. 2 is the laser disperse figure of the F-theta optical lens that the embodiment of the present invention provides;
Fig. 3 is the laser curvature of field and the distortion figure of the F-theta optical lens that the embodiment of the present invention provides;
Fig. 4 is the optical transfer function curve map of the F-theta optical lens that the embodiment of the present invention provides.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
As shown in Figure 1, the embodiment of the present invention provides a kind of F-theta optical lens, comprises the first lens L1, the second lens L2, the 3rd lens L3 of the transmission direction coaxial setting successively along incident laser; Described first lens L1 is concave-convex type negative lens, and described second lens L2 is curved month type positive lens, and described 3rd lens L3 is curved month type positive lens; Described first lens L1 comprises first surface S1 and the second curved surface S2, the second lens L2 comprises the 3rd curved surface S3 and the 4th curved surface S4, the 3rd lens L3 comprise the 5th curved surface S5 and the 6th curved surface S6, and described first surface is arranged to the 6th curved surface successively along the transmission direction of incident ray; Two curved surfaces of each lens are light entrance face and the light-emitting face of lens respectively, as first surface S1 be light entrance face, the second curved surface S2 is light-emitting face; Described first surface all protrudes to light transmission direction to the center section of the 6th curved surface.
The present embodiment is optimized design to parameters such as the radius-of-curvature of each lens surface and the center thicknesses of lens.Concrete, the radius of curvature R 1 of the first surface S1 of described first lens L1 is-44.592mm, the radius of curvature R 2 of the second curved surface S2 is-194.09mm, wherein, negative sign represents that the centre of sphere of curved surface is positioned at the object space of curved surface, positive sign (being just without minus sign in the present embodiment) represents that the centre of sphere of curved surface is positioned at the image space of curved surface, below in like manner.In addition, the center thickness d1 (i.e. the thickness of the first lens L1 on optical axis) of the first lens L1 is 3.93mm, and the refractive index Nd1 of the first lens L1 is 1.78/25.7 with the ratio of Abbe number Vd1., all there is the margin tolerance of ± 5%, namely allow each parameter to change in ± 5% scope in above-mentioned each parameter non-exclusive alternative.
The radius of curvature R 3 of the 3rd curved surface S3 of described second lens L2 is-146.9mm, the radius of curvature R 4 of the 4th curved surface S4 is-61.76mm, the center thickness d3 of the second lens L2 is 14.7mm, the refractive index Nd2 of the second lens L2 is 1.90/31.3 with the ratio of Abbe number Vd2, and the margin tolerance of each parameter of the second lens L2 is still ± 5%.
The radius of curvature R 5 of the 5th curved surface S5 of described 3rd lens L3 is-4000mm, the radius of curvature R 6 of the 6th curved surface S6 is-131.49mm, the center thickness d5 of the 3rd lens L3 is 14.55mm, the refractive index Nd3 of the 3rd lens L3 is 1.90/31.3 with the ratio of Abbe number Vd3, and the margin tolerance of each parameter of the 3rd lens L3 is still ± 5%.
And, the embodiment of the present invention is to the distance between the first lens L1 and the second lens L2, and second distance between lens L2 and the 3rd lens L3 limit, concrete, the second curved surface S2 (light-emitting face) of above-mentioned first lens L1 and the 3rd spacing d2 of curved surface S3 (light entrance face) on optical axis of the second lens L2 are 1.59mm, margin tolerance is ± 5%, the 4th curved surface S4 (light-emitting face) of the second lens L2 and the 5th spacing d4 of curved surface S5 (light entrance face) on optical axis of the 3rd lens L3 are 0.2mm, and margin tolerance is ± 5%.
In other embodiments, described F-theta optical lens also comprises the 4th lens L4 of the light emission side being positioned at described 3rd lens L3, described 4th lens L4 comprises the 7th curved surface S7 and the 8th curved surface S8, and radius of curvature R 7, the R8 of described 7th curved surface S7 and the 8th curved surface S8 are ∞.
The described refractive index Nd4 of the 4th lens L4 is 1.52/64.2 with the ratio of Abbe number Vd4, and described refractive index Nd4 is ± 5% with the margin tolerance of the ratio of Abbe number Vd4.
The center thickness d7 of described 4th lens L4 is 4mm, and the margin tolerance of described center thickness is ± 5%.
Described 3rd lens L3 and the described 4th spacing d6 of lens L4 on optical axis is 2mm, and the margin tolerance of described spacing d6 is ± 5%.
Illustrate more clearly below by way of table 1 pair such scheme:
Table 1 F-theta optical lens structural parameters
After adopting above-mentioned optical design, shown F-theta optical lens can carry out good aberration correction, except normal weld function, correct the various aberrations of 630nm wave band preferably, different CCTV camera lens or other industrial lens butt welding can be coordinated to tap into the visual processes such as row image location simultaneously.Wherein welding laser main wave long is 1064nm, and image location predominant wavelength is 630nm.
The laser disperse figure of the F-theta optical lens that Fig. 2 provides for the embodiment of the present invention, the shape of laser disc of confusion and size reflect the aberration that this camera lens corresponds to laser, be 26.843um from its maximum RMSRADIUS (root mean square) disc of confusion radius of figure, when showing to carry out Laser Processing with this F-theta optical lens, its concentration of energy degree is better, can meet existing welding or other processing requests.
Fig. 3 is the laser curvature of field and the distortion figure of the F-theta optical lens that the embodiment of the present invention provides, scanning galvanometer is coordinated to use during Laser Processing, its distortion corresponds to F-theta distortion (when abnormal vanishing image height Y=f* θ, wherein f is lens focus, and θ is laser incident angle).Considering that under scan module repetitive positioning accuracy, General Requirements F-theta distortion is less than 0.5%.When the laser curvature of field is Laser Processing, the different visual field of its focal plane bend degree, can find out from the laser field diagram of Fig. 3, maximum curvature of field corresponding to 1 visual field (± 25 ° of incident angles) is 0.3mm.
Fig. 4 is the optical transfer function curve map of the F-theta optical lens that the embodiment of the present invention provides, as can be seen from MTF curve above, under red illumination, whole-view field imaging is clear, and different CCTV camera lens or other industrial lens butt welding can be coordinated under red illumination to tap into the visual processes such as row image location.
After carrying out above-mentioned design to each lens, the focal length of described F-theta optical lens camera lens is 170mm, and laser wavelength of incidence is 1064nm, pilot light predominant wavelength and vision imaging illumination are ruddiness 630nm, field angle is ω, wherein 2 ω=50 °, and working (finishing) area is 110*110mm
2.Because design eliminates most imaging aberration at 630nm wave band, it coordinates the industrial lens of different focal can carry out vision imaging location survey and monitoring in the range of work under red illumination.F-theta optical lens one-piece construction of the present invention is very compact, and processing focal beam spot is little, concentration of energy, pilot light overlap completely with laser and other industrial lens can be coordinated to carry out coaxial vision location, measurement and supervision.
The embodiment of the present invention also provides a kind of laser-processing system, and comprise laser instrument and use laser to carry out the optical lens processed, described optical lens adopts the F-theta optical lens in above-described embodiment described in any one.
Further, described laser-processing system also comprises carries out vision positioning device, and the image location wavelength of described vision positioning device is 630nm, and described Laser Processing wavelength is 1064nm.
Owing to have employed the F-theta optical lens described in the embodiment of the present invention in vision processing, aberration correction can be carried out to laser and illumination light simultaneously, make it to carry out high precision imaging while the technical requirement meeting Laser Processing, imaging lens can be coordinated to carry out coaxial image location, measurement and supervision when red illumination, thus facilitate the application of the laser-processing system of carrying machine vision.
Above content is in conjunction with concrete preferred implementation further description made for the present invention, can not assert that specific embodiment of the invention is confined to these explanations.For general technical staff of the technical field of the invention; make some equivalent alternative or obvious modification without departing from the inventive concept of the premise; and performance or purposes identical, all should be considered as belonging to the scope of patent protection that the present invention is determined by submitted to claims.
Claims (10)
1. a F-theta optical lens, is characterized in that, comprises the first lens, the second lens, the 3rd lens of the transmission direction coaxial setting successively along incident laser; Described first lens are concave-convex type negative lens, and described second lens are curved month type positive lens, and described 3rd lens are curved month type positive lens;
Described first lens comprise first surface and the second curved surface, the second lens comprise the 3rd curved surface and the 4th curved surface, the 3rd lens comprise the 5th curved surface and the 6th curved surface, two curved surfaces of each lens are light entrance face and the light-emitting face of lens respectively, and first surface is arranged to the 6th curved surface successively along the transmission direction of incident ray; Described first surface all protrudes to light transmission direction to the center section of the 6th curved surface;
Described first surface is followed successively by-44.592 ,-194.09 ,-146.9 ,-61.76 ,-4000 ,-131.49 to the radius-of-curvature of the 14 curved surface; The margin tolerance of each described radius-of-curvature is ± and 5%.
2. F-theta optical lens as claimed in claim 1, is characterized in that,
The center thickness of described first lens is 3.93mm;
The center thickness of described second lens is 14.7mm;
The center thickness of described 3rd lens is 14.55mm;
The margin tolerance of each described center thickness is ± and 5%.
3. F-theta optical lens as claimed in claim 1, is characterized in that,
The refractive index of described first lens is 1.78/25.7 with the ratio of Abbe number;
The refractive index of described second lens is 1.90/31.3 with the ratio of Abbe number;
The described refractive index of the 3rd lens is 1.90/31.3 with the ratio of Abbe number;
Each described refractive index is 5% with the margin tolerance of the ratio of Abbe number.
4. F-theta optical lens as claimed in claim 1, is characterized in that,
Described first lens and the spacing of the second lens on optical axis are 1.59mm;
Described second lens and the spacing of the 3rd lens on optical axis are 0.2mm;
The margin tolerance of each described spacing is ± and 5%.
5. the F-theta optical lens as described in claim 1-4 any one, it is characterized in that, also comprise the 4th lens of the light emission side being positioned at described 3rd lens, described 4th lens comprise the 7th curved surface and the 8th curved surface, and the radius-of-curvature of described 7th curved surface and the 8th curved surface is ∞.
6. F-theta optical lens as claimed in claim 5, it is characterized in that, the described refractive index of the 4th lens is 1.52/64.2 with the ratio of Abbe number, and described refractive index is 5% with the margin tolerance of the ratio of Abbe number.
7. F-theta optical lens as claimed in claim 6, it is characterized in that, the thick end, center of described 4th lens is 4mm, and the margin tolerance of described center thickness is ± 5%.
8. F-theta optical lens as claimed in claim 7, it is characterized in that, described 3rd lens and the spacing of described 4th lens on optical axis are 2mm, and the margin tolerance of described spacing is ± 5%.
9. a laser-processing system, comprise laser instrument and use laser to carry out the optical lens processed, it is characterized in that, described optical lens adopts the F-theta optical lens described in claim 1-8 any one.
10. laser-processing system as claimed in claim 9, is characterized in that, also comprise and carry out vision positioning device, and the image location wavelength of described vision positioning device is 630nm, and described Laser Processing wavelength is 1064nm.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108169883A (en) * | 2017-12-27 | 2018-06-15 | 大族激光科技产业集团股份有限公司 | A kind of laser lens and laser system for cleaning on a large scale |
| CN108415147A (en) * | 2018-05-14 | 2018-08-17 | 南京波长光电科技股份有限公司 | A kind of F-Theta camera lenses |
| CN108717226A (en) * | 2018-08-08 | 2018-10-30 | 深圳市吉斯迪科技有限公司 | A kind of medical F-theta optical lens of laser |
| CN108873257A (en) * | 2018-07-11 | 2018-11-23 | 大族激光科技产业集团股份有限公司 | Lens group and laser process equipment |
| CN109507199A (en) * | 2018-12-24 | 2019-03-22 | 欣辰卓锐（苏州）智能装备有限公司 | A kind of multi-directional vision detection system simultaneously |
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| JPH01155311A (en) * | 1987-12-11 | 1989-06-19 | Minolta Camera Co Ltd | F-theta lens |
| CN101369047A (en) * | 2008-04-28 | 2009-02-18 | 深圳市大族激光科技股份有限公司 | Optical lens |
| CN101414047A (en) * | 2008-04-28 | 2009-04-22 | 深圳市大族激光科技股份有限公司 | Optical lens |
| US20140340558A1 (en) * | 2013-05-20 | 2014-11-20 | Canon Kabushiki Kaisha | Ocular optical system and image pick-up apparatus incorporating the same |
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2015
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| JPH01155311A (en) * | 1987-12-11 | 1989-06-19 | Minolta Camera Co Ltd | F-theta lens |
| CN101369047A (en) * | 2008-04-28 | 2009-02-18 | 深圳市大族激光科技股份有限公司 | Optical lens |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108169883A (en) * | 2017-12-27 | 2018-06-15 | 大族激光科技产业集团股份有限公司 | A kind of laser lens and laser system for cleaning on a large scale |
| CN108415147A (en) * | 2018-05-14 | 2018-08-17 | 南京波长光电科技股份有限公司 | A kind of F-Theta camera lenses |
| CN108873257A (en) * | 2018-07-11 | 2018-11-23 | 大族激光科技产业集团股份有限公司 | Lens group and laser process equipment |
| CN108717226A (en) * | 2018-08-08 | 2018-10-30 | 深圳市吉斯迪科技有限公司 | A kind of medical F-theta optical lens of laser |
| CN109507199A (en) * | 2018-12-24 | 2019-03-22 | 欣辰卓锐（苏州）智能装备有限公司 | A kind of multi-directional vision detection system simultaneously |
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| CN104570285B (en) | 2017-01-18 |
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